WO2005073744A1 - Detecteur de champ magnetique, support pour detecteur de champ magnetique et compas equipe d'un tel detecteur - Google Patents

Detecteur de champ magnetique, support pour detecteur de champ magnetique et compas equipe d'un tel detecteur Download PDF

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Publication number
WO2005073744A1
WO2005073744A1 PCT/NL2004/000871 NL2004000871W WO2005073744A1 WO 2005073744 A1 WO2005073744 A1 WO 2005073744A1 NL 2004000871 W NL2004000871 W NL 2004000871W WO 2005073744 A1 WO2005073744 A1 WO 2005073744A1
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Prior art keywords
magnetic field
field sensor
hall
hall plate
plates
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PCT/NL2004/000871
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English (en)
Inventor
Frank Robert Riedijk
Jeroen Christiaan Van Der Meer
Paulus Cornelis De Jong
Alexander Willem Van Herwaarden
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XENSOR INTEGRATION BV
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XENSOR INTEGRATION BV
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices
    • G01R33/072—Constructional adaptation of the sensor to specific applications
    • G01R33/075—Hall devices configured for spinning current measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C17/00—Compasses; Devices for ascertaining true or magnetic north for navigation or surveying purposes
    • G01C17/02—Magnetic compasses
    • G01C17/28—Electromagnetic compasses
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/07—Hall effect devices

Definitions

  • MAGNETIC FIELD SENSOR SUPPORT FOR SUCH A MAGNETIC FIELD SENSOR AND A COMPASS PROVIDED WITH SUCH A MAGNETIC FIELD SENSOR
  • the invention relates to a magnetic field sensor, comprising at least two Hall plates, wherein the magnetic field sensor is equipped to generate measuring currents in a number of directions in the Hall plates and to measure a potential difference over the Hall plates in a direction in the plane of the Hall plate, wherein the direction is always essentially perpendicular to the direction of the measuring current and wherein the potential difference measured is a measure for the magnetic field through the Hall plate in a direction that is essentially perpendicular to the direction of the measuring current and the measured potential difference, wherein the magnetic field sensor is equipped to generate a measuring current in each Hall plate in at least eight directions.
  • the invention furthermore relates to a support for such a magnetic field sensor and a compass provided with such a magnetic field sensor.
  • the sensor For a calibration-free electronic compass in small portable, battery-powered applications there is a need for magnetic field sensors with ultra-low offset (for example less than one ⁇ T).
  • the sensor produces a digital output signal.
  • Sufficient resolution can be achieved with such a low offset (a few degrees, in the Netherlands the earth's magnetic field is 30 - 50 ⁇ T) and no external electronics are needed other than the microprocessor which often is already present in the application.
  • Sensors based on the magnetoresistive principle can be made with ultra-low offset.
  • these sensors cannot be combined with electronics on the sensor, as a result of which external electronics have to be added.
  • these sensors are not able to withstand high magnetic fields; they then cease to function well.
  • Hall plates can be combined with electronics on one and the same silicon chip, as a result of which the desired digital output signal can be produced. And the sensors cannot be overloaded.
  • the magnetic field sensors based on Hall plates that are known at present do not meet the offset requirement; they display an offset of tens of ⁇ T or more, which, moreover, changes over time.
  • a magnetic field sensor based on silicon Hall plates that has an ultra-low offset (of the order of a few ⁇ T).
  • such a sensor can produce digital output signals.
  • a magnetic field can be measured with the aid of a Hall plate.
  • thermocouple voltages by thermal gradients induced by Joule heating and/or Peltier heating/cooling.
  • offset in the Hall plates with offset compensation based on current in four directions is still above 100 ⁇ T.
  • Hall plates where the current is not switched or does not run orthogonally (in four directions) but is switched or runs in at least eight directions.
  • a first technique that makes use of this is described in US Patent 5,406,202 ("Offset- compensated Hall sensor having plural Hall detectors having different geometrical orientations and switchable directions", April 11, 1995). This technique is also described in Hohe, in "Hall sensor array for measuring a magnetic field with offset compensation", PCT Application no. 01/18556, 8 September 2000.
  • the sensor has a number of Hall plates, each with 8 contacts.
  • a sensor that consists of four Hall elements (Fig. 6a) is discussed in the document.
  • the first and third Hall elements carry a current in a first direction and the second and fourth Hall elements carry a current in a second direction.
  • the distances between the Hall elements are so chosen that these correspond to the period of the object for which the relative position is determined, for example a gear wheel, as is indicated by the phases mentioned in the figure.
  • the Hall plates thus each measure a different magnetic field. The accuracy of this sensor is far from being sufficient to measure, for example, the earth's magnetic field.
  • US 2003/0155912 Al describes a Hall sensor consisting of a first and a second Hall plate.
  • Each Hall plate is equipped to generate measuring currents in 8 directions and the associated potential difference in a direction perpendicular to the measuring currents can be measured. These measured potential differences are a measure for the magnetic field.
  • US 2003/0155912 Al describes that the measuring currents can be spun over the various directions. This takes place in a first direction in the first Hall plate and in a second direction in the second Hall plate, the first and the second spin directions being opposed. Such a measurement method suppresses the dynamic offset because these are more or less opposed in the two plates and thus compensate one another.
  • the signals from the two Hall plates offer relatively moderate instantaneous suppression.
  • the measurement method according to US 2003/0155912 Al will suffer from self-modulation.
  • the said aim is achieved with a magnetic field sensor as described in the preamble, characterised in that the measuring current in the first Hall plate is at an essentially constant angle to the measuring current in the second Hall plate.
