WO2005111546A2 - Element de capteur et systeme de mesure angulaire associe - Google Patents

Element de capteur et systeme de mesure angulaire associe Download PDF

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Publication number
WO2005111546A2
WO2005111546A2 PCT/IB2005/051441 IB2005051441W WO2005111546A2 WO 2005111546 A2 WO2005111546 A2 WO 2005111546A2 IB 2005051441 W IB2005051441 W IB 2005051441W WO 2005111546 A2 WO2005111546 A2 WO 2005111546A2
Authority
WO
WIPO (PCT)
Prior art keywords
sensor element
output signal
angle
supply
supply voltage
Prior art date
Application number
PCT/IB2005/051441
Other languages
English (en)
Other versions
WO2005111546A3 (fr
WO2005111546A8 (fr
Inventor
Reinhard Buchhold
Original Assignee
Philips Intellectual Property & Standards Gmbh
Koninklijke Philips Electronics N. V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Intellectual Property & Standards Gmbh, Koninklijke Philips Electronics N. V. filed Critical Philips Intellectual Property & Standards Gmbh
Priority to JP2007512647A priority Critical patent/JP2007537437A/ja
Priority to EP05753018A priority patent/EP1751501A2/fr
Publication of WO2005111546A2 publication Critical patent/WO2005111546A2/fr
Publication of WO2005111546A3 publication Critical patent/WO2005111546A3/fr
Publication of WO2005111546A8 publication Critical patent/WO2005111546A8/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
    • G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields

Definitions

  • the present invention relates to a magnetoresistive sensor element as claimed in the preamble of claim 1.
  • Contactless angle measurement is a main field of application of magnetoresistive sensors. The reason for this is that the solid state effect on which the magnetoresistive sensor is based is an angle effect:
  • magnetoresistive sensor element having the features specified in claim 1, by an angle sensor having the features specified in claim 6 and by an angle measurement system having the features specified in claim 10.
  • Advantageous embodiments and expedient developments of the present invention are characterized in the respective dependent claims.
  • the present invention is based on the fact that the magnetoresistive sensor element is designed in the form of a two-dimensional structure and in particular is flat. Use is thus made, instead of a number of linear or bar-shaped bridge resistors (--> formation of a Wheatstone bridge), of at least one flat, in particular anisotropic, M[agneto]R[esistive] element.
  • This two-dimensional structure or the flat design of the magnetoresistive sensor element has two critical advantages compared to the Wheatstone bridge, namely - smaller technologically induced electrical offsets Vo and - smaller angle errors caused by the internal field Ho- According to the invention, therefore, layouts without a preferred magnetic direction are achieved (in AMR Wheatstone bridges according to the prior art, such preferred magnetic directions cause oscillating angle errors).
  • the occurrence of undesirable scattering in the output signal is thus eliminated by the flat design of the sensor element.
  • the supply voltage of the magnetoresistive sensor element advantageously falls continuously.
  • the intrinsic magnetization H 0 has a low field strength, so that the resulting internal magnetization H res is aligned essentially parallel to the external magnetic field H ext .
  • the direction of the gradient of the differential voltage is oriented essentially perpendicular to the direction of the drop in the supply voltage or flow of the supply current.
  • the sensor element is formed at least partially of at least one ferromagnetic alloy, for example of Permalloy.
  • the nickel-iron alloy Permalloy Ni 8 oFe 20 ) offers the advantage of high magnetic permeability while at the same time having a low field strength and a low hysteresis loss.
  • the magnetic properties of such a ferromagnetic structure can be tailored by the external shape. Furthermore, when passed through by a magnetic field, Permalloy has the property of altering the ohmic resistance by a few percent.
  • the sensor element may be designed to have four or more poles, in particular with a supply terminal and with a signal tap. In this case, the sensor element advantageously has at least one ground point for forming a fixed voltage potential. In one advantageous embodiment of the present invention, the sensor element may be designed to be essentially rectangular or essentially circular. Independently thereof or in conjunction therewith, the sensor element advantageously has no preferred magnetic orientation.
  • the present invention furthermore relates to an angle sensor for measuring magnetic field strengths, in particular the temporal gradient of magnetic field strengths, having at least one sensor element of the type mentioned above.
  • an angle sensor may also be designed such that not only a single supply voltage can be applied or not only a single supply current flows; rather, in one expedient embodiment the angle sensor may be designed such that the direction of the drop in a first supply voltage or flow of a first supply current is rotated or offset by a defined angle, for example by 45 degrees, with respect to the direction of the drop in a second supply voltage or flow of a second supply current.
  • the angle sensor may advantageously have - a first sensor element assigned to the first supply voltage or to the first supply current and additionally - a second sensor element assigned to the second supply voltage or to the second supply current.
  • the first supply voltage or the first supply current and the second supply voltage or the second supply current may also be assigned to one and the same sensor element, for example by means of terminals that are rotated or offset in each case by the defined angle, for instance by 45 degrees.
  • the present invention furthermore relates to a contactless angle measurement system, having - at least one angle sensor of the type mentioned above and - at least one circuit arrangement, in particular at least one integrated circuit, which can be supplied with at least one output signal of the angle sensor and is provided to evaluate the output signal.
  • the present invention finally relates to the use of at least one sensor element of the type mentioned above and/or of at least one angle sensor of the type mentioned above and/or of at least one angle measurement system of the type mentioned above - for detecting at least one reference mark when measuring at least one crankshaft angle, - for detecting metallic objects, - for measuring rotation speeds and/or currents, - for detecting weak magnetic fields, for example for detecting small movements and/or changes in active components of cars or machines, such as for example of at least one drive, of at least one metal rod, of at least one cam, of at least one wheel or of at least one gearwheel, - for detecting and/or controlling traffic movements, - for navigation purposes, for example using at least one compass, or - for contactless angle measurement.
  • the magnetoresistive sensor device (or the magnetoresistive sensor element) of the type mentioned above and/or the angle sensor of the type mentioned above and/or the angle measurement system of the type mentioned above may advantageously also be used - as a proximity sensor, - as a motion sensor or - as a position sensor.
  • Fig. 1 schematically shows a first example of embodiment of a magnetoresistive sensor element according to the present invention.
  • Fig. 2 diagrammatically shows the angle between the supply current and the external magnetic field, plotted against the standardized output signal of the sensor element of Fig. 1.
  • Fig. 3 schematically shows a second example of embodiment of a magnetoresistive sensor element according to the present invention.
