WO2003081195A1 - Appareil de mesure de la pression comportant un dispositif a onde acoustique de surface (saw) - Google Patents

Appareil de mesure de la pression comportant un dispositif a onde acoustique de surface (saw) Download PDF

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Publication number
WO2003081195A1
WO2003081195A1 PCT/GB2003/001181 GB0301181W WO03081195A1 WO 2003081195 A1 WO2003081195 A1 WO 2003081195A1 GB 0301181 W GB0301181 W GB 0301181W WO 03081195 A1 WO03081195 A1 WO 03081195A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
saw device
saw
pressure monitor
pressure
Prior art date
Application number
PCT/GB2003/001181
Other languages
English (en)
Inventor
Victor Alexandrovich Kalinin
Raymond David Lohr
Mark Lee
Arthur John Leigh
Original Assignee
Transense Technologies Plc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0206705A external-priority patent/GB0206705D0/en
Priority claimed from GBGB0305461.6A external-priority patent/GB0305461D0/en
Application filed by Transense Technologies Plc filed Critical Transense Technologies Plc
Priority to US10/508,468 priority Critical patent/US7151337B2/en
Priority to AU2003216841A priority patent/AU2003216841A1/en
Priority to JP2003578881A priority patent/JP4320593B2/ja
Priority to DE60312493T priority patent/DE60312493T2/de
Priority to EP03712379A priority patent/EP1485692B1/fr
Priority to CNB038109573A priority patent/CN100338451C/zh
Publication of WO2003081195A1 publication Critical patent/WO2003081195A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Definitions

