WO2005103742A1

WO2005103742A1 - Tcp handling device

Info

Publication number: WO2005103742A1
Application number: PCT/JP2004/005623
Authority: WO
Inventors: Hisashi Murano; Kiyoshi Shimizu; Syuuichi Kaneko
Original assignee: Advantest Corporation
Priority date: 2004-04-20
Filing date: 2004-04-20
Publication date: 2005-11-03
Also published as: TWI356907B; TW200606443A; CN100504415C; JPWO2005103742A1; CN1954223A

Abstract

In a TCP handler (2) capable of successively subjecting a plurality of TCPs to a test, a pusher main body (33) and sprockets (35a, 35b) are capable of being interlocked through an interlocking mechanism (38), so that when either the pusher main body (33) or the sprockets (35a, 35b) are driven, both the pusher main body (33) and the sprockets (35a, 35b) are interlocked and move. Such arrangement makes it possible to separately drive the pusher main body (33) and the sprockets (35a, 35b) by a single drive source (servomotor (31)).

Description

Specification

T C P handling equipment Technical field

The present invention relates to a type of IC device such as TCP (Tape Carrier Package) or COF (Chip On Film) (hereinafter referred to as TCP, C〇F, and other devices manufactured by TAB (Tape Automated Bonding) mounting technology. This is referred to as “TCP.” This is related to the TCP handling equipment used to test. Background art

In the manufacturing process of electronic components such as IC devices, electronic component test equipment that tests the performance and functions of the final manufactured IC device and devices in the intermediate stage is required.In the case of TCP, Test equipment for TCP is used.

The test equipment for TCP generally consists of a tester main body, a test head, and a TCP handling equipment (hereinafter sometimes referred to as a “TCP handler”). This TCP handler transports a carrier tape with a plurality of TCPs formed on a tape (which also includes the concept of film; the same applies hereinafter). The probe card is electrically connected to the test head. It has a function to sequentially apply multiple TCPs to the test by pressing the carrier tape against the probe of the probe and bringing the external terminal of the TCP into contact with the probe.

Such a TCP handler generally has a pusher body that presses the carrier tape against the probe and carrier tape on both sides of the pusher body. And a tape support, such as a bully or sprocket, for supporting and transporting the carrier tape. The pusher body and the tape support must be moved up and down separately so that the moving carrier tape supported by the tape support does not rub against the pusher body.

In performing the vertical movement of the pusher body and the tape support separately, the TCP test apparatus described in Japanese Utility Model Laid-Open Publication No. Sho 643-34557 discloses that the pusher body and the tape support are separately driven. It was driven by a source (Akuchi Yue).

However, providing a plurality of drive sources increases the cost, and the drive timing of the plurality of drive sources needs to be controlled, which makes the test apparatus complicated. Disclosure of the invention

The present invention has been made in view of such circumstances, and an object of the present invention is to provide a TCP handling apparatus that can separately move a pusher body and a tape support by a single drive source.

To achieve the above object, first, the present invention relates to a contact tape that supports a carrier tape having a plurality of TCPs formed on the tape and is electrically connected to a test head while being supported by a pusher unit. A TCP handling device capable of sequentially applying a plurality of TCPs to a test by pressing an external terminal of the TCP with a connection terminal of the contact portion, wherein the pusher unit comprises a pusher body and a pusher unit. A tape support for supporting a carrier tape in the vicinity of the pusher main body, and the carrier tape is moved to the contact part side by moving the carrier tape to the contact part. The pusher main body and the tape support are interposed by an interlocking mechanism. The pusher body and the tape support are moved together when one of the pusher body and the tape support is driven. Provide a TCP handling device (Invention 1).

The “tape support” in the present specification includes not only a sprocket that directly supports a carrier tape, but also a frame that supports the sprocket and the like.

According to the above invention (Invention 1), the pusher main body and the tape support can be separately moved by the single drive source by the interlocking mechanism. In the above invention (Invention 1), the interlocking mechanism includes a lever member, and the pusher body and the tape support are connected or engaged with different positions of the lever member, and the lever member It is preferable to interlock with different amounts of movement according to the rotation of the motor (Invention 2).

