WO2006034696A3 - Schicht zwischen grenzflächen unterschiedlicher komponenten in halbleiterbauteilen, sowie verfahren zu deren herstellung - Google Patents

Schicht zwischen grenzflächen unterschiedlicher komponenten in halbleiterbauteilen, sowie verfahren zu deren herstellung Download PDF

Info

Publication number
WO2006034696A3
WO2006034696A3 PCT/DE2005/001722 DE2005001722W WO2006034696A3 WO 2006034696 A3 WO2006034696 A3 WO 2006034696A3 DE 2005001722 W DE2005001722 W DE 2005001722W WO 2006034696 A3 WO2006034696 A3 WO 2006034696A3
Authority
WO
WIPO (PCT)
Prior art keywords
layer
production
semiconductor modules
differing components
boundary surfaces
Prior art date
Application number
PCT/DE2005/001722
Other languages
English (en)
French (fr)
Other versions
WO2006034696A2 (de
Inventor
Michael Bauer
Alfred Haimerl
Khalil Hosseini
Angela Kessler
Joachim Mahler
Wolfgang Schober
Original Assignee
Infineon Technologies Ag
Michael Bauer
Alfred Haimerl
Khalil Hosseini
Angela Kessler
Joachim Mahler
Wolfgang Schober
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Michael Bauer, Alfred Haimerl, Khalil Hosseini, Angela Kessler, Joachim Mahler, Wolfgang Schober filed Critical Infineon Technologies Ag
Priority to CN2005800329107A priority Critical patent/CN101091245B/zh
Publication of WO2006034696A2 publication Critical patent/WO2006034696A2/de
Publication of WO2006034696A3 publication Critical patent/WO2006034696A3/de
Priority to US11/692,322 priority patent/US7834467B2/en

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3142Sealing arrangements between parts, e.g. adhesion promotors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/48Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
    • H01L23/488Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
    • H01L23/495Lead-frames or other flat leads
    • H01L23/49579Lead-frames or other flat leads characterised by the materials of the lead frames or layers thereon
    • H01L23/49586Insulating layers on lead frames
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42Wire connectors; Manufacturing methods related thereto
    • H01L24/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/02Bonding areas; Manufacturing methods related thereto
    • H01L2224/04Structure, shape, material or disposition of the bonding areas prior to the connecting process
    • H01L2224/05Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
    • H01L2224/0554External layer
    • H01L2224/05599Material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484Connecting portions
    • H01L2224/4847Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • H01L2224/48472Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8538Bonding interfaces outside the semiconductor or solid-state body
    • H01L2224/85399Material
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01005Boron [B]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01006Carbon [C]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01013Aluminum [Al]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01019Potassium [K]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/0102Calcium [Ca]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01023Vanadium [V]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01027Cobalt [Co]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01028Nickel [Ni]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01033Arsenic [As]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01042Molybdenum [Mo]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01055Cesium [Cs]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01074Tungsten [W]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01Chemical elements
    • H01L2924/01082Lead [Pb]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/013Alloys
    • H01L2924/014Solder alloys
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/12Passive devices, e.g. 2 terminal devices
    • H01L2924/1204Optical Diode
    • H01L2924/12044OLED
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10Details of semiconductor or other solid state devices to be connected
    • H01L2924/11Device type
    • H01L2924/14Integrated circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30Technical effects
    • H01L2924/35Mechanical effects
    • H01L2924/351Thermal stress
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/734Fullerenes, i.e. graphene-based structures, such as nanohorns, nanococoons, nanoscrolls or fullerene-like structures, e.g. WS2 or MoS2 chalcogenide nanotubes, planar C3N4, etc.
    • Y10S977/742Carbon nanotubes, CNTs
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/778Nanostructure within specified host or matrix material, e.g. nanocomposite films
    • Y10S977/785Electrically insulating host material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S977/00Nanotechnology
    • Y10S977/70Nanostructure
    • Y10S977/831Of specified ceramic or electrically insulating compositions

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Laminated Bodies (AREA)

