WO2004029607A1 - アルコール濃度検出装置およびそれを用いたアルコール濃度検出方法、ならびにアルコール濃度検出センサーの製造方法 - Google Patents
アルコール濃度検出装置およびそれを用いたアルコール濃度検出方法、ならびにアルコール濃度検出センサーの製造方法 Download PDFInfo
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- WO2004029607A1 WO2004029607A1 PCT/JP2003/012504 JP0312504W WO2004029607A1 WO 2004029607 A1 WO2004029607 A1 WO 2004029607A1 JP 0312504 W JP0312504 W JP 0312504W WO 2004029607 A1 WO2004029607 A1 WO 2004029607A1
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- WO
- WIPO (PCT)
- Prior art keywords
- alcohol concentration
- concentration detection
- detection sensor
- photoresist
- wiring pattern
- Prior art date
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- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 title claims abstract description 247
- 238000001514 detection method Methods 0.000 title claims abstract description 130
- 238000000034 method Methods 0.000 title claims abstract description 32
- 239000011347 resin Substances 0.000 claims abstract description 66
- 229920005989 resin Polymers 0.000 claims abstract description 66
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 238000012360 testing method Methods 0.000 claims abstract description 34
- 229920002120 photoresistant polymer Polymers 0.000 claims description 64
- 239000000758 substrate Substances 0.000 claims description 54
- 238000000576 coating method Methods 0.000 claims description 46
- 239000011248 coating agent Substances 0.000 claims description 43
- 229910052751 metal Inorganic materials 0.000 claims description 38
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- 239000010409 thin film Substances 0.000 claims description 22
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- 239000011888 foil Substances 0.000 claims description 17
- 230000010355 oscillation Effects 0.000 claims description 11
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229920001721 polyimide Polymers 0.000 claims description 7
- 239000009719 polyimide resin Substances 0.000 claims description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 6
- 239000000919 ceramic Substances 0.000 claims description 4
- 239000011889 copper foil Substances 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 229910052697 platinum Inorganic materials 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
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- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229920000647 polyepoxide Polymers 0.000 claims description 3
- 229920002803 thermoplastic polyurethane Polymers 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 2
- 238000001312 dry etching Methods 0.000 claims description 2
- 229910052719 titanium Inorganic materials 0.000 claims description 2
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- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 12
- 239000006079 antiknock agent Substances 0.000 description 6
- 230000000694 effects Effects 0.000 description 6
- 230000006866 deterioration Effects 0.000 description 5
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
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- -1 methyl tertiary butyl Chemical group 0.000 description 4
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- 230000032683 aging Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- BZLVMXJERCGZMT-UHFFFAOYSA-N Methyl tert-butyl ether Chemical compound COC(C)(C)C BZLVMXJERCGZMT-UHFFFAOYSA-N 0.000 description 2
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- 206010007269 Carcinogenicity Diseases 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 1
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- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 1
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
- G01N27/226—Construction of measuring vessels; Electrodes therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/26—Oils; Viscous liquids; Paints; Inks
- G01N33/28—Oils, i.e. hydrocarbon liquids
- G01N33/2835—Specific substances contained in the oils or fuels
- G01N33/2852—Alcohol in fuels
Definitions
- Concentration detecting apparatus for alcohol method for detecting alcohol concentration using the same, and method for producing alcohol concentration detecting sensor
- the present invention relates to an alcohol concentration detecting device for detecting an alcohol concentration in a test liquid such as gasoline, an alcohol concentration detecting method using the same, and a method for manufacturing an alcohol concentration detecting sensor.
- high-octane gasoline with an increased octane number of lead, benzene, etc. to prevent knocking
- so-called high-octane gasoline methyl tertiary butyl ethereal or methinolate t-butyl ethereal (MTBE)
- MTBE methinolate t-butyl ethereal
- MTBE is said to have carcinogenicity, and therefore, such high-octane gasoline, methino-letter-shary butinoetate or methinolate
- alcohol such as ethanol
- anti-knock agent It has been proposed to add about 10 to 15% to gasoline.
- Patent Literature 1 discloses an optical alcohol concentration measuring device that detects the concentration of alcohol using the refractive index of light. That is, as shown in FIG. 19, the optical alcohol concentration measuring apparatus 100 of Patent Document 1 has a property that it is hardly absorbed by alcohol such as ethanol which has passed through the liquid from the first light projecting section 102.
- the first light receiving unit 104 receives light having a wavelength having the following formula, and outputs a detection signal corresponding to the alcohol concentration in the liquid.
- the measurement unit 110 compares the detection signal from the first light-receiving unit 104 with the detection signal from the second light-receiving unit 108 to determine the alcohol concentration in the liquid. It is configured to measure.
- Non-Patent Document 1 a capacitance-type alcohol concentration sensor
- the concentration of methanol mixed in gasoline is determined using the difference in the relative permittivity of gasoline and methanol (the relative permittivity of gasoline 2 and the relative permittivity of methanol 33.6). This method detects the concentration of methanol by measuring the oscillation frequency from the capacitance between them.
