WO2002023206A1

WO2002023206A1 - Inspection device and inspection method

Info

Publication number: WO2002023206A1
Application number: PCT/JP2001/007823
Authority: WO
Inventors: Koji Okano; Shogo Ishioka
Original assignee: Oht Inc.
Priority date: 2000-09-11
Filing date: 2001-09-10
Publication date: 2002-03-21
Also published as: KR20020058005A; CN1388899A; CN1175275C; TWI291553B; JP2002090407A

Abstract

A circuit wiring branching in the middle thereof is inspected by using fewer non-contact sensors. A method of inspecting a branched circuit wiring having at least three ends, comprising the supply step of supplying an inspection signal to one end of the branched circuit wiring, the disposing step of disposing non-contact sensors that detect the inspection signal without contacting the branched circuit wiring at the other ends of the wiring, and the judging step of judging whether or not the wiring is disconnected based on the inspection signal detected by the non-contact sensors, characterized in that the disposing step allocates the other two ends to at least one non-contact sensor, and the judging step compares a specified threshold with the strength of the inspection signal detected by the non-contact sensors to which the other two ends are allocated to judge whether the wiring is disconnected or not.

Description

Description Inspection device and inspection method

The present invention relates to a circuit wiring inspection technique. Background art

When inspecting for breaks in circuit wiring (conductive patterns) on a circuit board, a method is used in which an inspection signal is supplied to the circuit wiring, detected at the end of the circuit wiring, and analyzed. Here, as a method of detecting the inspection signal at the end of the circuit wiring, a contact type using a probe that contacts the circuit wiring and a non-contact type using a non-contact sensor for the circuit wiring have been proposed. ing.

In non-contact type inspection, a time-varying inspection signal is supplied to the circuit wiring to detect a signal appearing at the sensor via the capacitance interposed between the circuit wiring and the non-contact sensor. A non-contact sensor has been proposed as a non-contact sensor, for example, an electrode made of a conductive metal plate or the like, or a semiconductor element or the like. Such a non-contact type inspection has an advantage that it is hardly damaged because it is not in contact with the circuit wiring, and that it can cope with a fine pitch circuit wiring.

An example of such a non-contact type inspection is described in, for example, Japanese Patent Application Laid-Open No. 10-239371. In this publication, one of the problems is that if a non-contact sensor is used when inspecting a circuit wiring branched on the way, it will not be possible to accurately determine the presence or absence of a disconnection. An invention is described in which a non-contact sensor is individually arranged at each end of a branched circuit wiring to determine whether there is a disconnection.

However, according to the invention disclosed in Japanese Patent Application Laid-Open No. H10-2393971, since the non-contact sensors are individually arranged at the ends of the branched circuit wirings, the number of the non-contact sensors is required by the number of branches. However, the number of non-contact sensors tends to increase. For this reason, the cost of inspection equipment tends to increase.

Accordingly, a main object of the present invention is to provide an inspection apparatus and an inspection method capable of inspecting a circuit wiring branched in the middle or a circuit wiring mixed with the same using a smaller number of non-contact sensors. Disclosure of the invention

According to the present invention, there is provided an inspection device for inspecting a branch circuit wiring having three or more ends,

A supply unit that supplies an inspection signal to one end of the branch circuit wiring; a non-contact sensor that detects the inspection signal in a non-contact manner with the branch circuit wiring at another end of the branch circuit wiring;

Determining means for determining whether or not a disconnection has occurred in the branch circuit wiring based on the inspection signal detected by the non-contact sensor,

Assigning the two other ends to at least one of the non-contact sensors;

For the test signal detected by the non-contact sensor to which the two other ends are assigned, the determination means compares the strength of the test signal with a predetermined threshold value, and There is provided an inspection apparatus characterized in that it is determined whether or not the wiring is disconnected.

Further, according to the present invention, it is possible to inspect a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed. An inspection device,

Supply means for supplying a test signal to one end of the branch circuit wiring and one end of the single circuit wiring;

A non-contact sensor for detecting the inspection signal in a non-contact manner at the other end of the branch circuit wiring or at the other end of the single circuit wiring;

Determining means for determining whether or not a break has occurred in the branch circuit wiring or the single circuit wiring based on the inspection signal detected by the non-contact sensor,

For at least one of the non-contact sensors, the other end of one branch circuit wiring and the other end of one or more single circuit wirings

An inspection device is provided, characterized in that:

Further, according to the present invention, there is provided an inspection apparatus for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed.

