WO2022073261A1 - 声换能器及电子设备 - Google Patents

声换能器及电子设备 Download PDF

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Publication number
WO2022073261A1
WO2022073261A1 PCT/CN2020/123586 CN2020123586W WO2022073261A1 WO 2022073261 A1 WO2022073261 A1 WO 2022073261A1 CN 2020123586 W CN2020123586 W CN 2020123586W WO 2022073261 A1 WO2022073261 A1 WO 2022073261A1
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WO
WIPO (PCT)
Prior art keywords
comb teeth
group
sound transducer
fixing
sub
Prior art date
Application number
PCT/CN2020/123586
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English (en)
French (fr)
Inventor
凯夫兰·雅尼克
Original Assignee
瑞声声学科技(深圳)有限公司
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Publication of WO2022073261A1 publication Critical patent/WO2022073261A1/zh

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Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R1/00—Details of transducers, loudspeakers or microphones
    • H04R1/02—Casings; Cabinets ; Supports therefor; Mountings therein
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R7/00—Diaphragms for electromechanical transducers; Cones
    • H04R7/16—Mounting or tensioning of diaphragms or cones
    • H04R7/18—Mounting or tensioning of diaphragms or cones at the periphery
    • H04R7/20—Securing diaphragm or cone resiliently to support by flexible material, springs, cords, or strands
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Definitions

  • the present invention relates to the technical field of acoustic-electric conversion devices, and in particular, to an acoustic transducer and electronic equipment.
  • Micro-Electro-Mechanical-System Microphone (MEMS)-based transducers include a series of sensors and actuators produced using micromachining techniques.
  • MEMS can be used for accelerometers, microphones, micro motors, micro pumps, micro vibrators, pressure sensors, gyroscopes, humidity sensors, etc.
  • Many MEMS devices use capacitive sensing techniques to transduce physical signals into electrical signals.
  • an interface circuit is used to convert the capacitance change in the sensor into a voltage signal.
  • the connecting member 803 between the moving member 801 and the base plate 802 is arranged in-plane, Therefore, the static position and moving range of the moving parts are limited, which affects the performance of the acoustic transducer.
  • One of the objectives of the present invention is to provide an acoustic transducer which widens the static position and vibration range of the moving part.
  • Another object of the present invention is to provide an electronic device that improves the performance and sensitivity of the acoustic transducer.
  • a kind of sound transducer comprising:
  • a substrate comprising first and second surfaces disposed oppositely and a cavity extending from the first surface to the second surface;
  • a support member disposed on the first surface of the substrate, including a third surface close to the inner periphery of the cavity and a third surface away from the first surface;
  • a moving part disposed above the cavity and at least partially covering the cavity, including a fourth surface close to the outer periphery of the support and a fourth surface away from the cavity;
  • the first group of comb teeth is fixed on the inner periphery of the support member, extends toward the moving member, and is insulated from the fixing member and the moving member;
  • the second group of comb teeth is fixed on the outer periphery of the moving member and extends toward the support member;
  • the elastic connecting member includes a first connecting portion, a second connecting portion, and a connecting portion connecting the first connecting portion and the second connecting portion the elastic body, the first connecting part is connected to the fourth surface, and the second connecting part is connected to the fixing member.
  • first connecting portion is provided with a first fixing anchor connected with the fourth surface
  • second connecting portion is provided with a second fixing anchor connected with the fixing member
  • the elastic connecting member is The first fixed anchor and the second fixed anchor connect the moving member to the fixed member.
  • first fixed anchor includes a plurality of first sub-anchors, the first sub-anchors are connected to the fourth surface; and/or the second fixed anchor includes a plurality of second sub-anchors, the first sub-anchors The two sub-anchors are connected to the fixing member.
  • the sound transducer includes one of the fixing pieces, the fixing piece is annular, and the second connecting part is connected to the inner side or the top of the fixing piece.
  • the sound transducer includes at least two fixing pieces arranged at intervals along the circumferential direction, and the second connecting part is connected to the inner side or the top of the fixing pieces.
  • the sound transducer includes one of the elastic connecting pieces, and the elastic connecting piece has an annular structure, the inner side of the annular structure forms the first connecting portion, and the outer side of the annular structure forms the first connecting portion.
  • the second connecting portion is formed, and the elastic body is provided with a ventilation hole therethrough.
  • the elastic body extends from the first connecting portion to the second connecting portion in a direction away from the fourth surface and gradually outward.
  • the elastic body includes a first body portion and a second body portion, the first body portion extends from the first connecting portion in a direction away from the fourth surface, and the second body portion is connected to the the first body part and the second connection part.
  • the sound transducer includes at least two elastic connecting pieces, and the at least two elastic connecting pieces are distributed at intervals along the inner side of the fixing piece in the circumferential direction.
  • the sound transducer includes at least two elastic connecting pieces, the number of the elastic connecting pieces is the same as the number of the fixing pieces, and the second connecting part of one elastic connecting piece is connected to the one of said fasteners.
  • the elastic body has a linear structure or a wavy structure.