  • a magnetic field sensor according to the invention it is possible to measure a magnetic field in a manner that is many times more accurate than was possible on the basis of the state of the art.
  • By providing several Hall plates with at least eight current directions it has proved possible to achieve an offset that is many times smaller than the existing magnetic field sensors that make use of Hall plates.
  • Using such a magnetic sensor it is possible to measure a magnetic field with an offset that is clearly lower than the magnetic sensors described in the state of the art.
  • the invention provides a method that enables instantaneous and temporal compensation of internal and external offset sources with a geometrical combination of Hall plates with spinning current direction with at least eight current directions.
  • the influence of changing external sources and of the mutual influencing of electronics and Hall plate is substantially suppressed.
  • self- modulation of the various Hall plates on one another is also suppressed.
  • the circuit can be operated at an increased spinning frequency.
  • the invention relates to a magnetic field sensor wherein the magnetic field sensor is equipped to direct the measuring current per Hall plate in the at least eight directions in accordance with a predetermined sequence. By choosing a suitable sequence it is possible to compensate for specific causes of offset. According to one embodiment the invention relates to a magnetic field sensor wherein the measuring current is directed successively in a first sequence through the at least eight directions and is then directed in a second sequence through the at least eight directions, wherein the first sequence is the reverse of the second sequence.
  • the invention relates to a magnetic field sensor in which the magnetic field sensor comprises at least one pair of Hall plates, consisting of a first and a second Hall plate, wherein the angle between the measuring current in the first Hall plate and the measuring current in the second Hall plate is 45°, 90° or 180°.
  • a Hall plate has the advantage that the offset caused by mechanical stress or thermal gradients is always compensated instantaneously and the resulting offset is compensated after spinning.
  • the invention relates to a magnetic field sensor wherein each Hall plate is provided with at least eight contacts for feeding the measuring current to the Hall plate.
  • the invention relates to a magnetic field sensor wherein each Hall plate is provided with four contacts and the magnetic field sensor is equipped to feed a periodic signal to each of the contacts, which periodic signals are, respectively, shifted in phase by essentially 90° with respect to one another. In this way a continuously spinning measuring current is created with a limited number of contacts. This continuously spinning measuring current can be used not only to measure in eight directions but also to measure in more than eight directions.
  • the invention relates to a magnetic field sensor, wherein the magnetic field sensor is provided with at least four Hall plates, each of which is equipped to carry a measuring current in at least eight directions.
  • the Hall plates are preferably geometrically identical and thermally and spatially coupled to one and the same substrate, whilst the Hall plates individually cycle through their possible current directions, wherein the mutual direction of the currents has a compensating effect on external and internal influences.
  • the combination of the Hall voltages for individual spinning currents will ultimately yield an ultra-low offset with an interference-free signal.
  • the invention relates to a magnetic field sensor, wherein the magnetic field sensor is equipped to direct the measuring currents in a predetermined sequence through the at least eight directions of the at least four Hall plates, wherein: a measuring current in a first Hall plate runs essentially pe ⁇ endicularly with respect to a measuring current in a second Hall plate, the measuring current in the second Hall plate runs essentially pe ⁇ endicularly to a measuring current in a third Hall plate, the measuring current in the third Hall plate runs essentially pe ⁇ endicularly to a measuring current in a fourth Hall plate, and the measuring current in the fourth Hall plate runs essentially pe ⁇ endicularly to the measuring current in the first Hall plate.
  • This embodiment compensates instantaneously for both thermal and mechanical offset.
  • the invention relates to a magnetic field sensor comprising a first group of Hall plates, comprising a first, second, third and fourth Hall plate, and a second group of Hall plates, comprising a fifth, sixth, seventh and eighth Hall plate, wherein the magnetic field sensor is equipped to select the direction of the measuring current in the first, second, third and fourth Hall plate essentially pe ⁇ endicular with respect to the fifth, sixth, seventh and eighth Hall plate, respectively.
  • the magnetic field sensor is equipped to select the direction of the measuring current in the first, second, third and fourth Hall plate essentially pe ⁇ endicular with respect to the fifth, sixth, seventh and eighth Hall plate, respectively.
  • the invention relates to a magnetic field sensor wherein the support is a semiconductor and the support furthermore has a demultiplexer that is equipped to take a current and to distribute this over the at least eight directions of the Hall plates, and the support furthermore has a multiplexer that is equipped to take the measurement voltages over the Hall plates and to output these via an output and the support is furthermore provided with a control unit for driving the demultiplexer and the multiplexer.
  • the support is preferably a silicon plate where supplementary electronics can be installed in a simple manner. Silicon support is also particularly suitable for making Hall plates.
  • the invention relates to a magnetic field sensor wherein the support furthermore has a summing unit that is connected to the output of the multiplexer, for summing the various voltages measured. By summing the various voltages measured a value can be obtained that is a measure for the strength of the magnetic field and that is not sensitive to a wide variety of types of offset.
  • the invention relates to a magnetic field sensor, wherein the support is furthermore provided with a sigma/delta converter, for digitising the output signal from the multiplexer, and an amplifier for amplifying the output signal from the multiplexer.
  • the invention relates to a magnetic field sensor, wherein the magnetic field sensor is furthermore provided with a flux concentrator that essentially is in the third direction of the Hall plates. The flux concentrator draws magnetic field lines towards it. At the edge of the flux concentrator deflection of the magnetic field lines lines will be produced, as a result of which it is possible nevertheless to measure field lines in three dimensions with Hall plates that are in one plane. This has the advantage that with one magnetic field sensor a magnetic field can measure three directions.
