WO2002001167A1 - A mechano-electrical sensor for sensing force or vibration - Google Patents

A mechano-electrical sensor for sensing force or vibration Download PDF

Info

Publication number
WO2002001167A1
WO2002001167A1 PCT/NO2001/000252 NO0100252W WO0201167A1 WO 2002001167 A1 WO2002001167 A1 WO 2002001167A1 NO 0100252 W NO0100252 W NO 0100252W WO 0201167 A1 WO0201167 A1 WO 0201167A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
framework
inner body
piezoelectric
foil
Prior art date
Application number
PCT/NO2001/000252
Other languages
English (en)
French (fr)
Inventor
Birger Orten
Original Assignee
Meditron As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meditron As filed Critical Meditron As
Priority to CA002413447A priority Critical patent/CA2413447A1/en
Priority to BR0112277-0A priority patent/BR0112277A/pt
Priority to EA200300054A priority patent/EA200300054A1/ru
Priority to AU2001274687A priority patent/AU2001274687A1/en
Priority to JP2002506054A priority patent/JP2004502158A/ja
Priority to EP01941327A priority patent/EP1311811A1/en
Publication of WO2002001167A1 publication Critical patent/WO2002001167A1/en

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01HMEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H11/00Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
    • G01H11/06Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
    • G01H11/08Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/004Mounting transducers, e.g. provided with mechanical moving or orienting device
    • GPHYSICS
    • G10MUSICAL INSTRUMENTS; ACOUSTICS
    • G10KSOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
    • G10K11/00Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
    • G10K11/18Methods or devices for transmitting, conducting or directing sound
    • G10K11/24Methods or devices for transmitting, conducting or directing sound for conducting sound through solid bodies, e.g. wires