- the capacitance-type alcohol concentration sensor 200 of Non-Patent Document 1 has an outer electrode 204 and a center electrode 206 insulated inside a housing 202. This is a configuration mounted via a resin 208.
- the optical alcohol concentration measurement device of Patent Document 1 uses transmitted light, it is easily affected by the composition of gasoline.For example, when the liquid to be inspected is not transparent due to impurities or the like, The measurement cannot be performed or an accurate measurement cannot be performed.
- the capacitance c s is represented by the following equation.
- Equation 1 S is the facing area of the electrodes, D is the distance between the electrodes, ⁇ . Is the relative permittivity of vacuum (8.854 ⁇ -12 F / m), £ ra is the relative permittivity of alcohol, frg is the relative permittivity of gasoline, and ⁇ is the alcohol concentration (%).
- the capacitance-type alcohol concentration sensor itself becomes large as in Non-Patent Document 1.
- the handling and application to automobiles are subject to design restrictions.
- the capacitance-type alcohol concentration sensor of Non-Patent Document 1 the sensor must be connected to, for example, a body such as a gasoline pipe of an automobile, but noise such as electromagnetic waves from the body causes alcohol concentration. This will affect the detection circuit and prevent accurate measurement.
- the present invention is compact and compact, can be installed anywhere, has a high degree of freedom in design, has good insulation between electrodes, is free from the influence of moisture, and is free from electromagnetic waves from a body such as an automobile.
- an alcohol concentration detecting device capable of detecting the alcohol concentration in a test liquid such as gasoline, which is capable of performing accurate measurement of the alcohol concentration, and an alcohol concentration detecting device capable of accurately measuring the alcohol concentration.
- An object of the present invention is to provide a method for detecting an alcohol concentration used and a method for producing an alcohol concentration detection sensor.
- an alcohol concentration detecting device of the present invention comprises a liquid to be inspected between electrodes of an alcohol concentration detecting sensor.
- the An alcohol concentration detection device for detecting an alcohol concentration in a body wherein the alcohol concentration detection sensor comprises: a base resin film; an electrode wiring pattern formed on the base resin film; and a surface of the electrode wiring pattern.
- An alcohol concentration detection sensor body comprising: an insulating resin coated with an alcohol.
- the distance between the electrodes can be reduced by using the electrode wiring pattern formed on the base resin film, so that the capacitance C s is increased as is clear from Expression 2 described later. Yes, and the measurement results are good.
- the alcohol concentration detection sensor is composed of a base resin film, an electrode wiring pattern formed on the base resin film, and an insulating resin covering the surface of the electrode wiring pattern, It is flexible, thin, extremely small, and compact, and can be installed anywhere, providing greater design freedom.
- the surface of the electrode wiring pattern is covered with an insulating resin, the insulation between the electrodes is good, there is no effect of moisture, and it can be shielded from being affected by electromagnetic waves from the body of automobiles, etc.
- accurate measurement of alcohol concentration can be performed.
- the electrode does not directly come into contact with the liquid to be inspected such as gasoline, it is possible to accurately and quickly detect the alcohol concentration without causing deterioration due to aging or foreign matter in the gasoline.
- the alcohol concentration detection device is characterized in that the alcohol concentration detection sensor is integrally attached to a substrate.
- the alcohol concentration detection sensor is attached to the substrate, so that the alcohol concentration detection sensor body is attached to the device, Installation becomes easy.
- the electrode wiring pattern selectively etches a conductive metal foil laminated on one surface of the base resin film, and the wiring pattern having a predetermined shape is formed. Is formed. With this configuration, the distance between the electrodes is extremely small by etching, for example, 5! Since an electrode wiring pattern in the range of about 50 ⁇ m can be obtained, the capacitance C s can be increased, and the measurement result becomes good.
- the senor itself is thin and extremely small, compact, and can be installed anywhere, increasing design flexibility.
- the alcohol concentration detecting device of the present invention measures the change in the relative dielectric constant of the test liquid between the electrodes by introducing the liquid to be inspected between the electrodes of the alcohol concentration detecting sensor at the oscillation frequency.
- An alcohol concentration detection device for detecting the alcohol concentration in the test liquid is an alcohol concentration detection device for detecting the alcohol concentration in the test liquid.
- the alcohol concentration detection sensor includes a substrate, an electrode wiring pattern formed on the substrate, and an insulating coating covering a surface of the electrode wiring pattern.
- the distance between the electrodes can be reduced by using the electrode wiring pattern formed on the substrate, so that the capacitance C s can be increased as is clear from Equation 2 described later.
- the measurement results are good.
- the alcohol concentration detection sensor is composed of the substrate, the electrode wiring pattern formed on the substrate, and the insulating coating covering the surface of the electrode wiring pattern, the sensor itself is thin and extremely small, and is compact. It can be installed anywhere, increasing the degree of freedom in design.
