WO2006012826A1 - Dispositif d'acheminement de liquides, systeme de detection, dispositif de melange de liquides et procede pour realiser un dispositif d'acheminement de liquides - Google Patents

Dispositif d'acheminement de liquides, systeme de detection, dispositif de melange de liquides et procede pour realiser un dispositif d'acheminement de liquides Download PDF

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Publication number
WO2006012826A1
WO2006012826A1 PCT/DE2005/001183 DE2005001183W WO2006012826A1 WO 2006012826 A1 WO2006012826 A1 WO 2006012826A1 DE 2005001183 W DE2005001183 W DE 2005001183W WO 2006012826 A1 WO2006012826 A1 WO 2006012826A1
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WIPO (PCT)
Prior art keywords
fluid
transport device
fluid transport
electrically conductive
conductive layer
Prior art date
Application number
PCT/DE2005/001183
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German (de)
English (en)
Inventor
Ralf Brederlow
Heinrich Heiss
Alfred Martin
Hans-Jörg TIMME
Original Assignee
Siemens Aktiengesellschaft
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Publication of WO2006012826A1 publication Critical patent/WO2006012826A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502769—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements
    • B01L3/502784—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics
    • B01L3/502792—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by multiphase flow arrangements specially adapted for droplet or plug flow, e.g. digital microfluidics for moving individual droplets on a plate, e.g. by locally altering surface tension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/302—Micromixers the materials to be mixed flowing in the form of droplets
    • B01F33/3021—Micromixers the materials to be mixed flowing in the form of droplets the components to be mixed being combined in a single independent droplet, e.g. these droplets being divided by a non-miscible fluid or consisting of independent droplets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B01F33/3031—Micromixers using electro-hydrodynamic [EHD] or electro-kinetic [EKI] phenomena to mix or move the fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F04B43/09—Pumps having electric drive
    • F04B43/095—Piezo-electric drive
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/0809—Geometry, shape and general structure rectangular shaped
    • B01L2300/0816—Cards, e.g. flat sample carriers usually with flow in two horizontal directions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00—Additional constructional details
    • B01L2300/08—Geometry, shape and general structure
    • B01L2300/089—Virtual walls for guiding liquids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
    • B01L2400/0433—Moving fluids with specific forces or mechanical means specific forces vibrational forces
    • B01L2400/0439—Moving fluids with specific forces or mechanical means specific forces vibrational forces ultrasonic vibrations, vibrating piezo elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2400/00—Moving or stopping fluids
    • B01L2400/04—Moving fluids with specific forces or mechanical means
    • B01L2400/0493—Specific techniques used
    • B01L2400/0496—Travelling waves, e.g. in combination with electrical or acoustic forces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
    • G01N2203/02—Details not specific for a particular testing method
    • G01N2203/06—Indicating or recording means; Sensing means
    • G01N2203/067—Parameter measured for estimating the property
    • G01N2203/0676—Force, weight, load, energy, speed or acceleration

Definitions

  • Fluid transport device Sensor arrangement, fluid mixing device and method for producing a fluid transport device
  • the invention relates to a fluid transport device, a sensor arrangement, a fluid mixing device and a method for producing a fluid transport device.
  • [1] discloses a position detector based on surface acoustic waves.
  • a micromechanical sensor element which has an oscillatable element and a molecular coupling layer, which is set up in such a way that at the molecular level
  • Coupling layer molecules can bind. Due to the coupling of the molecules to the molecular coupling layer, the capacitance of the vibratable element is changed, whereby a sensor event can be electrically detected.
  • Biotechnology and genetic engineering have become increasingly important in recent years.
  • a basic technique in the context of these technologies is to be able to detect biological molecules such as DNA or RNA, proteins, polypeptides, etc.
  • [3] discloses a method for the targeted manipulation of small quantities of matter on solid surfaces, in which surface waves are generated and the momentum of the
  • Another method of moving fluids utilizes electrophoresis.
  • electrophoresis the property is exploited that electric multipoles (monopolies, dipoles, quadrupoles, ...) are accelerated in a liquid by an electric field can, with which a transport of this multipole is effected.
  • This method thus requires polar properties of the particles to be investigated and can not achieve sufficiently high throughput rates due to the low mobility of most of the electric multipoles in liquids.
  • Another method of transporting liquids utilizes capillary forces.