  • the invention relates to a magnetic field sensor, wherein the magnetic field sensor is provided with at least one coil for generating a magnetic field that can be measured by the magnetic field sensor. With such a coil it is possible to generate a magnetic field of a known strength and direction, by means of which the magnetic field sensor can be calibrated easily. According to one embodiment the invention relates to a magnetic field sensor, wherein the coil can be driven to demagnetise flux concentrator.
  • the invention relates to a magnetic field sensor, wherein the magnetic field sensor is equipped to ignore at least one measurement signal for measurement of the potential difference over the Hall plates for a specific period. This makes it possible to ignore equilibrating fluctuations, as a result of which a reliable measurement can be made within a relatively short time. Specifically, it is then not necessary to measure over a relatively long period in order to average out the equilibrating fluctuations.
  • the invention relates to a support provided with a magnetic field sensor as described above.
  • the invention relates to a compass provided with a magnetic field sensor as described above.
  • Figure 1 shows, diagrammatically, two Hall plates according to one embodiment of the invention
  • Figures 2a to 2e show, diagrammatically, various configurations of Hall plates according to various embodiments of the invention
  • Figures 3a to 3h show various directions of the current directions according to one embodiment of the invention
  • Figures 4a to 4h show temperature profiles for various measuring current directions in one embodiment of the invention
  • Figures 5a to 5d show the effect of the temperature of electronics on the Hall plates
  • Figure 6 shows various signals as a function of time according to one embodiment of the invention
  • Figures 7a and 7b show various spin directions of the measuring current
  • Figure 8 shows, diagrammatically, a chopper loop according to one embodiment of the invention
  • Figure 9 shows, diagrammatically, a magnetic field sensor with processing electronics according to one embodiment of the invention
  • Figures 10a and 10b show a plan view and a side view, respectively, of a magnetic field sensor according to one embodiment of the invention.
  • a magnetic field sensor 1 according to the invention comprises, for example, two Hall plates 11, 12, provided with a number of connections 10, by means of which currents can be directed through each Hall plate in at least eight directions. This makes it possible to achieve temporal compensation in at least eight current directions, which, as has been described in the preamble, is necessary for complete offset compensation.
  • a magnetic field sensor with several Hall plates, in which only four current directions can be controlled in each Hall plate, as previously described in US Patent 5,406,202, is not sufficient to eliminate all offset sources to an adequate extent.
  • the Hall plates 11, 12 as shown in Fig. 1 each have eight connections 10.
  • the invention also relates to a magnetic field sensor 1 provided with Hall plates with more than eight connections or in which more than eight current directions can be obtained.
  • the invention also relates to a Hall plate with a continuously spinning current vector, in which not eight, but four contacts 10 are needed in order to achieve at least eight current directions.
  • Such a Hall plate 11, 12 has four contacts, which are positioned equidistantly around the edge of the Hall plate 11, 12.
  • the two pairs of contacts 10 located opposite one another are connected to a periodic signal (for example a sinusoidal signal), the phase shift in the currents corresponding to the geometrical phase shift of the pairs of contacts, i.e. 90°.
  • the various features result in a continuously spinning current vector in the Hall plate.
  • the at least eight required current directions can also be achieved with such a device.
  • Optimum technology such as, for example, the technique that makes use of so-called implanted, buried or deposited layers, is preferably used for each Hall plate 11, 12.
  • the choice of the position on the chip (minimum stress gradients) and measures to minimise the value of the stress (etched channels around the Hall plates, packing in elastic materials such as silicones) can also be employed.
  • the individual Hall plates 11, 12 will be completely temporally compensated provided the external and internal offset sources are constant. In general this requirement will not be met and there will be residual offset after a complete cycle, depending on the behaviour of the these offset sources, which will be explained later.
  • the invention makes use of geometric instantaneous compensation, where the magnetic field sensor 1 consists of various Hall plates 11, 12 that are connected in parallel, such that the magnetically induced signals are summed and the internal and external (instantaneous) offset sources always eliminate one another as far as possible. With the aim that the entire magnetic field sensor becomes less sensitive to rapid changes or (self-)modulations in the various offset sources, which ultimately will lead to a magnetic field sensor with lowered and more stable offset.
  • Various internal and external sources can be identified and described here. External sources which may be mentioned are: mechanical stress and temperature (drift) effects.
  • Thermal compensation preferably takes place with an angle between the current directions of approximately 180°.
  • thermal offset is, specifically, the thermocouple effect that generates a voltage over the measurement contacts if there is a temperature difference between these contacts.
  • Hall plate pairs with current directions at 180° thus have a thermally compensating effect.
  • Hall plates 11, 12, 13, 14 are needed in order to employ both thermal compensation and stress compensation.
  • the above compensations apply for compensation of internal and external effects.
  • internal effects demand a more detailed explanation because incorrect choices can lead to built-in offset. As an example we take the influence of a changing temperature profile as a consequence of heat generation in the electronics.
  • the electronics are preferably integrated on the semiconductor plate and will be discussed further later.
  • the heat generation by the electronics is, by definition, correlated to the current direction that is set and sampled at that point in time, for example by a changed signal in the read out electronics and a changed position of the current switches and connecting wires. This effect is sufficiently suppressed by a thermally compensating geometrical configuration. This will be explained in more detail below with reference to Fig. 5.
  • the (self-)modulating effects of the Hall plates 11, 12, 13, 14 on one another are described below. In the same way as described above, the Hall plates 11, 12, 13, 14 will see each other thermally and modulate each other's offset.
