WO2002093202A2 - Appareil, systeme et procedes ameliores permettant d'appliquer des forces de gradient optique - Google Patents

Appareil, systeme et procedes ameliores permettant d'appliquer des forces de gradient optique Download PDF

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Publication number
WO2002093202A2
WO2002093202A2 PCT/US2002/015351 US0215351W WO02093202A2 WO 2002093202 A2 WO2002093202 A2 WO 2002093202A2 US 0215351 W US0215351 W US 0215351W WO 02093202 A2 WO02093202 A2 WO 02093202A2
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WIPO (PCT)
Prior art keywords
optical
beamlets
optical element
phase patterning
light
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Application number
PCT/US2002/015351
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English (en)
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WO2002093202A3 (fr
Inventor
David Grier
Ward Lopes
Eric Dufresne
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Arryx, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Publication date
Application filed by Arryx, Inc. filed Critical Arryx, Inc.
Priority to CA002447472A priority Critical patent/CA2447472A1/fr
Priority to EP02734431A priority patent/EP1395856A4/fr
Priority to JP2002589827A priority patent/JP2004534661A/ja
Publication of WO2002093202A2 publication Critical patent/WO2002093202A2/fr
Publication of WO2002093202A3 publication Critical patent/WO2002093202A3/fr
Priority to US10/701,324 priority patent/US7324282B2/en

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/32Micromanipulators structurally combined with microscopes

