WO2001040868A3 - Alternierende phasenmaske - Google Patents

Alternierende phasenmaske Download PDF

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Publication number
WO2001040868A3
WO2001040868A3 PCT/DE2000/004136 DE0004136W WO0140868A3 WO 2001040868 A3 WO2001040868 A3 WO 2001040868A3 DE 0004136 W DE0004136 W DE 0004136W WO 0140868 A3 WO0140868 A3 WO 0140868A3
Authority
WO
WIPO (PCT)
Prior art keywords
segments
phase mask
alternating phase
phases
transparent
Prior art date
Application number
PCT/DE2000/004136
Other languages
English (en)
French (fr)
Other versions
WO2001040868A2 (de
Inventor
Christoph Friedrich
Michael Heissmeier
Molela Moukara
Uwe Griesinger
Burkhard Ludwig
Rainer Pforr
Original Assignee
Infineon Technologies Ag
Christoph Friedrich
Michael Heissmeier
Molela Moukara
Uwe Griesinger
Burkhard Ludwig
Rainer Pforr
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Infineon Technologies Ag, Christoph Friedrich, Michael Heissmeier, Molela Moukara, Uwe Griesinger, Burkhard Ludwig, Rainer Pforr filed Critical Infineon Technologies Ag
Priority to KR10-2002-7006908A priority Critical patent/KR100490913B1/ko
Priority to JP2001542273A priority patent/JP3699933B2/ja
Priority to EP00989795A priority patent/EP1244937A2/de
Publication of WO2001040868A2 publication Critical patent/WO2001040868A2/de
Publication of WO2001040868A3 publication Critical patent/WO2001040868A3/de
Priority to US10/158,733 priority patent/US6660437B2/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/26—Phase shift masks [PSM]; PSM blanks; Preparation thereof
    • G03F1/30—Alternating PSM, e.g. Levenson-Shibuya PSM; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Die Erfindung betrifft eine alternierende Phasenmaske (1) mit einer aus zwei opaken Segmenten bestehenden verzweigten Struktur. Beidseits der Segmente oder Teilen hiervon sind jeweils zwei transparente Flächensegmente (5a, 5b) angeordnet, welche um 180° ± Δ α verschobene Phasen aufweisen, wobei Δ α maximal 25° beträgt. Die Flächensegmente (5a, 5b) sind durch wenigstens ein transparentes Flächengrenzsegment (6) getrennt, dessen Phase zwischen den Phasen der angrenzenden Flächensegmente (5a, 5b) liegt.
PCT/DE2000/004136 1999-11-30 2000-11-22 Alternierende phasenmaske WO2001040868A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR10-2002-7006908A KR100490913B1 (ko) 1999-11-30 2000-11-22 교번 위상 마스크
JP2001542273A JP3699933B2 (ja) 1999-11-30 2000-11-22 交互性位相マスク
EP00989795A EP1244937A2 (de) 1999-11-30 2000-11-22 Alternierende phasenmaske
US10/158,733 US6660437B2 (en) 1999-11-30 2002-05-30 Alternating phase mask

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19957542.8 1999-11-30
DE19957542A DE19957542C2 (de) 1999-11-30 1999-11-30 Alternierende Phasenmaske

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US10/158,733 Continuation US6660437B2 (en) 1999-11-30 2002-05-30 Alternating phase mask

Publications (2)

Publication Number Publication Date
WO2001040868A2 WO2001040868A2 (de) 2001-06-07
WO2001040868A3 true WO2001040868A3 (de) 2001-12-06

Family

ID=7930824

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2000/004136 WO2001040868A2 (de) 1999-11-30 2000-11-22 Alternierende phasenmaske

Country Status (6)