  • This invention relates to a pressure monitor incorporating a SAW device.
  • Pressure monitors incorporating SAW devices have been proposed, for example in our United Kingdom patent application GB-A-2352814.
  • the SAW devices are used to produce an electrical signal indicative of the position of a pressure sensitive member, for example a diaphragm, which is used to divide a chamber containing a reference pressure from a chamber which is subject to a variable pressure.
  • the present invention relates to an improved pressure monitor of this type.
  • GB 2235533 discloses a piezoelectric sensor device in which a surface acoustic wave device is mounted on a flexible diaphragm which is supported around its periphery by an integral rigid assembly.
  • Displacement of the diaphragm for example in response to an applied pressure, induces a strain in the piezoelectric material thus causing a corresponding change in the characteristic frequency of the SAW device.
  • These changes in the characteristic frequency of the SAW device are, then, used as a measure of the deflection of the diaphragm and hence of the pressure applied thereto.
  • This device has the advantage that, by mounting the SAW device on the diaphragm, the device is very sensitive. However, mechanical edge effects associated with clamping the edge of the diaphragm considerably complicate interpreting the signal receiver from the SAW device. Furthermore, variations in temperature will cause variations in the characteristic frequency of the SAW device which will effect the accuracy of the device.
  • a pressure monitor comprising a base having a rigid frame; a lid secured to the base to define with the base a substantially fluid tight chamber, at least part of the lid being flexible and forming a diaphragm which will deflect in response to changes in the fluid pressure surrounding the monitor; means remote from the edge of the frame for transmitting movement of the diaphragm to a distortable substrate located within the chamber, the distortable substrate having a first SAW device mounted thereon, and at
  • the SAW devices may be of the resonator type in which case the distortion of the SAW device may be measured by measuring the change in resonant frequency produced by the distortion, or may be of the delay line type in which case the distortion of the SAW device may be measured by measuring the change in delay characteristics produced by the distortion. Accordingly, changes in the pressure to which the monitor is subjected may be determined by observing the changes in the characteristics of the SAW device.
  • the SAW device is supported by the frame and extends along the length of the chamber enclosed by the rigid frame and the lid. Accordingly, deflection of the lid acting as a diaphragm will cause bending of the SAW device with a resulting change in output of the SAW device.
  • the three SAW devices may be located on the same side of a common substrate or two may be located on one side of a common substrate and the other located on the opposite side of the common substrate. Alternatively, two individual substrates, one carrying two SAW devices (on the same or respective opposite sides thereof) and one carrying one SAW device may be provided.
  • the arrangement should be such that one SAW device is subjected to strain from the deflexion of the lid and the other two SAW devices are unstrained providing references for pressure and temperature measurement.
  • the orientation of one of the unstrained SAW devices is at a non-zero angle to the propagation direction of the other unstrained SAW device to provide unambiguous temperature information.
  • the means remote from the edge of the frame for transmitting movement of the diaphragm to the SAW device comprises one or more bumps provided on the lid which can press on the substrate of a SAW device but which cannot exert a pulling force on the SAW device.
  • the or each bump may be provided by a depression formed in the material of the lid or by means of a suitable member secured to the lid.
  • the chamber is hermetically sealed with a reference pressure.
  • the reference pressure is selected so that when the/device is located within the zone in which it is to operate, the pressure surrounding the device is higher than the reference pressure with a result that the diaphragm will deflect inwardly of the base and exert a force on one of the SAW devices.
  • the base is a ceramic or metal base to which the lid is secured.
  • a single sided SAW device is mounted face down supported by the base with the diaphragm bump pressing from the back and a second substrate is mounted in an unstrained area and carries the two reference SAW devices (one for pressure and one for temperature).
  • a double sided SAW device is used to detect pressure transmitted by two bumps and the reference SAW devices are mounted in an unstrained location in the chamber for temperature and pressure reference information.
  • At least three SAW devices are required so that both temperature and pressure measurements can be attained.
  • Two of the SAW devices may be respectively mounted on one side of two substrates, or two of them may be mounted on the opposite sides of one substrate.
  • the lid preferably includes three indentations whereby the two substrates may each be supported along one edge by a common ridge and along an opposite edge by a respective ridge.
  • the substrates extend side by side along the lid.
  • the devices may be arranged so that two are strained and one is unstrained. Two strained SAW devices are then arranged so that one is deformed in compression and one being deformed in tension by movement of the lid.
  • the SAW devices may be laid down on the opposite sides of a common substrate or on separate substrates. If separate substrates are used they should be arranged so that simultaneously one SAW device is deformed in compression and one SAW device is deformed in tension.
  • the lid acting as a diaphragm a metal alloy, for example an iron, cobalt, nickel alloy.
  • the lid may be of Kovar.
  • the base is preferably of a metal alloy (for example Kovar) but may be of any suitable material, for example a ceramic material.
  • the ultimate tensile bending strength of a brittle material depends not only on its size and stiffness but also on the presence of pre-existing defects.
  • the surface on the outside of the bend is placed in tension whilst the surface on the inside of the bend is placed in compression.
  • Any pre-existing defect which exists in the surface under tension will, then, be an area of weakness and hence likely to be the initial source of any failure of the component under bending.
  • the failure strength under bending will, therefore, be limited by the size of the largest pre-existing defect in the component.
  • quartz planar components are produced by grinding and lapping operations, which results in a large number of small defects on the surfaces thereof whose size is characteristic of the grinding and lapping processes.
  • the compressed surface of the component is then finished by polishing so as to facilitate deposition of metal thereto to form the various components of the SAW device.