  • Fig. 4 schematically shows an example of embodiment of a contactless angle measurement system according to the present invention, having an example of embodiment of an angle sensor according to the present invention with two sensor elements of Fig. 1 or of Fig. 3, wherein the two sensor elements are arranged offset by an angle of 45 degrees with respect to one another.
  • Fig. 5 diagrammatically shows the angles l and ⁇ 2 to be determined, in each case plotted against the standardized output signal of the sensor element of Fig. 4.
  • Fig. 6 schematically shows a third example of embodiment of a magnetoresistive sensor element according to the present invention.
  • Fig. 7A schematically shows an angle sensor according to the prior art in the form of a so-called double bridge.
  • Fig. 7B schematically shows the circuit arrangement of a Wheatstone bridge according to the prior art for the angle sensor of Fig. 7 A.
  • the sensor element 100 is designed as a flat, essentially rectangular A[nisotropic]M[agneto]R[esistive] element, wherein in this case the AMR effect is shown 50 times greater than it is.
  • This AMR element 100 is supplied via a supply terminal 10 and via a reference terminal 12 at ground potential GND respectively with a supply voltage VCC (hereinbelow also given as Vcc) and with a supply current i brought about by the supply voltage VCC.
  • VCC supply voltage
  • the terminals 10 and 12 are opposite one another and are in each case arranged approximately in the center of the side of the AMR element 100 that has the width w.
  • the principle of the AMR element 100 is based on the fact that by superposing an intrinsic magnetization H 0 of the AMR element 100 and an external magnetic field H ext a resulting internal magnetic field H res is produced. Since in the AMR element 100 as shown in Fig. 1 the characteristic intrinsic field strengths H 0 are low ( ⁇ --> no preferred magnetic direction), the resulting internal magnetization H res is aligned approximately parallel to the external field H ex t even at low field strengths, that is to say the direction of the resulting internal magnetization H res corresponds to the direction of the external magnetic field H ex t.
  • the AMR element 100 thus has the conductivity p « in the direction of the external field H ext and the conductivity p perpendicular thereto.
  • a differential voltage V out (so-called pseudo-Hall voltage) is set in the AMR element 100, said voltage being described by the following equation in a form standardized to the supply voltage VCC: where f. (geometry) correction factor between 0 and 1, w: width of the AMR sensor element 100 (defined transversely to VCC-GND), : length of the AMR sensor element 100 (defined along VCC- GND).
  • the AMR element 100 has two tapping electrodes 20, 22 which lie opposite one another, namely - one positive tapping electrode 20 (for the tap V+ for tapping the positive differential voltage V out ) and - one negative tapping electrode 22 (for the tap V- for tapping the negative differential voltage V ou t).
  • the two tapping electrodes 20, 22 are in each case arranged approximately in the center on the side of the AMR element 100 that has the length 1.
  • the isopotential lines of the AMR sensor 100 are shown using different colors.
  • Fig. 2 shows the relation between the (standardized) output signal V out of the AMR element 100 and the angle ⁇ of the external field H ext or of the resulting internal magnetic field H res .
  • FIG. 1 can detect an angle range of ninety degrees (cf. Fig. 2).
  • the angle ⁇ of the external field H ext (with respect to the direction D of the current flow i) is plotted on the abscissa and the standardized differential output voltage V o ut of the AMR element 100 shown in Fig. 1 is plotted on the ordinate.
  • the amplitude of the illustrated output signals of the AMR element 100 is 9.5 mV/V, which corresponds to approximately eighty percent of the AMR effect (of about 12 mV/V).
  • the transfer characteristic of a flat AMR angle sensor element 100 corresponds to that of the known Wheatstone bridges (cf. prior art).
  • considerably lower offsets Vo are produced on account of manufacturing influences for the flat and/or two-dimensional AMR structure 100 than in the case of full bridges consisting of linear individual resistors.
  • the use of flat AMR elements 100 instead of linear resistors (cf. prior art: Fig. 7 A and Fig. 7B) thus reduces undesirable electrical offsets while having a comparable useful amplitude. As a result, the efficiency when manufacturing AMR angle sensors can be increased and the complexity during subsequent signal processing can be reduced.
  • a further advantage of the novel two-dimensional AMR elements 100 is that they can be produced without a preferred magnetic orientation. In conventional Wheatstone bridges, such a preferred orientation leads to oscillating angle errors with amplitudes of up to 0.3 degrees. Furthermore, on account of the described flat design of the AMR element 100, the temperature coefficients of the electrical offsets are also lower.
  • Fig. 3 shows a flat AMR element 100 without a preferred magnetic orientation.
  • the flat AMR element 100 is formed of a circular Permalloy (AMR) layer, wherein the corresponding electrodes, namely the supply terminal 10, the positive tapping electrode 20, the reference terminal 12 and the negative tapping electrode 22 are arranged on the circular Permalloy (AMR) layer in each case offset with respect to one another by ninety degrees in the counterclockwise direction.
  • the amplitude of the output signals of the AMR element 100 shown in Fig. 3 is 11.5 mV/V and is thus approximately a fifth higher than the amplitude of the output signals of the AMR element 100 shown in Fig. 1 (cf. Fig. 2).
  • the present invention also includes the possibility - of combining a number of AMR sensor elements 100, 110 (cf. Fig.
  • FIG. 4 shows an example of embodiment of a contactless angle measurement system 400 which has an example of embodiment of an angle sensor 200.
  • the angle sensor 200 has a first AMR sensor element 100 and a second AMR sensor element 110, wherein these two sensor elements 100, 110 are rotated by a certain angle, namely by 45 degrees, with respect to one another.
  • the output signals 210, 212 and 214, 216 of the AMR sensor elements 100 and 110 exhibit a phase offset by ninety degrees with respect to one another since the output signals 210, 212 of the AMR sensor element 100 are proportional to sin2 ⁇ and the output signals 214, 216 of the AMR sensor element 110 rotated by 45 degrees are proportional to cos2 ⁇ .
