WO2003023873A3 - Flacher aktor oder sensor mit interner vorspannung - Google Patents

Flacher aktor oder sensor mit interner vorspannung Download PDF

Info

Publication number
WO2003023873A3
WO2003023873A3 PCT/EP2002/010080 EP0210080W WO03023873A3 WO 2003023873 A3 WO2003023873 A3 WO 2003023873A3 EP 0210080 W EP0210080 W EP 0210080W WO 03023873 A3 WO03023873 A3 WO 03023873A3
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
flat actuator
material layer
actuator
middle layer
Prior art date
Application number
PCT/EP2002/010080
Other languages
English (en)
French (fr)
Other versions
WO2003023873A2 (de
Inventor
Bernhard Doellgast
Original Assignee
Drei S Werk Praez Swerkzeuge G
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Drei S Werk Praez Swerkzeuge G filed Critical Drei S Werk Praez Swerkzeuge G
Priority to AU2002339541A priority Critical patent/AU2002339541A1/en
Priority to DE10294168T priority patent/DE10294168D2/de
Publication of WO2003023873A2 publication Critical patent/WO2003023873A2/de
Publication of WO2003023873A3 publication Critical patent/WO2003023873A3/de

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
    • H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders

Abstract

Ein flaches mehrschichtiges Bauelement (1) zum Einsatz als Aktor oder Sensor, welches unter interner Vorspannung steht und bezüglich seiner Form nur eine geringe thermische Drift zeigt, umfasst eine elektrisch aktivierbare Materialschicht (2), vorzugsweise eine Piezokeramik, und eine passive Mittellage (3) sowie eine weitere passive Materialschicht (4). Dabei weist die Mittellage (3) einen grösseren linearen thermischen Ausdehnungskoeffizienten als die Materialien der beiden benachbarten Schichten (2,4) auf.
PCT/EP2002/010080 2001-09-07 2002-09-07 Flacher aktor oder sensor mit interner vorspannung WO2003023873A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU2002339541A AU2002339541A1 (en) 2001-09-07 2002-09-07 Flat actuator or sensor having an internal pretensioning
DE10294168T DE10294168D2 (de) 2001-09-07 2002-09-07 Flacher Aktor oder Sensor mit Internen Vorspannung

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE10144182 2001-09-07
DE10144182.7 2001-09-07
DE20202297U DE20202297U1 (de) 2001-09-07 2002-02-15 Flacher Aktor oder Sensor mit interner Vorspannung
DE20202297.8 2002-02-15

Publications (2)

Publication Number Publication Date
WO2003023873A2 WO2003023873A2 (de) 2003-03-20
WO2003023873A3 true WO2003023873A3 (de) 2003-11-27

Family

ID=26010095

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/010080 WO2003023873A2 (de) 2001-09-07 2002-09-07 Flacher aktor oder sensor mit interner vorspannung

Country Status (4)

Country Link
US (1) US7045933B2 (de)
AU (1) AU2002339541A1 (de)
DE (2) DE20202297U1 (de)
WO (1) WO2003023873A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050012434A1 (en) * 2003-03-26 2005-01-20 Continuum Photonics, Inc. Robust piezoelectric power generation module
DE102004031889B4 (de) * 2004-06-30 2012-07-12 Infineon Technologies Ag Halbleiterbauteil mit einem Gehäuse und einem teilweise in eine Kunststoffgehäusemasse eingebetteten Halbleiterchip und Verfahren zur Herstellung desselben
US20060132027A1 (en) * 2004-12-22 2006-06-22 Zhanjun Gao Method and display element with reduced thermal stress
DE102005028976A1 (de) * 2005-06-22 2006-12-28 Siemens Ag Piezoaktor mit gesteigertem Hubvermögen
WO2007138346A1 (en) * 2006-05-27 2007-12-06 Bae Systems Plc A bonding tool and method
DE102006036408B4 (de) * 2006-08-02 2020-04-23 Endress+Hauser SE+Co. KG Verfahren zur Fertigung eines Messgerätes und entsprechendes Messgerät
DE102006047411A1 (de) * 2006-09-29 2008-04-03 Technische Universität Dresden Verfahren zur Herstellung von Wandlerwerkstoff-Modulen und Wandlerwerkstoff-Module
US7834490B1 (en) * 2006-12-28 2010-11-16 The United States Of America As Represented By The Secretary Of The Navy Bimetallic strips for energy harvesting, actuation and sensing
DE102011078706B4 (de) * 2011-07-05 2017-10-19 Airbus Defence and Space GmbH Verfahren und herstellungsvorrichtung zur herstellung eines mehrschichtigen aktuators
EP3346131B1 (de) * 2011-10-11 2022-04-27 Murata Manufacturing Co., Ltd. Fluidsteuerungsvorrichtung und verfahren zur anpassung der fluidsteuerungsvorrichtung
US9448628B2 (en) 2013-05-15 2016-09-20 Microsoft Technology Licensing, Llc Localized key-click feedback
US9514902B2 (en) * 2013-11-07 2016-12-06 Microsoft Technology Licensing, Llc Controller-less quick tactile feedback keyboard

