WO2001036709A1 - Method and device for electric discharge surface treatment - Google Patents

Method and device for electric discharge surface treatment Download PDF

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Publication number
WO2001036709A1
WO2001036709A1 PCT/JP1999/006347 JP9906347W WO0136709A1 WO 2001036709 A1 WO2001036709 A1 WO 2001036709A1 JP 9906347 W JP9906347 W JP 9906347W WO 0136709 A1 WO0136709 A1 WO 0136709A1
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Prior art keywords
discharge
workpiece
surface treatment
modified layer
electrode
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PCT/JP1999/006347
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French (fr)
Japanese (ja)
Inventor
Akihiro Goto
Yasuhiro Kojima
Nagao Saito
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Mitsubishi Denki Kabushiki Kaisha
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Priority to PCT/JP1999/006347 priority Critical patent/WO2001036709A1/en
Priority to TW088120497A priority patent/TW469203B/en
Publication of WO2001036709A1 publication Critical patent/WO2001036709A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H7/00Processes or apparatus applicable to both electrical discharge machining and electrochemical machining
    • B23H7/02Wire-cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23HWORKING OF METAL BY THE ACTION OF A HIGH CONCENTRATION OF ELECTRIC CURRENT ON A WORKPIECE USING AN ELECTRODE WHICH TAKES THE PLACE OF A TOOL; SUCH WORKING COMBINED WITH OTHER FORMS OF WORKING OF METAL
    • B23H1/00Electrical discharge machining, i.e. removing metal with a series of rapidly recurring electrical discharges between an electrode and a workpiece in the presence of a fluid dielectric
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00Coating not provided for in groups C23C2/00 - C23C24/00
    • C23C26/02Coating not provided for in groups C23C2/00 - C23C24/00 applying molten material to the substrate

Definitions

  • a discharge layer is generated between a discharge surface treatment electrode and a workpiece, and the energy of the discharge causes a modified layer made of an electrode material or a substance in which the electrode material reacts with the discharge energy on the surface of the workpiece.
  • Surface treatment method and apparatus for forming a modified layer comprising: a discharge surface treatment capable of forming a modified layer having good quality and smoother surface roughness on the surface of a workpiece; Method and apparatus improvements. Background art
  • a technique for forming a modified layer on the surface of a workpiece to impart corrosion resistance and abrasion resistance for example, a technique disclosed in Japanese Patent Application Laid-Open No. HEI 5-148615 is disclosed.
  • This technology uses a green compact electrode, which is a discharge surface treatment electrode formed by mixing and compressing WC (tungsten carbide) powder and Co (cobalt) powder in a machining fluid. Processing (deposition processing), and then replacing the electrode with relatively low electrode wear such as copper electrode and performing secondary processing (remelting processing). is there.
  • This method can form a modified layer with strong adhesion to steel, but forms a modified layer with strong adhesion to sintered materials such as cemented carbide. It is difficult.
  • FIG. 4 shows a configuration example of a discharge surface treatment apparatus used for such a discharge surface treatment.
  • 1 is T i H 2 flour powder was compression molded formed by discharge surface treatment in which green compact electrode, 2 is the pressure E was 3 machining tank, four working fluid, 5 green A switching element for switching the voltage and current applied to the body electrode 1 and the workpiece 2; 6, a control circuit for controlling the on / off of the switching element 5; 7, a power supply; 8, a resistor; and 9, a formed circuit.
  • 1 is T i H 2 flour powder was compression molded formed by discharge surface treatment in which green compact electrode, 2 is the pressure E was 3 machining tank, four working fluid, 5 green A switching element for switching the voltage and current applied to the body electrode 1 and the workpiece 2; 6, a control circuit for controlling the on / off of the switching element 5; 7, a power supply; 8, a resistor; and 9, a formed circuit.
  • This is a modified layer.
  • the green compact electrode 1 and the workpiece 2 are relatively moved by the X-axis drive unit, the Y-axis drive unit, and the Z-axis drive unit, which are not shown, and are relatively moved.
  • a discharge is generated between the workpiece 2 and the discharge energy, whereby the modified layer 9 can be formed on the surface of the workpiece 2 made of steel, cemented carbide, or the like.
  • a method of forming a modified layer made of carbide on the surface of a workpiece by such a discharge surface treatment is performed in a working fluid as described below. That is, the carbide that is a component of the modified layer to be formed is combined with the component of the discharge surface treatment electrode.
  • the heat energy from the discharge is used to react with carbon, which is a component of the machining fluid, to form a reformed layer made of carbide on the workpiece.
  • the conventional discharge surface treatment method exclusively uses in-liquid discharge, and depending on only in-liquid discharge, the composition of the electrode material for discharge surface treatment used and the discharge machining conditions during discharge surface treatment.
  • the surface roughness of the modified layer formed on the workpiece can only be slightly improved. Therefore, the conventional discharge surface treatment method has a problem that a modified layer having good quality and smoother surface roughness cannot be formed.
  • the present invention has been made to solve the above problems.
  • Another object of the present invention is to provide a discharge surface treatment method and apparatus capable of forming a high-quality and smoother modified layer on the surface of a workpiece.
  • the discharge surface treatment method according to the present invention is a discharge surface treatment method for forming a modified layer on the surface of a workpiece by discharge machining using an electrode for discharge surface treatment.
  • the object is relatively moved, and in a liquid, a modified layer is formed on the surface of the workpiece by discharge energy supplied between the discharge surface treatment electrode and the workpiece.
  • the modified layer are relatively moved, and the modified layer is shaped by discharge energy supplied between the wire electrode and the modified layer in the air.
  • the modified layer is formed by discharging energy supplied between the wire electrode and the modified layer in an atmosphere of a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas. It is to shape.
