WO2002089228A2 - Kompositwerkstoff, verfahren zu dessen herstellung und dessen verwendung - Google Patents
Kompositwerkstoff, verfahren zu dessen herstellung und dessen verwendung Download PDFInfo
- Publication number
- WO2002089228A2 WO2002089228A2 PCT/DE2002/000981 DE0200981W WO02089228A2 WO 2002089228 A2 WO2002089228 A2 WO 2002089228A2 DE 0200981 W DE0200981 W DE 0200981W WO 02089228 A2 WO02089228 A2 WO 02089228A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- component
- composite material
- powder
- influence
- layer
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/09—Forming piezoelectric or electrostrictive materials
- H10N30/092—Forming composite materials
Definitions
- the invention relates to a composite material with piezoresistive and magnetoelastic properties, method for its production and its use in a sensor element or an actuator element according to the type of the independent claims.
- Piezoelectric materials or materials that show a piezoelectric or reverse piezoelectric effect are widely known. These include, for example, lead zirconate titanate ceramics (PZT ceramics) or ferroelectric piezoceramic materials, such as those offered by Marco GmbH, Dachau. In particular, reference is made to their websites at www.marco.de and in particular to www.marco.de/D/fpm /001/OlO.html.
- magnetoelastic materials are also known from the prior art. For example, reference is made to the materials manufactured and distributed by Etrema Products Inc., Iowa, USA, which are available as an overview on the Internet at www.etrema-usa.com. In particular, Etrema Products Inc. sells a magnetoelastic powder under the trade name Terfenol-D, which is made from a terbium dysprosium iron Alloy based. In addition, a large number of magnetoelastic materials are known which start from ferromagnetic powders such as nickel-iron powder or cobalt-iron powder.
- a sensor element that uses both the magnetostrictive effect and the piezoelectric effect comprises a piece of a piezoelectric material and a piece of a magnetostrictive material, the magnetostrictive or magnetoelastic material exerting a mechanical tension on the piezoelectric material when an external magnetic field is applied, so that the piezoelectric material generates an electrical output signal which is tapped
- the named article is available on the Internet at www.sensorsmag.com/articles/1000/52/main.shtml.
- the composite material according to the invention and the methods according to the invention for its production have the advantage over the prior art in that a new type of material is obtained or can be produced which combines the properties of a piezoelectric material with the properties of a magnetoelastic material.
- a new type of material is obtained or can be produced which combines the properties of a piezoelectric material with the properties of a magnetoelastic material.
- the composite material according to the invention in particular compared to the prior art, less expensive and simpler sensor or actuator elements are manufactured or new application fields for such sensor or actuator elements are opened up.
- the composite material according to the invention is particularly suitable for use in speed sensors, current sensors, torque sensors, force sensors, for example for use in motor vehicles, power tools or in household technology.
- passive sensor elements can also be implemented very advantageously, ie sensor elements that do not require any voltage supply.
- Another advantage of the composite material according to the invention is that when it is used in corresponding sensor elements, a contactless measurement of magnetic fields without energy supply to the sensor element, i.e. passive, is possible. Among other things, this also allows a telemetric query of the respective sensor signal without energy supply.
- the composite material according to the invention can also be used under difficult conditions or stressed environments, such as, for example, at very high temperatures in the vicinity of an engine of a motor vehicle or on a brake of a motor vehicle.
- the composite material according to the invention offers the advantage that electric fields can also be measured as a function of a change in the permeability of the composite material.
- an electrical voltage applied to the composite material can change the resonance frequency of an oscillating circuit.
- the advantages of known magnetoelastic sensors and piezoelectric sensors can be combined as desired, whereby dynamic and static forces can in particular also be measured simultaneously with a sensor element using the composite material according to the invention.
- the composite material according to the invention can be shaped using conventional shaping methods, for example for use in a force sensor, and that the introduction of force into the composite material is also unproblematic, since the magnetoelastic or piezoelectric effect in the composite material according to the invention is in each case is a volume effect.
- a sensor element or actuator element with the composite material according to the invention can also easily be used for self-diagnosis, since it can be switched over from a sensor functionality to an actuator functionality and vice versa without any problems.
- the first component of the composite material that behaves like a piezoelectric material is a ceramic piezoelectric material such as a PZT ceramic.
- quartz, zinc oxide, a ferroelectric material such as barium titanate or lead titanate or a ferroelectric piezoceramic material are advantageous.
- the second component of the composite material according to the invention is advantageously a soft magnetic, highly magnetoelastic material such as a nickel-iron alloy, a cobalt-iron alloy, an iron oxide such as Fe 2 0 3 , a terbium-dysprosium-iron alloy or a nickel Manganese gallium alloy.