  • Capillary forces can cause a laminar flow of liquid through a narrow opening, as long as there is a concentration gradient between the two sides of the opening.
  • this method relies on a permanent sink for the particles to be transported on the one side of the opening, which prevents a universal applicability of the method or leads to high implantation costs.
  • micropumps formed from micromechanically fabricated membranes (e.g., in silicon technology). Although such micropumps are suitable for transporting liquids, their integration as a lab-on-chip is complex and expensive.
  • Another method of transporting liquids uses conventional pumps integrated in a macroscopic analytical system. This method is not suitable for the investigation of very small amounts of liquid. However, especially in biotechnological processes often only very small amounts of liquid in the order of a hundred microliters and less are available.
  • the invention is based in particular on the problem of enabling efficient transport of fluids even at low volumes.
  • the problem is solved by a fluid transport device, by a sensor arrangement, by a fluid mixing device and by a method for producing a fluid transport device having the features according to the independent patent claims.
  • the fluid transport device comprises a substrate, a first electrically conductive layer on the substrate, a piezoelectric layer on the first electrically conductive layer and a second electrically conductive layer on the piezoelectric layer. Further, the fluid transport device of the invention includes a fluid transport region along which a supplied fluid is movable. By means of a control unit, electrical control signals can be supplied to the first electrically conductive layer and the second electrically conductive layer, by means of which the piezoelectric layer can be excited such that the supplied fluid can generate a force for moving the fluid along the fluid transport region is.
  • the sensor arrangement according to the invention for detecting particles possibly contained in a fluid contains a sensor element, on which a sensor signal can be generated in the presence of particles (in particular molecules) possibly contained in a fluid.
  • the sensor arrangement further contains a fluid transport device having the features described above, wherein fluid to be examined by means of the fluid transport device can be transported to the sensor element, so that particles possibly contained in the fluid on the sensor element are detectable.
  • the fluid mixing device according to the invention for mixing a first fluid with a second fluid is a first fluid transport device with the above-described
  • the first fluid is supplied. Furthermore, a second fluid transport device with the provided above features to which the second fluid can be supplied.
  • the first fluid can be transported to a mixing region, wherein the second fluid can be transported to the mixing region by means of the second fluid transport device, so that in the mixing region first fluid and second fluid Fluid are miscible.
  • a method for producing a fluid transport device in which a first electrically conductive layer is formed on a substrate, a piezoelectric layer is formed on the first electrically conductive layer, a second electrically conductive layer is formed on the piezoelectric layer , a fluid transport region is formed, along which a supplied fluid is movable, and a control unit is formed, by means of which the first electrically conductive layer and the second electrically conductive layer electrical control signals are supplied, by means of which the piezoelectric Layer can be stimulated such that on supplied fluid, a force for moving the fluid along the fluid transport region can be generated.
  • a fluid is understood to mean, in particular, a liquid, but the principle of the invention basically also works with other types of material, such as, for example, gases or granules.
  • a basic idea of the invention is to be seen in that over a substrate (eg an electronic chip) a first electrically conductive layer (eg a first metal layer), above a piezoelectric layer (eg quartz, tin oxide ZnO, aluminum nitride AlN) and above a second electrically provide conductive layer (eg, a second metal layer) and this vertical layer stack using the first electrically conductive layer (eg a first metal layer), above a piezoelectric layer (eg quartz, tin oxide ZnO, aluminum nitride AlN) and above a second electrically provide conductive layer (eg, a second metal layer) and this vertical layer stack using the
  • Piezo effect for generating waves by means of which waves on a fluid (in particular a liquid) a mechanical impulse is exerted, whereby the liquid is moved along a fluid transport area.
  • a fluid in particular a liquid
  • a mechanical impulse is exerted, whereby the liquid is moved along a fluid transport area.
  • Wavefronts are generated at any frequency. This represents a substantial advantage over the purely planar arrangement of electrodes known from [3], in which waves can be convinced only at frequencies predetermined by the spacing of the electrodes (location of the electrode corresponds to a wave belly).
  • a horizontal excitation of the piezoelectric element between the two electrodes is made possible by a suitable choice of the excitation frequency of the control signals provided at the electrodes.
  • an arbitrary wavelength can be generated and additionally adjusted in terms of its amplitude.
  • the invention provides two flat metal electrodes for driving a piezoelectric medium arranged therebetween, whereby waves (buick acoustic waves) acting through the entire piezoelectric element can be generated.
