WO2003000461A1 - Procede de polissage de la surface d'extremite de connexion d'un connecteur a fibres optiques, structure optique et structure heterogene coaxiale de couches de materiau, et dispositif de polissage - Google Patents

Procede de polissage de la surface d'extremite de connexion d'un connecteur a fibres optiques, structure optique et structure heterogene coaxiale de couches de materiau, et dispositif de polissage Download PDF

Info

Publication number
WO2003000461A1
WO2003000461A1 PCT/JP2002/006033 JP0206033W WO03000461A1 WO 2003000461 A1 WO2003000461 A1 WO 2003000461A1 JP 0206033 W JP0206033 W JP 0206033W WO 03000461 A1 WO03000461 A1 WO 03000461A1
Authority
WO
WIPO (PCT)
Prior art keywords
polishing
polished
axis
rotary
disk
Prior art date
Application number
PCT/JP2002/006033
Other languages
English (en)
Japanese (ja)
Inventor
Akira Yamagata
Original Assignee
Meiyu-Giken Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2001188125A external-priority patent/JP2003001553A/ja
Priority claimed from JP2001191418A external-priority patent/JP2003001552A/ja
Priority claimed from JP2001245609A external-priority patent/JP2003053650A/ja
Priority claimed from JP2001259528A external-priority patent/JP2003071693A/ja
Application filed by Meiyu-Giken Co., Ltd. filed Critical Meiyu-Giken Co., Ltd.
Publication of WO2003000461A1 publication Critical patent/WO2003000461A1/fr

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B19/00Single-purpose machines or devices for particular grinding operations not covered by any other main group
    • B24B19/22Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B19/226Single-purpose machines or devices for particular grinding operations not covered by any other main group characterised by a special design with respect to properties of the material of non-metallic articles to be ground of the ends of optical fibres
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B13/00Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
    • B24B13/02Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor by means of tools with abrading surfaces corresponding in shape with the lenses to be made
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/36Mechanical coupling means
    • G02B6/38Mechanical coupling means having fibre to fibre mating means
    • G02B6/3807Dismountable connectors, i.e. comprising plugs
    • G02B6/3833Details of mounting fibres in ferrules; Assembly methods; Manufacture
    • G02B6/3863Details of mounting fibres in ferrules; Assembly methods; Manufacture fabricated by using polishing techniques

