WO2005090645A1

WO2005090645A1 - Electrocast tube producing method, electrocast tube, and thin wire material for production of electrocast tubes

Info

Publication number: WO2005090645A1
Application number: PCT/JP2004/003895
Authority: WO
Inventors: Tokuji Oda; Yutaka Ichikawa
Original assignee: Luzcom Inc.
Priority date: 2004-03-22
Filing date: 2004-03-22
Publication date: 2005-09-29
Also published as: EP1728897B1; EP1728897A1; CN1926264B; EP1728897A4; CN1926264A

Abstract

The invention provides a method of producing an electrocast tube having a fine inner diameter, and an electrocast tube. It also provides a thin wire material for production of an electrocast tube having a fine inner diameter. An electrocast tube producing method comprising the steps of forming an elecrtodeposit around a thin wire material (30) by electrocasting, and removing the thin wire material (30) from the electrodeposit, wherein the thin wire material (30) is removed either by heating the electrodeposit for thermal expansion or by cooling the thin wire material (30) for contraction, so as to form a clearance between the electrodeposit and the thin wire material (30), followed by gripping and pulling, or sucking the thin wire material (30) or physically pushing it away or blowing gas or liquid to push it away.

Description

Description Method for manufacturing an electric tube, electric tube, thin wire for manufacturing the electric tube

The present invention relates to a method for manufacturing an electric structure (hereinafter referred to as “electrode”) tube, an electric tube, and a thin wire for manufacturing the electric tube. More specifically, the present invention relates to an electric tube having a fine inner diameter. The present invention relates to a tube manufacturing method and an electric tube. Further, the present invention relates to a thin wire for producing an electrode tube having a fine inner diameter. Background art

2. Description of the Related Art Conventionally, when manufacturing integrated circuits such as LSI, semiconductor patterns are completed as designed, and inspections are performed to determine whether electrical continuity is good. This inspection is performed by using an apparatus provided with a large number of contact probes (referred to as “probe apparatus” in the present specification) and making contact with each electrode on which the pins of the contact probe are formed. The contact probe has a structure in which a panel is provided inside a very thin tube having a required length, and pins are provided so as to be able to advance and retreat in the tube.

By the way, the progress of semiconductor manufacturing technology in recent years has been remarkable, and the degree of integration tends to be higher and higher. Along with this, the number of contact probes has been increased (to increase the number of pins), the wire diameter has been reduced (to reduce the number of pins), and the distance between contact probes has been increased in order to support the latest integrated circuits even in probe devices that inspect the electrical continuity of electrodes. It is also required that the distance between them be narrower (narrower pitch). At present, the world's smallest tube for a contact probe with an outer diameter of 110 zm and an inner diameter of 8.8 is the world's smallest (for example, see Non-Patent Document 1).

However, as described above, since the semiconductor manufacturing technology is further evolving, it is necessary to further reduce the size of the contact probe.

In addition, the need for tubes with small internal diameters It is also growing in the fields of medicine and medicine.

In other words, the development of a tube having such a small inner diameter is strongly demanded by the entire industry.

The present inventor has been conducting research on electric power, and has previously succeeded in producing a small-diameter tube by electric power. The electrode tube at this time has a hollow section with a circular cross section and an inner diameter of 126 m (for example, see Patent Document 1). Therefore, the present inventor has the idea that the use of the electrode technology may provide a tube having a fine inner diameter (hollow portion) for a contact probe.

After further research, they succeeded in depositing a metal film with a minimum thickness of 5 m on the outer surface of a thin wire with a diameter of 10 im to 85 m. Then, it was found that if the fine wire could be removed from this metal, a tube having a fine inner diameter (hollow portion) could be made.

However, removing the fine wire from the electrodeposited (precipitated) metal has not been easy because the electrodeposited metal is in close contact with the outer surface of the fine wire.

Patent Document 1

Japanese Patent Application Laid-Open No. 2002-4808947

Non-patent document 1

Nikkei Mechanical ONLINE, April 2001, Nikkei Business Publications, Inc. Internet URL: ht tp: //dm.nikke ibp.co.j / free / nmc / kiji / h559 / t559g.html > (Object of the present invention)

The object of the present invention is

(1) An object of the present invention is to provide a method of manufacturing a tube having a fine inner diameter, a tube, and a thin wire for manufacturing the tube.

(2) When removing the fine wire from the electrodeposit or the surrounding object, a method of manufacturing an electric tube that allows a jig or tool to be hooked on the electrodeposit or the surrounding object to facilitate the removal of the fine wire is adopted. To provide.

③ Provide a conductive layer such as gold plating on the inner surface so that the electrical conductivity is only for electrodeposits or surrounding objects. An object of the present invention is to provide a method for manufacturing an electric tube, an electric tube, and a thin wire for manufacturing the electric tube, which is better in the case of (1).

A method and a tube for manufacturing an electrode tube in which at least two or more conductive layers of different materials are provided on the inner surface so that the adhesion between the conductive layer and the electrodeposit or the surrounding object is good. The purpose of the present invention is to provide a fine wire material for performing the above.

An object of the present invention is to provide a method for manufacturing an electrode tube having a plurality of hollow portions and an electrode tube.

An object of the present invention is to provide a method of manufacturing an electrode tube having a plurality of hollow portions, and capable of independently conducting electricity for each portion forming the periphery of each hollow portion, and to provide an electrode tube.

際 When removing the fine wire, the conductive layer provided on the inner surface is hardly subjected to a tensile force, so that the conductive layer and the base wire are easily separated, and the adhesion between the conductive layer and the electrodeposit or the surrounding object is impaired. An object of the present invention is to provide a method for manufacturing an electrode tube, which makes it difficult to perform the operation. Disclosure of the invention

Means of the present invention taken to achieve the above object are as follows.

In the first invention,

A method for producing an electrode tube by forming an electrodeposit or a surrounding material around a thin wire by an electrode, and removing the thin wire from the electrodeposit or the surrounding material,

The thin wire is heated and thermally expanded, or the thin wire is cooled and contracted to form a gap between the electrodeposit or the surrounding material and the thin wire, thereby gripping the thin wire. A method for producing an electrode tube, wherein the electrode tube is removed by using any of a method of pulling, sucking, physically pushing, or pushing out by pushing out a gas or liquid.

In the second invention,

By immersing or applying liquid to the thin wire, the thin wire can be made to slide easily at the place where the electrodeposit or surrounding object is in contact, and the thin wire is grasped and pulled or sucked. , Or physically squeezed, or by squirting and expelling a gas or liquid,

This is a method for manufacturing an electric tube.

In the third invention,

The thin wire is pulled from one or both and deformed to reduce its cross-sectional area, forming a gap between the thin wire and the electrodeposit or surrounding material, and grasping or pulling or sucking the thin wire , By physically pushing or by squirting a gas or liquid.

This is a method for manufacturing an electric tube.

In the fourth invention,

Characterized in that the amount of the electrodeposit or surrounding material on the end side formed on the fine wire is increased.

It is a method for manufacturing an electrode tube according to the first, second or third invention.