  • An electric discharge surface treatment apparatus is an electric discharge surface treatment apparatus for forming a modified layer on a surface of a workpiece by electric discharge machining using an electric discharge surface treatment electrode.
  • a relative movement means capable of relatively moving the workpiece; a discharge generating means for supplying discharge energy between the discharge surface treatment electrode or the wire electrode and a pole between the workpiece; Wire electrode traveling means for feeding a workpiece, machining fluid supply means for supplying a machining fluid for immersing the workpiece, and discharge machining between the wire electrode and the workpiece.
  • a working fluid discharging means for discharging the working fluid in order to perform the process.
  • an injection means for supplying a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas into a gap between the wire electrode and the workpiece.
  • FIG. 1 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 1 of the present invention.
  • FIG. 2 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
  • FIG. 3 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
  • FIG. 4 is a configuration diagram of a conventional discharge surface treatment apparatus. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 1 of the present invention, where 11 is a die material such as a punching die, an extrusion die, etc.
  • a wire electrode, 13 is a table surface on which the workpiece 11 is placed
  • 14 and 15 are X and Y tables arranged orthogonal to each other so as to move in a two-dimensional direction
  • 16 is
  • 17 is a Y-axis driving device for driving the Y-table 15
  • the X-axis driving device 16 and the Y-axis driving device 17 are provided with the workpiece 11. It constitutes a relative moving means for relatively changing the positional relationship with the wire electrode 12.
  • the relative moving means As the relative moving means, the relative moving means described in the background art can be used. Also, 18 is a numerical controller, 19 is a numerical controller 18 Locus movement control means provided therein, 20a is a wire reel, 2Ob is a wire drive roller, and the wire reel 20a and the wire drive roller 20b constitute wire electrode running means. I have.
  • Reference numeral 21 denotes a power supply device which is a discharge generating means for supplying discharge energy between the workpiece 11 and the wire electrode 12, and includes a DC power supply, a switching element, a control circuit, and the like. .
  • the workpiece 11 is subjected to a discharge surface treatment in a machining fluid using, for example, the side surface of the electrode for discharge surface treatment by a discharge surface treatment apparatus having a configuration as shown in FIG. 4 shown in the background art.
  • a modified layer 11 a is formed on a predetermined portion of the workpiece 11.
  • the working fluid is discharged by a working fluid discharge unit (not shown) capable of discharging the working fluid by, for example, opening a valve.
  • a working fluid discharge unit (not shown) capable of discharging the working fluid by, for example, opening a valve.
  • the gap is adjusted to a predetermined value by 17 and the wire electrode 12 is run by a wire reel 20a, a wire drive roller 20b, etc., which constitutes the wire electrode running means, and is provided in the numerical controller 18
  • the wire electrode 12 is moved along the modified layer surface of the workpiece 11 by the X-axis drive device 16 and the Y-axis drive device constituting the relative movement means.
  • the trajectory is moved, and a discharge energy is supplied between the workpiece 11 and the wire electrode 12 by the power supply device 21 which is a discharge generating means, and is processed between the modified layer 11 a and the wire electrode 12. Discharge is generated in the air without passing through the liquid, and the surface of the modified layer 11a is removed.
  • the machining fluid When performing EDM in a machining fluid, the machining fluid is less compressible than gas, so the discharge generates a large discharge explosion pressure, Since the wire electrode between the guides vibrates, it is not possible to perform more precise processing. Due to such characteristics of the machining fluid, electric discharge machining using a wire electrode in the machining fluid is performed by a modified layer (having a thickness of several m to several m) formed on the workpiece by the discharge surface treatment targeted by the present invention. It is not suitable for processing to reduce the surface roughness (for example, the maximum height is about several meters or less).
  • the present invention electric discharge machining in the air is employed, and by performing electric discharge machining with the wire electrode 12 in the air, the machining reaction force becomes extremely small. Vibration is suppressed, and higher precision processing can be performed. Therefore, the modified layer 11a can be shaped more smoothly, and the surface roughness of the modified layer 11a can be reduced.
  • the supply of the processing liquid can be performed by, for example, supplying the processing liquid into the processing tank by a processing liquid supply unit including a pump or the like.
  • electric discharge machining is performed on the modified layer formed on the workpiece by electric discharge surface treatment in the machining fluid as the primary machining, and further, in the air using the wire electrode in the air as the secondary machining. Accordingly, it is possible to form a modified layer having good quality and smoother surface roughness.
  • FIG. 2 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
  • the same reference numerals as in FIG. 1 of Embodiment 1 indicate the same or corresponding parts.
  • reference numeral 22 denotes injection means
  • reference numeral 23 denotes nitrogen gas, nitrogen compound gas such as ammonia gas, or a mixed gas of nitrogen compound gas and nitrogen gas injected by the injection means 22.
  • Fig. 2 It has a configuration in which 22 injection means are added in the vicinity of the gap between the reformed layer 11a and the wire electrode 12.
  • Nitrogen gas, nitrogen compound gas, or nitrogen compound gas and nitrogen introduced from a supply source (not shown)
  • the gas mixture 23 is injected and supplied by the injection means 22 into the gap between the reformed layer 11a of the workpiece 11 and the wire electrode 12 to supply nitrogen gas, nitrogen compound gas, or nitrogen compound gas.
  • electrical discharge machining secondary machining described in Embodiment 1 in an atmosphere of a mixed gas of nitrogen and nitrogen gas.
  • the surface roughness of the modified layer 11a can be reduced, and a nitrogen compound is further formed on the surface of the modified layer 11a. Therefore, the wear resistance of the workpiece 11 can be improved.