  • Such an arrangement of the sensor elements 100, 110 thus makes it possible to detect an angle range of 180 degrees (cf. Fig. 5).
  • the angle ⁇ of the external field H ext is plotted on the abscissa and the standardized differential output voltage V out of the AMR elements 100, 110 shown in Fig. 4 is plotted on the ordinate.
  • the angle measurement system 400 has, in addition to the angle sensor 200, an integrated circuit 300 for evaluating the output signals 210, 212 and 214, 216 of the sensor elements 100 and 110; this circuit arrangement 300 in turn has - a first analog/digital converter 320 which can be supplied with the output signals 210, 212 of the first sensor element 100 and with the first output signal 312 of an input buffer 310 and - a second analog/digital converter 330 which can be supplied with the output signals 214, 216 of the second sensor element 110 and with the second output signal 314 of the input buffer 310.
  • the integrated circuit 300 furthermore has an arithmetic unit 340 which is arranged downstream of the two analog/digital converters 320, 330.
  • an adaptation unit 350 is provided which can be supplied with the second output signals 324 and 334 of the analog/digital converters 320 and 330 and with the output signal 342 of the arithmetic unit 340, said adaptation unit being connected between the arithmetic unit 340 and a digital/analog converter 360.
  • This digital/analog converter 360 which is likewise assigned to the integrated circuit 300 can be supplied with the output signal 352 of the adaptation unit 350.
  • an output buffer 370 is provided which can be supplied with the output signal 362 of the digital/analog converter 360.
  • the integrated circuit arrangement 300 has - an oscillator/clock generator unit 380, - a test/trim unit 382 which is provided to test and/or compare the determined values and - a reset unit 384.
  • Fig. 6 shows a third example of embodiment of a magnetoresistive sensor element 100.
  • This flat AMR element 100 is designed to be circular and has a total of four tapping electrodes 20, 22 and 24, 26 for tapping differential voltages V out i an V out2 , respectively.
  • the first, positive tapping electrode 20 and the second, negative tapping electrode 22 are arranged opposite one another and are offset by in each case ninety degrees - to the supply terminal 10 assigned to the tapping electrodes 20, 22 and - to the reference terminal 12 assigned to the tapping electrodes 20, 22.
  • a first supply voltage VCC1 is applied to the AMR element 100 against ground potential GND1 by means of the supply electrode 10 and the reference terminal 12.
  • the third, positive tapping electrode 24 and the fourth, negative tapping electrode 26 are likewise arranged opposite one another and are offset by in each case ninety degrees - to the supply terminal 14 assigned to the tapping electrodes 24, 26 and - to the reference terminal 16 assigned to the tapping electrodes 24, 26.
  • a second supply voltage VCC2 is applied to the AMR element 100 against ground potential GND2 by means of the supply electrode 14 and the reference terminal 16.
  • the third tapping electrode 24 is thus the first tapping electrode with respect to the supply voltage VCC2 or to the current flow i2; the fourth tapping electrode 26 is thus the second tapping electrode with respect to the supply voltage VCC2 or to the current flow i2.
  • the electrodes 14, 16 and 24, 26 are in each case arranged offset by 45 degrees in the clockwise direction to the electrodes 10, 12 and 20, 22.
  • the third example of embodiment shown in Fig. 6 thus corresponds approximately to an integrated embodiment of the angle sensor 200 shown in Fig. 4. (In the angle sensor 200 shown in Fig.
  • the electrodes 14, 16 and 24, 26 are assigned to the second sensor element 110, wherein the second sensor element 110 is rotated by 45 degrees in the clockwise direction with respect to the first sensor element 100 having the electrodes 10, 12 and 20, 22.)
  • a comparable technical effect as in the case of the angle sensor 200 shown in Fig. 4 is achieved, that is to say the output signals V ou t ⁇ , V ou t2 tapped by the tapping electrodes 20, 22 and 24, 26 exhibit a phase shift comparable to Fig. 5.
  • a known angle sensor in the form of a so-called double bridge is shown in Fig. 7A.
  • This angle sensor has two Wheatstone bridges which are offset by 45 degrees with respect to one another, wherein - the resistors Rla, Rib, Rlc and Rid of the first Wheatstone bridge and - the resistors R2a, R2b, R2c and R2d of the second Wheatstone bridge are associated.
  • the circuit arrangement of such a Wheatstone bridge is shown in Fig. 7B.
  • the Wheatstone bridge has - a supply terminal for applying the supply voltage VCC, - a grounded reference terminal GND, - a tapping electrode for tapping the negative output signal V- or the negative differential voltage -V ou t and - a tapping electrode for tapping the positive output signal V+ or the positive differential voltage +V 0 ut-
  • first magnetoresistive sensor element in particular first anisotropic magnetoresistive sensor element 110 second magnetoresistive sensor element, in particular second anisotropic magnetoresistive sensor element
  • GND reference potential in particular ground potential GND1 first reference potential, in particular first ground potential GND2 second reference potential, in particular second ground potential Ho intrinsic magnetization, in particular intrinsic magnetic field
  • VCC Vcc supply voltage, in particular against ground potential GND
  • VCCl first supply voltage, in particular against ground potential GND1
  • VCC2 second supply voltage, in particular against ground potential GND2
  • V+l in particular positive differential voltage V out ⁇ to be tapped at the first tapping electrode 20 V-l in particular negative differential voltage V out i to be tapped at the second tapping electrode 22 V+2 in particular positive differential voltage V out2 to be tapped at the first tapping electrode 24 (cf. second example of embodiment, Fig. 4) or at the third tapping electrode 24 (cf. third example of embodiment, Fig. 6)
  • V-2 in particular negative differential voltage V ou t2 to be tapped at the second tapping electrode 26 (cf. second example of embodiment, Fig. 4) or at the fourth tapping electrode 26 (cf. third example of embodiment, Fig. 6)