Assigning, to at least one of the non-contact sensors, the other end of two branch circuit wirings and the other end of one or more single circuit wirings; For the test signal detected by the non-contact sensor to which the two other ends are assigned, the determination means compares the strength of the test signal with a predetermined threshold value, and An inspection apparatus is characterized in that it is determined whether or not a disconnection has occurred.

A probe for detecting the inspection signal by contacting the branch circuit wiring at another end of the branch circuit wiring;

Determining means for determining whether or not a disconnection has occurred in the branch circuit wiring or the single circuit wiring based on the inspection signal detected by the non-contact sensor or the probe,

Assigning, to at least one of the non-contact sensors, the other end of one of the branch circuit wirings and the other end of one or more of the single circuit wirings;

An inspection apparatus is provided, wherein the probe is assigned to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not assigned.

Further, according to the present invention, there is provided an inspection apparatus for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed. Supply means for supplying a test signal to one end of the branch circuit wiring and one end of the single circuit wiring;

Assigning, to at least one of the non-contact sensors, the other end of two branch circuit wirings and the other end of one or more single circuit wirings;

Allocating the probe to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not allocated,

For the test signal detected by the non-contact sensor to which the two other ends are assigned, the determination means compares the strength of the test signal with a predetermined threshold value, and An inspection apparatus is characterized in that it is determined whether or not a disconnection has occurred.

Further, according to the present invention, there is provided an inspection method for inspecting a branch circuit wiring having three or more ends,

A supply step of supplying a test signal to one end of the branch circuit wiring; and a non-contact sensor for detecting the test signal in a non-contact manner on the branch circuit wiring at another end of the branch circuit wiring. Placement process to

A determination step of determining whether a disconnection has occurred in the branch circuit wiring based on the inspection signal detected by the non-contact sensor, In the disposing step, two of the other ends are assigned to at least one of the non-contact sensors;

In the determining step, for the inspection signal detected by the non-contact sensor to which the two other ends are assigned, the intensity of the inspection signal is compared with a predetermined threshold value. An inspection method characterized by determining whether or not a disconnection has occurred is provided.

Further, according to the present invention, there is provided an inspection method for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed.

Supplying an inspection signal to one end of the branch circuit wiring and one end of the single circuit wiring;

An arranging step of arranging a non-contact sensor at the other end of the branch circuit wiring or the other end of the single circuit wiring so as to detect the test signal on the branch circuit wiring or the single circuit wiring in a non-contact manner; When,

A determination step of determining whether or not a disconnection has occurred in the branch circuit wiring or the single circuit wiring based on the inspection signal detected by the non-contact sensor,

In the arranging step, assigning the other end of one branch circuit wiring and the other end of one or more single circuit wirings to at least one of the non-contact sensors. An inspection method characterized by the following is provided.

Supplying an inspection signal to one end of the branch circuit wiring and one end of the single circuit wiring; An arranging step of arranging a non-contact sensor at the other end of the branch circuit wiring or the other end of the single circuit wiring so as to detect the test signal on the branch circuit wiring or the single circuit wiring in a non-contact manner; When,

In the tooth position step, for at least one of the non-contact sensors, the other ends of the two branch circuit wirings and the other ends of one or a plurality of the single circuit wirings are provided. Assignment,

A first non-contact sensor for detecting the inspection signal in a non-contact manner on the branch circuit wiring or the single circuit wiring at another end of the branch circuit wiring or the other end of the single circuit wiring. Arrangement process,

A second arranging step of arranging a probe for contacting and detecting the inspection signal with the branch circuit wiring at another end of the branch circuit wiring; and the inspection detected by the non-contact sensor or the probe. A determination step of determining whether a disconnection has occurred in the branch circuit wiring or the single circuit wiring based on a signal, In the first arranging step, for at least one of the non-contact sensors, the other end of one branch circuit wiring and the other end of one or more single circuit wirings are provided. allocation,

In the second disposing step, the probe may be assigned to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not assigned. Provided.