- the surface of the electrode wiring pattern is covered with an insulating coating,
- the insulation between the electrodes is good, there is no influence of moisture, it can be shielded from the influence of electromagnetic waves from the body of a car or the like, and it is possible to measure alcohol concentration accurately.
- the electrode does not directly come into contact with the liquid to be inspected such as gasoline, it is possible to accurately and quickly detect the alcohol concentration without deteriorating with time.
- the provision of the substrate makes it easy to assemble and attach the alcohol concentration detection sensor to the device.
- the electrode wiring pattern is formed by selectively etching a conductive metal thin film formed on one surface of the substrate by sputtering to form a wiring pattern having a predetermined shape. It is characterized by
- the distance between the electrodes is extremely small by sputtering, for example, 5 ⁇ !
- An electrode wiring pattern with a thickness of 0.1 to 5 ⁇ m can be obtained by sputtering at a distance between electrodes in the range of about 50 m to about 50 ⁇ m.Thus, the capacitance C s can be increased and the measurement results can be obtained. Is good.
- the sensor itself is thin and extremely small, compact, and can be installed anywhere, increasing design flexibility.
- the insulating coating is an insulating coating formed by a chemical vapor deposition (CVD) method.
- the alcohol concentration detection device of the present invention is characterized in that the electrode wiring pattern has a shape in which a plurality of comb-shaped positive and negative electrodes are alternately interwoven.
- the plurality of comb-shaped positive and negative electrodes are alternately interdigitated, so that a plurality of electrodes having extremely small distances between the electrodes can be compacted as a whole. Can be arranged.
- the distance between the electrodes is very small due to etching and sputtering. Since an electrode wiring pattern in a range of about 50 m can be obtained, the capacitance C s can be increased, and the measurement result becomes good.
- the senor itself is thinner, extremely small and compact, and can be installed anywhere, increasing design flexibility.
- an alcohol concentration detection method of the present invention is an alcohol concentration detection method for detecting an alcohol concentration in a test liquid using the alcohol concentration detection device according to any of the above.
- the alcohol in the test liquid is measured. It is characterized in that the concentration is detected.
- the distance between the electrodes can be reduced by using an electrode wiring pattern formed on the base resin film or the substrate, so that the capacitance C s can be increased, and the measurement results are good.
- the alcohol concentration detection sensor power S the sensor itself is thin and extremely small and compact, and can be installed anywhere, increasing the degree of freedom in design.
- the surface of the electrode wiring pattern is covered with insulating resin or insulating coating.
- the insulation between the electrodes is good, there is no influence of moisture, it can be shielded from the influence of electromagnetic waves from the body of a car, etc., and it is possible to measure alcohol concentration accurately It is.
- the electrode does not directly come into contact with the liquid to be inspected such as gasoline, it is possible to accurately and quickly detect the alcohol concentration without causing deterioration due to aging or foreign matter in the gasoline.
- the test liquid is gasoline containing alcohol.
- the concentration of alcohol in gasoline can be detected accurately and quickly.
- gasoline corresponding to the amount of ethanol added as an anti-knock agent.
- the torque can be controlled to be constant.
- the method for producing an alcohol concentration detection sensor according to the present invention is a method for producing an alcohol concentration detection sensor
- An etching process for removing the conductive metal foil portion not covered with the photoresist by etching with an etchant A photoresist dissolving and removing step of dissolving and removing the photoresist, and an insulating resin applying step of applying an insulating resin on the surface from which the photoresist has been removed to obtain an alcohol concentration detection sensor integrated with the surface,
- the distance between the electrodes is very small, for example, 5! Since the electrode wiring pattern in the range of about 50 / m can be obtained, the capacitance C s can be increased, and the measurement results are good.In addition, the sensor itself is thin, extremely small and compact, and can be installed anywhere. This makes it possible to supply alcohol concentration detection sensors easily and in large quantities with high design flexibility.
- the method for producing an alcohol concentration detection sensor according to the present invention is characterized by including a substrate attaching step of attaching the alcohol concentration detection sensor obtained in the insulating resin applying step to a substrate.
- the alcohol concentration detection sensor is attached to the physical strength substrate, so that the alcohol concentration detection sensor can be easily assembled and mounted on the device, and the alcohol concentration detection sensor can be supplied easily and in large quantities. be able to.
- the base resin film is a polyimide resin film.
- the electrode wiring pattern can be formed on a flexible, thin and small polyimide resin film, and the sensor itself can be thin and extremely small and compact.
- a high alcohol concentration detection sensor can be supplied easily and in large quantities.
- the conductive metal foil is a copper foil.
- the electrode wiring pattern can be formed with copper foil, so that an alcohol concentration detection sensor that has good conductivity, can detect alcohol concentration very accurately, and quickly can be easily and simply provided. It can be supplied in large quantities.
- the insulating resin is made of one or more insulating resins selected from a urethane resin, a polyimide resin, and an epoxy resin.
- the insulating resin can be easily applied to the surface of the electrode wiring pattern.
