WO2002075877A2 - Verrou de longueurs d'onde integre pour plus d'une longueur d'onde et procede associe - Google Patents

Verrou de longueurs d'onde integre pour plus d'une longueur d'onde et procede associe Download PDF

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Publication number
WO2002075877A2
WO2002075877A2 PCT/US2001/021272 US0121272W WO02075877A2 WO 2002075877 A2 WO2002075877 A2 WO 2002075877A2 US 0121272 W US0121272 W US 0121272W WO 02075877 A2 WO02075877 A2 WO 02075877A2
Authority
WO
WIPO (PCT)
Prior art keywords
wavelength
etalon
photodetector
locker
detector
Prior art date
Application number
PCT/US2001/021272
Other languages
English (en)
Other versions
WO2002075877A3 (fr
Inventor
Alan D. Kathman
John Barnett Hammond
Robert Tekolste
Alvaro A. Cruz-Cabrera
Original Assignee
Digital Optics Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Digital Optics Corporation filed Critical Digital Optics Corporation
Priority to AU2001273188A priority Critical patent/AU2001273188A1/en
Publication of WO2002075877A2 publication Critical patent/WO2002075877A2/fr
Priority to US10/661,771 priority patent/US7092416B2/en
Publication of WO2002075877A3 publication Critical patent/WO2002075877A3/fr
Priority to US11/492,017 priority patent/US7466729B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/42—Coupling light guides with opto-electronic elements
    • G02B6/4201—Packages, e.g. shape, construction, internal or external details
    • G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
    • G02B6/4215—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical elements being wavelength selective optical elements, e.g. variable wavelength optical modules or wavelength lockers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00—Semiconductor lasers
    • H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
    • H01S5/068—Stabilisation of laser output parameters
    • H01S5/0683—Stabilisation of laser output parameters by monitoring the optical output parameters
    • H01S5/0687—Stabilising the frequency of the laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
    • H01S3/1303—Stabilisation of laser output parameters, e.g. frequency or amplitude by using a passive reference, e.g. absorption cell