  • the shape of the wavy structure may be one or any combination of a sine waveform, a square waveform, a triangular waveform and a sawtooth waveform.
  • the moving member and at least one of the elastic connecting members form a resonance structure.
  • the elastic connector is made of a material including conductive material, or non-conductive material, or a combination of conductive material and non-conductive material.
  • the plane where the first surface is located is a first plane
  • the first group of comb teeth includes a first group of sub-comb teeth and a second group of sub-comb teeth spaced along a direction perpendicular to the first plane, Both the first group of sub-comb teeth and the second group of sub-comb teeth are at least partially opposite to the second group of comb teeth in a direction parallel to the first plane; the first group of sub-comb teeth is opposite to The second group of sub-comb teeth are insulatingly arranged.
  • the present invention also provides an electronic device including the above-mentioned sound transducer.
  • the beneficial effects of the present invention are: by arranging the elastic connecting piece out of plane, on the basis of the prior art, the vibration range and static position of the moving piece are further widened, and the performance of the sound transducer is improved; Comb teeth are arranged at the position where the elastic connecting piece is arranged in the in-plane manner, the number of the comb teeth is increased, and the sensing area and sensitivity of the sound transducer are further improved.
  • FIG. 1 is a schematic cross-sectional view of a prior art acoustic transducer
  • FIG. 2 is a schematic top view of an acoustic transducer according to Embodiment 1 of the present invention
  • FIG. 3 is a schematic top view of another sound transducer provided in Embodiment 1 of the present invention.
  • Fig. 4 is the cross-sectional schematic diagram along A-A in Fig. 3;
  • FIG. 5 is a schematic cross-sectional view of a first group of sound transducers with suspended comb teeth
  • FIG. 6 is a schematic cross-sectional view of an acoustic transducer in which a first group of comb teeth includes a first group of sub-comb teeth and a second group of sub-comb teeth;
  • FIG. 7 is a schematic cross-sectional view of a suspended acoustic transducer with a first group of comb teeth including a first group of sub-comb teeth and a second group of sub-comb teeth;
  • FIG. 8 is a top view of the elastic connector whose elastic body is a linear structure
  • FIG. 9 is a top view of the elastic body having a wave-shaped structure of the elastic connector
  • Fig. 10 is a top view of the elastic connecting piece whose elastic body is another wave-shaped structure
  • FIG. 11 is a top view of the elastic connecting piece in which the elastic body is another wave-shaped structure
  • Figure 12 is a cross-sectional view of an elastic connecting piece whose elastic body is yet another wavy structure
  • FIG. 13 is a schematic top view of the acoustic transducer provided in Embodiment 2 of the present invention.
  • Figure 14 is a schematic cross-sectional view along B-B in Figure 13;
  • 15 is a schematic cross-sectional view of the sound transducer provided by the second embodiment of the present invention including another elastic body;
  • 16 is a schematic cross-sectional view of an acoustic transducer in which the second group of comb teeth includes a third group of sub-comb teeth and a fourth group of sub-comb teeth.
  • 100 acoustic transducer; 1, substrate; 11, first surface; 12, second surface; 13, cavity; 14, fifth surface; 15, sixth surface; 2, support member; 21, first Three surfaces; 22, inner periphery; 3, fixed part; 4, moving part; 41, outer periphery; 42, fourth surface; 5, first group of comb teeth; 51, first group of sub-comb teeth; 52, second Group of sub-comb teeth; 6, second group of comb teeth; 61, third group of sub-comb teeth; 62, fourth group of sub-comb teeth; 7, elastic connecting piece; 71, first connecting part; 72, second connecting part 73, the first anchor; 731, the first sub-anchor; 74, the second anchor; 741, the second sub-anchor; 75, the elastic body; 751, the first body part; 752, the second body part; 76, Air vent.
  • an embodiment of the present invention provides an acoustic transducer 100 , including: a substrate 1 , including a first surface 11 and a second surface 12 arranged opposite to each other and extending from the first surface 11 to the second surface 12 of the cavity 13; the support 2, provided on the first surface 11 of the substrate 1, including an inner periphery 22 close to the cavity 13 and a third surface 21 away from the first surface 11; On the third surface 21; the moving member 4, disposed above the cavity 13 and at least partially covering the cavity 13, including the outer periphery 41 close to the support member 2 and the fourth surface 42 away from the cavity 13; the first group of comb teeth 5, The second group of comb teeth 6 is fixed to the outer peripheral edge 41 of the movable member 4 and extends toward the support member 2; the first group of comb teeth 5 and the fixing member 3 and the moving part 4 are insulated and arranged; the elastic connecting part 7 connects the fixed part 3 and the moving part 4; wherein, the first group of comb teeth
  • the external sound pressure acts on the moving member 4, so that the moving member 4 is displaced in a direction perpendicular to the plane where it is located, thereby driving the second group of comb teeth 6 to move relative to the first group of comb teeth 5 in a direction perpendicular to the The direction of the plane where the element 4 is located is displaced, so a signal of capacitance change is generated between the first group of comb teeth 5 and the second group of comb teeth 6 .