Abstract

Die Erfindung betrifft eine Schicht (1) zwischen Grenzflächen (2) unterschiedlicher Komponenten (5, 6) in Halbleiterbautei-len (10), sowie ein Verfahren zu deren Herstellung. Dazu weist eine Komponente (5) als Grenzfläche (2) Oberflächen (3) eines Schaltungsträgers (11) auf und eine andere Komponente (6) weist als Grenzfläche (2) Berührungsflächen (4) einer Kunststoffgehäusemasse (9) auf. Die haftverbessernde Schicht (1) ist dabei eine Mischung aus polymeren Kettenmolekülen und Kohlenstoff-Nanoröhren.
PCT/DE2005/001722 2004-09-30 2005-09-28 Schicht zwischen grenzflächen unterschiedlicher komponenten in halbleiterbauteilen, sowie verfahren zu deren herstellung WO2006034696A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN2005800329107A CN101091245B (zh) 2004-09-30 2005-09-28 半导体器件中不同部件界面间的层及其制造方法、具有该层的半导体器件及其制造方法
US11/692,322 US7834467B2 (en) 2004-09-30 2007-03-28 Layer between interfaces of different components in semiconductor devices

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004048201.2 2004-09-30
DE102004048201A DE102004048201B4 (de) 2004-09-30 2004-09-30 Halbleiterbauteil mit Haftvermittlerschicht, sowie Verfahren zu deren Herstellung

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US11/692,322 Continuation US7834467B2 (en) 2004-09-30 2007-03-28 Layer between interfaces of different components in semiconductor devices

Publications (2)

Publication Number Publication Date
WO2006034696A2 WO2006034696A2 (de) 2006-04-06
WO2006034696A3 true WO2006034696A3 (de) 2006-07-06

Family

ID=35677532

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2005/001722 WO2006034696A2 (de) 2004-09-30 2005-09-28 Schicht zwischen grenzflächen unterschiedlicher komponenten in halbleiterbauteilen, sowie verfahren zu deren herstellung

Country Status (4)

Country Link
US (1) US7834467B2 (de)
CN (1) CN101091245B (de)
DE (1) DE102004048201B4 (de)
WO (1) WO2006034696A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005020453B4 (de) * 2005-04-29 2009-07-02 Infineon Technologies Ag Halbleiterbauteil mit einer Flachleiterstruktur und Verfahren zur Herstellung einer Flachleiterstruktur und Verfahren zur Herstellung eines Halbleiterbauteils
DE102005025083B4 (de) 2005-05-30 2007-05-24 Infineon Technologies Ag Thermoplast-Duroplast-Verbund und Verfahren zum Verbinden eines thermoplastischen Materials mit einem duroplastischen Material
US20080026505A1 (en) * 2006-07-28 2008-01-31 Nirupama Chakrapani Electronic packages with roughened wetting and non-wetting zones
US20080067502A1 (en) * 2006-09-14 2008-03-20 Nirupama Chakrapani Electronic packages with fine particle wetting and non-wetting zones
US8530279B2 (en) * 2008-09-11 2013-09-10 Texas Instruments Incorporated Offset gravure printing process for improved mold compound and die attach adhesive adhesion on leadframe surface using selective adhesion promoter
DE102010001711A1 (de) * 2010-02-09 2011-08-11 Robert Bosch GmbH, 70469 Halbleiter-Bauelement und entsprechendes Herstellungsverfahren
JP6278297B2 (ja) * 2013-07-24 2018-02-14 株式会社日立製作所 接合構造およびそれを用いた半導体装置
US9362191B2 (en) * 2013-08-29 2016-06-07 Infineon Technologies Austria Ag Encapsulated semiconductor device
US9281060B1 (en) 2015-06-01 2016-03-08 International Business Machines Corporation Device and method for storing or switching
US9704786B2 (en) * 2015-09-25 2017-07-11 Infineon Technologies Ag Direct selective adhesion promotor plating
US10727085B2 (en) * 2015-12-30 2020-07-28 Texas Instruments Incorporated Printed adhesion deposition to mitigate integrated circuit package delamination
JP6686691B2 (ja) * 2016-05-16 2020-04-22 株式会社デンソー 電子装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122858A (en) * 1990-09-10 1992-06-16 Olin Corporation Lead frame having polymer coated surface portions
US5817544A (en) * 1996-01-16 1998-10-06 Olin Corporation Enhanced wire-bondable leadframe
WO1999040812A1 (en) * 1998-02-12 1999-08-19 Board Of Trustees Operating Michigan State University - Micro-fastening system and method of manufacture
DE10124047A1 (de) * 2001-05-16 2002-11-21 Infineon Technologies Ag Elektronische Bauteile mit Halbleiterchips und Systemträger und Verfahren zur Herstellung derselben
US20030208888A1 (en) * 2002-05-13 2003-11-13 Fearing Ronald S. Adhesive microstructure and method of forming same
US20040206448A1 (en) * 2003-04-17 2004-10-21 Nanosys, Inc. Structures, systems and methods for joining articles and materials and uses therefor

