WO2003008898A1 - Koordinatenmessgerät mit zusatzwärmequelle - Google Patents
Koordinatenmessgerät mit zusatzwärmequelle Download PDFInfo
- Publication number
- WO2003008898A1 WO2003008898A1 PCT/EP2002/007469 EP0207469W WO03008898A1 WO 2003008898 A1 WO2003008898 A1 WO 2003008898A1 EP 0207469 W EP0207469 W EP 0207469W WO 03008898 A1 WO03008898 A1 WO 03008898A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- coordinate measuring
- heat
- constant
- measuring device
- power
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
Definitions
- the invention relates to a coordinate measuring machine with at least one element associated therewith and / or emitting heat integrated therein, such as a motor or light source. Furthermore, the invention relates to a method for operating a coordinate measuring machine with an element assigned to it and / or emitting heat integrated therein, such as a motor or light source.
- a coordinate probe is optionally replaced by a temperature sensor in order to determine the temperature of the object to be measured.
- a temperature sensor in order to determine the temperature of the object to be measured.
- thermally insulated measuring tables in coordinate measuring machines in order to exclude the influence of temperature fluctuations (see DE.Z .: coordinate measuring machines from Carl Zeiss. Prismo. The scale. P. 13). Even if, according to the first proposal, temperature fluctuations of the object to be measured can be detected and compensated, it cannot be ruled out that due to different temperatures, for example in the peripheral areas of the bearing or changes in temperature in the bearing, deformations which affect the measured values occur.
- the use of thermally insulated tables leads to a considerable increase in the cost of coordinate measuring machines. Irrespective of this, temperature-related deformations of the holders of corresponding thermally insulated tables can in turn lead to measurement errors.
- the present invention is based on the problem of further developing a coordinate measuring machine and a method of the type mentioned at the outset in such a way that temperature-related measurement deviations or falsifications do not occur, without in particular requiring a temperature determination of the object to be measured.
- the problem is essentially solved by a coordinate measuring machine of the type mentioned at the outset in that an additional heat source is assigned to the heat-emitting element in such a way that the total power acting on the coordinate measuring machine is constant or almost constant.
- a heating resistor is used in particular as the additional heat source.
- a plurality of heat-emitting elements can be assigned a common, controllable heating resistor.
- a separate controllable heating resistor can also be assigned to each heat-emitting element.
- Heat-emitting elements which are operational heat sources such as motors such as servomotors or light sources, and additional heat sources are spatially assigned to one another in such a way that the coordinate measuring device acting power is constant or almost constant, so that as a result the coordinate measuring machine has a constant temperature and measurement errors are therefore excluded.
- the basic idea of the invention therefore provides that technically-related heat sources such as light sources or motors, which are absolutely necessary for coordinate measuring machines, also since n do not lead to a temperature change in the coordinate measuring machine or its temperature environment if the heat sources are operated with different loads or Example are switched off.
- the additional heat source such as the heating resistor, assigned to the light source is regulated accordingly to ensure unchanged temperature conditions.
- the output of a heating resistor is increased and vice versa.
- the power to be output by this and the additional heat source can be based, for example, on the maximum power of the engine. Since the current power is below the maximum power, the heating resistor is regulated so that the heat given off by the heating resistor and that of the motor are constant.
- the coordinate measuring machine is used in an environment in which a constant temperature prevails regardless of the heat-emitting elements such as components of the coordinate measuring machine. As a result, a thermally stable coordinate measuring machine is achieved.
- a method for operating a coordinate measuring machine with at least one associated and / or integrated in this heat-emitting element such as a motor or light source is characterized in that the heat-emitting element is assigned an additional heat source such that its total power acting on the coordinate measuring machine when operating the Coordinate measuring device is constant or almost constant.
- an additional heat source is assigned to the heat-emitting element in such a way that the coordinate measuring machine is operated in a constant temperature environment, regardless of the power absorbed or emitted by the heat-emitting element.