Definitions

  • the present invention relates generally to optical traps.
  • the invention relates to an apparatus, system and method for applying optical gradient forces to form a plurality of optical traps to manipulate small particles.
  • An optical tweezer is an optical tool which utilizes the gradient forces of a focused beam of light to manipulate particles with dielectric constants higher than the surrounding media. To minimize its energy such particles will move to the region where the electric field is the highest. Stated in terms of momentum, the focused beam of light produces radiation pressure, creating small forces by absorption, reflection, diffraction or refraction of the light by a particle. The forces generated by radiation pressure are almost negligible-- a light source, such as a diode-pumped Nd:YAG laser operating at lOmW, will only produce a few picoNewtons. However, a few picoNewtons of force is sufficient to manipulate small particles.
  • optical tools which can be used to manipulate small particles include, but are not limited to, optical vortices, optical bottles, optical rotators and light cages.
  • An optical vortex although similar in use to an optical tweezer, operates on an opposite principle.
  • An optical vortex produces a gradient surrounding an area of zero electric field which is useful to manipulate particles with dielectric constants lower than the surrounding media or which are reflective, or other types of particles which are repelled by an optical tweezer. To minimize its energy such a particle will move to the region where the electric field is the lowest, namely the zero electric field area at the focal point of an appropriately shaped laser beam.
  • the optical vortex provides an area of zero electric field much like the hole in a doughnut (toroid).
  • the optical gradient is radial with the highest electric field at the circumference of the doughnut.
  • the optical vortex detains a small particle within the hole of the doughnut. The detention is accomplished by slipping the vortex over the small particle along the line of zero electric field.
  • the optical bottle differs from an optical vortex in that it has a zero electric field only at the focus and a non-zero electric field at an end of the vortex.
  • An optical bottle may be useful in trapping atoms and nanoclusters which may be too small or too absorptive to trap with an optical vortex or optical tweezers.
  • the optical rotator is a recently described optical tool which provides a pattern of spiral arms which trap objects. Changing the pattern causes the trapped objects to rotate.
  • the light cage described by Neal in U.S. Patent No. 5,939,716, is loosely, a macroscopic cousin of the optical vortex.
  • a light cage forms a ring of optical vortices to surround a particle too large, too reflective, or with dielectric constants lower than the surrounding media. If the optical vortex is like a doughnut, the light cage is like a jelly- filled doughnut. While the doughnut hole (for the vortex) is an area of zero electric field, the jelly-fill is an area of lowered electric field.
  • Patent No. 6,055,106 is to place a beam splitter in the pathway of the laser beam and thereby yield an optical data-stream.
  • noise refers to the interference with the imaging, measuring and/or viewing of the optical traps, their contents, or the surrounding region resulting from the presence in the system of un-diffracted focused beam of light or energy, light emanating from the optical traps, and light reflected or diffracted off a lens in a physical transfer lens system either due to imperfections in the lens, dust, dirt or due to misalignment.
  • one way to reduce noise is to direct the laser beam at an oblique angle relative to the diffractive element thereby urging the un-diffracted beam away from the objective lens. While useful for its intended purposes, the other sources of noise remain. There exists a need for reduction or elimination of the noise caused by the un-diffracted laser beam, scattered and reflected laser light off the components of a system producing an array of optical traps. The present invention also satisfies this need and other needs and provides related advantages.
  • the present invention provides a novel and improved method, system and apparatus for generating, monitoring and controlling optical trap arrays employing but a single physical transfer lens.
  • the within invention also improves monitoring and control of optical traps by filtering out, or shuttering off, the "noise" caused by scattered, un-diffracted and reflected light within the system.
  • Multiple transfer lenses are eliminated or reduced, in a system producing a plurality of optical traps, by encoding a lens function into a diffractive optical element.
  • the diffractive optical element may also alter the phase of any of the beams.
  • the invention creates conditions favorable to use a single physical lens to transfer and overlay the plurality of beams at the back aperture of the objective lens and to form optical traps there-through.
  • the mvention is a focused beam of light or energy, such as single laser beam diffracted by a diffractive optical element which has an encoded lens function.
  • the laser beam is diffracted into a plurality of beams and each beam is also converged by the diffractive optical element then directed to a single transfer lens which in turn directs and overlaps the plurality of beams at the back aperture of a focusing lens (such as the objective lens of a microscope) thereby forming a plurality of optical traps.
  • a focusing lens such as the objective lens of a microscope
  • a moving mirror may be added (FIGS. ID, IE, 2 and 4) to simultaneously alter the position of all the optical traps as a unit. In some cases, movement of the single transfer lens may also be desirable to alter the position of the given optical trap.
  • the selective generation and control of the array of optical traps with a single lens transfer system may be useful in a variety of commercial applications, such as, optical circuit design and manufacturing, nanocomposite material construction, fabrication of electronic components, opto-electronics, chemical and biological sensor arrays, assembly of holographic data storage matrices, energy source or optical motor to drive MEMS, facilitation of combinatorial chemistry, promotion of colloidal self-assembly, manipulation of biological materials, interrogating biological material, concentrating selected biological material, investigating the nature of biological material, and examining biological material.
