WO2004029543A3 - Interferometrische messeinrichtung - Google Patents

Interferometrische messeinrichtung Download PDF

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Publication number
WO2004029543A3
WO2004029543A3 PCT/DE2003/001029 DE0301029W WO2004029543A3 WO 2004029543 A3 WO2004029543 A3 WO 2004029543A3 DE 0301029 W DE0301029 W DE 0301029W WO 2004029543 A3 WO2004029543 A3 WO 2004029543A3
Authority
WO
WIPO (PCT)
Prior art keywords
partial
area
radiation
measuring
measuring device
Prior art date
Application number
PCT/DE2003/001029
Other languages
English (en)
French (fr)
Other versions
WO2004029543A2 (de
Inventor
Dominique Marchal
Marc-Henri Duvoisin
Dominique Breider
Pawel Drabarek
Original Assignee
Bosch Gmbh Robert
Dominique Marchal
Marc-Henri Duvoisin
Dominique Breider
Pawel Drabarek
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bosch Gmbh Robert, Dominique Marchal, Marc-Henri Duvoisin, Dominique Breider, Pawel Drabarek filed Critical Bosch Gmbh Robert
Priority to EP03727156A priority Critical patent/EP1546645B1/de
Priority to JP2004538673A priority patent/JP2006500570A/ja
Priority to US10/529,424 priority patent/US7339679B2/en
Priority to DE50302530T priority patent/DE50302530D1/de
Publication of WO2004029543A2 publication Critical patent/WO2004029543A2/de
Publication of WO2004029543A3 publication Critical patent/WO2004029543A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02002—Interferometers characterised by controlling or generating intrinsic radiation properties using two or more frequencies
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02049—Interferometers characterised by particular mechanical design details
    • G01B9/0205—Interferometers characterised by particular mechanical design details of probe head
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02064—Active error reduction, i.e. varying with time by particular adjustment of coherence gate, i.e. adjusting position of zero path difference in low coherence interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/45—Multiple detectors for detecting interferometer signals

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)

Abstract

Die Erfindung bezieht sich auf eine interferometrische Messvorrichtung zum Erfassen der Form, der Rauheit oder des Abstandes der Oberfläche eines Messobjektes (8) mit einem Modulationsinterferometer (2), das einen ersten Strahlteiler (2.1) und einen zweiten Treilstrahl (2.1') aufweist, und die anschliessend an einem weiteren Strahlteiler (2.10) vereinigt werden, mit einer von dem Modulationsinterferomter (2) räumlich getrennten und mit dieser über eine Messsonde (3), ni der die vereinigten Teilstrahlen in einem gemeinsamen Arm in einem teildurchlässigen Bereich (3.3) in einen Messstrahl und einen Referenzstrahl aufgeteilt sind. Der teildurchlässisge Bereich (3.3) mittels einer bezüglich der optischen Sondenachse (3.5) unter einem Austrittswinkel schrägen Austrittfläche (3.31) einer Sondenfaser (3.1) und einer ebenfalls bezüglich der optischen Sondenachse (3.5) unter einem Eintrittswinkel schrägen Eintrittsfläche (3.32) eines objektseitig folgenden Faserabschnitts (3.2) gebildet ist, wobei zwischen der Austrittsfläche (3.31) gebildet ist, wobei zwsichen der Austrittsfläche (3.31) und der Eintrittsfläche (3.32) ein keilförmiger Spalt gebildet ist.
PCT/DE2003/001029 2002-09-25 2003-03-28 Interferometrische messeinrichtung WO2004029543A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP03727156A EP1546645B1 (de) 2002-09-25 2003-03-28 Interferometrische messeinrichtung
JP2004538673A JP2006500570A (ja) 2002-09-25 2003-03-28 干渉測定装置
US10/529,424 US7339679B2 (en) 2002-09-25 2003-03-28 Interferometric measuring device utilizing a slanted probe filter
DE50302530T DE50302530D1 (de) 2002-09-25 2003-03-28 Interferometrische messeinrichtung

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10244552.4 2002-09-25
DE10244552A DE10244552B3 (de) 2002-09-25 2002-09-25 Interferometrische Messeinrichtung

Publications (2)

Publication Number Publication Date
WO2004029543A2 WO2004029543A2 (de) 2004-04-08
WO2004029543A3 true WO2004029543A3 (de) 2004-06-17

Family

ID=30128859

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2003/001029 WO2004029543A2 (de) 2002-09-25 2003-03-28 Interferometrische messeinrichtung

Country Status (6)