Definitions

  • the present invention is directed to a tunable wavelength monitor/locker using an etalon for use with more than one wavelength, more particularly to an integrated wavelength locker which can be placed in an optical path of an application beam or in an optical path of a monitor beam.
  • the degree of the change and the percentage of the light being radiated at the different wavelengths any or all factors which may be causing this change can be modified in accordance with the monitored signal via a feedback loop to stabilize the wavelength of the radiation source.
  • both the power and the wavelength are monitored.
  • the wavelength may be controlled by altering a temperature of the light source, e.g., by a thermally cooled unit, and the power may be controlled in accordance with the injection current. Since the power and the wavelength are interdependent, i.e., a change in one parameter affects the other, the best stability is achieved when both are controlled.
  • Such monitoring and stabilizing systems typically involve using a unit which is external to the radiation source itself.
  • Such external units include crystal gratings, fiber gratings, spectrometers, and Fabry-Perot etalons, both straight and inclined.
  • the grating systems include relatively large control units external to the radiation source. While etalon-based systems offer a more compact solution, so far these etalons are still separate units which may become improperly aligned, either with photodetectors or with optical elements required to direct and control the light onto the photodetectors.
  • the present invention is therefore directed to a wavelength monitor/locker for use with more than one wavelength which substantially overcomes one or more of the problems due to the limitations and disadvantages of the related art.
  • a wavelength locker including a first photodetector which receives a first portion of a beam from a light source, a second photodetector which receives a second portion of the beam, a substrate including an etalon in a path upstream of the first photodetector, the substrate including another element which performs an optical function, the etalon having at least two sections presenting different free spectral ranges.
  • the at least two sections being traversed by the first portion of the beam and a connector which supplies outputs of the first photodetector and the second photodetector to a wavelength controller of the light source.
  • the wavelength locker of may include a divider which forms the first and second portions of the input beam.
  • the divider may include a diffractive grating which deflects a portion of the input beam into higher orders.
  • the diffractive grating may be polarization insensitive.
  • the wavelength locker may include an optics block which directs the first and second beams to the first photodiode and the second photodiode, respectively.
  • the divider may be integrated on the optics block.
  • the optics block may provide at least one of collimating and focusing to at least one of the input beam, the first beam and the second beam.
  • the at least two of the etalon, the divider and the optics block may be bonded together on a wafer level and diced to form that portion of the wavelength locker.
  • the wavelength locker may include a mount substrate on which the first photodetector and the second photodetector are mounted.
  • the mount substrate may have a hole therein between the first photodetector and the second photodetector.
  • the mount substrate has a transparent region therein between the first photodetector and the second photodetector.
  • the wavelength locker may include a spacer between the mount substrate and the etalon.
  • the mount substrate may have a recess therein in which the first photodetector and the second photodetector are mounted.
  • the another element which performs an optical function is at least one of a refractive element and a diffractive element.
  • the optics block may reflect the first and second portions of the input beam to the first photodetector and the second photodetector, respectively.
  • the optics block provides multiple reflections to the first and second portions of the input beam to direct them to the first photodetector and the second photodetector, respectively.
  • the etalon may be solid.
  • the etalon may have a gap between opposing reflective portions thereof.
  • a third portion of the beam may be output as an application beam to be directed to further applications.
  • the another element which performs an optical function may be another etalon upstream of the second photodetector, the another etalon having a different path length than the etalon upstream of the first photodetector.
  • the another element which performs an optical function may be a divider forming said first and second portions of the beam.
  • the another element which performs an optical function may operate on the third portion of the beam.
  • the another element performs at least one of collimating and focusing of the third portion of the beam.
  • All optical elements for providing the first and second beams to the first and second photodetectors may be on a single wafer or a wafer bonded thereto.
  • the above and other object may be realized by providing a wavelength monitor including a first detector, a second detector, a third detector, a first filter in an optical path upstream of the first detector, a second filter in an optical path upstream of the second detector, a third filter in an optical path upstream of the third detector, the first, second, and third filters having different filter properties from one another, and an optical element which directs at least a portion of the beam onto each of said first, second, and third detectors through said first, second and third filters, respectively.
  • a processor receives outputs from the first, second and third detectors, and determines the wavelength of the beam.
  • At least one of the first, second, and third filters may be an etalon or each may be an etalon presenting a different free spectral range for each of the first, second and third detectors.
  • the different spectral ranges may be provided using etalons of different apparent thicknesses.
  • the different apparent thicknesses may be provided using different physical thickness.