A second arranging step of arranging a probe for contacting and detecting the inspection signal with the branch circuit wiring at another end of the branch circuit wiring; and the inspection detected by the non-contact sensor or the probe. A determination step of determining whether a disconnection has occurred in the branch circuit wiring or the single circuit wiring based on a signal,

In the first arranging step, for at least one of the non-contact sensors, the other ends of the two branch circuit wirings, and the other ends of one or a plurality of the single circuit wirings, And assign

In the second arranging step, the probe is assigned to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not assigned,

In the determining step, the non-contact is assigned two other ends. The inspection method is characterized in that the inspection signal detected by the sensor is compared with the intensity of the inspection signal and a predetermined threshold value to determine whether or not the branch circuit wiring is disconnected. Provided. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 (a) is a diagram showing an inspection device using a non-contact sensor. (b) is a figure which shows the equivalent circuit of (a).

FIG. 2 (a) is a diagram showing an inspection apparatus using a non-contact sensor for inspecting branch circuit wiring. (B) is a diagram showing an equivalent circuit of (a). (C) is a diagram showing the equivalent circuit of (a) when the wire is broken at point 110d.

FIG. 3 is a schematic diagram of an inspection device according to one embodiment of the present invention.

FIG. 4 is a schematic diagram of an inspection device according to another embodiment of the present invention. FIG. 5 is a schematic diagram of an inspection device according to another embodiment of the present invention. BEST MODE FOR CARRYING OUT THE INVENTION

Hereinafter, a preferred embodiment of the present invention will be described.

The principle of non-contact inspection>

FIG. 1 (a) is a diagram showing an inspection device using a non-contact sensor.

The inspection device shown in Fig. 1 (a) is a device that inspects the disconnection of the circuit wiring 100, and includes a non-contact sensor 101, a signal source 102, a non-contact sensor 101, and a resistor. 103. The non-contact sensor 101 is an electrode such as a conductive metal plate, but a sensor using a semiconductor element or the like has been proposed. The non-contact sensor 101 is arranged in a non-contact manner at the end of the circuit wiring 100 to be inspected.

The signal source 102 generates an AC signal as a test signal. This is supplied to the end of the circuit wiring 100 which is an elephant. The test signal may be a signal that changes over time (for example, a voltage change frequency of about 1 kHz to 10 MHz). Instead of an AC signal, a pulse-like signal is used. Can be adopted.

Here, the non-contact sensor 101 and the end of the circuit wiring 100 are in a state of being electrically capacitively coupled, and constitute a capacitor. Therefore, the equivalent circuit of Fig. 1 (a) is as shown in Fig. 1 (b). If there is no break in the circuit wiring 100, the circuit will respond to the test signal supplied from the signal source 102 to the circuit wiring 100. The detected signal appears on the non-contact sensor 101, and the inspection signal can be detected. If the circuit wiring 100 is disconnected, almost no signal appears on the non-contact sensor 101, and it is possible to determine whether the circuit wiring 100 is disconnected.

In this case, the output signal Voxit of the equivalent circuit of FIG. 1 (b) can be approximated as follows.

Vout = VinRZ ((1 / ωC) + R)

Where, Vin: inspection signal (angular frequency ω), C: capacitance between circuit wiring 100 and non-contact sensor 101

Of Non-contact Inspection for Branch Circuit Wiring>

In FIG. 1, the circuit wiring 100 to be inspected was an unbranched circuit wiring having two ends (referred to as a single circuit wiring in this document). Next, a non-contact inspection in which the circuit wiring to be inspected is a circuit wiring branched in the middle (referred to as a branch circuit wiring in this document) will be described. In addition, in the case of the branch circuit wiring, it will have three or more ends.FIG. 2 (a) is a diagram showing an inspection device using a non-contact sensor for testing the branch circuit wiring 110, Each configuration is the same as in Fig. 1 (a). It is.

The branch circuit wiring 110 has three ends in which the wiring branches in the middle. The signal source 102 supplies a test signal to one end 110c of the branch circuit wiring 110, and the non-contact sensor 101 supplies the test signal to the branch circuit wiring 110. The other two ends 110a and 110b are arranged in a non-contact manner.

Here, the non-contact sensor 101 and the two ends 110a and 110b of the circuit wiring 110 are electrically capacitively coupled to each other, and are connected in parallel. It comprises two capacitors. Therefore, the equivalent circuit of Fig. 2 (a) becomes Fig. 2 (b).

