WO2005038077A2 - Modulare vorrichtung zur beschichtung von oberflächen - Google Patents

Modulare vorrichtung zur beschichtung von oberflächen Download PDF

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Publication number
WO2005038077A2
WO2005038077A2 PCT/EP2004/011669 EP2004011669W WO2005038077A2 WO 2005038077 A2 WO2005038077 A2 WO 2005038077A2 EP 2004011669 W EP2004011669 W EP 2004011669W WO 2005038077 A2 WO2005038077 A2 WO 2005038077A2
Authority
WO
WIPO (PCT)
Prior art keywords
receiving
cathodes
vacuum chamber
cathode
objects
Prior art date
Application number
PCT/EP2004/011669
Other languages
German (de)
English (en)
French (fr)
Other versions
WO2005038077A3 (de
Inventor
Tibor Cselle
Mojmir Jilek
Original Assignee
Platit Ag
Pivot A.S.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Platit Ag, Pivot A.S. filed Critical Platit Ag
Priority to EP04790508A priority Critical patent/EP1673488B1/de
Priority to DE502004010209T priority patent/DE502004010209D1/de
Priority to US10/575,854 priority patent/US20070137566A1/en
Priority to KR1020067008721A priority patent/KR101091594B1/ko
Publication of WO2005038077A2 publication Critical patent/WO2005038077A2/de
Publication of WO2005038077A3 publication Critical patent/WO2005038077A3/de
Priority to HK07103679.5A priority patent/HK1096435A1/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32431Constructional details of the reactor
    • H01J37/32532Electrodes
    • H01J37/32568Relative arrangement or disposition of electrodes; moving means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/32Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325Electric arc evaporation
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3464Sputtering using more than one target
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/35Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32Gas-filled discharge tubes
    • H01J37/32009Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32055Arc discharge
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67155Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/67207Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process