  • real time viewing of the activity of the optical trap array is enabled by placing a beam splitter in the path of the beams prior to the focusing lens and then introducing a filter to limit the passage of un- diffracted, scattered or reflected light along the optical data stream thus reducing this noise which can disrupt video or other monitoring of the optical data stream.
  • a moving mirror useful to adjust, the position of the whole array of optical traps, may also be combined with the beam splitter (FIGS. 2 and 3) or added to the system (FIG. 4).
  • Noise reduction may also be achieved by periodically shuttering off the laser light (FIG. 3) and monitoring the optical data stream, and/or by shuttering off the optical data stream when the laser is on.
  • FIG. 1A illustrates a system for manipulating an array of small particles.
  • FIG. IB illustrates a first alternate system for manipulating an array of small particles.
  • FIG. 1C illustrates a second alternate system for manipulating an array of small particles with a reflective diffractive optical element.
  • FIG. ID illustrates a third alternate system for manipulating an array of small particles with a movable mirror.
  • FIG. IE illustrates a fourth alternate system for manipulating an array of small particles with a movable mirror.
  • FIG. 2 illustrates a fifth alternate system for manipulating an array of small particles adapted for real time and noise free viewing.
  • FIG. 3 illustrates a sixth alternate system for manipulating an array of small particles adapted for real time and noise free viewing.
  • FIG. 4 illustrates a seventh alternate system for manipulating an array of small particles adapted for real time viewing.
  • Beamlet refers to a sub-beam of focused light or other source of energy that is generated by directing a focused beam of light or other source of energy, such as that produced by a laser or collimated output from a light emitting diode, through a media which diffracts it into two or more sub-beams.
  • An example of a beamlet would be a higher order laser beam diffracted off of a grating.
  • Phase profile refers to the phase of light or other source of energy in a cross- section of a beam.
  • Phase patterning refers to imparting a patterned phase shift to a focused beam of light, other source of energy or beamlet which alters its phase profile, including, but not limited to, phase modulation, mode forming, splitting, converging, diverging, shaping and otherwise steering a focused beam of light, other source of energy or a beamlet.
  • FIGS. 1 A, IB and lC Various embodiments of the inventive apparatus for forming a plurality of movable optical traps, generally designated as 8, are shown in FIGS. 1 A, IB and lC.
  • a movable array of optical traps is formed by generating a focused beam of energy, such as electromagnetic wave energy.
  • the electromagnetic waves are light waves, preferably having a wavelength of from about 400 nm to about 1060 nm, and more preferably having a wavelength in the green spectrum.
  • the beam is formed of a collimated light, such as the collimated output from a light emitting electrode or, preferably, a laser beam 10, as shown in FIGS. 1 A-E.
  • the focused beam of light is directed along optical axis 500 through a phase patterning optical element having a variable optical surface, such as a diffractive optical element 12 having a variable optical surface disposed substantially in a plane conjugate to a planar surface 15 of a back aperture 16 of a focusing lens, such as an objective lens 18, to produce a plurality of beamlets 32 and 33 (two shown) having a selected phase profile. Varying the optical surface of the diffractive optical element alters the beamlets.
  • Encoded in the diffractive optical element 12 is a virtual lens that converges the plurality of beamlets at a position between the encoded diffractive optical lens and a single transfer lens.
  • the beamlets emanating from the encoded diffractive optical element, after converging, are directed thorough a transfer lens so as to overlap the beamlets at the back aperture of a focusing lens, such as an objective lens objective lens 18.
  • the beamlets are then converged by the focusing lens to form a plurality of optical traps 1002 and 1004 in working focal region 2000.
  • the working focal region 2000 is that area where a media containing particles 3000 or other material 3002 to be examined, measured or manipulated by the optical traps 1002 and 1004 is placed.
  • any suitable laser can be used as the source of the laser beam 10.
  • Useful lasers include solid state lasers, diode pumped lasers, gas lasers, dye lasers, alexanderite lasers, free electron lasers, VCSEL lasers, diode lasers, Ti- Sapphire lasers, doped YAG lasers, doped YLF lasers, diode pumped YAG lasers, and flash lamp-pumped YAG lasers.
  • Diode- pumped Nd:YAG lasers operating between 10 mW and 5 W are preferred.
  • the encoded diffractive optical element When the focused beam of light 10 is directed through the encoded diffractive optical element 12, the encoded diffractive optical element produces a plurality of diffracted beamlets 32 and 33 having an altered phase profile.
  • the alteration may include wavefront shaping, phase shifting, steering, diverging and converging to form different classes of optical traps including optical tweezers, optical vortices, optical bottles, optical rotators, light cages, and combinations of the different classes.
  • optical tweezers For clarity, only two diffracted beamlets and two corresponding optical tweezers 1002 and 1004 are shown, but it should be understood that an array of such beamlets are created by the encoded diffractive optical element.
  • the location of each trap is selectively controlled by the encoded diffractive optical element.
  • each trap be it rotation in a fixed position, rotation in a non-fixed position, two-dimensional and three dimensional, continuous and stepped is selectively controllable.
  • the control is achieved by varying the surface of the diffractive optical element through which the beam passes, thereby altering the position of convergence of the beamlets emanating from the encoded diffractive optical element.
  • Suitable diffractive optical elements are characterized as transmissive or reflective depending on how they direct the focused beam of light.
  • Transmissive diffractive optical elements as shown in FIGS. 1 A and IB, focus the beam of light
  • reflective diffractive optical elements as shown in FIG. 1C, reflect the beam.
