WO2005015651A1 - Actionneur piezo-electrique - Google Patents

Actionneur piezo-electrique Download PDF

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Publication number
WO2005015651A1
WO2005015651A1 PCT/DE2004/001444 DE2004001444W WO2005015651A1 WO 2005015651 A1 WO2005015651 A1 WO 2005015651A1 DE 2004001444 W DE2004001444 W DE 2004001444W WO 2005015651 A1 WO2005015651 A1 WO 2005015651A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezo actuator
contact elements
actuator according
piezo
internal electrodes
Prior art date
Application number
PCT/DE2004/001444
Other languages
German (de)
English (en)
Inventor
Alexander Hedrich
Friedrich Boecking
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2005015651A1 publication Critical patent/WO2005015651A1/fr

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H10N30/874—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices embedded within piezoelectric or electrostrictive material, e.g. via connections
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/88—Mounts; Supports; Enclosures; Casings

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo element for controlling the needle stroke of a valve or the like can be constructed from a material with a suitable crystal structure.
  • the piezoelectric element reacts mechanically, which, depending on the crystal structure and the contact areas of the electrical voltage, represents a pressure or tension in a predeterminable direction.
  • such a piezo actuator is constructed in several layers as a so-called multi-layer actuator, with internal electrodes via which the electrical voltage is applied being arranged between the layers in the effective direction and being contacted by means of contact surfaces which are on the outside , These are usually made up of a base metallization layer and elements for bridging the delamination cracks which cannot usually be avoided.
  • metal mesh and conductive polymers can be used here. Elaborate grinding processes are usually necessary to manufacture such piezo actuators.
  • the piezo actuator described at the outset which can be used, for example, to actuate a mechanical component, has a multilayer structure of piezo layers with internal electrodes arranged in the effective direction, which can alternately be charged with a positive and a negative electrical charge. Furthermore, mutual contacting of the inner electrodes due to a different electrode design of the inner electrodes can be carried out to the outside. According to the invention, the mutual contacting of the internal electrodes with contact elements advantageously takes place. elements in such a way that they make contact with the respective internal electrodes in at least one inner recess of the piezo actuator and are guided outwards perpendicularly to the layer structure.
  • the contact elements can advantageously be electrically conductive elements which are separated from one another in a single bore by an insulating material and which are each led alternately to the respective internal electrodes with the positive and the negative connection of a voltage source using a conductive material.
  • the contact elements can also be made from a flexible electrode material.
  • the contact elements are electrically conductive pins which are coated with a conductive material, e.g. a polymer are surrounded in such a way that the respective contacting of the inner electrodes with the positive and the negative connection of a voltage source can be carried out.
  • a conductive material e.g. a polymer
  • the internal contacting preferably consists of two simple contact pins that represent the electrical poles of the piezo actuator and are connected to the internal electrodes by a conductive, flexible material.
  • This new type of contacting offers advantages in terms of compactness, so that more active ceramic cross-sections can be arranged on the same cross-sectional area compared to conventional external contacts, or a piezo actuator with a smaller space requirement can also be realized. Furthermore, the robustness is also improved, since the mechanically sensitive metal-ceramic interface between the contact element and the piezo layers is better protected in the manufacturing process and during operation.
  • the manufacturing costs can also be reduced by eliminating the need for grinding operations in hard machining to produce the external contact.
  • Using the recesses as a reference base manufacturing tolerances can then be more easily adhered to or narrowed because the reference base is retained throughout the entire manufacturing process.
  • the compatibility with the previous piezo actuator design forms is also guaranteed due to the same external design.
  • the contact elements can be guided to the outside through the entire length of the piezo actuator and a predetermined area.
  • the contact elements are embedded outside of the piezo actuator in an insulating actuator base and the piezo actuator and the actuator base are inserted in a metal sleeve so that the entire arrangement can be operated in the area of aggressive liquids.
  • the entire arrangement as a piezo actuator module can thus be used advantageously for needle stroke control for fuel injection in a motor vehicle, in which the piezo actuator module is a steel welded construction that serves to separate the piezo actuator from the surrounding fuel.
  • An important component is the actuator foot, which here is the mechanical base and the electrical contact for the piezo actuator and an O-ring groove for sealing the fuel.
  • This actuator base is thus simply designed as a steel-plastic injection molded part with inserted contact wires or pins.