Definitions

  • the present invention relates to sensing of force or vibration, delivering electrical signals representative of the sensed force or a parameter of a vibration state. More particularly, the invention relates to a mechano-electrical sensor for sensing force or vibration and delivering at least one electrical signal that is a function of the sensed force or vibration.
  • Force sensors, acceleration sensors and vibration sensors have many uses, and exist in many embodiments.
  • two or three separate sensors are utilized e.g. to sense acceleration in three orthogonal directions, by allowing massive bodies, suspended in spring systems, to move relative to respective reference frames.
  • Rotation is usually sensed with a gyroscope device.
  • the present invention aims at providing a sensor that, better than previously known solutions, is able to operate with a directional effect and provide good mea- surements regarding translation as well as rotation, by means of one movable body only.
  • Fig. 1 shows a two-dimensional embodiment of the sensor in accordance with the invention
  • Fig. 2 shows the same embodiment as Fig. 1 , however suspended in an outer frame
  • Fig. 3 shows another two-dimensional embodiment of the sensor in accordance with the invention.
  • Fig. 4 shows the same embodiment as Fig. 3, however suspended in an outer frame
  • Fig. 5 shows a three-dimensional embodiment of the sensor in accordance with the invention, with foil-shaped support structures, in a partially cut-away view; and Fig. 6 shows another three-dimensional embodiment with filament-shaped support structures, this drawing also in a partially cut-away view.
  • Fig. 1 appears a relatively simple, two-dimensional embodiment of the sensor of the invention.
  • An inner body 1 is supported by means of piezoelectric
  • foils 3 in a framework 2 are able to deliver electrical signals generated when the foils are subject to deformation due to shift of the inner body 1 relative to a relaxed centre position.
  • the figure shows three foils tautened in a hexagonal opening, however one single foil may be used, or a larger number of foils.
  • the choice of lo inner body will depend on the use field of the sensor.
  • the inner body may, in uses including recording from soft surfaces, consist of e.g. plastic or silicone rubber with various shore values. In other applications, for example industrial diamond material may be used. Combinations of material and geometrical shape of the inner body is important.
  • the inner body may also exhibit openings to provide a possibi- i5 lity for air passage therethrough, for example in microphone applications.
  • the foils may possibly be attached between two metallic frame parts that are insulated from each other and possibly from other frame parts along the periphery, so that signals can be collected from the metallic frame parts.
  • the stretch directions of the foils may be e.g. along the longitu-
  • framework 2 crucial, as long as the frame is rigid and suitable for attaching the piezoelectric foils.
  • Such a two-dimensional sensor will clearly be most sensitive with regard to force or vibratory influence in a direction perpendicular to the plane spanned by
  • Fig. 2 appears the same embodiment as in Fig. 1 , however the whole basic sensor is suspended in an outside framework 5.
  • the suspension is by means of elastic elements 4, e.g. rubber elements, and such an embodiment of the invention will be particularly favourable e.g. when using the sensor as a sensor element in a microphone.
  • the main purpose of the outside framework 5 is noise attenuation, i.e. attenuation of noise in the form of vibrations that may bring the piezo elements of the sensor into oscillation.
  • the framework 2 or the inner body 1 that is supposed to oscillate in relation to the surroundings.
  • the suspension of the sensor frame will normally provide "good” acoustic coupling between the surroundings and the sensor elements, and normally this is not desirable.
  • the mass of the inner body will influence the characteristic (the frequency response) most strongly, but design and material choice will also be of importance regarding the coupling between the "sensed medium” and the sensor. Due to the coupled oscillatory systems, the characteristic must be optimized as a function of mass ratios, stiffnesses etc.
  • Fig. 3 appears an alternative embodiment of the sensor in accordance with the invention, still in a two-dimensional version.
  • an inner body 1 suspended in a number of sector-shaped piezoelectric foils 3, and preferably the stretch direction for every foil sector is arranged in the same manner in relation to the radius in the respective position, e.g. pointing substantially in a radial direction.
  • connection of signal leads is made in a similar manner as mentioned regarding Fig. 1 , and it appears that it may be possible to achieve high sum voltages with appropriate coupling of signal leads from each respective foil sector, if this is desirable. Alternatively, of course separate signals can be collected from each respective sector.
  • Fig. 4 shows suspension in an outer frame 5 in the same manner as in Fig. 2, however in this case the suspension structures are elastic, sector-shaped diaphragms made of e.g. rubber.
  • Fig. 5 appears an embodiment of a three-dimensional type.
  • the inner body 1 is held suspended at the centre of a spherical frame 2, by means of piezoelectric foil pieces 3 arranged in such a manner that a relative shifting of the inner body 1 , or a rotation for that matter, will be detectable by means of voltages cre- ated in the foils 3, and that can be collected by means of (not shown) signal wires connected to the two sides of the foil pieces projecting out through the frame.
  • framework 2 does not have to be spherical, nor does it need to be closed, but it is important that it is rigid, in order to constitute a reference for the position of the inner body.
  • the piezoelectric foils have been replaced by filaments, and the filaments are either of a piezoelectric type with corresponding function as the foil pieces in Fig. 5, or the filaments are taut and substantially inelastic, but attached to piezoelectric areas (not shown) of the framework, so that these areas generate voltages depending on the translation or rotation of the inner body relative to framework 2.
  • Such a three-dimensional force/vibration sensor as shown in Fig. 5 and Fig. 6, is based upon a rigid coupling between the framework and the body for which force or possibly acceleration shall be measured, and thereby the inertia of the inner body will create the measurable voltages in the suspension structures 3 or in their attachment areas.
  • an acceleration/vibration sensor may constitute a main element in e.g. an inertia navigation system.
  • the three-dimensional embodiments shown in Figs. 5 and 6 can be suspended in an outer framework via an elastic material in two or three dimensions.
  • the foil pieces shown in the embodiment of Fig. 5 may come in other sha- pes, for example more sector-like or possibly as approximations to full circle areas, and the planes to be spanned, do not necessarily have to be orthogonal like in the figure.
  • foil materials or filament materials are not the only possible materials in this application, the suspension structures between inner body and frame- work may possibly be piezoelectric bimorph elements or similar elements.
  • the invention is also intended to accommodate the variant that has already been mentioned, namely the variant with suspension structures that are not piezoelectric, but attached to piezoelectric areas of the framework.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Multimedia (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Force Measurement Appropriate To Specific Purposes (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
PCT/NO2001/000252 2000-06-23 2001-06-15 A mechano-electrical sensor for sensing force or vibration WO2002001167A1 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CA002413447A CA2413447A1 (en) 2000-06-23 2001-06-15 A mechano-electrical sensor for sensing force or vibration
BR0112277-0A BR0112277A (pt) 2000-06-23 2001-06-15 Sensor eletro-mec nico para sensorear forças e vibrações
EA200300054A EA200300054A1 (ru) 2000-06-23 2001-06-15 Механо-электрический датчик для восприятия усилия или вибрации
AU2001274687A AU2001274687A1 (en) 2000-06-23 2001-06-15 A mechano-electrical sensor for sensing force or vibration
JP2002506054A JP2004502158A (ja) 2000-06-23 2001-06-15 物理−電気センサ
EP01941327A EP1311811A1 (en) 2000-06-23 2001-06-15 A mechano-electrical sensor for sensing force or vibration