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5777433A (en) * 1996-07-11 1998-07-07 Hewlett-Packard Company High refractive index package material and a light emitting device encapsulated with such material
US6790526B2 (en) * 1998-01-30 2004-09-14 Integument Technologies, Inc. Oxyhalopolymer protective multifunctional appliqués and paint replacement films
US6265333B1 (en) * 1998-06-02 2001-07-24 Board Of Regents, University Of Nebraska-Lincoln Delamination resistant composites prepared by small diameter fiber reinforcement at ply interfaces
AUPQ304199A0 (en) * 1999-09-23 1999-10-21 Commonwealth Scientific And Industrial Research Organisation Patterned carbon nanotubes
US6741019B1 (en) * 1999-10-18 2004-05-25 Agere Systems, Inc. Article comprising aligned nanowires
US6407922B1 (en) * 2000-09-29 2002-06-18 Intel Corporation Heat spreader, electronic package including the heat spreader, and methods of manufacturing the heat spreader
NL1016779C2 (nl) * 2000-12-02 2002-06-04 Cornelis Johannes Maria V Rijn Matrijs, werkwijze voor het vervaardigen van precisieproducten met behulp van een matrijs, alsmede precisieproducten, in het bijzonder microzeven en membraanfilters, vervaardigd met een dergelijke matrijs.
KR20040090976A (ko) * 2002-01-15 2004-10-27 나노다이나믹스 인코퍼레이티드 현탁된 탄소 나노튜브 조성물, 이를 제조하는 방법 및이의 용도
US6831017B1 (en) * 2002-04-05 2004-12-14 Integrated Nanosystems, Inc. Catalyst patterning for nanowire devices
US6890654B2 (en) * 2002-04-18 2005-05-10 Northwestern University Encapsulation of nanotubes via self-assembled nanostructures
US7153903B1 (en) * 2002-06-19 2006-12-26 The Board Of Regents Of The University Of Oklahoma Carbon nanotube-filled composites prepared by in-situ polymerization
CN1248959C (zh) 2002-09-17 2006-04-05 清华大学 一种碳纳米管阵列生长方法
CN1296994C (zh) * 2002-11-14 2007-01-24 清华大学 一种热界面材料及其制造方法
ATE486906T1 (de) * 2002-11-27 2010-11-15 Univ Rice William M Verbundwerkstoffe aus funktionalisierten nanoröhren und polymer und wechselwirkungen mit strahlung
US7112472B2 (en) * 2003-06-25 2006-09-26 Intel Corporation Methods of fabricating a composite carbon nanotube thermal interface device
US20050238889A1 (en) * 2003-07-10 2005-10-27 Nancy Iwamoto Layered components, materials, methods of production and uses thereof
EP1682815A2 (de) * 2003-11-05 2006-07-26 Future Camp GmbH Speichersystem zum speichern eines mediums sowie verfahren zum beladen/entladen eines speichersystems mit einem speichermedium
US7019391B2 (en) * 2004-04-06 2006-03-28 Bao Tran NANO IC packaging
US7109591B2 (en) * 2004-06-04 2006-09-19 Hack Jonathan A Integrated circuit device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5122858A (en) * 1990-09-10 1992-06-16 Olin Corporation Lead frame having polymer coated surface portions
US5817544A (en) * 1996-01-16 1998-10-06 Olin Corporation Enhanced wire-bondable leadframe
WO1999040812A1 (en) * 1998-02-12 1999-08-19 Board Of Trustees Operating Michigan State University - Micro-fastening system and method of manufacture
DE10124047A1 (de) * 2001-05-16 2002-11-21 Infineon Technologies Ag Elektronische Bauteile mit Halbleiterchips und Systemträger und Verfahren zur Herstellung derselben
US20030208888A1 (en) * 2002-05-13 2003-11-13 Fearing Ronald S. Adhesive microstructure and method of forming same
US20040206448A1 (en) * 2003-04-17 2004-10-21 Nanosys, Inc. Structures, systems and methods for joining articles and materials and uses therefor

