WO2004012226A3 - Procede de fabrication de film polymere conducteur anisotrope sur tranche de semi-conducteur - Google Patents

Procede de fabrication de film polymere conducteur anisotrope sur tranche de semi-conducteur Download PDF

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Publication number
WO2004012226A3
WO2004012226A3 PCT/FR2003/002312 FR0302312W WO2004012226A3 WO 2004012226 A3 WO2004012226 A3 WO 2004012226A3 FR 0302312 W FR0302312 W FR 0302312W WO 2004012226 A3 WO2004012226 A3 WO 2004012226A3
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WO
WIPO (PCT)
Prior art keywords
making
semiconductor wafer
polymer film
conductive polymer
anisotropic conductive
Prior art date
Application number
PCT/FR2003/002312
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English (en)
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WO2004012226A2 (fr
Inventor
Jean-Charles Souriau
Pierre Renard
Jean Brun
Original Assignee
Commissariat Energie Atomique
Jean-Charles Souriau
Pierre Renard
Jean Brun
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Commissariat Energie Atomique, Jean-Charles Souriau, Pierre Renard, Jean Brun filed Critical Commissariat Energie Atomique
Priority to EP03748222A priority Critical patent/EP1523762A2/fr
Priority to US10/488,939 priority patent/US7026239B2/en
Publication of WO2004012226A2 publication Critical patent/WO2004012226A2/fr
Publication of WO2004012226A3 publication Critical patent/WO2004012226A3/fr

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Abstract

L'invention concerne un procédé de fabrication de film polymère conducteur anisotrope (23, 24) sur une tranche de semi-conducteur (T) comprenant, sur une face, une couche de passivation (12) dans laquelle est pratiquée au moins une ouverture laissant apparaître un plot de connexion (11). L'invention s'applique à la formation de composants (puces, circuits intégrés) à haute densité d'interconnexions.
PCT/FR2003/002312 2002-07-24 2003-07-22 Procede de fabrication de film polymere conducteur anisotrope sur tranche de semi-conducteur WO2004012226A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP03748222A EP1523762A2 (fr) 2002-07-24 2003-07-22 Procede de fabrication de film polymere conducteur anisotrope sur tranche de semi-conducteur
US10/488,939 US7026239B2 (en) 2002-07-24 2003-07-22 Method for making an anisotropic conductive polymer film on a semiconductor wafer

Applications Claiming Priority (2)

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EP1523762A2 (fr) 2005-04-20
FR2842943A1 (fr) 2004-01-30
US20040241932A1 (en) 2004-12-02
US7026239B2 (en) 2006-04-11
FR2842943B1 (fr) 2005-07-01

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