In the fifth invention,

Characterized in that the amount of lateral strain deformation when the wire is pulled outward and stretched is 5% or more of the cross-sectional area.

9 is a method for manufacturing an electrode tube according to the third invention.

In the sixth invention,

The fine wire material is characterized by being removed by melting with heat or a solvent.

This is a method for manufacturing an electric tube.

In the seventh invention,

Using a thin wire having a conductive layer provided on the outer surface, and removing the thin wire so that the conductive layer remains on the inner surface of the electrode tube; A method for manufacturing a tube according to the first, second, third, fourth, fifth or sixth invention.

In the eighth invention,

Using a thin wire with at least two layers of conductive layers of different materials formed on the outer surface, the electrodeposit or surrounding object is brought into close contact with the outer conductive layer of the thin wire, and the inner conductive layer is Characterized by removing the thin wire so as to remain on the inner surface,

A method for manufacturing a tube according to the first, second, third, fourth, fifth or sixth invention. '

In the ninth invention,

The inner shape of the hollow portion formed by removing the thin wire from the electrodeposit or the surrounding object has a circular cross section or a polygonal cross section,

It is a method for manufacturing a tube according to the first, second, third, fourth, fifth, sixth, seventh or eighth invention.

In the tenth invention,

The invention according to the first, second, third, fourth, fifth, sixth, seventh, eighth or ninth invention, comprising a plurality of hollow portions formed by removing the thin wire material. This is a method for manufacturing such a tube.

In the eleventh invention,

It is required that a partition formed by providing a conductive layer on the outer surface of the insulator is interposed between the hollow portions so that electric conduction can be performed independently for each portion formed around each hollow portion. Features,

20 is a method for manufacturing an electrode tube according to the tenth aspect.

In the first and second inventions,

An electrode tube manufactured by forming an electrodeposit or a surrounding material around a thin wire by an electrode, and removing the thin wire from the electrodeposit or the surrounding material.

When the hollow portion formed by removing the thin wire from the electrodeposit or the surrounding object has a circular inner cross section, the inner diameter of the hollow portion is 10 or more and 85 or less, and the hollow portion is Those having a polygonal cross-sectional shape are characterized in that the diameter of the inscribed circle of the hollow portion is not less than 1 and not more than 85 m,

Electrode tube.

In the thirteenth invention,

Characterized in that the wall thickness is 5 or more and 50 / xm or less,

9 is an electrode tube according to a twelfth invention.

In the fourteenth invention,

A conductive layer of a material different from that of the electrodeposit or the surrounding object is provided on the inner surface,

4 is a tube according to the first or second invention.

In the fifteenth invention,

A conductive layer of a material different from that of the electrodeposit or the surrounding material is provided on the inner surface, and a conductive layer of a material different from the conductive layer is provided between the electrodeposit or the surrounding material and the conductive layer. Characterized by the following:

4 is a tube according to the first or second invention.

In the sixteenth invention,

The electrode tube according to any one of the first to thirteenth, thirteenth, fifteenth, and fifteenth inventions, comprising a plurality of hollow portions formed by removing the thin wire. In the seventeenth invention,

Between the hollows, a partition formed by providing a conductive layer on the outer surface of the insulator is interposed, so that electric conduction can be performed independently for each part around each hollow. Characterized by the following:

An electrode tube according to a sixteenth invention.

In the eighteenth invention,

The conductive layer provided on the outer surface of the partition body is configured to form a part of the hollow portion,

18 is an electron tube according to a seventeenth invention. In the nineteenth invention,

The partition wall is characterized in that a thickness of a portion provided between adjacent hollow portions is 5 m or more and 50 zm or less,

17 is an electrode tube according to the seventeenth or eighteenth invention.

In the twenty-second invention,

A thin wire material for forming an electrodeposit or a surrounding object by an electrode around and removing the electrodeposit or the surrounding object from the electrodeposit or the surrounding object to manufacture an electrode tube,

If the outer shape has a circular cross section, the outer diameter is 1 1zm or more and 85m or less, and if the outer shape has a polygonal cross section, the diameter of the inscribed circle is 10zm or more and 85 or less. Wherein the amount of lateral strain deformation when pulled outward and extended is not less than 5% of the cross-sectional area.

It is a thin wire for manufacturing an electric tube.

In the twenty-first invention,

A conductive layer of a material different from that of the electrodeposit or the surrounding object is provided on the outer surface;

A thin wire for manufacturing the electrode tube according to the twenty-second invention.

In the second invention,

A conductive layer made of a different material from the electrodeposit or the surrounding object is provided on the outer surface, and a conductive layer made of a different material from the conductive layer is provided between the thin wire base member and the conductive layer. Characterized by the fact that

In the twenty-third invention,

Characterized in that there are portions where the conductive layer is not provided on both end sides,

A thin wire for manufacturing the electrode tube according to the twenty-second, twenty-first or twenty-second invention.

In the twenty-fourth invention,

Characterized in that the outer shape is formed in a circular cross section or a polygonal cross section, A thin wire for manufacturing the electrode tube according to the twenty-first, twenty-first, twenty-second, or twenty-third inventions.

As the thin wire, for example, a wire formed entirely of a conductive material, such as a metal wire, can be used, and a conductive layer (for example, metal such as plating or a metal wire) can be formed around the conductive material. Etc.) can also be used. Alternatively, a thin wire made of an insulating material such as a synthetic resin wire and a conductive layer (for example, a metal such as an electroless plating or carbon) provided around the thin wire may be used.

Further, in the case where a separate conductor is provided near the fine wire and the metal is electrodeposited (deposited) on this conductor, in addition to the above-described fine wire, furthermore, such as a synthetic resin wire, etc. A body made of an insulating material (without a conductive material) can also be used.

The material at the place where the metal is electrodeposited by the electrode is not particularly limited as long as it has conductivity, but a material with good electrical conductivity is used to facilitate electrodeposition of the metal. Is preferred. For example, iron, stainless steel, copper, gold, silver, brass, nickel, aluminum, carbon and the like can be used.

In addition, as a thin wire or an insulating material constituting an insulator of a partition, a nonconductor (insulator) through which electricity is extremely unlikely to flow or a semiconductor that becomes a conductor or a nonconductor depending on temperature or the like can be used. . As the insulating material, for example, those made of thermosetting resin, thermoplastic resin, engine plastic, synthetic fiber (synthetic fiber, semi-synthetic fiber, regenerated fiber, inorganic fiber) and the like can be used. For example, phenolic resin, urea resin, melamine resin, diaryl phthalate resin, unsaturated polyester resin, silicone resin, epoxy resin, polyethylene, cross-linked polyethylene, chlorinated polyethylene, ethylene Z-vinyl acetate copolymer, polypropylene, polyisobutylene, Polyvinyl chloride, polyvinylidene chloride, polyvinyl alcohol, polyvinyl acetal, acrylic resin, polyvinyl acetate, polyacrylonitrile, modacrylic, polystyrene, styrene-noacrylonitrile copolymer, acrylonitrile-nobutadienno styrene terpolymer, Acetate, Triacetate, Fluororesin, Polytetra Fluoroethylene, polybutylene terephthalate, polyarylate, polyacetylene, polyphenylene sulfide, polyphenylene sulfide, polysulfone, wholly aromatic polyimide, polyamideimide, polyetherimide, polyetheretherketone, polybenzimidazole, Examples include polyester, polyethylene terephthalate, polyamide, nylon, aramide, polyurethane, spandex, polyalkyleneparaoxybenzoate, benzoate, polyfluoroethylene, promix, rayon, cubula, and glass fiber.

