WO2003014757A1 - Detecteur de champs magnetiques - Google Patents

Detecteur de champs magnetiques Download PDF

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Publication number
WO2003014757A1
WO2003014757A1 PCT/EP2002/008820 EP0208820W WO03014757A1 WO 2003014757 A1 WO2003014757 A1 WO 2003014757A1 EP 0208820 W EP0208820 W EP 0208820W WO 03014757 A1 WO03014757 A1 WO 03014757A1
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WO
WIPO (PCT)
Prior art keywords
inductor
magnetic field
core
current
sensor device
Prior art date
Application number
PCT/EP2002/008820
Other languages
English (en)
Inventor
Lutz Axel May
Georg Cuntze
Original Assignee
Fast Technology Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fast Technology Ag filed Critical Fast Technology Ag
Priority to JP2003519437A priority Critical patent/JP2004538467A/ja
Priority to EP02764837A priority patent/EP1415170A1/fr
Publication of WO2003014757A1 publication Critical patent/WO2003014757A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/04—Measuring direction or magnitude of magnetic fields or magnetic flux using the flux-gate principle

Definitions

  • This invention relates to a magnetic field sensor device and more particularly, though not exclusively to a sensor device for use with a magnetised transducer element which emanates a magnetic field that is a function of an applied torque or force.
  • the invention also relates to a sensor circuit incorporating such a sensor device. Such circuits may be referred to as signal conditioning circuits.
  • Magnetic transducers have found increasing application in recent times for measuring torque in a shaft.
  • the magnetised transducer element is carried by the shaft and may be a magnetised region of it.
  • a non-contacting sensor arrangement of one or more sensor devices is located adjacent the region.
  • Non-contacting sensor devices are of particular advantage where the shaft under torque is rotating.
  • Permanently magnetised transducer elements which emanate a torque-dependent magnetic field have the advantage of operating with sensor devices which may be regarded as passive in that they do not require active energisation to induce magnetisation in the transducer element.
  • Hall effect devices are produced in essentially planar form and their maximum sensitivity is perpendicular to the plane of the device. If used with the device plane lying radially, e.g. in respect of the axis of rotation of a shaft, the Hall effect device is sensitive to an axially directed (in-line) component of the magnetic field and is capable of high lateral resolution in the axial direction. Lateral resolution is not as good if the device is oriented at 90° to the radial plane to detect a radial field component.
  • the major disadvantage of Hall effect devices is they have a low sensitivity and low resolution and are not adequate detectors of the small magnetic fields typical of magnetic transducer elements.
  • Magnetoresistive (MR) devices fall into two kinds: the anisotropic magnetoresistor (AMR); and the giant magnetoresistor (GMR). The latter has been more favoured in recent times. Both types of devices are essentially of planar form and exhibit a change in resistance which is dependent on the area dimensions of the device so that sensitivity has to be balanced against resolution. Also due to the small thickness such devices are limited in the range of magnetic field which they can detect. Although capable of higher lateral resolution than known saturable inductor devices they do not have as good a range as Hall effect devices and, as mentioned, compromise has to be found between resolution and sensitivity.
  • AMR anisotropic magnetoresistor
  • GMR giant magnetoresistor
  • Saturable core sensor devices comprise an inductor in the form of a coil helically wound on a core.
  • the core may be of the material available from Allied Signal under the designation 2705M. This is a saturable high permeability, cobalt-based amorphous metallic glass foil.
  • One or more such inductors may be connected into a signal conditioning circuit such as that disclosed in published International application W098/52063.
  • Saturable core sensor devices can be made with high sensitivity and two or more inductors can be connected in series in the signal conditioning circuit such that they act additively for the magnetic field to be measured but with cancellation of a common external field such as the Earth's magnetic field.
  • a saturable core sensor device has an optimum sensitivity in the direction of the axis of the coil. The response pattern is circularly symmetrical about the axis.