  • the elastic connecting member 7 is connected between the fourth surface 42 of the moving member 4 and the fixing member 3, so that the elastic connecting member 7 is arranged on the first group of comb teeth 5 and the second group of combs Outside the plane where the teeth 6 are located, that is, the elastic connecting piece 7 is arranged in an out-of-plane manner.
  • the vibration range and static position of the moving member 4 are further widened, and the performance of the acoustic transducer 100 is improved; meanwhile, it can be arranged in the existing in-plane manner Comb teeth are arranged at the position of the elastic connecting member 7, the number of comb teeth is increased, and the induction area and sensitivity of the sound transducer 100 are further improved; The effect of the fixed part 3 and the moving part 4 on the capacitive coupling between the first group of comb teeth 5 and the second group of comb teeth 6 .
  • the fixing member 3 is a gasket
  • the first connecting portion 71 of the elastic connecting member 7 can be connected to any position on the fourth surface 42 of the moving member 4
  • the second connecting portion 72 of the elastic connecting member 7 can be connected to Any position of the fixing member 3 only needs to ensure that the elastic connecting member 7 is set out of plane.
  • the first connecting part 71 is provided with a first fixing anchor 73 connected with the fourth surface 42
  • the second connecting part 72 is provided with a second fixing anchor 74 connected with the fixing member 3
  • the elastic connecting member 7 is connected by the first fixing anchor 73 and
  • the second fixing anchor 74 connects the moving piece 4 to the fixing piece 3 .
  • the first fixing anchor 73 includes a plurality of first sub-anchors 731
  • the first sub-anchors 731 are connected to the fourth surface 42
  • the second fixing anchor 74 includes several second sub-anchors 741
  • the second sub-anchors 741 are connected to the fixing member 3 . It can be understood that, in other embodiments, the first fixation anchor 73 may include several first sub-anchors 731 , while the second fixation anchor 74 may include several second sub-anchors 741 .
  • the sound transducer 100 includes a fixing member 3, the fixing member 3 is annular, and the second connecting portion 72 is connected to the inner side or the top of the fixing member 3; or, the sound transducer 100 includes at least two circumferentially spaced apart In the provided fixing member 3 , the second connecting portion 72 is connected to the inner side or the top of the fixing member 3 .
  • the sound transducer 100 includes a fixing member 3 , and the fixing member 3 is a circular ring shape. It can be understood that the fixing member 3 can also be a square ring, a polygonal ring or an irregular ring and the like.
  • the sound transducer 100 includes at least two elastic connecting pieces 7 , and the at least two elastic connecting pieces 7 are distributed circumferentially along the inner side of the fixing piece 3 at intervals.
  • the acoustic transducer 100 is provided with four elastic connecting members 7 , and the four elastic connecting members 7 are connected to the same circular ring-shaped fixing member 3 .
  • the acoustic transducer 100 may include a plurality of fixing parts 3 and a plurality of elastic connecting parts 7 , the number of the elastic connecting parts 7 is the same as that of the fixing parts 3 , and the second connecting part of one elastic connecting part 7 72 is attached to a fixture 3 .
  • the acoustic transducer 100 is provided with four elastic connecting pieces 7 and four fixing pieces 3 , one elastic connecting piece 7 is connected to one fixing piece 3 , and the four elastic connecting pieces 7 are arranged at equal intervals.
  • the elastic body 75 may have a linear structure or a wavy structure.
  • the shape of the wave-shaped structure of the elastic body 75 may be one of a sine waveform, a square waveform, a triangular waveform and a sawtooth waveform, or any combination thereof. It can be understood that the shape of the elastic body 75 is not limited by this embodiment and the accompanying drawings, and can be any shape.
  • the moving member 4 and the at least one elastic connecting member 7 form a resonance structure.
  • the elastic connector 7 is made of a material including conductive material, or non-conductive material, or a combination of conductive material and non-conductive material.
  • the elastic connecting member 7 can conduct electricity
  • the fixing member 3 can be electrically connected with the moving member 4 through the elastic connecting member 7
  • the first group of comb teeth 5 is insulated from the fixing member 3 .
  • the second group of comb teeth 6 is insulated from the moving member 4 . As long as the first group of comb teeth 5 and the second group of comb teeth 6 are not connected in series
  • the plane where the first surface 11 is located is the first plane
  • the first group of comb teeth 5 includes a first group of sub-comb teeth 51 and a second group of sub-comb teeth arranged at intervals along the direction perpendicular to the first plane
  • the teeth 52, the first group of sub-comb teeth 51 and the second group of sub-comb teeth 52 are at least partially opposite to the second group of comb teeth 6 along the direction parallel to the first plane.
  • the first group of sub-comb teeth 51 are insulated from each other, and the second group of sub-comb teeth 52 are insulated from each other.
  • the fixing member 3 is insulated.
  • the second group of comb teeth 6 includes a third group of sub-comb teeth 61 and a fourth group of sub-comb teeth 62 .
  • the substrate 1 further includes a fifth surface 14 and a sixth surface 15 that connect the first surface 11 and the second surface 12 and are oppositely disposed, the fifth surface 14 is disposed toward the cavity 13 and forms a cavity wall, along a direction perpendicular to the first plane,
  • the fifth surface 14 may or may not be flush with the inner periphery 22 .