  • waves tilt acoustic waves
  • only one surface acoustic wave is generated (surface acoustic waves).
  • Circuits are used, which are preferably arranged in the vicinity of the sensors (in particular integrated in the substrate), whereby the signal paths are kept short.
  • drive circuits for the fluid transport device can also be accommodated in the vicinity of the piezoelectric elements. Since individual actuators according to the invention freely and without the boundary condition of Compliance can be controlled by predetermined by the distance from the next neighbor actuator wavelengths, resulting in a much larger space possible wave pattern that can be applied to the fluid transport device.
  • the transport device is preferably carried out together with an integrated circuit, so that the restriction of external electronics due to the high number of necessary electrical connection means between electronics and fluid transport device deleted.
  • an apparatus for the preparation, transport and determination of the contents of liquids on solid surfaces is provided.
  • Such an apparatus provides a combination of a fluid transport device (for defined transport of fluids), a fluid mixing device (for mixing two or more fluids, in particular to effect a chemical reaction), and a sensor assembly (e.g. Detecting particles possibly contained in a fluid) and can be referred to as lab-on-chip.
  • an efficient realization of a fluid transport device is provided, which is realized with simple technological means and thus represents a simple system for the preparation and analysis of a liquid sample on a chip.
  • An important aspect of the invention is the exploitation of a second electrode provided above a first electrode for free generation of waves.
  • the frequency of the generated waves is no longer predetermined by the distance of a pair of electrodes defined in only one metal plane.
  • variably driven electrodes can be coupled to an underlying integrated circuit, in particular as a system-on-chip or as a chip-to-chip connection with through-connection, so as to combine a configurable control with an intelligent circuit in a cost-effective and space-saving manner.
  • an underlying integrated circuit in particular as a system-on-chip or as a chip-to-chip connection with through-connection, so as to combine a configurable control with an intelligent circuit in a cost-effective and space-saving manner.
  • the production costs are reduced with the fluid transport device according to the invention, the costs are reduced, and there are external components and additional liquid volumes of the reagent as a dead volume for pumping saved.
  • the control unit of the fluid transport device may be configured such that by means of the control signals, the piezoelectric layer is excitable such that applied fluid has a force for moving the fluid along the fluid transport region in a direction parallel to the first electrically conductive layer, parallel to the piezoelectric layer and parallel to the second electrically conductive layer can be generated.
  • control signals are set such that acoustic waves generated by applying the control signals to the first and second electrically conductive regions exert such a mechanical force or impulse on a fluid in the fluid transport region in that this fluid experiences a force on a (eg planar) surface of the fluid transport device, ie perpendicular to the layer arrangement of the two electrically conductive layers and the piezoelectric layer, which effects a horizontal movement of the fluid.
  • the substrate of the fluid transport device may be an electronic chip in which the control unit is monolithically integrated.
  • the control unit may be provided as an integrated electrical circuit in the substrate, using as a substrate
  • Silicon substrate in particular a silicon chip can be used.
  • a reflection layer may be provided between the substrate and the first electrically conductive layer, which reflection layer is arranged for reflecting acoustic waves generated by means of the piezoelectric layer.
  • a reflective layer avoids or reduces the penetration of acoustic waves into the interior of the substrate.
  • Such a reflection layer may comprise a plurality of partial layers, the overall arrangement of the partial layers causing a mechanical wave generated by the piezoelectric layer to be at least partially reflected, thus avoiding such a wave adversely affecting an integrated circuit possibly contained in the substrate.
  • the reflection layer may be realized as an acoustic Bragg filter having at least two layers with different values of propagation velocity of acoustic waves.
  • the reflection layer can thus be used as an acoustic Bragg
  • Be realized filter i. as an arrangement of at least two layers with different (preferably greatly different) values of
  • a cavity may be provided in a substrate below the first electrically conductive layer. This cavity may be realized in the substrate as a via (ie, completely penetrating the substrate) or as a blind hole (ie, not fully penetrating the substrate, but forming a trench in the substrate). Such a cavity clearly has the effect that acoustic waves remain in the area above the cavity and are not guided into undesired areas. In this way, the cavity contributes to increasing the quality of the fluid transport device.
  • the first electrically conductive layer and / or the second electrically conductive layer can be divided into a plurality of (preferably mechanically non-continuous) regions, wherein the control unit is set up such that a separate control signal can be applied in each region.
