WO2006051057A1 - Dispositif et procede de compensation pour capteurs de valeur de mesure - Google Patents

Dispositif et procede de compensation pour capteurs de valeur de mesure Download PDF

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Publication number
WO2006051057A1
WO2006051057A1 PCT/EP2005/055696 EP2005055696W WO2006051057A1 WO 2006051057 A1 WO2006051057 A1 WO 2006051057A1 EP 2005055696 W EP2005055696 W EP 2005055696W WO 2006051057 A1 WO2006051057 A1 WO 2006051057A1
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WO
WIPO (PCT)
Prior art keywords
transducers
measured
value
disturbance
compensation
Prior art date
Application number
PCT/EP2005/055696
Other languages
German (de)
English (en)
Inventor
Dietfried Burczyk
Wolfgang Dannhauer
Fred Haker
Andrej Kalendarev
Hans-Jürgen Piersig
Original Assignee
Endress+Hauser Gmbh+Co. Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress+Hauser Gmbh+Co. Kg filed Critical Endress+Hauser Gmbh+Co. Kg
Publication of WO2006051057A1 publication Critical patent/WO2006051057A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G01L1/2281—Arrangements for correcting or for compensating unwanted effects for temperature variations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2268—Arrangements for correcting or for compensating unwanted effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/025—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning with temperature compensating means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/12—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor
    • G01L9/125—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in capacitance, i.e. electric circuits therefor with temperature compensating means

