WO2006031075A1 - Plasma apparatus for treating harmful gas - Google Patents

Plasma apparatus for treating harmful gas Download PDF

Info

Publication number
WO2006031075A1
WO2006031075A1 PCT/KR2005/003071 KR2005003071W WO2006031075A1 WO 2006031075 A1 WO2006031075 A1 WO 2006031075A1 KR 2005003071 W KR2005003071 W KR 2005003071W WO 2006031075 A1 WO2006031075 A1 WO 2006031075A1
Authority
WO
WIPO (PCT)
Prior art keywords
gases
treatment space
plasma
cathode
coolant
Prior art date
Application number
PCT/KR2005/003071
Other languages
English (en)
French (fr)
Inventor
Kyu-Sung Choi
Original Assignee
Automit Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Automit Co., Ltd. filed Critical Automit Co., Ltd.
Publication of WO2006031075A1 publication Critical patent/WO2006031075A1/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/12—Methods and means for introducing reactants
    • B01D2259/122—Gaseous reactants
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2242/00—Auxiliary systems
    • H05H2242/10—Cooling arrangements
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H2245/00—Applications of plasma devices
    • H05H2245/10—Treatment of gases
    • H05H2245/17—Exhaust gases

Definitions

  • the plasma may be valuably utilized in order to treat harmful gases generated in the process of incinerating infectious waste matters or in the process of manufacturing semiconductor chips.
  • the plasma can be employed in a pyrolysis apparatus for treatment of infectious waste matters, a domestic food waste treatment apparatus, a gas scrubber, a radioactive substance treating apparatus, a special gas treating apparatus or the like.
  • FIG. 1 schematically shows a conventional pyrolysis treatment apparatus. Description will be offered herein below as for the construction of the conventional pyrolysis treatment apparatus with reference to FIG. 1.
  • the conventional pyrolysis treatment apparatus referred to above employs a typical electric heater 3h as a heating means in the burning furnace 3 and is adapted to treat the mixed gases at as low a temperature as about 1,000 ° C. Therefore, the conventional pyrolysis treatment apparatus poses problems in that it cannot treat those substances requiring high temperature burning for removal, e.g., PFC, which is contained in the harmful gases generated by thermal decomposition of the waste matters, and further in that it has a limited capacity to treat the mixed gases admitted from the mixing furnace at one time.
  • PFC high temperature burning for removal
  • the water sprayed into the flow channel 520 creates a water curtain and is admixed with the gases moving through the flow channel 520, thus reducing the temperature of the gases down to about the atmospheric temperature before they are discharged to the outside.
  • a blower 600 is provided at the rear part of the discharge opening 530 for forcibly discharging the cooled gases.

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Plasma Technology (AREA)
PCT/KR2005/003071 2004-09-15 2005-09-15 Plasma apparatus for treating harmful gas WO2006031075A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2004-0073969 2004-09-15
KR1020040073969A KR100636845B1 (ko) 2004-09-15 2004-09-15 유해가스 처리용 플라즈마 장치

Publications (1)

Publication Number Publication Date
WO2006031075A1 true WO2006031075A1 (en) 2006-03-23

Family

ID=36060277

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2005/003071 WO2006031075A1 (en) 2004-09-15 2005-09-15 Plasma apparatus for treating harmful gas

Country Status (2)

Country Link
KR (1) KR100636845B1 (ko)
WO (1) WO2006031075A1 (ko)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2971433A1 (fr) * 2011-02-14 2012-08-17 Thibaud Cedric Olivier Emin Dispositif de separation de gaz a partir de corps chimiques composes
CN105392550A (zh) * 2013-03-01 2016-03-09 战略环境能源资源有限公司 废物处理
EP3023478A3 (en) * 2014-11-19 2016-09-21 Embraer , S.A. A process for recycling composite materials and a system for treating waste gases
JP2020506052A (ja) * 2017-01-23 2020-02-27 エドワーズ コリア リミテッド 窒素酸化物還元装置及びガス処理装置
US11430638B2 (en) 2017-01-23 2022-08-30 Edwards Limited Plasma generating apparatus and gas treating apparatus

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100972829B1 (ko) * 2008-03-07 2010-08-03 주식회사 케이피씨 폐가스 처리장치
KR101142184B1 (ko) * 2009-05-07 2012-05-04 (주)플라즈마텍 플라즈마 토치
KR102177322B1 (ko) 2020-07-17 2020-11-10 정석근 연기제거용 플라즈마 자력필터 및 이를 이용한 연기 제거장치
KR102520818B1 (ko) * 2020-09-16 2023-04-12 한국기계연구원 돌출 전극을 갖는 스크러버, 이를 포함하는 스크러버 시스템, 스크러버 구동 방법

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03275119A (ja) * 1990-03-26 1991-12-05 Akira Mizuno プラズマ排ガス処理装置
JPH10249161A (ja) * 1997-03-17 1998-09-22 Shinmeiwa Auto Eng Ltd フロンのプラズマアーク分解方法及び装置
US6126779A (en) * 1996-11-28 2000-10-03 Aea Technology Plc Plasma gas processing
WO2003018176A1 (en) * 2001-08-25 2003-03-06 Accentus Plc Non-thermal plasma reactor
WO2003047727A1 (de) * 2001-12-01 2003-06-12 Mtu Aero Engines Gmbh Verfahren zur gasreinigung

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03275119A (ja) * 1990-03-26 1991-12-05 Akira Mizuno プラズマ排ガス処理装置
US6126779A (en) * 1996-11-28 2000-10-03 Aea Technology Plc Plasma gas processing
JPH10249161A (ja) * 1997-03-17 1998-09-22 Shinmeiwa Auto Eng Ltd フロンのプラズマアーク分解方法及び装置
WO2003018176A1 (en) * 2001-08-25 2003-03-06 Accentus Plc Non-thermal plasma reactor
WO2003047727A1 (de) * 2001-12-01 2003-06-12 Mtu Aero Engines Gmbh Verfahren zur gasreinigung

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2971433A1 (fr) * 2011-02-14 2012-08-17 Thibaud Cedric Olivier Emin Dispositif de separation de gaz a partir de corps chimiques composes
WO2012110734A1 (fr) * 2011-02-14 2012-08-23 Commissariat A L'energie Atomique Et Aux Energies Alternatives Procédé et dispositif pour la séparation d'entités chimiques simples a partir de corps chimiquement complexes ou de mélanges de corps simples.
CN105392550A (zh) * 2013-03-01 2016-03-09 战略环境能源资源有限公司 废物处理
EP2961517A4 (en) * 2013-03-01 2016-12-14 Strategic Env & Energy Resources Inc WASTE
EP3023478A3 (en) * 2014-11-19 2016-09-21 Embraer , S.A. A process for recycling composite materials and a system for treating waste gases
JP2020506052A (ja) * 2017-01-23 2020-02-27 エドワーズ コリア リミテッド 窒素酸化物還元装置及びガス処理装置
US11430638B2 (en) 2017-01-23 2022-08-30 Edwards Limited Plasma generating apparatus and gas treating apparatus
JP7319928B2 (ja) 2017-01-23 2023-08-02 エドワーズ コリア リミテッド 窒素酸化物低減装置及びガス処理装置
US11985754B2 (en) 2017-01-23 2024-05-14 Edwards Korea Ltd. Nitrogen oxide reduction apparatus and gas treating apparatus

Also Published As

Publication number Publication date
KR100636845B1 (ko) 2006-10-19
KR20060025066A (ko) 2006-03-20

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