  • the first electrically conductive layer may be provided as a non-continuous layer, i. be provided as an array of non-contiguous subregions.
  • the second electrically conductive layer may be divided into a plurality of portions that are not contiguous, i. mechanically and / or electrically separated from each other.
  • a partial region of the first electrically insulating layer and a partial region of the second electrically insulating layer are arranged one above the other and separated from one another by the piezoelectric layer.
  • the portions of the two electrically conductive layers may be grouped into pairs, each pair including a portion of the first electrically conductive layer and a portion of the second electrically conductive layer.
  • the control unit can be applied to the two subregions of such a group in each case a control signal. Ie that All subregions or part of the subregions of the first electrically conductive layer can be at different electrical potentials, and that all subregions or part of the subareas of the second electrically conductive layer can be at different electrical potentials.
  • a location-dependent distribution of acoustic waves can be generated, in particular by providing a phase shift between the electrical excitation signals at the respective partial area pairs, so that a mechanical force profile results over the arrangement of partial areas of the first and second electrically conductive layers a particularly effective mechanical guiding of the fluid in the fluid transport region is made possible.
  • a desired acoustic wave frequency can be generated, thus providing high flexibility in moving the acoustic wave
  • control unit can be arranged such that in each area of the first electrically conductive layer and / or the second electrically conductive layer, a separate control signal can be applied in such a manner, and that the control signals each have a predeterminable phase shift between adjacent areas .
  • the control signals may comprise electrical alternating signals, for example with a sine profile, with a sawtooth profile or with a
  • the fluid transport region can be realized by means of a capillary, by means of a trench or by means of a hydrophilic region, which hydrophilic region is delimited by a hydrophobic region.
  • the fluid transport region can be provided as a capillary, ie as a tubular structure, along which the liquid to be transported is guided, wherein by means of a formed below the capillary
  • the fluid transport area as a trench, i.
  • the movement of the liquid can be realized from the outside and thus optically monitored.
  • fluid can also be injected from the outside very easily, e.g. with a micro-pipette.
  • Another realization of the fluid transport region may be that a hydrophilic region on a for
  • Example plan surface is provided, and this hydrophilic region is bounded by a hydrophobic region.
  • a water-based fluid will then preferentially move on the hydrophilic area, whereas movement on the hydrophobic area is avoided.
  • a transport path can be predetermined for a fluid to be transported.
  • the fluid transport region may describe a one-dimensional linear locus, or may also describe curved or any other loci, for example, a circular trajectory.
  • the sensor arrangement according to the invention will be described in more detail. Embodiments of the sensor arrangement also apply to the fluid transport device and vice versa.
  • the sensor element of the sensor arrangement can be integrated in the substrate.
  • the fluid transport device and additionally the sensor element may be provided monolithically integrated in the substrate, whereby a miniaturized lab-on-chip is achieved. Due to short signal paths sensor signals can be transported substantially trouble-free, whereby a high detection sensitivity is achieved.
  • the sensor element can be designed, for example, according to the catcher molecule principle.
  • the sensor element may have one or more gold electrodes on which capture molecules (for example, DNA half-strands) are immobilized.
  • capture molecules for example, DNA half-strands
  • an electrically insulating material such as silicon oxide or silicon nitride may also be used. If in the fluid to the capture molecules complementary molecules (for example, DNA half-strands with a matching to the sequence of the capture molecules
  • Hybridization events i. to bonds between the capture molecules and the particles to be detected, thereby changing the electrical / optical property in an environmental region of the sensor element. These altered properties can be detected electrically and / or optically and serve as a sensor signal.
  • the first fluid transport device and the second fluid transport device of the fluid mixing device can be integrated on and / or in a common substrate. This is a miniaturized lab-on-chip arrangement because a common substrate is used to form the fluid transport device and the mixing device.
  • the fluid mixing device With the fluid mixing device, a miniaturized arrangement is provided, with the two fluids can be brought into operative connection by being brought together by means of separate fluid transport devices in a mixing area, which results in merging vortex, the allow particularly effective and above all fast and thus cost-effective mixing of the two liquids.
  • two reactants for an intended chemical reaction can be effectively combined, and a chemical reaction can be carried out even at small amounts at a high reaction rate.