  • the different apparent thicknesses may be provided using different relative angles between the etalon and portions of the beam.
  • the first, second and third detectors may be part of a single detector array. There may be no reference detector.
  • At least one of the first, second and third filters output a periodic signal with respect to wavelength or each of the first, second and third filters output a periodic signal with respect to wavelength.
  • the periodic signal may approximate a sinusoid.
  • At least one of the first, second, and third signals may be created using an etalon or each of the first, second, and third signals may be created using an etalon. At least one of the first, second, and third signals approximate a sinusoid. For each wavelength within the continuous operational range, at least one of the signals has a non-zero slope.
  • Figure 1 is a cross-sectional view of an embodiment of the integrated wavelength locker of the present invention
  • Figure 2A is a cross-sectional view of an embodiment of an etalon-detector configuration of the present invention for use with more than one wavelength
  • Figure 2B is a cross-sectional view of an embodiment of an etalon-detector configuration of the present invention for use with more than one wavelength
  • Figure 2C is a cross-sectional view of an embodiment of etalon-detector configuration of the present invention for use with more than one wavelength;
  • Figure 2D is a cross-sectional view of an embodiment of an etalon-detector configuration of the present invention for use with more than one wavelength;
  • Figure 3A is a cross-sectional view of an embodiment of an etalon-detector configuration of the present invention for use with a plurality of wavelengths;
  • Figure 3B is a plot of the output from the configuration of Figure 3A for a particular wavelength
  • Figure 4A is a cross-sectional view of an embodiment of an etalon-detector configuration of the present invention for a continuous wavelength range
  • Figure 4B is a plot of the output of the respective detectors for the different steps of the etalon of Figure 4A;
  • Figure 5 A is a cross-sectional view of another embodiment of an etalon-detector configuration of the present invention for a continuous wavelength range;
  • Figure 5B is a plot of the output of the respective detectors for the different detectors of Figure 5 A;
  • Figure 6A is a cross-sectional view of the continuous wavelength embodiment incorporated into a back facet wavelength locker.
  • Figure 6B is a cross-sectional view of the continuous wavelength embodiment inco ⁇ orated into a front facet wavelength locker.
  • FIG. 1 illustrates a general embodiment of the integrated wavelength locker of the present invention.
  • the integrated wavelength locker includes a substrate 12 for mounting photodetectors 14, 15.
  • the substrate 12 also includes an aperture 10 therein between the photodetectors.
  • An etalon 18 includes opposing reflective portions 28, e.g., a reflective dielectric stack, on opposite surfaces thereof to form an etalon in the path of a first photodetector 14.
  • the path of a second photodetector 15 does not include an etalon.
  • An optics block 20 has a diffractive grating 22 on a bottom surface thereof and two reflective portions 24 on a top surface thereof.
  • the optics block 20 may also include an optical element on the top and/or bottom surface thereof in the path of the straight through beam, e.g., for focusing and/or collimating the beam.
  • Metallization pads may be provided to supply electrical connection for the active elements and for the outputs of the photodetectors 14, 15 to be provided to a control system for controlling the light source being monitored.
  • a spacer 16 is provided between the substrate 12 of the photodetectors 14, 15 and the optics block 20.
  • light from a light source passes through the aperture 10 in the substrate 12 on which the photodetectors 14, 15 are mounted.
  • a small amount of the light is deflected by the diffraction grating 22, with most of the light being in the zero order, so it passes straight through the diffraction grating 22.
  • the diffracted light then impinges upon the reflective portions 24 on the top surface of the optics block 20.
  • the reflective portions 24 direct the light back toward optical elements 26, which deflect the light and direct it to the photodetectors 14, 15.
  • the opposing reflective portions 28 of the etalon block 18 are designed such that a predetermined transmission therethrough occurs at the desired output wavelength of the light source.
  • the reflective portions 28 are parallel to one another and the etalon has a thickness d and an index of refraction n.
  • the thickness of the etalon may be determined to provide any desired value of the phase delay. This phase delay in turn will determine the amount of transmittance at the desired wavelength.
  • the transmittance is the ratio of the reflected irradiance I r to the incident irradiance I pleasing which is given by: 1 /, ⁇ 1 + [4R I (1 - R)f sin 2 ( ⁇ 12) (2)
  • the amount of light received by the first photodetector 14 is compared to the amount of light received on the second photodetector 15 in order to insure any change in the amount of light on the first photodetector 14 is due to a shift in wavelength, rather than some power fluctuation in the light source output.
  • the outputs of the first photodetector 14 and the second photodetector 15 are fed to a processor or control system 30 to determine any shift in wavelength and to control the wavelength output by the light source in accordance with this shift.
  • Such a control system 30 may include altering the temperature of the light source, e.g., by controlling a thermoelectric cooler on which the light source is mounted, altering an injection current, and/or altering a length of an external cavity, such as a microelectronic mechanical device, as known in the art.
  • the control system 30 may alter the parameters of the light source by a predetermined amount or by an amount in accordance with the degree of shift indicated by the photodetectors 14, 15.
  • the predetermined transmission of the etalon formed by the reflective portions 28 is given by may be at any desired position on the response curve of the etalon.