Further, as the insulating material, a so-called filament yarn which is not twisted or spun can be used, or a spun yarn can be used.

The term "circular cross-section", which is indicated by the inner shape of the electrode tube or the outer shape of the thin wire, does not strictly mean that the cross-sectional shape is circular, but is substantially circular or elliptical. It is used as a concept that includes shapes.

The term “polygonal cross-section” as shown by the inner shape of the electrode tube or the outer shape of the thin wire does not mean that the cross-sectional shape is strictly a polygonal shape, for example, the corners are rounded It is used as a concept that includes substantially polygonal shapes. Although not particularly limited, the polygonal shape specifically includes a substantially triangular shape, a substantially square shape (including a rectangular shape, a square shape, a diamond shape, a parallelogram shape), a substantially pentagonal shape, a substantially hexagonal shape, and the like. Can be mentioned.

Examples of the solvent for dissolving and removing the fine wire include an alkaline solution and an acidic solution.

The use of the electrode tube is not particularly limited, but examples thereof include a tube for a contact port (a casing for accommodating a spring).

The “portion forming the periphery of the hollow portion” includes the electrodeposition of the electrodeposit or the surrounding object by an electrode, a material different from that of the electrodeposit or the surrounding object, and a conductive material provided on the inner surface of the hollow portion. Layer (including the conductive layer of the partition).

(Operation)

According to the present invention, a thin wire is removed from an electrodeposit or a surrounding object formed by an electrode. You can leave. The fine wire can be formed by (1) heating the electrodeposit or surrounding material to expand it thermally, or cooling and shrinking the thin wire to form a gap between the electrodeposit or surrounding material and the thin wire, or (2) in the liquid. Immersed in or sprayed with a liquid to make it easy to slip the place where the fine wire and the electrodeposit or surrounding object are in contact, or (3) pull it from one or both to deform it to reduce the cross-sectional area, A gap is formed between the fine wire and the electrodeposit or surrounding material, and it is either grasped and pulled, sucked, physically pushed, or ejected by pushing gas or liquid. It is removed using the method described above. It can also be removed by dissolving with heat or a solvent.

When such a method is used to remove the thin wire, for example, a thin wire having a diameter of 10 im to 85 m is used, and the outer surface of the thin wire has a thickness of 5 zm or more and 50 im or less. The fine wire can also be removed from the electrodeposit or the surrounding object formed to have the shape. Therefore, by using this method for removing a thin wire, for example, an electrode tube having a fine inner diameter that can be used as a tube for a contact probe or the like can be manufactured.

According to a method of manufacturing an electrode tube by increasing the amount of the electrodeposit or the surrounding material on the end portion formed on the thin wire, for example, the thin wire is pulled out or pushed from the electrodeposit or the surrounding material. At the time of removal, a jig or a tool can be hooked on an end face or the like of a portion where the amount of the electrodeposit or the surrounding object is increased. Therefore, in this case, since the thin wire can be removed while the electrodeposit or the surrounding object is fixed, the thin wire can be easily removed.

According to a method for manufacturing an electrode tube in which the amount of lateral strain when the thin wire is pulled outward and stretched is 5% or more of the cross-sectional area, the distance between the thin wire and the electrodeposited material or the surrounding material is increased. Since a gap enough to remove the fine wire can be formed, there is a high possibility that the fine wire can be removed from the electrodeposit or the surroundings without any trouble. If the transverse strain is less than 5% of the cross-sectional area, the clearance may not be sufficient, which may hinder removal.

Use a thin wire with a conductive layer on the outer surface so that the conductive layer remains on the inner surface of the tube. 1 According to the method for manufacturing an electrode tube from which a thin wire is removed, an electrode tube provided with a gold plating or the like on the inner surface can be manufactured. Such a tube is suitable for conducting electricity in this case, for example, because the electric conductivity can be improved by the material of the conductive layer provided on the inner surface only when the electrodeposit or the surrounding object is used alone. Can be used as a part.

It should be noted that even for an electrode tube having a conductive layer made of a material different from that of the electrodeposit or the surrounding material on the inner surface, or a thin wire material having a conductive layer made of a material different from the electrodeposit or the surrounding material on the outer surface, Similarly, when the electric conductivity is only the electrodeposit or the surrounding object, a good electrode tube can be formed.

According to a method for manufacturing an electrode tube using a thin wire material in which at least two or more conductive layers of different materials are formed on the outer surface side, for example, the outer conductive layer is formed of copper, and the inner conductive layer is in contact with copper. The layer can be made of gold so that nickel can be formed as an electrodeposit or enclosure by electrodeposition. In this case, nickel has better adhesion with copper than gold, and copper has better adhesion with gold, so that an electrode tube with good adhesion can be formed.

Note that a conductive layer of a material different from that of the electrodeposit or the surrounding object is provided on the inner surface, and a conductive layer of a material different from the conductive layer is provided between the electrodeposit or the surrounding object and the conductive layer. A conductive layer of a material different from that of the electrodeposit or the surrounding object is provided on the electrode tube or the outer surface of the electrode tube, and further, the conductive layer is different between the thin wire base member and the conductive layer. In the case of a thin wire provided with a conductive layer made of a material, an electrode tube having good adhesion between the electrodeposit or the surrounding object and the conductive layer can be similarly formed.

A tube having a plurality of hollow portions formed by removing a thin wire can be used, for example, by replacing a part manufactured by arranging a plurality of tubes each having only one hollow portion. According to this electric tube, the trouble of arranging the individual tubes side by side can be eliminated. In addition, the gap between the hollow portions does not shift because it is fixed by the electrodeposit or the surrounding object.

Between the hollows, a partition formed by providing a conductive layer on the outer surface of the insulator is interposed, so that electric conduction can be performed independently for each part around each hollow. Is capable of conducting electricity independently for each hollow part. (2) For a thin wire having a portion where the conductive layer is not provided on both ends, pulling the portion where the conductive layer is not provided outward makes it difficult for tensile force to be directly applied to the conductive layer. The conductive layer and the base wire are easily separated from each other, and the adhesion between the conductive layer and the electrodeposit or the surrounding material is not easily impaired. Brief Description of Drawings

FIG. 1 is a cross-sectional explanatory view showing an example of an electrode device for manufacturing an electrode tube according to the present invention,

FIG. 2 is an explanatory view showing a state in which a large-diameter portion is formed on one end side of the electrodeposit, and FIG. 3 is a sectional explanatory view showing a state in which the electrodeposit is formed around a thin wire having a substantially rectangular cross section. And

FIG. 4 is a cross-sectional explanatory view showing a state in which an electrodeposit is formed around a thin wire material provided with a conductive layer on the outer peripheral surface,

FIG. 5 is a cross-sectional explanatory view showing a state in which an electrodeposit is formed around a thin wire material provided with two conductive layers of different materials on the outer peripheral surface.

