WO2004038400A2 - Micro-analyseur v, vi en phase - Google Patents

Micro-analyseur v, vi en phase Download PDF

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Publication number
WO2004038400A2
WO2004038400A2 PCT/US2003/030458 US0330458W WO2004038400A2 WO 2004038400 A2 WO2004038400 A2 WO 2004038400A2 US 0330458 W US0330458 W US 0330458W WO 2004038400 A2 WO2004038400 A2 WO 2004038400A2
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WO
WIPO (PCT)
Prior art keywords
concentrator
analyzer
fluid
separator
gas
Prior art date
Application number
PCT/US2003/030458
Other languages
English (en)
Other versions
WO2004038400A3 (fr
Inventor
Ulrich Bonne
Original Assignee
Honeywell International Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell International Inc. filed Critical Honeywell International Inc.
Priority to JP2005501607A priority Critical patent/JP2006515673A/ja
Priority to AU2003298593A priority patent/AU2003298593A1/en
Priority to EP03796344A priority patent/EP1563291A2/fr
Priority claimed from US10/672,483 external-priority patent/US7367216B2/en
Publication of WO2004038400A2 publication Critical patent/WO2004038400A2/fr
Publication of WO2004038400A3 publication Critical patent/WO2004038400A3/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/38—Flow patterns
    • G01N30/46—Flow patterns using more than one column
    • G01N30/466—Flow patterns using more than one column with separation columns in parallel
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/24—Suction devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/28—Control of physical parameters of the fluid carrier
    • G01N30/30—Control of physical parameters of the fluid carrier of temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/60—Construction of the column
    • G01N30/6095—Micromachined or nanomachined, e.g. micro- or nanosize
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/00584—Control arrangements for automatic analysers
    • G01N35/00722—Communications; Identification
    • G01N35/00871—Communications between instruments or with remote terminals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N2001/021—Correlating sampling sites with geographical information, e.g. GPS
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/28—Control of physical parameters of the fluid carrier
    • G01N30/30—Control of physical parameters of the fluid carrier of temperature
    • G01N2030/3076—Control of physical parameters of the fluid carrier of temperature using specially adapted T(t) profile
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/00584—Control arrangements for automatic analysers
    • G01N35/00722—Communications; Identification
    • G01N35/00871—Communications between instruments or with remote terminals
    • G01N2035/00881—Communications between instruments or with remote terminals network configurations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/04—Preparation or injection of sample to be analysed
    • G01N30/06—Preparation
    • G01N30/12—Preparation by evaporation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/26—Conditioning of the fluid carrier; Flow patterns
    • G01N30/38—Flow patterns
    • G01N30/46—Flow patterns using more than one column
    • G01N30/468—Flow patterns using more than one column involving switching between different column configurations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N30/00—Investigating or analysing materials by separation into components using adsorption, absorption or similar phenomena or using ion-exchange, e.g. chromatography or field flow fractionation
    • G01N30/02—Column chromatography
    • G01N30/88—Integrated analysis systems specially adapted therefor, not covered by a single one of the groups G01N30/04 - G01N30/86
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/22—Fuels; Explosives