  • the tensioned surface has not been so finished for two reasons: firstly, because the extra costs involved in polishing both surfaces of the component was deemed unnecessary, and secondly, because the unpolished surface was found to suppress reflection of the bulk wave during operation of the SAW device, thereby reducing parasitic losses which result from those reflections.
  • the bending strength of the SAW devices can be significantly improved if opposing surfaces of the component are polished so as to reduce the number and of size of the defects in the surface, that is both the surface upon which metal is deposited to form components of the SAW device and which, upon bending of the device during use, will be under compression, and the opposite surface thereof which, upon bending of the device in use, will be tensioned, both said first and second surfaces being polished.
  • the SAW devices in the invention may be glued in place by using conventional adhesives, but the mechanical properties of the resulting bond have been found to reduce the responsiveness and sensitivity of SAW devices. Instead, therefore, it has been found to be advantageous to fasten the SAW devices by soldering, which may be achieved by providing a metallization layer on the bonding surface of the substrate of the device. Soldering has the advantage of greatly improving the transfer of strain and thermal properties of the transducer, and hence improves the accuracy and sensitivity of a SAW.
  • single crystal quartz is a stiff material (80 GPa), and the stress levels required successfully to transmit strain from a structural member formed of, for example, steel, in a quartz SAW device are necessarily high. As a result, creep will manifest itself at much lower temperatures if a conventional strain gauge adhesive, such as M Bond 610, is used.
  • a conventional strain gauge adhesive such as M Bond 610
  • AuSn in contrast, results in much lower levels of creep and hysteresis at the high temperatures, which can be up to 125 degrees centigrade, typically encountered in automotive applications.
  • Figure 1A is a schematic view of a first embodiment of the invention before application of the lid;
  • Figure IB is a schematic cross sectional view of the first embodiment of the invention along the line 1 B-l B of Fig 1 A, with the lid in place;
  • Figure 2A is a schematic view corresponding to Fig LA, but showing a second embodiment of the invention
  • Figure 2B is a schematic cross sectional view of the second embodiment of the invention along the line 2B-2B of Fig 2 A, with the lid in place;
  • Figure 3A is a schematic view corresponding to Fig IA, but showing a third embodiment of the invention.
  • Figure 3B is a schematic cross sectional view of the third embodiment of the invention along the line 3B-3B of Fig 3 A, with the lid in place;
  • Figure 4A is a schematic plan view showing a fourth embodiment of the invention.
  • Figure 413 is a schematic cross sectional view of the fourth embodiment of the invention along the line 4B-4B of Fig 4 A.
  • Figure 5A is a schematic plan view showing a fifth embodiment of the invention.
  • Figure 513 is a schematic cross sectional view of the fifth embodiment along the line 5B-5B of Figure 5 A;
  • Figure 6A is a schematic plan view showing a sixth embodiment of the invention.
  • Figure 6B is a schematic cross sectional view of the sixth embodiment along the line 6B-6B of Figure 6A.
  • a pressure monitor 1 comprising a base 2 having rigid frame 3 A and a rigid base 313 which together define a shallow rectangular container 4.
  • the container 4 may be formed of any suitable material, and in the preferred embodiment of the invention is formed of a metal material, for example Kovar.
  • the container 4 has secured to the open end thereof a lid 5 having a major surface 5A acting as a diaphragm.
  • the lid may be of any suitable material, for example Kovar. Both the material from which the base is made and the material from which the lid acting as a /diaphragm is made are preferably impermeable to gas and the seal between the lid and the base is also preferably impermeable to gas.
  • the seal between the lid in the base may be formed by any convenient means. If both the lid and the base are of suitable metal alloys the seal therebetween may be formed by a soldering process.
  • a sealed chamber 6 is defined by the lid and the base.
  • the absolute pressure contained within the chamber 6 is determined at the time of manufacture in light of the pressure conditions to which the device is to be sensitive. If, for example, the device is intended to monitor the pressure within a vehicle tyre it will typically operate within a zone having pressure of two to ten bar and under these circumstances the pressure sealed within the chamber 6 may, for example be one bar at a temperature of 20°C. Alternatively, a vacuum may be sealed in the chamber 6 to provide absolute pressure readings.
  • the SAW devices may, for example, be SAW resonators having different resonant frequencies so that the changes in the resonant frequencies of the respective SAW devices may be determined using existing conventional SAW device interrogating technology.
  • depends only on temperature, not on pressure, so the value of the temperature can be immediately found from
  • both the devices X and Z are fabricated on the same substrate the frequency difference
  • will depend on the temperature only in the case if the temperature characteristic of the device Z differs from that of the device X.
  • the device Z is rotated relative to the device X at a certain angle as shown in Fig IA.
  • the temperature sensitivity depends on the rotation angle. An angle is in the range of 10-30°, in particular 16-20° has been found to achieve particularly good results. For example, and angle of 18° gives the sensitivity of approximately 2 kHz ⁇ C 1 for the ST-X cut quartz substrate.
  • the value of the pressure can be found from the measured frequency difference
  • to pressure usually also depends on temperature. Knowing this dependence from calibration data and having found the temperature from
  • the substrate 7 is supported by the base 2 and for convenience may be secured to the base by means of a flexible adhesive. If adhesive is used to secure the substrate in position, the flexibility of the adhesive should be such that the respective end regions 8,9 of the substrate 7 are free to move as substrate 7 is acted upon by a projection 10 formed integrally with or secured to the lid 5. Accordingly the end regions 8,9 will be substantially unstrained even when the central region is strained as a result of movement of the diaphragm.
  • the lid 5 is provided, in the centre of the major surface 5A, with a projection 10 formed by a dimple pressed in the material of the lid.
  • the position of the projection 10 is shown in broken line in Figure 1 A.
  • the projection 10 is able to exert a downward force (as viewed in Fig IB) at the centre of the substrate, but is unable to exert a force on ends 8,9.