  • a diffractive optical element can be categorized as being formed from either static or dynamic media.
  • suitable static diffractive optical elements include diffractive optical elements with a fixed surface, such as gratings, including diffraction gratings, reflective gratings, transmissive gratings, holograms, stencils, light shaping holographic filters, polychromatic holograms, lenses, mirrors, prisms, waveplates and the like.
  • the static diffractive optical element may have different regions, each region configured to impart a different phase profile to the beamlets.
  • the surface of the static diffractive optical element can be varied by moving the surface relative to the laser beam 10 to select the appropriate region to change the desired characteristics imparted to the beamlets, i.e., to change the desired phase profile of at least one of the resulting beamlets.
  • the static surface contains two or more discreet non-homogeneous regions.
  • the static surface is substantially continuously varying.
  • suitable dynamic diffractive optical elements having a time dependent aspect to their function include variable computer generated diffractive patterns, variable phase shifting materials, variable liquid crystal phase shifting arrays, micro-mirror arrays, piston mode micro-mirror arrays, spatial light modulators, electro-optic deflectors, accousto-optic modulators, deformable mirrors, reflective MEMS arrays and the like.
  • a dynamic diffractive optical element the features of the encoded surface can be altered, for example, by a computer, to effect a change in the number of beamlets, the phase profile of at least one of the beamlets, and the location of at least one of the beamlets.
  • the virtual lens encoded on the diffractive optical element alters the phase of light incident on the optical element.
  • a representative virtual lens is a pattern similar to a Fresnel lens encoded, for example, in the orientation of a reflective grating or nematic liquid crystals.
  • the virtual lens is distinguishable from a physical lens, which affects all the beamlets 32 and 33 as a whole, as the virtual element can alter the relative position of each beamlet 32 and 33 independently.
  • the diffractive optical element is also useful to impart a particular topological mode to the laser light. Accordingly, one beamlet 32 may be formed in a Guass-Laguerre mode while another beamlet 33 is formed in a Guassian mode.
  • Preferred virtual lens-encoded diffractive optical elements include phase-only spatial light modulators such as the "PAL-SLM series X7665, manufactured by Hamanmatsu of Japan or the "SLM 512SA7" manufactured by Boulder Nonlinear Systems of Layfette, Colorado. These encoded diffractive optical elements are computer controllable and multifunctional, so that they can generate the beamlets 32 and 33 by diffracting the laser beam 10 and selectively impart desired characteristic to the resulting beamlets.
  • Each of the diffracted beamlets emanates from an area A on the front surface 13 of the encoded diffractive optical element and each must also pass through an area B, on the back aperture 16, thereby the beamlets are overlapping at the back aperture 16 of the objective lens 18.
  • near precise overlapping is efficiently accomplished by combining the virtual lens encoded diffraction optical element with a single, movable downstream optical lens LI.
  • the laser beam 10 preferably has a beam diameter w which substantially coincides with the diameter of the back aperture 16 and it is an advantage of the inventive system that there is little or no overfill of the back aperture 17 of the objective lens 18 both conserving the intensity of the laser beam 10 and preserving the strength of the electrical field gradient creating effective optical traps 1002 and 1004 in the desired pattern within the working focal region 2000.
  • NA n* Sin ⁇ / 2
  • n the index of refraction for the medium outside of the objective lens
  • the angle of convergence for the diffracted beams
  • the controllable array of optical traps is formed by passing the laser beam 10 through a diffractive optical element 12 encoded with a virtual lens that is disposed substantially in a plane 14' forming an acute angle ⁇ relative to the optical axis 500.
  • beamlets 32 and 33 emanating from area A on the front surface of the encoded diffractive optical element are directed by the diffractive optical element so as to pass through area B on the back aperture 16 of the objective lens 18 and form optical traps 1002 and 1004 in the working focal region 2000.
  • non-movable optical traps (not shown) which may form from an un-diffracted portion of the laser beam when the laser beam is directed along the optical axis as shown in FIGS. 1A and 1C is eliminated.
  • FIG. 1C illustrates an alternative embodiment where the controllable array of optical traps is formed by reflecting the laser beam 10 off a diffractive optical element 12" having an encoded virtual lens.
  • FIGS. ID and IE show alternative embodiments having a movable mirror 41 for steering the beamlets emanating from the phase patterning optical element as a group prior to overlapping the beamlets at the back aperture of the focusing lens.
  • the movable mirror 41 is disposed upstream of the transfer lens LI with its center of rotation at area C.
  • the representative beamlet 32 passes from area A on the front surface 13 of the encoded diffractive optical element 12 through the transfer lens LI and on to area C which reflects it to area B at the back aperture 16. Tilting the movable mirror 41 effects a change of the angle of incidence of the beamlet 32 relative to the mirror 41 and can be used to translate the array of optical traps 1002 and 1004.
  • This movable mirror is useful for both precisely aligning the optical trap array within a stationary substrate, to dynamically stiffen the optical traps through small- amplitude rapid oscillatory displacements, and to effectively increase the trapping action by precisely altering positions of the array of optical traps while pulsing the optical traps to form two or more alternating sets of optical traps from the same number of beamlets.
  • the embodiment shown in FIG. ID minimizes beamlet misalignments by including a conventional telescope system 42 disposed between the movable mirror 41 and the objective lens 18.
  • the telescope system is constructed of two lenses L2 and L3 placed between conjugate planes 43 and 45, such that the beamlets pass from area A on the front surface 13 of the encoded diffractive optical element 12 on to the center of rotation of beam splitter 51 at area C in plane 43, and then through area B on the back aperture 16 of the objective lens 18 in plane 44.