According to the above invention (Invention 2), the interlocking mechanism can be configured with a simple structure, and the movement amount of the pusher body and the tape support can be arbitrarily changed by changing the lever ratio. .

In the above invention (Invention 2), one end of the lever member is rotatably or rotatably slidably attached to a main body of the TCP handling device, and the other end of the lever member is the pusher main body. The lever member is rotatably and slidably or rotatably mounted, and an intermediate portion of the lever member can be brought into contact with the tape support, and a driving device is connected to the pusher body. Is preferable (Invention 3).

In the above inventions (Inventions 1 to 3), the interlocking mechanism includes a first engaging portion provided on the pusher body and a second engaging portion provided on the tape support. When the first engagement portion and the second engagement portion are engaged, the pusher main body and the tape support are integrally moved. (Invention 4).

According to the above invention (Invention 4), not only can the pusher main body and the tape support be separately moved by different movement amounts, but also the pusher main body and the tape support can be integrally moved. In this way, while moving the pusher body and the tape support integrally, the TCP displacement information is acquired, and the pusher body and the tape support are displaced together according to the amount of the TCP displacement. It is possible to correct the position deviation of TCP by using

In the above invention (Invention 1), the interlocking mechanism includes a lever member, a first engagement portion provided on the pusher body, and a second engagement portion provided on the tape support. The pusher body and the tape support are connected or engaged with different positions of the lever member when the pusher body and the tape support are at positions separated from the contact portion. When the pusher main body and the tape support come close to the contact portion, the first engagement portion and the second engagement portion are engaged. It is preferable that the pusher body and the tape support move integrally.

(Invention 5).

According to the above invention (Invention 5), while the pusher main body and the tape support are integrally moved in the vicinity of the contact portion, TCP positional deviation information is acquired, and the pusher main body is obtained in accordance with the positional deviation amount. By displacing the tape support and the tape support together, it is possible to correct the TCP misalignment. In the above invention (Invention 5), the pusher main body can adsorb the carrier tape, and while the first engagement portion and the second engagement portion are engaged with each other, It is preferable to adsorb the carrier tape (Invention 6). According to the above invention (Invention 6), the pusher body and the carrier tape are brought into close contact with each other in the vicinity of the contact portion, so that the TCP can accurately contact the contact portion. Further, when correcting the positional shift of the TCP with respect to the contact portion, it is possible to prevent the position of the pusher body and the carrier tape from being shifted.

Secondly, the present invention provides a method for transporting a TCP of a carrier tape to a contact section for performing an electrical test, and bringing an external terminal of the TCP into contact with a connection terminal of the contact section. A TCP handling device capable of applying a carrier tape to the contact portion, a tape supporter capable of engaging and supporting a carrier tape, and a tape supporter capable of pressing a carrier tape against the contact portion. A pusher unit having a driving device for driving the pusher body or the tape support so that the pusher body or the tape support can advance and retreat with respect to the contact portion is provided at a position facing the contact portion. The driving device is fixed to a main body of a TCP handling device, and the pusher nit is connected to the driving device. The present invention provides a TCP handling device comprising an interlocking mechanism capable of moving the pusher main body and the tape support in a contact portion direction by a moving device (invention 7).

According to the above invention (Invention 7), the pusher main body and the tape support can be moved in cooperation by a single driving device by the interlocking mechanism.

In the above invention (7), in the initial stage of moving the pusher unit in the direction of the contact portion, the interlocking mechanism may be configured so that the pusher main body moves more than the tape support in the initial stage. Move the main body and the tape support, and push the push unit In a later stage of moving the pusher body and the tape support in the contact portion direction, it is preferable to move the pusher body and the tape support so that the movement of the pusher body and the movement of the tape support become the same ( invention

8)

According to the above invention (Invention 8), the pusher main body can be moved to a position where the carrier tape supported and conveyed by the tape support does not rub against the pusher main body, and the pusher main body and the tape support are integrally formed. It is possible to correct the TCP misalignment by moving both to and displacing them together.