  • Fig. 3 shows the minimum opening required for the relative movement of the work 11 and the X table 14 and the Y table 15 on the X table 14 to cover the work 11 in Fig. 2. It is a figure which shows the state which attached the chamber 24 which has a gas, and 25 is a supply means of the nitrogen gas, the nitrogen compound gas, or the mixed gas of the nitrogen compound gas and the nitrogen gas.
  • the supply means 25 is provided with a flow rate adjusting means capable of arbitrarily adjusting the gas supply amount to the chamber 24.
  • the modified layer 11a of the workpiece 11 and the wire electrode 12 are The same effect as in the configuration of FIG. 2 can be obtained more efficiently by discharging the battery between the two.
  • the discharge surface treatment method and apparatus according to the present invention are suitable for being used in a surface treatment related industry for forming a modified layer on the surface of a workpiece.

Abstract

An electric discharge surface treatment method for forming a modified layer on the surface of an object (11) to be machined using an electrode for electric discharge surface treatment, in which the electrode and the object (11) are relatively moved, the modified layer (11a) is formed on the surface of the object (11) in a liquid by the discharge energy supplied between the electrode and the object (11), a wire electrode (12) and the modified layer (11a) are relatively moved, and the modified layer (11a) is shaped in the air using the discharge energy supplied between the wire electrode (12) and the modified layer (11a). Thus, a smoother modified layer (11a) is formed on the surface of the object (11).

Description

明 細 書 放電表面処理方法及び装置 技ίΐϊ分野  Description Discharge surface treatment method and apparatus
この発明は、 放電表面処理用電極と被加工物との間に放電を発生させ、 そのエネルギにより、 被加工物表面に、 電極材料からなる改質層又は電 極材料が放電エネルギにより反応した物質からなる改質層を形成する放 電表面処理方法及び装置に関し、 特に、 被加工物表面に、 良質、 かつ、 より滑らかな表面粗さを持つ改質層を形成することができる、 放電表面 処理方法及び装置の改良に関するものである。 背景技術  According to the present invention, a discharge layer is generated between a discharge surface treatment electrode and a workpiece, and the energy of the discharge causes a modified layer made of an electrode material or a substance in which the electrode material reacts with the discharge energy on the surface of the workpiece. Surface treatment method and apparatus for forming a modified layer comprising: a discharge surface treatment capable of forming a modified layer having good quality and smoother surface roughness on the surface of a workpiece; Method and apparatus improvements. Background art
従来、 被加工物表面に改質層を形成して、 耐食性、 耐磨耗性を付与す る技術としては、 例えば、 日本国特開平 5— 1 4 8 6 1 5号公報に開示 された放電表面処理方法がある。 この技術は、 加工液中にて、 W C (炭 化タングステン) 粉末と C o (コバルト) 粉末を混合して圧縮成形して なる放電表面処理用電極である圧粉体電極を使用して 1次加工 (堆積加 ェ) を行い、 次に銅電極等の比較的電極消耗の少ない電極に交換して 2 次加工 (再溶融加工) を行う、 2つの工程からなる金属材料の放電表面 処理方法である。 この方法は、 鋼材に対しては強固な密着力をもった改 質層を形成できるが、 超硬合金のような焼結材料に対しては強固な密着 力を持った改質層を形成する.ことは困難である。  Conventionally, as a technique for forming a modified layer on the surface of a workpiece to impart corrosion resistance and abrasion resistance, for example, a technique disclosed in Japanese Patent Application Laid-Open No. HEI 5-148615 is disclosed. There are surface treatment methods. This technology uses a green compact electrode, which is a discharge surface treatment electrode formed by mixing and compressing WC (tungsten carbide) powder and Co (cobalt) powder in a machining fluid. Processing (deposition processing), and then replacing the electrode with relatively low electrode wear such as copper electrode and performing secondary processing (remelting processing). is there. This method can form a modified layer with strong adhesion to steel, but forms a modified layer with strong adhesion to sintered materials such as cemented carbide. It is difficult.
しかし、 我々の研究によると、 T i (チタン) 等の硬質炭化物を形成 する材料を放電表面処理用電極として、 被加工物である金属材料との間 に放電を発生させると、 再溶融の過程なしに強固な改質層を被加工物で ある金属表面に形成できることがわかっている。 これは、 放電により消 耗した電極材料と加工液の構成成分である C (炭素) が反応して T i C (炭化チタン) が生成することによるものである。 また、 T i H 2 (水 素化チタン) 等の金属水素化物からなる放電表面処理用電極である圧粉 体電極により、 被加工物である金属材料との間に放電を発生させると、 T i等の材料を使用する場合よりも、 迅速にかつ密着性が高い改質層を 形成できることがわかっている。 さらに、 T i H 2等の水素化物に他の 金属やセラミックスを混合した放電表面処理用電極である圧粉体電極に より、 被加工物である金属材料との間に放電を発生させると、 硬度、 耐 磨耗性等様々な性質をもった改質層を素早く形成することができること がわっている。 However, according to our research, when a material that forms a hard carbide such as Ti (titanium) is used as an electrode for discharge surface treatment and a discharge is generated between the workpiece and a metal material, the process of remelting occurs. Without the need for a strong modified layer It has been found that it can be formed on certain metal surfaces. This is due to the reaction between the electrode material consumed by the electric discharge and C (carbon), which is a component of the machining fluid, to form TiC (titanium carbide). In addition, when a discharge is generated between a metal material as a workpiece and a compact powder electrode as a discharge surface treatment electrode made of a metal hydride such as TiH 2 (titanium hydride), T It is known that a modified layer with higher adhesion can be formed more quickly than when a material such as i is used. Further, when a discharge is generated between a metal material as a workpiece by a green compact electrode which is an electrode for discharge surface treatment in which another metal or ceramic is mixed with a hydride such as T i H 2, It is said that a modified layer having various properties such as hardness and abrasion resistance can be quickly formed.