Definitions

  • the present invention is applied to an optical communication system, a laser optical element or an optosensor technology, for example, an optical system such as a connection end face of an optical fiber in a connector of an optical fiber, a convex lens structure, a concave lens structure or a prism structure.
  • the present invention relates to a polishing method and a polishing apparatus for polishing an optically active surface of a structure, a coaxial dissimilar material layer structure, and the like with high accuracy and in a short time.
  • optical system element examples include a convex lens structure, a concave lens structure, and a prism structure, each of which has been diversified in accordance with a use form, and a convex spherical surface of an optical working surface in the optical system element. Polishing, such as polishing, concave spherical polishing, or planar polishing, has become a very important factor in optical element manufacturing.
  • An optical fiber connector is a basic component of an optical communication system together with an optical fiber and a light source, and its optical performance is defined by insertion loss and return loss.
  • reflected light generated from the connection point of optical fibers has become a problem.
  • the reflected light generated at the connection point of the optical fiber enters a semiconductor laser as a light source and becomes noise, and the noise causes waveform deterioration and the like. Therefore, the optical fiber
  • an optical connector with less reflected light at the connection point that is, an optical connector with a large return loss.
  • the tip of the ferrule is processed into a convex spherical shape
  • the optical fiber 62 is fixed to the center hole of the ferrule 61, and the concave end surface of a predetermined curvature is attached to the rotating end face of the rotating body with the optical fiber 62 attached to the mounting jig 63.
  • the optical fiber 62 is set so that the tip 62 a of the optical fiber 62 is in contact with the concave spherical polishing surface 65 of the rotary polishing machine 64 with respect to the rotary polishing machine 64 provided with the polishing surface 65.
  • the ferrule 61 is swung so that the tip 62 a of the optical fiber 62 is moved to the rotary polishing machine 6. Polishing is performed to form a convex spherical surface having a curvature corresponding to the concave spherical polishing surface 65 in FIG.
  • the radius of curvature of the polished portion on the end face of the ferrule is as small as about 10 mm to 25 mm.
  • the effective polishing area was extremely small. For this reason, it is difficult to increase the polishing efficiency, and a polishing time of about 20 to 30 minutes is required.
  • the conventional polishing technique shown in FIG. 18 was developed to compensate for the disadvantages and problems of the conventional polishing technique shown in FIG.
  • an optical fiber 72 is fixed to the center hole of the ferrule 71, and the tip surface 71a of the ferrule 71 is placed in the through hole of the polishing tool 73, and the lower surface of the polishing tool 73 7 3 a longer than a It is attached and fixed so that it protrudes, and draws an arc-shaped trajectory while pressing the polishing tool 73 against a polishing plate 74 on which a thin polishing member 76 is attached on the upper surface of a flat plate 75 using a flexible elastic material.
  • the end face 72a of the optical fiber 72 is formed and polished.
  • FIG. 18A, FIG. 18B, and FIG. 18C show the process procedure.
  • it is necessary to press the object to be polished against the polishing plate 74 in which the polishing film 76 is adhered to the flexible elastic body 75 to depress the polishing 7 film 76.
  • the polishing rate does not increase, it has a problem that it takes several minutes to make the polished surface of the optical fiber 72 a mirror surface.
  • the conventional polishing shown in FIG. 18A, FIG. 18B, and FIG. 18C show the process procedure.
  • the polishing rate does not increase, it has a problem that it takes several minutes to make the polished surface of the optical fiber 72 a mirror surface.
  • a polishing method in which a polishing film is laid on a rubber elastic body, a material to be polished is pressed against the rubber elastic body, and the polishing film is depressed,
  • the polishing pressure distribution is as shown in 18D, and the pressure becomes higher toward the center of the ferrule.
  • an ideal polished surface with a convex spherical shape as shown in FIG. 1OA cannot be obtained, and as shown in FIG. 10B, a polished surface with a convex spherical shape 7 1 a of the surrounding ferrule 71.
  • the polishing result is such that the convex spherical polishing surface 72 a of the optical fiber 72 is depressed.
  • the present invention relates to an optical fiber-connector connection technology for an optical fiber-connector, and relates to a polishing process for an optical fiber connection end surface, the light reflection generated on the connection surface of an optical fiber. It is an object of the present invention to provide a method for polishing a connection end face of an optical fiber, a connector, and a polishing apparatus and a polishing apparatus therefor, which can polish a connection end face of an optical fiber with high precision in order to reduce return loss and can polish in a short time.
  • the optical working surface of an optical element such as a convex lens structure, a concave lens structure, or a prism structure
  • the optical working surface is formed into a convex spherical shape, a concave spherical shape, or a flat surface.
  • a polishing method for an optical system component and a polishing apparatus for the optical system component for polishing the shape with high accuracy and in a short time It is something to offer.
  • the present invention provides a polishing method and a polishing apparatus for an object to be polished having a coaxial structure of a dissimilar material layer.
  • the present invention relates to an optical fiber / connector / optical fiber connection technology.
  • polishing the end face of the optical fiber connector the tip of the surrounding ferrule layer and the tip of the optical fiber layer extending along the axis are divided into two processes, and the connection end face of the optical fiber in the optical fiber connector is divided into two processes. It is an object of the present invention to provide a polishing method and a polishing apparatus for polishing a convex surface to a convex spherical shape with high accuracy and in a short time. Disclosure of the invention
  • the present invention basically provides an optical fiber connector in which an optical fiber is disposed on the axis of a ferrule, and a connection end face of the optical fiber together with a ferrule.
  • An optical fiber-connector-to-connector-to-connector end-polishing method wherein an outer peripheral surface is provided with a polished surface corresponding to the shape of the surface to be polished
  • a rotating polishing disk is prepared, and the axis of the ferrule is positioned on an axis extending along the radial direction of the rotating polishing disk to define a polishing point, and at the polishing point, the rotational polishing disk, the ferrule and ,
  • the rotating polishing disk is rotated at a high speed around the rotation axis, and the rotating polishing disk and the ferrule are relatively swiveled about the ferrule shaft axis to obtain the light.
  • the present invention constitutes a method for polishing a connection end face of an optical fiber connector in which a connection end face of a fiber connector
  • the present invention relates to an optical fiber connector in which an optical fiber is arranged on the axis of a fiber, and an optical fiber connector connection end polishing apparatus for polishing the connection end of the optical fiber together with the ferrule.
  • a rotary polishing disk provided with a polishing surface corresponding to the shape of the surface to be polished on the outer peripheral surface; a rotation driving means for rotating the rotary polishing disk at high speed around a rotation axis; Approaching operation means for positioning the axis of the ferrule on an axis extending along the radial direction to define a polishing point, and relatively bringing the rotary polishing disk and the ferrule closer at the polishing point; and a rotary polishing disk. And turning means for relatively turning the ferrule with respect to the center of the shaft.
  • the rotating polishing disk is rotated at a high speed around a rotating shaft, and the rotating polishing disk is rotated.
  • a filter are rotated relatively around the axis of the ferrule to polish a connection end face of the optical fiber connector. It also constitutes a device.
  • the present invention provides a shaft for an object to be polished having a coaxial / heterogeneous material layer structure including a core layer made of a first material and a peripheral layer made of a second material coaxial around the core layer.
  • a polishing method for polishing an end face in a convex spherical shape a first polishing step of polishing an axial end face of a peripheral layer in the object to be polished into a pseudo-cone shape, and after the first polishing step, A second polishing step of polishing the axial end face of the core layer of the object to be polished into a convex spherical shape. It is also what it does.