Definitions

  • the present invention pertains to detection of fluids.
  • the invention pertains to a phased heater array structure, and more particularly to application of the structure as a sensor for the identification and quantification of fluid components.
  • fluid may be used as a generic term that includes gases and liquids as species. For instance, air, gas, water and oil are fluids.
  • GC-GC and GC-MS gas chromatograph - mass spectrometer
  • GC- AED gas chromatograph - atomic emission detector
  • phased heater array sensor initially consisted of separate chips for the concentrator, the separator, as well as for an off-chip flow sensor. These may be integrated onto one chip and provide improvements in the structural integrity and temperature control while reducing power consumption.
  • the next phased heater array sensor involved an addition of integratable, micro- discharge devices for detection, identification and quantification of analyte.
  • FET switches and shift register (s) onto the chip, there still was a need to wire-bond, route, connect and route about 110 wires from a daughterboard to mother-board with its micro-processor-controlled FET switches, which caused bulk and labor cost.
  • phased heater array sensor analyzers and conventional GCs seem to lack flexibility to change preconcentration and separation capabilities on-line.
  • the present invention is a design and operation of a sensor system/micro analyzer consisting of an array of selective, sensitive, fast and low-power phased heater elements in conjunction with an array of compact, fast, low-power, ambient pressure, minimal pumping spectral analysis devices to achieve fluid component presence, identification and quantification.
  • the micro fluid analyzer may have a concentrator and two or more separators.
  • the analyzer may have one, two or more pumps.
  • the analyzer may have a hyper pre- concentrator having a number of channels. There are numerous detectors positioned along the flow path of the analyzer. Also, one or more orifices and micro valves may be positioned in the flow path.
  • the concentrator may have an array of phased heater elements that provide a heat pulse that moves along the fluid path to provide an increasing concentration of heat.
  • the analyzer may be configured as a multiple fluid or gas chromatograph.
  • Multi-fluid detection and analysis may be automated via affordable, in-situ, ultra-sensitive, low-power, low- maintenance and compact micro detectors and analyzers, which can wirelessly or by another medium (e.g., wire or optical fiber) send their detection and/or analysis results to a central or other manned station.
  • a micro fluid analyzer may incorporate a phased heater array, concentrator, separator and diverse approaches.
  • the micro fluid analyzer may be a low-cost approach to sense ozone with a 50 part-per-billion (ppb) maximum emission objective.
  • the analyzer may be capable of detecting a mixture of trace compounds in a host or base sample gas or of trace compounds in a host liquid.
  • the fluid analyzer may include a connective configuration to an associated microcontroller or processor.
  • An application of the sensor may include the detection and analyses of air pollutants in aircraft space such as aldehydes, butyric acid, toluene, hexane, and the like, besides the conventional C0 2 , H 2 0 and CO.
  • Other sensing may include conditioned indoor space for levels of gases such as C0 2 , H 2 0, aldehydes, hydrocarbons and alcohols, and sensing outdoor space and process streams of industries such as in chemical, refining, product purity, food, paper, metal, glass and pharmaceutical industries. Also, sensing may have a significant place in environmental assurance and protection.
  • Sensing may provide defensive security in and outside of facilities by early detection of chemicals before their concentrations increase and become harmful.
  • a vast portion of the sensor may be integrated on a chip with conventional semiconductor processes or micro electromechanical system (MEMS) techniques. This kind of fabrication results in small, low-power consumption, and in situ placement of the micro analyzer.
  • the flow rate of the air or gas sample through the monitor may also be very small.
  • a carrier gas for the samples is not necessarily required and thus this lack of carrier gas may reduce the dilution of the samples being tested, besides eliminating the associated maintenance and bulk of pressurized gas-tank handling.
  • This approach permits the sensor to provide quick analyses and prompt results, may be at least an order of magnitude faster than some related art devices. It avoids the delay and costs of labor-intensive laboratory analyses.
  • the sensor is intelligent in that it may have an integrated microcontroller for analysis and determination of gases detected, and may maintain accuracy, successfully operate and communicate information in and from unattended remote locations .
  • the sensor may communicate detector information, analyses and results via utility lines, or optical or wireless media, with the capability of full duplex communication to a host system over a significant distance with "plug-and-play" adaptation and simplicity.
  • the sensor may be net-workable. It may be inter- connectable with other gas sample conditioning devices (e.g., particle filters, valves, flow and pressure sensors) , local maintenance control points, and can provide monitoring via the internet .
  • the sensor is robust. It can maintain accuracy in high electromagnetic interference (EMI) environments having very strong electrical and magnetic fields.
  • EMI electromagnetic interference
  • the sensor offers sub-ppm (parts-per- million) level detection which is 100 to 10,000 times better than related art technology, such as conventional gas chromatographs which may offer a sensitivity in a 1 to 10 ppm range.
  • the sensor is, among other things, a lower-power, faster, and more compact, more sensitive and affordable version of a gas chromatograph. It may have structural integrity and have very low or no risk of leakage in the application of detecting and analyzing pressurized fluid samples over a very large differential pressure range.
  • a small pump such as a Honeywell MesoPumpTM, may draw a sample into the system, while only a portion of it might flow through the phased heater sensor at a rate controlled by the valve (which may be a Honeywell MesoValveTM or Hoerbiger PiezoValveTM) .
  • the valve which may be a Honeywell MesoValveTM or Hoerbiger PiezoValveTM.
  • the pump of the sensor may be arranged to draw sample gas through a filter in such a way as to provide both fast sample acquisition and regulated flow through the phased heater sensor.
  • the control circuit may be designed to compensate for this change in velocity to keep the heater "wave” in sync with the varying gas velocity in the sensor.
  • its electronics may need to adjust either the flow control and/or the heater "wave” speed to keep the internal gas flow velocity in sync with the heater "wave”.
  • the sensor's ability may sense multiple trace constituents of air such as about 330 to 700 ppm of C0 2 , about 1 to 2 ppm of CH 4 and about 0.5 to 2.5 percent of H 2 0. This may enable on-line calibration of the output elution times as well as checking of the presence of additional peaks such as ethane, possibly indicating a natural gas, propane or other gas pipeline leak.
  • the ratio of sample gas constituent peak heights thus may reveal clues about the source of the trace gases, which could include car exhaust or gasoline vapors .
  • the sensor may have the sensitivity, speed, portability and low power that make the sensor especially well suited for safety-mandated periodic leak surveys of natural gas or propane gas along transmission or distribution pipeline systems and other gas in chemical process plants.
  • the sensor may in its leak sensing application use some or all sample gas constituents (and their peak ratios) as calibration markers (elution time identifies the nature of the gas constituents) and/or as leak source identifiers. If the presence alone of a certain peak such as methane (which is present in mountain air at about one to two ppm) may not be enough information to indicate that the source of that constituent is from swamp gas, a natural or pipeline gas or another fluid.
  • the sensor may be used as a portable device or installed at a fixed location.
  • Figure 1 is a diagram of a sensor system.
  • Figure 2 shows details of a micro gas apparatus;
  • Figure 3 is a layout of an illustrative phased heater mechanism;
  • Figure 4 is a length-wise sectional view of a heater elements on a streightened channel;
  • Figure 5 is a length-wise sectional view of a twin- film heater elements on a streightened channel;
  • Figures 6a, 6b and 6c show a cross-section end views of the twin-film heater element and single film element.
  • Figure 7 is a graph illustrating heater temperature profiles, along with corresponding concentration pulses produced at each heater element of the sensor apparatus;
  • Figure 8 is a graph showing several heater elements to illustrate a step-wise build-up on an analyte concentration;
  • Figure 9 is a graph showing a concentration pulse that reaches about 100 percent concentration level
  • Figure 10 is a table showing detection limits and selectivities for various elements;
  • Figure 11 shows chromatograms of a multielement test mixture;
  • Figure 12 is a graph of the relative intensity, discharge versus pressure for a gas
  • Figure 13 shows sectional views of an array of light source and detector (MDD) pairs for gas sensing.
  • Figure 14 is a graph of a spectral responsivity comparison between an MDD and a Si-photo diode.
  • Figure 15 is an illustration of an integrated layout for the phased heater array structure that includes sensors, a concentrator and a separator;
  • Figure 16 is a schematic of the logic heating element selection for concentrator and separator portions of a sensor.
  • Detection and analysis by sensor 15 of Figure 1 may include detection, identification and quantification of fluid components. That may include a determination of the concentration of or parts-per-million of the fluid detected. Sensor 15 may be used to detect fluids in the environment. Also, sensor 15 may detect miniscule amounts of pollutants in ambient environment of a conditioned or tested space. Sensor 15 may indicate the health and the level of toxins-to-people in ambient air or exhaled air.
  • Figure 1 reveals an illustrative diagram of a low- power sensor system 11.
  • a sample fluid 25 from a process stream, an ambient space or volume 61 may enter a conduit or tube 19 which is connected to an input 34 of a sensor or micro gas apparatus 15. Fluid 25 may be processed by sensor 15.
  • Processed fluid 37 may exit output 36 of sensor 15 and be exhausted to volume 61 or another volume, wherever designated, via a conduit or tube 39.
  • Sensor 15 results may be sent to microcontroller/processor 29 for analysis, and immediate conclusions and results. This information may be sent on to observer stations 31 for review and further analysis, evaluation, and decisions about the results found. Data and control information may be sent from stations 31 to microcontroller/processor 29.