  • the fifth surface 14 is flush with the inner periphery 22 along a direction perpendicular to the first plane.
  • the first group of comb teeth 5 is suspended above the cavity 13 . Referring to FIG. 4 and FIG.
  • the fifth surface 14 corresponds to the moving member 4 , and the first group of comb teeth 5 is located above the first surface 11 .
  • the fifth surface 14 may also correspond to the support member 2 , and at this time, the first group of comb teeth 5 is suspended above the cavity 13 .
  • the acoustic transducer 100 includes an elastic connecting member 7 , and the elastic connecting member 7 has a ring structure.
  • the inner side of the ring structure forms the first connection portion 71
  • the outer side of the ring structure forms the second connection portion 72
  • the elastic body 75 is provided with a ventilation hole 76 through it.
  • the ventilation holes 76 By arranging the ventilation holes 76 , the static pressures on both sides of the movable member 4 can be equalized when the movable member 4 vibrates.
  • four ventilation holes 76 are provided through the elastic body 75 , and it can be understood that the number of the ventilation holes 76 is not limited by this embodiment and the accompanying drawings.
  • the elastic body 75 extends from the first connecting portion 71 to the second connecting portion 72 in a direction away from the fourth surface 42 and gradually outward.
  • the elastic body 75 includes a first body portion 751 and a second body portion 752 .
  • the first body portion 751 moves away from the fourth surface 42 from the first connecting portion 71 .
  • the second body portion 752 is connected to the first body portion 751 and the second connection portion 72 . It can be understood that the structure of the elastic body 75 is not limited by FIG. 14 and FIG. 15 .
  • An embodiment of the present invention provides an electronic device, where the electronic device includes the sound transducer 100 in the first embodiment or the second embodiment.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Multimedia (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)

Abstract

本发明提供一种声换能器，包括基板、支撑件、固定件、移动件、第一组梳齿、第二组梳齿和弹性连接件；基板包括第一表面、第二表面以及腔；支撑件包括内周缘和第三表面且设于基板的第一表面上；固定件设于支撑件的第三表面；移动件设于腔的上方且至少部分覆盖于腔，包括外周缘和第四表面；第一组梳齿固定于支撑件的内周缘，朝移动件方向延伸；第二组梳齿固定于移动件的外周缘，朝支撑件方向延伸；第一组梳齿和第二组梳齿相互交叉；第一组梳齿与固定件和移动件绝缘设置；弹性连接件包括连接于第四表面的第一连接部、连接于固定件的第二连接部和连接第一连接部与第二连接部的弹性本体。本发明提供的声换能器不仅性能提高还提升了感应面积和灵敏度。

Description

声换能器及电子设备 技术领域