On the other hand, if the branch circuit wiring 110 is disconnected at the point 110d, for example, the equivalent circuit of FIG. 2A is as shown in FIG. 2C. Therefore, also in this case, a signal corresponding to the inspection signal appears on the non-contact sensor 101 and the inspection signal is detected. Therefore, if the presence or absence of disconnection is determined based on whether or not the non-contact sensor 101 detects the inspection signal, it is determined that there is no disconnection even if the disconnection occurs at point 110d. Becomes

However, the combined capacitance between the non-contact sensor 101 and the circuit wiring 110 in the case of Fig. 2 (b) is the same as that of the non-contact sensor 101 and each end 110a and 110b. If the capacitance between the two is C, then it is 2 C. Therefore, the output signal Vout of the equivalent circuit of FIG. 2 (b) can be approximated as follows.

Vout = Vin Ε / ((1 / ω2 θ + R)

On the other hand, the case of Fig. 2 (c) is the same as the case of Fig. 1 (b). Therefore, comparing the case where the point 110d is not disconnected and the case where the point 110d is disconnected, the intensity (voltage in this case) of the output signal is smaller in the case of the disconnection. Therefore, if the output signal strength is normal and the If the value between the output signal strength and the output signal strength is determined as a threshold value and the threshold value is compared with the output signal at the time of inspection, it is possible to determine the presence / absence of disconnection. Even if one non-contact sensor is assigned instead of allocating a non-contact sensor, it is possible to determine whether there is a disconnection.

However, as the number of branch circuit wiring ends assigned to one non-contact sensor increases, the difference between the strength of the output signal in the normal case and the strength of the output signal in the case of a disconnection decreases. Tend to be. For example, if the number of the ends of the branch circuit wiring is N (the number of branches is N-1), one of the ends is the end to which the inspection signal is input, so The number of ends assigned to the tactile sensor is N-1. Therefore, the combined capacitance between the non-contact sensor and the branch circuit wiring is the combined capacitance when N-1 capacitors are connected in parallel.

In this case, the output signal Vout can be approximated as follows. V out two V inR / ((1 / ω (Ν-1) C) + R)

In this case, the output signal Vout when one of the branched wires is broken can be approximated as follows.

Vout = Vin · R / ((ΐΖω · (Ν— 2) C) + R)

Thus, as the number of ends of the branch circuit wiring assigned to one non-contact sensor increases, the difference between the strength of the output signal in the normal case and the strength of the output signal in the case of the disconnection increases. The smaller the is, the narrower the range of thresholds that can be determined. Then, considering the presence of noise or the like at the time of inspection, it is difficult to accurately determine whether there is a disconnection.

The inventor of the present application has found that if the ends of two branch circuit wirings are assigned to one non-contact sensor at the maximum, the accuracy of the disconnection inspection is not impaired. In this case, as the threshold, a value in the range of about 30% to 40% of the intensity of the output signal when the branch circuit wiring is normal may be used. It is suitable. By allocating the ends of two branch circuit wirings to one non-contact sensor, the number of non-contact sensors can be reduced by up to half compared to the case of individually allocating, and inspection costs can be reduced. <Example of inspection equipment>

The circuit board X is provided with a branch circuit wiring A having eight ends, which is an inspection target.

The inspection apparatus includes a signal source 1 for supplying an inspection signal to one end of the branch circuit wiring A, and four non-contact sensors 2 a to 4 for detecting the inspection signal at the other seven ends of the branch circuit wiring A. 2d, a signal processing unit 3 for performing signal processing and the like on the inspection signals detected by the non-contact sensors 2a to 2d, and a control unit for controlling the entire apparatus and branching based on data from the signal processing unit 3. And a computer 4 for determining whether or not the circuit wiring A is disconnected.

The signal source 1 is controlled by the computer 4 to generate a test signal, and supplies this to the branch circuit wiring A. The test signal is supplied from the signal source 1 via a pin having conductivity, for example, by contacting one end of the branch circuit wiring A with this pin.

Two ends of the branch circuit wiring A are respectively assigned to the non-contact sensors 2a to 2c, and one end is assigned to the non-contact sensor 2d. , The maximum two ends are allocated.

