WO2001015193A1 - Systemes et procede de balayage haute performance - Google Patents

Systemes et procede de balayage haute performance Download PDF

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Publication number
WO2001015193A1
WO2001015193A1 PCT/US1999/029351 US9929351W WO0115193A1 WO 2001015193 A1 WO2001015193 A1 WO 2001015193A1 US 9929351 W US9929351 W US 9929351W WO 0115193 A1 WO0115193 A1 WO 0115193A1
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WIPO (PCT)
Prior art keywords
voice coil
polymer
scanning
anay
lens
Prior art date
Application number
PCT/US1999/029351
Other languages
English (en)
Inventor
David Stern
Original Assignee
Affymetrix, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/383,986 external-priority patent/US6545264B1/en
Application filed by Affymetrix, Inc. filed Critical Affymetrix, Inc.
Priority to AU20501/00A priority Critical patent/AU773664B2/en
Priority to EP99964213A priority patent/EP1218915A4/fr
Priority to JP2001519460A priority patent/JP2003507777A/ja
Publication of WO2001015193A1 publication Critical patent/WO2001015193A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0036—Scanning details, e.g. scanning stages
    • G02B21/0048—Scanning details, e.g. scanning stages scanning mirrors, e.g. rotating or galvanomirrors, MEMS mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/0076—Optical details of the image generation arrangements using fluorescence or luminescence
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor