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Magnetic Variables (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

La présente invention concerne la production d'au moins un élément de capteur magnétorésistif (100, 110). Cet élément de capteur magnétorésistif est tel que, au moyen d'au moins une borne d'alimentation(10, 14), notamment au moyen d'au moins une première borne d'alimentation, et que, au moyen d'au moins une borne de référence (12, 16), notamment au moyen d'au moins une deuxième borne d'alimentation, par exemple à un potentiel à la terre (GND; GND1, GND2), ledit élément de capteur peut être alimenté respectivement avec au moins une tension d'alimentation (VCC; VCC1, VCC2) et avec au moins un courant d'alimentation (i; il, i2). La différence de tension (Vout; Vout1, Vout2) est définie sous forme de fonction de l'angle (?;?1, ?2), entre la direction (D; D1, D2) de la chute de la tension d'alimentation (VCC; VCC1, VCC2) ou de l'écoulement du courant d'alimentation (i; il, i2) et la direction du champ magnétique interne résultant (Hres), cette différence de tension pouvant être dérivée entre au moins une première électrode de dérivation (20, 24), notamment une électrode de dérivation positive (V+; V+l, V+2) et au moins une deuxième électrode de dérivation (22, 26), notamment une électrode de dérivation négative (V-; V-1, V-2); la direction du champ magnétique résultant (Hres) étant donnée par la superposition de la magnétisation intrinsèque (Ho) et d'au moins un champ magnétique externe (Hext), qui peut être produit sans orientation magnétique préférée et dans lequel le décalage induit par la technologie est réduit au maximum ou même entièrement éliminé. Il est proposé que l'élément de capteur magnétorésistif (100, 110) soit plat et plus particulièrement que la chute de la tension d'alimentation (VCC; VCC 1, VCC2) soit continue.
PCT/IB2005/051441 2004-05-14 2005-05-03 Element de capteur et systeme de mesure angulaire associe WO2005111546A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007512647A JP2007537437A (ja) 2004-05-14 2005-05-03 センサ素子及び関連した角度測定システム
EP05753018A EP1751501A2 (fr) 2004-05-14 2005-05-03 Element de capteur et systeme de mesure angulaire associe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP04102117.1 2004-05-14
EP04102117 2004-05-14