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19520796A1 (de) * 1995-06-07 1996-12-12 Siemens Ag Piezoelektrischer Biegewandler
DE19620826A1 (de) * 1996-05-23 1997-11-27 Siemens Ag Piezoelektrisches Element sowie Verfahren zu dessen Herstellung
EP1067609A1 (de) * 1999-01-22 2001-01-10 Kansai Research Institute Piezoelektrischer dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf
WO2001048834A2 (de) * 1999-12-23 2001-07-05 Siemens Aktiengesellschaft Piezoelektrisches element
EP1324401A1 (de) * 2000-09-27 2003-07-02 Matsushita Electric Industrial Co., Ltd. Dielektrisches dünnfilmelement, stellelement damit, ink jet-kopf und ink jet-recorder

Family Cites Families (30)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2836738A (en) * 1956-05-02 1958-05-27 Joseph W Crownover Prestressed piezo crystal
US3437849A (en) * 1966-11-21 1969-04-08 Motorola Inc Temperature compensation of electrical devices
US3683211A (en) * 1971-04-05 1972-08-08 Rca Corp Ferro-electric transformers with means to supress or limit resonant vibrations
US3916348A (en) * 1975-01-31 1975-10-28 Rca Corp Temperature-compensated surface-propagated wave energy device
US4078160A (en) * 1977-07-05 1978-03-07 Motorola, Inc. Piezoelectric bimorph or monomorph bender structure
JPS6048112B2 (ja) * 1979-05-02 1985-10-25 ソニー株式会社 電気・機械変換素子
US4541731A (en) * 1983-04-21 1985-09-17 Technar, Incorporated Temperature sensitive transducer with a resonant bimetal disk
JPS61295025A (ja) 1985-06-25 1986-12-25 Mitsubishi Petrochem Co Ltd 薄膜フイルムの接着方法
US5481184A (en) 1991-12-31 1996-01-02 Sarcos Group Movement actuator/sensor systems
US5148076A (en) * 1991-04-09 1992-09-15 Honeywell Inc. Apparatus for thermal tuning of path length control drivers
US5231326A (en) * 1992-01-30 1993-07-27 Essex Electronics, Inc. Piezoelectric electronic switch
JP3238492B2 (ja) * 1992-10-19 2001-12-17 株式会社タイセー 圧電センサ
US5471721A (en) 1993-02-23 1995-12-05 Research Corporation Technologies, Inc. Method for making monolithic prestressed ceramic devices
JP3471447B2 (ja) * 1994-11-16 2003-12-02 日本碍子株式会社 セラミックダイヤフラム構造体およびその製造方法
US5632841A (en) * 1995-04-04 1997-05-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Thin layer composite unimorph ferroelectric driver and sensor
US5977689A (en) * 1996-07-19 1999-11-02 Neukermans; Armand P. Biocompatible, implantable hearing aid microactuator
US5831371A (en) * 1996-11-22 1998-11-03 Face International Corp. Snap-action ferroelectric transducer
US5849125A (en) 1997-02-07 1998-12-15 Clark; Stephen E. Method of manufacturing flextensional transducer using pre-curved piezoelectric ceramic layer
US6213564B1 (en) * 1997-04-15 2001-04-10 Face International Corp Anti-lock brake system with piezoelectric brake actuator
US6060811A (en) 1997-07-25 2000-05-09 The United States Of America As Represented By The United States National Aeronautics And Space Administration Advanced layered composite polylaminate electroactive actuator and sensor
US6030480A (en) 1997-07-25 2000-02-29 Face International Corp. Method for manufacturing multi-layered high-deformation piezoelectric actuators and sensors
DE19732513C2 (de) 1997-07-29 2002-04-11 Eurocopter Deutschland Verfahren zur Herstellung einer Verbundstruktur
US6140745A (en) 1998-10-16 2000-10-31 Face International Corp. Motor mounting for piezoelectric transducer
DE19920576C1 (de) 1999-05-04 2000-06-21 Siemens Ag Piezoelektrischer Biegewandler
WO2000071345A1 (fr) * 1999-05-24 2000-11-30 Matsushita Electric Industrial Co. Ltd. Tete a jet d'encre et son procede de production
DE19948359A1 (de) 1999-10-07 2001-01-11 Siemens Ag Aktoreinheit mit Keramikelement zur Temperaturkompensation
US6392329B1 (en) * 1999-10-12 2002-05-21 Face International Corp. Piezoelectric vibrating apparatus
DE10008752B4 (de) 2000-02-24 2005-07-28 Deutsches Zentrum für Luft- und Raumfahrt e.V. Piezoelektrischer Aktor
US6512323B2 (en) 2000-03-22 2003-01-28 Caterpillar Inc. Piezoelectric actuator device
DE10023556A1 (de) 2000-05-15 2001-11-29 Festo Ag & Co Piezo-Biegewandler sowie Verwendung desselben