このような方法については、 例えば、 日本国特開平 9 - 1 9 2 9 3 7 号公報に開示されており、 このような放電表面処理に用いる放電表面処 理装置の構成例を第 4図により説明する。 図において、 1は T i H 2粉 末を圧縮成形してなる放電表面処理用電極である圧粉体電極、 2は被加 ェ物、 3は加工槽、 4は加工液、 5は圧粉体電極 1 と被加工物 2に印加 する電圧及び電流のスィツチングを行うスィツチング素子、 6はスィッ チング素子 5のオン · オフを制御する制御回路、 7は電源、 8は抵抗器、 9は形成された改質層である。 このような構成により、 図示しない相対 移動手段である X軸駆動装置、 Y軸駆動装置及び Z軸駆動装置により、 圧粉体電極 1 と被加工物 2を相対移動せしめ、 圧粉体電極 1 と被加工物 2との間に放電を発生させ、 その放電エネルギにより、 鉄鋼、 超硬合金 等からなる被加工物 2の表面に改質層 9を形成することができる。 Such a method is disclosed, for example, in Japanese Patent Application Laid-Open No. 9-192937, and FIG. 4 shows a configuration example of a discharge surface treatment apparatus used for such a discharge surface treatment. explain. In the figure, 1 is T i H 2 flour powder was compression molded formed by discharge surface treatment in which green compact electrode, 2 is the pressure E was 3 machining tank, four working fluid, 5 green A switching element for switching the voltage and current applied to the body electrode 1 and the workpiece 2; 6, a control circuit for controlling the on / off of the switching element 5; 7, a power supply; 8, a resistor; and 9, a formed circuit. This is a modified layer. With such a configuration, the green compact electrode 1 and the workpiece 2 are relatively moved by the X-axis drive unit, the Y-axis drive unit, and the Z-axis drive unit, which are not shown, and are relatively moved. A discharge is generated between the workpiece 2 and the discharge energy, whereby the modified layer 9 can be formed on the surface of the workpiece 2 made of steel, cemented carbide, or the like.
このような放電表面処理により、 被加工物表面に炭化物からなる改質 層を形成する方法は、 以下のように加工液中にて行われる。 すなわち、 形成する改質層の成分となる炭化物を放電表面処理用電極の成分と 放電による熱エネルギにより被加工物に炭化物からなる改質層を形成す るか、 又は、 形成する改質層の成分となる炭化物を形成する金属若しく はその金属の化合物を放電表面処理用電極の成分として、 放電による熱 エネルギにより加工液の構成成分である炭素と反応させて被加工物に炭 化物からなる改質層を形成するものである。 A method of forming a modified layer made of carbide on the surface of a workpiece by such a discharge surface treatment is performed in a working fluid as described below. That is, the carbide that is a component of the modified layer to be formed is combined with the component of the discharge surface treatment electrode. Either forming a modified layer made of carbide on the workpiece by the heat energy from the discharge, or applying a metal or a compound of the metal that forms carbide that is a component of the formed modified layer to an electrode for discharge surface treatment As a component of this, the heat energy from the discharge is used to react with carbon, which is a component of the machining fluid, to form a reformed layer made of carbide on the workpiece.
このような放電表面処理において、 被加工物表面の改質層を観察する と、 被加工物に形成された改質層に凹凸がみられ、 必ずしも滑らかな表 面性状が得られないことがある。 このことは放電表面処理により被加工 物に形成された改質層の表面粗さが粗いことを示すものである。 この原 因は、 被加工物に形成された改質層の硬度、 密着強度等の質を確保する ためには、 短時間に一定厚さ以上の厚みのある改質層を形成することが 必要であり、 これを実現するための放電加工条件では被加工物に形成さ れる改質層の表面粗さが粗くなる傾向があるためである。  In such a discharge surface treatment, when the modified layer on the surface of the workpiece is observed, irregularities are observed in the modified layer formed on the workpiece, and a smooth surface property may not always be obtained. . This indicates that the surface roughness of the modified layer formed on the workpiece by the discharge surface treatment is rough. The reason for this is that it is necessary to form a modified layer with a certain thickness or more in a short time in order to secure the quality of the modified layer formed on the workpiece, such as hardness and adhesion strength. This is because, under the electric discharge machining conditions for realizing this, the surface roughness of the modified layer formed on the workpiece tends to be rough.
従来の放電表面処理方法は、 前記のように専ら液中放電を利用したも のであり、 液中放電のみによっては、 使用する放電表面処理用電極材料 成分の構成及び放電表面処理時の放電加工条件により、 被加工物に形成 される改質層の表面粗さを若干改善することができるのみである。 した がって、 従来の放電表面処理方法では、 良質、 かつ、 より滑らかな表面 粗さの改質層を形成することができないという問題点がある。  As described above, the conventional discharge surface treatment method exclusively uses in-liquid discharge, and depending on only in-liquid discharge, the composition of the electrode material for discharge surface treatment used and the discharge machining conditions during discharge surface treatment. Thus, the surface roughness of the modified layer formed on the workpiece can only be slightly improved. Therefore, the conventional discharge surface treatment method has a problem that a modified layer having good quality and smoother surface roughness cannot be formed.
また、 被加工物に形成された改質層の表面粗さが粗くなつた場合には、 例えば被加工物が打ち抜き型である場合の成形品にはバリが生じ、 被加 ェ物が押し出し型 (パンチ) である場合の成形品には筋が生じる等の不 具合が発生する。 発明の開示  In addition, when the surface roughness of the modified layer formed on the workpiece becomes rough, for example, when the workpiece is a punching die, burrs are formed on the molded product, and the workpiece becomes an extrusion die. In the case of (punch), defects such as streaks occur in the molded product. Disclosure of the invention
この発明は、 前記のような問題点を解決するためになされたものであ り、 被加工物表面に、 良質、 かつ、 より滑らかな改質層を形成すること ができる、 放電表面処理方法及び装置を得ることを目的とする。 The present invention has been made to solve the above problems. Another object of the present invention is to provide a discharge surface treatment method and apparatus capable of forming a high-quality and smoother modified layer on the surface of a workpiece.
