DE60312493D1 - Druckmonitor mit oberflächenwellenvorrichtung - Google Patents

Druckmonitor mit oberflächenwellenvorrichtung

Info

Publication number
DE60312493D1
DE60312493D1 DE60312493T DE60312493T DE60312493D1 DE 60312493 D1 DE60312493 D1 DE 60312493D1 DE 60312493 T DE60312493 T DE 60312493T DE 60312493 T DE60312493 T DE 60312493T DE 60312493 D1 DE60312493 D1 DE 60312493D1
Authority
DE
Germany
Prior art keywords
saw device
monitor
diaphragm
chamber
distortable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE60312493T
Other languages
English (en)
Other versions
DE60312493T2 (de
Inventor
Victor Alexandrovich Kalinin
Raymond David Lohr
Mark Lee
Arthur John Leigh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Transense Technologies PLC
Original Assignee
Transense Technologies PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB0206705A external-priority patent/GB0206705D0/en
Priority claimed from GBGB0305461.6A external-priority patent/GB0305461D0/en
Application filed by Transense Technologies PLC filed Critical Transense Technologies PLC
Publication of DE60312493D1 publication Critical patent/DE60312493D1/de
Application granted granted Critical
Publication of DE60312493T2 publication Critical patent/DE60312493T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/0092—Pressure sensor associated with other sensors, e.g. for measuring acceleration or temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
    • G01L1/162—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators
    • G01L1/165—Measuring force or stress, in general using properties of piezoelectric devices using piezoelectric resonators with acoustic surface waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element
    • G01L9/0025—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element with acoustic surface waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Sawing (AREA)
DE60312493T 2002-03-21 2003-03-17 Druckmonitor mit oberflächenwellenvorrichtung Expired - Lifetime DE60312493T2 (de)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
GB0206705 2002-03-21
GB0206705A GB0206705D0 (en) 2002-03-21 2002-03-21 Pressure monitor incorporating saw device
GB0302311A GB2386684B (en) 2002-03-21 2003-01-31 Pressure monitor incorporating saw device
GB0302311 2003-01-31
GBGB0305461.6A GB0305461D0 (en) 2003-03-10 2003-03-10 Improvements in the construction of saw devices
GB0305461 2003-03-10
PCT/GB2003/001181 WO2003081195A1 (en) 2002-03-21 2003-03-17 Pressure monitor incorporating saw device

Publications (2)

Publication Number Publication Date
DE60312493D1 true DE60312493D1 (de) 2007-04-26
DE60312493T2 DE60312493T2 (de) 2007-07-12

Family

ID=28457506

Family Applications (1)

Application Number Title Priority Date Filing Date
DE60312493T Expired - Lifetime DE60312493T2 (de) 2002-03-21 2003-03-17 Druckmonitor mit oberflächenwellenvorrichtung

Country Status (9)

Country Link
US (1) US7151337B2 (de)
EP (1) EP1485692B1 (de)
JP (1) JP4320593B2 (de)
CN (1) CN100338451C (de)
AT (1) ATE356981T1 (de)
AU (1) AU2003216841A1 (de)
DE (1) DE60312493T2 (de)
TW (1) TWI266046B (de)
WO (1) WO2003081195A1 (de)