  • the thermal offset of the individual Hall plates 11, 12, 13, 14 will, by definition, change at the same time. This will be explained in more detail in Fig. 4 below.
  • the Hall plates 11, 12, 13, 14 and their connection patterns will also create a mechanical stress field on each other, which is not necessarily corrected instantaneously. This can lead to high offset peaks per current direction, which normally are compensated after a complete spin cycle unless a thermal modulation of this stress pattern takes place. It will also be possible for the Hall plates to be modulated by the changing magnetic fields that are generated by the currents in the other Hall plates 11, 12, 13, 14.
  • compensating Hall plates 11, 12, 13, 14 is preferably so chosen that these effects are either completely avoided, the effects in the various Hall plates 11, 12, 13, 14 compensate geometrically instantaneously or the effects at least in the Hall plate combination compensate temporally after a complete switch-round cycle. If these conditions are not met, a residual offset will remain.
  • the positions and the number of Hall plates 11, 12, 13, 14 can be varied: the position and the number of Hall plates 11, 12, 13, 14; the current directions and spin patterns of the various current directions in the various Hall plates 11, 12, 13, 14; the spin speeds for the individual current directions in the various Hall plates 11, 12, 13, 14.
  • FIG. 2a A number of different possibilities for constructing the magnetic field sensor 1 from several Hall plates 11, 12, 13, 14 so that geometrical compensation can be obtained are shown in Fig. 2a to Fig. 2e.
  • the double Hall plates 11, 12 shown in Fig. 2a the individual current directions of which always run at approximately 90° with respect to one another, is a sub-optimum solution as far as the offset is concerned because even though offset as a result of mechanical stress is compensated the offset as a result of thermal gradients is not compensated.
  • An embodiment with only two Hall plates 11, 12 does, however, have a favourable current consumption.
  • the Hall plates 11, 12 that are shown in Fig. 2a are positioned a relatively large distance apart to prevent instantaneous offset by thermal self- modulation.
  • a Hall plate pair can be set to a difference of 180° in current direction in order to obtain thermal suppression. It will thus be clear to those skilled in the art that in order to employ both thermal compensation and stress compensation at least four Hall plates 11, 12, 13, 14 are needed, with Hall plate currents at 90° and at 180° degrees with respect to one another.
  • the magnetic field sensor 1 with two Hall plates can then be supplemented by another (or a number of) pair(s), the external influences being better suppressed. In this case the currents can still be freely chosen because the choice is not limited by the prevention of self-modulation.
  • FIG. 2b shows an example of a magnetic field sensor 1 that comprises four Hall plates 11, 12, 13, 14 that have been positioned a relatively large distance away from one another so that self-modulation is prevented.
  • Better instantaneous compensation takes place when the Hall plates are better coupled in pairs and offset-generating effects such as temperature and stress are thus also better coupled.
  • This can be achieved by positioning the Hall plates in pairs a relatively short distance apart. In this case self-modulation can no longer be adequately prevented and it is necessary to work with an equivalent pair with opposing thermal or mechanical stress, so that instantaneous compensation is nevertheless obtained.
  • This is achieved with a so-called double pair quad, which is shown in Figure 2c. With this arrangement the one pair must not have a systematic influence on the other.
  • FIG. 2c shows such a magnetic field sensor 1, in which two pairs of Hall plates 11, 12, 13, 14 are shown.
  • the Hall plates are, per pair, positioned a relatively small distance apart, but the pairs are a greater distance from one another. Even better compensation will take place and less of the chip surface will be used if four Hall plates are combined. However, because of self-modulation this construction allows less freedom for the choice of direction of the currents, but does compensate best for all effects mentioned.
  • the magnetic field sensor is made up of four Hall plates 11, 12, 13, 14, all four of which are positioned a relatively small distance apart. This embodiment is referred to as the coupled quad configuration and is shown in Fig. 2d.
  • Fig. 2d shows a preferred embodiment and will be described in detail further below.
  • Fig. 2e shows a further alternative embodiment of the magnetic field sensor 1 that comprises two coupled quad configurations. In total, the magnetic field sensor 1 thus comprises eight Hall plates 11, 12, 13, 14, 15, 16, 17, 18.
  • the Hall plates 11, 12, 13, 14 are, for example, placed on a semiconductor support, for example a silicon plate, and are closely linked thermally and mechanically. This configuration provides instantaneous compensation for mechanical stress and thermal gradients.
  • Each Hall plate 11, 12, 13, 14 has at least eight current directions, referred to as the north, north-east, east, south-east, south, south-west, west and north-west direction below. These current directions can be obtained in various ways, as has already been indicated in the description of Fig. 1.
  • An example of a choice of the mutual current direction in a coupled quad configuration is shown in Figs 3a to 3h. In Fig. 3a the current runs north in the first Hall plate 11, west in the second Hall plate 12, south in the third Hall plate 13 and east in the fourth Hall plate 14.
  • the current directions in Fig. 3b are obtained by turning the current directions of all Hall plates 11, 12, 13, 1445° clockwise from the position in Fig. 3a.
  • state 2 is thus defined as follows: the current in the first Hall plate 11 runs north-east, the current in the second Hall plate 12 runs north-west, the current in the third Hall plate 13 runs southwest and the current in the fourth Hall plate 14 runs south-east.
  • the current directions in the further Figures 3c to 3h can be obtained by in each case turning the current directions through 45° from the previous state.
  • the current directions of the quad from states 1 to 8 in Figure 1 are thus shown. It will be understood by a person skilled in the art that the sequence shown is one of the many possible sequences, the sequence of the states being important in particular for dynamic phenomena, which are discussed later.
