WO2003023873A3 - Flacher aktor oder sensor mit interner vorspannung - Google Patents
Flacher aktor oder sensor mit interner vorspannung Download PDFInfo
- Publication number
- WO2003023873A3 WO2003023873A3 PCT/EP2002/010080 EP0210080W WO03023873A3 WO 2003023873 A3 WO2003023873 A3 WO 2003023873A3 EP 0210080 W EP0210080 W EP 0210080W WO 03023873 A3 WO03023873 A3 WO 03023873A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- sensor
- flat actuator
- material layer
- actuator
- middle layer
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
Landscapes
- Laminated Bodies (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10294168T DE10294168D2 (de) | 2001-09-07 | 2002-09-07 | Flacher Aktor oder Sensor mit Internen Vorspannung |
AU2002339541A AU2002339541A1 (en) | 2001-09-07 | 2002-09-07 | Flat actuator or sensor having an internal pretensioning |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10144182.7 | 2001-09-07 | ||
DE10144182 | 2001-09-07 | ||
DE20202297.8 | 2002-02-15 | ||
DE20202297U DE20202297U1 (de) | 2001-09-07 | 2002-02-15 | Flacher Aktor oder Sensor mit interner Vorspannung |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2003023873A2 WO2003023873A2 (de) | 2003-03-20 |
WO2003023873A3 true WO2003023873A3 (de) | 2003-11-27 |
Family
ID=26010095
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/010080 WO2003023873A2 (de) | 2001-09-07 | 2002-09-07 | Flacher aktor oder sensor mit interner vorspannung |
Country Status (4)
Country | Link |
---|---|
US (1) | US7045933B2 (de) |
AU (1) | AU2002339541A1 (de) |
DE (2) | DE20202297U1 (de) |
WO (1) | WO2003023873A2 (de) |
Families Citing this family (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050012434A1 (en) * | 2003-03-26 | 2005-01-20 | Continuum Photonics, Inc. | Robust piezoelectric power generation module |
DE102004031889B4 (de) * | 2004-06-30 | 2012-07-12 | Infineon Technologies Ag | Halbleiterbauteil mit einem Gehäuse und einem teilweise in eine Kunststoffgehäusemasse eingebetteten Halbleiterchip und Verfahren zur Herstellung desselben |
US20060132027A1 (en) * | 2004-12-22 | 2006-06-22 | Zhanjun Gao | Method and display element with reduced thermal stress |
DE102005028976A1 (de) * | 2005-06-22 | 2006-12-28 | Siemens Ag | Piezoaktor mit gesteigertem Hubvermögen |
WO2007138346A1 (en) * | 2006-05-27 | 2007-12-06 | Bae Systems Plc | A bonding tool and method |
DE102006036408B4 (de) * | 2006-08-02 | 2020-04-23 | Endress+Hauser SE+Co. KG | Verfahren zur Fertigung eines Messgerätes und entsprechendes Messgerät |
DE102006047411A1 (de) * | 2006-09-29 | 2008-04-03 | Technische Universität Dresden | Verfahren zur Herstellung von Wandlerwerkstoff-Modulen und Wandlerwerkstoff-Module |
US7834490B1 (en) * | 2006-12-28 | 2010-11-16 | The United States Of America As Represented By The Secretary Of The Navy | Bimetallic strips for energy harvesting, actuation and sensing |
DE102011078706B4 (de) * | 2011-07-05 | 2017-10-19 | Airbus Defence and Space GmbH | Verfahren und herstellungsvorrichtung zur herstellung eines mehrschichtigen aktuators |
WO2013054801A1 (ja) * | 2011-10-11 | 2013-04-18 | 株式会社村田製作所 | 流体制御装置、流体制御装置の調整方法 |
US9448628B2 (en) | 2013-05-15 | 2016-09-20 | Microsoft Technology Licensing, Llc | Localized key-click feedback |
US9514902B2 (en) * | 2013-11-07 | 2016-12-06 | Microsoft Technology Licensing, Llc | Controller-less quick tactile feedback keyboard |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19520796A1 (de) * | 1995-06-07 | 1996-12-12 | Siemens Ag | Piezoelektrischer Biegewandler |
DE19620826A1 (de) * | 1996-05-23 | 1997-11-27 | Siemens Ag | Piezoelektrisches Element sowie Verfahren zu dessen Herstellung |
EP1067609A1 (de) * | 1999-01-22 | 2001-01-10 | Kansai Research Institute | Piezoelektrischer dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf |
WO2001048834A2 (de) * | 1999-12-23 | 2001-07-05 | Siemens Aktiengesellschaft | Piezoelektrisches element |
EP1324401A1 (de) * | 2000-09-27 | 2003-07-02 | Matsushita Electric Industrial Co., Ltd. | Dielektrisches dünnfilmelement, stellelement damit, ink jet-kopf und ink jet-recorder |
Family Cites Families (30)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2836738A (en) * | 1956-05-02 | 1958-05-27 | Joseph W Crownover | Prestressed piezo crystal |
US3437849A (en) * | 1966-11-21 | 1969-04-08 | Motorola Inc | Temperature compensation of electrical devices |
US3683211A (en) * | 1971-04-05 | 1972-08-08 | Rca Corp | Ferro-electric transformers with means to supress or limit resonant vibrations |