- 1 is a schematic diagram of a coordinate measuring machine
- Fig. 2 shows a schematic diagram of a coordinate measuring machine
- Fig. 3 is a schematic diagram of a coordinate measuring machine
- FIG. 1 shows, in principle, a coordinate measuring machine 10 with a base frame 12, for example made of granite, with a measuring table 14, on which an object (not shown) can be arranged in order to measure it.
- a portal 16 is adjustable in the Y direction.
- columns or stands 18, 20 are slidably supported on the base frame 12.
- a crossmember 22 extends from the columns 18, 20, along which a carriage 24 is adjustable, that is to say in the X direction, which in turn receives a quill or column 26 which is adjustable in the Z direction.
- a measuring sensor 28 extends from the sleeve or column 26 and can be of a conventional type such as tactile, optotactile image processing sensors or laser distance sensors. In this respect, however, reference is made to well-known techniques and designs.
- each heat-emitting element has a Additional heat source is assigned such that the heat output acting on the coordinate measuring machine is constant.
- FIGS. 2 and 3 The implementation of measures in this regard is shown in principle in FIGS. 2 and 3. 2, the power of an electric motor 32 used in a coordinate measuring machine 30 is measured in order to regulate an additional heat source, such as a heating resistor 34, as a function of the power consumption or output in such a way that the thermal load on the coordinate measuring machine 30 is constant.
- a power measurement 38 is carried out by a motor controller 36 in order to regulate the heating resistor 34 via a heating resistor control.
- a constant heat effect on the coordinate measuring device 44 is to be achieved with a light source 42, which is assigned to a coordinate measuring device 44
- a power measurement 46 of the light control 48 takes place, in order then to regulate a heating resistor 52 via a heating resistor control 50 in such a way that the thermal load on the coordinate measuring machine 44 is also constant.
- the measures according to the invention ensure that the coordinate measuring device 10, 30, 44 is thermally stable, with the result that no temperature changes for the coordinate measuring device 10, 30, 44 can be effective due to technically-induced heat sources such that measurement falsifications or measurement inaccuracies occur.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/483,049 US20040184039A1 (en) | 2001-07-16 | 2002-07-05 | Co-ordinate measuring device with additional heat source |
DE50207022T DE50207022D1 (de) | 2001-07-16 | 2002-07-05 | Koordinatenmessgerät mit zusatzwärmequelle |
EP02754833A EP1407219B1 (de) | 2001-07-16 | 2002-07-05 | Koordinatenmessgerät mit zusatzwärmequelle |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10133824 | 2001-07-16 | ||
DE10133824.4 | 2001-07-16 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2003008898A1 true WO2003008898A1 (de) | 2003-01-30 |
Family
ID=7691481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2002/007469 WO2003008898A1 (de) | 2001-07-16 | 2002-07-05 | Koordinatenmessgerät mit zusatzwärmequelle |
Country Status (5)
Country | Link |
---|---|
US (1) | US20040184039A1 (de) |
EP (1) | EP1407219B1 (de) |
AT (1) | ATE328263T1 (de) |
DE (1) | DE50207022D1 (de) |
WO (1) | WO2003008898A1 (de) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007093789A1 (en) | 2006-02-16 | 2007-08-23 | Renishaw Plc | Articulating probe head apparatus and method |
CN103620440A (zh) * | 2011-06-14 | 2014-03-05 | 法罗技术股份有限公司 | 用于激光跟踪器的自动和加速加热和稳定性检验 |
