WO2003095999A3 - Sensoranordnung zum messen einer gaskonzentration - Google Patents

Sensoranordnung zum messen einer gaskonzentration Download PDF

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Publication number
WO2003095999A3
WO2003095999A3 PCT/DE2002/004207 DE0204207W WO03095999A3 WO 2003095999 A3 WO2003095999 A3 WO 2003095999A3 DE 0204207 W DE0204207 W DE 0204207W WO 03095999 A3 WO03095999 A3 WO 03095999A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrode structure
sensor assembly
insulation material
measuring
gas concentration
Prior art date
Application number
PCT/DE2002/004207
Other languages
English (en)
French (fr)
Other versions
WO2003095999A2 (de
Inventor
Heribert Weber
Christian Krummel
Original Assignee
Paragon Ag
Heribert Weber
Christian Krummel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Paragon Ag, Heribert Weber, Christian Krummel filed Critical Paragon Ag
Priority to EP02779214A priority Critical patent/EP1504253A2/de
Priority to US10/514,211 priority patent/US20050199041A1/en
Publication of WO2003095999A2 publication Critical patent/WO2003095999A2/de
Publication of WO2003095999A3 publication Critical patent/WO2003095999A3/de

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/128—Microapparatus

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)

Abstract

Die Erfindung bezieht sich auf eine Sensoranordnung zum Messen einer Gaskonzentration, insbesondere von CO, H2, NOx und/oder Kohlenwasserstoffen. Um mit relativ geringem Aufwand, insbesondere geringem Kostenaufwand, eine genaue Messung zu ermöglichen, ist die Sensoranordnung versehen mit einem auf einem Substrat (2) aufgebrachten, eine oder mehrere Isolationsschichten (4, 6, 8, 10) aufweisenden Isolationsmaterial, mindestens einer in oder auf dem Isolationsmaterial vorgesehenen ersten Elektrodenstruktur (12, 13), mindestens einer in oder auf dem Isolationsmaterial vorgesehenen, von der ersten Elektrodenstruktur in vertikaler Richtung beabstandeten zweiten Elektrodenstruktur (14, 15), einer gassensitiven Schicht (16), die an die erste Elektrodenstruktur (12, 13) und die zweite Elektrodenstruktur (14, 15) angrenzt, und einer in dem Isolationsmaterial (4, 6, 8, 10) vorgesehenen Heizleiterstruktur (7).
PCT/DE2002/004207 2002-05-11 2002-11-14 Sensoranordnung zum messen einer gaskonzentration WO2003095999A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP02779214A EP1504253A2 (de) 2002-05-11 2002-11-14 Sensoranordnung zum messen einer gaskonzentration
US10/514,211 US20050199041A1 (en) 2002-05-11 2002-11-14 Sensor assembly for measuring a gas concentration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10221084A DE10221084A1 (de) 2002-05-11 2002-05-11 Sensoranordnung zum Messen einer Gaskonzentration
DE10221084.5 2002-05-11

Publications (2)

Publication Number Publication Date
WO2003095999A2 WO2003095999A2 (de) 2003-11-20
WO2003095999A3 true WO2003095999A3 (de) 2004-03-04

Family

ID=29265242

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2002/004207 WO2003095999A2 (de) 2002-05-11 2002-11-14 Sensoranordnung zum messen einer gaskonzentration

Country Status (4)

Country Link
US (1) US20050199041A1 (de)
EP (1) EP1504253A2 (de)
DE (1) DE10221084A1 (de)
WO (1) WO2003095999A2 (de)