  • the etalon formed by the reflective portions 28 may be designed to provide a maximum transmission, e.g., 100%, at the desired wavelength. While providing the maximum transmission at the desired wavelength allows the difference in transmission arising from any shift in wavelength to be readily detected, the direction of this wavelength shift will not be known, since an identical shift in either direction will result in the same change in transmission. Therefore, the shift is assumed to be in a particular direction. If the resulting change leads to a further decrease in transmission, the shift was actually in the opposite direction and the control of the light source will be adapted accordingly. Of course, the analogous logic would apply if the etalon formed by the reflective portions 28 was designed to provide a minimum transmission at the desired wavelength.
  • the etalon formed by the reflective portions 28 may be designed to provide transmission at an inflection point, e.g., the average transmission, of the response curve.
  • an inflection point e.g., the average transmission
  • the direction of the transmission change will indicate the direction of the wavelength shift and the sensitivity to the wavelength shift is increased as compared with providing the transmission of the desired wavelength at a maximum or minimum.
  • the etalon formed by the reflective portions 28 may be designed to provide any transmission to the desired wavelength, care must be taken to insure that this point is sufficiently removed from any flat portions of the response curve of the etalon such that the maximum desired deviation from the desired wavelength remains discernable. How rapidly the irradiance drops off on either side of the maximum is determined by the reflection coefficient of the reflective portions 28, with the drop off increasing with increasing reflectivity.
  • the wavelength locker of the present invention may also be used when the beam is not to be further employed, e.g., from the back facet of an edge emitting light source. In this scenario, the light is just directed through the etalon to the detectors, without having to worry about the beam proceeding onto the application.
  • the inverted "W" wavelength locker shown in Figure 1 by using reflective portions 24 to fold the beams, allows the separation of sampled beams, etalon and reference to be large enough to realize packaging of the detectors 14, 15 in the system without having to manufacture diffractives with extremely small features size and more than two phase levels.
  • FIG 2A illustrates one embodiment of an etalon 40 of the present invention which may be used for more than one wavelength, due to steps 42, 44 of the etalon 40.
  • the etalon 40 may be created by etching a wafer to a desired depth for each of the steps 42, 44, and then depositing a metal thereon to make both surfaces highly reflective.
  • the etalon 40 is bonded to a block 50 containing a collimating element 51.
  • Detectors 62, 64 may be bonded to the etalon 40, before or after bonding the etalon 40 to the block 50.
  • the etalon 40 may be bonded to a wafer containing a plurality of optics blocks 20, e.g., by pick and place techniques. If the block 50 is to be separate from the optics block 20, a plurality of etalons 40 may be provided on a wafer level, bonded to a wafer of blocks50 and then diced, with the detectors 62, 64 being bonded before or after the bonding of the block 50 and the wafer containing the plurality of etalons 40.
  • the block 50 and the etalon 40 are preferably made of the same material, e.g., silicon or fused silica, to facilitate bonding.
  • the stepped etalon 40 is thus replaces the etalon 18 in Figure 1 to form the wavelength locker.
  • the collimating element 51 may be either refractive and/or diffractive and may include three regions. A first region 52 collimates light incident thereon and directs it towards step 42 and detector 62. Similarly, a second region 54 collimates light incident thereon and directs it towards step 44 and detector 64. A third region 56 is a highly transmissive scattering region preventing light from feeding back into the light source. The remainder of the input surface of block 50 may be a light blocking region.
  • the detectors 62, 64 are on a substrate 60, allowing them to be bonded on a wafer level with the etalon 40, before or after bonding of the etalon 40 and the block 50.
  • the substrate 60 include a valley 65 for allowing easier provision of wire bonds 66 for connecting the detectors 62, 64 to a power source and/or to the control system 30.
  • a focusing block 70 with focusing elements 72, 74 thereon may be provided, e.g., between the etalon 40 and the detectors 62, 64, as shown in Figure 2D.
  • This focusing block 70 may also be integrated on the wafer level, thus not seriously affecting the cost or difficulty of assembly.
  • the stepped configuration noted above is particularly useful for tuning a light source when the steps are created to present an integral number of a desired wavelength to the light beam.
  • the light source will be tuned to the desired wavelength when the power incident on both detectors 62, 64 is equal.
  • an etalon 80 having a plurality of steps 81-87, each corresponding to a specific wavelength may be used, as shown in Figure 3 A.
  • a linear detector array 90, having a corresponding plurality of detector regions 91-97 is mounted with the etalon 80, here opposite the steps 81-87.
  • the spacing of the steps 81-87 is preferably equal to the pitch of the linear detector array 90.
  • the maximum signal detected by the linear detector array 90 is the detector element for the step corresponding to the wavelength of the input beam.
  • the output of the corresponding detector element 93 will be larger than for the remaining detector elements, as shown in Figure 3B.
  • the light source may be tuned by sweeping its temperature and current to maximize the output on a particular detector element that corresponds to a desired wavelength.
  • an etalon 100 as shown in Figure 4 A may be used. This configuration eliminates the requirement for a separate reference monitor. By using a phase shift in the reference leg, from interferometry techniques, a system of three equations and three unknowns can be generated. This is because the etalon transmission intensity is similar to the interferometer fringe intensity. The reference beam intensity can then be solved for, rather than monitored independently.
  • F is the coefficient of finesse for the etalon
  • R is the reflectance of the surfaces of the etalon