  • Suitable antennae are provided for receiving an excitation signal for each of the SAW devices X, Y, Z and for transmitting a response signal from each of the SAW devices.
  • the antennae may be located on the exterior of the container 4 in which case appropriate electrical connections must be provided extending through the material of the container 4. Alternatively, it may be possible to lay the antennae down as tracks on the interior surface of the container 4 or on suitable areas of the substrate 7 not occupied by the SAW devices themselves.
  • a pressure monitor as described above is placed within a zone the pressure of which is to be monitored.
  • the pressure monitor is/chosen in light of the pressures to which it is intended to be sensitive, and in particular, the absolute pressure sealed within the chamber 6 is chosen so that the diaphragm is deflected towards the base 3B by the pressure prevailing in the region to which the device is sensitive.
  • This defection of the diaphragm will cause bending of the substrate 7 only between the edges 11,12 of the frame 3 A and accordingly a change in the resonant frequency of the central SAW device Y.
  • the resonant frequency of the SAW devices may be determined by known techniques to calibrate the monitoring device.
  • the embodiment of Figure 1 is particularly desirable in that one substrate 7 is provided and accordingly SAW devices may be provided on one surface only.
  • the above described embodiment of the invention is particularly simple to fabricate and comprises in essence, only four elements, namely the base 2, the substrate 7 (with its associated SAW devices), the lid 5 and appropriate antennae (not shown).
  • the device may be constructed using three identical SAW devices, the different characteristics of the Y and Z devices being achieved by their different orientations.
  • the components may be assembled under factory conditions by means of a simple and logical progression, namely the antennae may be laid down as suitable tracks on the base 2 and connected to the antennae, and finally the lid 5 may be secured to the base to complete the unit.
  • the simple assembly techniques offer substantial practical advantages for a mass produced unit to be used in relatively low cost applications such as monitoring the pressure within vehicle tyres.
  • the unit once produced, is completely self-contained and merely requires to be secured in position. Securing the unit in position may be effected by semi skilled or unskilled labour within a factory environment.
  • two substrates 20,21 are provided instead of the single substrate 7 of Figure 1, and at least two SAW devices are provided on the lower unstrained substrate 21, one of which is inclined relative to the other as in the first embodiment.
  • the components in operation of the embodiment of Figures 2 are substantially the same as those of the embodiment of Figure 1.
  • the substrates 20,21 may conveniently be held in position by means of flexible adhesive.
  • a two substrates 30,31 are provided and two SAW devices are provided on opposite sides of the upper strained substrate 30.
  • the components in operation of the embodiment of Figure 3 are the same as those of the embodiment of Figure 2, that is a third SAW device is provided - li ⁇
  • the device comprises a container 4 which is of ceramic or metal material.
  • the container 4 comprises a rigid frame 3 A and a base B.
  • the open mouth of the container is closed by a lid 5 acting as a diaphragm to define a hermetically sealed chamber 6.
  • a SAW device substrate 40 to detect changes in deflection of the diaphragm 5 is secured to the diaphragm itself.
  • pressed indentations 42,43 are provided in the diaphragm.
  • the indentations 42,43 define ridges within the chamber 6 to which the substrate 40 is secured, for example by soldering.
  • the substrate 40 has mounted thereon one or more SAW devices.
  • a further substrate 41 is mounted on the unstrained area of the chamber 6 and carries at least two further SAW devices such that pressure and temperature monitoring capabilities are provided.
  • deformation of the lid 5 acting as a diaphragm caused by pressure changes will result directly' in deformation of the substrate, 40 with a resulting change in the resonant frequency of the SAW devices mounted thereon.
  • Antennae for the SAW devices may be provided by any convenient means, for example electrically conducted track provided on the surface of the container 4 or electrical connections to external antennae passing through the container 4.
  • FIGs 5 A and 5B show a further embodiment of the invention in which the three SAW devices X,Y,Z are mounted on a single substrate 50 which is attached to the base 2 at only one end so as to form a cantilever which is engaged by the projection 10 on the diaphragm at a point part way along the length of the substrate.
  • One of the SAW devices Y is mounted on the cantilever substrate between the supported end and the point of engagement of the projection 10 whilst the other two X,Z are mounted between the point of engagement of the projection 10 and the free end of the cantilever as shown in Figure 5A.
  • the third SAW device Z is inclined to the second X so as to achieve a differential temperature characteristic.
  • Loading of the substrate by the projection causes strain in the first portion of the substrate between the supported end and the point of engagement of the projections, thereby causing a pressure response in the first SAW device (Y).
  • the second portion of the substrate between the point of engagement of the projection 10 and the free end of the substrate is, however, not strained and provides a reference region - any changes in the characteristics of the two SAW devices X,Z mounted thereon being as a result of temperature changes only.
  • Figures 6A and 6B show a variation of the embodiment of Figures 5A and 5B in which the substrate is again attached to the base 2 at one end only but is also now supported at its middle by support 61 so as to split the substrate into two sections, a first beam section which extends between the base mount and the support 61 on which is mounted a first SAW device Y, and a second cantilever section which is formed by the portion of substrate which overhangs the support 61 and on which is mounted second (X) and third (Z) SAW devices.
  • the third device (Z) is inclined to the second (X) as shown in Figure 6A.
  • the projection 10 on the diaphragm is then positioned to engage the beam section of the substrate, which constitutes a deformable substrate, causing straining of the first SAW device Y only upon deflecting of the diaphragm.
  • the provision of the support 61 will cause the cantilever section to deflect upwards upon the projection 10 engaging the substrate but to remain unstrained so as to provide a reference region.
  • the operation of the embodiments of Figures 5 and 6 are the same as for the previously described embodiments. It will, of course, be understood that the second and third SAW devices X,Z in the embodiments of Figures 5 and 6 may be mounted in the opposite way around to the positions shown in the drawings.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Sawing (AREA)