DE102019102873A1 (de) | 2019-02-06 | 2020-08-06 | Carl Mahr Holding Gmbh | Sensorsystem zur Bestimmung von geometrischen Eigenschaften eines Messobjekts |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090320794A1 (en) * | 2004-02-20 | 2009-12-31 | Nicholas Mirabile | Novel Internal Combustion Torroidal Engine |
US8711365B2 (en) * | 2004-12-16 | 2014-04-29 | Werth Messtechnik Gmbh | Coordinate measuring device and method for measuring with a coordinate measuring device |
DE102006003362A1 (de) * | 2006-01-19 | 2007-07-26 | Carl Zeiss Industrielle Messtechnik Gmbh | Koordinatenmessgerät und Verfahren zum Betreiben eines Koordinatenmessgeräts |
GB0708319D0 (en) * | 2007-04-30 | 2007-06-06 | Renishaw Plc | A storage apparatus for a tool |
WO2008132483A1 (en) | 2007-04-30 | 2008-11-06 | Renishaw Plc | Analogue probe with temperature control and method of operation |
DE102010060124A1 (de) | 2009-10-27 | 2011-06-16 | Werth Messtechnik Gmbh | Verfahren und Anordnung zum Messen mit einem Koordinatenmessgerät |
TW201700213A (zh) * | 2015-06-30 | 2017-01-01 | 國立中興大學 | 可改善熱誤差之工具機 |
EP3179203B1 (de) | 2015-12-11 | 2021-03-31 | TESA Sàrl | Gelenksondenkopf für messsystem |
US11045944B2 (en) * | 2019-01-22 | 2021-06-29 | Faro Technologies, Inc. | Articulated arm coordinate measuring machine having thermal compensation |
CN113134849A (zh) * | 2021-04-29 | 2021-07-20 | 成都卡诺普自动化控制技术有限公司 | 一种机器人低温环境自动预热的方法 |
Citations (10)
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US3319456A (en) * | 1964-02-07 | 1967-05-16 | Gen Electric | Quantitative differential thermal analysis apparatus |
US4448545A (en) * | 1982-03-02 | 1984-05-15 | Southern California Gas Company | Non-intrusive thermal power monitor and method |
EP0382414A2 (de) * | 1989-02-06 | 1990-08-16 | Alcan International Limited | Verfahren und Vorrichtung zur Messung der Wärmeleitfähigkeit von Gasen |
US5179786A (en) * | 1991-04-22 | 1993-01-19 | Shelton Russell S | Measuring apparatus with temperature control |
US5515705A (en) * | 1992-01-23 | 1996-05-14 | Board Of Regents, The University Of Texas System | Apparatus and method for deforming a workpiece |
JPH08215983A (ja) * | 1995-02-12 | 1996-08-27 | Hitachi Seiki Co Ltd | 工作機械の熱変位補正方法及びその装置 |
US5809211A (en) * | 1995-12-11 | 1998-09-15 | Applied Materials, Inc. | Ramping susceptor-wafer temperature using a single temperature input |
EP1036883A2 (de) * | 1999-03-18 | 2000-09-20 | Joseph Vögele AG | Verfahren zum Beheizen der Einbaubohle eines Strassenfertigers, sowie elektrische Heizeinrichtung |
JP2000271836A (ja) * | 1999-03-24 | 2000-10-03 | Makino Milling Mach Co Ltd | 数値制御による工作機械の制御方法及び装置 |
EP1130443A2 (de) * | 2000-02-22 | 2001-09-05 | Agilent Technologies Inc. a Delaware Corporation | System und Verfahren zur Temperaturregelung für einen thermisch gesteuerten optischen Schalter mit konstanter Gesamtleistung |
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US3332153A (en) * | 1964-08-31 | 1967-07-25 | Bausch & Lomb | Temperature compensating system |
US3775655A (en) * | 1972-09-15 | 1973-11-27 | Xerox Corp | Method and apparatus for transducer temperature compensation |
DE2558625A1 (de) * | 1975-12-24 | 1977-07-14 | Norte Klessmann & Co Kg | Werkzeugmaschine, insbesondere bohr- oder fraesmaschine |
DE3604550A1 (de) * | 1986-02-13 | 1987-08-27 | Maho Ag | Vorrichtung zur temperaturabhaengigen messpunktverstellung zweier maschinenteile |
US4815213A (en) * | 1987-10-09 | 1989-03-28 | Brown & Sharpe Manufacturing Co. | Apparatus for temperature compensation of sensing means of a machine |