  • n is the index of refraction within the etalon
  • d is the thickness of the etalon
  • ⁇ is the etalon step height
  • ⁇ is the angle of the light within the etalon
  • ⁇ is the wavelength of light.
  • both the function and its first derivative and smooth and continuously varying i.e., a small shift in wavelength will produce a change in intensity for most wavelength values.
  • This can be rectified by introducing two other etalon steps (or other changes in finesse) which are shifted relative to one another so that at least one curve will have a sufficiently steep slope when slopes of other curves approaches zero.
  • one of the three beams serves as the reference.
  • the system can be expanded to more than three etalon-detector pairs to reduce sensitivity to errors in the etalon step height and system noise. Further, since the relative shift is used to determine the wavelengths, which are characterized a priori, the requirements on the accuracy of the etalon steps is reduced, allowing the stepped etalon to be manufactured more cheaply.
  • the above interferometric approach may be used whenever there are at least three signals having a periodic nature with respect to wavelength.
  • periodic does not mean strict repeatability, only that the signal is sufficiently repeatable to allow interferometric equations to be used.
  • the periodic signals should be spaced relative to one another such that their flatter portions do not all overlap, i.e., a set consisting of a value for each of the detectors will uniquely identify the wavelength in a given range.
  • at any coordinate at least one signal has a steep enough slope to allow a change in wavelength to be detected.
  • the properties of the diffractive elements and the transmittance properties of materials used in the system will determine the operational wavelength range.
  • the continuous nature of the wavelength determination results in a configuration for which the element do not have to be altered if there is a change in spacing between the wavelengths being used. Further, the above configuration does not rely on a reference beam to accurately determine the wavelength, also rendering the configuration easily adaptable to changing requirements. However, the longer the period, the worse the accuracy, since the more likely two signals are to be substantially flat over the same wavelength region. This may be compensated for by including more steps, or other finesse variations. The spacing between the steps may be the same or may have the same periodicity as channel spacing for a system in which the wavelength locker is to be used.
  • FIG. 5 A An alternative continuous etalon-detector configuration is shown in Figure 5 A, in which a tilted etalon 150 rather than a stepped etalon is used.
  • the etalon 150 is designed to be used at a tilt. If the sampled beam is diverging, when combined with the tilted etalon 150, the beam will be incident on a plurality of detectors A-D out of phase with one another, producing an output as shown in Figure 5B, which looks like the output in Figure 4B, except with four detectors shown in this particular example. As the number of detectors increases within the 360 degree spacing, the resolution of the system increases.
  • One way of positioning the detectors is to use a one-dimensional array of detectors with small pitch and select the detectors that provide the appropriate spacing in the phase regime.
  • the signal may be processed form detectors having unequal phase spacing as long as the differences between phase steps are known.
  • the exact parameters of the etalon are not critical as long as they are characterized before use to determine the response thereof. As long as the free spectral ranges for at least three detectors are different, the beam can be used to provide continuous locking across a range. Once the etalon has been characterized, the crossing points of the detector outputs will identify the wavelength.
  • use with a back facet wavelength locker is very simple, since the beam from the back facet of a light source 162 is already diverging and all of the light passes through the etalon, i.e., there is no separate reference beam.
  • FIG. 6A Such a configuration is shown in Figure 6A, in which the only optics having power which may be required for the wavelength locker is a partially collimating element 160.
  • the element 160 reduces the divergence from the light source 162 if needed, but retains enough divergence to enhance the effect of the tilt of the etalon when the etalon 150 is as shown in Figure 5 A and/or to insure coverage of the etalon in any of the continuous wavelength configurations.
  • the application beam from the front facet of the light source 162 may be fully collimated by an optical element 164.
  • Use of the continuous wavelength configurations with a front wavelength locker is shown in Figure 6B.
  • a portion of the application beam must be split off without affecting the application and with minimum power loss.
  • the configuration also includes a collimating element 164 which collimates the light output from the light source 170, a splitter 172, a reflection portion 174, a continuous wavelength etalon 176 having at least three different finesses, and corresponding detectors 178.
  • the splitter 172 in Figure 6B only needs to provide one beam.
  • Either the splitter 172 or the reflective portion 174 must have some power therein to render the beam divergent when incident on the etalon 176.
  • at least one reflective portion 174 is provided to direct the beam onto the etalon-detector configuration.
  • the integrated wavelength locker is preferably formed on a wafer level, as set forth, for example, in commonly assigned, co-pending application Serial No. 08/943,274, allowed, entitled "Wafer Level Integration of Multiple Optical Elements" which is hereby incorporated by reference in its entirety for all purposes.
  • a plurality of all the elements of the wavelength locker are bonded together at the wafer level and then diced to create the individual wavelength lockers.
  • the material for the reflective portions is also preferably selectively deposited on a wafer level. Apertures for either the holes or spacers may also be formed on the wafer level.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Electromagnetism (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Semiconductor Lasers (AREA)