  • Data and information may be sent and received via the wireless medium by a transmitter/receiver 33 at sensor 11 and at stations 31. Or the data and information may be sent and received via wire or optical lines of communication by a modem 35 at monitor 11 and station 31.
  • the data and information may be sent to a SCADA (supervisory control and data acquisition) system. These systems may be used in industry (processing, manufacturing, service, health) to detect certain gases and provide information relating to the detection to remote recipients.
  • Microcontroller or processor 29 may send various signals to analyzer 15 for control, adjustment, calibration or other purposes. Also, microcontroller/processor 29 may be programmed to provide a prognosis of the environment based on detection results.
  • the analysis calculations, results or other information may be sent to modem 35 for conversion into signals to be sent to a station 31 via lines, fiber or other like media. Also, such output to modem 35 may be instead or simultaneously sent to transmitter 33 for wireless transmission to a station 31, together with information on the actual location of the detection obtained, e.g., via GPS, especially if it is being used as a portable device. Also, stations 31 may send various signals to modem 35 and receiver 33, which may be passed on to microcontroller or processor 29 for control, adjustment, calibration or other purposes.
  • space 61 may be open or closed.
  • Sensor system 11 may have a hook-up that is useable in a closed space 61 such as an aircraft-cabin, machinery room, factory, or some place in another environment. Or it may be useable in an open space 61 of the earth's environment.
  • the end of input tube or pipe 19 may be in open space 61 and exhaust of exit tube 37 may be placed at a distance somewhat removed from a closed space 61.
  • System 11 for space 61 may itself be within space 61 except that tube 39 may exit into space 61, especially downstream in case space 61 is a process stream.
  • Sample stream 25 may enter input port 34 from pipe or tube 19.
  • particle filter 43 for removing dirt and other particles from the stream of fluid 25 that is to enter apparatus 15. This removal is for the protection of the apparatus and the filtering should not reduce the apparatus' ability to accurately analyze the composition of fluid 25. Dirty fluid (with suspended solid or liquid non-volatile particles) might impair proper sensor function.
  • a portion 45 of fluid 25 may flow through the first leg of a differential thermal- conductivity detector (TCD, or chemi-sensor (CRD) , or photo-ionization sensor/detector (PID) , or other device) 127 and a portion 47 of fluid 25 flows through tube 49 to a pump 51.
  • TCD differential thermal- conductivity detector
  • CCD chemi-sensor
  • PID photo-ionization sensor/detector
  • Pump 51 may cause fluid 47 to flow from the output of particle filter 43 through tube 49 and exit from pump 51.
  • Pump 53 may effect a flow of fluid 45 through the sensor via tube 57.
  • Pump 51 may now provide suction capacity of 10-300 cm3/min at less than 1 psi pressure drop ( ⁇ p) and low-flow-capacity pump
  • 53 may provide 0.1-3 cm3/min at up to a ⁇ p of 10 psi) .
  • There may be additional or fewer pumps, and various tube or plumbing arrangements or configurations for system 15 in Figure 2.
  • Data from detectors 127 and 128 may be sent to control 130, which in turn may relay data to microcontroller and/or processor 29 for processing. Resultant information may be sent to station 31.
  • Pumps 51 and 53 may be very thrifty and efficient configurations implemented for pulling in a sample of the fluid being checked for detection of possible gas from somewhere .
  • Low-power electronics having a sleep mode when not in use may be utilized.
  • the use of this particularly thrifty but adequately functional pump 51 and 53, which may run only about or less than 1-10 seconds before the start of a concentrator and/or measurement cycle of analyzer system 11, and the use of low-power electronics for control 130 and/or microcontroller/processor 29 (which may use a sleep mode when not in use) might result in about a two times reduction in usage of such power.
  • FIG 3 is a schematic diagram of part of the sensor apparatus 10, 15, representing a portion of concentrator 124 or separator 126 in Figure 2.
  • the sensor apparatus may include a substrate 12 and a controller 130. Controller 130 may or may not be incorporated into substrate 12.
  • Substrate 12 may have a number of thin film heater elements 20, 22, 24, and 26 positioned thereon. While only four heater elements are shown, any number of heater elements may be provided, for instance, between two and one thousand, but typically in the 20-100 range.
  • Heater elements 20, 22, 24, and 26 may be fabricated of any suitable electrical conductor, stable metal, or alloy film, such as a nickel-iron alloy sometimes referred to as permalloy having a composition of eighty percent nickel and twenty percent iron; platinum, platinum suicide and polysilicon.
  • Heater elements 20, 22, 24, and 26 may be provided on a thin, low-thermal mass, low-in-plane thermal conduction, support member 30, as shown in Figures 4 and 5.
  • Support member or membrane 30 may be made from Si 3 N or other appropriate or like material.
  • the heater elements may be made from Pt or other appropriate or like material.
  • Substrate 12 may have a well-defined single-channel phased heater mechanism 41 having a channel 32 for receiving the sample fluid stream 45, as shown in Figure 4.
  • Figure 5 reveals a double-channel phased heater design 41 having channels 31 and 32.
  • Substrate 12 and portion or wafer 65 may have defined channels 31 and 32 for receiving a streaming sample fluid 45.
  • the channels may be fabricated by selectively etching silicon channel wafer substrate 12 beneath support member 30 and wafer or portion 65 above the support member.
  • the channels may include an entry port 34 and an exhaust port 36.
  • the sensor apparatus may also include a number of interactive elements inside channels 31 and 32 so that they are exposed to the streaming sample fluid 45.
  • Each of the interactive elements may be positioned adjacent, i.e., for closest possible contact, to a corresponding heater element.
  • interactive elements 40, 42, 44, and 46 may be provided on the lower surface of support member 30 in channel 32, and be adjacent to heater elements 20, 22, 24, and 26, respectively.
  • additional interactive elements 140, 142, 144, and 146 may be provided on the upper surface of support member 30 in second channel 31, and also adjacent to heater elements 20, 22, 24, and 26, respectively.
  • There may be other channels with additional interactive film elements which are not shown in the present illustrative example.
  • the interactive elements may be formed from any number of films commonly used in liquid or gas chromatography, such as silica gel, polymethylsiloxane, polydimethylsiloxane, polyethyleneglycol, porous silica, NanoglassTM, active carbon, and other polymeric substances. Furthermore, the above interactive substances may be modified by suitable dopants to achieve varying degrees of polarity and/or hydrophobicity, to achieve optimal adsorption and/or separation of targeted analytes .
  • Figure 6a shows a cross-section end view of two- channel phased heater mechanism 41.
  • the top and bottom perspectives of portions in Figures 6a, 6b and 6c may not necessarily appear to be the same.
  • An end view of a single channel phased heater mechanism 41 may incorporate the support member 30 and substrate 12 and the items between them, in Figures 6b and 6c.
  • Figure 6b shows a version of the phased heater mechanism 41 having an exposed 1 micron membrane . Shown in Figure 6b is open space 392.
  • Figure 6c shows a ruggedized, low power version having a small closed space 394.
  • Support member 30 may be attached to top structure 65.
  • Anchors 67 may hold support member 30 in place relative to channel 31. Fewer anchor 67 points minimize heat conduction losses from support 30 to other portions of structure 41.
  • the heater elements of a phased heater array may be coated with an adsorber material on both surfaces, i.e., top and bottom sides, for less power dissipation and more efficient heating of the incoming detected gas.
  • the heater elements may have small widths for reduced power dissipation.
  • Interactive film elements may be formed by passing a stream of material carrying the desired sorbent material through channel 32 of single-channel heating mechanism
  • the coating may be spin-coated onto substrate 30 attached to the bottom wafer 12, before attaching the top wafer 65 in Figure 6a, and then selectively "developed” by either using standard photoresist masking and patterning methods or by providing a temperature change to the coating, via heater elements 20, 22, 24 and 26.
  • Coating 69 may reduce power used for the heater elements in support 30.
  • a minimizing or reduction of the size (width, length and thickness) of the heater element membranes as well as the adsorber film, while retaining a reasonable ratio of mobile/stationary phase volume, may result in about a four times power reduction.
  • the minimized or reduced adsorber film thickness may reduce the time needed for adsorption-desorption and save about 1.5 times in energy needed per fluid analysis.
  • Heater elements 20, 22, 24 and 26 may be GC-film- coated on both the top and bottom sides so that the width and power dissipation of the heater element surface by about two times.
  • the fabrication of these heater elements involves two coating steps, with the second step requiring wafer-to-wafer bonding and coating after protecting the first coat inside the second wafer and dissolving the first wafer.
  • the ratio of concentrator to separator heater elements may be set or changed by a ratio control mechanism 490 connected to controller 130.
  • Controller 130 may be electrically connected to each of the heater elements 20, 22, 24, 26, and detector 50 as shown in Figure 3. Controller 130 may energize heater elements 20, 22, 24, and 26 in a time phased sequence (see bottom of Figure 7) such that each of the corresponding interactive elements 40, 42, 44, and 46 become heated and desorb selected constituents into a streaming sample fluid 45 at about the time when an upstream concentration pulse, produced by one or more upstream interactive elements, reaches the interactive element. Any number of interactive elements may be used to achieve the desired concentration of constituent gases in the concentration pulse. The resulting concentration pulse may be provided to detector 50, 128, for detection and analysis.
  • Detector 50, 127, or 128 may be a thermal-conductivity detector, discharge ionization detector, CRD, PID, MDD, or any other type of detector such as that typically used in gas or fluid chromatograph .
  • Figure 7 is a graph showing illustrative relative heater temperatures, along with corresponding concentration pulses produced at each heater element.
  • controller 130 may energize heater elements 20, 22, 24, and 26 in a time phased sequence with voltage signals 71.
  • Illustrative time phased heater relative temperatures for heater elements 20, 22, 24, and 26 are shown by temperature profiles or lines 60, 62, 64, and 66, respectively.