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE60312493T2 (de) * 2002-03-21 2007-07-12 Transense Technologies Plc, Bicester Druckmonitor mit oberflächenwellenvorrichtung
GB0305461D0 (en) * 2003-03-10 2003-04-16 Transense Technologies Plc Improvements in the construction of saw devices
WO2005052533A1 (ja) * 2003-11-27 2005-06-09 Kyocera Corporation 圧力センサ装置
US7000298B2 (en) 2004-04-20 2006-02-21 Honeywell International Inc. Method a quartz sensor
US7205701B2 (en) 2004-09-03 2007-04-17 Honeywell International Inc. Passive wireless acoustic wave chemical sensor
US7243547B2 (en) 2004-10-13 2007-07-17 Honeywell International Inc. MEMS SAW sensor
US7165455B2 (en) 2004-12-18 2007-01-23 Honeywell International Inc. Surface acoustic wave sensor methods and systems
GB2426590B (en) * 2005-05-26 2009-01-14 Transense Technologies Plc Pressure sensor
US7651879B2 (en) 2005-12-07 2010-01-26 Honeywell International Inc. Surface acoustic wave pressure sensors
GB2439344B (en) * 2006-06-23 2011-08-10 Transense Technologies Plc Post assembly automatic adjustment of tpms sensor preload
GB0612520D0 (en) * 2006-06-23 2006-08-02 Transense Technologies Plc Post assembly automatic adjustment of tpms sensor preload
US7576470B2 (en) 2007-04-30 2009-08-18 Honeywell International Inc. Mechanical packaging of surface acoustic wave device for sensing applications
US7726184B2 (en) 2007-12-28 2010-06-01 Honeywell International Inc. Surface acoustic wave sensor and package
US7730772B2 (en) 2007-12-28 2010-06-08 Honeywell International Inc. Surface acoustic wave sensor and package
GB0807405D0 (en) * 2008-04-23 2008-05-28 Transense Technologies Plc Pressure sensor
GB2462128B (en) 2008-07-25 2012-05-02 Transense Technologies Plc SAW sensor with adjustable preload
US8384524B2 (en) 2008-11-26 2013-02-26 Honeywell International Inc. Passive surface acoustic wave sensing system
JP5281385B2 (ja) * 2008-12-19 2013-09-04 株式会社ブリヂストン センサモジュール、及びセンサモジュールを備えたタイヤ・ホイール組立体
US8317392B2 (en) 2008-12-23 2012-11-27 Honeywell International Inc. Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions
DE102009056060B4 (de) 2009-08-19 2011-09-22 Vectron International Gmbh & Co.Kg Messsystem zur drahtlosen positionsunabhängigen Messung der Temperatur
JP5310572B2 (ja) * 2010-01-13 2013-10-09 凸版印刷株式会社 圧力センサ
US9032782B1 (en) 2010-06-16 2015-05-19 Rapid Diagnostek, Inc. Diagnostic testing sensors for resonant detectors
CN102175358A (zh) * 2010-12-06 2011-09-07 北京理工大学 采用三层应力传递模型的无源无线声表面波应力传感器
TWI431445B (zh) 2010-12-22 2014-03-21 Ind Tech Res Inst 控制系統與其初始化方法
JP5658061B2 (ja) * 2011-03-08 2015-01-21 セイコーインスツル株式会社 力学量センサ
WO2013074422A1 (en) 2011-11-17 2013-05-23 Transense Technologies Plc Quartz Substrate Orientations for Compact Monolithic Differential Temperature Sensor, and Sensors Using Same
EP3004829B1 (de) * 2013-06-06 2018-02-28 Technical University of Denmark Vollständig optischer drucksensor
CN104931127A (zh) * 2015-06-02 2015-09-23 杨松 桥梁式微动传感器和生理信号采集垫
JP6806901B2 (ja) * 2016-11-30 2021-01-06 キストラー ホールディング アクチエンゲゼルシャフト 力を測定するための測定値ピックアップ

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3878477A (en) 1974-01-08 1975-04-15 Hewlett Packard Co Acoustic surface wave oscillator force-sensing devices
US4216401A (en) * 1978-12-22 1980-08-05 United Technologies Corporation Surface acoustic wave (SAW) pressure sensor structure
FR2561383B1 (fr) 1984-03-16 1986-09-19 Thomson Csf Capteur de forces vectoriel a ondes elastiques de surface
JPS6180024A (ja) 1984-09-27 1986-04-23 Shimadzu Corp 表面弾性波圧力センサ
GB8610253D0 (en) * 1986-04-26 1986-05-29 Stc Plc Resonator device
GB2235533B (en) 1989-08-11 1994-02-09 Stc Plc Piezoelectric sensor device
US6060812A (en) * 1997-08-01 2000-05-09 Toda; Kohji Ultrasonic touch-position sensing device
GB2352814B (en) 1999-07-28 2003-04-09 Transense Technologies Plc Pressure monitor system
GB2361318A (en) 2000-04-12 2001-10-17 Marconi Caswell Ltd A surface acoustic wave strain sensor
US6571638B2 (en) 2000-06-30 2003-06-03 Sawtek, Inc. Surface-acoustic-wave pressure sensor and associated methods
GB0024813D0 (en) 2000-10-10 2000-11-22 Transense Technologies Plc Pressure monitoring device incorporating saw device
US6456168B1 (en) * 2000-12-29 2002-09-24 Cts Corporation Temperature compensated crystal oscillator assembled on crystal base
JP2003087080A (ja) * 2001-07-06 2003-03-20 Murata Mfg Co Ltd 弾性表面波素子及びその製造方法
DE60312493T2 (de) * 2002-03-21 2007-07-12 Transense Technologies Plc, Bicester Druckmonitor mit oberflächenwellenvorrichtung
US6907787B2 (en) * 2003-04-30 2005-06-21 Honeywell International Inc. Surface acoustic wave pressure sensor with microstructure sensing elements
US20050109095A1 (en) * 2003-11-20 2005-05-26 Sinnett Jay C. Saw transducer interface to pressure sensing diaphragm

Also Published As

Publication number Publication date
AU2003216841A1 (en) 2003-10-08
ATE356981T1 (de) 2007-04-15
EP1485692A1 (de) 2004-12-15
CN1653321A (zh) 2005-08-10
TWI266046B (en) 2006-11-11
US7151337B2 (en) 2006-12-19
WO2003081195A1 (en) 2003-10-02
JP2005526240A (ja) 2005-09-02
TW200306410A (en) 2003-11-16
US20050225214A1 (en) 2005-10-13
EP1485692B1 (de) 2007-03-14
CN100338451C (zh) 2007-09-19
DE60312493T2 (de) 2007-07-12
JP4320593B2 (ja) 2009-08-26

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition