WO2005024498A1 - 空間光変調素子及び空間光変調方法 - Google Patents
空間光変調素子及び空間光変調方法 Download PDFInfo
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- WO2005024498A1 WO2005024498A1 PCT/JP2004/013182 JP2004013182W WO2005024498A1 WO 2005024498 A1 WO2005024498 A1 WO 2005024498A1 JP 2004013182 W JP2004013182 W JP 2004013182W WO 2005024498 A1 WO2005024498 A1 WO 2005024498A1
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- refractive index
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/0126—Opto-optical modulation, i.e. control of one light beam by another light beam, not otherwise provided for in this subclass
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2202/00—Materials and properties
- G02F2202/13—Materials and properties photorefractive
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F2203/00—Function characteristic
- G02F2203/12—Function characteristic spatial light modulator
Definitions
- the present invention relates to a spatial light modulation element and a spatial light modulation method used for a display device, an optical information processing device, and the like. More specifically, by using a low-refractive index layer instead of a conventional metal layer to reflect the modulated light, the modulated light is confined or reflected in a guided mode, so that the service life is long and the modulation
- the present invention relates to a spatial light modulation element and a spatial light modulation method that have high response sensitivity and enable high-speed light modulation. Background art
- the device has a structure capable of changing the confinement condition of the modulated light by ONZOFF of the modulation driving light and performing high-speed light modulation.
- Patent Document JP 2002-258332 A DISCLOSURE OF THE INVENTION
- the metal layer may be damaged, and the light modulation characteristics of the modulated light may be degraded. There is a problem that the life of the element is short.
- the present invention has been made in view of the above circumstances, and an object of the present invention is to provide a long-life spatial light modulator that does not degrade light modulation characteristics even when a very short pulse high-power laser light is used as modulation drive light.
- the present invention provides a method for manufacturing a semiconductor device, comprising the steps of: providing a refractive index lower than the refractive index of the dielectric between a dielectric and an optical functional material layer made of an optical functional material whose refractive index changes by light irradiation; Provided is a spatial light modulator characterized by having a low refractive index layer made of a transparent material having a refractive index interposed therebetween.
- the present invention provides a method for manufacturing a semiconductor device, comprising: a transparent material having a refractive index lower than that of the dielectric, between the dielectric and an optical functional material layer made of an optical functional material whose refractive index changes by light irradiation.
- the low refractive index layer is interposed, and the reflection of the modulated light incident through the dielectric at the interface between the dielectric and the low refractive index layer is controlled by the modulation driving light.
- the low refractive index layer is preferably made of an organic material.
- the low refractive index layer is preferably made of a fluorine-containing resin.
- This fluorine-containing resin is preferably made of an amorphous fluorine-containing polymer having no C—H bond. Good.
- the present invention provides a method for manufacturing a semiconductor device, comprising: a transparent material having a refractive index lower than that of the dielectric, between the dielectric and an optical functional material layer made of an optical functional material whose refractive index changes by light irradiation.
- a spatial light modulation element having a low refractive index layer interposed therebetween is used to control the reflection of the modulated light incident through the dielectric at the interface between the dielectric and the low refractive index layer by the modulation driving light.
- a spatial light modulation method is provided.
- the control of the reflection of the modulated light by the modulation driving light is a combination of the reflection of the modulated light and the confinement of the modulated light by the waveguide mode.
- the spatial light modulator of the present invention includes a transparent low refractive index layer instead of a conventional metal layer, reflects modulated light at the interface between the dielectric and the low refractive index layer, and modulates and drives the optical functional material. By irradiating the light as needed, the modulated light is modulated and controlled by the ONZ FF of the modulation drive light. As a result, damage to the device due to the modulated driving light and the modulated light irradiated on the optical functional material layer is reduced, and the device can operate stably for a long time even with a high-power laser beam such as a femtosecond laser beam. In addition, a device having excellent durability and a long life can be obtained.
- the modulation driving light O NZ ⁇ FF changes the reflectance of the modulated light with higher sensitivity, resulting in extremely high modulation response sensitivity. Therefore, modulation at a higher speed becomes possible, and a spatial light modulator having a response speed on the order of picoseconds can be realized.
- the structure with a transparent low refractive index layer instead of the metal layer increases the incident angle and the outgoing angle of the modulated light, causing the modulated drive light to leak to the emission side and be detected. The generation of noise is reduced.
- FIG. 1 is a side view showing a first embodiment of the spatial light modulator of the present invention.
- FIG. 2 is a side view showing a second embodiment of the spatial light modulator of the present invention.