  • controller 130 may first energize first heater element 20 to increase its temperature as shown at line 60 of Figure 7. Since first heater element 20 is thermally coupled to first interactive element 40 ( Figures 4 and 5) , the first interactive element desorbs selected constituents into the streaming sample fluid 45 to produce a first concentration pulse 70 ( Figure 7) at the detector 128 or 50, if no other heater elements were to be pulsed.
  • the streaming sample fluid 45 carries the first concentration pulse 70 downstream toward second heater element 22, as shown by arrow 72.
  • Controller 130 may next energize second heater element 22 to increase its temperature as shown at line 62, starting at or before the energy pulse on element 20 has been stopped. Since second heater element 22 is thermally coupled to second interactive element 42, the second interactive element also desorbs selected constituents into streaming sample fluid 45 to produce a second concentration pulse. Controller 130 may energize second heater element 22 such that the second concentration pulse substantially overlaps first concentration pulse 70 to produce a higher concentration pulse 74, as shown in Figure 7. The streaming sample fluid 45 carries larger concentration pulse 74 downstream toward third heater element 24, as shown by arrow 76.
  • Controller 130 may then energize third heater element 24 to increase its temperature as shown at line 64 in Figure 7. Since third heater element 24 is thermally coupled to third interactive element 44, third interactive element 44 may desorb selected constituents into the streaming sample fluid to produce a third concentration pulse. Controller 130 may energize third heater element 24 such that the third concentration pulse substantially overlaps larger concentration pulse 74 provided by first and second heater elements 20 and 22 to produce an even larger concentration pulse 78. The streaming sample fluid 45 carries this larger concentration pulse 78 downstream toward an "Nth" heater element 26, as shown by arrow 80. Controller 130 may then energize "N-th" heater element 26 to increase its temperature as shown at line 66.
  • N-th heater element 26 Since "N-th" heater element 26 is thermally coupled to an "N-th” interactive element 46, "N-th” interactive element 46 may desorb selected constituents into streaming sample fluid 45 to produce an "N-th” concentration pulse. Controller 130 may energize “N-th” heater element 26 such that the "N-th” concentration pulse substantially overlaps larger concentration pulse 78 provided by the previous N-l interactive elements.
  • the streaming sample fluid carries "N-th" concentration pulse 82 to either a separator 126 or a detector 50 or 128, as described below.
  • heater elements 20, 22, 24, and 26 may have a common length.
  • controller 130 can achieve equal temperatures of the heater elements by providing an equal voltage, current, or power pulse to each heater element.
  • the voltage, current, or power pulse may have any desired shape including a triangular shape, a square shape, a bell shape, or any other shape.
  • An approximately square shaped voltage, current, or power pulse is used to achieve temperature profiles 60, 62, 64, and 66 shown in Figure 7. The temperature profiles look like that, and note that the desorbed species are generated with a small time delay, relative to the voltage pulses.
  • Figure 8 is a graph showing a number of heater elements to illustrate, first, how the concentration increases stepwise as the desorption of subsequent elements is appropriately synchronized with the streaming sample fluid velocity and, second, how the lengths of individual elements are matched to the expected increased rate of mass diffusivity flux as the concentration levels and gradients increase.
  • the analyte concentration may have been already magnified by a factor, F, by virtue of pulsing an initial element with a length F-times longer than the one shown as element 100 (HI) or, alternatively, by simultaneously pulsing elements 1, 2,..., F and collecting all the desorbed analyte with the still cool element 100 (HI) , before pulsing it.
  • each of the concentration pulses may tend to decrease in amplitude and increase in length when traveling down channel 32 due to diffusion.
  • the length of each successive heater element may be increased along the streaming sample fluid.
  • a second heater element 102 may have a length W 2 that is larger than a length Wx of a first heater element 100.
  • a third heater element 104 may have a length W 3 that is larger than length W 2 of second heater element 102.
  • the length of each heater element 100, 102, and 104 may be increased, relative to the adjacent upstream heater element, by an amount that corresponds to the expected increased length of the concentration pulse of the upstream heater elements due to diffusion.
  • the target analyte concentrations are very small or the adsorbing film capacities are very large, it may be possible and advantageous to significantly decrease the length of subsequent or last heater elements in order to achieve maximum focusing performance of the concentrator function, which is based on minimizing the film volume into which we can adsorb a given quantity of analyte (s) from a given volume of sample gas pumped (pump 51 in Figure 2) through the concentrator during a given time, and thus increase the analyte (s) concentration by the same ratio of sample volume/film volume (of the last heater element) .
  • the length of each successive heater element may be kept constant to produce the same overall heater resistance between heater elements, thereby allowing equal voltage, current, or power pulses to be used to produce similar temperature profiles.
  • the heater elements may have different lengths, and the controller may provide different voltage, current, or power pulse amplitudes to the heater element to produce a similar temperature profile.
  • Figure 9 is a graph showing a concentration pulse 110 that achieves a 100 percent concentration level. It is recognized that even though concentration pulse 110 has achieved a maximum concentration level, such as 100 percent, the concentration of the corresponding constituent can still be determined. To do so, detector 50, 128, 164 may detect the concentration pulse 110, and controller 130 may integrate the output signal of the detector over time to determine the concentration of the corresponding constituent in the original sample of stream 45.
  • GC peak identification it is desired to associate unequivocally a chemical compound with each gas peak exiting from a gas chromatograph (GC) , which is a tool to achieve such separations of individual constituents from each other.
  • GC- MS gas chromatograph
  • each GC-peak is analyzed for its mass, while processing the molecular fragments resulting from the required ionization process at the MS inlet.
  • different separation column materials are used in the first and second GC, in order to add information to the analysis record, which may help with compound identification.
  • a microwave-powered gas discharge may generate tell-tale optical spectral emission lines (atoms) and bands
  • the micro discharge device may emit spectra of the analyte peaks as they elute from the GC or GC-GC, and reveal molecular and atomic structure and thus identification of the analyte peaks.
  • Figure 11 An example of how the selective wavelength channels of an AED can identify the atomic makeup of a compound separated by GC is illustrated in Figure 11, which shows separate channels for C, H, N, 0, S, Cl, Br, P, D, Si and F atomic emissions, with a corresponding list of channels in the table of Figure 10.
  • Figure 11 shows chromatograms of a multielement test mixture with various peaks that may indicate the element and its approximate amount.
  • Peak 301 indicates 2.5 ng of 4-fluoroanisole; peak 302 indicates 2.6 ng of 1-bromohexane; peak 303 indicates 2.1 ng of tetraethylorthosilicate; peak 304 indicates 1.9 ng of n-perdeuterodecane; peak 305 indicates 2.7 ng of nitrobenzene; peak 306 indicates 2.4 ng of triethyl phosphate; peak 307 indicates 2.1 tert-butyl disulfide; peak 308 indicates 3.3 ng of 1, 2 , 4-trichlorobenzene; peak 309 indicates 170 ng of n-dodecane; peak 310 indicates 17 ng of n-tridecane; and peak 311 indicates 5.1 ng of n- tetradecane.
  • the GC conditions may include a column flow of 3.3 mL/min, a split ratio of 36:1, and an oven program from 60 degrees to 180 degrees Centigrade (C) at 30
  • the third approach may be the same as the first one, except that each micro-discharge may be only operated at one condition, but set to be different from that of the set-point of the other microdis ⁇ harges .
  • Figure 13 represents the third approach, whereby the gas sample may pass serially from one type of discharge to the next, and the assumption may be that the nature of the gas sample does not change during this process.
  • the figure shows an array 350 of light source - detector pairs for gas composition sensing in a gas 45 stream at various pressures and voltages. The different voltages, +V1, +V2 ... and pressures PI and P2 may be marked as such.
  • the plasma of the micro discharges 352 from the light source block 351 are indicated by the ellipsoids between the (+) and (-) electrodes.
  • Opposing source block 351 is a detector block 353 having micro gas discharge devices operating as detectors 354 of the light from the source discharges 352. There may be filters situated on detectors 354.
  • the filters may be different and selected for detection and analysis of particular groups of gases.
  • the various lines of emission of the gases from the micro discharges may be detected and identified for determining the components of a detected gas.
  • Array 350 may be connected to controller 130.
  • a processor may be utilized in the control of the micro discharges and the detection of the effects of the discharges in the flow of gas 45 through array 350.
  • Light source block 351 may be made from silicon. Situated on block 351 may be a wall-like structure 355 of Si 3 N 4 or PyrexTM, forming a channel for containing the flow of gas 45 through device 350. On top of structure 355 may be a conductive layer of Pt or Cu material 356. On the Pt material is a layer 357 of Si 3 N 4 that may extend over the flow channel. On top of layer 357 may be a layer 358 of Pt and a layer 359 of Si 3 N 4 as a wall for forming a channel for detectors 354.
  • the fourth approach may be like the third approach except for the feeding the gas sample to each discharge in a parallel rather than serial fashion.
  • a fifth approach may be the same as the fourth or third approach, except that the gas sample may have undergone a separation process as provided, e.g., by a conventional GC.
  • a sixth approach may be the same as the fifth approach, except that prior to the separation process, the sample analytes of interest may be first concentrated by a conventional pre-concentration step.
  • the seventh approach may be the same as the sixth approach, except that prior to the separation process, the sample analytes of interest may have been previously concentrated by a multi-stage pre-concentration process and then electronically injected into the separator as offered by the phased heater array sensor.
  • the idea is to feed individual gas-analyte peaks eluting from the GC column or the phased heater array sensor separator channel to each discharge device in the shown array of discharges.