FIG. 6 is an explanatory view showing a state in which an electrodeposit is formed around a thin wire having portions where no conductive layer is provided on both end sides.

FIG. 7 is an explanatory cross-sectional view showing another example of an electric device for manufacturing an electric tube according to the present invention.

FIG. 8 is an exploded perspective view showing a manufacturing jig used in the electric equipment shown in FIG.

FIG. 9 is an enlarged cross-sectional explanatory view showing an electrode tube manufactured using the manufacturing jig shown in FIG. BEST MODE FOR CARRYING OUT THE INVENTION

Embodiments of the present invention will be described in more detail with reference to the drawings.

FIG. 1 is a cross-sectional explanatory view showing an example of an electrode device for manufacturing an electrode tube according to the present invention. It is.

First, an electric device for manufacturing an electric tube will be described.

The power supply apparatus 100 includes a power supply tank 10 and an outer tank 11 that accommodates the power supply tank 10 inside. The upper part of the battery tank 10 and the outer tank 11 is open, and the electrolyte (electrolyte) 20 is constantly supplied into the battery tank 10 during operation. In this way, the electrolyte 20 overflows from the upper part of the electrode tank 10 and flows into the outer tank 11. In the present embodiment, as the electrolytic solution 20, for example, a solution obtained by adding a brightener and a bit preventing agent to a nickel sulfamate solution is used.

Electrolyte solution 20 overflowing from battery tank 10 and flowing into outer tank 11 is filtered by a filtration device (not shown) and supplied again into battery tank 10. That is, the electrolytic solution 20 constantly circulates between the electrolytic bath 10 and the outer bath 11 during operation. A known means can be used for supplying the electrolytic solution 20 to the electrolytic cell 10 (not shown).

In the present embodiment, the part of the electrolyte solution 20 that overflows from the upper part of the battery tank 10 is referred to as an overflow part 12 for convenience. In the power supply device 100, power is supplied to the overflow port part 12. The power supply procedure will be described later.

A horizontal adjuster 13 is provided below the battery tank 10. The horizontal adjuster device 13 maintains the battery tank 10 substantially horizontal, thereby forming a substantially horizontal overflow section 12 over the entire upper portion of the battery tank 10 and forming an overflow section. Electrolyte solution 20 can be distributed uniformly in various places within 12.

Reference numeral 4 denotes a holding jig for holding a thin wire 30 serving as a power mold member (base material). The holding jig 4 includes a horizontal member 40 having a required length, and a pair of hanging members 41, 41 hanging at both ends of the horizontal member 40. The holding jig 4 is provided such that the vertical members 41, 41 are located on the sides of the battery tank 10. The rod members 41, 41 are provided with rod-shaped wire fixing members 42, 43 having a required length, respectively, extending substantially in the horizontal direction. The wire fixing members 42 and 43 are rotatably provided on the vertical members 41 and 41. One wire fixing member 4 2 4 An electrode 44 is provided at the end on the tank 10 side. Further, a tension device 45 for pulling the fine wire 30 and an electrode 44 are provided at an end of the other wire fixing member 43 on the side of the electric cell 10. One end and the other end of the fine wire 30 are fixed to the wire fixing members 42 and 43, respectively, and are provided in a tensioned state by a tension device 45.

A rotating shaft 46 is rotatably mounted between the hanging members 41, 41. Reference numeral 47 denotes a drive motor for driving the rotating shaft 46. The rotating shaft 46 penetrates the hanging members 41, 41, and gears 480, 481 are fixed to both ends. The wire fixing members 42 and 43 described above are provided to penetrate the hanging members 41 and 41. A gear 482 is fixed to the wire fixing member 42 penetrating the hanging member 41. Similarly, a gear 483 is fixed to the wire fixing member 43 penetrating the hanging member 41. Thus, the gear 480 and the gear 482, and the gear 481 and the gear 483 are combined. Therefore, by operating the drive motor 47 and rotating the gears 480 and 481 together with the rotating shaft 46, the gears 482 and 483 and the wire fixing members 42 and 43 rotate, and thus the thin wire 30 rotates. it can. The rotation speed of the fine wire 30 is not particularly limited. For example, it is controlled to 15r.p.m. or less. Electrode contact members 49, 49 having conductivity are provided at outer ends of the wire fixing members 42, 43, respectively. The electrode contact members 49, 49 come into contact with the electrode portions 14, 14 provided between the battery tank 10 and the outer tank 11 when the holding jig 4 is disposed above the battery tank 10. . Electrodes 14, 14 are connected to the negative pole of the power supply. Therefore, the electrode contact members 49, 49 are in a state of being electrically connected to the negative pole of the power supply while being in contact with the electrode portions 14, 14.

Reference numeral 15 denotes an electrode portion electrically connected to the positive pole of the power supply. The electrode section 15 is provided at the bottom of the battery chamber 10. The electrode portion 15 may be, for example, a structure in which a metal pellet (for example, nickel pellet) for power is accommodated in a mesh or perforated case made of titanium steel.

A method for manufacturing an electrode tube using the electrode device 100 will be described. First, one end and the other end of the fine wire 30 are fixed to the wire fixing members 42 and 43, respectively, so that the thin wire 30 is tensioned between the wire fixing members 42 and 43. At this time, the electrolytic solution 20 is supplied to the electric cell 10, overflows from the upper part of the electric cell 10 (forms an overflow part 12), and flows into the outer cell 11. And so on. The overflow unit 12 is adjusted so that the electroscope tank 10 is made substantially horizontal by a horizontal adjuster device 13 so that the electrolytic solution 20 is uniformly distributed in various places. In the present embodiment, the thin wire 30 is made of stainless steel having a substantially circular cross section with a diameter of 50 m, and is deformed by transverse strain when a tensile force of about 150 O NZmm ² is pulled outward. The amount used was 10% of the cross-sectional area.

Next, the drive motor 47 is operated to rotate the gears 480 and 481 together with the rotating shaft 46. As a result, the gears 482, 483 and the wire fixing members 42, 43 rotate, and the fine wire 30 rotates.

The electrode contact members 49 and 49 are brought into contact with the electrode parts 14 and 14, and the hanging members 41 and 41 are located on the side of the cell 10, and only the fine wire 30 overflows. Soak in part 1 2 When the electrode contact members 49 and 49 come into contact with the electrode portions 14 and 14, the electrode portion 15 is electrically connected to the positive pole of the power supply. Electricity starts with being electrically connected to the poles. In this way, a metal (nickel according to the electrolytic solution 20 shown in the present embodiment) is electrodeposited (deposited) around the thin wire 30. The metal electrodeposited around the thin wire 30 is an electrodeposit (or surrounding object). The thin wire 30 is immersed in the overflow section 12 for a required time, and is heated until the outer diameter of the electrodeposited metal becomes approximately 70 zm over the entire length. When the target outer diameter is reached, remove the thin wire 30 from the overflow section 12 and stop the power supply. The electrodeposition amount (precipitation amount) of the metal, that is, the thickness of the metal electrodeposited on the fine wire can be controlled in advance by current, voltage, electrodeposition time, and the like.