  • the disadvantage of current saturable inductor sensor devices lies in their lack of lateral resolution. Typically they are 4-8 mm in length and 2 mm in diameter. The length dimension determines lateral resolution for a magnetic field component in the direction of the axis. The sensor response is effectively an integration of the field sensed along the length of the device, and the field may vary in both magnitude and direction over the length.
  • a spiral coil formed about a core.
  • the spiral lies essentially in a plane and the plane is preferably normal to an axis through the core.
  • the sensor device can have a plurality of spatially parallel spiral coils, preferably an even number, all acting on a single core element with a small overall length dimension.
  • the core can be provided as a separate entity which is inserted in an axial hole. The hole is formed during the fabrication process for the electrical structure or by drilling out after fabrication.
  • the core may be a section of a wire of an appropriate magnetic material such as permalloy. The required magnetic properties are discussed further below.
  • a sensor device embodying the present invention may be connected as the magnetic field-sensitive element in a sensor circuit comprising means for driving the sensor device into or out of saturation, and means responsive to the driving of the sensor device to generate a signal dependent on a parameter of such driving as a measure of a sensed magnetic field.
  • a sensor device embodying the invention may find particular application as the saturable inductor in the signal conditioning circuit disclosed in above- mentioned W098/52063.
  • the coil(s) employed in the implementation of the invention may be fabricated to small dimensions and referred to as microcoils.
  • microcoils We are aware of proposals already made for fabricating microcoils. They have been applied as part of thin film write heads for data storage applications but they are not used as read heads sensing magnetic fields because of their extremely low sensitivity.
  • Another proposal is to use a pair of facing spiral coils to provide an actuator (rather like a solenoid) developing a force between the turns of the coils due to the local interaction of magnetic fields created by current flowing through the coils.
  • the Institute of Micro Technique (IMT) of the University of Braunschweig, Germany have succeeded in producing a pair of microcoils for this purpose. This coil system has no magnetic core.
  • the spiral coils investigated have not been applied to sensing a magnetic field.
  • the present invention is directed to a structure for a magnetic field sensing application.
  • the sensor device involves the use of a saturable core.
  • the sensor device embodying the invention is directed towards combining high sensitivity and high resolution as already discussed. The invention and its practice will be described further with reference to the accompanying drawings.
  • Fig. 1 shows the structure of a planar spiral coil with core to form a saturable inductor in accord with the invention, and Fig. I a shows an enlarged portion of the spiral coil annotated with dimensional parameters;
  • Fig. 2 shows a face view of a pair of spiral coils of opposite winding senses as seen superimposed on one another;
  • Fig. 3 shows a diagrammatic axial section through a pair of parallel planar spiral coils structured and interconnected to produce an axial field of the same sense in a central core providing a saturable inductor in accord with the invention
  • Fig. 4 is an enlarged view of the central portion of the structure of Fig. 3;
  • Fig. 5 is a diagrammatic axial section through another embodiment of a saturable inductor according to the invention using four parallel planar spiral coils in two pairs;
  • Fig. 6 is an enlarged view of the central portion of the structure of Fig. 5;
  • Figs. 7a and 7b illustrate stages in a fabrication process for the spiral coils and core. DESCRIPTION OF PREFERRED EMBODIMENTS
  • Fig. 1 shows a single layer, spiral coil, saturable inductor 1 formed of a single spiral planar winding 10 extending clockwise (cw) from an outer end portion 31 to an inner end portion 32.
  • the winding comprises a plurality of turns in which a turn may be taken as each 360 ° traverse of the winding about a central axis 50 with respect to a datum such as the radial line 12.
  • the winding is in the form of a layer of conductive material having, in the illustrated example, a uniform width w and uniform turns spacing s better seen in Fig. la and a uniform thickness t perpendicular to the plane of the figure - see Fig. 4.