Abstract

L'invention concerne un appareil de mesure de la pression comprenant une base avec une structure rigide et un couvercle fixé sur la base de manière à définir avec la base une chambre sensiblement étanche. Au moins une partie du couvercle est flexible et forme une membrane qui va fléchir en réponse à des changements de pression dans le voisinage de l'appareil de mesure, la membrane étant pourvue d'un élément saillant qui transmet les mouvements de la membrane à un substrat flexible situé dans la chambre. Un premier dispositif SAW est monté sur le substrat flexible et au moins un deuxième et un troisième dispositif SAW sont montés dans la chambre, le deuxième dispositif SAW reposant sur une section de substrat de référence et ayant un sens de propagation incliné d'un angle donné par rapport au sens de propagation du premier et/ou du troisième dispositif SAW. Ainsi, les mouvements de la membrane induits par les changements de pression dans le voisinage de l'appareil de mesure induisent un fléchissement du substrat flexible qui peut être mesuré par le dispositif SAW monté sur le substrat flexible sans induire un fléchissement de la section du substrat de référence.
PCT/GB2003/001181 2002-03-21 2003-03-17 Appareil de mesure de la pression comportant un dispositif a onde acoustique de surface (saw) WO2003081195A1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
US10/508,468 US7151337B2 (en) 2002-03-21 2003-03-17 Pressure monitor incorporating saw device
AU2003216841A AU2003216841A1 (en) 2002-03-21 2003-03-17 Pressure monitor incorporating saw device
JP2003578881A JP4320593B2 (ja) 2002-03-21 2003-03-17 Ｓａｗデバイスと併用される圧力モニター
DE60312493T DE60312493T2 (de) 2002-03-21 2003-03-17 Druckmonitor mit oberflächenwellenvorrichtung
EP03712379A EP1485692B1 (fr) 2002-03-21 2003-03-17 Appareil de mesure de la pression comportant un dispositif a onde acoustique de surface (saw)
CNB038109573A CN100338451C (zh) 2002-03-21 2003-03-17 结合有表面声波器件的压力监测器

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
GB0206705.6 2002-03-21
GB0206705A GB0206705D0 (en) 2002-03-21 2002-03-21 Pressure monitor incorporating saw device
GB0302311.6 2003-01-31
GB0302311A GB2386684B (en) 2002-03-21 2003-01-31 Pressure monitor incorporating saw device
GBGB0305461.6A GB0305461D0 (en) 2003-03-10 2003-03-10 Improvements in the construction of saw devices
GB0305461.6 2003-03-10

Publications (1)

Publication Number Publication Date
WO2003081195A1 true WO2003081195A1 (fr) 2003-10-02

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Application Number Title Priority Date Filing Date
PCT/GB2003/001181 WO2003081195A1 (fr) 2002-03-21 2003-03-17 Appareil de mesure de la pression comportant un dispositif a onde acoustique de surface (saw)