  • the Hall plates 11, 12, 13, 14 are preferably placed on a semiconductor plate, on which the electronics 20, which will be discussed in more detail later, have been installed for driving, sampling and processing the Hall plates 11, 12, 13, 14. Such electronics 20 generate heat that can influence the Hall plates 11, 12, 13, 14. The offset that is created as a result can also be compensated in a relatively simple manner with the aid of a magnetic field sensor 1 according to the invention.
  • Figs 5a, 5b and 5c it is shown how a single Hall plate 11 and electronics 20 can be installed on a semiconductor plate (not shown). The current direction is always different in the various figures and it can be seen how the centre point for heat generation in the electronics 20 is always positioned somewhere different within the electronics 20.
  • the reduction in the thermal feedback can also comprise measures such as active thermal compensation.
  • This means that the heat generated by the electronics is compensated using heat sources of equal size, which are positioned on the other side of the Hall plates so as to reduce thermal gradients in this way.
  • the electric currents that pass through the Hall plates 11, 12, 13, 14 are distributed over the various contacts 10 of the Hall plates 11, 12, 13, 14 and the electrical voltages that the Hall plates 11, 12, 13, 14 generate are measured from other contacts by means of integrated switches, such as MOSFET switches.
  • the switching signal 31 indicates that a first current direction and associated measuring direction is switched to a second current direction and measuring direction.
  • the third signal is the Hall signal 33 generated in the second measuring direction. It can clearly be seen that this generated Hall signal 33 initially fluctuates substantially before assuming an essentially constant value. This fluctuation can be the consequence of switching effects and/or thermal equilibrating processes.
  • a switch-off signal 32 is provided that interrupts the measurement for some time. This is done, for example, for at least 1 ⁇ s, required in order to avoid the large electrical switching peaks, up to a period of the order of 1 ms, in order to achieve a stable situation from the thermal standpoint as well.
  • Fig. 7 it is shown that as a result of the thermal inertia of the magnetic field sensor 1 a temperature profile that runs somewhat behind the measurement will spin in the magnetic field sensor on rapid switching of the current direction.
  • Fig. 7a a Hall plate 11 is shown in which the current (indicated by the continuous arrow) is turned clockwise.
  • the thermal profile that is produced in the Hall plate 11 however corresponds to a direction of the current in which the current was running just beforehand (indicated by the broken arrow).
  • Fig. 7b shows the reverse situation. If the current is switched clockwise this profile will be thermally mirrored with respect to the situation in which switching is anticlockwise. As a result the thermal offset will be opposed.
  • thermodynamically By alternately switching clockwise and anticlockwise and summing the signals, compensation of the dynamic offset can be obtained. In this case too the electrical switching transition phenomena can be eliminated to lower the offset. It is obvious that several switching patterns are possible that thermodynamically have an opposed residual error and by using these switching patterns after one another or mixed with one another over time this error can thus be compensated temporally. Even instantaneous thermodynamic compensation is a possibility if the various Hall plate combinations allow, for example, two Hall plates to spin clockwise and two anticlockwise. The two above methods for avoiding dynamic offset enable more rapid switching of the current. In the case of changing external offset causes, this is advantageous because these changes are better suppressed, which makes even stable offset suppression possible.
  • the electronics 20 for signal processing and driving the Hall plates is preferably of the best type.
  • Measures are also taken in the layout of the electronics 20 to minimise offset in the electronics as a result of the generation of heat in the Hall plates 11, 12, 13, 14, specifically by positioning the input stages of the amplifiers such that the (changing) heat emission by the Hall plates 11, 12, 13, 14 gives rise to only minimal temperature differences between the transistors of the input stages, for example by means of a quad input stage.
  • the residual influence of the Hall plate on the electronics can be even further reduced by a slow chopper loop that reverses after every eight measurements (a complete rotation over the Hall plates 11, 12, 13, 14). This is shown diagrammatically in Fig. 8. With this arrangement a residual offset Vmod is created in the electronics by the thermal effect and modulation of the Hall plate.
  • Fig. 9 shows the diagrammatic set-up of a magnetic field sensor 1 that has been implemented on a chip.
  • a stable current source 35 is fed to a demultiplexer 40.
  • the demultiplexer has eight outputs 41, 42, ..., 48 which are connected to eight different contacts 51, 52, ..., 58, respectively, of the Hall element 50.
  • the Hall element 50 has a quad configuration consisting of four Hall plates 11, 12, 13, 14. Each Hall plate 11, 12, 13, 14 also has 8 contacts 10 that have been connected in a desired manner to the contacts 51, 52, ..., 58 of the Hall element 50. This can be done in various ways, as will be understood on the basis of the description given above.
  • the contacts 10 of the Hall plates 11, 12, 13, 14, are connect to eight inputs 61, 62 ..., 68, respectively, of a multiplexer 60.
  • Both the multiplexer 60 and the demultiplexer 40 are connected to a control unit 73 that ensures that the correct contacts are sampled or, alternatively, current is applied to the correct contacts, at the correct points in time.
  • the Hall voltages are sampled via the multiplexer 60.
  • These are then amplified using a differential amplifier 70 that is in a chopper loop.
  • the common-mode control (CM control) ensures, inter alia, that the junction FET effects are minimised.
  • the output from the differential amplifier 70 can then be digitised, for example using a sigma/delta converter 71.
  • the digitised measurement signal is then summed by a summing unit 72. This can be done in various ways, as has already been discussed above.