- the structure of the composite material according to the invention it has proven to be advantageous if it is produced from a mixture of powders from the first component and the second component, the powder particles used preferably having an average particle size of 20 nm to 20 ⁇ m, in particular 500 nm to 5 ⁇ m. Such a powder mixture can then be sintered into a shaped body in the usual way.
- the composite material according to the invention is made up of at least two, but preferably a plurality of layers which are arranged one above the other and which alternately have the first component made of the piezoelectric material and the second component made of the magnetoelastic material. These layers then each have a thickness of less than 2 ⁇ m, in particular less than 500 nm.
- the first or second component is in the form of a nanoscale powder which is provided on the surface with a coating with the material of the other component. It is particularly advantageous if the powder particles consist of the second component, ie the magnetoelastic material, and if the surface coating is formed by the piezoelectric material, ie the first component.
- FIG. 1 shows a schematic diagram of a first exemplary embodiment of a composite material which is connected to a voltage source via electrodes
- FIG. 2 shows a second exemplary embodiment
- FIG. 3 shows a third exemplary embodiment.
- the composite material explained below and the processes described for its production are based on the fundamental knowledge that magnetic fields, in particular static magnetic fields, cause elongations or compressions in a magnetoelastic material due to the magnetoelastic effect, which then then occur in the piezoelectric material also contained in the composite material induce electrical voltages.
- the conversion chain is typically such that a magnetoelastic effect is first produced in the composite material according to the invention via an external magnetic field, which is generated, for example, via a coil, a magnet or a soft magnetic modulator leads to an expansion or compression in the area of the composite material which is occupied by the second component, ie the magnetoelastic material.
- This expansion or compression is then applied to the first component in the composite material, i.e. the piezoelectric material, so that there occurs a piezoelectric effect, i.e. an electrical voltage is induced, which can be tapped on the composite material by conventional electrodes and processed further.
- a piezoelectric effect i.e. an electrical voltage is induced
- a first exemplary embodiment which is explained with the aid of FIG. 1, is based on a first powder from a first component 11.
- the first component 11 is a piezoelectric material or behaves like such under an impressed electrical or mechanical voltage.
- a second powder is provided from a second component 12, the second component 12 being a magnetoelastic material or behaving as such under the influence of an applied mechanical tension or a magnetic field.
- the first and the second powder are preferably each used as a powder with an average particle size of 20 nm to 20 ⁇ m, in particular 500 nm to 5 ⁇ m. Furthermore, these starting powders are preferably with a binder, with for example, an organic binder, and / or a conventional pressing aid.
- shaping takes place, for example pressing such as cold pressing, so that a shaped body is then obtained.
- This molded body is then debindered in the usual manner and finally sintered, so that a composite material 5 is formed from the first component 11 and the second component 12, these components being integrally connected to one another.
- the composite material 5 can then further be provided on the surface according to FIG. 1 with electrodes 20 which are connected to a voltage source 25.
- a voltage tap can also be provided.
- the electrodes 20 are produced in the usual way by vapor deposition, sputtering or else gluing or pressing.
- FIG. 1 is only a schematic diagram, i.e. the powder particles of the first and second components 11, 12 need not all be of the same size or have the regular arrangement shown.
- a ceramic piezoelectric powder such as is suitable as powder for the first component 11 Usual PZT powder or also a quartz powder, a zinc oxide powder, a barium titanate powder, a lead titanate powder or a ferroelectric piezoceramic powder.
- the second powder which is provided by the second component 12, is preferably a ferromagnetic, in particular soft magnetic powder such as, for example, a powder of a nickel-iron alloy, a cobalt-iron alloy, an iron oxide powder such as Fe 2 O 3 powder Powder of a terium-dysposium-iron alloy or a nickel-manganese-gallium alloy.
- a ferromagnetic, in particular soft magnetic powder such as, for example, a powder of a nickel-iron alloy, a cobalt-iron alloy, an iron oxide powder such as Fe 2 O 3 powder Powder of a terium-dysposium-iron alloy or a nickel-manganese-gallium alloy.
- the composite material 5 is formed by a plurality of first layers 13 and second layers 14 arranged one above the other, the first layer 13 each consisting of the first component 11 and the second layer 14 each consisting of the second component 12.
- the thickness of the individual layers 13, 14 is usually less than 2 ⁇ m, in particular less than 500 nm.
- the first layer 13 from the first component 11 is first vapor-deposited or sputtered onto a largely arbitrary substrate, then the second layer 14 from the second component 12 is sputtered or vapor-deposited onto the first layer 13, then again the first layer 13, etc.
- the second layer 14 can first be vapor-deposited onto the substrate and then the first layer 13, etc.
- Suitable materials for forming the first layer 13 from the first component 11 are the materials already explained with the aid of the first exemplary embodiment for the first component 11 there. The same also applies to the materials of the second layer 14 made of the second component 12.