  • Gas flow may be in series as shown in Figure 13. Or it may be in parallel which may be necessary for an optimal peak identification, whereby (for the sake of minimizing total analysis time) each discharge cell may operate at a fixed condition of applied voltage, gas pressure (determined by the vacuum or suction pump at the exit of the array, e.g., by a MesopumpTM) .
  • gas pressure determined by the vacuum or suction pump at the exit of the array, e.g., by a MesopumpTM
  • only two pressures may be indicated by way of example, as easily achieved by a flow restriction between the 4 th and 5 th discharge element .
  • Several changes in the discharge parameter such as flow rate, temperature (via local micro-heaters) or geometry (hoilow-cathode or flat-plate discharge, besides simple changes in the identification of cell) are not shown, but may be likewise implemented.
  • Sensor 15 may have a flow sensor 125 situated between concentrator 124 and separator 126, a thermal- conductivity detector at the input of concentrator 124. It may have a thermal-conductivity detector between concentrator 124 and separator 126. There may be a thermal-conductivity detector at the output of discharge mechanism 350. Sensor 15 may include various combinations of some of the noted components in various locations in the sensor 128 of Figure 2, depending upon the desired application. The drawing of sensor 15 in Figure 2 is an illustrative example of the sensor. Sensor 15 may have other configurations not illustrated in this figure.
  • the gas micro-discharge cells may offer attractive features, which may significantly enhance the usefulness, versatility and value of the phased heater array sensor.
  • the features include: 1) low power capability -- each discharge operates at 700-900 Torr (0.92-1.18 bar) with as little as 120 V DC, at 10 ⁇ m, which may amount to 1.2 mW that appears to be a minimal power not even achieved by microTDCs; 2) ease of building along with a compactness (50 x 50 ⁇ m) , shown the insert of Figure 12; 3) the operability of micro-discharges as photo detectors which may be shown by the spectral responsivity comparison between a 100 ⁇ m microdischarge and an Si APD in Figure 14, which no other light sources such as 100-W microwave driven AEDs (requiring water cooling) are known to do; 4) the integratability and wafer level assembly of the discharge source and photodiodes with a phased heater array structure, without having to resort to Si-doping to manufacture monolithic Si-photodiodes; and
  • the present invention may have gas composition sensing capabilities via micro-discharge having: 1) a combination of phased heater array sensor with micro gas discharge devices; 2) the combination of 1), whereby one set or array of gas discharge devices may provide the spectral emission and another, complementary set (with or without narrow-band band-pass filters or micro spectrometer) may provide the light detection function; 3) the combination of 2) with appropriate permutations of designs described above under the first through seventh approaches; and 4) the flexibility to program heatable elements as additional pre-concentrator or additional separator elements of the phased heater array structure, as needed for a specific analysis, to achieve optimal preconcentration or separation performance.
  • the present phased heater array sensor- microdischarge detector combination over previously proposed micro gas analyzers may provide sensitivity, speed, portability and low power of the phased heater array sensor, combined with the selectivity, "peak- identification" capability, low-power, light source and detection capability, integratability, simplicity and compactness contributed by micro gas discharge devices, which no other microanalyzers have been known to achieve.
  • Figure 15 illustrates the integration of sensors, pre-concentrator and/or concentrator 124 and separator 126 of micro gas apparatus 15 (i.e., the phased heater array structure) on a single chip 401 which would be mounted and connected on a circuit board that also connects with other chips as well.
  • One such other chip may hold FET switches, shift registers and logic.
  • the 401 chip may reside on a daughter board.
  • the 401 chip and the main circuit board were originally connected by about 110 wires. However, after the integration of all of the switches onto the separate chip on the daughter board, the number of printed circuit board routing leads and connector pins was reduced to about 10 (i.e., for differential temperature compensation, flow sensor, switch clock, logic, power and ground) .
  • the FET switches, shift registers and control logic located on a separate IC may be connected to the phased heater array structure chip via wire-bonds or solder-bumps. With the new logic of the FETs, a user of sensor system 15 may select the fraction of total heatable elements for operating as preconcentrators versus separators.
  • Figure 16 is a schematic of an illustrative example 402 of control logic for sensor system 11.
  • Circuit 410 may be an instance of a logic cell in an array. It may contain D flip-flops 403, R-S flip-flops 404, AND gates 405 and 415, OR gates 406, FETs 407 and an inverter 408, plus additional circuitry as needed.
  • a clock line 411 may be connected to a clock input of D flip-flop 403.
  • a separator enable line 413 may be connected to a first input of AND gate 405.
  • a data-in line 412 may be connected to a D input of flip-flop 403.
  • a Q output of flip-flop 404 may be connected to a second input of AND gate 405.
  • a Q output of flip-flop 403 may be connected to an R input of flip-flop 404 and to a first input of AND gate 415.
  • Separator enable line 413 may be connected to an input of inverter 408.
  • An output of inverter 408 may be connected to a second input of AND gate 415.
  • Outputs of AND gates 415 and 405 may be connected to first and second inputs, respectively, of OR gate 406.
  • An output of OR gate 406 may be connected to a gate of FET 407.
  • FET 407 may be connected to a FET common line 416 and a FET output terminal 417, respectfully.
  • the far right logic cell may have a Q output of flip-flop 403 connected to a data out line 418.
  • This logic may allow the user to pre-select the number of pre-concentrator elements that the circuit will pulse and heat up, before pausing and then ramping up the temperature on all of the remaining heater elements, which then may function as part of the segmented separator.
  • There is an additional dimension of flexibility which may allow for the depositing of different materials on any of the phased heater array sensor elements of chip 401 chip via suitable masking, so that preferential preconcentration, filtering of interference and cascaded separation may be enabled.
  • Figure 16 further illustrates how up to 50 FET switches may be controlled by on-chip logic, each having an on resistance at or below 0.5 ohms and be able to switch about 12 volt potentials.
  • the on-chip logic may operate in two modes, that is, the concentrator or 1 st mode and the separator or 2 nd mode, the respective mode being determined by a control line bit.
  • the 1 st mode may involve a shift register which, after a reset, sequentially turns on a low resistance FET, and disables a flip-flop associated with that same FET.
  • the first FET turns off, and the next FET turns on and its associated flip-flop is disabled. This sequence may be repeated until some external drive electronics turns off the clock and enables the 2 nd operating mode.
  • Two chips may be used in series to bond to the (up to 50) the phased heater array sensor chip pads on each of its sides, such that the sequential switching will go from the first chip to the second chip. It may be necessary for the signal from the last switch on the first chip to trigger the first switch on the second chip. It is possible that the mode switch from sequential addressing of the remaining FETs in parallel may happen sometime before or after the switching has moved to the second chip.
  • the user may be enabled with great flexibility to adjust the phased heater array sensor operation and performance to the varying needs imposed by the analysis problem: He can select the number or fraction of total heater array elements to function as pre-concentrators vs. separators, thus varying the concentration of the analyte relative to the separation, i.e., resolution and selectivity of the analyte components, while retaining the ability to design and fabricate low-power, optimally temperature-controlled heater elements, that feature structural integrity, optimal focusing features, analyte selectivity/filtering, and smart integration of preconcentration, separation, flow control and detection technology, such as TC and micro-plasma-discharge sensors .
  • One may integrate the CMOS drive electronics with the phased heater array sensor flow-channel chip.
  • micro analyzer 500 shown in Figure 17, which may combine the selectivity provided by the ⁇ GC- ⁇ GC-like configuration if needed, that is, if not a simple micro gas chromatograph ( ⁇ GC) would do, as well as the sensitivity afforded by the multi-level, multi-stage pre-concentration.
  • micro analyzer 500 may still retain its (palm-top to cubic-inch type) compactness, 3-second analysis, ppb sensitivity, flexibility, smartness, integrated structure, low-power and low cost features.
  • Another solution may be embodied in a micro analyzer 600 of Figure 21.
  • Micro analyzer 500 may take in a sample stream of fluid 530 through an input to a filter 527. From filter 527, fluid 530 may go through a micro detector ( ⁇ D) 531 on into a l st -level pre-concentrator 526 having parallel channels 527. Fluid 530 may be drawn through channels 527 by pump 521 or by pump 522 through the main portion of micro analyzer 500. Pumps 521 and 522 may operate simultaneously or according to individual schedules. A portion of fluid 530 may go through concentrator 523 and on through flow sensor 532. Concentrator 523 may have an about 100 micron inside diameter. From flow sensor 532, fluid 530 may go through separator 524, micro detector
  • a control device 535 or micro controller or processor may be connected to pumps 521 and 522, detectors 531, 533 and
  • micro analyzer 500 may relate to the introduction of additional pre-concentration dimensions. Each of these supplies an enhanced analyte concentration to the subsequent pre-concentrator operation, as depicted schematically in Figure 17. This is different from previously proposed and built single-level, multi-stage pre-concentrators (PC) .
  • PC single-level, multi-stage pre-concentrators
  • the analyte concentration achieved in the 1 st -level PC and presented for adsorption to the next or last-level (multi-element and multi-stage) pre-concentrator is already enhanced by the l st -level pre-concentrator, and this previous pre-concentrator needs to be large enough to be able to release analyte for the time period needed for about full operation of the 2 nd -level or last pre- concentrator.
  • the multi-level PC operation may be described as going through a sequence of steps: 1) Adsorption time, z a .
  • N 500 used above was entered as row A in the table of Figure 19.
  • Rows B-E list additional examples with increasing number of elements and correspondingly larger total concentration gains achieved.
  • the pressure drop through a typical MEMS channel of 100x100 ⁇ m in cross section increases rapidly as we increase the number of elements, as shown in the table of Figure 20.
