WO2002090917A3 - Dispositif de fuite test - Google Patents

Dispositif de fuite test Download PDF

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Publication number
WO2002090917A3
WO2002090917A3 PCT/EP2002/004902 EP0204902W WO02090917A3 WO 2002090917 A3 WO2002090917 A3 WO 2002090917A3 EP 0204902 W EP0204902 W EP 0204902W WO 02090917 A3 WO02090917 A3 WO 02090917A3
Authority
WO
WIPO (PCT)
Prior art keywords
silicon oxide
test
leakage device
heating
membrane
Prior art date
Application number
PCT/EP2002/004902
Other languages
German (de)
English (en)
Other versions
WO2002090917A2 (fr
Inventor
Ludolf Gerdau
Rudi Widt
Original Assignee
Inficon Gmbh
Ludolf Gerdau
Rudi Widt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Inficon Gmbh, Ludolf Gerdau, Rudi Widt filed Critical Inficon Gmbh
Publication of WO2002090917A2 publication Critical patent/WO2002090917A2/fr
Publication of WO2002090917A3 publication Critical patent/WO2002090917A3/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
    • G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
    • G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
    • G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G01M3/00—Investigating fluid-tightness of structures
    • G01M3/007—Leak detector calibration, standard leaks

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Examining Or Testing Airtightness (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Un dispositif de fuite test présente un réservoir de gaz traceur (12) et une sortie de gaz traceur (16) fermée par une membrane (30) en oxyde de silicium. L'invention concerne également un dispositif chauffant permettant de chauffer le disque d'oxyde de silicium (32). S'agissant de l'oxyde de silicium, la perméabilité au gaz à faible poids moléculaire dépend principalement de sa température, si bien que le chauffage de la membrane d'oxyde de silicium permet de modifier et de commander le débit de fuite du dispositif de fuite test.
PCT/EP2002/004902 2001-05-10 2002-05-04 Dispositif de fuite test WO2002090917A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE2001122733 DE10122733A1 (de) 2001-05-10 2001-05-10 Testleckvorrichtung
DE10122733.7 2001-05-10

Publications (2)

Publication Number Publication Date
WO2002090917A2 WO2002090917A2 (fr) 2002-11-14
WO2002090917A3 true WO2002090917A3 (fr) 2003-03-20

Family

ID=7684290

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/004902 WO2002090917A2 (fr) 2001-05-10 2002-05-04 Dispositif de fuite test

Country Status (2)

Country Link
DE (1) DE10122733A1 (fr)
WO (1) WO2002090917A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108844692A (zh) * 2018-06-27 2018-11-20 董建礼 一种压力差法检测膜式燃气表内泄漏装置及运算方法

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE50305135D1 (de) 2002-09-26 2006-11-02 Inficon Gmbh Prüfleckeinrichtung für einen schnüffellecksucher
DE10308687A1 (de) * 2002-09-26 2004-04-08 Inficon Gmbh Prüfleckeinrichtung für einen Schnüffellecksucher
ITTO20030032A1 (it) * 2003-01-24 2004-07-25 Varian Spa Membrana permeabile selettivamente ai gas e metodo per la sua realizzazione.
DE10353033A1 (de) * 2003-11-13 2005-06-09 Inficon Gmbh Verfahren zum Betrieb eines Wasserstoff-Testlecks
DE102006026125A1 (de) * 2006-06-03 2007-12-06 Inficon Gmbh Gassensor
DE102006028778A1 (de) * 2006-06-23 2007-12-27 Inficon Gmbh Lecksuchgerät
DE102007003290A1 (de) * 2007-01-23 2008-07-24 Bayerische Motoren Werke Aktiengesellschaft Gasdämpfer oder Gasfederdämpfer
US8361196B2 (en) * 2010-04-09 2013-01-29 Inficon Gmbh Gas-selective membrane and method of its production
DE102020100830A1 (de) * 2020-01-15 2021-07-15 Inficon Gmbh Prüfgasapplikator
DE102020116939A1 (de) * 2020-06-26 2021-12-30 Inficon Gmbh Prüfleckvorrichtung
DE102021134647A1 (de) 2021-12-23 2023-06-29 Inficon Gmbh Vakuumlecksucher mit Ansprüh-Membran-Testleck und Verfahren
DE102023121742A1 (de) 2023-04-11 2024-10-17 Inficon Gmbh Testleckvorrichtung mit einem Testgasspeicher mit einem Testgasauslass

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2979937A (en) * 1956-01-03 1961-04-18 Chausson Usines Sa Device particularly for calibrating equipment for detecting leaks and similar purposes
DE19521275A1 (de) * 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2926112A1 (de) * 1979-06-28 1981-01-08 Bosch Gmbh Robert Testleck-sonde
DE4326265A1 (de) * 1993-08-05 1995-02-09 Leybold Ag Testgasdetektor, vorzugsweise für Lecksuchgeräte, sowie Verfahren zum Betrieb eines Testgasdetektors dieser Art
JP2850816B2 (ja) * 1995-12-18 1999-01-27 日本電気株式会社 バンプ接合検査装置及び検査方法
DE19832833C2 (de) * 1998-07-21 2002-01-31 Fraunhofer Ges Forschung Verfahren zur thermographischen Untersuchung eines Werkstückes und Vorrichtung hierfür

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2979937A (en) * 1956-01-03 1961-04-18 Chausson Usines Sa Device particularly for calibrating equipment for detecting leaks and similar purposes
DE19521275A1 (de) * 1995-06-10 1996-12-12 Leybold Ag Gasdurchlaß mit selektiv wirkender Durchtrittsfläche sowie Verfahren zur Herstellung der Durchtrittsfläche

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108844692A (zh) * 2018-06-27 2018-11-20 董建礼 一种压力差法检测膜式燃气表内泄漏装置及运算方法

Also Published As

Publication number Publication date
DE10122733A1 (de) 2002-11-14
WO2002090917A2 (fr) 2002-11-14

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