In the power supply apparatus 100, the overflow port 12 is adjusted so that the electrolytic solution 20 is uniformly distributed in various places, and the fine wire 30 is rotated. Even if the current density within 20 is uneven, the fine wire 30 In the electrodeposition state (precipitation state) of the metal in the above, variation hardly occurs. Therefore, metal is electrodeposited around the thin wire 30 so as to have a substantially uniform thickness over the entire length. Thus, a high-precision electrode tube can be manufactured only by removing the thin wire 30. In addition, the electric power generation apparatus 100 is electrically powered by the overflow part 12, and the overflowing electrolyte solution 20 is returned to the electric cell tank 10 and circulated again. In other words, it is only necessary to form the overflow portion 12 in the electrolysis, and therefore, it is possible to perform the electrolysis even with a small amount of the electrolytic solution 20.

In the power supply apparatus 100, the wire fixing members 4 2 and 4 3 for fixing the fine wire 30 are arranged outside the overpass opening part 12 so that the wire fixing members 4 2 and 4 3 is not immersed in the electrolyte 20. Therefore, the wire fixing members 42, 43 and the like do not react with the electrolytic solution 20 to generate impurities. Also, the electrolytic solution 20 does not adhere to the wire fixing members 42, 43, etc. and is taken out, and the electrolytic solution 20 is not unnecessarily reduced from the electrolytic bath 10.

Then, the thin wire 30 around which the metal is electrodeposited is removed from the wire fixing members 42, 43, and the thin wire 30 is removed from the electrodeposit (enclosure) formed last.

Since the thin wire 30 has the electrodeposit adhered to the outer surface, it simply grabs the thin wire 30 and pulls it, sucks it, pushes it physically, or pushes it out by blowing out gas or liquid. It is difficult to remove just by doing. Therefore, the thin wire 30 is removed by using any of the following methods (1) to (4).

(1) Heating the electrodeposit to expand it thermally, or cooling and shrinking the thin wire 30 to form a gap between the electrodeposit and the thin wire 30 and grasping and pulling the thin wire 30 Remove by aspiration, physical pushing, or by blowing a gas or liquid.

(2) By immersing in the liquid in which the cleaning agent is dissolved or by applying the liquid, the portion where the fine wire 30 and the electrodeposit are in contact with each other is easily slipped. Then, the thin wire 30 is removed by using any of the following methods: gripping, pulling, sucking, physically pushing, or ejecting a gas or liquid and pushing. (3) The thin wire 30 is pulled from one or both and deformed to reduce the cross-sectional area. Then, a gap is formed between the electrodeposit and the fine wire 30, and the fine wire 30 is grasped and pulled, sucked, physically pushed, or gas or liquid is ejected and pushed. It is removed using this method.

(4) The fine wire 30 is removed by dissolving it with heat or dissolving it with a solvent such as an alkaline solution or an acidic solution.

By removing the thin wire 30 in this manner, an electrode tube having a fine inner diameter (hollow portion) is formed by the remaining electrodeposit. This electrode tube can be used as a tube for a contact probe or the like.

In the present embodiment, the thin wire is removed from the electrodeposit having a substantially uniform thickness over the entire length, but this is not a limitation. For example, as shown in FIG. 2, a large-diameter portion 500 having a large outer diameter is formed at one end of the electrodeposit 50 to pull, suck, or physically push the thin wire 30. It can also be removed using either a gas or liquid squirting and pushing method. By forming the large-diameter portion 500 in this manner, a jig or a tool can be hooked on the end face of the large-diameter portion 500 when being pulled out or pushed. Therefore, in this case, since the thin wire 30 can be removed with the electrodeposit fixed, the thin wire can be easily removed. The work of increasing the electrodeposition amount of a part in this way may be performed by transferring to another electric device.

In the above embodiment, the thin wire 30 having a diameter of 50 and a substantially circular cross section was used. However, the thickness and cross-sectional shape of the thin wire are not limited to these. For example, as shown in FIG. 3, a thin wire 31 having a polygonal cross section such as a quadrangle (including a substantially polygonal shape having rounded corners) may be used. Reference numeral 51 denotes an electrodeposit.

The above-mentioned fine wire has an outer diameter of not less than 10 and not more than 85 m when the cross-sectional shape is substantially circular, and the diameter of an inscribed circle when the outer shape has a polygonal cross-sectional shape. If it is 10 m or more and 85 m or less, manufacture of an electrode tube with a fine inside diameter It has been found by experiments of the present inventors that it can be used in fabrication.

The thin wire 30 used in the present embodiment is such that when the tensile force of about 150 ON / mm ² is pulled outward, the deformation of the transverse strain becomes 10% of the cross-sectional area. did. However, the amount of lateral strain deformation of the fine wire is not particularly limited. According to experiments performed by the present inventors, it is sufficient that the deformation amount is at least 5% or more of the cross-sectional area.

In the present embodiment, a metal is electrodeposited with a thickness of approximately 10 / im around a thin wire 30 having a substantially circular cross section with a diameter of 50, so that the outer diameter becomes approximately 70 m as a whole. However, the thickness of the metal to be electrodeposited is not particularly limited. According to experiments conducted by the present inventor, an electrode tube can be formed even after the thin wire 30 has been removed if it can be electrodeposited around the thin wire 30 so as to have a thickness of at least approximately 5 m. I know I can.

In the present embodiment, the thin wire 30 is made of stainless steel, and a metal is directly electrodeposited around the thin wire 30. However, the thin wire that can be used in the electric device 100 is not particularly limited as long as it has conductivity.For example, the core portion is made of metal or synthetic resin, and a conductive layer is formed on the outer surface. It is also possible to use a material provided with a metal plating (metal layer (film)) or a pressure plate. By using such a thin wire, for example, as shown in FIG. 4, when the electrodeposit 52 is formed on the thin wire 32 provided with the gold plating 321, the gold plating 321 is formed. It is also possible to remove only the base wire 320 while leaving it on the inner peripheral surface of the electrodeposit 52. In this case, an electrode tube in which the inner peripheral surface is plated with gold can be formed.

Electrode tubes with gold plating on the inner surface can improve the electrical conductivity compared to when no gold plating is provided. It can be used as a suitable part to do.

Further, for example, as the thin wire, a material in which another conductive layer of a different material is provided on the outer peripheral side of the conductive layer formed by the above-described method or the like can be used. For example, the metal to be electrodeposited by nickel is nickel, and the copper plating 3 9

In the case where the electrodeposit 53 is formed around the thin wire 33 provided with 32 (see Fig. 5), nickel has better adhesion to copper than gold, and copper has better adhesion to gold. By removing only the base material 330, it is possible to form an electrode tube in which nickel, copper, and gold are adhered with good adhesion. Gold plating 331 is exposed on the inner peripheral surface of this tube. In the case where the thin wire having the conductive layer (for example, gold plating) provided on the outer periphery is deformed so as to have a small cross-sectional area and is removed from the deposited metal, as shown in FIG. It is possible to form portions (masking portions 341, 341) not provided with a conductive layer (for example, gold plating 340) on both end sides of 4, and to pull portions not provided with the conductive layer. preferable. By doing so, it is difficult for the tensile force to be directly applied to the conductive layer, the conductive layer and the base wire are easily separated, and the adhesion between the conductive layer and the electrodeposit 54 is not easily impaired.