  • the present invention constitutes a polishing method in which the object to be polished having the coaxial 'heterogeneous material layer structure' is an optical fiber connector in which an optical fiber is disposed on an axis of a ferrule. .
  • the present invention provides an axial end face of a polished object having a coaxial / different material layer structure including a core layer made of a first material and a peripheral layer made of a second material coaxial around the core layer.
  • a polishing apparatus for polishing into a spherical shape comprising: a rotary polishing disk provided with a concave-shaped polishing surface having a radius R on an outer peripheral surface; and a rotation drive means for rotating the rotary polishing disk around a rotation axis at a high speed.
  • the present invention also constitutes a polishing apparatus for the object to be polished having a coaxial and dissimilar material layer structure in which the axial end face of the core layer in the object to be polished is polished into a convex sp
  • the present invention also constitutes a polishing apparatus in which the object to be polished having the coaxial 'heterogeneous material layer structure' is an optical fiber connector in which an optical fiber is arranged on a shaft of a ferrule. .
  • the present invention provides a polishing apparatus, wherein the offset positioning means comprises means for offsetting and positioning in the axial direction of the rotary polishing disk from a radial center of a concave curved surface having a radius R provided on the outer peripheral surface of the rotary polishing disk. It also constitutes the device. Still further, according to the present invention, there is provided the offset positioning device, wherein the rotational center of the rotary polishing disk is offset in a radial direction of the rotary polishing disk and positioned. And a polishing apparatus.
  • the present invention provides a shaft for an object to be polished having a coaxial / heterogeneous material layer structure including a core layer made of a first material and a peripheral layer made of a second material coaxial around the core layer.
  • a slope reference polishing surface inclined at an angle of 0 with respect to the rotation axis is defined in a peripheral edge portion where the outer peripheral surface and one side face intersect.
  • a rotary polishing disk provided with a concave curved polishing surface formed along an arc line having a radius R on the polishing surface; a rotation driving means for rotating the rotary polishing disk at a high speed around a rotation axis; A rotating axis that is orthogonal to the polishing surface and intersects the rotation axis at an angle of ⁇ , and that relatively rotates the rotary polishing disk and the object to be polished around the rotation axis; Turning operation means, the rotary polishing disk, and the object to be polished An approach operating means for relatively approaching, and an orthogonal axis orthogonal to the tilt reference polishing surface of the rotary polishing disc, for positioning the axis of the object to be polished and the pivot axis at the coaxial position and the offset position.
  • the axial end surface of the peripheral layer in the object to be polished is polished in a pseudo-cone shape, and the axial end surface of the core layer in the object to be polished is convex in the coaxial position. It also constitutes a polishing device for the object to be polished having a coaxial and dissimilar material layer structure which is polished into a spherical shape.
  • the present invention provides an object to be polished having a coaxial dissimilar material layer structure including a core layer made of a first material and a peripheral layer made of a second material coaxial around the core layer, and has an axial end surface formed on a spherical surface.
  • a polishing apparatus for polishing into a shape, a rotating polishing disk having a concave curved polishing surface having a radius R on one side surface orthogonal to a rotation axis, and rotating the rotation polishing disk at high speed around a rotation axis.
  • a rotation driving means for defining a turning axis perpendicular to one side surface of the rotating polishing disk and extending parallel to the rotating axis at a distance L from the rotating axis, and around the rotating axis.
  • a polishing apparatus for the object to be polished having a coaxial dissimilar material layer structure in which the end surface is polished in a pseudo-conical shape and the axial end surface of the core layer in the object to be polished is polished in a convex spherical shape at the coaxial position. Things.
  • the present invention provides a rotary polishing disk provided with a polishing surface having a planar shape, a concave curved shape, or a convex curved shape on the outer peripheral surface according to the shape of the surface to be polished of the object to be polished, Positioning the axis of the object to be polished on an axis extending along the radial direction of the polishing disk to define a polishing point, and relatively bringing the rotary polishing disk and the object to be polished at the polishing point, While rotating the rotating polishing disk at a high speed around the rotation axis, and rotating the rotating polishing disk and the object to be polished relatively around the axis of the object to be polished,
  • the present invention provides a rotary polishing disk provided with a polishing surface having a planar shape, a concave curved surface shape, or a convex curved surface shape on the outer peripheral surface according to the shape of the surface to be polished of the object to be polished;
  • a rotation driving means for rotating at high speed around a rotation axis, and a polishing point defined by positioning an axis of the object to be polished on an axis extending along a radial direction of the rotary polishing disk.
  • the rotating polishing disk is rotated at a high speed around a rotation axis, and the rotating polishing disk and the object to be polished are relatively rotated around the axis of the object to be polished, and
  • the end surface of the polished object is flat and convex
  • the present invention provides a polishing unit comprising a rotary drive source and a rotary polishing disk attached to a rotary shaft of the rotary drive source.
  • the rotary polishing disk of the above is characterized in that, at a peripheral edge portion where an outer peripheral surface and one side face intersect, a tilt reference polishing surface inclined at an angle of 0 with respect to a rotation axis is formed, and is perpendicular to the tilt reference polishing surface.
  • the polishing disk and the object to be polished are relatively approached to each other, and the polishing unit and the object to be polished are rotated around the axis of rotation of the polishing unit while the rotary polishing disk is rotated at a high speed.
  • the present invention constitutes a method for polishing an optical system component, which is relatively rotated to polish an end face of the object to be polished.
  • the present invention provides a polishing method for an optical system component, wherein an inclined reference polishing surface of the rotary polishing disk is formed in a flat shape, and an end surface of an object to be polished is polished in a flat shape. What constitutes the method.
  • the inclined reference polishing surface of the rotary polishing disk is a concave-curved polishing surface formed along one arc line on the inclined reference polishing surface. This constitutes a method of polishing an optical system component whose end face is polished into a convex spherical shape.
  • the present invention provides a polishing unit composed of a rotary drive source and a rotary polishing disk attached to a rotary shaft of the rotary drive source, wherein the rotary polishing disk in the polishing unit is arranged with respect to the rotary shaft.
  • a polishing unit rotating shaft that is orthogonal to the reference polishing surface and extends parallel to and along the rotation axis at a distance L from the rotation axis.
  • the present invention provides a method for polishing an optical system component, wherein a reference polishing surface of the rotary polishing disk is formed in a flat shape, and an end surface of an object to be polished is polished in a flat shape. Is what you do.
  • the present invention provides a polishing surface having a concave curved surface formed on an arc line separated from the rotation axis by a distance L from a reference polishing surface force of the rotating polishing disk, and an end surface of a polishing target to be polished is convex. This constitutes a method for polishing an optical system component to be polished into a spherical shape.
  • the present invention provides a rotary polishing disk having an inclined reference polishing surface inclined at an angle ⁇ with respect to a rotation axis at a peripheral edge portion where an outer peripheral surface and one side face intersect, and rotating the rotary polishing disk.
  • a polishing unit constituted by rotation driving means for rotating at a high speed around the axis, the polishing unit turning axis being orthogonal to the inclined reference polishing surface and intersecting at an angle of 0 with respect to the rotation axis.