  • the digital signal can be then be fed to further processing electronics (not shown). It will be clear that the switching scheme described here is only one of the many possible schemes.
  • the amplified signal can, for example, also first be summed by an analogue summer 71 and only then digitised by the sigma/delta converter 72.
  • the digitised signal can optionally also be digitally filtered before being output.
  • the magnetic field signal can be output in the form of a digital and/or analogue signal.
  • the control unit 73 is responsible for driving the demultiplexer and multiplexer and optionally makes sophisticated switching schemes possible.
  • control unit and the multiplexers can easily be organised such that the various current directions in the individual Hall plates 11, 12, 13, 14 and in the various current sequences and speeds are completely programmable, as a result of which the configuration can be put to flexible use.
  • the circuit can optionally be expanded with logic units, for example with an on-chip microprocessor, in order to perform signal calculations, such as calculation and calibration of the magnetic vector, temperature compensation, auto-calibrations and to control compensation for magnetic materials in the surroundings.
  • relevant calibration data can be stored in on-chip EEPROM or other memory facilities. Specific forms of output signal (buses, field buses, etc.) can thus also be implemented.
  • Figs 10a and 10b show a magnetic field sensor 1 with four Hall plates 11, 12, 13, 14 in a plan view and a side view, respectively.
  • the magnetic field sensor 1 shown in Figures 10a and 10b is more sensitive as a result of the use of an amplifier and a modulator, in the form of a flux concentrator 80.
  • the flux concentrator 80 is a magnetically active layer which, as the name already indicates, draws the field lines of the magnetic field from the surroundings to it and in that way locally amplifies the field (at the expense of a slight attenuation elsewhere).
  • a so-called soft magnetic material is used that does draw in the field lines but has no permanent magnetisation properties.
  • the flux concentrator 80 By arranging the flux concentrator 80 precisely above the Hall plates 11, 12, 13, 14 a stronger magnetic field is detected at this point and the signal (and thus the signal/noise ratio and the signal/offset ratio) is stronger. This can yield a gain of a factor of 5 - 10. Of course, the offset is still approximately 1 ⁇ T. However, for example, the earth's magnetic field is now no longer experienced as 30 - 50 ⁇ T but as 150 - 500 ⁇ T. This leads to a more accurate determination of the magnetic field or, alternatively, the speed of the magnetic field sensor 1 can be increased without reducing the original accuracy.
  • the flux concentrator 80 draws magnetic field lines to it. Deflection of the magnetic field lines will be produced at the edge of the flux concentrator 80, as is indicated in Fig. 10b.
  • the flux concentrator 80 can ensure that the signal is stronger and also that we are able to determine a magnetic field in three dimensions with 1 chip. The latter was not previously possible with Hall elements, simply because the offset of the Hall elements was still too great. This makes the invention very suitable for use in a compass for determining the strength and/or direction of the earth's magnetic field.
  • Fig. 10b shows a possible configuration with flux concentrator 80.
  • Magnetic fields in the X and Y direction are deflected by the flux concentrator 80 so that the magnetic field lines in the Z direction run through the Hall plates 11, 12, 13, 14.
  • the magnetic field lines now run inwards on one side of the flux concentrator 80 and outwards on the other side.
  • the magnetic field lines in, for example, the direction of the X axis run in a first direction through a first Hall plate 11 and in a second direction, that is opposed to the first direction, through a second Hall plate 13.
  • a coil 81 is furthermore also shown.
  • the coil 81 is positioned in the plane of the Hall plates 11, 12, 13, 14 (X-Y plane) and is located around the Hall plates 11, 12, 13, 14.
  • the coil 81 makes it possible to perform auto-calibration. By passing a known current through the coil 81 the latter will generate a magnetic field, the strength of which is known. This magnetic field can be measured by the magnetic field sensor 1. Because the size and direction of this generated magnetic field is known, the coil can thus be used to perform auto-calibration. Of course, several coils 81 can also be used for this pu ⁇ ose. The magnetic field strength that can be achieved with such a coil 81 on a chip is very low.
  • the coil 81 can also be used to demagnetise (degauss) or to magnetise or to set/reset the abovementioned flux concentrator 80 if necessary in order to compensate for the magnetisation of the flux concentrator.
  • demagnetise degauss
  • magnetise magnetise
  • set/reset the abovementioned flux concentrator 80 if necessary in order to compensate for the magnetisation of the flux concentrator.
  • a damping sinusoidal signal is applied to the coil for demagnetisation, it, of course, easily being possible for the electronics necessary for this to be integrated as well.
  • the coil 81 that is run around the flux concentrator 80 on the chip can serve for calibration of the sensor's sensitivity and to bring the flux concentrator into a desired magnetic state.
  • the flux concentrator 80 and the coil 81 can be used either in combination or independently.
  • various measures are mentioned for achieving an offset that is lower than the offset known in the state of the art.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)

Abstract

L'invention concerne un détecteur de champ magnétique (1) comportant au moins deux plaques à effet Hall (11, 12, 13, 14). Ledit détecteur (1) est conçu pour générer des courants de mesure dans diverses direction à l'intérieur des plaques à effet de Hall (11, 12, 13, 14) et pour mesurer la différence de potentiel au passage desdites plaques dans le sens du plan de la plaque, ce sens étant toujours perpendiculaire à celui du courant de mesure. La différence de potentiel mesurée rend compte du champ magnétique au travers de la plaque à effet de Hall (11, 12, 13, 14) dans une direction qui est sensiblement perpendiculaire à celle du courant de mesure et à la direction de la différence de potentiel mesurée. Le détecteur de champ magnétique (1) est capable de générer un courant de mesure selon au moins huit direction dans chaque plaque à effet de Hall(11, 12, 13, 14).