In the above inventions (Inventions 7 and 8), the interlocking mechanism includes a linear motion guide, a lever member, and an engaging member, and the linear motion guide is configured such that the pusher main body and the tape support are in contact with each other. The pusher body is provided between the pusher main body and the tape support so that the lever members can slide with respect to each other. One end of the lever member is attached to the main body of the TCP handling device to serve as a fulcrum. The other end of the lever member is attached to the pusher body to serve as a point of force, and the intermediate portion of the lever member can contact the tape support to serve as a point of action. A first engaging portion provided on the pusher body, and a second engaging portion provided on the tape support, wherein the first engaging portion and the second engaging portion are The pusher nits are separated from each other in an initial stage in which the pusher nit moves toward the contact portion, and are engaged with each other in a later stage in which the pusher nit moves in the contact portion direction. It is preferable that the support is provided at a position where the support can move physically (Invention 9). Brief Description of Drawings FIG. 1 is a front view showing a TCP test apparatus using a TCP handler according to one embodiment of the present invention.

FIG. 2 is a front view of a pusher unit in the TCP handler according to the embodiment.

FIG. 3 is a side view of a push unit in the TCP handler according to the embodiment.

FIG. 4 is an explanatory view (front view) showing an operation of the pusher unit in the TCP handler according to the embodiment.

FIG. 5 is an explanatory view (side view) showing an operation of the pusher unit in the TCP handler according to the embodiment.

FIG. 6 is a graph showing the operation of the pusher unit in the TCP handler according to the embodiment. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

FIG. 1 shows a TCP test apparatus using a TCP handler according to one embodiment of the present invention.

[T C P test equipment]

The TCP test apparatus 1 includes a tester main body (not shown), a test head 10 electrically connected to the tester main body, and a TCP handler 2 provided above the test head 10.

The TCP handler 2 sequentially tests a plurality of TCPs formed on the carrier tape 5 and includes an unwind reel 21 and a take-up reel 22. The previous carrier tape 5 has been wound up. The carrier tape 5 is unwound from the unwinding reel 21, is subjected to a test, and is wound up on the take-up reel 22. Between the unwinding reel 21 and the take-up reel 22, three spacer rolls that pass the protective tape 51 peeled from the carrier tape 5 from the unwinding reel 21 to the take-up reel 22. 23 a, 23 b and 23 c are provided. Each spacer roll 23a, 23b, 23c is vertically movable so that the tension of the protective tape 51 can be adjusted.

A tape guide 24 a, an unwind limiter 25 a, an in-side sub-split 25 b, and an in-side guide roller 25 c are provided below the unwind reel 21. The carrier tape 5 unwound from the unwinding reel 21 is guided by the tape guide 24a, while the unwinding limiter 25a, the in-side sub-sprocket 25b, and the inn side. It is transported to the pusher unit 3 via the guide rollers 25c.

A tape guide 24b, a take-up limit roller 25f, an articulated sub-plate 25e and an articulated guide roller 25d are provided below the take-up reel 22. After being subjected to the test, the carrier tape 5 passes through the out guide roller 25 d, the out sub-sprocket 25 e, and the take-up limit roller 25 f, and is guided by the tape guide 24 b while being wound. Take-up reel 22

A pusher unit 3 is provided between the guide roller 25 c on the side of the blade and the guide roller 25 d on the side of the blade. The pusher unit 3 will be described later.

The pusher nit 3 is connected to a pusher stage (not shown). The pusher stage is connected to the thermostat through a plurality of ball screws (not shown). The pusher unit 3 can be moved in the horizontal direction (XY plane direction) by driving the servo motor, and the pusher stage can be moved. G3 can be rotated around the vertical axis (around the Z axis). The first camera 6a is located on the front side (the left side in FIG. 1) of the pusher unit 3, and the second camera 6b is located on the lower side of the pusher unit 3 (the inner side of the probe card stage 7 described later). A third camera 6c is provided on the rear side (right side in FIG. 1) of the third camera. A mark punch 26a and a reject punch 26b are provided between the pusher unit 3 and the third camera 6c.

The mark punch 26a is for punching one or more holes at predetermined positions for the relevant TCP based on the test results, and the reject punch 26b is defective for the test. This is to cut out TCP that is determined to be present.