Country Link
US (1) US7339679B2 (de)
EP (1) EP1546645B1 (de)
JP (1) JP2006500570A (de)
CN (1) CN1656353A (de)
DE (2) DE10244552B3 (de)
WO (1) WO2004029543A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4804057B2 (ja) * 2005-07-28 2011-10-26 オリンパス株式会社 内面計測装置
FR2889584B1 (fr) * 2005-08-08 2008-07-11 Centre Nat Rech Scient Imagerie tomographique par microscope interferometrique a immersion
CN100451539C (zh) * 2006-07-20 2009-01-14 中国科学院长春光学精密机械与物理研究所 一种采用数字干涉仪实施高精度测量微小转角的方法
EP2236978B8 (de) * 2009-04-01 2013-12-04 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Optische Messvorrichtung und Verfahren zur Bestimmung der Form eines Objekts und eine Maschine zum Formen des Objekts
US8437006B2 (en) * 2010-12-02 2013-05-07 Nicholas G. Dagalakis Displacement sensor with embedded coherent electromagnetic radiation interferometer for micro scale proximity measurements
TWI489081B (zh) * 2011-11-09 2015-06-21 Zygo Corp 使用編碼器系統的低同調干涉技術
DE102015006798B4 (de) * 2015-05-27 2018-08-09 Mbda Deutschland Gmbh Verfahren und Vorrichtung zur Bilderfassung eines Zielobjektes
US10107615B2 (en) 2016-04-20 2018-10-23 Quality Vision International, Inc. Remote probe for optical measuring machine
US10107614B1 (en) 2017-04-18 2018-10-23 Quality Vision International, Inc. Optical pen for interferometric measuring machine
DE102017218086A1 (de) 2017-10-11 2019-04-11 Carl Zeiss Industrielle Messtechnik Gmbh Antastelement und Koordinatenmessgerät zur Vermessung mindestens eines Messobjekts
CN109855530B (zh) * 2017-11-30 2021-03-09 上海微电子装备（集团）股份有限公司 干涉仪系统及其使用方法
US11333487B2 (en) * 2019-10-28 2022-05-17 Kla Corporation Common path mode fiber tip diffraction interferometer for wavefront measurement

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972005A (ja) * 1982-10-18 1984-04-23 Nec Corp 光干渉型光フアイバセンサ
US5891747A (en) * 1992-12-14 1999-04-06 Farah; John Interferometric fiber optic displacement sensor
US20020109847A1 (en) * 2000-11-20 2002-08-15 Pawel Drabarek Interferometric measuring device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4244605A1 (de) * 1992-05-27 1993-12-02 Hewlett Packard Co Optisches Niederkohärenzreflektometer von verbesserter Empfindlichkeit mit optischer Dämpfung
DE19520305C2 (de) * 1995-06-02 1997-04-17 Fraunhofer Ges Forschung Verfahren und Meßvorrichtung zur interferometrischen Abstandsmessung
DE19721883C2 (de) * 1997-05-26 1999-04-15 Bosch Gmbh Robert Interferometrische Meßvorrichtung
DE19738900B4 (de) * 1997-09-05 2005-07-14 Robert Bosch Gmbh Interferometrische Meßvorrichtung zur Formvermessung an rauhen Oberflächen
DE19808273A1 (de) * 1998-02-27 1999-09-09 Bosch Gmbh Robert Interferometrische Meßeinrichtung zum Erfassen der Form oder des Abstandes insbesondere rauher Oberflächen
DE19819762A1 (de) * 1998-05-04 1999-11-25 Bosch Gmbh Robert Interferometrische Meßeinrichtung
DE10057540A1 (de) * 2000-11-20 2002-06-06 Bosch Gmbh Robert Interferometrische Messvorrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5972005A (ja) * 1982-10-18 1984-04-23 Nec Corp 光干渉型光フアイバセンサ
US5891747A (en) * 1992-12-14 1999-04-06 Farah; John Interferometric fiber optic displacement sensor
US20020109847A1 (en) * 2000-11-20 2002-08-15 Pawel Drabarek Interferometric measuring device

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 008, no. 179 (P - 295) 17 August 1984 (1984-08-17) *

Also Published As

Publication number Publication date
US20060033925A1 (en) 2006-02-16
EP1546645A2 (de) 2005-06-29
US7339679B2 (en) 2008-03-04
WO2004029543A2 (de) 2004-04-08
JP2006500570A (ja) 2006-01-05
DE10244552B3 (de) 2004-02-12
CN1656353A (zh) 2005-08-17
DE50302530D1 (de) 2006-04-27
EP1546645B1 (de) 2006-03-01

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