  • a saturable core 20 assumed to be of circular cross-section, better seen in Figs. 3 and 4. It is preferred for homogeneity (uniformity) of magnetisation across the cross-section of the core 20 that the coil winding is relatively tightly wound to be near circular in any one turn; that is the radius changes relatively slowly as a function of angle about the axis. This is further discussed below.
  • the winding pitch is therefore (w + s) so that the radius increases by (w + s) over one turn (angle of 2 ⁇ r).
  • Other relevant dimensional parameters are given on Fig. 4 and following the description of the design and fabrication of a saturable inductor embodying the invention, the effects of relative variation in certain parameters will be discussed.
  • the parameters s and w are illustrated in Fig. la which shows a portion of two next adjacent turns of spiral 10, the turns being shown shaded.
  • the core material is magnetic preferably with a saturation magnetisation B s less than one Tesla (10 4 Gauss). Also the crystalline anisotropy constant (K) and magnetostriction constant ( ⁇ ) of the core material should be small in order to minimise noise sources due to internal stress induced in the core material during the deposition process to be described.
  • a suitable material meeting these requirements is Permalloy (a Ni/Fe alloy (Ni 8 Fe 22 ) with other lesser constituents), the K and ⁇ values for which are close to zero. Permalloy can be deposited by means of electroplating, sputtering and other deposition techniques, and can be subsequently etched.
  • Fig. 2 is a face view of a pair of oppositely wound spiral coils 10a and 10b showing one superimposed on the other (hence the interference pattern), connected at their respective inner ends 32a and 32b and energisable at their respective outer ends 31a and 31b.
  • the coils act to generate the same sense of magnetic flux in a common core 20.
  • coils 10a and 10b lie in spaced parallel planes normal to axis 50 as is better seen in Figs. 3 and 4.
  • Fig. 3 is a diametric axial view through the pair of coils 10a and 10b in which the winding turns such as 41a, 41b and 42a, 42b are shown shaded.
  • Turns 41a, 42a are within the same spiral coil (10a) but are indicated separately because the current directions in them are opposite relative to the plane of the figure: likewise with turns 41b, 42b of coils 10b.
  • the turns of the coils 10a, 10b are axially aligned - superposed as seen in the face view of Fig. 2.
  • a diametric section at 90° to that of Fig. 2 would show the turns staggered or interleaved.
  • Fig. 4 is an enlarged view of the central portion of the structure of Fig. 3.
  • Fig. 4 also illustrates the thickness parameter t for the coil layers, that is the thickness in the axial direction.
  • the core 20 extends through both coils.
  • the inner end portions 32a and 32b which preferably overlap as seen in a face view, are connected by an axial throughbridge 44 to connect the coils in series.
  • an energisation source (not shown)
  • the currents in the turns on one side of the axis 50 will be as indicated at 40a and 40b with the current directions normal to the plane of the drawing being opposite in the two spirals 10a, 10b as indicated, and on the other side of the axis 50, the directions being the reverse as indicated at 40'a and 40'b, therefore remaining oppositely directed in the two coils.
  • the currents act additively to produce a magnetic field H in the core 20 directed along axis 50.
  • the resultant magnetic flux and magnetisation in the core 20 are also essentially in the axial direction.
  • Fig. 4 also shows other dimensional parameters which are discussed below. These are: the spacing d between the adjacent layers, the diameter ⁇ of the core 20 and its axial length I.
  • Figs. 5 and 6 there is another like pair of coils 10c, 10d.
  • the core 20 extends through all four spatially parallel coils. As in Figs. 3 and 4 the winding turns are shown shaded, e.g. 41a, 41 d and 42a, 42d.
  • Coils 10a, 10b are connected at their inner ends by bridge 44a; the coils 10c, 10d are similarly connected by bridge 44b.
  • the coils in sequence along the axis have alternating winding sense, e.g. cw-ccw-cw-cccw.
  • the outer end of coil 10b is connected to the outer end of adjacent coil 10c by axially- directed bridge 46 so that the coils are in electrical series connection for energisation by a source (not shown) connected to ends 31a and 31 d.