- the method for producing an alcohol concentration detection sensor according to the present invention is a method for producing an alcohol concentration detection sensor
- the distance between the electrodes is very small, for example, the distance between the electrodes is in a range of about 5 m to 50 m, and the thickness is also 0.1 to 5 ⁇ m by sputtering.
- the thickness of the electrode wiring pattern can be increased, so that the capacitance C s can be increased and the measurement results are good.
- the sensor itself is thin and extremely small, compact, and can be installed anywhere. An alcohol concentration detection sensor with a high degree of freedom can be supplied easily and in large quantities.
- the substrate is made of one or more substrates selected from ceramics, glass, and resin substrates.
- the method for producing an alcohol concentration detection sensor according to the present invention is characterized in that the conductive metal thin film is made of one or more conductive metal thin films selected from platinum, nickel, copper, and titanium.
- the manufacturing method of the alcohol concentration detection sensor of the present invention an insulating coating, characterized in that it consists of S i 0 2, A 1 2 0 3 1 kind selected from such or more dense insulating coating.
- the electrode wiring pattern has a shape in which a plurality of comb-shaped positive and negative electrodes are alternately interwoven.
- FIG. 1 is a schematic top view of an embodiment of the alcohol concentration detecting device according to the present invention.
- FIG. 2 is a cross-sectional view taken along line AA of FIG.
- FIG. 3 is a right side view of FIG.
- FIG. 4 is a left side view of FIG.
- FIG. 5 is a graph showing the relationship between alcohol concentration and capacitance.
- FIG. 6 is a schematic circuit configuration diagram of the alcohol concentration detection device of the present invention.
- FIG. 7 is a schematic diagram of a square wave voltage applied by the alcohol concentration detection device of the present invention.
- FIG. 8 is a graph showing the relationship between alcohol concentration and oscillation frequency.
- FIG. 9 is a schematic perspective view of an embodiment of the alcohol concentration detection sensor of the alcohol concentration detection device according to the present invention.
- FIG. 10 is a schematic top view showing the electrode wiring pattern of FIG.
- FIG. 11 is an enlarged view of part B of FIG.
- FIG. 12 is a partially enlarged cross-sectional view taken along line CC of FIG.
- FIG. 13 is a schematic view showing a method for manufacturing the alcohol concentration detection sensor 1 of the alcohol concentration detection device of the present invention.
- FIG. 14 is a schematic perspective view of another embodiment of the alcohol concentration detection sensor of the alcohol concentration detection device of the present invention.
- FIG. 15 is a schematic top view showing the electrode wiring pattern of FIG.
- FIG. 16 is an enlarged view of part B of FIG.
- FIG. 17 is a partially enlarged cross-sectional view taken along line CC of FIG.
- FIG. 18 is a schematic view showing a method for manufacturing the alcohol concentration detection sensor 1 of the alcohol concentration detection device of the present invention.
- FIG. 19 is a schematic diagram of a conventional optical alcohol concentration measuring device.
- FIG. 20 is a sectional view of a conventional capacitance type alcohol concentration sensor.
- BEST MODE FOR CARRYING OUT THE INVENTION FIG. 1 is a schematic top view of an embodiment of the alcohol concentration detecting device of the present invention
- FIG. 2 is a cross-sectional view taken along line AA of FIG. 1
- FIG. 3 is a right side view of FIG. 4 is a left side view of FIG.
- the alcohol concentration detecting device 10 of the present invention includes an alcohol concentration detecting device main body 12 and a first stream formed inside the alcohol concentration detecting device main body 12. It has a passage 14 and a second passage 16.
- the liquid to be inspected flows from the inlet 18 into the first flow path 14.
- the test liquid that has entered enters the alcohol content detection chamber 56, while the test liquid that has flowed into the first flow path 14 via the test liquid inlet 18 After that, if the test liquid contains alcohol by the alcohol concentration detection sensor 58 while temporarily staying in the alcohol detection chamber 56, the alcohol concentration is detected after the alcohol concentration is detected.
- the liquid is discharged from the detection chamber 56 through the inspection liquid discharge port 54 of the second flow path 16.
- the alcohol concentration detection sensor 58 uses the difference in capacitance based on the difference between the relative permittivity of the alcohol contained in the test liquid and the relative permittivity of the test liquid based on Equation 2 below. Things.
- the alcohol concentration and the capacitance have a correlation. It is configured to detect the concentration.
- FIG. 5 shows an embodiment in which ethanol is used as the alcohol and gasoline is used as the test liquid.
- the alcohol concentration detection device 10 of the present invention using the alcohol concentration detection sensor 58 includes a detection control unit 76 having a configuration as shown in the schematic circuit configuration diagram of FIG.
- the detection control unit 76 determines that one electrode of the alcohol concentration detection sensor 58 is grounded G1 and the other electrode of the alcohol concentration detection sensor 58 is branched. Operational amplifier 7 8 Connected to the Lass input and the Minus input.