この発明に係る放電表面処理方法は、 放電表面処理用電極を用いて放 電加工により被加工物表面に改質層を形成する放電表面処理方法におい て、 前記放電表面処理用電極と前記被加工物とを相対移動せしめ、 液中 にて、 前記放電表面処理用電極と前記被加工物との極間に供給する放電 エネルギにより、 前記被加工物表面に改質層を形成した後、 ワイヤ電極 と前記改質層を相対移動せしめ、 気中にて、 前記ワイヤ電極と前記改質 層との極間に供給する放電エネルギにより、 前記改質層を整形するもの である。  The discharge surface treatment method according to the present invention is a discharge surface treatment method for forming a modified layer on the surface of a workpiece by discharge machining using an electrode for discharge surface treatment. The object is relatively moved, and in a liquid, a modified layer is formed on the surface of the workpiece by discharge energy supplied between the discharge surface treatment electrode and the workpiece. And the modified layer are relatively moved, and the modified layer is shaped by discharge energy supplied between the wire electrode and the modified layer in the air.
また、 窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガス の混合ガスの雰囲気中にて、 前記ワイヤ電極と前記改質層との極間に供 給する放電エネルギにより、 前記改質層を整形するものである。  The modified layer is formed by discharging energy supplied between the wire electrode and the modified layer in an atmosphere of a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas. It is to shape.
この発明に係る放電表面処理装置は、 放電表面処理用電極を用いて放 電加工により被加工物表面に改質層を形成する放電表面処理装置におい て、 前記放電表面処理用電極又はワイヤ電極と前記被加工物を相対移動 可能な相対移動手段と、 前記放電表面処理用電極又は前記ワイヤ電極と 前記被加工物との極間に放電エネルギを供給する放電発生手段と、 前記 ワイヤ電極を前記被加工物に対して送給するワイヤ電極走行手段と、 前 記被加工物を浸漬するために加工液を供給する加工液供給手段と、 前記 ワイヤ電極と前記被加工物間の放電加工を気中にて行うために加工液を 排出する加工液排出手段とを備えるものである。  An electric discharge surface treatment apparatus according to the present invention is an electric discharge surface treatment apparatus for forming a modified layer on a surface of a workpiece by electric discharge machining using an electric discharge surface treatment electrode. A relative movement means capable of relatively moving the workpiece; a discharge generating means for supplying discharge energy between the discharge surface treatment electrode or the wire electrode and a pole between the workpiece; Wire electrode traveling means for feeding a workpiece, machining fluid supply means for supplying a machining fluid for immersing the workpiece, and discharge machining between the wire electrode and the workpiece. And a working fluid discharging means for discharging the working fluid in order to perform the process.
また、 前記ワイヤ電極と前記被加工物との間隙に、 窒素ガス、 窒素化 合物ガス、 又は窒素化合物ガス及び窒素ガスの混合ガスを供給する噴射 手段を備えるものである。  Further, an injection means for supplying a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas into a gap between the wire electrode and the workpiece.
また、 前記被加工物を覆うチャンバと、 このチャンバ内に窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガスの混合ガスを供給す る供給手段とを備えるものである。 A chamber covering the workpiece; nitrogen gas in the chamber; A supply means for supplying a nitrogen compound gas or a mixed gas of a nitrogen compound gas and a nitrogen gas.
この発明は、 以上のように構成されているので、 被加工物の表面に、 良質かつ、 より滑らかな改質層を形成することができる効果がある。 図面の簡単な説明  Since the present invention is configured as described above, there is an effect that a high quality and smoother modified layer can be formed on the surface of the workpiece. BRIEF DESCRIPTION OF THE FIGURES
第 1図は、 この発明の実施の形態 1に係る放電表面処理装置を示す構 成図である。  FIG. 1 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 1 of the present invention.
第 2図は、 この発明の実施の形態 2に係る放電表面処理装置を示す構 成図である。  FIG. 2 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
第 3図は、 この発明の実施の形態 2に係る放電表面処理装置を示す構 成図である。  FIG. 3 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention.
第 4図は、 従来の放電表面処理装置の構成図である。 発明を実施するための最良の形態  FIG. 4 is a configuration diagram of a conventional discharge surface treatment apparatus. BEST MODE FOR CARRYING OUT THE INVENTION
実施の形態 1 . Embodiment 1
第 1図は、 この発明の実施の形態 1に係る放電表面処理装置を示す構 成図であり、 1 1は、 例えば打ち抜き型、 押し出し型等の金型材である、 被加工物、 1 2はワイヤ電極、 1 3は被加工物 1 1を載置するテーブル 定盤、 1 4 、 1 5は 2次元方向に移動するように互いに直交して配置さ れた Xテーブル及び Yテーブル、 1 6は Xテーブル 1 4を駆動する X軸 駆動装置、 1 7は Yテーブル 1 5を駆動する Y軸駆動装置であり、 X軸 駆動装置 1 6及び Y軸駆動装置 1 7は、 被加工物 1 1 とワイヤ電極 1 2 との位置関係を相対的に変化させる相対移動手段を構成している。 この 相対移動手段としては、 背景技術において説明した相対移動手段を用い ることができる。 また、 1 8は数値制御装置、 1 9は数値制御装置 1 8 内に具備された軌跡移動制御手段、 2 0 aはワイヤリール、 2 O bはヮ ィャ駆動ローラであり、 ワイヤリール 2 0 a及びワイヤ駆動ローラ 2 0 bはワイヤ電極走行手段を構成している。 また、 2 1は被加工物 1 1 と ワイヤ電極 1 2との間に放電エネルギを供給する放電発生手段である電 源装置であり、 直流電源、 スイッチング素子及び制御回路等から構成さ れている。 FIG. 1 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 1 of the present invention, where 11 is a die material such as a punching die, an extrusion die, etc. A wire electrode, 13 is a table surface on which the workpiece 11 is placed, 14 and 15 are X and Y tables arranged orthogonal to each other so as to move in a two-dimensional direction, and 16 is An X-axis driving device for driving the X-table 14, 17 is a Y-axis driving device for driving the Y-table 15, and the X-axis driving device 16 and the Y-axis driving device 17 are provided with the workpiece 11. It constitutes a relative moving means for relatively changing the positional relationship with the wire electrode 12. As the relative moving means, the relative moving means described in the background art can be used. Also, 18 is a numerical controller, 19 is a numerical controller 18 Locus movement control means provided therein, 20a is a wire reel, 2Ob is a wire drive roller, and the wire reel 20a and the wire drive roller 20b constitute wire electrode running means. I have. Reference numeral 21 denotes a power supply device which is a discharge generating means for supplying discharge energy between the workpiece 11 and the wire electrode 12, and includes a DC power supply, a switching element, a control circuit, and the like. .
被加工物 1 1には、 背景技術で示した第 4図のような構成の放電表面 処理装置により、 例えば放電表面処理用電極の側面を利用して加工液中 にて放電表面処理が施され、 被加工物 1 1の所定部分には改質層 1 1 a が形成される。 このように、 加工液中にて被加工物 1 1に改質層 1 1 a を形成後、 例えばバルブを開として加工液を排出可能な図示しない加工 液排出手段により加工液を排出する。 次に、 第 1図のように、 被加工物 1 1に形成された改質層 1 1 aとワイヤ電極 1 2の間を相対移動手段を 構成する X軸駆動装置 1 6及び Y軸駆動装置 1 7により所定の間隙に調 整し、 ワイヤ電極走行手段を構成するワイヤリール 2 0 a、 ワイヤ駆動 ローラ 2 0 b等によりワイヤ電極 1 2を走行させると共に数値制御装置 1 8内に具備された軌跡移動制御手段 1 9からの指令に基づき、 相対移 動手段を構成する X軸駆動装置 1 6及び Y軸駆動装置により、 ワイヤ電 極 1 2を被加工物 1 1の改質層面に沿って軌跡移動させ、 放電発生手段 である電源装置 2 1により被加工物 1 1 とワイヤ電極 1 2の間に放電工 ネルギを供給し、 改質層 1 1 aとワイヤ電極 1 2との間に加工液を介さ ずに気中にて放電を生じさせ、 改質層 1 1 a表面の除去加工を行う。 次に、 この発明において、 ワイヤ電極による放電加工を気中にて行う 理由について説明する。  The workpiece 11 is subjected to a discharge surface treatment in a machining fluid using, for example, the side surface of the electrode for discharge surface treatment by a discharge surface treatment apparatus having a configuration as shown in FIG. 4 shown in the background art. A modified layer 11 a is formed on a predetermined portion of the workpiece 11. In this way, after forming the modified layer 11a on the workpiece 11 in the working fluid, the working fluid is discharged by a working fluid discharge unit (not shown) capable of discharging the working fluid by, for example, opening a valve. Next, as shown in FIG. 1, an X-axis driving device 16 and a Y-axis driving device constituting a relative moving means between the modified layer 11 a formed on the workpiece 11 and the wire electrode 12. The gap is adjusted to a predetermined value by 17 and the wire electrode 12 is run by a wire reel 20a, a wire drive roller 20b, etc., which constitutes the wire electrode running means, and is provided in the numerical controller 18 Based on a command from the trajectory movement control means 19, the wire electrode 12 is moved along the modified layer surface of the workpiece 11 by the X-axis drive device 16 and the Y-axis drive device constituting the relative movement means. The trajectory is moved, and a discharge energy is supplied between the workpiece 11 and the wire electrode 12 by the power supply device 21 which is a discharge generating means, and is processed between the modified layer 11 a and the wire electrode 12. Discharge is generated in the air without passing through the liquid, and the surface of the modified layer 11a is removed. Next, the reason why the electric discharge machining using the wire electrode is performed in the air in the present invention will be described.
加工液中にて放電加工を行う場合は、 加工液は気体に比べて圧縮性が 小さいため、 放電により大きな放電爆圧が発生し、 この放電爆圧を受け ガイ ド間のワイヤ電極が振動するため、 より高精度な加工を行 うことができない。 このような加工液の特性から、 加工液中でのワイヤ 電極による放電加工は、 この発明が対象とする放電表面処理により被加 ェ物に形成された改質層(厚さが数 m〜数十/ z m程度)の表面粗さ(例 えば最大高さが数 m程度以下) をより小さくするための加工には適し ていない。 When performing EDM in a machining fluid, the machining fluid is less compressible than gas, so the discharge generates a large discharge explosion pressure, Since the wire electrode between the guides vibrates, it is not possible to perform more precise processing. Due to such characteristics of the machining fluid, electric discharge machining using a wire electrode in the machining fluid is performed by a modified layer (having a thickness of several m to several m) formed on the workpiece by the discharge surface treatment targeted by the present invention. It is not suitable for processing to reduce the surface roughness (for example, the maximum height is about several meters or less).