本发明涉及声电转换装置技术领域，尤其涉及一种声换能器及电子设备。
 背景技术
基于微电机系统（Micro-Electro-Mechanical-System Microphone，MEMS）的换能器包括使用微加工技术产生的一系列传感器和致动器。通常，MEMS可以用于加速度计、麦克风、微马达、微泵、微振子、压力传感器、陀螺仪、湿度传感器等。许多MEMS装置使用电容感测技术来将物理信号换能成电信号。在这种应用中，使用接口电路将传感器中的电容变化转换成电压信号。现有技术中，如图1所示，通过梳齿相对滑移运动产生电容变化的声换能器800，由于设计局限，移动件801和基板802之间的连接件803均为面内设置，因此移动件的静态位置以及移动范围受到限制，影响声换能器的性能。
 技术问题
因此，有必要提供一种可以提高灵敏度和性能的声换能器及电子产品。
 技术解决方案
本发明的目的之一在于提供一种声换能器，拓宽了移动件的静态位置和振动范围。
本发明的目的之二在于提供一种电子设备，提高了声换能器的性能和灵敏度。
本发明的目的之一提供的技术方案如下：一种声换能器，包括：
基板，包括相对设置的第一表面和第二表面以及自所述第一表面延伸到所述第二表面的腔；
支撑件，设于所述基板的所述第一表面上，包括靠近所述腔的内周缘以及远离所述第一表面的第三表面；
固定件，设于所述支撑件的所述第三表面上；
移动件，设于所述腔的上方且至少部分覆盖于所述腔，包括靠近所述支撑件的外周缘以及远离所述腔的第四表面；
第一组梳齿，固定于所述支撑件的所述内周缘，朝所述移动件方向延伸，与所述固定件以及所述移动件绝缘设置；
第二组梳齿，固定于所述移动件的所述外周缘，朝所述支撑件方向延伸；
弹性连接件，连接所述固定件和所述移动件；
其中，所述第一组梳齿和所述第二组梳齿相互交叉；所述弹性连接件包括第一连接部、第二连接部以及连接所述第一连接部与所述第二连接部的弹性本体，所述第一连接部连接于所述第四表面，所述第二连接部连接于所述固定件。
进一步地，所述第一连接部设有与所述第四表面连接的第一固定锚，所述第二连接部设有与所述固定件连接的第二固定锚，所述弹性连接件通过所述第一固定锚和所述第二固定锚将所述移动件连接到所述固定件。
进一步地，所述第一固定锚包括若干第一子锚，所述第一子锚连接于所述第四表面；和/或，所述第二固定锚包括若干第二子锚，所述第二子锚连接于所述固定件。
进一步地，所述声换能器包括一个所述固定件，所述固定件呈环形，所述第二连接部连接于所述固定件的内侧或顶部。
进一步地，所述声换能器包括至少两个沿圆周方向间隔设置的所述固定件，所述第二连接部连接于所述固定件的内侧或顶部。
进一步地，所述声换能器包括一个所述弹性连接件，所述弹性连接件呈环形结构，所述环形结构的内侧边形成所述第一连接部，所述环形结构的外侧边形成所述第二连接部，所述弹性本体贯穿设有通气孔。
进一步地，所述弹性本体自所述第一连接部朝远离所述第四表面并逐渐向外的方向延伸至所述第二连接部。
进一步地，所述弹性本体包括第一本体部以及第二本体部，所述第一本体部自所述第一连接部朝远离所述第四表面的方向延伸，所述第二本体部连接所述第一本体部与所述第二连接部。
进一步地，所述声换能器包括至少两个所述弹性连接件，至少两个所述弹性连接件沿所述固定件的内侧周向间隔分布。
进一步地，所述声换能器包括至少两个所述弹性连接件，所述弹性连接件的数量与所述固定件的数量相同，一个所述弹性连接件的所述第二连接部连接于一个所述固定件。
进一步地，所述弹性本体为直线形结构或波浪形结构。
进一步地，所述波浪形结构的形状可以为正弦波形、方波形、三角波形和锯齿波形中的一种或者任意组合。
进一步地，所述移动件和至少一个所述弹性连接件形成谐振结构。
进一步地，所述弹性连接件由包括导电材料，或非导电材料，或导电材料与非导电材料的组合的材质制成。
进一步地，所述第一表面所在平面为第一平面，所述第一组梳齿包括沿垂直于所述第一平面的方向间隔设置的第一组子梳齿和第二组子梳齿，沿平行于所述第一平面的方向所述第一组子梳齿和所述第二组子梳齿均与所述第二组梳齿至少部分相对设置；所述第一组子梳齿与所述第二组子梳齿绝缘设置。
本发明还提供一种电子设备，包括上述的声换能器。
 有益效果
本发明的有益效果在于：通过面外设置弹性连接件，在现有技术的基础上，进一步拓宽了移动件的振动范围和静态位置，提升了声换能器的性能；同时，可以在现有面内方式设置弹性连接件的位置设置梳齿，增加梳齿的数量，进一步提升声换能器的感应面积和灵敏度。
 附图说明
图1为现有技术声换能器截面示意图；
图2为本发明实施例一提供的一种声换能器的俯视示意图；
图3为本发明实施例一提供的另一种声换能器的俯视示意图；
图4为图3中沿A-A的截面示意图；
图5为第一组梳齿悬空的声换能器的截面示意图；
图6为第一组梳齿包括第一组子梳齿和第二组子梳齿的声换能器的截面示意图；
图7为第一组梳齿包括第一组子梳齿和第二组子梳齿且悬空的声换能器的截面示意图；
图8为弹性本体为直线形结构的弹性连接件的俯视图；
图9为弹性本体为一种波浪形结构的弹性连接件的俯视图；
图10为弹性本体为另一种波浪形结构的弹性连接件的俯视图；
图11为弹性本体为又一种波浪形结构的弹性连接件的俯视图；
图12为弹性本体为再一种波浪形结构的弹性连接件的截面图;
图13为本发明实施例二提供的声换能器的俯视示意图；
图14为图13中沿B-B的截面示意图；
图15为本发明实施例二提供的声换能器包括另一种弹性本体的截面示意图；
图16为第二组梳齿包括第三组子梳齿和第四组子梳齿的声换能器的截面示意图。