Definitions

  • the present invention relates to a device and a method for compensating transducers.
  • Transducers in the sense of the invention can be, for example, transducers of process measuring technology, in particular pressure transducers, flow transducers, fill level transducers, potentio metric transducers, amperometric transducers, photometric transducers, spectrometric transducers and moisture measuring transducers.
  • Transducers convert a measured variable into a sensor signal, wherein the
  • Transducer often have a cross-sensitivity to a disturbance.
  • the disturbance may be, for example, a temperature. It is therefore customary to compensate transducers over the range of application of the measured variable and the disturbance variable in order to obtain a sensor signal which is in a defined, preferably proportional, relationship with the measured variable.
  • Pressure transducers in the sense of the invention comprise transducers for absolute pressure, relative pressure or differential pressure.
  • a pressure-dependent change in capacitance is converted into a pressure-dependent primary electrical signal, which, however, is dependent on interference variables such as temperature.
  • the primary signal is compared with the actual reference values with respect to zero point and span as well as the characteristic curve at different temperatures and pressure values.
  • the coefficients for minimizing the characteristic curves and temperature errors are determined on the basis of the comparison of the measured values with the reference values via a mathematical model with an equation system of the nth order.
  • the coefficients are finally stored in a memory of the sensor electronics.
  • a grid of interpolation points can also be stored, an interpolation calculation taking place between these interpolation points.
  • the coefficients are finally stored in a memory of the sensor electronics.
  • a grid of interpolation points can also be stored, an interpolation calculation taking place between these interpolation points.
  • Prerequisite for the compensation is a characteristic measurement in the entire temperature range of the sensor, for example -40 ° C to 85 ° C with interpolation points at room temperature and intermediate temperatures such. -10 ° C and 50 ° C.
  • the compensation arrangement comprises, for example, a temperature control device for controlling the temperature of the measured value sensors as well as pressure supply lines and electrical connections for each individual sensor.
  • a pressure characteristic is recorded in each case.
  • the interrogation of the output signal is carried out by means of a scanner or measuring point selector switch.
  • each measuring cell being addressed individually.
  • Data record recorded the reference pressure, the operating voltage and the Sen ⁇ sensor signals to pressure and temperature and was averaged over 30 measurements.
  • the measured value recording takes, for example, in a batch with 120 Meßwert ⁇ and 30 measurements per record and measuring point about 3 minutes per measurement point for the entire batch.
  • this is disadvantageous with regard to the total duration of the compensation and, on the other hand, it is worth improving for the accuracy of the compensation since it is difficult to keep the predetermined pressure and temperature exactly constant over a period of 3 minutes.
  • the present invention is therefore based on the object, an apparatus and a method for improved compensation of transducers, ins ⁇ particular Druckmesswertaufêt provide.
  • the inventive compensation device for a variety of
  • a measured variable adjuster for setting reference values of the measured variable to which the transducers are exposed
  • a disturbance divider for setting values of the disturbance to which the transducers are exposed
  • a data acquisition device for reading out measured data sets of the individual transducers, wherein the measured data sets contain at least one value representing the measured variable
  • the compensation system further comprises a trigger signal output, and
  • Each data recorder is assigned a data memory with control electronics, which is operatively connected to the trigger signal output, wherein the current measurement data record of the associated sensor is simultaneously stored in each of the data memory after the output of a trigger signal at the trigger signal output.
  • the control electronics may in particular comprise a microprocessor.
  • the data storage device associated with the measuring transducer can be, for example, memory modules, which are each part of the sensor and, if appropriate, are functionally connected to the correction circuit.
  • the data storage associated with the transducer may be components of the compensation device operatively connected to the associated transducers.
  • each sensor is further associated with an analog / digital converter (ADC), via which the measurement data records are read into the data memory.
  • ADC analog / digital converter
  • the transducers have a certain step of their production Correction circuit, which processes the primary signal on the basis of Kompensations ⁇ parameters and each detected value of the disturbance and generates a Aus ⁇ output signal which is to represent the measured variable after compensation regardless of the disturbance, the compensation parameters are determined using the compensation device.
  • the compensation device it is fundamentally irrelevant whether or not the transducers already have the correction circuit in the compensation device during the compensation.
  • the interfaces to the transducers are to be designed according to the equipment of the transducers.
  • the transducers likewise each have a disturbance variable sensor for detecting the disturbance variable as of a specific step in their production, since a current value of the disturbance variable is indispensable for processing the primary signal of the measured variable.
  • a current value of the disturbance variable is indispensable for processing the primary signal of the measured variable.
  • the transducers already have the disturbance variable sensor during the compensation in the compensation device. If, for example, the disturbance variable is identical for a given disturbance variable value over the entire compensation device, and the accuracy of disturbance measurement with subsequently installed disturbance sensors is unproblematic, an individual measurement of the disturbance variables at the location of the respective transducer can be dispensed with during the compensation , Accordingly, in this case the incorporation of the interference quantity sensors in the transducers prior to the compensation is not absolutely necessary.
  • the transducers If, on the other hand, the value of the disturbance variable on the one hand spatially varies over the Kompensations ⁇ , or if on the other hand have the measurement behavior of Störgrö ⁇ tex-sensoren production-dependent fluctuations, it is advisable if the transducers already have a disturbance variable sensor at the time of compensation in the Kompensations ⁇ so that its Störuccn- measured values of the disturbance in the respective measurement data set can be detected.
  • the compensation device can furthermore have a data processing unit for determining the compensation parameters on the basis of the read-out measurement data sets.
  • the acquired measurement data sets can be transmitted to a data processing unit separate from the compensation device in order to have the compensation parameter determined by it.
  • the measured data records can contain, for example, in addition to the value representing the measured variable, a value representing the disturbance variable which was measured by the respective disturbance variable sensor. Further additional parameters, such as, for example, the respective supply voltage, can also be used with the individual ones Measurement data sets are stored in the respective data storage associated with the transducer. The storage of said additional information with the individual transducers is particularly advantageous if a variance of the corresponding variables such as interference value or value of the supply voltage is to be expected via the plurality of transducers via the compensation device.
  • the read-out time increases.
  • given variables such as the reference value of the measured variable and the predetermined value of the disturbance variable can also be assigned to the measured data sets at another point or at a different time, for example in the data processing unit when determining the individual compensation parameters for the plurality of Meßwert ⁇ sensor.
  • the assignment is readily possible, for example, via the identification data of the measurement data record.
  • the advantage of the invention is twofold. First, the next reference value for the measured variable and / or the next value for the disturbance variable can already be set by the compensation device immediately after the measurement data sets of all transducers of a batch have been recorded and stored synchronously. Meanwhile, the data memories of the individual transducers can be read out without delay for the entire compensation process by means of the data acquisition device sequentially. Secondly, the reference value of the measured variable only has to be kept constant for a short time in order to achieve as uniform boundary conditions as possible for the compensation of all sensor modules.
  • the inventive method for compensating a batch of Meßwert ⁇ sensors which comprises a plurality of transducers, wherein
  • the transducers each generate a dependent of the measured variable primary signal having cross-sensitivities to a disturbance variable
  • the method comprises the following steps:
  • Measurement data records from the plurality of data memories take place simultaneously with the setting of a new value pair of value pairs of a reference value of the measured variable and a disturbance variable value of the disturbance variable.
  • the method according to the invention relates in particular to the measuring probes discussed above and can be carried out in particular by means of the compensation device according to the invention.
  • FIG. 1 shows a block diagram for illustrating the mode of operation of the device according to the invention
  • the compensating device shown in FIG. 1 comprises a compensating body 1 with N sensor module receptacles.
  • a tempering device 60 serves as a disturbance size divider.
  • the compensating body 1 is fed by means of the tempering device 60, which comprises a circulating thermostat, with a tempered liquid temperature control medium via Temperiermedien Gustaven 65, whereby the temperature of the Kompensati ⁇ ons stressess can be set to values between -40 ° C and 200 ° C exactly.
  • the circulating thermostat has in the described embodiment, a heating power of 3kW and a cooling capacity of about 1 kW.
  • Cylindrical pressure transducers which are inserted into the sensor receptacles of the compensation body 1, do not come into direct contact with the temperature control medium. Instead, by means of a close thermal coupling between the sensor modules and the compensation body, the comparatively low thermal mass of the sensor modules and an adequate guidance of the tempering liquid in the compensation body, a tempering of the sensor modules in a minute is achieved. scored. For example, a temperature change from 80 C to - 20 C within 15 min is possible.
  • the temperature control device 60 is controlled by a central control unit 50 which communicates with the temperature control device via a data bus, for example an IEEE 488 data bus. It can be approached any number of temperature levels, what u. a. a compensation of higher orders allowed.
  • the N sensor receptacles can be supplied to a programmable pressure regulator 70 with a pressure which is required for characteristic curve measurement at the most varied temperatures for the sensor modules.
  • the pressure regulator 70 is also controlled by the central control unit 50.
  • the pressure regulator serves as a reference value adjuster to this extent.
  • any conventional temperature cabinets with suitable pressure actuators can also be used.
  • the device according to the invention comprises means 51 for the computer-aided archiving of the measurement data in a database system, so that by means of this data arbitrary report and product-specific protocols can be created.
  • continuous process control via statistical methods is possible.
  • the pressure transducers comprise, in addition to a pressure measuring cell and a temperature sensor, an integrated circuit board with an ASIC, as well as a standard interface to customer-specific functional electronics, for example for voltage, current, switching functions and data exchange.
  • the circuit board is u. a. the uniform electrical contact during the compensation process.
  • the transducers have on the printed circuit board a writable memory element, e.g. an EEPROM or a flash memory, wherein the writable memory element can be integrated into a microcontroller.
  • a writable memory element e.g. an EEPROM or a flash memory
  • the determined compensation parameters e.g. Coefficients for a polynomial compensation model filed.
  • Control unit can be done, for example via the data bus 55, and a scanner 80 with an ASIC interface, the latter reads out measurement data sets.
  • a trigger signal is output to each sensor via the data bus, whereupon the simultaneous pressure and temperature measurement and the simultaneous recording of the measurement data records in the respective memory elements of the transducers takes place.
  • the scanner 80 scans interface lines 82 to the sensor modules in succession and reads out the measurement records sequentially.
  • the measured data records comprise the pressure measured by the pressure transducer, the temperature at the location of the pressure measurement value. sensor, which was measured with the internal temperature sensor of the pressure sensor.
  • the reference pressure value is assigned in a currently preferred embodiment, the retrieved measurement data only later.
  • the measured data set can subsequently be assigned a temperature value, which was measured in the compensation body, as the reference value, in order to calibrate the internal temperature sensor of the individual pressure transducers in each case.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