- the resistors R1 to R3 are connected to the minus 82 a of the power supply 82, and the minus input of the amplifier 78 is connected between R1 and R2, and the amplifier 8 is connected between R2 and R3.
- the positive input of 0 is connected and the end of R3 is installed G2.
- the outputs of these amplifiers 78 and 80 are connected to the S and R inputs of a flip-flop circuit 84, respectively.
- the output of the flip-flop circuit 84 is input to the frequency counter of the computer 86.
- the wiring of one electrode of the alcohol concentration detection sensor 58 is branched and connected to the positive power supply 82 through the resistors RA and RB.
- a transistor 88 is connected between the resistors RA and RB, and the output of the transistor is connected between the output of the flip-flop circuit 84 and the computer 86.
- G3 is the ground of the transistor 88.
- a square wave voltage as shown in FIGS. 6 and 7 is applied to 90 in FIG.
- the amplitude T can be determined by appropriately determining the duty ratio R AZ (RA + 2 R B). In this example, 1.44 was used as the duty ratio.
- the data of FIGS. 5 and 8 are stored in advance in the storage unit of the computer, and the alcohol concentration can be detected by comparing the data with the data obtained by the detection control unit 76.
- Equation 2 it can be seen that it is better to reduce the distance D between the electrodes in order to increase the capacitance C s in order to improve the measurement results.
- the alcohol concentration detection sensor 58 is configured as follows.
- FIG. 9 is a schematic perspective view of an embodiment of the alcohol concentration detection sensor 58 of the alcohol concentration detection device of the present invention
- FIG. 10 is a schematic top view showing the electrode wiring pattern of FIG. 9, and
- FIG. 10 is an enlarged view of a portion B in FIG. 10, and
- FIG. 12 is a partially enlarged sectional view taken along line CC in FIG.
- the alcohol concentration detection sensor 58 includes a base resin film 92 and electrode wiring patterns 94, 96 formed on the base resin film 92.
- An alcohol concentration detection sensor body 11 comprising an insulating resin 98 covering the surfaces of the electrode wiring patterns 94, 96 is provided. Then, the alcohol concentration detecting sensor body 11 is attached to the substrate 13 with an adhesive (not shown).
- the thickness T1 is not particularly limited.
- each of the patterns 96 has a shape in which a plurality of comb-shaped positive electrodes 94 a and negative electrodes 96 a are alternately interwoven.
- reference numerals 94 b and 96 b indicate extraction electrode portions, respectively.
- the distance between the electrodes is extremely small, and a plurality of electrodes can be arranged compactly as a whole.
- the electrode length L1 is not particularly limited, but is preferably 100 or more in consideration of the capacitance of the liquid to be inspected.
- L 1 having a length of 1 O mm was used.
- the width W1 of the positive electrode 94a and the negative electrode 96a is not particularly limited, but is 1 to 50 in consideration of the capacitance. ⁇ Preferably, it should be 5 to 15 m.
- the number of the comb-shaped positive electrode 94a and the negative electrode 96a is not particularly limited. However, considering the capacitance, one or more, preferably a larger number is desired. Good. In this embodiment, 64 pairs (total of 128 electrodes) of comb-shaped electrodes were used.
- the thickness T2 of the electrode wiring patterns 94 and 96 is not particularly limited, but is 1 to 50 m in consideration of the capacitance. Preferably, it is 5 to 15 / im. In this example, the one having T2 of 10 m was used.
- the electrode wiring patterns 94 and 96 are formed by selectively etching a conductive metal foil laminated on one surface of the base resin film 92. A wiring pattern having a fixed shape is formed.
- Such a conductive metal foil is not particularly limited, but is preferably a copper foil, so that the conductivity is good, and the concentration of the alcohol can be detected very accurately and quickly. Becomes possible.
- the insulating resin 98 is preferably made of one or more insulating resins selected from urethane resin, polyimide resin, and epoxy resin. By using such a resin as the insulating resin 98, the insulating resin can be easily applied to the surfaces of the electrode wiring patterns 94 and 96.
- the thickness T3 of the insulating resin 98 is not particularly limited as long as considering that the capacitance of the insulating resin itself does not affect the sensing. It is desirable to keep the thickness thinner while maintaining the insulation and strength. In the present embodiment, T3 of 18 / zm was used.
- the material of the substrate 13 is not particularly limited, but a glass substrate, a ceramic substrate, a resin substrate, or the like can be used in consideration of the relative dielectric constant.
- the thickness is not particularly limited, but is preferably 100 to ; ⁇ ⁇ ⁇ ⁇ ⁇ , preferably 250 to 600 ⁇ ⁇ in consideration of insulation, strength, and the like. It is desirable. In this example, the one having a thickness of 360 m was used.
- the distance between the electrodes can be reduced by using the electrode wiring patterns 94 and 96 formed on the base resin film 92.
- the capacitance C s can be increased, and the measurement results are good.