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19520796A1 (de) * 1995-06-07 1996-12-12 Siemens Ag Piezoelektrischer Biegewandler
DE19620826A1 (de) * 1996-05-23 1997-11-27 Siemens Ag Piezoelektrisches Element sowie Verfahren zu dessen Herstellung
EP1067609A1 (de) * 1999-01-22 2001-01-10 Kansai Research Institute Piezoelektrischer dünnschichtanordnung, verfahren zu deren herstellung und tintenstrahldruckkopf
WO2001048834A2 (de) * 1999-12-23 2001-07-05 Siemens Aktiengesellschaft Piezoelektrisches element
EP1324401A1 (de) * 2000-09-27 2003-07-02 Matsushita Electric Industrial Co., Ltd. Dielektrisches dünnfilmelement, stellelement damit, ink jet-kopf und ink jet-recorder

Also Published As

Publication number Publication date
AU2002339541A1 (en) 2003-03-24
US20030048040A1 (en) 2003-03-13
DE20202297U1 (de) 2002-08-29
DE10294168D2 (de) 2004-07-22
WO2003023873A2 (de) 2003-03-20
US7045933B2 (en) 2006-05-16

Similar Documents

Publication Publication Date Title
WO2003023873A3 (de) Flacher aktor oder sensor mit interner vorspannung
WO2003032855A8 (en) Surgical drape
WO2003030187A3 (de) Elektrokeramisches bauelement mit mehreren kontaktflächen
WO2006023594A3 (en) High strain glass/glass-ceramic containing semiconductor-on-insulator structures
EP2074695B8 (de) Siliziumresonator des stimmgabeltyps
EP1522535A3 (de) Wärmedämmschicht
AU2003233327A1 (en) Method for the production of a monolithic multilayer actuator, monolithic multilayer actuator made of a piezoceramic or electrostrictive material, and external electrical contact for a monolithic multilayer actuator
AU2002210541A1 (en) Polyethylene pipe
WO2007124924A3 (de) Verbindungsbauteil mit temperaturfestem sensorelement
WO2006068893A3 (en) Flat stress free display element
WO2004076704A3 (en) Thermal barrier coating having low thermal conductivity
AU2002242819A1 (en) Magnetostrictive actuator
AU2002358803A1 (en) Magnetostrictive sensor element
HK1062357A1 (en) Thin film piezoelectric element, its manufacturingmethod, and actuator using the same
ATE336080T1 (de) Piezo-biegewandler sowie verwendung desselben
WO2000079259A3 (de) Gassensor mit planarem sensorelement, dessen längskanten eine fase aufweisen zur erhöhung der thermoschockfestigkeit
EP1367437A3 (de) Wärmeempfindliches Aufzeichnungsmaterial
WO2004019425A3 (de) Piezoaktor
WO2003038913A3 (de) Nitrid-basierendes halbleiterbauelement
WO2005016656A3 (en) Imaging material with improved scratch resistance
PL368606A1 (en) Structural component coated with a hard material and comprising an intermediate layer for improving the adhesive strength of the coating
DE60207482D1 (de) Kraftstoffeinspritzventil mit piezoelektrischem Aktor
WO2003024711A3 (de) Verfahren zur herstellung eines keramischen substrats und keramisches substrat
WO2003019689A3 (de) Piezomotor mit kupferelektroden
WO2003003478A3 (de) Piezoelektrischer biegewandler

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A2

Designated state(s): AE AL AM AT AU AZ BA BB BG BR CA CH CN CU CZ DE DK EE ES FI GB GE GH GM HR HU ID IL IN IS JP KE KP KR KZ LC LK LR LS LT LU LV MD MK MN MW MX NO NZ PL PT RO RU SE SG SI SK SL TJ TM TR TT UA UG VN YU ZA

AL Designated countries for regional patents

Kind code of ref document: A2

Designated state(s): GH GM KE LS MW MZ SD SL SZ UG ZM ZW AM AZ BY KG KZ RU TJ TM AT BE BG CH CY CZ DK EE ES FI FR GB GR IE IT LU MC PT SE SK TR BF BJ CF CG CI GA GN GQ GW ML MR NE SN TD TG

121 Ep: the epo has been informed by wipo that ep was designated in this application
REF Corresponds to

Ref document number: 10294168

Country of ref document: DE

Date of ref document: 20040722

Kind code of ref document: P

WWE Wipo information: entry into national phase

Ref document number: 10294168

Country of ref document: DE

122 Ep: pct application non-entry in european phase
NENP Non-entry into the national phase

Ref country code: JP

WWW Wipo information: withdrawn in national office

Ref document number: JP

REG Reference to national code

Ref country code: DE

Ref legal event code: 8607