In addition, there are various ways of assigning the non-contact sensors. As shown in FIG. 3, it is most preferable to assign two ends as much as possible to each of the non-contact sensors 2a to 2d. The number of contact sensors can be reduced and, preferably, two ends are provided on at least one of the non-contact sensors 2a to 2d. And one end is assigned to each of the remaining sensors, or two ends of the non-contact sensors 2a to 2d are assigned to each other, and one end is assigned to each of the remaining sensors. Departments may be assigned.

The signal processing unit 3 includes, for example, an amplifier circuit that amplifies the inspection signal detected by the non-contact sensors 2a to 2d, an AD converter that performs analog-to-digital conversion, and the like. Information indicating the strength of the test signal detected by 2 a to 2 d is provided to the computer 4.

The computer 4 compares the information obtained from the signal processing unit 3 and indicating the strength of the inspection signal detected by each of the non-contact sensors 2a to 2d with a predetermined threshold value, and determines the branch circuit wiring. Processing such as determining whether or not A is disconnected is executed.

In the inspection by the inspection device having such a configuration, first, the non-contact sensors 2a to 2d are arranged as shown in FIG. Next, the computer 4 controls the signal source 1 to transmit an inspection signal, and the inspection signal is supplied to the branch circuit wiring A.

Then, each of the non-contact sensors 2a to 2d detects an inspection signal, and the signal processing unit 3 performs a predetermined process on the detected inspection signal. The signal processing unit 3 sends the intensity of the inspection signal detected by each of the non-contact sensors 2a to 2d to the computer 4, and the computer 4 transmits the intensity of the inspection signal detected by each of the non-contact sensors 2a to 2d. The strength is compared with a predetermined threshold value to determine whether or not the branch circuit wiring A is disconnected.

For example, if the strength of the test signal detected by the non-contact sensor 2a is below the threshold, one of the two branched wires above the branch circuit wire A in Fig. 3 is disconnected. Will be determined to be present. Since only one end of the branch circuit wiring A is assigned to the non-contact sensor 2d, The presence or absence of disconnection may be determined based only on whether or not the inspection signal has been detected, or may be determined by comparing with a threshold value as described above.

Next, FIG. 4 is a schematic diagram of an inspection apparatus according to another embodiment of the present invention. A circuit board Y has a branch circuit wiring D having seven ends and four single circuit wirings A to C. , And E are mixed, and this is the inspection target.

The inspection apparatus includes a signal source 11 for supplying an inspection signal to one end of the branch circuit wiring D and one end of each of the single circuit wirings A to C and E; Three non-contact sensors 12a to 12c and non-contact sensors 12a to 1c for detecting test signals at the six ends of the single circuit wiring and the other ends of the single circuit wirings A to C and E. 2 A signal processing unit 13 that performs signal processing and the like on the inspection signal detected by c, controls the entire apparatus, and based on data from the signal processing unit 13 a branch circuit wiring D and a single circuit wiring. And a computer 14 for determining whether or not the lines A to C and E are disconnected.

The signal source 11, the non-contact sensors 12 a to 12 c, the signal processing unit 13, and the computer 14 are respectively the signal source 1 and the non-contact sensors 2 a to 2 d of the inspection apparatus shown in FIG. , The signal processing unit 3, and the computer 4, and different points will be mainly described below.

The signal source 11 supplies a test signal to each end of the circuit wirings A to E in order, and the supply timing is controlled by the computer 14.

Each non-contact sensor 12a to 12c may be assigned a maximum of two ends of branch circuit wiring D and one or more ends of single circuit wirings A to C and E. it can. To explain the reason, mutually independent rounds If the inspection signal is supplied separately between the road wirings, the inspection signal can be detected independently from each end, so one non-contact sensor is sufficient.

Specifically, for example, in the case of the single circuit wirings A to C, the inspection signals are sequentially supplied to them at a predetermined timing, and the presence or absence of the inspection signal detected by the non-contact sensor 12a is synchronized with the timing. From the figure, it can be determined whether or not each of the single circuit wirings A to C is broken.

Then, as shown in Fig. 4, in addition to the single circuit wirings A to C, one of the branched wirings of the branch circuit wiring D can be inspected by one non-contact sensor 12a based on the same concept. It is. In addition, the same is applied to the two branched wirings of the branch circuit wiring D, and the determination as to whether or not there is a disconnection is made based on the detected inspection signal and the predetermined value, as described in the principle of the non-contact inspection for the branch circuit wiring described above. By comparing the threshold value with the threshold value, the presence or absence of disconnection can be determined.