  • the movable mirror 41 is placed in close proximity to the back aperture 16 in order to minimize beamlet misalignments.
  • the laser beam 10 passes through the diffractive optical element 12 to produce the beamlet 32 which emanates from area A on the front surface 13 of the encoded diffractive optical element 12 then passes on to area C.
  • Area C is the center region on the surface of a beam splitter 51 located before the objective lens 18.
  • the beam splitter 51 is constructed of a static or a movable dichroic mirror, a static or a movable photonic band gap mirror, a static or a movable omnidirectional mirror, or other similar device.
  • the beam splitter shown in FIG. 2 is movable and, therefore, serves the dual function of movable mirror and beam splitter. In the alternative embodiment shown in FIG. 3, the beam splitter 51 is fixed.
  • the beam splitter 51 selectively reflects the wavelength of light used to form the optical traps and transmits other wavelengths to form two streams of beamlets.
  • the first stream of beamlets proceeds from area C through area B at the back aperture 16 of the objective lens 18 thereby effectively overlapping all the beamlets at the back aperture and forming the optical traps 1002 and 1004.
  • the second stream of beamlets is reflected by the beam splitter 51 to a monitor and used to provide a real time optical data stream, aided by an imaging illumination source (not shown).
  • the second stream of beamlets passes through the apparatus 8 to be visually inspected 64a by a human monitor 65.
  • the monitor 65 may also interface with a computer 66 and cause the computer to effect changes in the parameters of the system to alter the position of the position of one or all of the beamlets 32.
  • a spectrum 64b of the optical data stream can be obtained, then analyzed and/or the optical data stream can be converted into a video signal and monitored with a video monitor 64c.
  • the optical data stream is passed through a spectrometer and the position of the convergence of at least one beamlet is then altered in response to an analysis of the spectrum or the video monitoring to change the location of the corresponding optical trap(s).
  • Spectroscopy 64b of a sample of biological material can be accomplished with an imaging illumination suitable for either inelastic spectroscopy or polarized light back scattering, the former being useful for assessing chemical structure and the later being suited for measuring nucleus size.
  • the computer 66 analyzes the data to identify suspected cancerous, pre-cancerous and/or non-cancerous cells, and directs the optical array to segregate and concentrate a sample of the selected cell types.
  • the methodology used to concentrate cells based on parameters specific to cancerous cells may be altered without departing from the scope of the invention to identify and/or concentrate other types of cells based on other parameters.
  • the wavelengths of the laser beam 10 used to form optical traps useful for manipulating biological material include the infrared, near infrared and visible wavelengths from about 400nm to about 1060nm
  • the optical data stream may be received by a computer 66 adapted to record the optical data stream, analyze the optical data stream, and/or precisely adjust the position of one or all of the beamlet(s) 32 via the diffractive optical element 13, the position of the single transfer lens LI, and/or the position of the movable beam splitter 51.
  • the optical data stream may be processed by a photodectector to monitor intensity, or any suitable device to convert the optical data stream to a digital data stream adapted for use by a computer 66.
  • the real time optical data stream provides more useful information if the noise is controlled.
  • a filter element 53 such as a polarizing element or band pass element, is placed within the pathway of the optical data stream to reduce the amount of reflected, scattered or un-diffracted laser light 10 passing along the axis of the optical data stream.
  • the filter element 53 filters out one or more preselected wavelengths and, in some embodiments, all but a preselected wavelength of the optical data stream.
  • FIG. 3 illustrates a system of controllable shutters 62 and 63.
  • One advantage of shutters is to eliminate substantially all of the noise or interference from the optical data stream.
  • the shutter 62 selectively blocks and unblocks the optical data stream from passing freely from the system by coordinating its opening with the turning on and off of the laser beam 10. When the laser beam is not being generated, the optical data stream is blocked and when focused beam of light is being generated, the optical data stream is unblocked.
  • the pulse rate of the shutter is adjusted dependent on the nature of the particles being manipulated. However, too slow a pulse rate will allow the trapped particles to drift. For those situations in which drift is desired, the pulse rate may be adjusted to encourage drift.
  • the shutter 63 blocks the laser beam (not shown) or the beamlets from passing freely into the objective lens.
  • the opening and closing of the shutter 63 with the turning "on” and “off of the monitoring of the optical data stream noise is reduced.
  • dual shuttering may be desirable.
  • One advantage of dual shuttering is that both the laser beam 10 and the monitoring equipment can remain “on” at all times. In such an arrangement only the activity of the shutters 62 and 63 need be coordinated.
  • the computer 66 may be used to selectively control the shutter(s) 62 and 63. Shown in FIG.
  • the apparatus 4 is an embodiment useful where the availability of equipment, physical space limitations or other performance parameters will benefit from using a traditional telescope transfer lens system 42 placed in the system after the single transfer lens LI combined with a moving mirror 41 and a beam splitter 51 to provide an optical data stream.
  • the apparatus 8 is useful as part of a system for manipulating a plurality of small particles.
  • the system includes a light source (not shown) for producing the focused beam of light, the focused beam of light 10, and a plurality of small particles 3000 that are manipulated by the optical traps 1002 and 1004.
  • optical traps created in accordance with the invention.
  • the optical traps form the gradient conditions necessary to manipulate biological material.