- FIG. 3 is a configuration diagram of a measurement system used for measurement in the experiment of the example.
- Figure 4 Graph of the waveguide mode operating characteristics calculated for the Ag-type device.
- FIG. 5 is a graph of the waveguide mode operating characteristics calculated for the device of the present invention.
- Figure 6 Enlarged view of the main part of Figure 5.
- FIG. 7 is a graph showing the relationship between the extinction coefficient k and the reflectance of each of the Ag-type element and the element of the present invention.
- FIG. 8 is a graph showing the relationship between the extinction coefficient k and the reflectance when the thickness of the low refractive index layer is changed between 100 nm and 800 nm in the device of the present invention.
- FIG. 9 is a graph showing the relationship between the incident angle S and the reflectance when the real part n of the low refractive index layer is changed in the device of the present invention.
- FIG. 10 Graph showing the relationship between the incident angle 0 and the reflectance when the value of the extinction coefficient k is changed in the device of the present invention.
- FIG. 11 A graph showing the relationship between the extinction coefficient k and the reflectance when the real part n of the low refractive index layer is changed in the inventive element.
- Fig. 12 Graph showing the transient absorption spectrum when only the PFVI layer having a thickness of 220 nm is excited by a femtosecond laser beam having a wavelength of 400 nm.
- Fig. 13 Only the PFVI layer with a thickness of 220 nm is irradiated with a femtosecond laser beam with a wavelength of 400 nm. It is a graph which shows the time-dependent change of the transient absorption at 630 nm at the time of excitation.
- Figure 16 Transient reflection at different angles of incidence immediately after excitation of a laminate of a 220 nm thick PFVI layer and a low-refractive index layer with a 400 nm wavelength femtosecond laser beam and transients at only the PFVI layer. It is a graph which shows a passing absorption spectrum.
- FIG. 17 Transient reflection at different angles of incidence and PFVI layer only after a 400 nm-thick PFVI layer and low-refractive index layer were excited by a single femtosecond laser beam at a wavelength of 400 nm.
- 4 is a graph showing a transient absorption spectrum at the same time.
- FIG. 1 is a view showing a first embodiment of the spatial light modulator according to the present invention.
- the spatial light modulation element 1 forms a prism 2 between a prism 2 (dielectric) made of a dielectric and an optical functional material layer 3 made of an optical functional material whose refractive index changes by light irradiation.
- a low-refractive-index layer 4 made of a transparent material having a refractive index n2 lower than the refractive index n1 of the dielectric is interposed, and is incident through the prism 2 at the interface between the prism 2 and the low-refractive-index layer 4.
- the reflection of the modulated light 5 is controlled by the modulation driving light 6.
- the dielectric on which the modulated light 5 is incident is not limited to the prism 2 but may be another shape such as a plate shape, a thick plate shape, and a block shape.
- the use of the prism 2 having a triangular cross section means that a low-refractive-index layer 4 and an optically functional material layer 3 are laminated on the first surface, and the modulated light 5 is incident from the second surface of the prism 2,
- the structure for emitting light reflected from the third surface 2 is particularly preferable because it can be easily constructed.
- This prism 2 is formed of a dielectric material that is transparent to the wavelength of the modulated light 5.
- a material made of a material having a refractive index with respect to the wavelength of the modulated light in the range of 1.4 to 3 is preferable.
- Specific examples include BK7, quartz glass, high-refractive-index glass, and polycarbonate.
- the difference (n 1 ⁇ n 2) between the refractive index of the prism 2 and the refractive index of the low refractive index layer 4 is preferably in the range of 0.05 to 0.9.
- the material constituting the low-refractive-index layer 4 has a refractive index n 2 of the material smaller than the refractive index n 1 of the dielectric material constituting the prism 2 (ie, has a relationship of 112 ⁇ n 1).
- Any material may be used, but an inorganic or organic material having good light resistance to the wavelength of the modulated light is preferable. Examples of such an inorganic material include a fluoride crystal, a fluorine-added quartz glass, and the like. Examples of the organic material include a fluorine-containing resin.
- the low refractive index layer 4 made of an inorganic material can be formed by a sputtering method, a CVD method, an evaporation method, or the like.
- the low refractive index layer 4 made of an organic material can be formed by spin coating a resin solution.
- an organic material, particularly a fluorine-containing resin, for the low refractive index layer 4 used in the spatial light modulator 1 of the present invention is preferable to use an organic material, particularly a fluorine-containing resin, for the low refractive index layer 4 used in the spatial light modulator 1 of the present invention.