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WO2005111546A2 true WO2005111546A2 (fr) 2005-11-24
WO2005111546A3 WO2005111546A3 (fr) 2006-03-16
WO2005111546A8 WO2005111546A8 (fr) 2006-08-24

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JP (1) JP2007537437A (fr)
CN (1) CN1954194A (fr)
WO (1) WO2005111546A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006077508A1 (fr) * 2005-01-18 2006-07-27 Nxp B.V. Detecteur d'angle
JP2008185406A (ja) * 2007-01-29 2008-08-14 Denso Corp 回転センサ
JP2009258122A (ja) * 2009-07-28 2009-11-05 Denso Corp 回転センサ及び回転センサ装置

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Publication number Priority date Publication date Assignee Title
FR2978833B1 (fr) * 2011-08-04 2014-05-02 Continental Automotive France Procede de calibration automatique d'un capteur d'arbre a cames pour vehicule automobile
JP6205774B2 (ja) * 2013-03-22 2017-10-04 セイコーエプソン株式会社 検出回路、半導体集積回路装置、磁界回転角検出装置、及び、電子機器
DE102019200183A1 (de) * 2018-01-15 2019-07-18 Continental Teves Ag & Co. Ohg Verfahren zur Wegerfassung, Wegerfassungsanordnung und Bremssystem

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US4668914A (en) * 1983-12-23 1987-05-26 International Standard Electric Corporation Circular, amorphous metal, Hall effect magnetic field sensor with circumferentially spaced electrodes
EP0660128A1 (fr) * 1993-12-23 1995-06-28 Thomson-Csf Détecteur de champ magnétique en couches minces
ES2111459A1 (es) * 1995-05-22 1998-03-01 Univ Madrid Complutense Dispositivo para la deteccion y medicion de campos magneticos.

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DE19543564A1 (de) * 1994-11-22 1996-05-23 Bosch Gmbh Robert Anordnung zur berührungslosen Drehwinkelerfassung eines drehbaren Elements
WO1998010302A2 (fr) * 1996-09-09 1998-03-12 Physical Electronics Laboratory Procede de reduction de la tension de decalage d'un dispositif hall
DE19722016A1 (de) * 1997-05-27 1998-12-03 Bosch Gmbh Robert Anordnung zur berührungslosen Drehwinkelerfassung
JP2003240598A (ja) * 2002-02-13 2003-08-27 Asahi Kasei Corp デジタル角度測定システム

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US4668914A (en) * 1983-12-23 1987-05-26 International Standard Electric Corporation Circular, amorphous metal, Hall effect magnetic field sensor with circumferentially spaced electrodes
EP0660128A1 (fr) * 1993-12-23 1995-06-28 Thomson-Csf Détecteur de champ magnétique en couches minces
ES2111459A1 (es) * 1995-05-22 1998-03-01 Univ Madrid Complutense Dispositivo para la deteccion y medicion de campos magneticos.

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006077508A1 (fr) * 2005-01-18 2006-07-27 Nxp B.V. Detecteur d'angle
JP2008185406A (ja) * 2007-01-29 2008-08-14 Denso Corp 回転センサ
US8106647B2 (en) 2007-01-29 2012-01-31 Denso Corporation Rotation sensor
JP2009258122A (ja) * 2009-07-28 2009-11-05 Denso Corp 回転センサ及び回転センサ装置

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JP2007537437A (ja) 2007-12-20
WO2005111546A3 (fr) 2006-03-16
EP1751501A2 (fr) 2007-02-14
WO2005111546A8 (fr) 2006-08-24
CN1954194A (zh) 2007-04-25

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