La présente invention concerne un dispositif de compensation destiné à une pluralité de capteurs de valeur de mesure utilisés pour détecter une valeur de mesure, les capteurs de valeur de mesure produisant un signal primaire qui dépend de la valeur de mesure, avec des sensibilités transversales aux grandeurs parasites, et présentant selon l'invention un capteur de grandeur parasite et un circuit de correction qui servent à traiter le signal primaire au moyen de paramètres de compensation pour donner un signal de sortie corrigé. Le dispositif de compensation comprend une pluralité d'éléments de détection; un élément de réglage de grandeur de mesure qui sert à régler des valeurs de référence de la grandeur de mesure; un élément de réglage de grandeur parasite qui sert à régler différentes valeurs de la grandeur parasite; un dispositif de détection de données qui sert à lire des ensembles de données de mesure des capteurs de valeur de mesure individuels; et une unité de traitement de données qui sert à déterminer les paramètres de compensation au moyen des ensemble de données de mesure lus. Le dispositif de compensation comprend également une sortie de signal de déclenchement, et à chaque capteur est associée une mémoire de données comprenant un système de commande électronique qui est relié d'un point de vue fonctionnel à la sortie de signal de déclenchement, l'émission d'un signal de déclenchement au niveau de la sortie de signal de déclenchement, étant suivie de l'enregistrement simultané dans chaque mémoire de données, de l'ensemble de données de mesure courant du capteur correspondant.
PCT/EP2005/055696 2004-11-11 2005-11-02 Dispositif et procede de compensation pour capteurs de valeur de mesure WO2006051057A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004054644.4 2004-11-11
DE200410054644 DE102004054644A1 (de) 2004-11-11 2004-11-11 Vorrichtung und Verfahren zum Kompensieren von Messwertaufnehmern