- the thickness of the low refractive index layer 4 is in the range of 100 to: L000 nm, preferably 200 to 100 nm, more preferably 300 to 800 nm. If the thickness of the low refractive index layer 4 is 100 to 100 nm, the modulated light 5 can be modulated well, sufficient durability can be obtained, and long-life spatial light modulation can be obtained. Element 1 can be obtained.
- the low refractive index layer 4 is preferably made of a fluorine-containing resin, and the fluorine-containing resin is made of a non-crystalline fluorine-containing polymer having no C-H bond.
- the fluoropolymer has C-F bonds (ie, carbon-fluorine bonds) instead of C-H bonds.
- fluoropolymers include tetrafluoroethylene resin, perfluoro (ethylene-propylene) resin, perfluoroalkoxy resin, vinylidene fluoride resin, ethylene-tetrafluoroethylene resin, and Polyethylene resins are widely known.
- fluorine-containing resins have crystallinity, scattering of light occurs, transparency is deteriorated, and when the modulation drive light 6 is irradiated, melting or the like occurs, and durability may be deteriorated.
- non-crystalline fluoropolymers are excellent in transparency because they do not scatter light due to crystals.
- the fluorinated polymer is not particularly limited as long as it is a non-crystalline fluorinated polymer having substantially no C—H bond, but a fluorinated polymer having a ring structure in the main chain is preferable.
- the fluorine-containing polymer having a ring structure in the main chain is preferably a fluorine-containing polymer having a fluorine-containing aliphatic ring structure, a fluorine-containing imide ring structure, a fluorine-containing triazine ring structure or a fluorine-containing aromatic ring structure.
- the fluorinated polymers having a fluorinated aliphatic ring structure those having a fluorinated aliphatic ether ring structure are more preferred.
- Examples of the polymer having a fluorinated aliphatic ring structure include a polymer obtained by polymerizing a monomer having a fluorinated ring structure, and a cyclopolymerization of a fluorinated monomer having at least two polymerizable double bonds.
- the polymer having a fluorinated aliphatic ring structure in the main chain obtained by the above is suitable.
- a polymer having a fluorinated aliphatic ring structure in the main chain obtained by polymerizing a monomer having a fluorinated aliphatic ring structure is known from JP-B-63-18964 and the like. That is, a monomer having a fluorinated aliphatic ring structure such as perfluoro (2,2-dimethyl-1,3-dioxole) is homopolymerized, and this monomer is converted into tetrafluoroethylene, chlorotrifluoro. By copolymerizing with a radical polymerizable monomer such as ethylene or perfluoro (methyl vinyl ether), a polymer having a fluorinated aliphatic ring structure in the main chain can be obtained.
- a radical polymerizable monomer such as ethylene or perfluoro (methyl vinyl ether
- a polymer having a fluorinated aliphatic ring structure in the main chain obtained by cyclopolymerization of a fluorinated monomer having at least two polymerizable double bonds is disclosed in JP-A-63-23811.
- No. 1 and Japanese Patent Application Laid-Open No. Sho 63-3-238115 are known. That is, by subjecting a monomer such as perfluoro (arylvinyl ether) to perfluoro (butenyl vinyl ether) to cyclopolymerization, or by subjecting such a monomer to tetrafluoroethylene, black trifluoroethylene, or perfluoroethylene.
- a radical polymerizable monomer such as fluoro (methyl vinyl ether)
- a monomer having a fluorinated aliphatic ring structure such as perfluoro (2,2-dimethyl-1,3, dioxole) and at least two monomers such as perfluoro (aryl bier ether) and perfluoro (butenyl vinyl ether).
- a polymer having a fluorinated aliphatic ring structure in the main chain can also be obtained by copolymerizing a fluorinated monomer having two polymerizable double bonds.
- Specific examples of the polymer having a fluorinated aliphatic ring structure include the following (I) to (I) V) Those having a repeating unit selected from the formula are exemplified.
- the fluorine atom in these polymers having a fluorine-containing aliphatic ring structure may be partially substituted with a chlorine atom.
- a polymer having a fluorinated aliphatic ring structure a polymer having a ring structure in the main chain is suitable, but a polymer containing a polymer unit having a ring structure in an amount of 20 mol% or more, preferably 40 mol% or more is transparent. It is preferable in terms of properties and mechanical properties.
- the material of the optical functional material layer 3 can be selected from the materials conventionally known as substances whose refractive index changes by light irradiation in the field of spatial light modulators and the like.
- a substance include a material obtained by doping methyl orange / methyl red in a polymer (polyvinyl alcohol) described in JP-A-5-273503, a liquid crystal, a photorefractive crystal (barium titanate, Bismuth silicate, etc.), a purple film, a photochromic material, or a compound represented by the following formulas (1) and (6) described in JP-A-2000-292758.