US5052121A (en) * | 1988-07-01 | 1991-10-01 | Albion Devices, Inc. | Temperature-compensated quantitative dimensional measurement device with rapid temperature sensing and compensation |
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EP0969264A3 (de) * | 1998-05-06 | 2001-06-13 | Dr. Johannes Heidenhain GmbH | Flächiger Sensor, Anordnung des flächigen Sensors und Verfahren zur Kompensation thermischer Verformungen |
JP2004525380A (ja) * | 2001-05-10 | 2004-08-19 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | 少なくとも2つの層からなる熱シールドを有する計測フレームを備えた精密測定装置 |
DE10138138A1 (de) * | 2001-08-09 | 2003-02-20 | Zeiss Carl | Korrektur des Temperaturfehlers bei einer Messung mit einem Koordinatenmessgerät |
US6829838B1 (en) * | 2003-09-09 | 2004-12-14 | Hexagon Metrology Ab | Temperature compensation system for a coordinate measuring machine |
-
2002
- 2002-07-05 EP EP02754833A patent/EP1407219B1/de not_active Expired - Lifetime
- 2002-07-05 WO PCT/EP2002/007469 patent/WO2003008898A1/de active IP Right Grant
- 2002-07-05 US US10/483,049 patent/US20040184039A1/en not_active Abandoned
- 2002-07-05 DE DE50207022T patent/DE50207022D1/de not_active Expired - Lifetime
- 2002-07-05 AT AT02754833T patent/ATE328263T1/de not_active IP Right Cessation
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US3319456A (en) * | 1964-02-07 | 1967-05-16 | Gen Electric | Quantitative differential thermal analysis apparatus |
US4448545A (en) * | 1982-03-02 | 1984-05-15 | Southern California Gas Company | Non-intrusive thermal power monitor and method |
EP0382414A2 (de) * | 1989-02-06 | 1990-08-16 | Alcan International Limited | Verfahren und Vorrichtung zur Messung der Wärmeleitfähigkeit von Gasen |
US5179786A (en) * | 1991-04-22 | 1993-01-19 | Shelton Russell S | Measuring apparatus with temperature control |
US5515705A (en) * | 1992-01-23 | 1996-05-14 | Board Of Regents, The University Of Texas System | Apparatus and method for deforming a workpiece |
JPH08215983A (ja) * | 1995-02-12 | 1996-08-27 | Hitachi Seiki Co Ltd | 工作機械の熱変位補正方法及びその装置 |
US5809211A (en) * | 1995-12-11 | 1998-09-15 | Applied Materials, Inc. | Ramping susceptor-wafer temperature using a single temperature input |
EP1036883A2 (de) * | 1999-03-18 | 2000-09-20 | Joseph Vögele AG | Verfahren zum Beheizen der Einbaubohle eines Strassenfertigers, sowie elektrische Heizeinrichtung |
JP2000271836A (ja) * | 1999-03-24 | 2000-10-03 | Makino Milling Mach Co Ltd | 数値制御による工作機械の制御方法及び装置 |
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Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007093789A1 (en) | 2006-02-16 | 2007-08-23 | Renishaw Plc | Articulating probe head apparatus and method |
US7861430B2 (en) | 2006-02-16 | 2011-01-04 | Renishaw Plc | Articulating probe head apparatus and method |
US8474148B2 (en) | 2006-02-16 | 2013-07-02 | Renishaw Plc | Articulating probe head apparatus and method |
EP1989504B1 (de) | 2006-02-16 | 2015-11-11 | Renishaw plc | Gelenktastkopfvorrichtung und -verfahren |
CN103620440A (zh) * | 2011-06-14 | 2014-03-05 | 法罗技术股份有限公司 | 用于激光跟踪器的自动和加速加热和稳定性检验 |
DE102019102873A1 (de) | 2019-02-06 | 2020-08-06 | Carl Mahr Holding Gmbh | Sensorsystem zur Bestimmung von geometrischen Eigenschaften eines Messobjekts |
DE102019102873B4 (de) | 2019-02-06 | 2022-01-20 | Carl Mahr Holding Gmbh | Sensorsystem und Verfahren zur Bestimmung von geometrischen Eigenschaften eines Messobjekts sowie Koordinatenmessgerät |
Also Published As
Publication number | Publication date |
---|---|
EP1407219B1 (de) | 2006-05-31 |
EP1407219A1 (de) | 2004-04-14 |
ATE328263T1 (de) | 2006-06-15 |
DE50207022D1 (de) | 2006-07-06 |
US20040184039A1 (en) | 2004-09-23 |
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