Abstract

L'invention porte sur un verrou de longueurs d'onde pouvant agir sur plusieurs longueurs d'onde comportant des filtres de différentes caractéristiques par détecteur correspondant. Les filtres peuvent être des étalons de différentes plages spectrales libres, par exemple présentant différentes épaisseurs apparentes ou réelles. Si plus de trois de ces filtres émettent des signaux périodiques de décalage, on peut éliminer un détecteur de référence et effectuer une opération continue sur une plage de longueurs d'onde.
PCT/US2001/021272 2000-04-05 2001-07-06 Verrou de longueurs d'onde integre pour plus d'une longueur d'onde et procede associe WO2002075877A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AU2001273188A AU2001273188A1 (en) 2001-03-15 2001-07-06 Integrated wavelength locker for use with more than one wavelength and associated methods
US10/661,771 US7092416B2 (en) 2000-04-05 2003-09-15 Integrated wavelength locker for use with more than one wavelength and associated methods
US11/492,017 US7466729B2 (en) 2000-04-05 2006-07-25 Wavelength monitor for use with more than one wavelength

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US27569601P 2001-03-15 2001-03-15
US60/275,696 2001-03-15

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US09/543,760 Continuation-In-Part US6661818B1 (en) 2000-04-05 2000-04-05 Etalon, a wavelength monitor/locker using the etalon and associated methods

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/661,771 Continuation US7092416B2 (en) 2000-04-05 2003-09-15 Integrated wavelength locker for use with more than one wavelength and associated methods

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Publication Number Publication Date
WO2002075877A2 true WO2002075877A2 (fr) 2002-09-26
WO2002075877A3 WO2002075877A3 (fr) 2003-10-16

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CN111684244A (zh) * 2018-03-12 2020-09-18 欧姆龙株式会社 波长检测装置及共焦点测量装置
WO2022002730A1 (fr) * 2020-06-30 2022-01-06 Ams International Ag Procédé de fabrication de capteurs spectraux

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WO1998043327A2 (fr) * 1997-03-26 1998-10-01 Siemens Aktiengesellschaft Procede de stabilisation de la longueur d'onde d'un laser et ensemble permettant de mettre en oeuvre ce procede
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US5798859A (en) * 1995-07-27 1998-08-25 Jds Fitel Inc. Method and device for wavelength locking
WO1998043327A2 (fr) * 1997-03-26 1998-10-01 Siemens Aktiengesellschaft Procede de stabilisation de la longueur d'onde d'un laser et ensemble permettant de mettre en oeuvre ce procede
EP1052526A2 (fr) * 1999-05-14 2000-11-15 Lucent Technologies Inc. Etalon controllé pour longueurs d'ondes multiples

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111684244A (zh) * 2018-03-12 2020-09-18 欧姆龙株式会社 波长检测装置及共焦点测量装置
EP3767258A4 (fr) * 2018-03-12 2021-12-01 Omron Corporation Dispositif de détection de longueur d'onde et dispositif de mesure confocal
US11262238B2 (en) 2018-03-12 2022-03-01 Omron Corporation Wavelength detection device and confocal measurement device
WO2022002730A1 (fr) * 2020-06-30 2022-01-06 Ams International Ag Procédé de fabrication de capteurs spectraux

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