WO2004104516A8 - Dispositif d'etalonnage - Google Patents

Dispositif d'etalonnage

Info

Publication number
WO2004104516A8
WO2004104516A8 PCT/GB2004/002134 GB2004002134W WO2004104516A8 WO 2004104516 A8 WO2004104516 A8 WO 2004104516A8 GB 2004002134 W GB2004002134 W GB 2004002134W WO 2004104516 A8 WO2004104516 A8 WO 2004104516A8
Authority
WO
WIPO (PCT)
Prior art keywords
spring constant
calibration device
constant calibration
platform
supporting legs
Prior art date
Application number
PCT/GB2004/002134
Other languages
English (en)
Other versions
WO2004104516A3 (fr
WO2004104516A2 (fr
Inventor
Peter J Cumpson
Original Assignee
Secretary Trade Ind Brit
Peter J Cumpson
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0311692A external-priority patent/GB0311692D0/en
Priority claimed from GBGB0311693.6A external-priority patent/GB0311693D0/en
Application filed by Secretary Trade Ind Brit, Peter J Cumpson filed Critical Secretary Trade Ind Brit
Priority to US10/557,275 priority Critical patent/US20060267596A1/en
Priority to EP04733589A priority patent/EP1625349A2/fr
Publication of WO2004104516A2 publication Critical patent/WO2004104516A2/fr
Publication of WO2004104516A3 publication Critical patent/WO2004104516A3/fr
Publication of WO2004104516A8 publication Critical patent/WO2004104516A8/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q40/00—Calibration, e.g. of probes

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne un dispositif d'étalonnage. Une plate-forme comporte une surface pratiquement plane permettant de supporter une pointe en porte-à-faux de microscope de force atomique AFM, un ou plusieurs montants d'appui conçus pour conférer une résistance élastique à la plate-forme et un détecteur capacitif servant à mesurer la constante élastique combinée de l'un ou de plusieurs de ces montant par rapport au déplacement pratiquement perpendiculaire à ladite surface pratiquement plane.
PCT/GB2004/002134 2003-05-21 2004-05-18 Dispositif d'etalonnage WO2004104516A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US10/557,275 US20060267596A1 (en) 2003-05-21 2004-05-18 Spring constant calibration device
EP04733589A EP1625349A2 (fr) 2003-05-21 2004-05-18 Dispositif d'etalonnage

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
GB0311692A GB0311692D0 (en) 2003-05-21 2003-05-21 Calibration device
GB0311692.8 2003-05-21
GB0311693.6 2003-05-21
GBGB0311693.6A GB0311693D0 (en) 2003-05-21 2003-05-21 Calibration device
GB0319460.2 2003-08-18
GB0319460A GB2401945B (en) 2003-05-21 2003-08-19 Calibration Device

Publications (3)

Publication Number Publication Date
WO2004104516A2 WO2004104516A2 (fr) 2004-12-02
WO2004104516A3 WO2004104516A3 (fr) 2005-09-15
WO2004104516A8 true WO2004104516A8 (fr) 2005-12-22

Family

ID=33479447

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB2004/002134 WO2004104516A2 (fr) 2003-05-21 2004-05-18 Dispositif d'etalonnage

Country Status (3)