従って、 この発明においては、 気中での放電加工を採用するものであ り、 気中にてワイヤ電極 1 2により放電加工を行うことにより、 加工反 力が非常に小さくなるため、 ワイヤ電極の振動が抑制され、 より高精度 の加工を行うことができる。 従って、 改質層 1 1 aをより滑らかに整形 することができ、 改質層 1 1 aの表面粗さを小さくすることができる。  Therefore, in the present invention, electric discharge machining in the air is employed, and by performing electric discharge machining with the wire electrode 12 in the air, the machining reaction force becomes extremely small. Vibration is suppressed, and higher precision processing can be performed. Therefore, the modified layer 11a can be shaped more smoothly, and the surface roughness of the modified layer 11a can be reduced.
この発明に係る一連の放電表面処理作業が終了した後、 別の被加工物 に対して、 同様の作業を行う場合には、 被加工物を加工液に浸漬する必 要がある。 この加工液の供給は、 例えば、 ポンプ等から構成される加工 液供給手段により加工槽内に加工液を供給することにより行うことがで さる。  After the series of discharge surface treatment operations according to the present invention has been completed, when performing the same operation on another workpiece, it is necessary to immerse the workpiece in the working fluid. The supply of the processing liquid can be performed by, for example, supplying the processing liquid into the processing tank by a processing liquid supply unit including a pump or the like.
以上のように、 1次加工として、 加工液中にて放電表面処理により被 加工物に形成された改質層に、 更に 2次加工として、 気中にてワイヤ電 極により放電加工を行うことにより、 良質、 かつ、 より滑らかな表面粗 さを持つ改質層の形成を実現することができる。  As described above, electric discharge machining is performed on the modified layer formed on the workpiece by electric discharge surface treatment in the machining fluid as the primary machining, and further, in the air using the wire electrode in the air as the secondary machining. Accordingly, it is possible to form a modified layer having good quality and smoother surface roughness.
実施の形態 2 . Embodiment 2
第 2図は、 この発明の実施の形態 2に係る放電表面処理装置を示す構 成図であり、 実施の形態 1の第 1図と同一符号は同一又は相当部分を示 している。 第 2図において、 2 2は噴射手段、 2 3は噴射手段 2 2によ り噴射される窒素ガス、 アンモニアガス等の窒素化合物ガス、 又は窒素 化合物ガス及び窒素ガスの混合ガスである。 第 2図は、 第 1図における 改質層 1 1 aとワイヤ電極 1 2との間隙近傍に 2 2の噴射手段を付加し た構成からなり、 図示しない供給源から導かれた窒素ガス、 窒素化合物 ガス、 又は窒素化合物ガス及び窒素ガスの混合ガス 2 3を、 被加工物 1 1の改質層 1 1 aとワイヤ電極 1 2との間隙に噴射手段 2 2により噴射 供給して、 窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガ スの混合ガスの雰囲気中で放電加工 (実施の形態 1で示した 2次加工) を行うものである。 FIG. 2 is a configuration diagram showing a discharge surface treatment apparatus according to Embodiment 2 of the present invention. The same reference numerals as in FIG. 1 of Embodiment 1 indicate the same or corresponding parts. In FIG. 2, reference numeral 22 denotes injection means, and reference numeral 23 denotes nitrogen gas, nitrogen compound gas such as ammonia gas, or a mixed gas of nitrogen compound gas and nitrogen gas injected by the injection means 22. Fig. 2 It has a configuration in which 22 injection means are added in the vicinity of the gap between the reformed layer 11a and the wire electrode 12. Nitrogen gas, nitrogen compound gas, or nitrogen compound gas and nitrogen introduced from a supply source (not shown) The gas mixture 23 is injected and supplied by the injection means 22 into the gap between the reformed layer 11a of the workpiece 11 and the wire electrode 12 to supply nitrogen gas, nitrogen compound gas, or nitrogen compound gas. And electrical discharge machining (secondary machining described in Embodiment 1) in an atmosphere of a mixed gas of nitrogen and nitrogen gas.
このような方法によれば、 実施の形態 1と同様に、 改質層 1 1 aの表 面粗さを小さくすることができると共に、 改質層 1 1 aの表面にさらに 窒素化合物が形成されるため、 被加工物 1 1の耐摩耗性を向上すること ができる。  According to such a method, similarly to Embodiment 1, the surface roughness of the modified layer 11a can be reduced, and a nitrogen compound is further formed on the surface of the modified layer 11a. Therefore, the wear resistance of the workpiece 11 can be improved.
第 3図は、 第 2図における被加工物 1 1を覆うべく、 Xテーブル 1 4 上に被加工物 1 1 と Xテーブル 1 4、 Yテーブル 1 5の相対移動に必要 な最小限の開口部を有したチヤンバ 2 4を取り付けた状態を示す図であ り、 2 5は窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガ スの混合ガスの供給手段である。 供給手段 2 5にはチャンバ 2 4へのガ ス供給量を任意に調整可能な流量調整手段が設けられている。  Fig. 3 shows the minimum opening required for the relative movement of the work 11 and the X table 14 and the Y table 15 on the X table 14 to cover the work 11 in Fig. 2. It is a figure which shows the state which attached the chamber 24 which has a gas, and 25 is a supply means of the nitrogen gas, the nitrogen compound gas, or the mixed gas of the nitrogen compound gas and the nitrogen gas. The supply means 25 is provided with a flow rate adjusting means capable of arbitrarily adjusting the gas supply amount to the chamber 24.