  • the same current flows in each coil.
  • the resultant alternate current directions are indicated at 40a-40d above the axis and at 40'a-40'd below the axis where the directions are reversed. It will be understood that other winding senses and interconnections are possible (e.g. parallel and series/parallel combinations) provided that each coil produces a magnetic field in the core of the same sense. It will also be understood that odd numbers of coils are usable but that by having even numbers all external connections can be made at the outer periphery of the coil assembly.
  • the spiral coils may be any conductive material of low specific resistance, and preferably non-magnetic.
  • conductors are aluminium, copper and gold.
  • non-magnetic materials is the avoidance of the creation of parasitic magnetic fields within the conductors themselves.
  • the spiral coil structure described above can be implemented using techniques known in the semiconductor and related arts, the structure being fabricated layer-by-layer with the coils at 90° to the orientation shown in Figs. 3-6. Steps in the fabrication are diagrammatically illustrated in Figs. 7a and 7b.
  • Fig. 7a shows an insulating layer or substrate 100 on which is deposited a first layer of conductive material, e.g. Al, Cu, Au, forming a spiral coil 110a using masking, e.g. photo-lithographic, and, if appropriate, etching techniques well known in the art. Also deposited in the first layer is a central boss 120 of the core material such as Permalloy. This is followed by another layer 102 of insulating material, e.g. an oxide such as AI02 or Si0 2 , which is apertured at 122 and 124 as shown in Fig. 7b. The aperture 122 overlays the inner end portion of coil 110a and the aperture 122 overlays the core 124.
  • a first layer of conductive material e.g. Al, Cu, Au
  • a spiral coil 110a using masking, e.g. photo-lithographic, and, if appropriate, etching techniques well known in the art.
  • a central boss 120 of the core material such as Permalloy
  • the deposition of a second spiral 110b above layer 102 also causes deposition of conductive material through aperture 122 to form a bridge connection 144 of the inner ends of coils 110a and 110b.
  • the core material is deposited through aperture 124 to form a continuation 120' of core 120.
  • the fabrication steps can be repeated to form further planar spiral coils in a stack with adjacent coils axially spaced apart. It will be noted, however, that in accordance with the scheme of Figs. 5 and 6, the next coil layer above 110b would be isolated from layer 110b at the inner end and a bridging connection made at the outer ends.
  • the formation of the electrical components of the structure of Figs. 7a and 7b may be separated from the provision of the magnetic core.
  • the structure could be fabricated with the core aperture 124 but without depositing the core material.
  • the core could be inserted into the hole as a separate entity, e.g. a section of a wire of the core material.
  • the aperture 124 could be initially omitted in the layer-by-layer fabrication so that the axial region is composed of the insulating material.
  • the structure thus fabricated may be then drilled to receive the core as a separate entity as just described. It may prove desirable in these circumstances to radially space the inner ends of the coils further from the coil and to compensate for any consequent loss of magnetic field in the core by increasing the thickness t of the coils.
  • Other spiral shapes could be adopted but the desirability of homogeneity of magnetisation in the core should be kept in mind. It is, of course, possible to have a core cross-section other than circular and the winding shape may be selected in relation to the shape of the cross-section.
  • the minimum preferred configuration for a coil system consists of two spirals (Figs. 2 and 3) with a common core.
  • a preferred design for the coil system is to fabricate successive spiral conductor layers with alternating winding directions, to connect the spirals in pairs by a connection made at the inner ends of a pair and to connect successive pairs (assuming there is more than one pair) at the outer ends of adjacent spirals. This is the design scheme adopted in Fig. 5. The outer ends of the two outermost spirals of the complete group are then used for serial energisation of the group.