  • a turning operation means for relatively turning the polishing unit and the object to be polished around the polishing unit turning axis; and positioning an axis of the object to be polished on the polishing unit turning axis.
  • the polishing unit and the object to be polished are rotated relative to each other about the polishing unit turning axis to constitute a polishing apparatus for an optical system configured to polish an end face of the object to be polished. is there.
  • the present invention provides a polishing apparatus, comprising: a rotary polishing disk provided with a reference polishing surface on one side surface orthogonal to a rotation axis; and a rotation driving means for rotating the rotary polishing disk at high speed around the rotation axis.
  • a polishing unit rotation axis extending perpendicular to the reference polishing surface and extending along the rotation axis at a distance L from the rotation axis in parallel with the rotation unit.
  • FIG. 1 is a view for explaining the principle elements of the method for polishing the connection end face of an optical fiber and a connector according to the present invention, and shows a specific example of polishing the connection end face of an optical fiber into a convex spherical shape.
  • FIG. 1A is a schematic front view showing a basic configuration of a polished object in which an optical fiber is fixed to a center hole of a ferrule and a rotary polishing disk
  • FIG. 1A is a schematic side view as seen from arrow 1B
  • FIG. 1C is a schematic plan view as seen from arrow 1C in FIG. 1A.
  • FIG. 2 is a view for explaining a method of polishing an end face of an optical fiber connector according to the present invention.
  • FIG. 2A is a schematic front view showing an application example to a physical contact (PC) connection technique.
  • 2B is a schematic front view showing an example of application to an advanced physical contact (AdPC) connection technique
  • FIG. 2C is a schematic plan view showing a polished surface of an object to be polished.
  • PC physical contact
  • AdPC advanced physical contact
  • FIG. 3 shows an example of an apparatus for polishing the connection end face of an optical fiber connector according to a specific embodiment in which the method for polishing the connection end face of an optical fiber connector according to the present invention can be effectively performed.
  • FIG. 3A is a schematic plan view of a polishing apparatus in which polishing of an object to be polished by a rotary polishing disk is divided into a rough polishing step and a mirror polishing step
  • FIG. 3B is an apparatus shown in FIG. 3A.
  • Fig. 4 shows the entire main components of a more concrete example of the apparatus.
  • Fig. 4A is a schematic plan view of the main components of the optical fiber / connector end face polishing apparatus.
  • FIG. 4B shows the connection end face of the optical fiber and the connector. It is a schematic front view of the main components of the polishing device.
  • FIG. 5 is a schematic side view corresponding to the schematic front view shown in FIG. 4B of a main component of the optical fiber / connector / connection end face polishing apparatus.
  • FIG. 6 relates to a method for polishing an object to be polished having a coaxial dissimilar material layer structure according to the present invention.
  • the first example of polishing the connection end face of an optical fiber connector to a convex spherical shape (a rotary polishing disk or FIG. 6A is a diagram for explaining the principle elements of an example of a configuration in which an object to be polished is offset in the axial direction of a rotary polishing disk.
  • FIG. FIG. 6B is a schematic front view showing the state of the object and the rotary polishing disk in a form of a rotating polishing disk, FIG. FIG.
  • FIG. 6D is a schematic front view showing the shape of the object to be polished and the rotary polishing disk in the preparation stage of the second polishing step after the polishing step, and FIG. 6D shows the state during the second polishing step. It is a schematic front view which expands and shows a principal part.
  • FIG. 7 relates to a method for polishing an object to be polished having a coaxial dissimilar material layer structure according to the present invention, which is polished to a convex spherical shape at a connection end face of an optical fiber connector 1 (the center of a rotary polishing disk).
  • Fig. 7A is a diagram for explaining the principle elements of a configuration example in which the axis of the object to be polished is offset and positioned in the radial direction of the rotary polishing disk.
  • FIG. 7B is a schematic side view showing the state of the first polishing step in a magnified view of a main part, showing the configuration of the object to be polished and the rotary polishing disk in the preparation stage of the polishing step.
  • FIG. 7A is a diagram for explaining the principle elements of a configuration example in which the axis of the object to be polished is offset and positioned in the radial direction of the rotary polishing disk.
  • FIG. 7B is a schematic side view showing the state of the first polishing
  • FIG. 7C is a schematic side view showing the form of the object to be polished and the rotary polishing disk in the preparation stage of the second polishing step after the first polishing step
  • FIG. It is a schematic side view which shows the state at the time of a grinding
  • FIG. 8 relates to the polishing method of the object to be polished having the coaxial dissimilar material layer structure according to the present invention, and shows the polishing state of the connection end face of the optical fiber / connector with time
  • FIG. FIG. 8B is a schematic side view showing a state of the polishing section after the polishing step, and a half section of the polishing section, and FIG. It is the schematic side view shown.
  • FIG. 8 relates to the polishing method of the object to be polished having the coaxial dissimilar material layer structure according to the present invention, and shows the polishing state of the connection end face of the optical fiber / connector with time
  • FIG. 8B is a schematic side view showing a state of the
  • FIG. 9 relates to a method for polishing an object to be polished having a coaxial and dissimilar material layer structure according to the present invention, and shows a configuration example in which a concave-curved polishing surface is provided in a different portion with respect to a rotary polishing disk.
  • FIG. 9A is a schematic front view showing an example of a configuration in which a concave-curved polishing surface is provided on the outer peripheral surface of a rotary polishing disk
  • FIG. 9B is a diagram in which the outer peripheral surface of the rotary polishing disk intersects one side surface.
  • FIG. 9C is a schematic front view showing a configuration example in which a concave-shaped polished surface is provided on a concave edge portion
  • FIG. 1 ⁇ is a view for explaining a polished state of the connection end face of the optical fiber-connector 1
  • FIG. 1OA is a schematic side view showing an ideal polished state with a half section thereof.
  • 10B is a schematic side view showing a polished state of the connection end face of the optical fiber-connector 1 polished by a conventional polishing method, with a half section taken as a cross section.
  • FIG. 11 illustrates the principle elements of the method for polishing the connection end face of the optical system component according to the present invention, and shows a specific example of polishing the end face of the object to be polished into a convex spherical shape.
  • FIG. 11A is a front view showing the basic form of the object to be polished and the rotary polishing disk
  • FIG. 11B is a schematic side view seen from arrow 1B in FIG. 11A
  • FIG. 11C is a schematic plan view seen from arrow 1C in FIG. 11A.
  • FIG. 12 is a diagram for explaining a method of polishing an optical system component according to the present invention.
  • FIG. 12A is a schematic front view showing an application example of polishing a prism structure HA from an object H to be polished.
  • Fig. 12B is a schematic front view showing an application example of polishing the convex lens structure HB from the workpiece H.
  • Fig. 12C is a polishing process of the concave lens structure HC from the workpiece H. It is a schematic front view which shows the example of application which performs.
  • FIG. 13 is a diagram for explaining the principle elements of a polishing method for an optical system component.
  • the end surface of the object to be polished is polished into a convex spherical shape by a rotary polishing disk as a first example.
  • FIG. 13A is a schematic plan view
  • FIG. 13B is a schematic front view thereof
  • FIG. 13C is a schematic view of the first example.
  • FIG. 13D is a schematic front view showing, on an enlarged scale, a rotary polishing disk suitable for polishing a prism assembly.
  • FIG. 14 is a diagram for explaining the principle elements of a polishing method for an optical system component.
  • the end surface of the object to be polished is polished into a convex spherical shape by a rotary polishing disk according to a second example.
  • FIG. 14A shows a schematic plan view
  • FIG. 14B shows a schematic front view thereof
  • FIG. 14C shows a rotary polishing apparatus according to the second example. It is a schematic front view which expands and shows a disk.