US3916348A (en) * | 1975-01-31 | 1975-10-28 | Rca Corp | Temperature-compensated surface-propagated wave energy device |
US4078160A (en) * | 1977-07-05 | 1978-03-07 | Motorola, Inc. | Piezoelectric bimorph or monomorph bender structure |
JPS6048112B2 (ja) * | 1979-05-02 | 1985-10-25 | ソニー株式会社 | 電気・機械変換素子 |
US4541731A (en) * | 1983-04-21 | 1985-09-17 | Technar, Incorporated | Temperature sensitive transducer with a resonant bimetal disk |
JPS61295025A (ja) | 1985-06-25 | 1986-12-25 | Mitsubishi Petrochem Co Ltd | 薄膜フイルムの接着方法 |
US5481184A (en) | 1991-12-31 | 1996-01-02 | Sarcos Group | Movement actuator/sensor systems |
US5148076A (en) * | 1991-04-09 | 1992-09-15 | Honeywell Inc. | Apparatus for thermal tuning of path length control drivers |
US5231326A (en) * | 1992-01-30 | 1993-07-27 | Essex Electronics, Inc. | Piezoelectric electronic switch |
JP3238492B2 (ja) * | 1992-10-19 | 2001-12-17 | 株式会社タイセー | 圧電センサ |
US5471721A (en) | 1993-02-23 | 1995-12-05 | Research Corporation Technologies, Inc. | Method for making monolithic prestressed ceramic devices |
JP3471447B2 (ja) * | 1994-11-16 | 2003-12-02 | 日本碍子株式会社 | セラミックダイヤフラム構造体およびその製造方法 |
US5632841A (en) * | 1995-04-04 | 1997-05-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thin layer composite unimorph ferroelectric driver and sensor |
DE69739657D1 (de) * | 1996-07-19 | 2009-12-31 | Armand P Neukermans | Biokompatibler, implantierbarer microantrieb für ein hörgerät |
US5831371A (en) * | 1996-11-22 | 1998-11-03 | Face International Corp. | Snap-action ferroelectric transducer |
US5849125A (en) | 1997-02-07 | 1998-12-15 | Clark; Stephen E. | Method of manufacturing flextensional transducer using pre-curved piezoelectric ceramic layer |
US6213564B1 (en) * | 1997-04-15 | 2001-04-10 | Face International Corp | Anti-lock brake system with piezoelectric brake actuator |
US6030480A (en) | 1997-07-25 | 2000-02-29 | Face International Corp. | Method for manufacturing multi-layered high-deformation piezoelectric actuators and sensors |
US6060811A (en) | 1997-07-25 | 2000-05-09 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Advanced layered composite polylaminate electroactive actuator and sensor |
DE19732513C2 (de) | 1997-07-29 | 2002-04-11 | Eurocopter Deutschland | Verfahren zur Herstellung einer Verbundstruktur |
US6140745A (en) | 1998-10-16 | 2000-10-31 | Face International Corp. | Motor mounting for piezoelectric transducer |
DE19920576C1 (de) | 1999-05-04 | 2000-06-21 | Siemens Ag | Piezoelektrischer Biegewandler |
CN1170681C (zh) * | 1999-05-24 | 2004-10-13 | 松下电器产业株式会社 | 一种墨水喷射头 |
DE19948359A1 (de) | 1999-10-07 | 2001-01-11 | Siemens Ag | Aktoreinheit mit Keramikelement zur Temperaturkompensation |
US6392329B1 (en) * | 1999-10-12 | 2002-05-21 | Face International Corp. | Piezoelectric vibrating apparatus |
DE10008752B4 (de) | 2000-02-24 | 2005-07-28 | Deutsches Zentrum für Luft- und Raumfahrt e.V. | Piezoelektrischer Aktor |
US6512323B2 (en) | 2000-03-22 | 2003-01-28 | Caterpillar Inc. | Piezoelectric actuator device |
DE10023556A1 (de) | 2000-05-15 | 2001-11-29 | Festo Ag & Co | Piezo-Biegewandler sowie Verwendung desselben |
-
2002
- 2002-02-15 DE DE20202297U patent/DE20202297U1/de not_active Expired - Lifetime
- 2002-02-21 US US10/080,362 patent/US7045933B2/en not_active Expired - Fee Related
- 2002-09-07 DE DE10294168T patent/DE10294168D2/de not_active Expired - Fee Related
- 2002-09-07 AU AU2002339541A patent/AU2002339541A1/en not_active Abandoned
- 2002-09-07 WO PCT/EP2002/010080 patent/WO2003023873A2/de not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE19520796A1 (de) * | 1995-06-07 | 1996-12-12 | Siemens Ag | Piezoelektrischer Biegewandler |
DE19620826A1 (de) * | 1996-05-23 | 1997-11-27 | Siemens Ag | Piezoelektrisches Element sowie Verfahren zu dessen Herstellung |
EP1067609A1 (de) * | 1999-01-22 | 2001-01-10 | Kansai Research Institute | Piezoelektrischer dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf |
WO2001048834A2 (de) * | 1999-12-23 | 2001-07-05 | Siemens Aktiengesellschaft | Piezoelektrisches element |
EP1324401A1 (de) * | 2000-09-27 | 2003-07-02 | Matsushita Electric Industrial Co., Ltd. | Dielektrisches dünnfilmelement, stellelement damit, ink jet-kopf und ink jet-recorder |
Also Published As
Publication number | Publication date |
---|---|
US20030048040A1 (en) | 2003-03-13 |
US7045933B2 (en) | 2006-05-16 |
DE10294168D2 (de) | 2004-07-22 |
AU2002339541A1 (en) | 2003-03-24 |
WO2003023873A2 (de) | 2003-03-20 |
DE20202297U1 (de) | 2002-08-29 |
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