  • FIGS. 1A, 1B are cross-sectional views of a fluid transport device according to a first embodiment of the invention
  • FIG. 1C shows a plan view of the fluid transport device according to the first exemplary embodiment of the invention shown in FIGS. 1A, 1B
  • FIGS. 2, 3 are cross-sectional views of a fluid transport
  • FIGS. 4, 5 are cross-sectional views of a fluid transport
  • FIG. 6 shows a cross-sectional view of a fluid transport device according to a fourth exemplary embodiment of the invention
  • FIG. 7 is another cross-sectional view of the fluid transport
  • Figure 8 are shown applied to the fluid transport device according to the fifth embodiment of the invention.
  • FIG. 10 shows a sensor arrangement according to a first exemplary embodiment of the invention
  • FIG. 11 is a cross-sectional view of a fluid mixing apparatus according to a first embodiment of the invention.
  • FIG. 12 is a plan view of the fluid mixing apparatus according to the first embodiment of the invention.
  • FIG. 13 shows a sensor arrangement according to a second exemplary embodiment of the invention
  • FIG. 14 is a cross-sectional view of a fluid mixing
  • FIG. 15 is a plan view of the fluid mixing apparatus according to the second embodiment of the invention.
  • FIGS. 1A to 1C a fluid transport device 100 according to a first exemplary embodiment of the invention will be described with reference to FIGS. 1A to 1C.
  • FIG. 2A shows a schematic cross-sectional view of the fluid transport device 100.
  • the fluid transport device 100 includes a silicon chip 101 and a reflection layer 102 formed thereon, which is formed of a plurality of sub-layers, and for reflecting by means of a piezoelectric
  • Layer 104 generated acoustic waves is set up.
  • On the reflective layer 102 is a first metal layer
  • first metal layer 103 formed, which is supplied by means of a first terminal 106 with an electrical control signal.
  • first metal layer 103 is a piezoelectric layer
  • a second metal layer 105 is formed, which by means of a second terminal 107, another electrical control signal is provided.
  • the surface of the fluid transport device 100 forms a fluid transport region along which a supplied fluid (not shown in the figure) is movable.
  • a control unit (not shown in the figure), by means of which the first metal layer 103 and the second metal layer 105, respectively, an electrical control signal is supplied. By means of these control signals, the piezoelectric layer 104 can be excited to form waves in such a way that a force for moving the supplied fluid along the fluid transport region can be generated.
  • an electrical control signal is respectively provided by the control unit in the silicon chip 101 via the first terminals 106, 107 of the first metal layer 103 and the second metal layer 105, whereby in the piezoelectric layer 104 acoustic waves (bucco acoustic waves , BAW) whose array wavefront induces a pulse on the liquid in the fluid transport region, whereby the fluid can be moved in a direction perpendicular to the paper plane of FIG. 1A.
  • acoustic waves ucco acoustic waves , BAW
  • the first terminal 106 for coupling the first metal layer 103 to the control unit is shown in FIG. 1B by means of a first via 111 of an electrically conductive one
  • Through-hole through the silicon chip 101 forms.
  • the second port 107 in FIG. 1B realized by means of a second via 112 for passing through the active layers and by means of a fourth via 115 for through-contacting by the silicon chip 101.
  • an insulating structure 113 for electrically insulating the conductive components of the fluid transporting device 100 from each other is provided.
  • FIG. 1C shows a top view 120 of the fluid transport device 100.
  • FIG. 2 a fluid transport device 200 according to a second exemplary embodiment of the invention will be described with reference to FIG. 2, FIG.
  • the fluid transport device 200 shown in FIG. 2 essentially differs from the fluid transport device 100 shown in FIG. 1A in that a blind-hole cavity 201 is introduced into the silicon chip 101, i. a cavity under the resonator / piezoelectric material, whereby the resonance behavior of the fluid transport device 200 is improved.
  • a reflective layer 102 is dispensable in the cavity configuration of FIG.
  • FIG. 3 shows a detailed view of the fluid transport device 200 shown schematically in FIG. 2, in which in particular the plated-through holes 111, 112, 114, 115 and the insulation structure 113 are shown.
  • FIG. 2 The layer sequence shown in Figure 2, Figure 3 is prepared by the silicon chip 101 is thinned by means of etching in a central region, whereby the blind hole cavity 201 is formed.
  • FIG. 4 a fluid transport device 400 according to a third exemplary embodiment of the invention will be described with reference to FIG. 4, FIG.