PCT/NL2004/000871 2003-12-19 2004-12-15 Detecteur de champ magnetique, support pour detecteur de champ magnetique et compas equipe d'un tel detecteur Ceased WO2005073744A1 (fr)

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NL1025089A NL1025089C2 (nl) 2003-12-19 2003-12-19 Magneetveldsensor, drager van een dergelijke magneetveldsensor en een kompas, voorzien van een dergelijke magneetveldsensor.
NL1025089 2003-12-19

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WO2005073744A1 true WO2005073744A1 (fr) 2005-08-11

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WO2009124969A1 (fr) * 2008-04-08 2009-10-15 Ecole Polytechnique Federale De Lausanne (Epfl) Capteur de champ magnétique mesurant une direction d'un champ magnétique dans un plan, et capteur de courant
EP2068163A3 (fr) * 2007-12-07 2010-10-20 Melexis NV Réseau de capteur à effet Hall
FR2947060A1 (fr) * 2009-06-18 2010-12-24 Socomec Sa Capteur de champ magnetique a effet hall
EP2006700A4 (fr) * 2006-04-13 2012-01-18 Asahi Kasei Emd Corp Capteur magnétique et procédé de fabrication de celui-ci
DE102011017096A1 (de) 2011-04-14 2012-10-18 Austriamicrosystems Ag Hall-Sensor-Halbleiterbauelement und Verfahren zum Betrieb des Hall-Sensor-Halbleiterbauelementes
DE102011102483A1 (de) * 2011-05-24 2012-11-29 Austriamicrosystems Ag Verfahren zum Betreiben einer Hallsensoranordnung und Hallsensoranordnung
US20130265039A1 (en) * 2012-02-10 2013-10-10 Memsic, Inc. Planar three-axis magnetometer
EP2116855A3 (fr) * 2008-04-17 2013-12-25 Adaptive Regelsysteme Gesellschaft mbH Dispositif de mesure de flux et procédé de mesure galvanique séparée de flux
GB2531257A (en) * 2014-10-13 2016-04-20 Skf Ab Compass sensor based angle encoder for a magnetic target ring
JP2016521845A (ja) * 2013-05-28 2016-07-25 江▲蘇▼多▲維▼科技有限公司Ｍｕｌｔｉｄｉｍｅｎｓｉｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． ３軸デジタルコンパス
WO2016160438A1 (fr) * 2015-03-27 2016-10-06 Allegro Microsystems, Llc Capteur de champ magnétique
US9575141B2 (en) 2011-10-10 2017-02-21 Ams Ag Hall sensor with hall sensor elements that respectively comprise element terminals and are interconnected in a circuit lattice
US9581661B2 (en) * 2013-01-15 2017-02-28 Infineon Technologies Ag XMR-sensor and method for manufacturing the XMR-sensor
CN107317576A (zh) * 2017-05-25 2017-11-03 南京邮电大学 一种用于霍尔传感器的八相旋转电流电路
DE102016114174A1 (de) * 2016-08-01 2018-02-01 Infineon Technologies Ag Hall-sensor-bauelemente und verfahren zum betreiben derselben
EP3203253A4 (fr) * 2014-09-30 2018-06-20 ABLIC Inc. Capteur à effet hall
DE102012204221B4 (de) 2011-03-17 2019-05-29 Infineon Technologies Ag Genauer und kosteneffizienter, linearer hall-sensor mit digitalem ausgang
WO2019198602A1 (fr) * 2018-04-12 2019-10-17 愛知製鋼株式会社 Système de détection de marqueur et procédé de mise en œuvre de système de détection de marqueur
WO2019198603A1 (fr) * 2018-04-12 2019-10-17 愛知製鋼株式会社 Système de mesure magnétique et procédé d'étalonnage de capteur magnétique
CN110487522A (zh) * 2019-07-18 2019-11-22 日立楼宇技术（广州）有限公司 动作可靠性测试设备、方法及装置
IT201800007246A1 (it) * 2018-07-17 2020-01-17 Sensore di hall, dispositivi e procedimento corrispondenti
US20220082640A1 (en) * 2020-09-11 2022-03-17 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method for determining a sensitivity of a hall sensor element, and hall sensor with at least one hall sensor element
US12140646B2 (en) 2023-02-06 2024-11-12 Allegro Microsystems, Llc Magnetic sensing having hall plate routing to reduce inductive coupling

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EP2557430A1 (fr) * 2006-04-13 2013-02-13 Asahi Kasei EMD Corporation Capteur magnétique et son procédé de fabrication
EP2741095A1 (fr) * 2006-04-13 2014-06-11 Asahi Kasei EMD Corporation Capteur magnétique et son procédé de fabrication
EP2006700A4 (fr) * 2006-04-13 2012-01-18 Asahi Kasei Emd Corp Capteur magnétique et procédé de fabrication de celui-ci
US8169215B2 (en) 2006-04-13 2012-05-01 Asahi Kasei Emd Corporation Magnetic sensor and method of manufacturing thereof
EP2960667A1 (fr) * 2006-04-13 2015-12-30 Asahi Kasei EMD Corporation Capteur magnétique et son procédé de fabrication
EP2068163A3 (fr) * 2007-12-07 2010-10-20 Melexis NV Réseau de capteur à effet Hall
WO2009124969A1 (fr) * 2008-04-08 2009-10-15 Ecole Polytechnique Federale De Lausanne (Epfl) Capteur de champ magnétique mesurant une direction d'un champ magnétique dans un plan, et capteur de courant