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WO2006051057A1 true WO2006051057A1 (fr) 2006-05-18

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Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102121835A (zh) * 2010-12-09 2011-07-13 广东高新兴通信股份有限公司 一种传感系统及其数据处理方法
DE102017131066A1 (de) * 2017-12-22 2019-06-27 Endress+Hauser SE+Co. KG Verfahren zum Bereitstellen von kalibrierten Druckmessumformern
DE102018203419A1 (de) 2018-03-07 2019-09-12 Infineon Technologies Ag Vorrichtung und verfahren zum kalibrieren einer druckerfassungseinrichtung

Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4567773A (en) * 1984-01-05 1986-02-04 Energy Utilization Laboratories, Inc. Pressure transducer system
GB2201791A (en) * 1987-03-05 1988-09-07 Secr Defence Transducer signal conditioner
US4974679A (en) * 1988-07-05 1990-12-04 Reuter Peter A Load cell
US5307683A (en) * 1992-08-05 1994-05-03 Marathon Oil Company Transient temperature compensation for pressure gauges
US5460049A (en) * 1994-01-26 1995-10-24 Instrumention Northwest, Inc. Digitally-temperature-compensated strain-gauge pressure measuring apparatus
US5521846A (en) * 1991-10-30 1996-05-28 Labinal, Societe Anonyme Device for measuring parameters, in particular parameters relating to aircraft or vehicle wheels
EP0758739A1 (fr) * 1995-08-11 1997-02-19 Motorola Semiconducteurs S.A. Module de capteur
EP0846940A1 (fr) * 1996-12-05 1998-06-10 Satake Corporation Méthode et dispositif de compensation de temperature dans une cellule de charge d'un détecteur de charge
US6035721A (en) * 1995-09-04 2000-03-14 Siemens Ag Process for compensating for the incorrect operation of measuring devices caused by external influences
US6176138B1 (en) * 1998-07-15 2001-01-23 Saba Instruments, Inc. Electronic pressure sensor
US6329825B1 (en) * 1998-11-26 2001-12-11 Denso Corporation Sensing apparatus having a sensing bridge circuit and a temperature detecting bridge circuit for detecting a physical quantity and a related temperature compensating method
US20020177971A1 (en) * 2001-05-24 2002-11-28 Mitsubishi Denki Kabushiki Kaisha Pressure sensor
US20030221491A1 (en) * 2002-05-31 2003-12-04 Mykrolis Corporation System and method of operation of an embedded system for a digital capacitance diaphragm gauge
US20040159161A1 (en) * 2001-07-13 2004-08-19 Barnett John D. Temperature compensated strain sensing apparatus
WO2005059497A2 (fr) * 2003-12-18 2005-06-30 Endress+Hauser Gmbh+Co. Kg Dispositif et procede pour effectuer la compensation dans des capteurs de pression