FIG. 7 is an explanatory cross-sectional view showing another example of an electrode device for manufacturing an electrode tube according to the present invention,

FIG. 8 is an exploded perspective view showing a manufacturing jig used in the electrode apparatus shown in FIG. 7, and FIG. 9 is an enlarged sectional view showing an electrode tube manufactured using the manufacturing jig shown in FIG. FIG.

The power supply device 101 is of a type in which a thin wire is provided in a tensioned state in a vertical direction (vertical direction in FIG. 7).

The power supply device 101 includes a power supply tank 60. The battery tank 60 has a tank part 61 inside, and is formed in a box shape with an open upper part. At the upper part of the battery tank 60, a lid mounting part 62 extending outward is provided over the entire circumference, and the lid body 64 is provided with an opening of the battery tank 60 at the lid mounting part 62. It is covered to cover the part.

A hook 63 is provided above the tank 61. An anode part 66 electrically connected to the positive electrode of the power supply is attached to the hook part 63. A container 660 is attached to the anode section 66, and the container 660 is packed with a large number of nickel balls. Reference numeral 65 indicates a cathode portion electrically connected to the negative pole of the power supply. On the cathode part 65, a cathode wire 650 for connecting to a manufacturing jig 8 described later is provided downward. It is provided hanging.

In the present embodiment, the nickel balls are packed in the container 660, but what is packed in the container 660 is not limited to this, and is selected according to the type of metal to be deposited. For example, nickel, iron, copper, cobalt and the like can be used. The shape and structure are not particularly limited.

Inside the tank 61, a jig fixing frame 7 is accommodated. The jig fixing frame 7 is provided with manufacturing jigs 8 stacked in five stages.

The electrolytic solution 21 is filled in the tank portion 61 of the electrolytic bath 60. The electrolytic solution 21 is inserted so that the anode part 66 and the jig fixing frame 7 are completely immersed. In the present embodiment, the electrolytic solution 21 mainly contains nickel sulfamate.

See FIG. The manufacturing jig 8 is capable of stretching a plurality of fine wires 35 and is for manufacturing an electrode tube having a plurality of hollow portions. Note that the thin wire 35 shown in the present embodiment is the same as that used in the power supply device 100, and therefore the description is omitted.

The manufacturing jig 8 includes a plate-shaped jig main body 80 having a required length. At a substantially central portion of the jig main body 80, a penetrating opening 81 is formed. At both ends (short side) of the jig body 80 at the upper and lower ends in FIG. 8, a plurality of fixing members 82, 83 for fixing the fine wire 35 are provided at a required interval in the width direction. (Specifically, eight locations each). In the present embodiment, the fixing members 82 and 83 are of a screw shape, but this is not particularly limited.

Further, in the portion further inside than the fixing members 82, 83, the interval between the fixing members 82, 83 is made narrower than the interval at which the fixing members 82, 83 are provided, and a plurality of guide pins 84 are provided. (8 places physically).

Further, positioning members 85, 85 for determining the stretched position of the fine wire 35 are provided near the opening 81, which is a portion inside the guide pin 84. The positioning members 85, 85 are band-shaped plate members having a length substantially equal to the width of the jig main body 80, and a V-shaped groove for fitting the fine wire 35 into a substantially central portion. (In the figure, the detachment prevention member 8500 (described later), which is not visible. These grooves are provided continuously over the entire width of the positioning member 85 (vertical direction in FIG. 8) and in the length direction (horizontal direction in FIG. 8) (specifically, at eight locations). It is formed. On the upper surface side of each positioning member 85, a disengagement prevention member 8.50 formed of a plate-like body having substantially the same width as this positioning member 85 but having a short length is provided, and the fitted fine wire 3 is provided. 5 does not come off the groove. In the present embodiment, the groove of the positioning member 85 is formed such that a gap of 10 m is provided between adjacent fine wires 35. However, the present invention is not limited thereto. Can be set as appropriate.

A plurality of (specifically, eight) fine wires 35 are attached to the manufacturing jig 8. Each fine wire 35 is attached as follows.

First, a tension spring 86 is attached to the other end (the lower side in FIG. 8) of the fine wire 35. Then, one end (the upper side in FIG. 8) of the fine wire 35 is fixed with the fixing member 82. The fine wire 35 stopped by the fixing member 82 passes between the adjacent guide pins 84, 84 and fits into the groove formed in each positioning member 85, so that it is located between the positioning members 85, 85. Hang over.

The other end of the thin wire 35 fitted in the groove passes between adjacent guide pins 84, 84 similarly to the upper end, and the tension spring 86 is stopped by the fixing member 83. The fine wire 35 is attached in such a manner that a portion corresponding to the opening 81 of the fine wire 35 is in a tensioned state by the tensile force of the tension spring 86.

In the jig 8 for manufacturing, the fine wire 35 is attached with a gap of 10 m between adjacent ones, but the above-mentioned interval is exaggerated in FIG. 8 for easy understanding. It is expressed as

Reference numeral 87 denotes a holding member for mounting the partition member 88. The holding member 87 is formed of a rectangular plate having substantially the same size as the shape of the opening 81.

The partition member 88 has substantially the same length as the length of the holding member 87 in the vertical direction in FIG. 8, and has a thin band shape. Specifically, the partition member 8 8 is approximately 8 An insulating base member 880 having a thickness of m is provided, and a conductive layer (film) 881 is provided on the front and back surfaces of the insulating base member 880 by a plating or the like having a thickness of approximately 2 to 3 // m. It has a structured structure. The material forming the conductive layer 881 may be any material as long as it has conductivity, and is not particularly limited. However, a material having good adhesion (adhesion) to an electrodeposit by an electrode is preferable.

A plurality of (particularly seven) partition members 88 are arranged at a required interval so that the conductive layers 881 face each other, and are substantially arranged at substantially the center of the surface of the holding member 87 so that the upper and lower portions of FIG. It extends all the way in the direction and is detachably attached. In the present embodiment, the partition member 88 is attached to the jig body 80 by forming the above-described thin wire 35 with a gap of about 10 m. Mounted at 10 m intervals. The holding member 87 provided with the partition member 88 is inserted into the thin wire 35 extending longitudinally across the opening 81 by inserting the partition member 88 from the side (in the direction of the arrow). The partition member 88 is clamped by the tension of the fine wire 35, so that the partition member 88 is attached to the jig main body 80. That is, the fine wire 35 and the partition member 88 (specifically, the conductive layer 881) are in contact with each other.