In the case of FIG. 4, each end of the single circuit wirings A to C and two ends of the branch circuit wiring D are assigned to the non-contact sensor 12a. Further, the non-contact sensor 12 c is assigned an end of the single circuit wiring E and two ends of the branch circuit wiring D. The remaining two ends of the branch circuit wiring D are assigned with the non-contact sensor 12b.

In the inspection by the inspection device having such a configuration, first, the non-contact sensors 12a to 2c are arranged as shown in FIG. Next, the computer 14 controls the signal source 11 to transmit a test signal. In this case, for example, the inspection signal is sequentially supplied to each of the circuit wirings A to E such as a single circuit wiring A → B → C—a branch circuit wiring D → single circuit wiring E.

Then, each of the non-contact sensors 12a to 12c detects the inspection signal, and the signal The processing unit 13 performs predetermined processing on the detected inspection signal. The signal processing unit 13 sends the information of the inspection signal detected by each of the non-contact sensors 12a to 12d to the computer 14.

Here, the computer 14 determines the timing at which the signal source 11 supplies a test signal to each of the circuit wirings A to E, the timing at which each of the non-contact sensors 12 a to 12 c detects the test signal, Based on the above, it is determined whether there is a disconnection.

In this case, the presence / absence of disconnection of the single circuit wirings A to C and E can be determined based on whether the inspection signal is detected at the above-mentioned timing in each of the non-contact sensors 12a and 12c. Is enough. That is, if the inspection signal is detected, there is no disconnection, and if the inspection signal is not detected, it can be determined that the disconnection has occurred.

On the other hand, the presence / absence of the disconnection of the branch circuit wiring D cannot be accurately determined based on whether or not the inspection signal is detected, so that the strength of the inspection signal detected by each of the non-contact sensors 12a to 12c and By comparing with a predetermined threshold value, it is determined whether or not the branch circuit wiring D is disconnected.

It should be noted that in the inspection apparatus of FIG. 4 as well, various modes can be considered for the assignment of the noncontact sensors 12a to 12c. For example, in the example of FIG. 4, two ends of the branch circuit wiring D are assigned to the non-contact sensors 12a and 12c, but one end is assigned. Is also good. In this case, the presence / absence of disconnection is sufficient if it is based on whether or not an inspection signal is detected by these sensors, and it is not always necessary to compare with a threshold value.

Further, in the example of FIG. 4, one non-contact sensor 12 a is assigned to the ends of the single circuit wirings A to C and the two ends of the branch circuit wiring D. One non-contact sensor is assigned to the ends of B and B, and one non-contact sensor is assigned to the two ends of single circuit wiring C and branch circuit wiring D. You may make it so.

As described above, in the inspection apparatus of FIG. 4, when the single circuit wiring and the branch circuit wiring are mixed, the end of the single circuit wiring and the end of the branch circuit wiring are provided for one non-contact sensor. Since both parts are allocated, the number of non-contact sensors can be reduced.

Next, FIG. 5 is a schematic diagram of an inspection apparatus according to another embodiment of the present invention. A circuit board Z has a branch circuit wiring D having seven ends and four single circuit wirings A to C. , E, and are mixed, and are the same as the circuit board Y in FIG. 4, which is the inspection target.

The inspection device includes a signal source 21 for supplying an inspection signal to one end of the branch circuit wiring D and one end of each of the single circuit wirings A to C and E; At the two ends of the single circuit wiring A to C and the other end of the single circuit wirings A to C and E, two non-contact sensors 22a and 22b for detecting a test signal, and the other four At one end, probe 25a to 25d for detecting test signal, and signal processing etc. for test signal detected by non-contact sensor 22a and 22b and probe 25a to 25d Signal processing unit 23, which controls the entire apparatus, and based on data from the signal processing unit 23, determines whether there is a disconnection in the branch circuit wiring D and the single circuit wirings A to C and E. Computer 24 for determination.