- a third exemplary embodiment of the invention is explained with reference to FIG. 3. It is provided that nanoscale powder particles with an average grain size of 20 nm to 300 nm from the second component 12, i.e. the magnetoelastic material, with a surface coating of the material of the first component 11, i.e. the piezoelectric material. However, it should be emphasized that the reverse can also be used, i.e. nanoscale powder particles of the first component 11 are provided with a surface coating made of the material of the second component 12.
- a shaped body is then produced from the surface-coated powder of nanoscale particles obtained in each case. This is done, for example, by pressing, in particular by cold pressing, and subsequent sintering.
- an organic binder and / or a pressing aid can first be added to the powder with the surface-coated nanoscale particles, so that the mass obtained in this way can be pressed more easily, then debindered and finally sintered in the usual way.
- nanoscale particles are preferably produced with a surface coating in a plasma, for example by producing the second material with the nanoscale particles in the plasma from a precursor compound, in particular an organometallic precursor compound such as nickel-iron-carbonyl.
- a precursor compound in particular an organometallic precursor compound such as nickel-iron-carbonyl.
- a suitable organometallic precursor compound in the plasma is converted into nanoscale powder particles from the first component 11 or, preferably, the second component 12.
- the plasma thereby removes the organic constituents of the precursor compound from the surface of the nanoscale particles formed, so that these surfaces can be provided with the desired surface coating in a subsequent processing step, for example already in the plasma by the targeted addition of a suitable reaction partner.
- the reaction partner is only added to the plasma temporarily.
- the added reactant is preferably a further precursor compound or a reactive gas, so that this further precursor compound or the reactive gas on the surface of the nanoscale particles from the second component 12 results in a surface coating made from the material of the first component 11, ie a piezoelectric material.
- rial such as zinc oxide.
- Oxygen is suitable as a reactive gas.
- the corresponding powder particles according to the first embodiment are suitable with a corresponding grain size.
- a material for the surface coating i.e. for the first component 11, barium titanate is particularly suitable in addition to zinc oxide.
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/474,527 US20040130238A1 (en) | 2001-04-27 | 2002-03-19 | Composite material, for the production thereof and its use |
JP2002586418A JP2004526329A (ja) | 2001-04-27 | 2002-03-19 | 複合材料、その製造法および該複合材料の使用 |
EP02727245A EP1386360A2 (de) | 2001-04-27 | 2002-03-19 | Kompositwerkstoff, verfahren zu dessen herstellung und dessen verwendung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE10120865.0 | 2001-04-27 | ||
DE10120865A DE10120865A1 (de) | 2001-04-27 | 2001-04-27 | Kompositwerkstoff, Verfahren zu dessen Herstellung und dessen Verwendung |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002089228A2 true WO2002089228A2 (de) | 2002-11-07 |
WO2002089228A3 WO2002089228A3 (de) | 2003-05-08 |
Family
ID=7683059
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2002/000981 WO2002089228A2 (de) | 2001-04-27 | 2002-03-19 | Kompositwerkstoff, verfahren zu dessen herstellung und dessen verwendung |
Country Status (5)
Country | Link |
---|---|
US (1) | US20040130238A1 (de) |
EP (1) | EP1386360A2 (de) |
JP (1) | JP2004526329A (de) |
DE (1) | DE10120865A1 (de) |
WO (1) | WO2002089228A2 (de) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9284643B2 (en) * | 2010-03-23 | 2016-03-15 | Pneumaticoat Technologies Llc | Semi-continuous vapor deposition process for the manufacture of coated particles |
CA2799848A1 (en) * | 2010-05-19 | 2011-11-24 | Sanofi-Aventis Deutschland Gmbh | Modification of operational data of an interaction and/or instruction determination process |
CN102130292A (zh) * | 2011-01-06 | 2011-07-20 | 北京理工大学 | 一种提升梯度材料磁电性质的方法 |
RU2754722C2 (ru) | 2016-12-09 | 2021-09-06 | Конинклейке Филипс Н.В. | Исполнительное устройство и способ для него |