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO20003311A NO312792B1 (no) 2000-06-23 2000-06-23 Mekanoelektrisk sensor
NO20003311 2000-06-23

Publications (1)

Publication Number Publication Date
WO2002001167A1 true WO2002001167A1 (en) 2002-01-03

Family

ID=19911307

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NO2001/000252 WO2002001167A1 (en) 2000-06-23 2001-06-15 A mechano-electrical sensor for sensing force or vibration

Country Status (11)

Country Link
EP (1) EP1311811A1 (ru)
JP (1) JP2004502158A (ru)
KR (1) KR20030071618A (ru)
CN (1) CN1302267C (ru)
AU (1) AU2001274687A1 (ru)
BR (1) BR0112277A (ru)
CA (1) CA2413447A1 (ru)
EA (1) EA200300054A1 (ru)
NO (1) NO312792B1 (ru)
PL (1) PL360483A1 (ru)
WO (1) WO2002001167A1 (ru)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104181330B (zh) * 2013-05-24 2018-03-20 北京嘉岳同乐极电子有限公司 加速度传感器
CN110445415B (zh) * 2019-08-06 2020-07-17 合肥工业大学 一种旋转压电驱动器

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2880333A (en) * 1954-11-17 1959-03-31 Gulton Ind Inc Accelerometer
US4051351A (en) 1976-11-10 1977-09-27 Westinghouse Electric Corporation Electronic system for monitoring pneumatic tool performance
US4051395A (en) * 1975-08-08 1977-09-27 Minnesota Mining And Manufacturing Weight actuated piezoelectric polymeric transducer
GB2055018A (en) 1979-07-11 1981-02-18 Kureha Chemical Ind Co Ltd Vibration detector
EP0118329A2 (fr) * 1983-01-28 1984-09-12 Thomson-Csf Hydrophone de vitesse
GB2180346A (en) * 1985-07-27 1987-03-25 Tapeimp Ltd Inertia sensitive device
US4727279A (en) * 1987-04-29 1988-02-23 General Motors Corporation Piezoelectric knock sensor
US4839872A (en) * 1987-05-19 1989-06-13 Thomson-Csf Geophone with a sensitive element made of piezoelectric polymer

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2257019Y (zh) * 1995-09-08 1997-06-25 陕西青华机电研究所 差动式振弦加速度计

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2880333A (en) * 1954-11-17 1959-03-31 Gulton Ind Inc Accelerometer
US4051395A (en) * 1975-08-08 1977-09-27 Minnesota Mining And Manufacturing Weight actuated piezoelectric polymeric transducer
US4051351A (en) 1976-11-10 1977-09-27 Westinghouse Electric Corporation Electronic system for monitoring pneumatic tool performance
GB2055018A (en) 1979-07-11 1981-02-18 Kureha Chemical Ind Co Ltd Vibration detector
EP0118329A2 (fr) * 1983-01-28 1984-09-12 Thomson-Csf Hydrophone de vitesse
GB2180346A (en) * 1985-07-27 1987-03-25 Tapeimp Ltd Inertia sensitive device
US4727279A (en) * 1987-04-29 1988-02-23 General Motors Corporation Piezoelectric knock sensor
US4839872A (en) * 1987-05-19 1989-06-13 Thomson-Csf Geophone with a sensitive element made of piezoelectric polymer

Also Published As

Publication number Publication date
BR0112277A (pt) 2003-12-30
CA2413447A1 (en) 2002-01-03
PL360483A1 (en) 2004-09-06
CN1302267C (zh) 2007-02-28
KR20030071618A (ko) 2003-09-06
EP1311811A1 (en) 2003-05-21
NO312792B1 (no) 2002-07-01
NO20003311D0 (no) 2000-06-23
EA200300054A1 (ru) 2003-06-26
AU2001274687A1 (en) 2002-01-08
NO20003311L (no) 2001-12-24
JP2004502158A (ja) 2004-01-22
CN1437701A (zh) 2003-08-20

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