The manufacturing jig 8 is attached to the jig body 80 as described above, and after connecting the cathode wires 65 so that electricity flows to the fine wire 35 (not shown in FIG. 8), Then, it is accommodated in the jig fixing frame 7 of the tank portion 61, immersed in the electrolytic solution 21, and is heated. Although a specific description is omitted, masking processing is performed on portions of the manufacturing jig 8 other than the openings 81 so as to prevent the electrolytic solution 21 from being immersed.

According to the electrode device 101, an electrodeposit is formed around the fine wire 35 and on the surface of the conductive layer 881 by energizing. Then, when the thin wire 35 and the partition wall member 88 are surrounded to a required extent by the electrodeposit 55, the electrode is stopped. The electrodeposition amount (deposition amount) of the electrodeposit 55 can be controlled in advance by current, voltage, electrodeposition time and the like.

The production jig 8 with the power turned off is taken out of the electrolytic solution 21 and again disassembled into a jig main body 80 and a holding member 87. At this time, since the partition wall member 88 is fixed between the thin wires 35 by the deposited electrodeposit 55, it is separated from the holding member 87. After that, the thin wire 35 and the partition member 88 integrated by the electrodeposit 55 are removed from the jig body 80.

Then, the electrodeposit 55 and the partition wall member 88 are machined to shape them (see FIG. 9), and the thin wire 35 is removed from the electrodeposit 55. The removal of the thin wire 35 is performed by the same method as that manufactured by the above-described power supply apparatus 100, and thus the description is omitted.

Thus, an electrode tube having a plurality of hollow parts (specifically, eight) is produced.

In this electrode tube, a partition wall member 88 is interposed between the hollow portions formed by removing the fine wires 35 so as to partition, so that each of the portions forming the periphery of each hollow portion is independent. It is possible to conduct electricity.

In addition, even in the electric equipment 101, the core part is made of metal or synthetic resin, and a thin wire with a conductive layer (metal (metal layer (film)), carbon, etc.) provided on the outer surface must be used. Can be. Further, the cross-sectional shape and the like of the thin wire are not particularly limited as in the case of the thin wire shown in the electrode device 101.

In the present embodiment, the partition wall member 88 is provided between the thin wires 35, and the electrode is provided. However, the present invention is not limited to this. For example, the partition wall member is not provided, and the electrode is applied only in the thin wire state. It is also possible.

The electrode tube can also be manufactured using an electrode device of another form other than the electrode devices 100 and 101 described in the above embodiment. Further, the type of the manufacturing jig used in the electric equipment is not particularly limited.

Numerical values indicating specific dimensions (size, length) shown in the present embodiment are described for easy understanding, and are not particularly limited. For example, the diameter of the thin wire, the thickness of the electrodeposit, the deformation and tensile force of the thin wire, the thickness of the conductive layer (film) (such as plating), the thickness of the partition member, and the like. These dimensions can be set arbitrarily within the range where the range is set.

In the present embodiment, an example is shown in which metal is deposited on the outer surface of the fine wire by means of electrodeposition so as to cover the fine wire. However, the present invention is not limited to this. Provide a possible conductor (metal, etc.) and deposit an electrodeposited metal on this conductor. By doing so, it is possible to make an electrode tube so that the thin wire is also covered with the metal to be electrodeposited.

In the above embodiment, the electrolytic solution mainly contains nickel sulfamate, but the electrolytic solution is not limited to this; the electrolytic solution is selected according to the type of metal to be deposited. Examples of the metal to be electrodeposited (deposited) include metals such as nickel or its alloy, iron or its alloy, copper or its alloy, cobalt or its alloy, tungsten alloy, and fine particle dispersed metal. Examples of the electrolytic solution for precipitating the above metals include nickel chloride, nickel sulfate, ferrous sulfamate, ferrous borofluoride, copper pyrophosphate, copper sulfate, copper borofluoride, copper copper fluoride, and copper titanium fluoride. , Liquids mainly containing aqueous solutions such as copper alkanol sulfonate, cobalt sulfate, sodium tungstate, or these liquids containing silicon carbide, tungsten carbide, boron carbide, zirconium oxide, silicon nitride, alumina, diamond For example, a liquid in which fine powder such as the above is dispersed is used.

Further, a stirring means for stirring the electrolytic solution may be provided in the cell. As the stirring means, for example, a means by blowing out air, a means for sucking the electrolyte and discharging it into the electrolytic cell, a rotatable stirring blade (propeller), an ultrasonic wave, a vibration and the like can be used. However, the stirring means is not limited to these. The terms and expressions used in this specification are illustrative only, and are not restrictive. Terms and expressions equivalent to the features described in this specification and some of them are used. There is no intention to exclude. It goes without saying that various modifications are possible within the scope of the technical idea of the present invention. Industrial applicability

The present invention has the above configuration and has the following effects.

(a) According to the present invention, a thin wire can be removed from an electrodeposit or a surrounding object formed by an electrode. The fine wire can be heated or expanded by heating the electrodeposit or surrounding material, or by cooling and shrinking the fine wire to create a gap between the electrodeposit or surrounding material and the fine wire. By forming a gap between them, (2) by dipping or applying the liquid, the place where the fine wire and the electrodeposit or the surrounding object are in contact with each other can be made easier to slip, or (3) The cross-sectional area can be pulled by pulling from one or both. To create a gap between the fine wire and the electrodeposit or surrounding material, and to grasp, pull, suck, physically push, or eject gas or liquid And removed using either method. It can also be removed by dissolving with heat or a solvent.

If such a method is used to remove the thin wire, for example, using a thin wire having a diameter of 10 m to 85 xm, the outer surface of the thin wire has a thickness of 5 m or more and 50 m or less. The fine wire can also be removed from the electrodeposit or the surrounding object formed to have the shape. Therefore, by using this method for removing a thin wire, for example, an electrode tube having a fine inner diameter that can be used as a tube for a contact probe or the like can be manufactured.

(b) According to the method of manufacturing an electrode tube by increasing the amount of the electrodeposit or the surrounding material formed on the end side of the fine wire, for example, pulling or pushing the fine wire from the electrodeposit or the surrounding material When removing the jig or tool, the jig or tool can be hooked on the end face of the portion where the amount of the electrodeposit or the surrounding object is increased. Therefore, in this case, since the thin wire can be removed while the electrodeposit or the surrounding object is fixed, the thin wire is easily removed.

(c) According to the method of manufacturing an electrode tube in which the amount of lateral strain deformation when the thin wire is pulled outward and stretched is 5% or more of the cross-sectional area, the thin wire and the electrodeposited material or the surrounding material are In between, a sufficient gap for removing the fine wire can be formed, so that there is a high possibility that the fine wire can be removed from the electrodeposit or the surroundings without any trouble. If the amount of transverse strain deformation is less than 5% of the cross-sectional area, the clearance may not be sufficient, which may hinder removal.

(d) According to the method for manufacturing a tube using a thin wire having a conductive layer provided on the outer surface and removing the thin wire so that the conductive layer remains on the inner surface of the tube, a gold plating or the like is provided on the inner surface. Can be manufactured. Such a tube is, for example, suitable for a material of a conductive layer provided on an inner surface. Therefore, the electric conductivity can be improved when only the electrodeposit or the surrounding object is used, and in this case, it can be used as a component suitable for conducting electricity.