- DYE + represents a valent cyanine dye cation
- n represents an integer of 1 or more
- R 5 and R 6 each independently represent a substituent
- R 7 and R 8 represent Each independently represents an alkyl group, an alkenyl group, an alkynyl group, an aralkyl group, an aryl group or a heterocyclic group.
- R 5 and R 6 R 5 and R 7 R 6 and R 8 or R 7 and R 8 may be linked to each other to form a ring
- r and s each independently represent an integer of 0 to 4 When r and s are 2 or more, a plurality of r and s may be the same or different from each other.
- a 1 , A 2 , B 1 and B 2 represent a substituent
- L 1 , L 2 L 3 , L 4 and L 5 represent a methine group
- X 2 represents — 0 — NR — C (CN) 2 (where R represents a substituent)
- m and n are 0 Represents an integer of 2.
- Mk + represents an onium ion. k represents the number of charges.
- a 1 , A 2 , ⁇ 1 and ⁇ 2 represent a substituent
- L 1 , L 2 , L 3 , L 4 and L 5 represent a methine group
- X 2 represents — O, — NR, -C (CN) 2 (where R represents a substituent)
- m and n represent an integer of 0 to 2.
- Y 1 and E each represent an atom or a group of atoms necessary to form a carbocyclic or heterocyclic ring
- Z 1 and G each represent an atom or a group of atoms necessary to form a carbocyclic or heterocyclic ring.
- X and y each independently represent 0 or 1.
- Mk + represents an onium ion. k represents the number of charges.
- Z 1 and Z 2 each represent a group of atoms necessary to form a 5- or 6-membered nitrogen-containing heterocyclic ring;
- R 3 Q and R 31 each independently represent an alkyl group;
- L 3 , L 4 , L 5 , L 6 and L 7 represent a methine group,
- nl and n 2 each represent an integer of 0 to 2
- p and q each independently represent an integer of 0 to 2.
- M represents a charge-balancing counterion.
- n and n each independently represent an integer of 0 to 2
- L 1 and L 2 each independently represent a divalent linking group.
- M represents a metal atom
- X represents an oxygen atom
- a sulfur atom or NR 2 1
- R 2 1 is hydrogen atom, an alkyl group, an Ariru group, Ashiru group, an alkylsulfonyl group, or is ⁇ reel sulfonyl group
- Z 1 1 has completed a nitrogen-containing heterocyclic 5- or 6-membered
- Z 12 represents an atomic group necessary for completing an aromatic ring or a heteroaromatic ring.
- the compounds of the formulas (1) to (6) are desirably used in combination with a high molecular compound in order to easily maintain an amorphous state.
- high molecular compounds include natural high molecular substances such as gelatin, dextran, rosin, and rubber; nitrocellulose, cellulose acetate; cellulose derivatives such as cellulose acetate butyrate; polyethylene, polystyrene, and polystyrene.
- Hydrocarbon resins such as propylene and polyisobutylene, tetrafluoroethylene resins, perfluoro (ethylene-propylene) resins, fluorinated aliphatic ring structures, fluorinated imide ring structures, fluorinated triazine ring structures or fluorinated aromatic rings
- Vinyl-based resins such as fluoropolymers having a structure, polyvinyl chloride, polyvinylidene chloride, polyvinyl chloride-polyvinyl acetate copolymer, and acrylyl resins such as polyester, polyacrylamide, polymethyl acrylate, and polymethyl methacrylate
- synthetic polymer materials such as the initial polymer of a thermosetting resin such as e le formaldehyde resin - polyester, polyurethane, polyvinyl alcohol, chlorinated polyolefin, epoxy resins, butyral resins, rubber derivatives, phenol.
- optical functional material layer 3 Another material of the optical functional material layer 3 that can be suitably used in the present invention is represented by the following formula (7) described in Japanese Patent Application Laid-Open No. 2002-32,849. And the compounds represented.
- X represents a thiophenyl group, a furyl group, a pyriophenyl group, a terthiophenyl group, a pyrenyl group, a pyrenyl group, a perylenyl group, or a vinyl group bonded at the 4- or 2-position to the nitrogen atom of the bividinium group.
- R 2 each independently represent an alkyl group, a poly (tetramethylene group), a hydroxyalkyl group, an alkenyl group, an alkynyl group, an aralkyl group, an aryl group or a heterocyclic group; Chloride, bromide, bromide, aromatic molecule having anionic substituent, trifluoromethyl group, or tetraphenylboronic acid having at least one other electron-withdrawing substituent.