CN112816106B (zh) * | 2020-12-24 | 2022-03-22 | 太原理工大学 | 一种铽镝铁柔性磁弹性薄膜生物传感器及其制备方法 |
CN116478540A (zh) * | 2023-04-24 | 2023-07-25 | 北京科技大学 | 兼具柔性和磁致伸缩性能的复合材料及其制备方法和应用 |
Citations (7)
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DE2249076A1 (de) * | 1971-10-11 | 1973-04-19 | Philips Nv | Vorrichtung zur umwandlung einer eingangsgroesse in eine ausgangsgroesse |
DE2600285A1 (de) * | 1975-01-10 | 1976-07-15 | Philips Nv | Verfahren zur herstellung eines sich zur umwandlung von groessen eignenden materials und aus einem derartigen material hergestelltes formstueck |
US4106028A (en) * | 1977-10-11 | 1978-08-08 | Eastman Technology, Inc. | Method and apparatus for forming magnetic images by piezoelectric coupling between an optical image and a magnetostrictive imaging component |
DE3431776A1 (de) * | 1983-08-30 | 1985-03-14 | Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto | Schwingungsisolierender gegenstand |
EP0225176A2 (de) * | 1985-11-29 | 1987-06-10 | Atsushi Ogura | Verbundwerkstoff und Verfahren zu seiner Herstellung |
DE10003982A1 (de) * | 1999-01-29 | 2000-08-03 | Nisshin Flour Milling Co | Oxidbeschichtete feine Metallteilchen und Verfahren zu deren Herstellung |
WO2000060369A1 (en) * | 1999-04-05 | 2000-10-12 | Spinix Corporation | Passive solid-state magnetic field sensors and applications therefor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2730853B1 (fr) * | 1995-02-17 | 1997-04-30 | Inst Franco Allemand De Rech D | Procede pour polariser une feuille de materiau ferroelectrique de grande surface |
US5675252A (en) * | 1995-06-19 | 1997-10-07 | Sqm Technology, Inc. | Composite structured piezomagnetometer |
DE19614044C1 (de) * | 1996-04-10 | 1997-10-23 | Deutsche Forsch Luft Raumfahrt | Aktuator mit einem ansteuerbaren längenveränderlichen Element aus einem multifunktionalen Werkstoff |
US6060811A (en) * | 1997-07-25 | 2000-05-09 | The United States Of America As Represented By The United States National Aeronautics And Space Administration | Advanced layered composite polylaminate electroactive actuator and sensor |
JP2896127B2 (ja) * | 1997-10-22 | 1999-05-31 | 工業技術院長 | 磁歪材料と圧電体材料との複合層からなる機能素子及び同素子を備えた磁気ヘッド |
-
2001
- 2001-04-27 DE DE10120865A patent/DE10120865A1/de not_active Ceased
-
2002
- 2002-03-19 EP EP02727245A patent/EP1386360A2/de not_active Withdrawn
- 2002-03-19 JP JP2002586418A patent/JP2004526329A/ja active Pending
- 2002-03-19 US US10/474,527 patent/US20040130238A1/en not_active Abandoned
- 2002-03-19 WO PCT/DE2002/000981 patent/WO2002089228A2/de not_active Application Discontinuation
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2249076A1 (de) * | 1971-10-11 | 1973-04-19 | Philips Nv | Vorrichtung zur umwandlung einer eingangsgroesse in eine ausgangsgroesse |
DE2600285A1 (de) * | 1975-01-10 | 1976-07-15 | Philips Nv | Verfahren zur herstellung eines sich zur umwandlung von groessen eignenden materials und aus einem derartigen material hergestelltes formstueck |
US4106028A (en) * | 1977-10-11 | 1978-08-08 | Eastman Technology, Inc. | Method and apparatus for forming magnetic images by piezoelectric coupling between an optical image and a magnetostrictive imaging component |
DE3431776A1 (de) * | 1983-08-30 | 1985-03-14 | Murata Manufacturing Co., Ltd., Nagaokakyo, Kyoto | Schwingungsisolierender gegenstand |
EP0225176A2 (de) * | 1985-11-29 | 1987-06-10 | Atsushi Ogura | Verbundwerkstoff und Verfahren zu seiner Herstellung |
DE10003982A1 (de) * | 1999-01-29 | 2000-08-03 | Nisshin Flour Milling Co | Oxidbeschichtete feine Metallteilchen und Verfahren zu deren Herstellung |
WO2000060369A1 (en) * | 1999-04-05 | 2000-10-12 | Spinix Corporation | Passive solid-state magnetic field sensors and applications therefor |
Non-Patent Citations (1)
Title |
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HARSHE G ET AL: "Magnetoelectric effect in composite materials" SMART STRUCTURES AND MATERIALS 1993: MATHEMATICS IN SMART STRUCTURES; ALBUQUERQUE, NM, USA, FEB 1-3 1993, Bd. 1919, 1993, Seiten 224-235, XP009006568 Proceedings of SPIE ISSN: 0277-786X * |
Also Published As
Publication number | Publication date |
---|---|
JP2004526329A (ja) | 2004-08-26 |
US20040130238A1 (en) | 2004-07-08 |
EP1386360A2 (de) | 2004-02-04 |
DE10120865A1 (de) | 2002-11-21 |
WO2002089228A3 (de) | 2003-05-08 |
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