Country Status (9)

Country Link
US (1) US7151337B2 (fr)
EP (1) EP1485692B1 (fr)
JP (1) JP4320593B2 (fr)
CN (1) CN100338451C (fr)
AT (1) ATE356981T1 (fr)
AU (1) AU2003216841A1 (fr)
DE (1) DE60312493T2 (fr)
TW (1) TWI266046B (fr)
WO (1) WO2003081195A1 (fr)

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GB2413215B (en) * 2003-03-10 2006-05-17 Transense Technologies Plc Improvements in the construction of SAW devices
US7165455B2 (en) 2004-12-18 2007-01-23 Honeywell International Inc. Surface acoustic wave sensor methods and systems
US7205701B2 (en) 2004-09-03 2007-04-17 Honeywell International Inc. Passive wireless acoustic wave chemical sensor
US7243547B2 (en) 2004-10-13 2007-07-17 Honeywell International Inc. MEMS SAW sensor
JP2008542701A (ja) * 2005-05-26 2008-11-27 トランセンス テクノロジーズ ピーエルシー 表面弾性波に基づく圧力センサ
US7576470B2 (en) 2007-04-30 2009-08-18 Honeywell International Inc. Mechanical packaging of surface acoustic wave device for sensing applications
US7651879B2 (en) 2005-12-07 2010-01-26 Honeywell International Inc. Surface acoustic wave pressure sensors
US7726184B2 (en) 2007-12-28 2010-06-01 Honeywell International Inc. Surface acoustic wave sensor and package
US7730772B2 (en) 2007-12-28 2010-06-08 Honeywell International Inc. Surface acoustic wave sensor and package
JP2010139506A (ja) * 2010-01-13 2010-06-24 Toppan Printing Co Ltd 圧力センサ
EP2287584A1 (fr) 2009-08-19 2011-02-23 Vectron International GmbH & Co. KG Système de mesure pour la mesure sans fil indépendante de la position de la température d'un objet de mesure
US8317392B2 (en) 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
US8384524B2 (en) 2008-11-26 2013-02-26 Honeywell International Inc. Passive surface acoustic wave sensing system

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JP4320593B2 (ja) * 2002-03-21 2009-08-26 トランセンス テクノロジーズ ピーエルシー Ｓａｗデバイスと併用される圧力モニター
US7392706B2 (en) * 2003-11-27 2008-07-01 Kyocera Corporation Pressure sensor device
GB2439344B (en) * 2006-06-23 2011-08-10 Transense Technologies Plc Post assembly automatic adjustment of tpms sensor preload
GB0612520D0 (en) * 2006-06-23 2006-08-02 Transense Technologies Plc Post assembly automatic adjustment of tpms sensor preload
GB0807405D0 (en) * 2008-04-23 2008-05-28 Transense Technologies Plc Pressure sensor
GB2462128B (en) 2008-07-25 2012-05-02 Transense Technologies Plc SAW sensor with adjustable preload
JP5281385B2 (ja) * 2008-12-19 2013-09-04 株式会社ブリヂストン センサモジュール、及びセンサモジュールを備えたタイヤ・ホイール組立体
US9032782B1 (en) * 2010-06-16 2015-05-19 Rapid Diagnostek, Inc. Diagnostic testing sensors for resonant detectors
CN102175358A (zh) * 2010-12-06 2011-09-07 北京理工大学 采用三层应力传递模型的无源无线声表面波应力传感器
TWI431445B (zh) 2010-12-22 2014-03-21 Ind Tech Res Inst 控制系統與其初始化方法
JP5658061B2 (ja) * 2011-03-08 2015-01-21 セイコーインスツル株式会社 力学量センサ
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EP1485692A1 (fr) 2004-12-15
TW200306410A (en) 2003-11-16
CN100338451C (zh) 2007-09-19
DE60312493D1 (de) 2007-04-26
ATE356981T1 (de) 2007-04-15
US7151337B2 (en) 2006-12-19
CN1653321A (zh) 2005-08-10
EP1485692B1 (fr) 2007-03-14
JP2005526240A (ja) 2005-09-02
JP4320593B2 (ja) 2009-08-26
TWI266046B (en) 2006-11-11
AU2003216841A1 (en) 2003-10-08
US20050225214A1 (en) 2005-10-13

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