  • a major advantage of the above-mentioned embodiment is above all that this construction is less expensive than the known external contact, since a number of parts and manufacturing processes, as mentioned above, are saved.
  • the contact elements can protrude, for example, only a short area from the actuator base and can be contacted there with further contact pins, preferably embedded in a further component, for example by welding or the like.
  • the actuator base and / or the further component are preferably plastic injection molded parts and the sleeve is made of steel.
  • the use of an actuator base is advantageous in that the actuator base offers two parallel bores through which the contact elements of the piezo actuator can be pushed.
  • the O-ring groove of the piezo actuator module can remain on the existing shoulder of the actuator foot or alternatively can be shifted to the shoulder of the sleeve, since space is gained there by laying the electrical connections.
  • FIG. 1 shows a longitudinal section through a piezo actuator with internal contacting of the internal electrodes
  • FIG. 2 shows a cross section through the piezo actuator according to FIG. 1
  • FIG. 3 shows an exemplary embodiment of a piezo actuator module with sleeve and actuator foot
  • FIG 5 shows an exemplary embodiment with only one bore for the internal contacting of the internal electrodes
  • FIG. 6 shows a cross section through the exemplary embodiment according to FIG. 5
  • FIG. 7 shows another exemplary embodiment with a flexible electrode material for the internal contacting.
  • a piezo actuator 1 constructed as a so-called multilayer is shown in various views, which is constructed in a manner known per se from piezo foils of a ceramic material with a suitable crystal structure, so that an external electrical voltage is applied when the so-called piezo effect is used here only by way of example provided with reference numerals internal electrodes 2 and 3 there is a mechanical reaction of the piezo actuator 1 in the direction of action 4.
  • the piezo actuator 1 described here has a preferred but not necessarily a round design, as can be seen from FIG. 2.
  • contact elements 7 and 8 here round pins, in a conductive but flexible material 9, e.g. Polymer, firmly embedded, which contact the inner electrodes to the outside and also offer a centering option.
  • This polymer should be designed in such a way that it absorbs the expansion resulting from the switching stroke and temperature changes in the given installation space, so that the electrical contacting of the internal electrodes is ensured over the lifetime of the piezo actuator. If the contact between the polymer and the internal electrodes is not sufficient, this can be improved by basic metallization in the holes.
  • the contact elements 7 and 8 are of different thicknesses or lengths in order to prevent the poles from being mixed up.
  • FIG. 3 and 4 show exemplary embodiments of a piezo actuator module 10, each of which contains a piezo actuator 1 inside a steel sleeve 11, as described with reference to the preceding figures.
  • contact elements 12 and 13 are guided through a steel-plastic bandage which surrounds an insulating actuator foot 14a, for example an injection-molded plastic part, which is surrounded by steel 14b and is firmly anchored in the steel sleeve 11.
  • an insulating actuator foot 14a for example an injection-molded plastic part
  • steel 14b is surrounded by steel 14b and is firmly anchored in the steel sleeve 11.
  • the insulating actuator foot 14 and the piezo actuator 1 are inserted in the steel sleeve 11 in such a sealing manner that the entire arrangement can be operated in the area of aggressive liquids.
  • the exemplary embodiment according to FIG. 4 differs from the exemplary embodiment according to FIG. 3 in that the contact elements 12 and 13 of the piezo actuator 1 are kept as short as possible.
  • An actuator foot 15a, 15b is also a steel-plastic material association here.
  • Another component 16 also a steel-plastic bandage, is designed here with inserted contacts 17 and 18.
  • These contacts are designed here in such a way that they can be electrically connected in the actuator base 15a to the contact elements 12 and 13, preferably by resistance welding.
  • these contacts 17 and 18 can be designed so that they can be integrated into an existing construction without modification. For example, they are so long that, when used for needle stroke control in a fuel injection, they extend to the flat connector of the injector, so that additional contacts and the associated contacting process can be omitted here.
  • FIG. 5 shows a longitudinal section and FIG. 6 shows a cross section through a further exemplary embodiment of a piezo actuator 20, in which, in contrast to the previously described exemplary embodiments, there is only one bore 21 in which the two contact elements 7 and 8 guided to the outside lie. These are electrically separated from one another by an insulating material 22, as can be seen in particular in FIG. 6. is known.
  • the contact elements 7 and 8 can also be made from a thermally expansion-adapted material, for example Invar.
  • the contact elements 7 and 8 are also contacted here, for example, using an adhesive process to the inner electrodes 2 and 3 of the ceramic layers via a conductive polymer 23 shown in FIG. 6.
  • the individual internal electrode layouts must have non-printed areas in the form of the passive area 24 shown here.
  • the contact elements according to FIG. 7 could also be formed from a flexible metal mesh 25 in a conductive polymer 23 and e.g. are connected by a soldering process to the internal electrodes 2 and 3 and the pins 26 guided to the outside. Gluing the metal mesh 25 to the internal electrodes 2 and 3 would also be possible here.

