WO2003095999A3 - Sensoranordnung zum messen einer gaskonzentration - Google Patents
Sensoranordnung zum messen einer gaskonzentration Download PDFInfo
- Publication number
- WO2003095999A3 WO2003095999A3 PCT/DE2002/004207 DE0204207W WO03095999A3 WO 2003095999 A3 WO2003095999 A3 WO 2003095999A3 DE 0204207 W DE0204207 W DE 0204207W WO 03095999 A3 WO03095999 A3 WO 03095999A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrode structure
- sensor assembly
- insulation material
- measuring
- gas concentration
- Prior art date
Links
- 239000012774 insulation material Substances 0.000 abstract 4
- 239000004020 conductor Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229930195733 hydrocarbon Natural products 0.000 abstract 1
- 150000002430 hydrocarbons Chemical class 0.000 abstract 1
- 238000009413 insulation Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
- G01N27/128—Microapparatus
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP02779214A EP1504253A2 (de) | 2002-05-11 | 2002-11-14 | Sensoranordnung zum messen einer gaskonzentration |
US10/514,211 US20050199041A1 (en) | 2002-05-11 | 2002-11-14 | Sensor assembly for measuring a gas concentration |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10221084A DE10221084A1 (de) | 2002-05-11 | 2002-05-11 | Sensoranordnung zum Messen einer Gaskonzentration |
DE10221084.5 | 2002-05-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003095999A2 WO2003095999A2 (de) | 2003-11-20 |
WO2003095999A3 true WO2003095999A3 (de) | 2004-03-04 |
Family
ID=29265242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2002/004207 WO2003095999A2 (de) | 2002-05-11 | 2002-11-14 | Sensoranordnung zum messen einer gaskonzentration |
Country Status (4)
Country | Link |
---|---|
US (1) | US20050199041A1 (de) |
EP (1) | EP1504253A2 (de) |
DE (1) | DE10221084A1 (de) |
WO (1) | WO2003095999A2 (de) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006528767A (ja) * | 2003-07-25 | 2006-12-21 | パラゴン アクチエンゲゼルシャフト | マイクロ構造化された化学的なセンサ |
DE10353860B4 (de) * | 2003-11-18 | 2023-03-30 | Robert Bosch Gmbh | Sensor zum Erfassen von Partikeln in einem Gasstrom, sowie Verfahren zu seiner Herstellung |
GB0500393D0 (en) * | 2005-01-10 | 2005-02-16 | Univ Warwick | Microheaters |
EP2062037A2 (de) * | 2006-09-14 | 2009-05-27 | Agency for Science, Technology And Research | Elektrochemischer sensor mit ineinandergreifenden mikroelektroden und leitfähigem polymer |
US20180080891A1 (en) * | 2016-09-21 | 2018-03-22 | General Electric Company | Systems and methods for environment sensing |
US20080154432A1 (en) * | 2006-12-20 | 2008-06-26 | Galloway Douglas B | Catalytic alloy hydrogen sensor apparatus and process |
US20080154434A1 (en) * | 2006-12-20 | 2008-06-26 | Galloway Douglas B | Catalytic Alloy Hydrogen Sensor Apparatus and Process |
KR20090064693A (ko) * | 2007-12-17 | 2009-06-22 | 한국전자통신연구원 | 마이크로 가스 센서 및 그 제작 방법 |
KR101094870B1 (ko) * | 2008-12-17 | 2011-12-15 | 한국전자통신연구원 | 습도 센서 및 이의 제조 방법 |
JP5055349B2 (ja) * | 2009-12-28 | 2012-10-24 | 日立オートモティブシステムズ株式会社 | 熱式ガスセンサ |
US8410560B2 (en) * | 2010-01-21 | 2013-04-02 | Cambridge Cmos Sensors Ltd. | Electromigration reduction in micro-hotplates |
EP2762865A1 (de) * | 2013-01-31 | 2014-08-06 | Sensirion Holding AG | Chemische Sensor und Verfahren zur Herstellung solch eines chemischen Sensors |
EP2833128A1 (de) * | 2013-07-30 | 2015-02-04 | Sensirion AG | Integrierter chemischer Metalloxidsensor |
KR101649586B1 (ko) * | 2014-04-07 | 2016-08-19 | 주식회사 모다이노칩 | 센서 |
US10578572B2 (en) * | 2016-01-19 | 2020-03-03 | Invensense, Inc. | CMOS integrated microheater for a gas sensor device |
US10383967B2 (en) | 2016-11-30 | 2019-08-20 | Invensense, Inc. | Substance sensing with tracers |
TWI626627B (zh) * | 2017-08-31 | 2018-06-11 | 研能科技股份有限公司 | 致動傳感模組 |
US11674916B2 (en) | 2018-11-12 | 2023-06-13 | Sciosense B.V. | Gas sensor |
US20200150069A1 (en) * | 2018-11-12 | 2020-05-14 | Ams Sensors Uk Limited | Gas sensor |
US11636870B2 (en) | 2020-08-20 | 2023-04-25 | Denso International America, Inc. | Smoking cessation systems and methods |
US11828210B2 (en) | 2020-08-20 | 2023-11-28 | Denso International America, Inc. | Diagnostic systems and methods of vehicles using olfaction |
US11760169B2 (en) | 2020-08-20 | 2023-09-19 | Denso International America, Inc. | Particulate control systems and methods for olfaction sensors |
US11760170B2 (en) | 2020-08-20 | 2023-09-19 | Denso International America, Inc. | Olfaction sensor preservation systems and methods |