  • the fluid transport device 400 shown in FIG. 4 essentially differs from the fluid transport device 200 shown in FIG. 2 in that the blind-end cavity 201 is replaced by a through-hole cavity 401 which covers the silicon transport device 200. Chip 101 completely penetrates. This is made possible with a backside etching of the silicon chip 101 as far as the resonator / piezoelectric material.
  • the fluid transport device 400 shown in FIG. 4 has a particularly good resonance behavior.
  • FIG. 5 once again shows the fluid transport device 400, in which in particular the details not shown in FIG. 4 (components 111 to 115) are shown.
  • FIG. 7 shows another cross-sectional view of the fluid transport device 600 along a section line II 'shown in FIG.
  • first metal layer 103 in the fluid transport device 600 is divided into a plurality of first metal layer subareas 703 and that the second metal layer 105 is divided into a plurality of second metal layer subregions 704 is.
  • the first metal layer subareas 703 are electrically decoupled from one another, wherein a separate drive signal can be provided to each first metal layer subarea 703 by means of the control circuit 701 integrated in the silicon chip 101.
  • the piezoelectric layer 104 is also provided in FIG. 7 as a continuous, continuous layer.
  • the second metal layer 105 is divided in the fluid transport device 600 into a plurality of second metal layer subregions 704, wherein each of the second metal layer subregions 704 can be provided with a separate control signal by means of the integrated control circuit 701.
  • a first metal layer portion 703 and a second metal layer portion 704 together with a portion of the piezoelectric layer 104 interposed therebetween constitute a sandwiched unit, and the interaction of a plurality of such units causes a strong impulse to the liquid.
  • a location-dependent force may be applied to the analysis solution 602 so as to be transported along the direction of movement 702.
  • an isolation limit 700 is shown in FIG.
  • FIG. 6 shows a cross section of the arrangement of the actuators for the fluid transport according to the invention. Contraption.
  • a number of actuators with arbitrarily long (for example, also curved) perpendicular to the transport direction 702 and as short as possible in the transport direction 702 may be driven by an underlying integrated circuit 701 having a periodic signal over the transport period.
  • Liquids 602 are transported along the transport direction 702 through the channel formed by components 601, 700.
  • the analysis solution 602 is kept in limited areas.
  • the surface property may also be
  • FIG. 8 shows a fluid transport device 800 which essentially corresponds to the fluid transport device 600 shown in FIG. 7, but in which the isolation restriction 701 is not shown.
  • control signals are applied to the first metal layer subregions 703 and to the second metal layer subregions 704, respectively, as a result of which the liquid 602 according to FIG moved to the right, which is characterized by the direction of movement 801.
  • Subregions 703, 704 are applied in order to achieve the movement of the analysis solution 602 shown in FIG. 8 along the direction of movement 801.
  • a first diagram 900 of Fig. 9 for a first time tl along an abscissa 901, the location x, i. the arrangement of the first and second metal layer portions 703, 704 of the fluid transport device 800 in a direction from left to right as shown in Figure 8 plotted.
  • an ordinate 902 is a
  • the period of the drive signals between the individual components 703, 704 is staggered with respect to one another so that a pulse transfer is exerted on the liquid 602 parallel to the surface in the direction of the delayed phase.
  • This effect is utilized to transport the liquid 602.
  • the fluid transport device 800 which is due to the vertical layer sequence comprising a respective first metal layer portion 703, a portion of the piezoelectric layer 104 and a second metal layer Partial region 704, as well as from the division of the first and second metal layers 102, 104 into first and second metal layer portions 703, 704 results. from that then results in a movement of the liquid in the horizontal direction.
  • the sensor arrangement 1000 contains a plurality of inventive fluid transport devices 1001 to
  • a sensor element 1008 to 1014 is provided.
  • a fluid can be filled, passed through the first fluid transport device 1001 and thus introduced into the first sensor element 1008.
  • a potentially occurring sensor event can be detected.
  • the analysis solution is transported by means of the second fluid transport device 1002 to a second sensor element 1009, where another sensor event can be detected, etc.
  • a part of the sensor elements 1008 to 1014 may be replaced by, for example, a reactor element in which an analysis liquid, which is moved by the sensor device 1000 by means of the fluid transport devices 1001 to 1007, is subjected to a chemical reaction for example, by mixing the analysis solution with another liquid (not shown in the figure), which other liquid may have a chemical reactant to a substance contained in the first liquid.