Definitions

  • Modular device for coating surfaces in particular for modular, dedicated coating
  • the present invention relates to a modular device for coating surfaces of objects (substrates) by physically applying material in a vacuum (PVD) using an arc or multiple arcs, including coating with several layers in different ways, which are described below modular, dedicated coating is called. Furthermore, the invention relates to a system with such a modular device.
  • PVD vacuum
  • the invention relates to a system with such a modular device.
  • WO-A-02/50865 proposes to design the target by means of a specific magnetic field arrangement in such a way that a directed material evaporation can take place. so certain effects can be achieved.
  • One or more, essentially cylindrical cathodes are arranged in the coating chamber.
  • the deposition of the material is controlled net and with the help of magnetic sources.
  • the magnetic sources are preferably arranged in the cathodes and the cathode is rotated with respect to the magnetic field source or the magnetic field source with respect to the cathode, so as to bring about a uniform removal of the material from the target. This material is then deposited on the substrates.
  • substrates are usually placed on a turntable and - with the turn of the plate - successively coated. It is known in the prior art to e.g. to be placed in the middle of the turntable so that several objects can be coated in one chamber.
  • variable coating chamber or a variable arrangement of coating agents which is also suitable for other objects to be coated and is therefore more variable than according to the prior art.
  • the invention achieves the object by means of an arrangement according to claim 1.
  • the measures of the invention initially have the consequence that a multitude of coating situations can be dealt with by the modular arrangement.
  • the arrangement serves for inclusion in a coating system, which is also the subject of the invention.
  • FIG. 1 shows a perspective illustration of a coating chamber in which the arrangement according to the present invention is implemented
  • Figure 2 is also a perspective view of the object of Figure 1;
  • Figure 3 shows a first configuration of the modular arrangement according to the present invention in a perspective view
  • Figure 4 shows a second configuration of the modular arrangement according to the present invention in a perspective view
  • Figure 5 shows the configuration of Figure 4 from above
  • FIG. 6 shows a third configuration of the modular arrangement according to the present invention in a perspective view
  • Figure 7 shows the configuration of Figure 6 from above
  • FIG. 8 shows a fourth configuration of the modular arrangement according to the present invention, shown from above;
  • FIG. 9 shows a fifth configuration of the modular arrangement according to the present invention, shown from above;
  • Figure 10 shows a configuration with horizontal cathodes (sixth configuration) in perspective;
  • FIG. 11 shows the configuration with horizontal cathodes according to FIG. 10 from the side
  • FIG. 12 shows the configuration with horizontal cathodes according to FIG. 10 from above;
  • FIG. 13 shows a configuration according to FIG. 1, but with a planar cathode (seventh configuration) in a perspective view;
  • Figure 14 shows the configuration of Figure 13 from the side
  • Figure 15 shows a cathode arrangement for the system for the invention.
  • FIG. 1 shows a coating system as a complete system 100 with the associated electronics 200.
  • the core of the system is the coating chamber, which - as can be seen in particular from FIG. 2 - has two or more door-like devices 32, 34 on the sides.
  • these devices can be accommodated in very different configurations, some of which are described in principle below.
  • FIG. 3 shows the full configuration for the modular arrangement according to the configuration described here. leadership example again.
  • An arrangement with 4 rotary cathodes 40, 42, 44, 46 is formed in the center of the chamber 100 with an access door 110.
  • two further cathodes 48, 50, 52 and 54 are accommodated on the sides of the door-like devices 32, 34 described.
  • a turntable-like substrate holder, on which a multiplicity of substrates are accommodated, is arranged around the centrally arranged cathodes.
  • all cathodes are made of the same material, but not necessarily. The highest deposition rate or the largest coating rate is then achieved in this configuration.
  • rotary cathodes are preferably operated in the manner proposed in the cited prior art, that is to say with a device for the directed formation of arcs.
  • the second configuration according to FIGS. 4 and 5 differs from the first described above, at first glance only in that, in addition to the four cathodes 40, 42, 44 and 46 - as usual - each of the two outdoor stations 32 and 34 only in the interior are each equipped with a cathode 48 and 52.
  • the outer cathodes 48 and 52 are used with a high deposition rate in the interior for special tasks, for example for ion etching or for deposition of alternative layers.
  • alternative layers can be diamond coatings or, for example, lubricating layers.
  • the outer cathodes can be operated simultaneously or at different times from the inner cathodes - or also to one another - depending on the specific coating task.
  • the other features of the second configuration correspond to the first.
  • the fourth configuration according to FIG. 8 differs from the first described above in that, in addition to the 4 cathodes 48, 50, 52 and 54, only two cathodes are provided in the outer area on the inner station 30, namely the cathodes 40 and 46 which are arranged remote from the outer stations In this configuration, the influencing of the plasmas between the cathodes of the outdoor stations 32 and 34 and those of the indoor station 30 is excluded.
  • the fifth configuration according to FIG. 9 differs from the first described above in that only two cathodes 48 and 52 are provided in the outer region and only two cathodes are provided on the inner station 30, namely the cathodes 40 and 46 which are arranged remote from the outer stations.
  • the configuration according to FIGS. 10 to 12 is produced and operated particularly well with the arrangement according to the invention. that can.
  • the two outdoor stations 32 and 34 are each equipped with two horizontally arranged rotary cathodes.
  • horizontal active surfaces are formed, such as are useful for band saws and other flat objects.
  • a total of four surfaces are coated with the two cathodes, as shown in FIG. 10.
  • the particular advantage of this configuration is that large diameters can be loaded and that a homogeneous coating on the active surface, eg the free surface of band saws or the front surface of mold, is possible without harmful differences in layer thickness.
  • the seventh configuration according to FIGS. 13 and 14 differs from the first described above in that in addition to the four cathodes 40, 42, 44 and 46 - as usual - only one outdoor station 32 is equipped with two rotating cathodes 48 and 50 in the interior ,
  • the other outdoor station 34 is equipped with one or more conventional, planar cathodes.
  • FIG. 1 A cathode arrangement is shown in FIG. 1
PCT/EP2004/011669 2003-10-17 2004-10-15 Modulare vorrichtung zur beschichtung von oberflächen WO2005038077A2 (de)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP04790508A EP1673488B1 (de) 2003-10-17 2004-10-15 Modulare vorrichtung zur beschichtung von oberflächen
DE502004010209T DE502004010209D1 (de) 2003-10-17 2004-10-15 Modulare vorrichtung zur beschichtung von oberflächen
US10/575,854 US20070137566A1 (en) 2003-10-17 2004-10-15 Modular device for coating surfaces
KR1020067008721A KR101091594B1 (ko) 2003-10-17 2004-10-15 표면코팅을 위한 모듈형 장치
HK07103679.5A HK1096435A1 (en) 2003-10-17 2007-04-10 Modular device for coating surfaces

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP03405753A EP1524329A1 (de) 2003-10-17 2003-10-17 Modulare Vorrichtung zur Beschichtung von Oberflächen
EP03405753.9 2003-10-17

Publications (2)

Publication Number Publication Date
WO2005038077A2 true WO2005038077A2 (de) 2005-04-28
WO2005038077A3 WO2005038077A3 (de) 2006-03-02

Family

ID=34354641

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2004/011669 WO2005038077A2 (de) 2003-10-17 2004-10-15 Modulare vorrichtung zur beschichtung von oberflächen

Country Status (7)