图中：100、声换能器；1、基板；11、第一表面；12、第二表面；13、腔；14、第五表面；15、第六表面；2、支撑件；21、第三表面；22、内周缘；3、固定件；4、移动件；41、外周缘；42、第四表面；5、第一组梳齿；51、第一组子梳齿；52、第二组子梳齿；6、第二组梳齿；61、第三组子梳齿；62、第四组子梳齿；7、弹性连接件；71、第一连接部；72、第二连接部；73、第一固定锚；731、第一子锚；74、第二固定锚；741、第二子锚；75、弹性本体；751、第一本体部；752、第二本体部；76、通气孔。
 本发明的最佳实施方式
下面结合图2至图16对本发明作详细描述。
实施例一
请参阅图2至图7，本发明实施例提供一种声换能器100，包括：基板1，包括相对设置的第一表面11和第二表面12以及自第一表面11延伸到第二表面12的腔13；支撑件2，设于基板1的第一表面11上，包括靠近腔13的内周缘22以及远离第一表面11的第三表面21；固定件3，设于支撑件2的第三表面21上；移动件4，设于腔13的上方且至少部分覆盖于腔13，包括靠近支撑件2的外周缘41以及远离腔13的第四表面42；第一组梳齿5，固定于支撑件2的内周缘22，朝移动件4方向延伸；第二组梳齿6，固定于移动件4的外周缘41，朝支撑件2方向延伸；第一组梳齿5与固定件3以及移动件4绝缘设置；弹性连接件7，连接固定件3和移动件4；其中，第一组梳齿5和第二组梳齿6相互交叉；弹性连接件7包括第一连接部71、第二连接部72以及连接第一连接部71与第二连接部72的弹性本体75，第一连接部71连接于第四表面42，第二连接部72连接于固定件3。
在本发明实施例中，外部声压作用于移动件4，使移动件4沿垂直其所在平面的方向发生位移，从而带动第二组梳齿6相对于第一组梳齿5沿垂直于移动件4所在平面的方向发生位移，因此，第一组梳齿5和第二组梳齿6之间产生电容变化的信号。通过在支撑件2上设置固定件3，弹性连接件7连接于移动件4的第四表面42和固定件3之间，使弹性连接件7设于第一组梳齿5和第二组梳齿6所在的平面之外，即弹性连接件7采用面外方式进行设置。通过面外设置弹性连接件7，在现有技术的基础上，进一步拓宽了移动件4的振动范围和静态位置，提升了声换能器100的性能；同时，可以在现有面内方式设置弹性连接件7的位置设置梳齿，增加梳齿的数量，进一步提升声换能器100的感应面积和灵敏度；通过将固定件3和移动件4均与第一组梳齿5绝缘设置，降低固定件3和移动件4对第一组梳齿5与第二组梳齿6之间电容耦合的影响。在本实施例中，固定件3为垫片，弹性连接件7的第一连接部71可以连接到移动件4第四表面42的任何位置，弹性连接件7的第二连接部72可以连接到固定件3的任何位置，只要确保弹性连接件7为面外设置即可。
第一连接部71设有与第四表面42连接的第一固定锚73，第二连接部72设有与固定件3连接的第二固定锚74，弹性连接件7通过第一固定锚73和第二固定锚74将移动件4连接到固定件3。在本实施例中，第一固定锚73包括若干第一子锚731，第一子锚731连接于第四表面42。根据不同的需求，在其他实施例中，第二固定锚74包括若干第二子锚741，第二子锚741连接于固定件3。可以理解，在其他实施例中，第一固定锚73包括若干第一子锚731，同时第二固定锚74包括若干第二子锚741也是可以的。
优选地，声换能器100包括一个固定件3，固定件3呈环形，第二连接部72连接于固定件3的内侧或顶部；或者，声换能器100包括至少两个沿圆周方向间隔设置的固定件3，第二连接部72连接于固定件3的内侧或顶部。
请参阅图2，声换能器100包括一个固定件3，该固定件3为圆形环形。可以理解，固定件3也可以为方形环形、多边形环形或者不规则环形等等。
优选地，声换能器100包括至少两个弹性连接件7，至少两个弹性连接件7沿固定件3的内侧周向间隔分布。请再次参阅图2，声换能器100设有四个弹性连接件7，四个弹性连接件7连接于同一个圆形环形的固定件3。
在其他实施例中，声换能器100可以包括多个固定件3和多个弹性连接件7，弹性连接件7的数量与固定件3的数量相同，一个弹性连接件7的第二连接部72连接于一个固定件3。请参阅图3，声换能器100设有四个弹性连接件7和四个固定件3，一个弹性连接件7连接于一个固定件3，四个弹性连接件7等间距间隔设置。当然，多个弹性连接件7之间非等间距间隔设置也是可以的。
请参阅图8至图12，弹性本体75可以为直线形结构或波浪形结构。弹性本体75的波浪形结构的形状可以为正弦波形、方波形、三角波形和锯齿波形中的一种或者任意组合。可以理解地，弹性本体75的形状不受本实施例以及附图的限制，可以为任何形状。
优选地，移动件4和至少一个弹性连接件7形成谐振结构。
优选地，弹性连接件7由包括导电材料，或非导电材料，或导电材料与非导电材料的组合的材质制成。当弹性连接件7由导电材料制成时，弹性连接件7能够导电，固定件3可通过弹性连接件7与移动件4电连接，第一组梳齿5与固定件3绝缘设置。可以理解，在其他实施例中，第二组梳齿6与移动件4绝缘设置。只要第一组梳齿5和第二组梳齿6不串联即可
请参阅图6和图7，第一表面11所在平面为第一平面，第一组梳齿5包括沿垂直于第一平面的方向间隔设置的第一组子梳齿51和第二组子梳齿52，沿平行于第一平面的方向第一组子梳齿51和第二组子梳齿52均与第二组梳齿6至少部分相对设置。其中，第一组子梳齿51彼此之间绝缘设置，第二组子梳齿52彼此之间绝缘设置，第一组子梳齿51和第二组子梳齿52均分别与移动件4和固定件3绝缘设置。通过该种设置方式，降低了对第一组梳齿5和第二组梳齿6之间电容耦合的影响。同样，如图16所示，第二组梳齿6包括第三组子梳齿61和第四组子梳齿62。
基板1还包括连接第一表面11和第二表面12且相对设置的第五表面14和第六表面15，第五表面14朝向腔13设置并形成腔壁，沿垂直于第一平面的方向，第五表面14可以与内周缘22齐平设置，也可以不与内周缘22齐平设置。请参阅图5和图7，第五表面14与内周缘22沿垂直于第一平面的方向齐平设置，此时，第一组梳齿5悬空于腔13的上方。请参阅图4和图6，沿垂直于第一平面的方向，第五表面14与移动件4相对应，第一组梳齿5位于第一表面11的上方。在其他实施例中，第五表面14也可以与支撑件2相对应，此时，第一组梳齿5悬空于腔13的上方。