  • the number of windings of a spiral has to be optimised according to the resulting flux density to be induced in the core and the resistance of the lead (given by the specific resistance and the length of the lead). A higher number of turns does not necessarily increase the resulting flux density to the same factor but increases the overall resistance and thus the power consumption of the coil system. For a given cross section of the lead, e.g.
  • An axially short core has a worse demagnetisation factor N (0 ⁇ N ⁇ 1) compared to a longer core, with both having the same core diameter.
  • a large demagnetisation factor N will then result in a demagnetising field at the open ends of the core which then cannot be fully saturated by the coil system.
  • magnetic field sensor devices in accord with this invention can be fabricated to have an axial length in the region of 0.1 to 0.2 mm and a diameter in the region of 1 to 2mm.
  • One or more saturable core inductors of the invention may be used as the inductor L in the signal conditioning circuits described in above-mentioned specification W098/52063 so as to provide an output representing the magnetic field sensed by the inductor(s).
  • the core should be operated in such a way that it is highly sensitive to an external magnetic field acting in conjunction with that generated by the coil structure associated with the core.
  • the operation of the saturating core in the presence of an external magnetic field to be detected is to produce an output signal which is a function of the detected field.
  • One way in which to operate a saturating core for this purpose is disclosed in aforementioned W098/52063.
  • a fully saturated core may be referred to as homogeneously saturated and the quantitative degree of saturation can be expressed as the homogeneity of saturation.
  • the core material was selected to be the previously mentioned Ni/Fe alloy, Ni sFe 22 .
  • the conductor material for the coil(s) was selected to be copper with a cross- section (t x w) of 8 ⁇ m x 20 ⁇ m.
  • the preferred thickness obtained from the simulation discussed below is 16mm.
  • the spacing s of the next adjacent turns was selected as 10 ⁇ m giving a pitch (w + s) per turn of a spiral coil of 30 ⁇ m.
  • the current density was considered as that existing in a winding whose width is taken to be the full winding pitch (w + s) in which a uniform (homogeneous) direct current density Jh exists.
  • the saturation magnetisation B s of the core has to be low. It is also desirable to have low magnetostrictive effects within the core to reduce noise. This can be achieved by using an amorphous material which has no crystallographic preferred axis, such as a metallic glass. Unfortunately metallic glass cannot be deposited on a substrate.
  • amorphous material which has no crystallographic preferred axis, such as a metallic glass.
  • metallic glass cannot be deposited on a substrate.
  • Candidate materials for deposition on substrates are the Ni 78 Fe 22 alloy (Permalloy) already mentioned, Nickel itself and other Ni/Fe alloys, such as Ne 65 Fe 35 .
  • An Ni core does not saturate sufficiently.
  • the Ne 65 Fe 35 alloy does saturate well as does Permalloy but only the latter has no crystalline anisotropy or magnetostriction. The last-mentioned factors lead to increased noise.
  • the length of the core should be about the axial length of the stack of planar spiral coils.
  • the aspect ratio of the core is important because increasing the diameter will increase the demagnetisation factor. This could be counteracted by a core material with a higher coercivity He. However, this then leads to the use of a material with greater crystallographic anisotropy which leads to magnetostriction. The problems then arising are discussed under "Core Material" above.
  • a spiral coil is relatively flat - i.e. thin in axial direction - and radially wide. This leads to a magnetic field strongly concentrated within the coil and within a stack of closely-spaced coils. Therefore, it is preferred to use a core with the same axial length as the axial length occupied by the stack of spiral coil. Also maintaining the core length low is advantageous in achieving a good axial or lengthwise resolution of the sensor device.
  • the outer turns have lesser effect on the magnetic flux in the core.
  • the layer thickness is increased without reducing the uniformity of magnetisation of the core (homogenous magnetisation) even though the volume of core material is increased.
  • a thicker conductor layer (but of the same width w) allows the current in the winding to be increased for the same allowed current density. This in turn increases the amount of saturated material in the core.
  • a conductor layer thickness t 16 ⁇ m is preferred.