  • One way to alleviate this high-pressure drop, which is especially undesirable for systems in which the sample is drawn through via a suction pump, is by setting up the Nx elements in two or more equal and parallel channels.
  • the pressure drop may fall to ⁇ p/q, without changing the soaking time or the needed peak power, because desorption of all the parallel elements of Nx needs to be occurring simultaneously, unless each channel is provided with suitable valving, so that they can be desorbed sequentially.
  • the soaking time could be reduced by this scheme of parallel channels, without valves, by using the two-pumps 521 and 522, as illustrated in Figure 17.
  • the flow through micro analyzer 500 may be unaffected due to the stronger vacuum of its pump 522, but may allow a lst-level pre- concentrator 526 to draw 10-100x larger flow rates with its pump 521 and thus complete this soaking period in a 10-lOOx less time.
  • pump 521 may stop pump 521 and let pump 522 draw sample gas through both concentrator 523 and separators 524 and 525 of micro analyzer 500 and added pre-concentrator 526 with parallel channels 527.
  • Hyper pre-concentrator 526 concentrator 523 and concentrator 623 may have channels which include heater elements 20, 22, 24, 26 and so on with interactive elements 40, 42, 44 and 46 and so on, and alternatively with additional interactive elements 140, 142, 144, 146 and so on, as in Figures 3 -5.
  • Controller 535 and 635 may be electrically connected to each of the heater elements 20, 22, 24, 26.
  • Controller 535 and 635 may energize heater elements 20, 22, 24, and 26 in a time phased sequence (see bottom of Figure 7) such that each of the corresponding interactive elements 40, 42, 44, and 46 become heated and desorb selected constituents into a streaming sample fluid 530 and 630 at about the time when an upstream concentration pulse, produced by one or more upstream interactive elements, reaches the interactive element. Any number of interactive elements may be used to achieve the desired concentration of constituent gases in the concentration pulse.
  • micro analyzer 500 may include: 1) Integrating into other micro analyzers the approach to perform multi-level, multi-stage pre-concentration; 2) Having such approaches accomplished with two pumps, as in micro analyzer 500, except that the purpose for the low- pressure pump was then to simply accelerate the filter purge rate, while here one may take advantage of it as a way to reduce the lst-level pre-concentrator soak time; 3) Performing the Ist-level pre-concentration in such a way that its output can serve briefly as a higher concentration analyte source for the 2nd-level preconcentrator, which may be of the multi-stage type; 4) In cases requiring extreme sensitivity (e.g., for analytes present in sub-ppt levels) , performing the lst-level preconcentration in such a way that its output may serve briefly as a higher concentration analyte source for the 2nd-level pre-concentrator, which in turn may serve as a higher concentration analyte source for the 3rd-level pre-concentrator
  • GC #1 and GC #2 may refer first and second fluid or gas chromatographs, respectively, of a micro analyzer.
  • the first and second separators which may be regarded as columns #1 and #2, respectively, may be a part of GC #1 and GC #2, respectively, along with the other components of the micro analyzer.
  • the advantages of micro analyzer 500 may include: 1) Very short analysis time (due to thin-film-based stationary film support) for ⁇ GCs of such selectivity, peak capacity and sensitivity; 2) Achieving the highest- possible sensitivities (due to very high PC levels) without compromising selectivity or analysis speed; and 3) Simultaneous achievement of the highest-possible sensitivity, selectivity and low energy-per-analysis capabilities (by virtue of using two separate pumps for the low-pressure purge and soak function, and a higher pressure one for the final pre-concentration level and separation functions) .
  • Figure 21 shows a micro analyzer 600 having a GC-GC type two-dimensional structure.
  • a sample gas stream 630 which may also serve as a carrier gas, may enter an input of a particle filter 627 and be pumped by pump 640 via two parallel channels.
  • fluid 630 may proceed through a micro detector 631 and concentrator 623, respectively.
  • Concentrator 623 may have an about 100 micron diameter.
  • Fluid 630 may flow from concentrator 623 through a flow sensor 632 and into a separator 624, which may have an about 100 micron inside diameter. From separator 624, fluid 630 may split to flow through a second separator 625 and a micro detector 633.
  • Separator 625 may have an about 50 micron inside diameter.
  • the fluid 630 output from separator 625 may go through a micro detector 634 and an orifice 644.
  • the fluid 630 output from micro detector 633 may go through a micro valve 641 via line 643.
  • the flow of fluid 630 from a "T" connection at the output of filter 627 pumped through line 646 may be controlled by orifice 645.
  • Control, microcontroller or processor 635 may connected to pump 640, micro detectors 631, 633 and 634, flow sensor 632, concentrator 623, separators 624 and 625 and micro valve 641 to effect appropriate operation of analyzer 600.
  • Each of micro detectors 631, 633 and 634 may be a TCD, MDD, PID, ECD or another kind of detector.
  • Analyzer 600 may have more or fewer detectors than those shown. It may also have additional valves and other components. In other embodiments, micro valve 641 may be eliminated, so that only an uncontrolled pump and critical-orifice flow regulation remains.
  • the main channel is disclosed in the present specification and the second channel, embodying the second ⁇ GC, is "sampling" the emerging and relatively broad (half-width of ⁇ GC #1 peaks - total "free" elution time, t 0 , of ⁇ GC #2) . What cannot be separated via a micro fluid analyzer structure entailing two or more separation film materials built into its integrated structure, may be realized here with an expanded, classical GC-GC structure.
  • a relatively slow-moving 1st GC may generate peaks with a half-width of 10-30 ms, which may get analyzed by a pulsed 2nd GC every 20-100 ms, either on a timed or on a demand basis triggered by a detector at the end of that 1st GC.
  • the second GC may additionally focus the inlet peaks via rapid ( ⁇ 1 ms) heating and cooling of its first heater element, so that its electronically- or micro valve-controlled injection peaks have a half-width of no more than ⁇ 1 ms .
  • the flow of ⁇ GC #1 may be controlled by an active micro-valve 641, while flows through the bypass and column #2 may be controlled, i.e. set, by fixed orifices such as 634 and 645.
  • micro valve 641 may be replaced by an additional, fixed orifice flow control.
  • FIG. 23 shows a micro analyzer 620 having two pumps 621 and 622 for better pumping of fluid 630.
  • Adjacent to flow sensor 632 may be a separator 651 having an about 140 micron inside diameter.
  • Flow 630 from separator may go through a micro detector 652, a micro detector 652 and an orifice 653, respectively.
  • fluid 630 may go through a separator 654 having an about 70 micron inside diameter. From separator 654, fluid 630 may go through a micro detector, an orifice 656 and line 657, respectively, and onto pump 622. Optionally, there may be a micro valve 561, 661 connected to separator 525, 625 and 654 of analyzer 500, 610 and 620, respectively.
  • the broad peak being sampled may be "injected" into ⁇ GC #2 via and after a brief focusing period with the help of a short 1st adsorption element in the ⁇ GC #2 column, preferably made with stationary phase film material and the thickness of column #1. Its subsequent rapid heating and desorption may be used to inject that analyte into ⁇ GC #2, which may feature a narrower column, higher velocity and thinner adsorption film to approach the higher optimal velocity for maximum resolution of ⁇ GC #2.
  • That higher velocity may also be implemented by the lower pressure in that column, either via the large pressure drop throughout the column #2 or via a fixed orifice (not shown in Figure 21) at the junction between the end of above element #1 of column #2 and the remainder of column #2 or at the junction between columns #1 and #2.
  • the focusing process may be repeated either at fixed time intervals or only when column #1 detector senses a peak. Such a focusing operation may then start with a sharp drop in the temperature of that 1st element of column #2, for a period of typical 2 x ⁇ t the peak half-widths, e.g., 2 x 20 ms (see the table 1 in Figure 24) . After such a concentration period, t c , the adsorbed analyte may be rapidly released, to result in peak half-width of about 2 ms .
  • micro analyzers 600, 610 and/or 620 may include: 1) An integration of a multi-stage preconcentrator (PC) - ⁇ GC- ⁇ GC-detector on one chip, with options of further integration of additional detectors, and possibly more importantly the use of an optimal mix and synergy of materials for the PC, GC #1 and GC #2 films and the micro detector, ⁇ D, so that interferents that the ⁇ D is sensitive to are not retained and/or not pre-concentrated, but targeted analytes get pre- concentrated and well separated; 2) A smart and flexible operation of one or both ⁇ GCs of the present micro analyzer, e.g., with a user selection of the number or fraction of total heater array elements to function as pre-concentrators (PC) vs.
  • PC pre-concentrators
  • micro analyzer embodiment #3 may include: 1) A ⁇ GC- ⁇ GC combination to enable greater resolution and thus more complete analysis for a marginal increase in cost for the extra mask and deposition of a different adsorber film material; 2) A cost reduction based on eliminating an active valve and managing proper synchronization via small adjustments in the electronically controlled rate of the "heater-wave" propagation; 3) A further cost reduction due to a reduction in the calibration accuracy previously needed for the flow sensor (the flow may be roughly measured and adjusted with the aid of this flow sensor, but the optimal synchronization may be accomplished as described in item #2 of this paragraph) via electronic adjustment of the heater rate; 4) A further cost and maintenance reduction by using a pump capacity 20-80% higher than needed (at the same cost) , but saving the control design and debugging effort involved with pump rate control (the excess capacity may be simply controlled via the flow limited by the fixed orifices) ; 5) The use of two pumps 621 and 622 as in Figure 23, each designed for its task, is more efficient than using one pump that has to both satisfy the
  • 1/Pfp [l-exp ⁇ -(R SN -l)/4 ⁇ ] (nx, n 2 , ...n ra ) °- 8 (Y+l)
  • R SN signal/noise ratio
  • n x , n 2 , n 3 , ....n m the number of independent measurements or elimination criteria (e.g., filtering steps via selective PC elements, spectrometric resolution elements via ⁇ GC #1 and ⁇ GC #2 or measurement channels via each of several different ⁇ D j )
  • Y l/P, the inverse probability that a particular false positive, once registered, can be confirmed as such via redundant sensors, repeat measurements, neighboring sensors in a sensor grid, and/or an occurrence of appearances of interferents of unusually high cross sensitivity.