  • FIG. 15 is a view for explaining a method of polishing an optical system component. This is a specific example in which the end surface of an object to be polished is polished into a convex spherical shape by the rotary polishing disk according to the first example.
  • FIG. 2 is a schematic front view showing a relationship between a detection position of an end face of the workpiece 1 and a polishing stroke St, and the like.
  • FIG. 16 is a diagram for explaining a method of polishing an optical system component having a large turning trajectory RL.
  • FIG. 16A is a schematic plan view
  • FIG. 16C is a schematic front view showing, on an enlarged scale, a rotary polishing disk having a polished surface on the outer peripheral surface.
  • FIG. 17 is a schematic side sectional view showing a first example of a conventional optical fiber / connector / connection end face polishing apparatus.
  • FIG. 18 is a schematic side sectional view showing a second example of the conventional optical fiber connector one-connection end surface polishing apparatus.
  • the object to be polished H is an optical fiber connector in which the optical fiber 2 is fixed to a center hole passing through the axis of the fin 1.
  • the present invention presupposes a polishing step of polishing the connection end face 2a of the optical fiber 12 together with the ferrule 1.
  • the basic configuration of the present invention will be described in detail with reference to FIGS. 1 and 2.
  • the apparatus for polishing the connection end face of an optical fiber, a connector and a connector according to the present invention includes a rotary polishing disk 4 rotatably supported around a rotation axis 3.
  • the configuration of the rotary polishing disk 4 itself and the drive system of the rotary polishing disk 4 are the main components of the present invention, and are the most important points.
  • the angle a with respect to the axial center a x be one only differs in that (the ⁇ approximately 8 ° approximately) Ru is tilted set, in other respects, polishing in the physical co Ntakuto (PC) connection technology Is the same as
  • the rotary polishing disk 4 is such that the object H to be polished includes the ferrule 1 and the optical fiber 12 (the polishing power of the ferrule is overwhelmingly large).
  • the material constituting the rotary polishing disk is selected in consideration of the specificity of the polishing object.
  • a material of the rotary polishing disk for the rough polishing process for example, A diamond fixed abrasive disc for ceramic polishing is used.
  • a material of the rotary polishing disk for the mirror surface (precision) polishing treatment for example, a cerium oxide whetstone for glass polishing can be used, and each type can be used with one kind of particle size.
  • the rotary polishing disk 4 is provided with a polishing surface 5 on the outer peripheral surface 4a according to the shape of the polishing surface Ha of the workpiece H to be polished.
  • the shape of the polished surface Ha of the object to be polished H may be a planar shape or a convex spherical shape.
  • the outer peripheral surface 4a of the rotary polishing disk 4 is formed as it is into a flat peripheral surface, and in the latter case, the outer peripheral surface 4a of the rotary polishing disk 4 is concave with a desired radius of curvature. It is shaped into a curved surface.
  • These outer peripheral surfaces are formed by a dresser TD for shaping a rotary abrasive disc.
  • the rotary drive means 6 for the rotary polishing disk 4 includes a high-speed rotary drive source 7, and the rotary polishing disk 4 is connected to the high-speed rotary drive source 7 via a rotary shaft 3. It is supported so that it can rotate at high speed.
  • the high-speed rotary drive source 7 in the rotary drive means 6 is, for example, an air-bin spindle motor.
  • the number of revolutions of the motor is set to 100,000 rpm, a polishing speed 200 times higher than the conventional one can be achieved.
  • the rotation drive means 6 and the rotary polishing disk 4 constitute a polishing disk mechanism 9.
  • the high speed rotation drive source 6 and the rotating polishing disk 4 which from consisting grinder mechanism 9 is dominated by pivoting actuation means 1 0, pivotably about a pivot axis A x set pre Me Assembled.
  • the turning center axis of the turning operation means 10 is defined by the axis of the ferrule 1 positioned on an axis extending along the radial direction of the rotary polishing disk.
  • the swirl operating means 10 may be of any configuration that relatively rotates the rotary polishing disk 4 and the ferrule 1 to be polished about the ferrule axis. Therefore, there may be a difference between a method in which the polishing disk mechanism 9 composed of the high-speed rotation drive source 6 and the rotary polishing disk 4 is turned, and a method in which the ferrule itself is turned, as described above.
  • an approach operating means 11 for relatively bringing the rotary polishing disk 4 and the ferrule 1 closer to each other is provided.
  • the approaching actuation means 1 1 the rotating above with positioning the axis of the ferrule 1 in the axial line A x extending along the radial direction of the polishing disc 4 polishing point P: defining L, and the rotation in the grinding point P i It is for bringing the polishing disk 4 and the ferrule 1 relatively close to each other, and the rotary polishing disk 4 side may move along the axis Ax, or ⁇ 1 may move along the axis ⁇ ⁇ .
  • connection end face polishing apparatus is a configuration example in which the rough polishing process and the precision mirror polishing process are performed separately.
  • a mechanism 13; a ferrule cleaning tank 14 provided therebetween; a ferrule supporting means 15 for supporting a plurality of ferrules 1; and a plurality of ferrules 1 for supporting the ferrules 1; Are moved one by one to the polishing points of the rough polishing mechanism 12, and the roughly polished ferrule 1 is moved to the precision mirror polishing mechanism 13, and the ferrule 1 is moved to the precision mirror polishing mechanism 13. It consists in the polishing point P 2 that a X-axis direction one-Y-axis direction moving means 1 6 for moving one by one in.
  • the X-axis direction—Y-axis direction moving means 16 includes an X-axis direction moving mechanism 16 X for moving the ferrule supporting means 15 in the X-axis direction, and a Y-axis direction moving mechanism. It comprises a Y-axis direction moving mechanism 16 Y for moving.
  • FIG. 3B shows an evening chart of the connection end face polishing apparatus using the rough polishing and the precision mirror polishing according to the embodiment described above.
  • the rotating polishing disk 4 is driven and controlled by a rotation driving means 6 by high-speed continuous one-way rotation, and is rotated by 360 ° forward rotation (CW), 360 ° reverse rotation (C CW ) Is controlled to rotate repeatedly.
  • CW 360 ° forward rotation
  • C CW 360 ° reverse rotation
  • Coarse polishing is performed on the coarse polishing mechanism 12 side from the ferrule end face detection position where the ferrule end surface is in contact with the rotary polishing disk 4. After all ferrules have been coarsely polished, the ferrule group is cleaned in the ferrule cleaning tank 14 Then, precision mirror polishing is performed on the precision mirror polishing mechanism 13 side, and after a spark-out time, polishing of the connection end face of the ferrule is completed.
  • connection end-face polishing apparatus shown in FIGS. 4A, 4B and 5 has a polishing surface 5 corresponding to the shape of the surface to be polished on the outer peripheral surface 4a.
  • a rotating polishing disk 4 wherein the rotating polishing disk 4 and the rotary drive means 6 order to high-speed rotation about the axis of rotation 3, said extending along a radial direction of the rotating abrasive disk 4 axis on A X ferrule Positioning the axis of 1 and defining a polishing point ⁇ :> _, approach operation means 11 for relatively bringing the rotary polishing disk 4 and the ferrule 1 relatively close at the polishing point P: L; Turning means 10 for turning the disk 4 and the ferrule 1 relative to each other about the ferrule axis, and rotating the rotary polishing disk 4 around the rotary shaft 3 at a high speed; and The rotary polishing disk 4 and the ferrule 1 are relatively swiveled around the Fernole axis to polish a connection end face of an optical fiber and a connector.
  • a polishing disk mechanism 9 composed of a rotary polishing disk 4 and a rotary drive means 6 is configured to be pivotally operated by the pivoting operation means 10 and the approaching operation means It is configured to move up and down by 11.
  • the turning operation means 10 includes a turning drive source 19 attached to a machine frame 18 extending from the body 17.
  • the polishing machine mechanism 9 is assembled on a base 21 provided with a rotating shaft 20, and the rotating shaft 20 is rotatably supported by bearing means 22 extending from the body 17. It has been.
  • the turning shaft 20 of the polishing machine mechanism 9 and the rotating shaft 23 of the turning drive source 19 are connected by a gear mechanism 24.
  • the polishing disk mechanism 9 is surrounded by a housing 25 that secures a turning space, and the polishing disk mechanism 9 is fixed to the nosing 25.
  • the housing 25 is assembled on the bearing means 22 and includes a drain 26.