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CH690202A5 (de) * 1994-12-27 2000-05-31 Gegauf Fritz Ag Messanordnung, Messfühlerr für dieselbe und Verfahren zur Herstellung der- bzw. desselben.
DE19628539A1 (de) * 1996-07-16 1998-03-12 Csb Syst Software Entwicklung Anordnung und Verfahren zur Qualitätssicherung elektronischer Meßeinrichtungen
DE10322277B4 (de) * 2003-05-16 2015-02-19 Endress + Hauser Conducta Gesellschaft für Mess- und Regeltechnik mbH + Co. KG Vorrichtung und Verfahren zur automatischen Prozessierung von Sensoren

Patent Citations (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4567773A (en) * 1984-01-05 1986-02-04 Energy Utilization Laboratories, Inc. Pressure transducer system
GB2201791A (en) * 1987-03-05 1988-09-07 Secr Defence Transducer signal conditioner
US4974679A (en) * 1988-07-05 1990-12-04 Reuter Peter A Load cell
US5521846A (en) * 1991-10-30 1996-05-28 Labinal, Societe Anonyme Device for measuring parameters, in particular parameters relating to aircraft or vehicle wheels
US5307683A (en) * 1992-08-05 1994-05-03 Marathon Oil Company Transient temperature compensation for pressure gauges
US5460049A (en) * 1994-01-26 1995-10-24 Instrumention Northwest, Inc. Digitally-temperature-compensated strain-gauge pressure measuring apparatus
EP0758739A1 (fr) * 1995-08-11 1997-02-19 Motorola Semiconducteurs S.A. Module de capteur
US6035721A (en) * 1995-09-04 2000-03-14 Siemens Ag Process for compensating for the incorrect operation of measuring devices caused by external influences
EP0846940A1 (fr) * 1996-12-05 1998-06-10 Satake Corporation Méthode et dispositif de compensation de temperature dans une cellule de charge d'un détecteur de charge
US6176138B1 (en) * 1998-07-15 2001-01-23 Saba Instruments, Inc. Electronic pressure sensor
US6329825B1 (en) * 1998-11-26 2001-12-11 Denso Corporation Sensing apparatus having a sensing bridge circuit and a temperature detecting bridge circuit for detecting a physical quantity and a related temperature compensating method
US20020177971A1 (en) * 2001-05-24 2002-11-28 Mitsubishi Denki Kabushiki Kaisha Pressure sensor
US20040159161A1 (en) * 2001-07-13 2004-08-19 Barnett John D. Temperature compensated strain sensing apparatus
US20030221491A1 (en) * 2002-05-31 2003-12-04 Mykrolis Corporation System and method of operation of an embedded system for a digital capacitance diaphragm gauge
WO2005059497A2 (fr) * 2003-12-18 2005-06-30 Endress+Hauser Gmbh+Co. Kg Dispositif et procede pour effectuer la compensation dans des capteurs de pression

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