The cameras 6a, 6b, and 6c are connected to an image processing device (not shown), and the first camera 6a and the third camera 6c are connected to the carrier tape 5 with or without a TCP or a mark punch. The second camera 6b is for determining the position and number of holes according to a, and the second camera 6b is for obtaining information on the positional deviation between the TCP on the carrier tape 5 and the probe. In addition, the second camera 6b is capable of acquiring displacement information on a plurality of targets in the field of view.

The second camera 6 b is mounted on the camera stage 61, and moves in the vertical and horizontal directions (X-axis and Y-axis direction) and the vertical direction (Z-axis direction) in plan view according to the actuation of the camera stage 61. It is possible.

A probe card stage 7 having a probe force 8 mounted thereon is provided below the pusher unit 3 and above the test head 10. The probe card stage 7 is connected to a servo motor via a plurality of pole screws (not shown), and the probe card 8 can be moved in a horizontal direction (XY plane direction) by driving a servo motor. Rotate the probe card 8 around the vertical axis (around the Z axis). You can.

A probe card 8 having a plurality of probes 81 is detachably attached to a card ring of a probe card stage 7 by pins (not shown). Each probe 81 of the probe card 8 is electrically connected to the tester main body via the test head 10, and is located below the probe force 8 and inside the probe card stage 7. Is located at the second camera 6b.

In the TCP test apparatus 1, the carrier tape 5 is conveyed so as to pass below the pusher unit 3, and the pusher unit 3 sucks and supports the carrier tape 5 while the probe tape on the test head 10 is held. Press 1 to 8. Then, the TCP on the carrier tape 5 contacts the probe 81 of the probe card 8, a test signal is applied to the TCP, and a response signal read from the TCP is sent to the tester main body through the test head 10. As a result, the performance and function of the TCP are tested.

Such a test is sequentially performed for all TCPs on the carrier tape 5 by transporting the carrier tape 5. Then, the mark punch 26a or the reject punch 26b is driven based on the test result.

[Pushnut]

2 and 3 are a front view (FIG. 2) and a side view (FIG. 3) showing the pusher nit of the TCP test apparatus shown in FIG.

The pusher unit 3 includes a pusher body 33, a pusher frame (apron plate) 36, and a sprocket 35 (a tension sprocket 35a and a main sprocket 3) rotatably mounted on the pusher frame 36. 5b) and an interlocking mechanism 38, and are supported by the main body of the TCP handler 2 via a support member 27 (FIGS. 1 to 5). 3).

The pusher body 33 is slidably mounted on the pusher frame 36 via two linear motion guides 37, 37. A servomotor 31 is connected to an upper portion of the pusher body 33 via a pole screw 32. The pusher body 33 can be moved in the vertical direction (Z-axis direction) on the plane of the pusher frame 36 while being guided by the linear motion guide 37 by the drive of the servomotor 31 ( See Figure 2 and Figure 3).

Further, the pusher body 33 has a suction portion 34 at the lower end thereof. The pusher body 33 can hold the carrier tape 5 at the lower end thereof by the suction section 34 sucking the air to suck the carrier tape 5.

The prokets 35 a and 35 b are arranged on both sides of the pusher body 33 when viewed from the front, and the lower ends thereof support the carrier tape 5 and can rotate. Thus, the carrier tape 5 is sent from the left side to the right side under the pusher body 33 (see FIGS. 1 and 2).

The main sprocket 35b is driven by a stepping motor or the like to convey the carrier tape 5, and the tension sprocket 35a is rotated in a direction opposite to the running direction of the carrier tape 5 so as to rotate. A predetermined tension is applied to the carrier tape to improve the positional accuracy of the carrier tape 5.

The sprockets 35a and 35b move up and down along with the pusher frame 36 while supporting the carrier tape 5 at the lower ends thereof, so that the height of the tape surface of the carrier tape 5 is increased. The position (position on the Z axis) can be adjusted.

The pusher frame 36 is located on the rear side of the pusher body 33. It is driven by an interlocking mechanism 38 described later, and slides up and down (Z-axis direction) to move (see FIGS. 1 to 3). By moving the pusher frame 36, the sprockets 35a and 35b can move in the vertical direction.