  • a chemical reaction for example, by mixing the analysis solution with another liquid (not shown in the figure), which other liquid may have a chemical reactant to a substance contained in the first liquid.
  • FIG. 10 shows such an array with a representation of the method according to the invention.
  • the fluid transport devices 1001 to 1007 are preferably located below the liquid channels, since a connection of the sensor to the transport device is not always advantageous, especially for the implementation of high-resolution sensors with the described technology, since such a propagation of surface waves over the whole area of the array is not possible in any case.
  • the preparation of sensors with capture molecules for later reaction with target molecules according to the above method is possible.
  • the construction of the fluid mixing device 1100 is similar in essential parts to the fluid transport device 100 shown in Fig.l, wherein by means of an oscillator circuit 1101, an alternating signal between the first metal layer 103rd and the second metal layer 105 is applied.
  • an oscillator circuit 1101 an alternating signal between the first metal layer 103rd and the second metal layer 105 is applied.
  • two reagents for example, to perform a chemical reaction
  • the two reagents are introduced in two channels to a reactor element.
  • turbulences in the mixture occur when they meet, which ensures efficient and above all rapid mixing.
  • Fig. 12 is a plan view of the fluid mixing apparatus 1100 of Fig. 11.
  • the sensor arrangement 1300 is formed from a fluid transport device according to the invention (not shown in the figure), wherein a fluid can be transported along a first injection channel 1301 by means of the fluid transport device.
  • a second injection channel 1302 a second liquid is contained.
  • the first injection channel 1301 and the second injection channel 1302 intersect in an intersection region, wherein in the intersection region the liquids in the two injection channels 1301, 1302 meet.
  • the first injection channel 1301 is a part of an analysis solution of the second injection channel 1302 located in the crossing region of the first injection channel
  • Movement of the electrolyte solution is entrained and is supplied along the second injection channel 1302 a sensor element (not shown in the figure), where a defined amount of the branched analysis liquid can be examined and a sensor event can be detected.
  • a fluid mixing device 1400 according to a second exemplary embodiment of the invention will be described with reference to FIG. 14, FIG.
  • the fluid mixing device 1400 shown in FIG. 14 is similar in structure to the fluid transport device 100 shown in FIG. 14
  • vortexes can be generated for mixing two fluids, so that a particularly good mixing of the two fluids is made possible.
  • a method for moving liquids on a sensor surface is shown in FIG. 14, FIG. 15, whereby an acceleration of otherwise diffusion-limited reactions takes place on the sensor surface.

Abstract

La présente invention concerne un dispositif d'acheminement de liquides comprenant un substrat, une première couche électriquement conductrice disposée sur le substrat, une couche piézo-électrique appliquée sur la première couche électriquement conductrice, une seconde couche électriquement conductrice appliquée sur la couche piézo-électrique, une zone d'acheminement de liquides le long de laquelle un liquide amené peut se déplacer, et une unité de commande grâce à laquelle la première couche électriquement conductrice et la seconde couche électriquement conductrice peuvent recevoir des signaux de commande électriques qui servent à exciter la couche piézo-électrique de sorte qu'une force peut être produite sur le liquide amené, afin de le mettre en mouvement le long de la zone d'acheminement de liquides.
PCT/DE2005/001183 2004-08-02 2005-07-05 Dispositif d'acheminement de liquides, systeme de detection, dispositif de melange de liquides et procede pour realiser un dispositif d'acheminement de liquides WO2006012826A1 (fr)

Applications Claiming Priority (2)

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DE102004037348A DE102004037348A1 (de) 2004-08-02 2004-08-02 Fluid-Transport-Vorrichtung, Sensor-Anordnung, Fluid-Misch-Vorrichtung und Verfahren zum Herstellen einer Fluid-Transport-Vorrichtung
DE102004037348.5 2004-08-02

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WO2012076899A3 (fr) * 2010-12-09 2012-11-01 The University Of Manchester Dispositif
US8692442B2 (en) 2012-02-14 2014-04-08 Danfoss Polypower A/S Polymer transducer and a connector for a transducer
US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer

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WO2013053039A1 (fr) * 2011-10-09 2013-04-18 Simon Fraser University Dispositif de microfluidique reconfigurable pour analyse multiplexée d'échantillons

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US8891222B2 (en) 2012-02-14 2014-11-18 Danfoss A/S Capacitive transducer and a method for manufacturing a transducer

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