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Manipulator (AREA)
  • Micromachines (AREA)
  • Microscoopes, Condenser (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

La présente invention concerne globalement la génération et le contrôle de réseaux de pièges optiques utilisés pour manipuler des particules. De manière plus spécifique, cette invention concerne un élément optique à double fonction qui est à la fois capable de diffracter la lumière laser sous forme de petits faisceaux et de faire converger lesdits petits faisceaux (qui font office de lentille virtuelle pour la lumière laser), ce qui évite de devoir utiliser plusieurs lentilles physiques pour transférer sur une lentille de focalisation, les faisceaux laser diffractés. Cette invention concerne également la surveillance améliorée des pièges optiques liée à la limitation de la quantité de bruit réfléchi et diffusé résultant de la lumière laser non diffractée.
PCT/US2002/015351 2001-05-14 2002-05-14 Appareil, systeme et procedes ameliores permettant d'appliquer des forces de gradient optique WO2002093202A2 (fr)

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Application Number Priority Date Filing Date Title
CA002447472A CA2447472A1 (fr) 2001-05-14 2002-05-14 Appareil, systeme et procedes ameliores permettant d'appliquer des forces de gradient optique
EP02734431A EP1395856A4 (fr) 2001-05-14 2002-05-14 Appareil, systeme et procedes ameliores permettant d'appliquer des forces de gradient optique
JP2002589827A JP2004534661A (ja) 2001-05-14 2002-05-14 光勾配力を印加する改良された装置、システムおよび方法
US10/701,324 US7324282B2 (en) 2002-05-14 2003-11-04 Apparatus, system and method for applying optical gradient forces

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Application Number Priority Date Filing Date Title
US85599501A 2001-05-14 2001-05-14
US09/855,995 2001-05-14