- the compound of the formula (7) is added to the polymer compound in a dispersed state, or used in a state where it is included in a part of a main chain or a side chain of the polymer compound.
- the polymer compound in which the compound of the formula (7) is dispersed or contained in a part or a side chain of the main chain can be easily formed into a film by a solution such as spin coating.
- the compound represented by the formula (7) has excellent light resistance to one femtosecond laser beam, which is suitable as the modulation driving light 6, and is used to form the optical functional material layer 3 of the spatial light modulator 1 using a femtosecond laser. It is particularly preferable as the optical functional material used in the present invention because the durability is enhanced and the spatial light modulator 1 having a long life can be constructed.
- the optical functional material may be any substance whose refractive index changes when irradiated with light.
- the wavelength of the light to be irradiated is not particularly limited, and can be widely selected from visible light to near-infrared light.
- a material that changes the refractive index by absorbing light having the wavelength of the characteristic used for irradiation may be selected as the optical functional material.
- the thickness of the optical functional material layer 3 is 100 to 100 nm.
- the range is 150 to 100 nm, and more preferably, the range is 250 to 800 nm.
- the modulated light 5 can be favorably modulated, sufficient durability can be obtained, and the long-life spatial light modulation element 1 can be obtained. it can.
- a prism 2 having a triangular cross section as shown in FIG. 1 and a low refractive index layer 4 and an optical functional material layer 3 laminated on the first surface is used.
- the modulated light 5 is incident from the second surface of the light source.
- the modulated light 5 is reflected at the interface between the prism 2 and the low refractive index layer 4 when the incident angle 0 is within a predetermined range, and is emitted from the third surface of the prism.
- the range of the incident angle 0 is in a range of 40 degrees to 85 degrees, and particularly when the modulation driving light 6 is irradiated on the optical functional material layer 3, a guided mode is generated and the modulated light 5 is confined. It is preferable to match the angle.
- the wavelength of the modulated light 5 incident on the prism 2 is not particularly limited.
- the extinction coefficient k of the optical functional material layer 3 increases, and the extinction coefficient k increases. Accordingly, the reflectance of the modulated light 5 changes sharply, and the modulated light 5 emitted from the third surface of the prism 2 is modulated by ON / OFF of the modulation drive light 6.
- the modulated driving light 6 is applied to the optical functional material layer 3 to generate a waveguide mode and the modulated light 5 is incident at an angle at which the modulated light 5 is confined, the modulation driving light 6 is not irradiated.
- the reflectance of the modulated light 5 does not change, and almost all incident light is reflected at the interface between the prism 2 and the low refractive index layer 4 and exits from the third surface of the prism 2.
- the modulation driving light 6 is irradiated to the optical functional material layer 3 (when ON)
- the extinction coefficient k of the optical functional material layer 3 increases, and as the extinction coefficient k increases, the modulated The reflectivity of the light 5 drops sharply, and the modulated light 5 emitted from the third surface of the prism 2 suddenly weakens or substantially disappears.
- the sharp drop in the reflectance of the modulated light 5 is caused by the standing wave as a guided mode from the interface between the prism 2 and the low refractive index layer 4 to the low refractive index layer 4 and the optical functional material layer 3. This is because the reflection is not seen as a result. Therefore, the optical switching or intensity modulation of the modulated light 5 is possible by the ON / OFF of the modulation drive light 6.
- the change in reflectance caused by the ON / OFF switching of the modulation drive light 6 is 1 picosecond or less when it is ON, and several to several hundred picoseconds or less when it is OFF. Becomes possible.
- the spatial light modulator 1 includes a transparent low refractive index layer 4 in place of the conventional metal layer, reflects the modulated light 5 at the interface between the prism 2 and the low refractive index layer 4, and forms the optical functional material 3
- the modulated drive light 6 is irradiated as necessary to modulate the modulated light 5 with the ONZO FF of the modulated drive light 6, so that the modulated drive light 6 applied to the optical functional material layer 3 is modulated.
- the modulated light 5 reduces damage to the device, and ensures stable operation for a long period of time even with the use of high-power laser light such as femtosecond laser light, and provides a device with excellent durability and long life. Can be.
- the transparent low refractive index layer 4 is provided in place of the metal layer, so that the ON / OFF of the modulation driving light 6 changes the reflectivity of the modulated light 5 with higher sensitivity, thereby increasing the modulation response sensitivity. It becomes extremely high, and modulation at a higher speed becomes possible, and a spatial light modulator having a response speed on the order of picoseconds can be realized.