实施例二
本实施例与实施例一的不同之处在于弹性连接件7的结构和数量，在此仅对不同之处进行详述，其他部分不再赘述。
请参阅图13，声换能器100包括一个弹性连接件7，弹性连接件7呈环形结构，环形结构的内侧边形成第一连接部71，环形结构的外侧边形成第二连接部72，弹性本体75贯穿设有通气孔76。通过设置通气孔76，可以使移动件4在振动时，移动件4两侧的静压力相等。在本实施例中，弹性本体75上贯穿设有四个通气孔76，可以理解，通气孔76的数量不受本实施例和附图的限制。
请参阅图14，弹性本体75自第一连接部71朝远离第四表面42并逐渐向外的方向延伸至第二连接部72。当然，弹性本体75采用其他结构也是可以的，请参阅图15，弹性本体75包括第一本体部751以及第二本体部752，第一本体部751自第一连接部71朝远离第四表面42的方向延伸，第二本体部752连接第一本体部751与第二连接部72。可以理解，弹性本体75的结构不受图14和图15的限制。
实施例三
本发明实施例提供一种电子设备，该电子设备包括实施例一或实施例二中的声换能器100。
以上的仅是本发明的实施方式，在此应当指出，对于本领域的普通技术人员来说，在不脱离本发明创造构思的前提下，还可以做出改进，但这些均属于本发明的保护范围。

Claims (16)

  1. 一种声换能器，其特征在于，包括：
    基板，包括相对设置的第一表面和第二表面以及自所述第一表面延伸到所述第二表面的腔；
    支撑件，设于所述基板的所述第一表面上，包括靠近所述腔的内周缘以及远离所述第一表面的第三表面；
    固定件，设于所述支撑件的所述第三表面上；
    移动件，设于所述腔的上方且至少部分覆盖于所述腔，包括靠近所述支撑件的外周缘以及远离所述腔的第四表面；
    第一组梳齿，固定于所述支撑件的所述内周缘，朝所述移动件方向延伸，与所述固定件以及所述移动件绝缘设置；
    第二组梳齿，固定于所述移动件的所述外周缘，朝所述支撑件方向延伸；
    弹性连接件，连接所述固定件和所述移动件；
    其中，所述第一组梳齿和所述第二组梳齿相互交叉；所述弹性连接件包括第一连接部、第二连接部以及连接所述第一连接部与所述第二连接部的弹性本体，所述第一连接部连接于所述第四表面，所述第二连接部连接于所述固定件。
  2. 根据权利要求1所述的声换能器，其特征在于，所述第一连接部设有与所述第四表面连接的第一固定锚，所述第二连接部设有与所述固定件连接的第二固定锚，所述弹性连接件通过所述第一固定锚和所述第二固定锚将所述移动件连接到所述固定件。
  3. 根据权利要求2所述的声换能器，其特征在于，所述第一固定锚包括若干第一子锚，所述第一子锚连接于所述第四表面；和/或，
    所述第二固定锚包括若干第二子锚，所述第二子锚连接于所述固定件。
  4. 根据权利要求1所述的声换能器，其特征在于，所述声换能器包括一个所述固定件，所述固定件呈环形，所述第二连接部连接于所述固定件的内侧或顶部。
  5. 根据权利要求1所述的声换能器，其特征在于，所述声换能器包括至少两个沿圆周方向间隔设置的所述固定件，所述第二连接部连接于所述固定件的内侧或顶部。
  6. 根据权利要求4或5所述的声换能器，其特征在于，所述声换能器包括一个所述弹性连接件，所述弹性连接件呈环形结构，所述环形结构的内侧边形成所述第一连接部，所述环形结构的外侧边形成所述第二连接部，所述弹性本体贯穿设有通气孔。
  7. 根据权利要求6所述的声换能器，其特征在于，所述弹性本体自所述第一连接部朝远离所述第四表面并逐渐向外的方向延伸至所述第二连接部。
  8. 根据权利要求6所述的声换能器，其特征在于，所述弹性本体自所述第一连接部朝远离所述第四表面并逐渐向外的方向延伸至所述第二连接部。
  9. 根据权利要求4所述的声换能器，其特征在于，所述声换能器包括至少两个所述弹性连接件，至少两个所述弹性连接件沿所述固定件的内侧周向间隔分布。
  10. 根据权利要求5所述的声换能器，其特征在于，所述声换能器包括至少两个所述弹性连接件，所述弹性连接件的数量与所述固定件的数量相同，一个所述弹性连接件的所述第二连接部连接于一个所述固定件。
  11. 根据权利要求9或10所述的声换能器，其特征在于，所述弹性本体为直线形结构或波浪形结构。
  12. 根据权利要求11所述的声换能器，其特征在于，所述波浪形结构的形状可以为正弦波形、方波形、三角波形和锯齿波形中的一种或者任意组合。
  13. 根据权利要求1所述的声换能器，其特征在于，所述移动件和至少一个所述弹性连接件形成谐振结构。
  14. 根据权利要求1所述的声换能器，其特征在于，所述弹性连接件由包括导电材料，或非导电材料，或导电材料与非导电材料的组合的材质制成。
  15. 根据权利要求1所述的声换能器，其特征在于，所述第一表面所在平面为第一平面，所述第一组梳齿包括沿垂直于所述第一平面的方向间隔设置的第一组子梳齿和第二组子梳齿，沿平行于所述第一平面的方向所述第一组子梳齿和所述第二组子梳齿均与所述第二组梳齿至少部分相对设置；所述第一组子梳齿与所述第二组子梳齿绝缘设置。
  16. 一种电子设备，其特征在于，包括如权利要求1所述的声换能器。
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6925710B1 (en) * 2002-03-27 2005-08-09 Analog Devices, Inc. Method for manufacturing microelectromechanical combdrive device