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

Cette invention concerne une un détecteur à bobine (1) de champs magnétiques, en particulier du type à noyau de saturation, qui comporte au moins une bobine d'induction (10) à enroulements spiralés plans autour d'un noyau (20). Idéalement, on trouve une pluralité d'enroulements spiralés plans (10a-10d) empilés sur l'axe (50) du noyau. Des enroulements adjacents (10a:10b) formant une paire sont enroulés en spirales, leurs extrémités intérieures (32a: 32b) étant reliées l'une à l'autre par des pontets (44). La bobine peut comporter deux à trois bobinages de ce type. Les divers bobinages (10a-10d) et le noyau central (20) peuvent être fabriqués au moyen de techniques de dépôt sélectif plan utilisées dans l'industrie des semi-conducteurs. Le noyau magnétique (50) peut constituer un élément séparé inséré dans un orifice axial formé par l'empilement de bobinages. Le noyau est fait de préférence de permalloy. Sont indiqués la largeur des spires (w), l'espacement (s) et l'épaisseur (t) des enroulements ainsi que l'écart axial (d) entre enroulements et le diamètre du noyau (Ζ)
PCT/EP2002/008820 2001-08-09 2002-08-07 Detecteur de champs magnetiques WO2003014757A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2003519437A JP2004538467A (ja) 2001-08-09 2002-08-07 磁界検知装置
EP02764837A EP1415170A1 (fr) 2001-08-09 2002-08-07 Detecteur de champs magnetiques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB0119478A GB0119478D0 (en) 2001-08-09 2001-08-09 Magnetic field sensor
US0119478.6 2001-08-09

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WO2003014757A1 true WO2003014757A1 (fr) 2003-02-20

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JP (1) JP2004538467A (fr)
GB (1) GB0119478D0 (fr)
WO (1) WO2003014757A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9448087B2 (en) 2011-10-10 2016-09-20 Methode Electronics, Inc. Contactless magnetic linear position sensor
WO2017117593A1 (fr) * 2016-01-03 2017-07-06 Boston Scientific Scimed Inc. Transducteur à réseau de nanofils magnétiques
US10240989B2 (en) 2013-12-30 2019-03-26 Method Electronic, Inc. Magnetoelastic sensor using strain-induced magnetic anisotropy to measure the tension or compression present in a plate
US10254181B2 (en) 2014-03-26 2019-04-09 Methode Electronics, Inc. Systems and methods for reducing rotation noise in a magnetoelastic device and measuring torque, speed, and orientation
CN113013111A (zh) * 2019-12-20 2021-06-22 英飞凌科技股份有限公司 定子封装件，转子封装件和感应式角度传感器

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN117057189B (zh) * 2023-08-17 2024-07-02 天津大学 一种交流电力电缆磁场传感器及其参数优化设计方法

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ES2036454A2 (es) * 1991-06-26 1993-05-16 Telettra Espanola Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion.
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EP0284196A2 (fr) * 1987-03-06 1988-09-28 THE GENERAL ELECTRIC COMPANY, p.l.c. Magnétomètre
ES2036454A2 (es) * 1991-06-26 1993-05-16 Telettra Espanola Dispositivo magnetometrico de tecnologia planar y proceso de fabricacion.
WO1998052063A1 (fr) * 1997-05-13 1998-11-19 Lutz Axel May Circuit de conditionnement destine a un capteur de couple

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9448087B2 (en) 2011-10-10 2016-09-20 Methode Electronics, Inc. Contactless magnetic linear position sensor
US10240989B2 (en) 2013-12-30 2019-03-26 Method Electronic, Inc. Magnetoelastic sensor using strain-induced magnetic anisotropy to measure the tension or compression present in a plate
US10254181B2 (en) 2014-03-26 2019-04-09 Methode Electronics, Inc. Systems and methods for reducing rotation noise in a magnetoelastic device and measuring torque, speed, and orientation
WO2017117593A1 (fr) * 2016-01-03 2017-07-06 Boston Scientific Scimed Inc. Transducteur à réseau de nanofils magnétiques
US10869612B2 (en) 2016-01-03 2020-12-22 Boston Scientific Scimed Inc. Transducer with magnetic nanowire array
CN113013111A (zh) * 2019-12-20 2021-06-22 英飞凌科技股份有限公司 定子封装件，转子封装件和感应式角度传感器

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GB0119478D0 (en) 2001-10-03
EP1415170A1 (fr) 2004-05-06

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