- the incident angle and the outgoing angle of the modulated light 5 are increased, and the modulated driving light 6 leaks to the emission side and is detected. The generation of noise due to the noise is reduced.
- FIG. 2 is a view showing a second embodiment of the spatial light modulator of the present invention.
- the spatial light modulator 7 includes substantially the same components as the spatial light modulator 1 according to the first embodiment shown in FIG. 1, and the same components are denoted by the same reference numerals.
- the difference between the spatial light modulator 7 and the spatial light modulator 1 according to the first embodiment is that the spatial light modulator 7 has the same refractive index (nl) as the prism 2.
- a low-refractive-index layer 4 and an optically functional material layer 3 are laminated on one side of the slide glass 8, and a prism 2 is fixed to the other side of the slide glass 8.
- the point is that the modulated light 5 incident thereon is reflected at the interface between the slide glass 8 and the low refractive index layer 4.
- the prism 2 and the slide glass 8 be fixed with a matching liquid having the same refractive index as that of the material and a transparent resin adhesive.
- the spatial light modulator 7 is capable of high-speed modulation of the modulated light 5 by ON / OFF of the modulation drive light 6.
- the same effects as those of the spatial light modulator 1 according to the first embodiment can be obtained.
- the spatial light modulator 1 has the low refractive index layer 4 and the optical functional material layer 3 laminated on one surface of the slide glass 8, the low refractive index layer 4 and the optical function layer are formed by spin coating or the like.
- the spatial light modulator 1 can be easily formed, and the spatial light modulator 1 can be easily manufactured, and the manufacturing cost can be reduced.
- the spatial light modulator can be formed by using a diffraction grating instead of a prism.
- a 100 nm optical functional material layer composed of PFVI represented by the following formula (8) is formed by spin coating, and a glass prism having a triangular cross section is placed on the other surface of the slide glass.
- a conventional spatial light modulator having a silver thin film hereinafter referred to as an Ag-type device) was fabricated.
- a thin film of a fluorine-containing resin having a thickness of 400 nm was formed by a spin coating method.
- This polymer is a non-crystalline fluorine-containing polymer having no C—H bond.
- a 600 nm-thick optically functional material layer made of PFVI represented by the formula (8) is formed by a spin coating method.
- FIG. 3 is a configuration diagram showing a measurement system used for measuring the respective modulation operation characteristics of the Ag-type element manufactured as described above and the element of the present invention.
- the Ag-type element and the element of the present invention are fixed to the rotating stage 11.
- the rotation stage 11 can appropriately adjust the incident angle S of the element 7 by changing the angle of the element 7 with respect to the incident direction of the modulated light 5.
- the modulated light 5 and the modulation driving light 6 are the laser light emitted from the femtosecond laser light source 12. Light is split and used. The laser light emitted from the femtosecond laser light source 12 is converted into a second harmonic having a half wavelength by the BBO crystal 14, and the second harmonic is split into two by a half mirror 15, and The transmitted light is focused on the D 20 / H 2 ⁇ cell 16 to generate femtosecond white light, and this light is guided to the variable delay line 17 so as to obtain a necessary time lag. The light emitted from the variable delay line 17 is split into two by the half mirror 118, and the transmitted light of the half mirror 118 is incident on the prism of the element 7 attached to the rotary stage.
- the reflected light (second harmonic) of the first half mirror 15 irradiates the optically functional material layer of the element 7 to be modulated driving light 6.
- the modulated light emitted from the element 7 enters the photodetector 21 through the optical fiber 19.
- the reflected light from the second half mirror 18 is incident on the photodetector 21 through the optical fiber 20 as reference light.
- Figures 4 to 11 show the results of the study using the transfer matrix method.
- FIG. 4 is a graph of the waveguide mode operation characteristics calculated for the Ag type device.
- the modulated light 5 is a green (543 nm) He—Ne laser beam, and the thickness of the optical functional material layer is 600 nm.
- the curve (c) shows the optical functional material layer.
- FIG. 5 is a graph of the waveguide mode operation characteristics calculated for the device of the present invention
- FIG. 6 is an enlarged view of a main part of FIG.
- the wavelength of the modulated light 5 is 600 nm.
- the change in the refractive index of the optically functional material layer is adjusted by appropriately adjusting the irradiation intensity of the modulation drive light 6 irradiating the optically functional material layer, and the extinction coefficient k is defined as 0.0001 to 0.002. It is adjusted to be a value, and the reflectance for the incident angle e is calculated.
- the curve (a) shows the change in reflectance when the extinction coefficient k is 0.0001
- the curve (b) shows the change in reflectance when the extinction coefficient k is 0.0002.