Landscapes

  • Fuel-Injection Apparatus (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

La présente invention concerne un actionneur piézo-électrique utilisé par exemple pour actionner un composant mécanique, comprenant une structure multicouche de couches piézo-électriques entre lesquelles des électrodes internes (2, 3) sont intercalées dans la direction d'action, lesdites électrodes pouvant faire l'objet de façon alternée d'une charge positive et d'une charge négative. L'actionneur se caractérise par une mise en contact alternée des électrodes internes (2, 3), respectivement vers l'extérieur, qui résulte d'une conception différente des électrodes (2, 3). La mise en contact alternée des électrodes internes (2, 3) s'effectue au moyen d'éléments de contact (5, 6; 12, 13) qui sont mis en contact avec les électrodes internes respectives (2, 3) dans une cavité interne (5, 6) de l'actionneur piézo-électrique (1), et cheminent ainsi vers l'extérieur perpendiculairement à la structure en couches.
PCT/DE2004/001444 2003-07-31 2004-07-06 Actionneur piezo-electrique WO2005015651A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10335019A DE10335019A1 (de) 2003-07-31 2003-07-31 Piezoaktor
DE10335019.5 2003-07-31

Publications (1)

Publication Number Publication Date
WO2005015651A1 true WO2005015651A1 (fr) 2005-02-17

Family

ID=34071993

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2004/001444 WO2005015651A1 (fr) 2003-07-31 2004-07-06 Actionneur piezo-electrique

Country Status (2)

Country Link
DE (1) DE10335019A1 (fr)
WO (1) WO2005015651A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006089818A1 (fr) * 2005-02-25 2006-08-31 Robert Bosch Gmbh Module actionneur dote d'un actionneur piezo-electrique
WO2006108739A1 (fr) * 2005-04-12 2006-10-19 Robert Bosch Gmbh Soupape d'injection de carburant
WO2007048756A1 (fr) 2005-10-26 2007-05-03 Continental Automotive Gmbh Actionneur piezo-electrique et procede pour le fabriquer
JP2008529288A (ja) * 2005-01-26 2008-07-31 エプコス アクチエンゲゼルシャフト 圧電多層素子

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005039550A1 (de) * 2005-08-22 2007-03-01 Robert Bosch Gmbh Anordnung mit einem Piezoaktor und ein Verfahren zu dessen Herstellung
DE102005039567A1 (de) 2005-08-22 2007-03-01 Robert Bosch Gmbh Anordnung mit einem Piezoaktor und ein Verfahren zu dessen Herstellung
DE102005039911A1 (de) * 2005-08-24 2007-03-08 Robert Bosch Gmbh Anordnung mit einem Piezoaktor
DE102005040122A1 (de) * 2005-08-25 2007-03-01 Robert Bosch Gmbh Piezoaktor mit innenliegender Kontaktierung
DE102005045229A1 (de) * 2005-09-22 2007-03-29 Robert Bosch Gmbh Anordnung mit einem Piezoaktor und ein Verfahren zu dessen Herstellung
DE102005045230A1 (de) * 2005-09-22 2007-03-29 Robert Bosch Gmbh Anordnung mit einem Piezoaktor und ein Verfahren zu dessen Herstellung
US7952261B2 (en) 2007-06-29 2011-05-31 Bayer Materialscience Ag Electroactive polymer transducers for sensory feedback applications
EP2239793A1 (fr) 2009-04-11 2010-10-13 Bayer MaterialScience AG Montage de film polymère électrique commutable et son utilisation
US9553254B2 (en) 2011-03-01 2017-01-24 Parker-Hannifin Corporation Automated manufacturing processes for producing deformable polymer devices and films
CN103703404A (zh) 2011-03-22 2014-04-02 拜耳知识产权有限责任公司 电活化聚合物致动器双凸透镜系统
US9876160B2 (en) 2012-03-21 2018-01-23 Parker-Hannifin Corporation Roll-to-roll manufacturing processes for producing self-healing electroactive polymer devices
US9761790B2 (en) 2012-06-18 2017-09-12 Parker-Hannifin Corporation Stretch frame for stretching process
WO2014066576A1 (fr) 2012-10-24 2014-05-01 Bayer Intellectual Property Gmbh Diode polymère
WO2014074554A2 (fr) * 2012-11-06 2014-05-15 Bayer Intellectual Property Gmbh Appareil, système et procédé d'actionneur empilé