Country Link
US (1) US20070137566A1 (pt-PT)
EP (2) EP1524329A1 (pt-PT)
KR (1) KR101091594B1 (pt-PT)
CN (1) CN100540726C (pt-PT)
DE (1) DE502004010209D1 (pt-PT)
HK (1) HK1096435A1 (pt-PT)
WO (1) WO2005038077A2 (pt-PT)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2163661A1 (de) 2008-09-05 2010-03-17 Fette GmbH Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100977613B1 (ko) * 2008-03-26 2010-08-23 한전케이피에스 주식회사 고온용 부품의 윤활코팅장치
CZ304905B6 (cs) * 2009-11-23 2015-01-14 Shm, S.R.O. Způsob vytváření PVD vrstev s pomocí rotační cylindrické katody a zařízení k provádění tohoto způsobu
EP2521159A1 (en) 2011-05-06 2012-11-07 Pivot a.s. Glow discharge apparatus and method with lateral rotating arc cathodes
CH705029A1 (de) 2011-05-27 2012-11-30 Bloesch W Ag Beschichtetes Holzbearbeitungswerkzeug.
US9761424B1 (en) 2011-09-07 2017-09-12 Nano-Product Engineering, LLC Filtered cathodic arc method, apparatus and applications thereof
US10304665B2 (en) 2011-09-07 2019-05-28 Nano-Product Engineering, LLC Reactors for plasma-assisted processes and associated methods
DE102011113563A1 (de) * 2011-09-19 2013-03-21 Oerlikon Trading Ag, Trübbach Karussellschlitten für Vakuumbehandlungsanlage
CN106086816A (zh) * 2016-07-06 2016-11-09 广东振华科技股份有限公司 一种cvd镀膜机
CN110777347A (zh) * 2019-10-28 2020-02-11 浙江锋源氢能科技有限公司 Pvd样品转架和pvd设备
CN116438326B (zh) * 2020-11-06 2024-04-12 饭塚贵嗣 成膜装置、成膜单元和成膜方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990002216A1 (en) * 1988-08-25 1990-03-08 Vac-Tec Systems, Inc. Physical vapor deposition dual coating apparatus and process
DE4443740A1 (de) * 1994-12-08 1996-06-13 Bloesch W Ag Vorrichtung zum Beschichten von Substraten
US5750207A (en) * 1995-02-17 1998-05-12 Si Diamond Technology, Inc. System and method for depositing coating of modulated composition
WO2002050864A1 (en) * 2000-12-18 2002-06-27 Shm, S.R.O. Apparatus for evaporation of materials for coating of objects
US20020182448A1 (en) * 2000-02-09 2002-12-05 Hauzer Techno Coating Europe Bv Method for the manufacture of an article and an article

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0306612B2 (de) * 1987-08-26 1996-02-28 Balzers Aktiengesellschaft Verfahren zur Aufbringung von Schichten auf Substraten
DE3829260A1 (de) * 1988-08-29 1990-03-01 Multi Arc Gmbh Plasmabeschichtungskammer mit entfernbarem schutzschirm

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1990002216A1 (en) * 1988-08-25 1990-03-08 Vac-Tec Systems, Inc. Physical vapor deposition dual coating apparatus and process
DE4443740A1 (de) * 1994-12-08 1996-06-13 Bloesch W Ag Vorrichtung zum Beschichten von Substraten
US5750207A (en) * 1995-02-17 1998-05-12 Si Diamond Technology, Inc. System and method for depositing coating of modulated composition
US20020182448A1 (en) * 2000-02-09 2002-12-05 Hauzer Techno Coating Europe Bv Method for the manufacture of an article and an article
WO2002050864A1 (en) * 2000-12-18 2002-06-27 Shm, S.R.O. Apparatus for evaporation of materials for coating of objects

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1673488A2 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2163661A1 (de) 2008-09-05 2010-03-17 Fette GmbH Wälzfräswerkzeug mit einer Beschichtung und Verfahren zur Neubeschichtung eines Wälzfräswerkzeuges
US8349474B2 (en) 2008-09-05 2013-01-08 Fette Gmbh Hob cutter with a coating and method for coating hob cutter

Also Published As

Publication number Publication date
HK1096435A1 (en) 2007-06-01
DE502004010209D1 (de) 2009-11-19
US20070137566A1 (en) 2007-06-21
EP1524329A1 (de) 2005-04-20
KR101091594B1 (ko) 2011-12-13
EP1673488A2 (de) 2006-06-28
CN100540726C (zh) 2009-09-16
KR20070007251A (ko) 2007-01-15
CN1867692A (zh) 2006-11-22
WO2005038077A3 (de) 2006-03-02
EP1673488B1 (de) 2009-10-07

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