  • a power supply code 27 for the rotation drive means 6 and a coolant liquid or a liquid abrasive which sprays a liquid abrasive at the polishing point P # of the rotary polishing disk 4 are provided in the turning shaft 20.
  • the coolant tube 29 and the air tube 30 connected to the injection port 28 are passed through. The coolant or liquid abrasive is sprayed to prevent heat generation during polishing and to remove abrasive particles and particles to be polished.
  • reference numeral TD indicates a dresser for forming a polishing surface 5 on the outer peripheral surface 4a of the rotary polishing disk 4, and the dresser TD is a tool polishing unit during a polishing process. It is used to correct the change in the shape of the surface and the change in the polishing condition.
  • a high-sensitivity vibration sensor 0 S is mounted on the housing 25, and the diameter of the polishing surface 5 of the rotary polishing disk 4 after dressing is changed.
  • the rotary polishing disk 4 is used for polishing the ferrule in order to prevent a change in the polishing amount due to a positional error with the polishing surface of each ferrule. It comes close to the surface and catches the polishing vibration when it comes into contact.
  • the approach operation means 11 includes a driving source 32 for polishing and fine movement feed, and is attached to the machine body 17, and an output end of which is provided with the polishing end. It is mechanically connected to the base 21 of the polishing machine mechanism 9 via bearing means 22 for supporting the machine mechanism 9. '
  • the ferrule 1 side has a configuration in which a plurality of ferrules 1 are arranged and supported in a matrix by a ferrule holder 15.
  • the ferrule holder 115 is combined with an X-axis direction Y-axis direction moving means 16.
  • the object to be polished H is an optical fiber connector formed by fixing an optical fiber 12 to a center hole passing through the axis of the ferrule 1.
  • the present invention presupposes a polishing step of polishing the connection end face 2a of the optical fiber 2 together with the ferrule 1, and particularly, in the polishing step, as shown in FIG.
  • a first polishing step in which the outer peripheral ferrule 1 is first polished into a pseudo-conical shape, and after the first polishing step, as shown in FIG. 8B And a second polishing step of polishing and polishing the distal end side of the optical fiber 12 disposed on the shaft core into a convex spherical shape.
  • the apparatus for polishing the connection end face of an optical fiber connector includes a rotary polishing disk 4 rotatably supported around a rotation axis 3.
  • the configuration of the rotary polishing disk 4 itself and the drive system of the rotary polishing disk 4 constitute a main part of the present invention and are the most important points.
  • the first configuration example shown in FIG. 9A and the second configuration shown in FIG. 9B It is divided into a configuration example and a third configuration example shown in FIG. 9C. Basically, in the first configuration example shown in FIG.
  • the rotary polishing disk 4 has a reference polishing surface on its outer peripheral surface 4a, and a concave portion having a radius R is formed on the outer peripheral surface 4a. It is formed of a curved polishing surface 5.
  • the rotating abrasive disc 4 has an angle of 0 (this angle) with respect to the rotating shaft 3 ′ at a peripheral edge portion where the outer peripheral surface 4a and one side surface 4b intersect.
  • the inclination angle is 0 ° to 90 °).
  • the inclined reference inclined surface 4c is provided with a concave curved polishing surface 5A having a radius R on the inclined reference inclined surface 4c. It consists of what forms.
  • the rotary polishing disk 4 has a reference polishing surface 4b on one outward side perpendicular to the rotation axis 3.
  • the reference polishing surface 4b is formed with a concave-curved polishing surface 5A having a radius R.
  • the object to be polished H includes the ferrule 1 and the optical fiber 12 (the polishing amount of the ferrule is overwhelmingly large).
  • the material constituting the rotary polishing disk is selected in consideration of the specialness.
  • the polishing process is performed in two stages of a rough polishing process and a mirror (precision) polishing process
  • a material of the rotary polishing disk for the rough polishing process for example, A diamond fixed abrasive disc for ceramic polishing is used.
  • a material of the rotary polishing disk for the mirror surface (precision) polishing treatment for example, a cerium oxide whetstone for glass polishing can be used, and each type can be used with one kind of particle size.
  • the present invention provides a coaxial / heterogeneous material layer comprising a core layer made of a first material and a peripheral layer made of a second material coaxial around the core layer.
  • the polishing apparatus for the object to be polished to have a coaxial dissimilar material layer structure according to the present invention has the first off-state shown in each of FIGS. It includes a set method and a second offset method shown in each figure in FIG.
  • the first offset method shown in each drawing of FIG. 6 will be described based on the example of the rotary polishing disk 4 which is the first configuration example shown in FIG. 9A.
  • the polishing apparatus according to the present invention is provided with the offset positioning means 40 for performing the first polishing step described above.
  • the offset positioning means 40 is for positioning an orthogonal axis orthogonal to a rotation axis of the rotary polishing disk or an axis of the object to be polished and the turning axis at a coaxial position and an offset position.
  • the offset positioning means 40 is provided at the time of the offset position.
  • the axial end face of the surrounding layer is polished into a pseudo-cone shape, and the axial end face of the core layer in the object to be polished is polished into a convex spherical shape at the coaxial position.
  • the offset positioning means 4OA according to the first offset method shown in each figure is offset from the center of the concave curved surface of radius R provided on the outer peripheral surface of the rotary polishing disk in the axial direction of the rotary polishing disk.
  • the offset positioning means 40 B according to the second offset method shown in each figure of FIG. 7 is configured to offset the rotation center of the rotary polishing disk in the radial direction of the rotary polishing disk. It consists of positioning means.
  • the rotary polishing disk 4 is offset and turned around the offset turning axis 41, and is enlarged in FIG. 6B.
  • the polished end face 1a of the ferrule 1 in the optical fiber connector is primarily polished to a pseudo-conical shape CS.
  • the offset positioning means 4OA is polished by the second polishing step at a coaxial position (a position where the pivot axis and the axis of the object to be polished coincide with each other) as shown in FIG. 6C. Finishing is performed, and as shown in an enlarged manner in FIG. 6D, the polished end face 2a of the optical fiber 12 in the optical fiber connector 1 can be polished to a convex spherical shape SS.
  • the rotary polishing disk 4 is offset and turned around the offset turning axis 42, and is enlarged in FIG. 7B.
  • the polished end face 1a of the ferrule 1 in the optical fiber connector is primarily polished to a pseudo-conical shape CS.
  • the offset positioning means 40B is moved to the coaxial position (position where the turning axis and the axis of the object to be polished coincide with each other) as shown in FIG. 7C by the second polishing step. Polishing is performed, and as shown in an enlarged manner in FIG. 7D, the polished end face of the optical fiber 12 in the optical fiber connector can be polished to a convex spherical shape SS.
  • the object to be polished 1 is defined as a material having high photoconductivity for an optical element, and an end face of these materials is polished into a convex spherical shape to form a convex lens structure.
  • the concave lens structure is polished to a concave spherical shape, and the prism structure is polished to a planar shape.
  • the polishing apparatus for an optical system component includes a rotary polishing disk 4 rotatably supported around a rotation axis 3.
  • the configuration of the rotary polishing disk 4 itself and the drive system of the rotary polishing disk 4 constitute a main part of the present invention and are the most important points.
  • FIGS. 12A and 12B an application example in which the prism structure HA is polished from the object H shown in FIG. 12A, an application example in which the convex lens structure HB is polished from the object H, and an application example.
  • the rotary polishing disk 4 is provided with a polishing surface 5 corresponding to the shape of the surface H a to be polished on the outer peripheral surface 4a.
  • the shape of the polished surface Ha of the object H to be polished includes a planar shape Ha A, a convex spherical shape Ha B, and a concave spherical shape Ha C. .
  • the outer peripheral surface 4 a of the rotary polishing disk 4 is shaped as it is into a flat peripheral surface 5 A, and in the case of the convex spherical shape H a B, the outer peripheral surface of the rotary polishing disk 4 The surface 4a is shaped into a concave curved surface 5B with a desired radius of curvature.