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US10/701,324 Continuation-In-Part US7324282B2 (en) 2002-05-14 2003-11-04 Apparatus, system and method for applying optical gradient forces
US10/701,324 Continuation US7324282B2 (en) 2002-05-14 2003-11-04 Apparatus, system and method for applying optical gradient forces

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EP1500311A1 (fr) * 2002-04-10 2005-01-26 Arryx, Inc. Dispositif et procede destines a produire et commander des pieges optiques pour la manipulation de petites particules
WO2007038260A2 (fr) * 2005-09-23 2007-04-05 Massachusetts Institute Of Technology Systemes et procedes de microscopie a force atomique et fluorescence
US7525088B2 (en) 2004-07-23 2009-04-28 The Science And Technology Facilities Council Optically controllable device
CN102240848A (zh) * 2011-06-15 2011-11-16 中科中涵激光设备(福建)股份有限公司 一种调节激光束产生动态横向位移的方法
JP2013235122A (ja) * 2012-05-09 2013-11-21 National Institute Of Advanced Industrial & Technology 微小物の3次元操作装置
CN110471187A (zh) * 2019-08-20 2019-11-19 济南大学 产生呈六角密排分布的三维阵列瓶状光束的装置与方法
CN117111163A (zh) * 2023-08-07 2023-11-24 之江实验室 重力测量装置

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JP5046645B2 (ja) * 2003-09-04 2012-10-10 アリックス インコーポレイテッド 血液や細胞等の液体混合物を構成成分に分離する方法、装置およびシステム。
JP5686408B2 (ja) * 2011-01-31 2015-03-18 独立行政法人産業技術総合研究所 微粒子のアレイ化法および装置
JP2013098262A (ja) * 2011-10-28 2013-05-20 Canon Inc 光学装置、位置検出装置及び顕微鏡装置
JP6881600B2 (ja) 2017-12-15 2021-06-02 日本電気株式会社 投射装置、インターフェース装置および投射方法

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US6055106A (en) * 1998-02-03 2000-04-25 Arch Development Corporation Apparatus for applying optical gradient forces
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Cited By (10)

* Cited by examiner, † Cited by third party
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EP1500311A1 (fr) * 2002-04-10 2005-01-26 Arryx, Inc. Dispositif et procede destines a produire et commander des pieges optiques pour la manipulation de petites particules
EP1500311A4 (fr) * 2002-04-10 2009-02-18 Arryx Inc Dispositif et procede destines a produire et commander des pieges optiques pour la manipulation de petites particules
US7525088B2 (en) 2004-07-23 2009-04-28 The Science And Technology Facilities Council Optically controllable device
WO2007038260A2 (fr) * 2005-09-23 2007-04-05 Massachusetts Institute Of Technology Systemes et procedes de microscopie a force atomique et fluorescence
WO2007038260A3 (fr) * 2005-09-23 2010-09-02 Massachusetts Institute Of Technology Systemes et procedes de microscopie a force atomique et fluorescence
CN102240848A (zh) * 2011-06-15 2011-11-16 中科中涵激光设备(福建)股份有限公司 一种调节激光束产生动态横向位移的方法
JP2013235122A (ja) * 2012-05-09 2013-11-21 National Institute Of Advanced Industrial & Technology 微小物の3次元操作装置
CN110471187A (zh) * 2019-08-20 2019-11-19 济南大学 产生呈六角密排分布的三维阵列瓶状光束的装置与方法
CN110471187B (zh) * 2019-08-20 2021-07-30 济南大学 产生呈六角密排分布的三维阵列瓶状光束的装置与方法
CN117111163A (zh) * 2023-08-07 2023-11-24 之江实验室 重力测量装置

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CN1509415A (zh) 2004-06-30
CN100353188C (zh) 2007-12-05
JP2008229837A (ja) 2008-10-02
WO2002093202A3 (fr) 2003-02-27
JP5134389B2 (ja) 2013-01-30
EP1395856A2 (fr) 2004-03-10
CA2447472A1 (fr) 2002-11-21
JP2004534661A (ja) 2004-11-18
EP1395856A4 (fr) 2006-01-18

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