- (C) shows the change in reflectance when the extinction coefficient k is 0.0005
- (d) shows the change in reflectance when the extinction coefficient k is 0.001
- (e) shows the change in reflectance. It shows the change in reflectance when the extinction coefficient k is 0.002.
- a characteristic is seen in which the reflectance sharply decreases due to a slight increase in the extinction coefficient k.
- the reflectance increases with an increase in the extinction coefficient k, and the element of the present invention is different from the Ag-type element in the change in the region where the extinction coefficient k is small. It shows the opposite response.
- FIG. 7 is a graph showing the relationship between the extinction coefficient k and the reflectance of each of the Ag-type element (one bit) and the element of the present invention (111).
- the reflectivity of the device of the present invention changes more sensitively as the extinction coefficient k of the optically functional material layer increases as compared with the Ag-type device.
- the extinction coefficient k increases, there is a region in which the reflectance suddenly decreases in the initial stage, and a region in which the reflectance gradually increases thereafter.
- phthalocyanine dyes were actually dispersed in polymers at various concentrations to form thin films, and the reflectance was measured at wavelengths from the visible to the near infrared.
- the extinction coefficient k was 0.00 when the optical functional material layer was measured at 300 nm, the Cytop layer was set at 700 nm, and the wavelength was 632.8 nm.
- the wavelength was 632.8 nm.
- a change in light intensity of up to 160 times was observed. This indicates that the use of the device of the present invention enables modulation with low-power modulation drive light.
- FIG. 8 is a graph showing the relationship between the extinction coefficient k and the reflectance when the thickness of the low refractive index layer is changed between 100 and 800 nm in the device of the present invention.
- the change behavior of the reflectivity with respect to the change of the extinction coefficient k remarkably depends on the film thickness of the low refractive index layer, and the larger the film thickness, the smaller the value of the extinction coefficient k. It shows a sharp decrease followed by an increase.
- the thickness of the low-refractive index layer is small, a phenomenon in which the reflectance sharply decreases when the value of the extinction coefficient k is small cannot be seen. From these results, it can be seen that in the device of the present invention, by selecting an optimum film thickness in relation to the actual change of the extinction coefficient k, a highly sensitive light modulation device can be obtained.
- FIG. 10 shows the relationship between the incident angle ⁇ and the reflectance when the value of the extinction coefficient k was changed in the device of the present invention in which the real part n of the refractive index was a low refractive index layer with 1.45. It is a graph shown.
- the waveguide mode is formed when the real part n of the low refractive index layer is in the range of 1.29 to 1.45.
- the real part n of the refractive index is small, the incident angle S shifts to the low angle side, and when n is large, the incident angle S shifts to the wide angle side.
- the mode incident angle width in each case also depends on the real part n of the refractive index.
- intensity modulation can be performed by changing n or k
- phase modulation can be performed by changing n.
- a thin film of a fluorinated polymer having an aliphatic ring structure in the main chain obtained by cyclopolymerization of) is formed into a thin film by a spin coating method.
- the PFVI represented by (8) is laminated by a spin coating method to form an optical functional material layer having a thickness of 220 nm or 400 nm, and the light absorption and reflection of the low refractive index layer + PFVI layer laminate The characteristics were investigated.
- FIGS. 12 to 17 show actual measurements of light absorption and reflection characteristics measured using the low refractive index layer + PFVI layer laminate.
- Thickness 2201 111? 6 is a graph showing a transient absorption spectrum when only the I layer is excited by a single femtosecond laser beam having a wavelength of 400 nm.
- FIG. 13 is a graph showing a temporal change in transient absorption at 630 nm when only a 220 nm-thick PFVI layer is excited by a single femtosecond laser beam having a wavelength of 400 nm.
- 6 is a graph showing a change with time in strength.
- Figure 16 shows the transient reflection and PFVI at different angles of incidence immediately after a 220-nm-thick PFVI layer and a low-refractive-index layer were excited by a single femtosecond laser beam at a wavelength of 400 nm.
- 4 is a graph showing a transient absorption spectrum only in a layer.
- Figure 17 shows the transient reflection at different incident angles immediately after the 400 nm-thick PFVI layer and the low-refractive-index layer stack were excited by a 400-nm femtosecond laser beam, and only the PFVI layer.
- 4 is a graph showing a transient absorption spectrum.
- the peak of the transient reflectance change spectrum depends on the angle of incidence ⁇ or the thickness of the optical functional material layer (PFVI layer), and shifts to shorter wavelengths under wide-angle incidence conditions or thick films. Therefore, it was confirmed that a waveguide mode by the femtosecond laser was present in this laminate.