US20170166437A1 (en) * 2015-10-30 2017-06-15 Infineon Technologies Ag System and Method for a Differential Comb Drive MEMS
CN207832823U (zh) * 2018-01-26 2018-09-07 成都信息工程大学 一种大质量块梳齿电容式三轴加速度传感器
CN110012411A (zh) * 2011-11-14 2019-07-12 英飞凌科技股份有限公司 用于制造声换能器的方法
CN111372179A (zh) * 2019-12-31 2020-07-03 瑞声科技(新加坡)有限公司 电容系统及电容式麦克风

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020118850A1 (en) * 2000-08-02 2002-08-29 Yeh Jer-Liang (Andrew) Micromachine directional microphone and associated method
WO2010038229A2 (en) * 2008-10-02 2010-04-08 Audio Pixels Ltd. Actuator apparatus with comb-drive component and methods useful for manufacturing and operating same
DE102012218501A1 (de) * 2012-10-11 2014-04-17 Robert Bosch Gmbh Bauelement mit einer mikromechanischen Mikrofonstruktur
WO2014088517A1 (en) * 2012-12-06 2014-06-12 Agency For Science, Technology And Research Transducer and method of controlling the same
US9728653B2 (en) * 2013-07-22 2017-08-08 Infineon Technologies Ag MEMS device
JP6311375B2 (ja) * 2014-03-14 2018-04-18 オムロン株式会社 静電容量型トランスデューサ
US9938133B2 (en) * 2016-04-13 2018-04-10 Infineon Technologies Dresden Gmbh System and method for a comb-drive MEMS device
ITUA20163571A1 (it) * 2016-05-18 2017-11-18 St Microelectronics Srl Trasduttore acustico mems con elettrodi interdigitati e relativo procedimento di fabbricazione
KR101807146B1 (ko) * 2016-09-09 2017-12-07 현대자동차 주식회사 고감도 마이크로폰 및 그 제조 방법
US11601763B2 (en) * 2016-12-29 2023-03-07 Gmems Tech Shenzhen Limited Lateral mode capacitive microphone including a capacitor plate with sandwich structure for ultra high performance
CN106911990A (zh) * 2017-03-09 2017-06-30 歌尔股份有限公司 Mems声换能器及其制造方法
KR102370645B1 (ko) * 2017-09-11 2022-03-07 주식회사 디비하이텍 멤스 마이크로폰 및 이의 제조 방법
US10349188B2 (en) * 2017-10-18 2019-07-09 Akustica, Inc. MEMS microphone system and method
CN207603919U (zh) * 2017-11-28 2018-07-10 瑞声声学科技(深圳)有限公司 Mems麦克风
CN111262412B (zh) * 2018-12-03 2021-12-31 讯芯电子科技（中山）有限公司 振动电机及应用该振动电机的电子设备

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6925710B1 (en) * 2002-03-27 2005-08-09 Analog Devices, Inc. Method for manufacturing microelectromechanical combdrive device
CN110012411A (zh) * 2011-11-14 2019-07-12 英飞凌科技股份有限公司 用于制造声换能器的方法
US20170166437A1 (en) * 2015-10-30 2017-06-15 Infineon Technologies Ag System and Method for a Differential Comb Drive MEMS
CN207832823U (zh) * 2018-01-26 2018-09-07 成都信息工程大学 一种大质量块梳齿电容式三轴加速度传感器
CN111372179A (zh) * 2019-12-31 2020-07-03 瑞声科技(新加坡)有限公司 电容系统及电容式麦克风

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