Also Published As

Publication number Publication date
CN101091245A (zh) 2007-12-19
DE102004048201A1 (de) 2006-04-13
CN101091245B (zh) 2010-06-16
DE102004048201B4 (de) 2009-05-20
US20070205518A1 (en) 2007-09-06
WO2006034696A2 (de) 2006-04-06
US7834467B2 (en) 2010-11-16

Similar Documents

Publication Publication Date Title
WO2006034696A3 (de) Schicht zwischen grenzflächen unterschiedlicher komponenten in halbleiterbauteilen, sowie verfahren zu deren herstellung
ATE531242T1 (de) Verfahren zur herstellung eines elektronsichen moduls und elektronisches modul
WO2007025521A3 (de) Verfahren zur herstellung eines halbleiterbauelements mit einer planaren kontaktierung und halbleiterbauelement
TW200644297A (en) Semiconductor apparatus and manufacturing method thereof
WO2008017472A3 (de) Verfahren zum herstellen einer porösen, keramischen oberflächenschicht
WO2007050287A3 (en) Semiconductor structure and method of assembly
TWI299748B (en) Adhesive composition, its manufacturing method, and adhesive film, substrate for carrying a semiconductor device and semiconductor device using such adhesive composition
TW200644005A (en) Multilayer electronic component and manufacturing method thereof
WO2003092041A3 (en) Method for fabricating a soi substrate a high resistivity support substrate
WO2004101177A3 (de) Verfahren zur beschichtung von substraten mit kohlenstoffbasiertem material
TW200721419A (en) Semiconductor IC-embedded substrate and method for manufacturing same
TW200721934A (en) Electronic component embedded board and its manufacturing method
SG132619A1 (en) Method for packaging a semiconductor device
WO2004018548A3 (fr) Procede de soudage d'une surface polymere avec une surface conductrice ou semi-conductrice
WO2004114371A3 (de) Verbindung zur bildung einer selbstorganisierenden monolage, schichtstruktur, halbleiterbauelement mit einer schichtstruktur und verfahren zur herstellung einer schichtstruktur
WO2007025628A8 (de) Verfahren zur strukturierung von oberflächen von substraten
TW200629998A (en) Printed circuit board and forming method thereof
SG152101A1 (en) An interconnect structure and a method of fabricating the same
TW200746456A (en) Nitride-based semiconductor device and production method thereof
ATE430987T1 (de) Leistungshalbleitermodul mit kontaktfedern
WO2006033894A3 (en) Heat riser
WO2006036751A3 (en) Integrated circuit and method for manufacturing
TW200703789A (en) Porous resin material, method for manufacturing the same, and multi-layer substrate
TW200629432A (en) Method of manufacturing a wiring substrate and an electronic instrument
WO2005006432A3 (de) Elektronisches bauelement und verfahren zur herstellung

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BW BY BZ CA CH CN CO CR CU CZ DK DM DZ EC EE EG ES FI GB GD GE GH GM HR HU ID IL IN IS JP KE KG KM KP KR KZ LC LK LR LS LT LU LV LY MA MD MG MK MN MW MX MZ NA NG NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SM SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): BW GH GM KE LS MW MZ NA SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LT LU LV MC NL PL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
WWE Wipo information: entry into national phase

Ref document number: 11692322

Country of ref document: US

WWE Wipo information: entry into national phase

Ref document number: 200580032910.7

Country of ref document: CN

WWP Wipo information: published in national office

Ref document number: 11692322

Country of ref document: US

122 Ep: pct application non-entry in european phase