- the alcohol concentration detection sensor 58 is used for the base resin film 92, the electrode wiring patterns 94, 96 formed on the base resin film 92, and the surface of the electrode wiring patterns 94, 96. It is composed of insulating resin 98 covered with The sensor itself is flexible, thin, extremely small, and compact, and can be installed anywhere, increasing design flexibility.
- the surfaces of the electrode wiring patterns 94 and 96 are covered with the insulating resin 98, the insulation between the electrodes is good, there is no influence of moisture, and the surface is affected by electromagnetic waves from a body such as an automobile. It is possible to shield so that it does not occur, and it is also possible to perform accurate measurement of alcohol concentration.
- the electrode does not directly come into contact with the liquid to be inspected such as gasoline, it is possible to accurately and quickly detect the alcohol concentration without deteriorating with time.
- a conductive metal foil 15 is attached to one surface of the base resin film 92 by pressure bonding using an adhesive (not shown). Genus foil attaching process).
- a photoresist 17 is applied to the entire surface of the conductive metal foil 15 using, for example, a spin coater (3000 rpm). (Photoresist coating step).
- the photoresist 17 is formed into a desired electrode wiring pattern shape using a photoresist mask 19 having a shape corresponding to a predetermined wiring pattern. For example, exposure is performed by ultraviolet rays (photo resist exposure step). Then, as shown in FIG. 13 (D), the exposed photoresist portion 17a is dissolved and removed with a developing solution (photoresist dissolving and removing step).
- the conductive metal foil portion 15a that is not covered with the photoresist 17b is etched with an etching solution such as acid or aluminum. It is removed by processing to obtain a predetermined wiring pattern shape 15b (etching process).
- the photoresist 17b is dissolved and removed with a dissolving and removing solution such as acetone (photoresist dissolving and removing step).
- a dissolving and removing solution such as acetone
- an insulating resin 98 is applied on the surface from which the photoresist has been removed by, for example, screen printing to obtain an alcohol concentration detection sensor body 11 (Insulating resin coating process).
- the alcohol concentration detection sensor body 11 obtained in the insulating resin coating step is attached to the substrate 13 (substrate attaching step).
- the distance between the electrodes is extremely small, for example, 5 ⁇ ! Since an electrode wiring pattern in the range of about 5 O / m can be obtained, the capacitance C s can be increased, the measurement results are good, and the force is small, the sensor itself is extremely small and compact. However, it is possible to easily and in large quantities supply alcohol concentration detection sensors that can be installed anywhere and have a high degree of freedom in design.
- FIG. 14 is a schematic perspective view of another embodiment of the alcohol concentration detection sensor 58 of the alcohol concentration detection device of the present invention.
- FIG. 15 is a schematic top view showing the electrode wiring pattern of FIG. Is an enlarged view of a portion B in FIG. 15, and
- FIG. 17 is a partially enlarged sectional view taken along line C-C of FIG.
- the alcohol concentration detection sensor 58 of this embodiment has basically the same configuration as the alcohol concentration detection sensor 58 of the embodiment shown in FIGS. , And are indicated by reference numbers with dashes, and detailed descriptions thereof are omitted.
- the substrate 92 ′, the electrode wiring patterns 94 ′, 96 ′ formed on the substrate 92 ′, and the electrode wiring patterns 94 ′, 96 ′ are formed. And an insulating coating 98 'covering the surface.
- the electrode wiring patterns 94 ′ and 96 ′ are formed by selectively etching a conductive metal thin film formed by sputtering on one surface of the substrate 92 ′ to form a wiring pattern having a predetermined shape. It was done.
- Such a conductive metal thin film is not particularly limited, but nickel, copper, platinum or the like can be used.Preferably, platinum is preferable in consideration of oxidation resistance and the like. .
- the thickness T 2 of the electrode wiring patterns 94 ′ and 96 ′ is not particularly limited. 1 to: I., preferably 0.1 to 0.5 m.
- the material of the substrate 92 ′ is not particularly limited. However, considering that the substrate 92 ′ is a material that is not affected by sputtering or the like, a glass substrate, a ceramic substrate such as alumina, a resin substrate, or the like can be used. Can be adopted. Although the thickness is not particularly limited, it is desirably 100 to 1,000 zm, preferably 250 to 600 / _im in consideration of insulation properties, strength, and the like. In this example, a layer having a thickness of 360 ⁇ was used. Although the size depends on the size of the sputtering apparatus, a size of 2 inch square or 4 inch square can be preferably used.
- insulating coating 98 as is, but is not particularly limited, S i 0 2, A 1 2 O 3 that consists of the selected one or more dense insulating coating and the like preferably.
- the insulating coating 98 ' is preferably formed by chemical vapor deposition (CVD).
- a chemical vapor deposition in (CVD) for example, such as S i 0 2, A 1 2 0 3, gasoline, thin very dense have such being affected by the inspection liquid such as an alcohol
- CVD chemical vapor deposition in
- an insulating coating can be obtained, and the sensor itself is thin and extremely small, making it compact.