The pusher frame 36 is suspended from the body of the TCP handler 2 by suspension members 39, 39 (see FIG. 2). The suspension members 39, 39 are made of, for example, a panel, and are suspended so as to urge the pusher frame 36 (sprockets 35a, 35b) upward.

The interlocking mechanism 38 includes a lever member 381, a first engaging portion 3882a, and a second engaging portion 3882b (see FIG. 3). It has a function of interlocking the suction part 34) and the pusher frame 36 (sprockets 35a, 35b). In this embodiment, two interlocking mechanisms 38 are provided at both left and right ends of the pusher body 33, but the present invention is not limited to this.

The lever member 381 is rotatably attached at one end (end A) to the base 271, and at the other end (end B) of the pusher body 33 through a long hole. It is rotatably and slidably mounted on the upper part. The lever member 381 has a roller 380 at an intermediate portion thereof, and the roller 380 contacts the upper portion of the pusher frame 36 at the opening 380. The base 27 1 is a plate-like member fixed to the support member 27. In such a lever member 381, the end A serves as a fulcrum, the end B serves as a power point, and the roller 380 in the middle serves as an application point.

The first engaging portions 3882a are fixedly installed on both sides of the pusher body 33, and have their contacts pointed downward with respect to the slide direction (Z-axis direction) of the pusher body 33. On the other hand, the second engaging portion 3 8 2 b is The pusher frame 36 is fixedly mounted on the pusher frame 36, and its contact points upward with respect to the slide direction (Z-axis direction) of the pusher frame 36. Also, the second engagement part 3 8

2b is located below the first engaging portion 382a, and its contact is opposed to the contact of the first engaging portion 382a. Therefore, when the pusher body 33 slides downward with respect to the pusher frame 36, the first engagement portion 3882a and the second engagement portion 3882b are mutually connected at the contact point. They are in contact with each other.

4 to 6 are explanatory diagrams showing the operation of the push unit 3. In these figures, FIG. 4 shows the positional relationship between the pusher body 33 (suction unit 34) and the sprockets 35a, 35b, and FIG. 5 shows the operation of the interlocking mechanism 38. . FIG. 6 shows the relationship between the amount of movement of the suction part 34 and the sprockets 35 a and 35 b and the amount of rotation of the pole screw 32.

In this pusher unit 3, in the initial state (origin), the pusher body

33 and sprockets 35 a and 35 b are located above the probe card 8. In this state, the pusher body 33 (suction part 34) does not contact the carrier tape 5, and the sprockets 35a and 35b lock and support the carrier tape 5 at the lower ends thereof (see FIG. 4 (a)). In addition, the pusher frame 36 has an upward biasing force due to the suspension member 39.

As a result, the upper part of the pusher frame 36 comes into contact with the roller 380 of the lever member 381 while being urged by the roller 380 (FIGS. 3 and 5 (a)). See). On the other hand, the first engaging portion 3882a and the second engaging portion 3882b are located at positions separated from each other and are not engaged.

In this state (origin), the carrier tape 5 can be conveyed without rubbing against the pusher body 33 (the suction portion 34).

In the TCP test, first, the TCP on the carrier tape 5 is conveyed by driving the TCP handler 2 (main sprocket 35 b), and the pusher Body 33 is located below. Then, the servo motor 31 is driven to rotate the pin screw 32, and the pusher body 33 (the suction portion 34) is lowered toward the carrier 5 (see FIG. 4 (b)).

In addition, the lowering of the pusher body 33 causes the lever member 381 to rotate about the end (end A) on the side of the base 271 as an axis, and causes the roller 380 of the rotated lever member 380 to rotate. When pushed, the pusher frame 36 descends (see FIG. 5 (b)). Then, due to the difference in the amount of movement between the pusher body 33 and the pusher frame 36 due to the lever ratio of the lever member 381, the pusher body 33 is guided by the linear motion guides 37, 37, and the pusher frame is guided. Slide the upper part of the carrier tape 6 and the suction part 34 of the pusher head part 33 comes into contact with the carrier tape 5 and sucks the carrier tape 5 (see FIG. 4 (b)). At the same time, the first engagement portion 3882a and the second engagement portion 3882b come into contact with each other (see FIG. 5 (c)).