  • the outer peripheral surface 4a of the rotary polishing disk 4 has a convex curved surface with a desired radius of curvature. Shaped into 5C It is. While these outer peripheral surface shapes are prepared in advance, in the working process, they are performed by a rotating abrasive disc shaping dresser TD described later.
  • the object to be polished H is defined as a material having high photoconductivity for an optical element, and the end surface of these materials is polished into a convex spherical shape to form a convex lens structure.
  • it can be polished into a planar shape and processed into a prism structure.
  • the polishing apparatus for an optical system component includes a polishing unit U including a rotary drive source 7 and a rotary polishing disk 4 attached to a rotary shaft 3 of the rotary drive source 7. ing.
  • the configuration of the rotary polishing disk 4 itself and the drive system of the rotary polishing disk 4 are the main parts of the present invention and are the most important points.
  • the present invention in the configuration of the rotary polishing disk 4, that is, in the manner of the polishing surface with respect to the rotary polishing disk 4, the first configuration example shown in FIGS. 13 and 15 and the second configuration shown in FIG. Of the configuration example.
  • the rotating polishing disk 4 has a diameter dimension D, and has a circumferential shape where an outer peripheral surface 4 a and one side surface 4 b intersect. At the edge portion, a reference polishing surface c is formed which is inclined at an angle to the rotation axis 3 (this inclination angle is 0 ° to 90 °).
  • the rotary polishing disk 4 has a reference polishing surface 4b formed on one outward side perpendicular to the rotation axis 3.
  • FIG. 13C an application example of polishing the convex lens structure HB from the polished object H, and as shown in FIG.
  • the shape of the polishing surface 5 on the rotary polishing disk 4 is different.
  • the rotary polishing is performed.
  • the inclined reference polished surface 4 c of the disk 4
  • the surface is polished to a convex spherical shape H a B.
  • the inclined reference polishing surface 4 c of the rotary polishing disk 4 is formed on a flat polishing surface 5 B, and the surface is polished.
  • the end surface of the object to be polished H is polished into a planar shape HaA, and other configurations are almost the same.
  • the turning center axis Ax of the turning operation means 10 is orthogonal to the inclined reference polishing surface 4c in the first configuration example shown in FIG. It is defined by an axis that intersects at an angle of 0 with respect to the axis, and coincides with the axis of the workpiece 1 positioned on the axis.
  • the axis of the workpiece H which is defined by an axis perpendicular to the polishing surface 4b and extending parallel to the rotation axis 3 at a distance L from the rotation axis 3 and positioned on the axis. Is the same as
  • the turning operation means 10 may have any configuration as long as the rotary polishing disk 4 and the object to be polished H are relatively turned around the axis of the object to be polished H. Therefore, either a method of rotating the polishing unit 9 composed of the high-speed rotation drive source 7 and the rotary polishing disk 4 as described above, or a method of rotating the polishing object H itself may be used. .
  • an approach operating means 11 for relatively bringing the rotary polishing disk 4 and the workpiece H relatively close to each other is provided.
  • the approaching operation means 11 defines the polishing point P by positioning the axis of the workpiece 1 on the turning center axis Ax of the polishing unit 9, and defines a polishing disk P at the polishing point P.
  • the object to be polished H are relatively close to each other, and the rotary polishing disk 4 side may move along the axis Ax, or the object to be polished H may be the axis A It may move along x .
  • an inclined reference polishing surface 4c that is inclined at an angle with respect to the rotation axis 3 is provided on a peripheral edge portion where an outer peripheral surface 4a and one side surface 4b intersect.
  • a polishing unit 9 is constituted by a rotating polishing disk 4 provided and a rotation driving means 6 for rotating the rotating polishing disk 4 around a rotation axis 3 at a high speed, and is orthogonal to the inclined reference polishing surface 4c. and, and, the relative rotary shaft 3 to intersect at an angle 0.
  • Ru polishing Yunitto defines a swivel axis a x, relative a polishing Yunitto 9 and workpiece H around the polishing Yunitto pivot axis a x
  • the rotary polishing is performed. Is it provided with approaching operation means 1 1 for making the disk 4 and the work H relatively approach each other? Going on. With this configuration, while rotating the rotary polishing disk 4 at high speed around the rotation axis 3, and relatively rotating the polishing unit 9 and the workpiece H around the polishing unit rotation axis Ax. Then, the end surface of the object to be polished is polished.
  • a polishing apparatus includes: a rotary polishing disk 4 provided with a reference polishing surface 4 b on one side surface orthogonal to a rotary shaft 3;
  • a polishing unit 9 is constituted by a rotation driving means 6 for rotating around at high speed.
  • the polishing unit 9 is orthogonal to the reference polishing surface 4b, and along the rotation axis 3 at a distance L from the rotation axis 3.
  • Te defines a polishing Yunitto pivot a x extending in parallel, and the pivot actuation means 1 0 for relatively turning movement the workpiece H and the polishing Yunitto 9 around the polishing Interview knit pivot axis a x,
  • An approaching means for positioning the axis of the object 1 to be polished on the polishing unit rotation axis Ax as a polishing point, and making the rotary polishing disk 4 and the object ⁇ relatively approach at this polishing point. It is made up of things with 1 and 1.
  • the method for polishing the connection end face of the optical fiber connector according to the present invention having the above-described configuration and the polishing apparatus include: a rotary polishing disk having a polishing surface corresponding to the shape of the surface to be polished on the outer peripheral surface; By rotating the rotary polishing disk and the file relatively around the ferrule axis while rotating at a high speed, the connection end face of the optical fiber and the connector is polished.
  • the connection end face of the optical fiber can be polished with high accuracy and can be polished in a short time, whereby the connection end face of the optical fiber can be polished to reduce the return loss of light reflection. It can be said that it works very effectively in that respect.
  • the polishing surface according to the shape of the surface to be polished is formed on the outer peripheral surface and the inclined surface of the peripheral edge.
  • One is to rotate the rotating polishing disk provided on one side at high speed around the rotation axis, and to rotate the rotating polishing disk and the ferrule relative to the ferrule shaft center to rotate the rotating polishing disk and the ferrule.
  • a core layer made of a first material and a second material coaxially formed around the core layer are provided.
  • a polishing method for polishing the axial end face of the object to be polished having a coaxial and dissimilar material layer structure with the peripheral layer into a spherical shape the axial end face of the peripheral layer of the object to be polished is polished into a pseudo-cone shape.
  • the first polishing step and the second polishing step after the first polishing step, in which the axial end surface of the core layer of the object to be polished is polished into a convex spherical shape provide, for example, an optical fiber connector.
  • the polishing surface having a flat shape, a concave curved shape, or a convex curved shape corresponding to the shape of the surface to be polished is formed on the outer peripheral surface.
  • the rotating polishing disk provided at the high speed around the rotation axis, and rotating the rotating polishing disk and the object to be polished relatively around the axis of the object to be polished By polishing the end face, it is possible to accurately polish a planar shape suitable for a prism structure as an optical element, and to accurately polish a convex spherical shape suitable for a convex lens structure.
  • the rotary polishing apparatus has a concave curved surface shape corresponding to the shape of the surface to be polished or a planar shape.
  • the disk is rotated at a high speed around the rotation axis, and the rotating polishing disk and the object to be polished are relatively rotated around the axis of the object to be polished to polish the end face of the object to be polished.
  • a polishing unit is constituted by a rotary drive source and a rotary polishing disk attached to a rotary shaft of the rotary drive source.
  • the rotating polishing disk is rotated at a high speed by a rotary drive source, and the polishing unit is rotated about the polishing unit rotation axis Ax in a state where the polishing unit is inclined, or the polishing unit is moved to the rotation axis at a distance L from the rotation axis.