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH429228A (de) * 1964-12-10 1967-01-31 Kistler Instrumente Ag Piezoelektrischer Einbaukörper zum Einbau in einen piezoelektrischen Wandler
US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
JPH10233537A (ja) * 1997-02-20 1998-09-02 Toyota Motor Corp 圧電積層体
DE19757877A1 (de) * 1997-12-24 1999-07-01 Bosch Gmbh Robert Verfahren zur Herstellung piezoelektrischer Aktoren und piezoelektrischer Aktor
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor
JP2000252781A (ja) * 1999-03-02 2000-09-14 Seiko Epson Corp 圧電振動子用気密端子、それを使用した表面実装型圧電振動子およびその製造方法
DE19913271A1 (de) * 1999-03-24 2000-09-28 Bosch Gmbh Robert Piezoelektrischer Aktor
US20020084350A1 (en) * 2000-12-28 2002-07-04 Naoyuki Kawazoe Piezoelectric device for injector, method for producing the same, and injector
DE10163358A1 (de) * 2000-12-28 2002-08-01 Denso Corp Vielschichtiger piezoelektrischer Aktuator
WO2003094252A2 (fr) * 2002-05-06 2003-11-13 Epcos Ag Piezoactionneur et son procede de production

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH429228A (de) * 1964-12-10 1967-01-31 Kistler Instrumente Ag Piezoelektrischer Einbaukörper zum Einbau in einen piezoelektrischen Wandler
US4471256A (en) * 1982-06-14 1984-09-11 Nippon Soken, Inc. Piezoelectric actuator, and valve apparatus having actuator
JPH10233537A (ja) * 1997-02-20 1998-09-02 Toyota Motor Corp 圧電積層体
DE19757877A1 (de) * 1997-12-24 1999-07-01 Bosch Gmbh Robert Verfahren zur Herstellung piezoelektrischer Aktoren und piezoelektrischer Aktor
JP2000252781A (ja) * 1999-03-02 2000-09-14 Seiko Epson Corp 圧電振動子用気密端子、それを使用した表面実装型圧電振動子およびその製造方法
DE19909482A1 (de) * 1999-03-04 2000-09-07 Bosch Gmbh Robert Piezoelektrischer Aktor
DE19913271A1 (de) * 1999-03-24 2000-09-28 Bosch Gmbh Robert Piezoelektrischer Aktor
US20020084350A1 (en) * 2000-12-28 2002-07-04 Naoyuki Kawazoe Piezoelectric device for injector, method for producing the same, and injector
DE10163358A1 (de) * 2000-12-28 2002-08-01 Denso Corp Vielschichtiger piezoelektrischer Aktuator
WO2003094252A2 (fr) * 2002-05-06 2003-11-13 Epcos Ag Piezoactionneur et son procede de production

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 1998, no. 14 31 December 1998 (1998-12-31) *
PATENT ABSTRACTS OF JAPAN vol. 2000, no. 12 3 January 2001 (2001-01-03) *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008529288A (ja) * 2005-01-26 2008-07-31 エプコス アクチエンゲゼルシャフト 圧電多層素子
WO2006089818A1 (fr) * 2005-02-25 2006-08-31 Robert Bosch Gmbh Module actionneur dote d'un actionneur piezo-electrique
WO2006108739A1 (fr) * 2005-04-12 2006-10-19 Robert Bosch Gmbh Soupape d'injection de carburant
WO2007048756A1 (fr) 2005-10-26 2007-05-03 Continental Automotive Gmbh Actionneur piezo-electrique et procede pour le fabriquer
US8132304B2 (en) 2005-10-26 2012-03-13 Continental Automotive Gmbh Method of manufacturing a piezoelectric actuator

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Publication number Publication date
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