The signal source 21, the non-contact sensors 22 a and 22 b, the signal processing unit 23, and the computer 24 are respectively the signal source 11 and the non-contact sensors 12 a to 1 of the inspection apparatus of FIG. This is the same as 2d, signal processing unit 13 and combi box 14 and the following description focuses on the differences. The probes 25a to 25d are, for example, conductive pins, which detect an inspection signal by contacting the ends of the branch circuit wiring D. Fig. 5 In the inspection apparatus of this embodiment, the probes 25a to 25d are used instead of the non-contact sensor 12b of the inspection apparatus of FIG. Although there are individual differences, non-contact sensors are generally more expensive than probes, and the use of probes makes it possible to construct an inspection device at lower cost. However, as described above, the non-contact sensor has the advantage that one single non-contact sensor can inspect a large number of single circuit wirings. Things.

In the case of FIG. 5, each end of the single circuit wirings A to C and one end of the branch circuit wiring D are assigned to the non-contact sensor 22a. Further, the non-contact sensor 22 b is assigned an end of the single circuit wiring E and one end of the branch circuit wiring D. Probes 25a to 25d are respectively assigned to the remaining four ends of the branch circuit wiring D.

In the inspection by the inspection device having such a configuration, first, the non-contact sensors 22 a and 22 b are arranged as shown in FIG. 5 and the probes 25 a to 25 are attached to the remaining end of the branch circuit wiring D. Arrange d.

Hereinafter, this is substantially the same as the case of FIG. 4, and the computer 24 controls the signal source 21 to transmit the inspection signal. In this case, for example, a test signal is supplied to each of the circuit wirings A to E in the order of single circuit wiring A → B → C → branch circuit wiring D → single circuit wiring E.

Then, each of the non-contact sensors 22 a and 22 b and each of the probes 25 a to 25 d detect an inspection signal, and the signal processing unit 23 performs predetermined processing on the detected inspection signal. The signal processing unit 23 sends to the computer 24 information of the inspection signal detected by each of the non-contact sensors 22 a and 22 b and each of the probes 25 a to 25 d.

Here, the computer 24 detects that the signal source 21 detects each of the circuit wirings A to E. Based on the timing at which the inspection signal is supplied and the timing at which each of the non-contact sensors 12a to 12c detects the inspection signal, the presence or absence of a disconnection is determined.

In this case, the presence / absence of disconnection of each of the circuit wirings A to E is determined by detecting whether the inspection signal is detected at the above timing in each of the non-contact sensors 12a and 12b and each of the probes 25a to 25d. It suffices to make a judgment based on whether or not it is not. That is, if the inspection signal is detected, there is no disconnection, and if the inspection signal is not detected, it can be determined that the disconnection has occurred. In the case of FIG. 5, one end of the branch circuit wiring D is assigned to each of the non-contact sensors 22a and 22b, and two are not assigned.

In the inspection apparatus shown in FIG. 5, various modes can be considered for the assignment of the non-contact sensors 22a and 22b and the probes 25a to 25d.

For example, in the example of FIG. 5, one end of the branch circuit wiring D is assigned to the non-contact sensors 22a and 22b, but two ends may be assigned. Good. In this case, the presence / absence of disconnection is determined by comparing the strength of the inspection signal detected by these sensors with a predetermined threshold.

In the example of FIG. 5, both the ends of the single circuit wiring A and the like and the ends of the branch circuit wiring D are assigned to the non-contact sensors 22a and 22b, and the branch circuit wiring D Probes 25a to 25d were assigned to all of the remaining ends of, but probes were assigned to some of the remaining ends of branch circuit wiring D, and non-contact sensors were assigned to the remaining ends. In this case, the non-contact sensor can be assigned up to two ends.

Thus, in the inspection apparatus of FIG. 5, single circuit wiring and branch circuit wiring are mixed. In this case, both the end of the single circuit wiring and the end of the branch circuit wiring are assigned to one non-contact sensor, so the number of non-contact sensors can be reduced. it can. Further, by allocating a plug to the remaining end of the branch circuit wiring, the number of non-contact sensors can be further reduced.

As described above, various preferred embodiments of the present invention have been described, but it is needless to say that the present invention is not limited thereto. In particular, it goes without saying that various modes can be considered for the method of assigning the non-contact sensor and the probe without departing from the gist of the present invention. Industrial applicability

As described above, according to the present invention, it is possible to inspect a circuit wiring branched in the middle or a circuit wiring in which the circuit wiring is mixed by using a smaller number of non-contact sensors.