- the thickness T3 of the insulating coating 98 ' is not particularly limited, but the capacitance of the insulating coating itself such as insulating property and strength is sensitive. Considering that there is no effect, it is desirable that the thickness be thinner while maintaining insulation and strength. In this example, one having T 3 of 1 ⁇ m was used.
- the distance between the electrodes can be reduced by using the electrode wiring patterns 94 ′ and 96 ′ formed on the substrate 92 ′.
- the capacitance C s can be increased, and the measurement result becomes good.
- the alcohol concentration detection sensor covers the surface of the substrate 9 2 ′, the electrode wiring patterns 94, 96 ′ formed on the substrate 92 ′, and the electrode wiring patterns 94 ′, 96 ′.
- the sensor itself is thin and extremely small and compact because it is composed of the insulating coating 98 ', so that it can be installed anywhere and has a high degree of freedom in design.
- the surface of the electrode wiring pattern is covered with the insulating coating 98 ', insulation between the electrodes is good, there is no influence of moisture, and shielding can be performed so as not to be affected by electromagnetic waves from the body of automobiles. Moreover, accurate measurement of alcohol concentration can be performed.
- the electrode does not directly contact the test liquid such as gasoline, it does not cause deterioration due to aging or foreign matter in gasoline, etc.
- the alcohol concentration can be detected quickly.
- the substrate 92 ' is provided, it is easy to assemble and attach the alcohol concentration detection sensor to the device.
- the distance between the electrodes is extremely small by sputtering, for example, the distance between the electrodes is in the range of about 5 m to 50 ⁇ m, and the thickness of the electrode is also 0.1 to 5 Aim by sputtering. Since a wiring pattern can be obtained, the capacitance C s can be increased, and the measurement result becomes good.
- a conductive metal thin film 15 ′ is formed on one surface of a substrate 92 ′ by sputtering (conductive metal thin film forming step).
- a photoresist 17 is applied on the entire surface of the conductive metal thin film 15 using, for example, a spin coater (3000 rpm). Photoresist coating process).
- the photoresist 17 is formed into a desired electrode wiring pattern shape using a photoresist mask 19 having a shape corresponding to a predetermined wiring pattern. Exposure with ultraviolet light (photoresist exposure step). Then, as shown in FIG. 18 (D), the exposed photoresist portion 17a is dissolved and removed by a developer (photoresist dissolving and removing step).
- the conductive metal thin film portion 15a not covered with the photoresist 17b is dry-etched using, for example, argon ions. It is removed to obtain a predetermined wiring pattern shape 15b (etching process).
- a dissolving and removing solution such as acetone.
- Dissolve and remove resist 17b photoresist dissolving and removing step.
- an insulating coating 98 ' is formed on the surface from which the photoresist has been removed by chemical vapor deposition (CVD) (insulating coating forming process).
- the distance between the electrodes is extremely small, for example, 5 ⁇ !
- An electrode wiring pattern with a thickness of 0.1 to 5 ⁇ can be obtained by sputtering at a distance between the electrodes in the range of about 50 ⁇ to about 0.1 ⁇ , so that the capacitance C s can be increased.
- the measurement results are good, the force is small, the sensor itself is extremely small and compact, and it can be installed anywhere and has a high degree of design freedom. it can.
- the distance between the electrodes can be reduced, so that the capacitance C s can be increased, as is clear from Equation 2, and the measurement results Is good.
- the alcohol concentration detection sensor is composed of the base resin film, the electrode wiring pattern formed on the base resin film, and the insulating resin covering the surface of the electrode wiring pattern,
- the sensor itself is flexible, thin, extremely small, compact, and can be installed anywhere The degree of freedom increases.
- the surface of the electrode wiring pattern is covered with an insulating resin, the insulation between the electrodes is good, there is no effect of moisture, and it can be shielded from being affected by electromagnetic waves from the body of a car or the like. It is possible to carry out accurate measurement of alcohol concentration.
- the distance between the electrodes is extremely small by etching, for example, 5 ⁇ ! Since an electrode wiring pattern in a range of about 50 ⁇ m can be obtained, the capacitance C s can be increased, and the measurement result becomes good.
- the distance between the electrodes can be reduced by using the electrode wiring pattern formed on the substrate, so that the capacitance C s can be increased and the The result is good.
- the alcohol concentration detecting sensor is composed of the substrate, the electrode wiring pattern formed on the substrate, and the insulating coating covering the surface of the electrode wiring pattern, the sensor itself is thin and extremely thin. It is small and compact, and can be installed anywhere, providing a high degree of design freedom.
- the surface of the electrode wiring pattern is covered with an insulating coating, the insulation between the electrodes is good, there is no effect of moisture, and it can be shielded from the influence of electromagnetic waves from the body of automobiles and the like. It is possible to perform an accurate measurement of alcohol concentration.
- the distance between the electrodes is extremely small due to sputtering, for example, the distance between the electrodes is in the range of about 5 / zm to 50 ⁇ , and the thickness is also reduced to 0. Since an electrode wiring pattern having a thickness of 1 to 5 ⁇ can be obtained, the capacitance C s can be increased, and the measurement result becomes good.