Abstract

L'invention concerne un procédé de polissage de haute précision permettant de polir en peu de temps la surface d'extrémité de connexion d'une fibre optique dans un connecteur à fibres optiques, ou une surface active d'un point de vue optique dans une structure optique telle qu'une structure de lentille concave ou une structure à prisme, et un dispositif de polissage. L'invention concerne également un procédé de polissage de la surface d'extrémité de connexion d'un connecteur à fibres optiques comprenant une ferrule, ledit connecteur à fibres optiques présentant une fibre optique (2) située sur l'axe de la ferrule (1). Ledit procédé consiste à utiliser un disque de polissage rotatif (4) comprenant sur sa surface périphérique extérieure (4a) une surface (5) de polissage correspondant à la forme de la surface à polir, à positionner l'axe de la ferrule sur une ligne axiale Ax s'étendant le long de la direction de rayon du disque de polissage rotatif de manière à spécifier un point de polissage P1, laissant le disque de polissage rotatif et la ferrule se déplacer l'un vers l'autre au niveau du point de polissage, et à faire tourner le disque de polissage rotatif sur un arbre rotatif (3) à grande vitesse tout en tournant de manière relative le disque de polissage rotatif et la ferrule autour de l'axe de la ferrule de manière à polir la surface de l'extrémité de connexion du connecteur à fibres optiques.
PCT/JP2002/006033 2001-06-21 2002-06-17 Procede de polissage de la surface d'extremite de connexion d'un connecteur a fibres optiques, structure optique et structure heterogene coaxiale de couches de materiau, et dispositif de polissage WO2003000461A1 (fr)

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2001188125A JP2003001553A (ja) 2001-06-21 2001-06-21 光ファイバーコネクターの接続端面研磨方法及びその装置
JP2001-188125 2001-06-21
JP2001-191418 2001-06-25
JP2001191418A JP2003001552A (ja) 2001-06-25 2001-06-25 光学系構成体の研磨方法及びその装置
JP2001245609A JP2003053650A (ja) 2001-08-13 2001-08-13 光学系構成体の研磨方法および研磨装置
JP2001-245609 2001-08-13
JP2001259528A JP2003071693A (ja) 2001-08-29 2001-08-29 同軸・異種材層構造になる被研磨物の研磨方法及びその装置
JP2001-259528 2001-08-29

Publications (1)

Publication Number Publication Date
WO2003000461A1 true WO2003000461A1 (fr) 2003-01-03

Family

ID=27482363

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2002/006033 WO2003000461A1 (fr) 2001-06-21 2002-06-17 Procede de polissage de la surface d'extremite de connexion d'un connecteur a fibres optiques, structure optique et structure heterogene coaxiale de couches de materiau, et dispositif de polissage

Country Status (1)

Country Link
WO (1) WO2003000461A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8865168B2 (en) 2005-02-16 2014-10-21 The General Hospital Corporation Methods and compositions to regulate hepcidin expression
AT508345A3 (de) * 2009-06-04 2015-06-15 Universität Linz Verfahren zum schleifen einer mikrolinse am ende einer optischen faser
CN114888689A (zh) * 2022-05-19 2022-08-12 合肥国际应用超导中心 一种用于高温超导带材焊制导体的外型削磨装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138795A (en) * 1976-05-14 1977-11-19 Yoshiaki Nagaura Lens polishing device
JPH07164300A (ja) * 1993-12-14 1995-06-27 Nec Corp 球面加工装置
JPH07314309A (ja) * 1994-05-23 1995-12-05 Nec Corp 球面加工装置及び方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52138795A (en) * 1976-05-14 1977-11-19 Yoshiaki Nagaura Lens polishing device
JPH07164300A (ja) * 1993-12-14 1995-06-27 Nec Corp 球面加工装置
JPH07314309A (ja) * 1994-05-23 1995-12-05 Nec Corp 球面加工装置及び方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8865168B2 (en) 2005-02-16 2014-10-21 The General Hospital Corporation Methods and compositions to regulate hepcidin expression
AT508345A3 (de) * 2009-06-04 2015-06-15 Universität Linz Verfahren zum schleifen einer mikrolinse am ende einer optischen faser
AT508345B1 (de) * 2009-06-04 2015-09-15 Universität Linz Verfahren zum schleifen einer mikrolinse am ende einer optischen faser
CN114888689A (zh) * 2022-05-19 2022-08-12 合肥国际应用超导中心 一种用于高温超导带材焊制导体的外型削磨装置

Similar Documents

Publication Publication Date Title
KR100201791B1 (ko) 공작물에 블록 팁을 형성하는 방법 및 장치
JP2001246539A (ja) 非軸対称非球面ミラーの研削加工方法
JPH11300591A (ja) 光コネクタ用フェルールの凸球面研磨方法
WO2003000461A1 (fr) Procede de polissage de la surface d'extremite de connexion d'un connecteur a fibres optiques, structure optique et structure heterogene coaxiale de couches de materiau, et dispositif de polissage
JP2003053650A (ja) 光学系構成体の研磨方法および研磨装置
JP2001246561A (ja) マイクロv溝加工装置及び方法
JP2003001552A (ja) 光学系構成体の研磨方法及びその装置
JP2003305652A (ja) 砥 石
JP4208364B2 (ja) 球面創成装置および球面創成方法
JP2003001553A (ja) 光ファイバーコネクターの接続端面研磨方法及びその装置
JPH09323249A (ja) 研磨工具
CN108602170B (zh) 工件端面的多阶段一并研磨方法及研磨膜
JP2005059176A (ja) ツルーイング・ドレッシング方法、および同装置
JPH0351553B2 (fr)
JP4370743B2 (ja) 研磨用砥石のドレッシング装置
JP2002144205A (ja) 研磨装置及び光学部材の製造方法
JP2002210647A (ja) 光学レンズの平滑処理方法およびこれを用いた光学レンズの製造方法、光学レンズの平滑処理装置
JP4136283B2 (ja) 研磨装置
JP3667048B2 (ja) 精密研磨装置
JP2009018366A (ja) 凸曲面研削方法
JP2000354944A (ja) 光コネクタ用フェルールの凸球面研磨方法
US7150676B2 (en) Dual motion polishing tool
JPH11347908A (ja) 球面加工装置
JP2020196095A (ja) 溝研磨体
JP2009125854A (ja) 光ファイバ付きフェルールの端面研磨方法および端面研磨装置

Legal Events

Date Code Title Description
AK Designated states

Kind code of ref document: A1

Designated state(s): CA CN ID IN KR SG US

AL Designated countries for regional patents

Kind code of ref document: A1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE TR

121 Ep: the epo has been informed by wipo that ep was designated in this application
122 Ep: pct application non-entry in european phase