Claims

The scope of the claims

1.3 An inspection device for inspecting a branch circuit wiring having three or more ends,

Determining means for determining whether or not a disconnection has occurred in the branch circuit wiring based on the inspection signal detected by the non-contact sensor, and at least one of the non-contact sensors, Assign the other end,

For the test signal detected by the non-contact sensor to which the two other ends are assigned, the determination means compares the strength of the test signal with a predetermined threshold value, and An inspection apparatus characterized in that it is determined whether or not a disconnection has occurred.

2.3 An inspection device for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed, wherein one end of the branch circuit wiring is provided. Supply means for supplying a test signal to the unit and one end of the single circuit wiring;

One branch circuit arrangement for at least one non-contact sensor; An inspection apparatus, wherein the other end of a line and the other end of one or more of the single circuit wires are assigned.

3.3 An inspection apparatus for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed, wherein one end of the branch circuit wiring is provided. Supply means for supplying a test signal to the unit and one end of the single circuit wiring;

4.3 An inspection device for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed, wherein one end of the branch circuit wiring is provided. Supply means for supplying a test signal to the unit and one end of the single circuit wiring;

At the other end of the branch circuit wiring or at the other end of the single circuit wiring, a non-contact method for detecting the inspection signal in a non-contact manner with the branch circuit wiring or the single circuit wiring. A probe for detecting the inspection signal by contacting the branch circuit wiring at another end of the branch circuit wiring;

An inspection apparatus, wherein the probe is assigned to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not assigned.

5. An inspection device for inspecting a circuit wiring in which a branch circuit wiring having three or more ends and a single circuit wiring having two ends are mixed, wherein one end of the branch circuit wiring is provided. Supply means for supplying a test signal to the unit and one end of the single circuit wiring;

Assigning, to at least one of the non-contact sensors, the other end of two branch circuit wirings and the other end of one or more single circuit wirings; Allocating the probe to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not allocated,

6. The inspection device according to any one of claims 1 to 5, wherein the other ends of the two branch circuit wirings are assigned to each of the non-contact sensors as much as possible.

7. The supply device according to claim 2, wherein the supply unit sequentially supplies an inspection signal to one end of the branch circuit wiring and one end of the single circuit wiring. Inspection device as described.

8. An inspection method for inspecting a branch circuit wiring having three or more ends,

A determination step of determining whether or not a disconnection has occurred in the branch circuit wiring based on the inspection signal detected by the non-contact sensor,

In the disposing step, two of the other ends are assigned to at least one of the non-contact sensors;

In the determining step, for the inspection signal detected by the non-contact sensor to which the two other ends are assigned, the intensity of the inspection signal is compared with a predetermined threshold value. An inspection method characterized by determining whether a disconnection has occurred.

9.3 Branch circuit wiring with three or more ends and single with two ends A circuit wiring, and an inspection method for inspecting a circuit wiring in which the mixed circuit wiring is mixed, a supply step of supplying an inspection signal to one end of the branch circuit wiring and one end of the single circuit wiring, ,

In the arranging step, assigning the other end of one branch circuit wiring and the other end of one or more single circuit wirings to at least one of the non-contact sensors. An inspection method characterized by the following.

An inspection method for inspecting a circuit wiring in which a branch circuit wiring having more than 10.3 ends and a single circuit wiring having two ends are mixed.

In the tooth position step, for at least one of the non-contact sensors, the other ends of the two branch circuit wirings and the other ends of one or a plurality of the single circuit wirings are provided. allocation, In the determining step, for the inspection signal detected by the non-contact sensor to which the two other ends are assigned, the intensity of the inspection signal is compared with a predetermined threshold value. An inspection method characterized by determining whether a disconnection has occurred.

11. A method for inspecting a circuit wiring in which a branch circuit wiring having at least 1.3 ends and a single circuit wiring having two ends are mixed, wherein one end of the branch circuit wiring is provided. Supplying a test signal to the unit and one end of the single circuit wiring;

In the first arranging step, for at least one of the non-contact sensors, the other end of one branch circuit wiring and the other end of one or more single circuit wirings are provided. Assignment,

The inspection method, wherein, in the second arranging step, the probe is assigned to a part or all of the other end of the branch circuit wiring to which the non-contact sensor is not assigned.

12. An inspection method for inspecting a circuit wiring in which a branch circuit wiring having two or more ends and a single circuit wiring having two ends are mixed. Supplying an inspection signal to one end of the branch circuit wiring and one end of the single circuit wiring;