- CVD chemical vapor deposition
- the electrode does not directly come into contact with the liquid to be inspected such as gasoline, it is possible to accurately and quickly detect the alcohol concentration without causing deterioration due to deterioration with time or foreign substances in the gasoline.
- the provision of the substrate makes it easy to assemble and attach the alcohol concentration detection sensor to the device.
- the plurality of comb-shaped positive and negative electrodes are alternately interwoven, the plurality of electrodes having a very small distance between the electrodes is compacted as a whole. Can be arranged at
- the distance between the electrodes is very small due to etching and sputtering, for example, 5! Since an electrode wiring pattern in the range of about 50 ⁇ m can be obtained, the capacitance C s can be increased, and the measurement result becomes good. Further, according to the present invention, the concentration of alcohol in gasoline can be detected accurately and quickly, and gasoline corresponding to the addition amount of alcohol, for example, ethanol, is added as an anti-knock agent; The invention is an extremely excellent invention that has many remarkable and unique effects such as controlling the torque to be constant.
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Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/529,709 US20060042940A1 (en) | 2002-09-30 | 2003-09-30 | Alcohol concentration detector, method of detecting alcohol concentration therewith and process for producing alcohol concentration detection sensor |
EP03798561A EP1548426A4 (en) | 2002-09-30 | 2003-09-30 | ALCOTEST, ASSOCIATED ALCOHOL CONCENTRATION DETECTION METHOD, AND ALCOHOL CONCENTRATION DETECTOR MANUFACTURING METHOD |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002/286668 | 2002-09-30 | ||
JP2002286668A JP3580547B2 (ja) | 2002-09-30 | 2002-09-30 | アルコール濃度検出装置およびそれを用いたアルコール濃度検出方法、ならびにアルコール濃度検出センサーの製造方法 |
Publications (1)
Publication Number | Publication Date |
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WO2004029607A1 true WO2004029607A1 (ja) | 2004-04-08 |
Family
ID=32040607
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2003/012504 WO2004029607A1 (ja) | 2002-09-30 | 2003-09-30 | アルコール濃度検出装置およびそれを用いたアルコール濃度検出方法、ならびにアルコール濃度検出センサーの製造方法 |
Country Status (4)
Country | Link |
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US (1) | US20060042940A1 (ja) |
EP (1) | EP1548426A4 (ja) |
JP (1) | JP3580547B2 (ja) |
WO (1) | WO2004029607A1 (ja) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007263674A (ja) * | 2006-03-28 | 2007-10-11 | Nippon Steel Corp | 亀裂検出センサ |
EP1876438A1 (en) | 2006-07-05 | 2008-01-09 | Dtu | Determining concentration of a substance in aqueous solution by selfreferenced reflection THz spectroscopy |
JP4821560B2 (ja) * | 2006-10-27 | 2011-11-24 | 株式会社デンソー | 液体性状センサ |
US7977099B2 (en) * | 2007-08-15 | 2011-07-12 | Hanna Instruments, Inc. | Method for alcohol content determination |
BRPI0907020A2 (pt) | 2008-03-26 | 2015-07-07 | Denso Corp | Dispositivo sensor de concentração, dispositivo de cálculo da relação de mistura, métodos para calcular uma ralação de mistura do líquido de mistura e para detectar concentrações do fluido e, dispositivo de detecção de concentração |
WO2009119087A1 (ja) * | 2008-03-26 | 2009-10-01 | 株式会社デンソー | 濃度センサ装置、及び濃度検出方法 |
JP5092887B2 (ja) * | 2008-05-16 | 2012-12-05 | 株式会社デンソー | 濃度検出装置 |
JP4650557B2 (ja) * | 2008-11-07 | 2011-03-16 | 株式会社デンソー | 操作制限システム |
US9201305B2 (en) * | 2013-06-28 | 2015-12-01 | Az Electronic Materials (Luxembourg) S.A.R.L. | Spin-on compositions of soluble metal oxide carboxylates and methods of their use |
JP6384500B2 (ja) | 2016-02-12 | 2018-09-05 | 株式会社デンソー | 燃料ポンプ、燃料供給装置及び燃料供給制御システム |
CN113588720B (zh) * | 2021-08-03 | 2024-04-26 | 浙江博美泰克电子有限公司 | 汽车或工业类酒精和汽油混合比传感器 |
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2003
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- 2003-09-30 EP EP03798561A patent/EP1548426A4/en not_active Withdrawn
- 2003-09-30 US US10/529,709 patent/US20060042940A1/en not_active Abandoned
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Also Published As
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EP1548426A4 (en) | 2008-01-16 |
JP3580547B2 (ja) | 2004-10-27 |
US20060042940A1 (en) | 2006-03-02 |
JP2004125464A (ja) | 2004-04-22 |
EP1548426A1 (en) | 2005-06-29 |
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