(e) According to a method for manufacturing an electrode tube using a thin wire material in which at least two or more conductive layers of different materials are formed on the outer surface side, for example, the outer conductive layer is made of copper and is in contact with copper. The inner conductive layer to be formed is made of gold, so that nickel can be formed as an electrodeposit or a surrounding by electrolysis. In this case, Nigel has better adhesion to copper than gold, and copper also has better adhesion to gold, so that an electrode tube with good adhesion can be formed.

(f) In the case of having a plurality of hollow parts formed by removing thin wires, for example, it is possible to replace and use a part manufactured by arranging a plurality of pipes having only one hollow part. it can. According to this electric tube, the trouble of arranging the individual tubes side by side can be eliminated. Also, the gap between the hollow portions does not shift since it is fixed by the electrodeposit or the surrounding object.

( _g ) Between the hollow portions, a partition formed by providing a conductive layer on the outer surface of the insulator is interposed, so that electric conduction can be performed independently for each portion formed around each hollow portion. In each of the hollow parts, electric conduction is possible independently for each hollow part.

(h) For a thin wire that has a portion without a conductive layer at both ends, pulling the portion without the conductive layer outward will apply a tensile force to the conductive layer. It is difficult to apply directly, the conductive layer and the base wire are easily separated, and the adhesion between the conductive layer and the electrodeposit or the surrounding material is not easily impaired.

Claims

Claims A method for producing an electrode tube by forming an electrodeposit or a surrounding material around a thin wire by using an electrode, and removing the thin wire from the electrodeposit or the surrounding material,

The thin wire is heated and expanded by heating the electrodeposit or the surrounding material, or contracted by cooling the thin wire to form a gap between the electrodeposit or the surrounding material and the fine wire, thereby grasping the thin wire. Removing by using any method of pulling, sucking, physically pushing, or ejecting gas or liquid by pushing with a

Manufacturing method of electric tube.

By immersing or applying a liquid to the thin wire, the thin wire can be easily slipped at the place where the thin wire is in contact with the electrodeposit or the surrounding object. , Or by ejecting a gas or liquid and pushing it away.

Manufacturing method of electric tube.

The fine wire is pulled from one or both and deformed to reduce the cross-sectional area, forming a gap between the fine wire and the electrodeposit or surrounding material, and grasping the pull or pulling or sucking A method for producing an electric tube, comprising removing by using either a method of physically pushing or a method of ejecting and pushing a gas or liquid.

Characterized in that the amount of electrodeposited material or surrounding material on the end side formed on the fine wire is increased,

A method for producing the electrode tube according to claim 1, 2, or 3.

5. The amount of lateral strain deformation when the wire is pulled outward and stretched is 5% or more of the cross-sectional area.

4. The method for producing an electrode tube according to claim 3.

6. A method for producing an electrode tube by forming an electrodeposit or a surrounding material around a thin wire by an electrode and removing the thin wire from the electrodeposit or the surrounding material,

Manufacturing method of electric tube.

7. Using a thin wire having a conductive layer provided on the outer surface, and removing the thin wire so that the conductive layer remains on the inner surface of the tube.

A method for producing an electrode tube according to claim 1, 2, 3, 4, 5, or 6.

8. Use a thin wire with at least two layers of conductive layers of different materials formed on the outer surface. Make the electrodeposit or surrounding object adhere to the outer conductive layer of the thin wire, and use the inner conductive layer as a conductive tube. 7. The method for producing an electrode tube according to claim 1, wherein the thin wire material is removed so as to remain on the inner surface of the electrode tube.

9. The hollow portion formed by removing the thin wire from the electrodeposit or the surrounding object has an inner shape having a circular cross section or a polygonal cross section,

A method for producing a tube according to claim 1, 2, 3, 4, 5, 6, 7 or 8.

10. The method for producing an electrode tube according to claim 1, 2, 3, 4, 5, 6, 7, 8, or 9, comprising a plurality of hollow portions formed by removing a thin wire. Method.

1 1. Between the hollows, a partition formed by providing a conductive layer on the outer surface of the insulator is interposed, so that electric conduction can be performed independently for each part around each hollow. Characterized in that

A method for manufacturing an electrode tube according to claim 10.

1 2. An electrode tube manufactured by forming an electrodeposit or a surrounding material around a thin wire by an electrode and removing the thin wire from the electrodeposit or the surrounding material,

When the hollow wire formed by removing the fine wire from the electrodeposit or the surrounding material has a circular internal shape, the hollow portion has an inner diameter of 10 m or more and 85 m or less, The hollow portion having a polygonal cross-sectional shape is characterized in that the diameter of the inscribed circle of the hollow portion is 10 m or more and 85 im or less,

Electrode tube.

13. characterized in that the wall thickness is not less than 5 and not more than 50,

13. The electrode tube according to claim 12.

14. The inner surface is provided with a conductive layer made of a different material from the electrodeposit or the surrounding object.

An electrode tube according to claim 12 or 13.

15. A conductive layer of a material different from that of the electrodeposit or the surrounding material is provided on the inner surface, and a conductive layer of a material different from the conductive layer is provided between the electrodeposit or the surrounding material and the conductive layer. Characterized in that

An electrode tube according to claim 12 or 13.

16. The electrode tube according to claim 12, wherein there are a plurality of hollow portions formed by removing the thin wire.

17. A structure in which a partition formed by providing a conductive layer on the outer surface of the insulator is interposed between the hollow parts so that electric conduction can be independently performed for each part around each hollow part. Characterized in that

17. The electrode tube according to claim 16.

18. The conductive layer provided on the outer surface of the partition wall is configured to form a part of a hollow portion.

18. The tube according to claim 17.

19. The partition body is characterized in that a thickness of a portion provided between adjacent hollow portions is not less than 5 / m and not more than 50 m,

An electrode tube according to claim 17 or claim 18.

20. A thin wire for producing an electrode tube by forming an electrodeposit or a surrounding object around the electrode and removing the electrodeposit or the object from the electrodeposit or the surrounding object,

If the outer shape has a circular cross section, the outer diameter must be between 1 Om and 85 m If the outer shape has a polygonal cross-sectional shape, the diameter of the inscribed circle is 10 m or more and 85 or less, and the amount of lateral strain deformation when pulled outward and stretched is 5% or more of the cross-sectional area. Characterized in that

Fine wire material for manufacturing electric tubes.

. An outer surface provided with a conductive layer made of a material different from that of the electrodeposit or the surrounding object;

A thin wire for producing the electrode tube according to claim 20.

A conductive layer of a material different from that of the electrodeposit or the surrounding object is provided on the outer surface, and a conductive layer of a material different from the conductive layer is provided between the thin wire base member and the conductive layer. Characterized by the following:

A thin wire for producing the electrode tube according to claim 20.

The thin wire for producing an electric tube according to any one of claims 20, 21 and 22, characterized in that there are portions on both ends where no conductive layer is provided.

The thin wire for producing an electrode tube according to claim 20, wherein the outer shape is formed in a circular cross section or a polygonal cross section.