In addition, from the initial state, the suction unit 34 is configured so that the downward movement amount of the suction unit 34 is larger than the downward movement amount of the sprockets 35 a and 35 b from the time when the suction unit 34 comes into contact with the carrier tape 5. (See Figure 6). Therefore, in the initial state, the suction section 34 is not in contact with the carrier tape 5, but as the suction section 34 descends, it is supported by the suction section 34 and the sprockets 35a, 35b and descends. The distance between the carrier tape 5 and the carrier tape 5 is reduced. At this time, the suction surface of the suction section 34 and the lower end of the sprockets 35a, 35b are positioned at the same height (see FIG. 4 (b)).

Next, when the pusher body 33 is further lowered, the carrier tape 5 is pushed down by the suction portion 34, and the external terminal of the TCP contacts the probe 81 of the probe card 8 (see FIG. 4 (c)). Also, as the pusher body 33 descends, the second engaging portion 3882b is brought into contact with the first engaging portion 3822a. When pushed down, the pusher frame 36 descends (see Fig. 5 (d)). At this time, the pusher frame 36 is disengaged from the lever member 381, and is lowered at the same speed as the pusher body 33 by the engagement of the engagement portions 3882a and 3882b. I do. As a result, the suction section 34 and the sprockets 35a, 35b are integrally and interlocked and lowered (see FIG. 6).

Note that the correction of the TCP positional deviation is performed during a period from when the carrier tape 5 is sucked to the suction portion 34 until the carrier tape 5 comes into contact with the probe card 8. In positioning the TCP, first, the second camera 6b captures an alignment mark or the like of the TCP at a predetermined distance, and the image information is transmitted to an image processing device (not shown). Then, the image processing device performs image processing to calculate the amount of displacement of the TCP, and based on the calculation result, the pusher unit 3 or the probe card stage 7 is driven and displaced, and the TCP displacement is reduced. It is corrected.

Next, a TCP test is performed with the external terminal of the TCP on the carrier tape 5 in contact with the probe 81 of the probe card 8. Thereafter, the servo motor 31 is driven, and the pusher body 33 and the pusher frame 36 are raised in the reverse process to the above (not shown). Then, the carrier tape 5 is separated from the suction part 34 on the way, and the pusher body 33 and the pusher frame 36 return to the origin. Thereafter, the carrier tape 5 is conveyed, the next TCP is arranged below the pusher body 33, and the above-described test process is repeated.

According to the TCP handler 2, the pusher body 33 and the sprockets 35a and 35b can be moved up and down separately by one thermocouple 31, so that the TCP handler 2 has a simple structure. Thus, the production cost of the TC PA handler 2 can be reduced.

Also, by using the lever member 3 8 1 as the interlock mechanism 3 8, The interlocking mechanism 380 can be configured with a simple structure, and by changing the lever ratio of the lever member 381 (the length and angle of the lever member 381, the position of the roller 380, etc.), the pusher The vertical movement amounts of the main body 33 and the sprockets 35a and 35b can be arbitrarily changed.

Further, by providing the first engagement portion 3822a and the second engagement portion 3882b as the interlocking mechanism 38, the first engagement portion 3882a and the second engagement portion near the probe card 8 are provided. Engage the joint 3882b to move the pusher body 33 and the sprockets 35a, 35b together, acquire TCP misalignment information during that time, and respond to the misalignment amount. By displacing the pusher unit 3 or the probe card stage 7, it is possible to correct the TCP positional deviation.

The embodiments described above are described for facilitating the understanding of the present invention, but are not described for limiting the present invention. Therefore, each element disclosed in the above embodiment is intended to include all design changes and equivalents belonging to the technical scope of the present invention.

For example, only one interlocking mechanism 38 may be provided. Further, a rotatable roller may be provided at an end of the linkage mechanism 38 on the pusher body 33 side, and the roller may be slidably attached to the pusher body 33. Industrial potential

As described above, according to the TCP handling apparatus according to the present invention, the pusher body and the tape support can be moved up and down by a single drive source. The manufacturing cost of the device can be reduced.