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  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

L'invention concerne un micro-analyseur de fluides (500, 600, 610, 620) comprenant un concentrateur (523, 623) et deux séparateurs (524, 525, 624, 625, 651, 654). L'analyseur peut comporter une ou deux pompes (521, 522, 640, 621, 622). L'analyseur (500) peut comporter un hyper pré-concentrateur (526) doté d'un certain nombre de canaux (527). De nombreux détecteurs (531, 532, 533, 534, 631, 632, 633, 634) sont positionnés le long du chemin d'écoulement de l'analyseur. De même, un ou plusieurs orifices (541, 542, 644, 645, 647, 648, 653, 656) et des microvannes (641, 541, 661) peuvent être positionnés dans le chemin d'écoulement. Le concentrateur (523, 623) peut comporter une rangée d'éléments chauffants (20, 22, 24, 26) produisant une impulsion de chaleur se déplaçant le long du chemin du fluide pour fournir une concentration accrue de chaleur dans un fluide. L'analyseur peut être configuré sous la forme d'un chromatographe à fluides ou gaz multiples.
PCT/US2003/030458 2002-09-27 2003-09-26 Micro-analyseur v, vi en phase WO2004038400A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2005501607A JP2006515673A (ja) 2002-09-27 2003-09-26 位相マイクロ型分析器
AU2003298593A AU2003298593A1 (en) 2002-09-27 2003-09-26 Phased sensor system with multiple parallel preconcentrators
EP03796344A EP1563291A2 (fr) 2002-09-27 2003-09-26 Micro-analyseur v, vi en phase