チャンバ 2 4内に充填された窒素ガス、 又は窒素化合物ガス、 又は窒 素化合物ガス及び窒素ガスの混合ガスの雰囲気中で、 被加工物 1 1の改 質層 1 1 aとワイヤ電極 1 2との間で放電させることにより、 第 2図の 構成における場合と同様の効果をより効率的に得ることができる。 産業上の利用可能性  In the atmosphere of the nitrogen gas or the nitrogen compound gas or the mixed gas of the nitrogen compound gas and the nitrogen gas filled in the chamber 24, the modified layer 11a of the workpiece 11 and the wire electrode 12 are The same effect as in the configuration of FIG. 2 can be obtained more efficiently by discharging the battery between the two. Industrial applicability
以上のように、 この発明に係る放電表面処理方法及び装置は、 被加工 物表面に改質層を形成する表面処理関連産業に用いられるのに適してい る。  As described above, the discharge surface treatment method and apparatus according to the present invention are suitable for being used in a surface treatment related industry for forming a modified layer on the surface of a workpiece.

Claims

請 求 の 範 囲 The scope of the claims
1 . 放電表面処理用電極を用いて放電加工により被加工物表面に改質 層を形成する放電表面処理方法において、 1. In a discharge surface treatment method of forming a modified layer on the surface of a workpiece by electric discharge machining using an electrode for discharge surface treatment,
前記放電表面処理用電極と前記被加工物とを相対移動せしめ、 液中に て、 前記放電表面処理用電極と前記被加工物との極間に供給する放電工 ネルギにより、 前記被加工物表面に改質層を形成した後、  The electrode for discharge surface treatment and the workpiece are relatively moved to each other, and in a liquid, the surface of the workpiece is formed by discharge energy supplied between the electrode for discharge surface treatment and the workpiece. After forming the modified layer on
ワイヤ電極と前記改質層を相対移動せしめ、 気中にて、 前記ワイヤ電 極と前記改質層との極間に供給する放電エネルギにより、 前記改質層を 整形することを特徴とする放電表面処理方法。  A discharge characterized by relatively moving a wire electrode and the modified layer, and shaping the modified layer by discharge energy supplied between the wire electrode and the modified layer in the air. Surface treatment method.
2 . 請求の範囲 1において、 前記気中が、 窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガスの混合ガスの雰囲気中であることを特 徵とする放電表面処理方法。  2. The discharge surface treatment method according to claim 1, wherein the air is an atmosphere of a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas.
3 . 放電表面処理用電極を用いて放電加工により被加工物表面に改質 層を形成する放電表面処理装置において、  3. In a discharge surface treatment apparatus that forms a modified layer on the surface of a workpiece by electric discharge machining using an electrode for discharge surface treatment,
前記放電表面処理用電極又はワイヤ電極と前記被加工物を相対移動可 能な相対移動手段と、  Relative movement means capable of relatively moving the discharge surface treatment electrode or wire electrode and the workpiece;
前記放電表面処理用電極又は前記ワイヤ電極と前記被加工物との極間 に放電エネルギを供給する放電発生手段と、  Discharge generating means for supplying discharge energy between the electrode for the discharge surface treatment or the wire electrode and the workpiece;
前記ワイヤ電極を前記被加工物に対して送給するワイヤ電極走行手段 と、  Wire electrode running means for feeding the wire electrode to the workpiece,
前記被加工物を浸漬するために加工液を供給する加工液供給手段と、 前記ワイヤ電極と前記被加工物間の放電加工を気中にて行うために加 ェ液を排出する加工液排出手段とを備えることを特徴とする放電表面処  A machining fluid supply means for supplying a machining fluid to immerse the workpiece, and a machining fluid discharge means for discharging a machining fluid for performing electric discharge machining between the wire electrode and the workpiece in the air. Discharge surface treatment characterized by comprising:
4 . 請求の範囲 3において、 前記ワイヤ電極と前記被加工物との間隙 に、 窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガスの混 合ガスを供給する噴射手段を備えることを特徴とする放電表面処理装置。4. The gap between the wire electrode and the workpiece according to claim 3. And a discharge means for supplying a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas.
5 . 請求の範囲 3において、 前記被加工物を覆うチャンバと、 このチ ヤンバ内に窒素ガス、 窒素化合物ガス、 又は窒素化合物ガス及び窒素ガ スの混合ガスを供給する供給手段とを備えることを特徴とする放電表面 処理装置。 5. The method according to claim 3, further comprising: a chamber that covers the workpiece; and a supply unit that supplies a nitrogen gas, a nitrogen compound gas, or a mixed gas of a nitrogen compound gas and a nitrogen gas into the chamber. Discharge surface treatment equipment.
PCT/JP1999/006347 1999-11-15 1999-11-15 Method and device for electric discharge surface treatment WO2001036709A1 (en)

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PCT/JP1999/006347 WO2001036709A1 (en) 1999-11-15 1999-11-15 Method and device for electric discharge surface treatment
TW088120497A TW469203B (en) 1999-11-15 1999-11-24 Method for treating a surface with electric discharge and apparatus therefor

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WO2016046922A1 (en) 2014-09-24 2016-03-31 三菱電機株式会社 Wire electrical discharge machining apparatus and semiconductor wafer manufacturing method
CN108080756A (en) * 2017-11-24 2018-05-29 西安工业大学 A kind of cutting method of conductor material

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115631A (en) * 1974-02-26 1975-09-10
JPH0770761A (en) * 1993-08-31 1995-03-14 Res Dev Corp Of Japan Surface treating method of aluminum and alloy thereof by discharge in liquid
JPH10235521A (en) * 1997-02-27 1998-09-08 Fuji Xerox Co Ltd Electric discharge machining device and electric discharge machining method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50115631A (en) * 1974-02-26 1975-09-10
JPH0770761A (en) * 1993-08-31 1995-03-14 Res Dev Corp Of Japan Surface treating method of aluminum and alloy thereof by discharge in liquid
JPH10235521A (en) * 1997-02-27 1998-09-08 Fuji Xerox Co Ltd Electric discharge machining device and electric discharge machining method

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