Country Link
US (1) US6660437B2 (de)
EP (1) EP1244937A2 (de)
JP (1) JP3699933B2 (de)
KR (1) KR100490913B1 (de)
DE (1) DE19957542C2 (de)
WO (1) WO2001040868A2 (de)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7083879B2 (en) * 2001-06-08 2006-08-01 Synopsys, Inc. Phase conflict resolution for photolithographic masks
DE10129202C1 (de) 2001-06-18 2002-09-26 Infineon Technologies Ag Alternierende Phasenmaske
US20020192676A1 (en) * 2001-06-18 2002-12-19 Madonna Angelo J. Method for determining if a type of bacteria is present in a mixture
US6821348B2 (en) * 2002-02-14 2004-11-23 3M Innovative Properties Company In-line deposition processes for circuit fabrication
US20030151118A1 (en) * 2002-02-14 2003-08-14 3M Innovative Properties Company Aperture masks for circuit fabrication
US8216780B2 (en) * 2002-04-12 2012-07-10 Microphage (Tm) Incorporated Method for enhanced sensitivity in bacteriophage-based diagnostic assays
EP1540018B1 (de) * 2002-04-12 2010-05-26 Colorado School Of Mines Verfahren zum nachweis geringer konzentrationen eines zielbakteriums unter verwendung von phagen zur infizierung von zielbakterienzellen
US20050003346A1 (en) * 2002-04-12 2005-01-06 Colorado School Of Mines Apparatus and method for detecting microscopic living organisms using bacteriophage
KR100675882B1 (ko) * 2004-12-22 2007-02-02 주식회사 하이닉스반도체 다중투과 위상 마스크 및 이를 이용한 노광 방법
US20110097702A1 (en) * 2005-03-31 2011-04-28 Voorhees Kent J Methods and compositions for in situ detection of microorganisms on a surface
WO2006105414A2 (en) * 2005-03-31 2006-10-05 Colorado School Of Mines Apparatus and method for detecting microscopic organisms using microphage
KR100809331B1 (ko) 2006-08-29 2008-03-05 삼성전자주식회사 마스크 및 그 제조 방법
US7773307B2 (en) * 2006-12-12 2010-08-10 Northrop Grumman Space & Mission Systems Corporation Phase mask with continuous azimuthal variation for a coronagraph imaging system
AU2008265989B8 (en) 2007-06-15 2012-01-12 Microphage Incorporated Method of detection of microorganisms with enhanced bacteriophage amplification
US8697434B2 (en) * 2008-01-11 2014-04-15 Colorado School Of Mines Detection of phage amplification by SERS nanoparticles
US9441204B2 (en) * 2008-04-03 2016-09-13 Colorado School Of Mines Compositions and methods for detecting Yersinia pestis bacteria
US9455202B2 (en) * 2014-05-29 2016-09-27 United Microelectronics Corp. Mask set and method for fabricating semiconductor device by using the same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0653679A2 (de) * 1989-04-28 1995-05-17 Fujitsu Limited Maske, Verfahren zur Herstellung der Maske und Verfahren zur Musterherstellung mit einer Maske
US5923566A (en) * 1997-03-25 1999-07-13 International Business Machines Corporation Phase shifted design verification routine

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5229255A (en) * 1991-03-22 1993-07-20 At&T Bell Laboratories Sub-micron device fabrication with a phase shift mask having multiple values of phase delay
US5472814A (en) 1994-11-17 1995-12-05 International Business Machines Corporation Orthogonally separated phase shifted and unphase shifted mask patterns for image improvement
US5523186A (en) * 1994-12-16 1996-06-04 International Business Machines Corporation Split and cover technique for phase shifting photolithography
US5595843A (en) 1995-03-30 1997-01-21 Intel Corporation Layout methodology, mask set, and patterning method for phase-shifting lithography
US5942355A (en) 1996-09-04 1999-08-24 Micron Technology, Inc. Method of fabricating a phase-shifting semiconductor photomask
US6228539B1 (en) * 1996-09-18 2001-05-08 Numerical Technologies, Inc. Phase shifting circuit manufacture method and apparatus
US5840447A (en) 1997-08-29 1998-11-24 International Business Machines Corporation Multi-phase photo mask using sub-wavelength structures

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0653679A2 (de) * 1989-04-28 1995-05-17 Fujitsu Limited Maske, Verfahren zur Herstellung der Maske und Verfahren zur Musterherstellung mit einer Maske
US5923566A (en) * 1997-03-25 1999-07-13 International Business Machines Corporation Phase shifted design verification routine

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
HISASHI WATANABE ET AL: "SUB-QUARTER-MICRON GATE PATTERN FABRICATION USING A TRANSPARENT PHASE SHIFTING MASK", JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY: PART B,US,AMERICAN INSTITUTE OF PHYSICS. NEW YORK, vol. 9, no. 6, 1 November 1991 (1991-11-01), pages 3172 - 3175, XP000268536, ISSN: 0734-211X *

Also Published As

Publication number Publication date
DE19957542A1 (de) 2001-07-05
US20030008218A1 (en) 2003-01-09
DE19957542C2 (de) 2002-01-10
US6660437B2 (en) 2003-12-09
EP1244937A2 (de) 2002-10-02
WO2001040868A2 (de) 2001-06-07
KR20030009328A (ko) 2003-01-29
JP3699933B2 (ja) 2005-09-28
KR100490913B1 (ko) 2005-05-19
JP2003521726A (ja) 2003-07-15

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