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JP2006528767A (ja) * 2003-07-25 2006-12-21 パラゴン アクチエンゲゼルシャフト マイクロ構造化された化学的なセンサ
DE10353860B4 (de) * 2003-11-18 2023-03-30 Robert Bosch Gmbh Sensor zum Erfassen von Partikeln in einem Gasstrom, sowie Verfahren zu seiner Herstellung
GB0500393D0 (en) * 2005-01-10 2005-02-16 Univ Warwick Microheaters
EP2062037A2 (de) * 2006-09-14 2009-05-27 Agency for Science, Technology And Research Elektrochemischer sensor mit ineinandergreifenden mikroelektroden und leitfähigem polymer
US20180080891A1 (en) * 2016-09-21 2018-03-22 General Electric Company Systems and methods for environment sensing
US20080154432A1 (en) * 2006-12-20 2008-06-26 Galloway Douglas B Catalytic alloy hydrogen sensor apparatus and process
US20080154434A1 (en) * 2006-12-20 2008-06-26 Galloway Douglas B Catalytic Alloy Hydrogen Sensor Apparatus and Process
KR20090064693A (ko) * 2007-12-17 2009-06-22 한국전자통신연구원 마이크로 가스 센서 및 그 제작 방법
KR101094870B1 (ko) * 2008-12-17 2011-12-15 한국전자통신연구원 습도 센서 및 이의 제조 방법
JP5055349B2 (ja) * 2009-12-28 2012-10-24 日立オートモティブシステムズ株式会社 熱式ガスセンサ
US8410560B2 (en) * 2010-01-21 2013-04-02 Cambridge Cmos Sensors Ltd. Electromigration reduction in micro-hotplates
EP2762865A1 (de) * 2013-01-31 2014-08-06 Sensirion Holding AG Chemische Sensor und Verfahren zur Herstellung solch eines chemischen Sensors
EP2833128A1 (de) * 2013-07-30 2015-02-04 Sensirion AG Integrierter chemischer Metalloxidsensor
KR101649586B1 (ko) * 2014-04-07 2016-08-19 주식회사 모다이노칩 센서
US10578572B2 (en) * 2016-01-19 2020-03-03 Invensense, Inc. CMOS integrated microheater for a gas sensor device
US10383967B2 (en) 2016-11-30 2019-08-20 Invensense, Inc. Substance sensing with tracers
TWI626627B (zh) * 2017-08-31 2018-06-11 研能科技股份有限公司 致動傳感模組
US11674916B2 (en) 2018-11-12 2023-06-13 Sciosense B.V. Gas sensor
US20200150069A1 (en) * 2018-11-12 2020-05-14 Ams Sensors Uk Limited Gas sensor
US11636870B2 (en) 2020-08-20 2023-04-25 Denso International America, Inc. Smoking cessation systems and methods
US11828210B2 (en) 2020-08-20 2023-11-28 Denso International America, Inc. Diagnostic systems and methods of vehicles using olfaction
US11760169B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Particulate control systems and methods for olfaction sensors
US11760170B2 (en) 2020-08-20 2023-09-19 Denso International America, Inc. Olfaction sensor preservation systems and methods
US11932080B2 (en) 2020-08-20 2024-03-19 Denso International America, Inc. Diagnostic and recirculation control systems and methods
US11813926B2 (en) 2020-08-20 2023-11-14 Denso International America, Inc. Binding agent and olfaction sensor
US11881093B2 (en) 2020-08-20 2024-01-23 Denso International America, Inc. Systems and methods for identifying smoking in vehicles
US12017506B2 (en) 2020-08-20 2024-06-25 Denso International America, Inc. Passenger cabin air control systems and methods
DE102022211374A1 (de) 2022-10-26 2024-05-02 Robert Bosch Gesellschaft mit beschränkter Haftung Verbesserte Sensoranordnung basierend auf einerMetalloxid-Sensormaterialstruktuktur

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US5545300A (en) * 1993-12-04 1996-08-13 Goldstar Co., Ltd. Low power consumption type thin film gas sensor
DE19544303A1 (de) * 1994-11-29 1997-06-05 Martin Hausner Vorrichtung und Verfahren zur Steuerung der Selektivität von gassensitiven chemischen Verbindungen über exteren Potentiale
US20020017126A1 (en) * 1999-01-15 2002-02-14 Dimeo Frank Micro-machined thin film sensor arrays for the detection of H2, NH3, and sulfur containing gases, and method of making and using the same
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Also Published As

Publication number Publication date
US20050199041A1 (en) 2005-09-15
DE10221084A1 (de) 2003-11-20
EP1504253A2 (de) 2005-02-09
WO2003095999A2 (de) 2003-11-20

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