Claims

The scope of the claims

1. While supporting the carrier tape with multiple TCPs formed on the tape by the pusher unit, press it against the contact part electrically connected to the test head, and connect the external terminal of the TCP to the contactor. A TCP handling device that can sequentially apply a plurality of TCPs to a test by contacting the connection terminals of the

The pusher unit includes a pusher main body and a tape support that supports a carrier tape near the pusher main body, and the carrier is moved by moving the pusher main body and the tape support toward the contact portion, respectively. A structure for pressing a tape against the contact portion,

The pusher body and the tape support can be interlocked via an interlocking mechanism, and when one of the pusher body and the tape support is driven, both the pusher body and the tape support are driven. The TCP handling device, characterized in that the device moves in conjunction with the TCP.

2. The interlocking mechanism includes a lever member, and the pusher main body and the tape support are connected or engaged with different positions of the lever member, and are mutually engaged according to rotation of the lever member. 2. The TCP handling apparatus according to claim 1, wherein the TCP handling apparatus operates in conjunction with different movement amounts.

3. One end of the lever member is rotatably or rotatably and slidably attached to the main body of the TCP handling device, and the other end of the lever member is rotatable and slidable or rotatable with the pusher main body. The intermediate portion of the lever member is capable of abutting on the tape support, and a driving device is connected to the pusher body. TCP handling equipment.

4. The interlocking mechanism includes a first engaging portion provided on the pusher body, and a second engaging portion provided on the tape support, and the first engaging portion and the The TCP handling device according to claim 1, wherein the pusher main body and the tape support move integrally as a result of the engagement with the second engagement portion.

5. The interlocking mechanism includes a lever member, a first engagement portion provided on the pusher body, and a second engagement portion provided on the tape support,

When the pusher main body and the tape support are at positions separated from the contact portion, the pusher main body and the tape support are connected or engaged with different positions of the lever member, and the lever When the pusher main body and the tape support come close to the contact portion, the first engagement portion and the second engagement portion engage with each other when the pusher main body and the tape support come close to the contact portion. 2. The TCP handling apparatus according to claim 1, wherein the pusher body and the tape support move physically.

6. The pusher body is capable of adsorbing a carrier tape, and adsorbs a carrier tape while the first engagement portion and the second engagement portion are engaged. The TCP handling device according to claim 5.

7. The TCP of the carrier tape is transported to a contact portion for performing an electrical test, and the TCP is subjected to an electrical test by bringing an external terminal of the TCP into contact with a connection terminal of the contact portion. A TCP handling device that can

A pusher body capable of pressing a carrier tape against the contact portion, and a tape supporter capable of engaging and supporting the carrier tape And a drive unit for driving the pusher main body or the tape support so that the pusher main body or the tape support can advance and retreat with respect to the contact part. The pusher unit faces the contact part. Position,

The driving device is fixed to a main body of a TCP handling device, and the pusher unit is capable of moving the pusher main body and the tape support in a contact portion direction by the driving device. TCP handling equipment characterized by having a mechanism.

8. In the initial stage of moving the pusher unit in the direction of the contact portion, the interlocking mechanism is configured to move the pusher body and the taper so that the movement amount of the pusher body is larger than the movement amount of the tape support. In the latter stage of moving the pusher body in the direction of the contact portion by moving the pusher body, the pusher body is moved so that the movement amount of the pusher body and the movement amount of the tape support body become the same. 8. The TCP handling apparatus according to claim 7, wherein the tape support is moved.

9. The interlocking mechanism includes a linear motion guide, a lever member, and an engaging member,

The linear motion guide is provided between the pusher main body and the tape support so that the pusher main body and the tape support can slide with respect to each other in a contact portion direction.

One end of the lever member is attached to the main body of the TCP handling device to serve as a fulcrum, and the other end of the lever member is attached to the pusher main body to serve as a point of force. It can be the point of action by contacting the tape support, The engagement member has a first engagement portion provided on the pusher main body, and a second engagement portion provided on the tape support, and the first engagement portion and the second The engaging portions are separated from each other at an initial stage when the pusher unit moves toward the contact portion, and engage with each other at a later stage when the pusher unit moves toward the contact portion. 9. The TCP handling apparatus according to claim 7, wherein a pusher main body and the tape support are provided at positions where they can move integrally.