US8624587B2 (en) 2008-04-08 2014-01-07 Senis Ag Magnetic field sensor measuring a direction of a magnetic field in a plane and current sensor
EP2116855A3 (fr) * 2008-04-17 2013-12-25 Adaptive Regelsysteme Gesellschaft mbH Dispositif de mesure de flux et procédé de mesure galvanique séparée de flux
FR2947060A1 (fr) * 2009-06-18 2010-12-24 Socomec Sa Capteur de champ magnetique a effet hall
DE102012204221B4 (de) 2011-03-17 2019-05-29 Infineon Technologies Ag Genauer und kosteneffizienter, linearer hall-sensor mit digitalem ausgang
WO2012140074A1 (fr) 2011-04-14 2012-10-18 Ams Ag Composant semi-conducteur à capteur à effet hall et procédé permettant de faire fonctionner le composant semi-conducteur à effet hall
DE102011017096A1 (de) 2011-04-14 2012-10-18 Austriamicrosystems Ag Hall-Sensor-Halbleiterbauelement und Verfahren zum Betrieb des Hall-Sensor-Halbleiterbauelementes
US9349943B2 (en) 2011-04-14 2016-05-24 Ams Ag Hall sensor semiconductor component and method for operating the hall sensor semiconductor component
US9551765B2 (en) 2011-05-24 2017-01-24 Ams Ag Method for operating a hall sensor arrangement and hall sensor arrangement
DE102011102483A1 (de) * 2011-05-24 2012-11-29 Austriamicrosystems Ag Verfahren zum Betreiben einer Hallsensoranordnung und Hallsensoranordnung
US9575141B2 (en) 2011-10-10 2017-02-21 Ams Ag Hall sensor with hall sensor elements that respectively comprise element terminals and are interconnected in a circuit lattice
US9116198B2 (en) 2012-02-10 2015-08-25 Memsic, Inc. Planar three-axis magnetometer
US20130265039A1 (en) * 2012-02-10 2013-10-10 Memsic, Inc. Planar three-axis magnetometer
US9581661B2 (en) * 2013-01-15 2017-02-28 Infineon Technologies Ag XMR-sensor and method for manufacturing the XMR-sensor
JP2016521845A (ja) * 2013-05-28 2016-07-25 江▲蘇▼多▲維▼科技有限公司Ｍｕｌｔｉｄｉｍｅｎｓｉｏｎ Ｔｅｃｈｎｏｌｏｇｙ Ｃｏ．， Ｌｔｄ． ３軸デジタルコンパス
EP3006896A4 (fr) * 2013-05-28 2017-01-18 Multidimension Technology Co., Ltd. Boussole numérique à trois axes
EP3203253A4 (fr) * 2014-09-30 2018-06-20 ABLIC Inc. Capteur à effet hall
GB2531257A (en) * 2014-10-13 2016-04-20 Skf Ab Compass sensor based angle encoder for a magnetic target ring
US10234516B2 (en) 2015-03-27 2019-03-19 Allegro Microsystems, Llc Magnetic field sensor
WO2016160438A1 (fr) * 2015-03-27 2016-10-06 Allegro Microsystems, Llc Capteur de champ magnétique
US10120041B2 (en) 2015-03-27 2018-11-06 Allegro Microsystems, Llc Magnetic field sensor
DE102016114174B4 (de) * 2016-08-01 2019-10-10 Infineon Technologies Ag Hall-sensor-bauelemente und verfahren zum betreiben derselben
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US10578680B2 (en) 2016-08-01 2020-03-03 Infineon Technologies Ag Hall sensor devices and methods for operating the same
CN107317576A (zh) * 2017-05-25 2017-11-03 南京邮电大学 一种用于霍尔传感器的八相旋转电流电路
WO2019198603A1 (fr) * 2018-04-12 2019-10-17 愛知製鋼株式会社 Système de mesure magnétique et procédé d'étalonnage de capteur magnétique
WO2019198602A1 (fr) * 2018-04-12 2019-10-17 愛知製鋼株式会社 Système de détection de marqueur et procédé de mise en œuvre de système de détection de marqueur
US11143731B2 (en) 2018-04-12 2021-10-12 Aichi Steel Corporation Magnetic measurement system and method of calibrating magnetic sensor
US12038757B2 (en) 2018-04-12 2024-07-16 Aichi Steel Corporation Marker detection system and method of operating marker detection system
IT201800007246A1 (it) * 2018-07-17 2020-01-17 Sensore di hall, dispositivi e procedimento corrispondenti
US11119160B2 (en) 2018-07-17 2021-09-14 Stmicroelectronics S.R.L. Hall sensor, corresponding devices and method
US11619688B2 (en) 2018-07-17 2023-04-04 Stmicroelectronics S.R.L. Hall sensor, corresponding devices and method
CN110487522A (zh) * 2019-07-18 2019-11-22 日立楼宇技术（广州）有限公司 动作可靠性测试设备、方法及装置
CN110487522B (zh) * 2019-07-18 2021-10-01 日立楼宇技术（广州）有限公司 动作可靠性测试设备、方法及装置
US20220082640A1 (en) * 2020-09-11 2022-03-17 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method for determining a sensitivity of a hall sensor element, and hall sensor with at least one hall sensor element
US12025681B2 (en) * 2020-09-11 2024-07-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method for determining a sensitivity of a hall sensor element, and hall sensor with at least one hall sensor element
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