- the change in the reflectance of the laminate with the low-refractive-index layer was at least 10 times greater than the change in the transmittance without the low-refractive-index layer at the same excitation light intensity.
- the reflectivity change currently observed is less than 1 picosecond when ON, and several to several hundred picoseconds when OFF.
- a spatial light modulation element that operates stably for a long period of time, has excellent durability, and has a long life even when a very short pulse high power laser beam such as a femtosecond laser beam is used.
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
Abstract
Description
Claims
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04772921A EP1662297A4 (en) | 2003-09-03 | 2004-09-03 | ELEMENT AND METHOD FOR SPATIAL OPTICAL MODULATION |
JP2005513724A JP4774991B2 (ja) | 2003-09-03 | 2004-09-03 | 空間光変調素子及び空間光変調方法 |
KR1020067004524A KR101080025B1 (ko) | 2003-09-03 | 2006-03-03 | 공간 광변조 소자 및 공간 광변조 방법 |
US11/366,470 US7453620B2 (en) | 2003-09-03 | 2006-03-03 | Spatial optical modulation element and spatial optical modulation method |
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JP2003311823 | 2003-09-03 | ||
JP2003-311823 | 2003-09-03 |
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US11/366,470 Continuation US7453620B2 (en) | 2003-09-03 | 2006-03-03 | Spatial optical modulation element and spatial optical modulation method |
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PCT/JP2004/013182 WO2005024498A1 (ja) | 2003-09-03 | 2004-09-03 | 空間光変調素子及び空間光変調方法 |
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US (1) | US7453620B2 (ja) |
EP (1) | EP1662297A4 (ja) |
JP (1) | JP4774991B2 (ja) |
KR (1) | KR101080025B1 (ja) |
CN (1) | CN100380177C (ja) |
TW (1) | TW200513704A (ja) |
WO (1) | WO2005024498A1 (ja) |
Cited By (1)
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JP2007334306A (ja) * | 2006-05-19 | 2007-12-27 | Asahi Glass Co Ltd | 光導波路 |
Families Citing this family (4)
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EP1691233B1 (en) * | 2003-12-03 | 2012-02-15 | Asahi Glass Company, Limited | Spatial light modulator and spatial light modulation method |
CN104020589B (zh) * | 2014-05-27 | 2017-05-24 | 南昌大学 | 一种石墨烯电光调制器结构 |
CN105974656B (zh) * | 2016-07-26 | 2022-07-29 | 京东方科技集团股份有限公司 | 一种光学器件、显示装置及其驱动方法 |
CN110462491B (zh) * | 2018-02-08 | 2022-05-17 | 徐州旭海光电科技有限公司 | 一种低串扰单芯双向光组件 |
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JPS5838707A (ja) * | 1981-08-20 | 1983-03-07 | イ−・アイ・デユポン・デ・ニモアス・アンド・カンパニ− | パ−フルオロ−2,2−ジメチル−1,3−ジオキソ−ルの無定形共重合体 |
JPH0767275B2 (ja) | 1986-07-11 | 1995-07-19 | 松下電器産業株式会社 | スイツチング電源 |
JPS63238111A (ja) | 1987-03-27 | 1988-10-04 | Asahi Glass Co Ltd | 環状構造を有する含フツ素重合体の製造方法 |
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2004
- 2004-09-03 CN CNB2004800246951A patent/CN100380177C/zh not_active Expired - Fee Related
- 2004-09-03 WO PCT/JP2004/013182 patent/WO2005024498A1/ja active Application Filing
- 2004-09-03 TW TW093126744A patent/TW200513704A/zh not_active IP Right Cessation
- 2004-09-03 EP EP04772921A patent/EP1662297A4/en not_active Withdrawn
- 2004-09-03 JP JP2005513724A patent/JP4774991B2/ja not_active Expired - Fee Related
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Publication number | Publication date |
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JP4774991B2 (ja) | 2011-09-21 |
TWI351541B (ja) | 2011-11-01 |
JPWO2005024498A1 (ja) | 2006-11-02 |
KR20060090662A (ko) | 2006-08-14 |
US20060146388A1 (en) | 2006-07-06 |
CN100380177C (zh) | 2008-04-09 |
CN1842733A (zh) | 2006-10-04 |
TW200513704A (en) | 2005-04-16 |
EP1662297A4 (en) | 2007-06-20 |
KR101080025B1 (ko) | 2011-11-04 |
EP1662297A1 (en) | 2006-05-31 |
US7453620B2 (en) | 2008-11-18 |
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