US11932080B2 (en) | 2020-08-20 | 2024-03-19 | Denso International America, Inc. | Diagnostic and recirculation control systems and methods |
US11813926B2 (en) | 2020-08-20 | 2023-11-14 | Denso International America, Inc. | Binding agent and olfaction sensor |
US11881093B2 (en) | 2020-08-20 | 2024-01-23 | Denso International America, Inc. | Systems and methods for identifying smoking in vehicles |
US12017506B2 (en) | 2020-08-20 | 2024-06-25 | Denso International America, Inc. | Passenger cabin air control systems and methods |
DE102022211374A1 (de) | 2022-10-26 | 2024-05-02 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verbesserte Sensoranordnung basierend auf einerMetalloxid-Sensormaterialstruktuktur |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4953387A (en) * | 1989-07-31 | 1990-09-04 | The Regents Of The University Of Michigan | Ultrathin-film gas detector |
US5545300A (en) * | 1993-12-04 | 1996-08-13 | Goldstar Co., Ltd. | Low power consumption type thin film gas sensor |
DE19544303A1 (de) * | 1994-11-29 | 1997-06-05 | Martin Hausner | Vorrichtung und Verfahren zur Steuerung der Selektivität von gassensitiven chemischen Verbindungen über exteren Potentiale |
WO2001002844A1 (fr) * | 1999-07-02 | 2001-01-11 | Microchemical Systems S.A. | Capteur chimique de gaz a oxide metallique et son procede de fabrication |
US20020017126A1 (en) * | 1999-01-15 | 2002-02-14 | Dimeo Frank | Micro-machined thin film sensor arrays for the detection of H2, NH3, and sulfur containing gases, and method of making and using the same |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2542643B2 (ja) * | 1987-10-31 | 1996-10-09 | 株式会社東芝 | センサの製造方法 |
GB9316280D0 (en) * | 1993-08-05 | 1993-09-22 | Capteur Sensors & Analysers | Gas sensors |
DE4433102A1 (de) * | 1994-09-16 | 1996-03-21 | Fraunhofer Ges Forschung | Elektrodenanordnung zur Signalerfassung gassensitiver Schichten |
DE4447033C2 (de) * | 1994-12-28 | 1998-04-30 | Bosch Gmbh Robert | Meßfühler zur Bestimmung des Sauerstoffgehaltes in Gasgemischen |
US5821402A (en) * | 1996-03-11 | 1998-10-13 | Tokyo Gas Co., Ltd. | Thin film deposition method and gas sensor made by the method |
US6200674B1 (en) * | 1998-03-13 | 2001-03-13 | Nanogram Corporation | Tin oxide particles |
-
2002
- 2002-05-11 DE DE10221084A patent/DE10221084A1/de not_active Withdrawn
- 2002-11-14 US US10/514,211 patent/US20050199041A1/en not_active Abandoned
- 2002-11-14 EP EP02779214A patent/EP1504253A2/de not_active Withdrawn
- 2002-11-14 WO PCT/DE2002/004207 patent/WO2003095999A2/de not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4953387A (en) * | 1989-07-31 | 1990-09-04 | The Regents Of The University Of Michigan | Ultrathin-film gas detector |
US5545300A (en) * | 1993-12-04 | 1996-08-13 | Goldstar Co., Ltd. | Low power consumption type thin film gas sensor |
DE19544303A1 (de) * | 1994-11-29 | 1997-06-05 | Martin Hausner | Vorrichtung und Verfahren zur Steuerung der Selektivität von gassensitiven chemischen Verbindungen über exteren Potentiale |
US20020017126A1 (en) * | 1999-01-15 | 2002-02-14 | Dimeo Frank | Micro-machined thin film sensor arrays for the detection of H2, NH3, and sulfur containing gases, and method of making and using the same |
WO2001002844A1 (fr) * | 1999-07-02 | 2001-01-11 | Microchemical Systems S.A. | Capteur chimique de gaz a oxide metallique et son procede de fabrication |
Non-Patent Citations (3)
Title |
---|
SIMON I ET AL: "MICROMACHINED METAL OXIDE GAS SENSORS: OPPORTUNITIES TO IMPROVE SENSOR PERFORMANCE", SENSORS AND ACTUATORS B, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. B73, no. 1, 25 February 2001 (2001-02-25), pages 1 - 26, XP001120244, ISSN: 0925-4005 * |
STORM U ET AL: "A resistive gas sensor with elimination and utilization of parasitic electric fields", SENSORS AND ACTUATORS B, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 77, no. 1-2, 15 June 2001 (2001-06-15), pages 529 - 533, XP004246604, ISSN: 0925-4005 * |
ZACHEJA J ET AL: "Multi-electrode substrate for selectivity enhancement in air monitoring", SENSORS AND ACTUATORS B, ELSEVIER SEQUOIA S.A., LAUSANNE, CH, vol. 43, no. 1-3, 1 September 1997 (1997-09-01), pages 11 - 17, XP004103423, ISSN: 0925-4005 * |
Also Published As
Publication number | Publication date |
---|---|
US20050199041A1 (en) | 2005-09-15 |
DE10221084A1 (de) | 2003-11-20 |
EP1504253A2 (de) | 2005-02-09 |
WO2003095999A2 (de) | 2003-11-20 |
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