Country Link
US (1) US20060267596A1 (fr)
EP (1) EP1625349A2 (fr)
WO (1) WO2004104516A2 (fr)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0423780D0 (en) 2004-10-26 2004-12-01 Trade & Industry Sec Dep For Lateral calibration device
CN100437021C (zh) * 2005-10-13 2008-11-26 致茂电子股份有限公司 干涉测量系统的自动平衡方法
WO2007100296A1 (fr) * 2006-03-02 2007-09-07 Nanofactory Instruments Ab Signal de commande pour acionneur a inertie
US20080011046A1 (en) * 2006-07-17 2008-01-17 Workman Richard K Displacement Method for Determining the Spring Constant of Scanning Probe Microscope Cantileers using MEMS Actuators
US7395697B2 (en) * 2006-07-17 2008-07-08 Agilent Technologies, Inc. Force method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators
US7421899B2 (en) * 2006-07-17 2008-09-09 Agilent Technologies, Inc. Resonance method for determining the spring constant of scanning probe microscope cantilevers using MEMS actuators
JP5149095B2 (ja) * 2008-07-28 2013-02-20 パナソニック株式会社 静電霧化装置およびそれを用いる空気調和機
US9664750B2 (en) * 2011-01-11 2017-05-30 Invensense, Inc. In-plane sensing Lorentz force magnetometer
JP6138250B2 (ja) * 2012-06-13 2017-05-31 パーデュー・リサーチ・ファウンデーションＰｕｒｄｕｅ Ｒｅｓｅａｒｃｈ Ｆｏｕｎｄａｔｉｏｎ マイクロ電気機械システムおよびマイクロ電気機械システムの使用
US8973161B2 (en) * 2012-06-22 2015-03-03 Rutgers, The State University Of New Jersey Method and apparatus for nanomechanical measurement using an atomic force microscope
JP6479605B2 (ja) * 2015-08-13 2019-03-06 国立研究開発法人産業技術総合研究所 電磁力を利用したトルク校正装置及びトルク校正方法
DE102019109311B3 (de) * 2019-04-09 2020-03-19 Technische Universität Ilmenau Anordnung und Verfahren zur Kalibrierung und Betrieb von kapazitiven Aktoren

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5079958A (en) * 1989-03-17 1992-01-14 Olympus Optical Co., Ltd. Sensor having a cantilever
US5224376A (en) * 1989-12-08 1993-07-06 Digital Instruments, Inc. Atomic force microscope
US5400647A (en) * 1992-11-12 1995-03-28 Digital Instruments, Inc. Methods of operating atomic force microscopes to measure friction
US6337479B1 (en) * 1994-07-28 2002-01-08 Victor B. Kley Object inspection and/or modification system and method
WO1997004283A2 (fr) * 1995-07-20 1997-02-06 Cornell Research Foundation, Inc. Dispositifs en porte-a-faux de torsion microfabriques pour une detection de force sensible
JP3576677B2 (ja) * 1996-01-19 2004-10-13 キヤノン株式会社 静電アクチュエータ及び、該アクチュエータを用いたプローブ、走査型プローブ顕微鏡、加工装置、記録再生装置
JP3713695B2 (ja) * 1997-04-01 2005-11-09 株式会社島津製作所 走査型プローブ顕微鏡
US6172506B1 (en) * 1997-07-15 2001-01-09 Veeco Instruments Inc. Capacitance atomic force microscopes and methods of operating such microscopes
DE19919030A1 (de) * 1999-04-27 2000-11-16 Bosch Gmbh Robert Verfahren und Vorrichtung zur Bestimmung von Materialdaten von Mikrostrukturen
US6497141B1 (en) * 1999-06-07 2002-12-24 Cornell Research Foundation Inc. Parametric resonance in microelectromechanical structures
US6593677B2 (en) * 2000-03-24 2003-07-15 Onix Microsystems, Inc. Biased rotatable combdrive devices and methods
JP2002039709A (ja) * 2000-07-28 2002-02-06 Mitsutoyo Corp 静電容量式プローブデバイス及び変位測定回路
US7066005B2 (en) * 2001-02-28 2006-06-27 Asylum Research Corporation Noncontact sensitivity and compliance calibration method for cantilever-based insturments
US6545495B2 (en) * 2001-04-17 2003-04-08 Ut-Battelle, Llc Method and apparatus for self-calibration of capacitive sensors
US6779387B2 (en) * 2001-08-21 2004-08-24 Georgia Tech Research Corporation Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
US6690179B2 (en) * 2001-08-24 2004-02-10 Symyx Technologies, Inc. High throughput mechanical property testing of materials libraries using capacitance
GB0423780D0 (en) * 2004-10-26 2004-12-01 Trade & Industry Sec Dep For Lateral calibration device

Also Published As

Publication number Publication date
WO2004104516A3 (fr) 2005-09-15
WO2004104516A2 (fr) 2004-12-02
US20060267596A1 (en) 2006-11-30
EP1625349A2 (fr) 2006-02-15

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