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US41421102P 2002-09-27 2002-09-27
US60/414,211 2002-09-27
US50082103P 2003-09-04 2003-09-04
US60/500,821 2003-09-04
US10/672,483 US7367216B2 (en) 2002-09-27 2003-09-26 Phased micro analyzer V, VI
USUNKNOWN 2007-05-30

Publications (2)

Publication Number Publication Date
WO2004038400A2 true WO2004038400A2 (fr) 2004-05-06
WO2004038400A3 WO2004038400A3 (fr) 2005-03-24

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JP (1) JP2006515673A (fr)
AU (1) AU2003298593A1 (fr)
WO (1) WO2004038400A2 (fr)

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US11125732B2 (en) 2016-04-15 2021-09-21 Yale University System, apparatus, and method for monitoring organic compounds in a gas environment
CN114017007A (zh) * 2021-05-28 2022-02-08 中海油能源发展股份有限公司 一种可视化油气水分离计量实验装置及其实验方法

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JP5170019B2 (ja) * 2009-07-13 2013-03-27 株式会社島津製作所 ガス分析装置

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US11125732B2 (en) 2016-04-15 2021-09-21 Yale University System, apparatus, and method for monitoring organic compounds in a gas environment
US11614431B2 (en) 2016-04-15 2023-03-28 Yale University System, apparatus, and method for monitoring organic compounds in a gas environment
CN114017007A (zh) * 2021-05-28 2022-02-08 中海油能源发展股份有限公司 一种可视化油气水分离计量实验装置及其实验方法

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AU2003298593A1 (en) 2004-05-13
WO2004038400A3 (fr) 2005-03-24
JP2006515673A (ja) 2006-06-01
AU2003298593A8 (en) 2004-05-13

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