Definitions

  • the present invention generally relates to the fields of imaging and scanning.
  • the present invention provides scanning systems and methods for high speed scanning and imaging of a sample containing labeled materials, for example scanning arrays of polymer sequences such as oligonucleotide arrays.
  • Polymer arrays for example, DNA arrays, are known as shown in patent application U.S.S.N. 08/81 1 ,829 ('829 and U S. Patent Nos 5.744,305; 5,445,936; and 5,677, 195; which are hereby incorporated by reference in their entirety for all purposes.
  • the polymer arrays such as the GeneChip® probe array (Affyrnetrix, Inc., Santa Clara, CA), can be synthesized using light-directed methods desc ⁇ bed, for example, m U.S.
  • an array contaimng synthesized single stranded nucleic acids such as DNA is enclosed in a protective package, as shown in patent applications U.S.S.Nos. 08/528,173 and 08/485,452 which are hereby incorporated by reference in their entireties for all purposes.
  • the array is contacted with a sample containing single stranded DNA that is labeled using for example fluorescent labels such as fluorescein or phycoeryth ⁇ n, and which hybridizes to the smgle stranded DNA on the array.
  • the array (either packaged or not packaged) is placed into a device generally known as a scanner that obtains a fluorescence image of the array in order to analyze hybridization between the single stranded nucleic acids on the array and in the sample.
  • a scanner may include a confocal microscope with a light source for generating light directed to the polymer array, a photodetection mechanism for detecting light emitted from the polymer array, and a computer controlled translation table that moves the polymer array in three (XYZ) directions.
  • One direction is the fast scan direction (e.g , X direction)
  • another is the slow scan direction (e.g., Y direction)
  • the third direction is a focus direction (e g., Z direction).
  • tne scanner projects a point of light onto a surface ot the poiymer array and is focused by the translation stage m the focus direction, Z direction.
  • the translation stage rectilinearly fast scans the point of light from one side of the polymer array to another by moving the polymer array in for example the X direction, so as to scan one line of the polymer array, point by point.
  • the photodetection mechanism detects the light emitted from the surface of the polymer array so as to obtain a fluorescence image of the polymer array.
  • the translation table moves the polymer array incrementally approximately the thickness of one scan line m the slow scan (Y) direction. This raster scanning continues until the entire surface area of the polymer array has been scanned.
  • the present invention provides systems and methods for image scanning of, for example, polymer arrays
  • the invention provides means for moving a linear translation stage of a scanmng system with a speed of at least 10 scanning lines/second, preferably at least 20 scanning lines/second and more preferably at least 30 scanmng lines/second over a scanning distance of at least 2 mm, preferably at least 5 mm, and more preferably at least 14 mm
  • the scanning system is capable of scanning with pixels having a size of
  • the scanner includes a voice coil to provide scanmng motion for at least one of the X direction, Y direction, and Z direction translation of a polymer array analysis system.
  • the acceleration of the voice-coil-driven axis of the present invention is high (e g , 13 7 G, where G is the acceleration due to gravity) and can not easily be achieved with stepping motors.
  • the high acceleration combined with the high steady-state scan speed of the voice-coil-d ⁇ ven axis (about 22 inches/second), enables the voice coil scanner of the present invention to scan a distance of, for example, 14 mm (length of scan line of one type of polymer array) at 30 lines/second
  • the voice coil scanner ot the present invention can use either stationary optics or a moving scan head
  • the voice-coil-d ⁇ ven axis is the X axis
  • the voice coil d ⁇ ves a hghtweignt linear slide mounted on a 2-ax ⁇ s ( YZ) translation table This linear slide serves as the suppo ⁇ for a polymer array (scanned sample)
  • the voice coil d ⁇ ves a scan head 1 e.
  • a motion control system is provided to momtor and control the motion of the voice coil for fast accurate scanmng of the polymer array.
  • a voice coil for high speed scanmng of polymer arrays in the fast axis (X) direction rather than using a galvanometer d ⁇ ven scanmng mirror, enables the use of a simple low cost objective lens having a high nume ⁇ cal aperture (for example, 0.5 or greater).
  • the objective lens can be, for example. a microscope objective lens or a smgle element asphe ⁇ c lens.
  • This objective lens can have high nume ⁇ cal aperture while being small and inexpensive because it does not have to be co ⁇ ected for off-axis abe ⁇ ations, unlike the objective lens in a galvo scanner All other things being equal (laser power, spot size, etc.), a scanner with an objective nume ⁇ cal aperture of 0 5 operating at 30 lines/second produces images with the same signal-to-noise ratio as a scanner with an objective nume ⁇ cal aperture of 0 25 operating at 7 5 lines/second As a result of using the combination of a voice coil d ⁇ ven translation stage and a simple high efficiency objective lens, the voice coil scanner of the present invention can achieve fast scanmng and high polymer array throughput.
  • the voice coil scanning system of the present invention with an objective lens having a nume ⁇ cal ape ⁇ ure of 0.5 or greater, can achieve accurate and reliable polymer array scanning at a speed of at least 10 lines/second, preferably at least 20 lines/second and more preferably at least 30 lines/second.
  • the present invention provides a scanning system with a simple and inexpensive objective lens and a high acceleration / high speed voice coil driven translation stage that can rapidly scan, for example, 12.8 mm
  • the voice coil provides improved acceleration for fast scanmng of at least one axis of a polymer array.
  • the present invention provides systems and methods for accurate, high speed, low cost scanning of polymer arrays, i.e., high performance cost effective polymer array scanning.
  • FIG. 1 is a top view of one embodiment of a voice-coil-d ⁇ ven translation stage for the scanning system according to the present invention
  • Fig. 2 is an end view of one embodiment of a voice-coil-d ⁇ ven translation stage with an encoder readhead for the scanning system according to the present invention
  • Fig. 3 is a top view of another embodiment of a voice-coil-d ⁇ ven translation stage for the scanning system according to the present invention
  • Fig. 4 is an end view of another embodiment of a voice-coil-d ⁇ ven translation stage and an encoder readhead for the scanning system according to the present invention
  • Fig. 5 is an illustration of a scanmng system according to the present invention having a 3-ax ⁇ s XYZ translation system with one fast axis (X axis) driven by a voice-coil.
  • Fig. 6 is an illustration of a scanning system according to the present invention having a turning prism and objective lens mounted on a single axis voice-coil driven translation stage.
  • Fig. 7 is a block diagram of one embodiment of a motion control system according to the present invention.
  • Scanners may be characte ⁇ zed in one or more of a number of categories.
  • a point-scanning confocal microscope with stationary optics focuses a beam of light to a stationary point and obtains a 2-d ⁇ mens ⁇ onal image by moving the sample (e.g., a polymer array substrate) in 2 dimensions, for example X and Y directions (there may also be a 3 rd dimension, the Z direction, for focusing).
  • Minsky uses a simple magnetic solenoid without computer control to move a flexure translation stage.
  • H.T.M. Van der Voort et al. descnbe a similar but more modern system in Scanning 7, 66-78 (1985). The details for their scanning system is provided in the article HJ.B.
  • confocal microscope scanner is illustrated by a Molecular Dynamics (Sunnyvale, CA) scanner as shown in U.S. Patent No. 5,459,325.
  • This can be called a "pomt-scanning confocal microscope with a moving scan head.”
  • the scan head consists of a turning mirror (or turning pnsm) and objective lens mounted on a single-axis translation stage. As the scan head moves in this confocal microscope scanner, the focused laser beam moves along with it.
  • the sample is mounted on a separate translation table that moves perpendicular to the scan head.
  • the system obtains a 2- dimensional image by oscillating the scan head rapidly in one dimension and moving the sample slowly in another.
  • the scan head is made small and light so that it can move fast.
  • the scan head is actuated with a stepper motor it suffers from a similar limitation in scanning speed as the point- scanning confocal microscope w ith stationary optics due to the stepper motor's slow acceleration
  • the laser beam is always coaxial with the optical axis of the objective lens, and so is the reflected or emitted light (e.g., fluorescent light) that is collected by the objective lens.
  • the objective lens can be relatively simple and inexpensive because it doesn't have to be corrected for off-axis aberrations
  • a na ⁇ ow- angle lens i.e. a lens that only has to focus light onto or nearly onto its optical axis, is easier to design and manufacture and contains fewer optical elements than a wide-angle lens having the same focal length, f number, resolution, etc.
  • an inexpensive 1 or 2-element lens system may be capable of focusing a laser beam to a 3-micron-diameter spot when the laser beam is coaxial with the optical axis of the lens. If the laser beam enters the lens several degrees off axis and consequently focuses several millimeters off axis, it will probably focus to a much larger spot size. If a 3 -micron-diameter spot several millimeters off axis is needed, a more complicated and expensive lens will be required.
  • galvo scanner Another scanner used for polymer array analysis is a galvanometer- scanning confocal microscope ("galvo scanner") as disclosed in patent application U.S.S.N. 08/856,642 ('642), which is hereby incorporated herein by reference in its entirety for all purposes.
  • the galvo (galvanometer) scanner includes a radial direction system with a galvanometer actuating a minor to rapidly scan a laser light spot across a substrate (e.g., a polymer a ⁇ ay)
  • the galvo scanner is much faster than the scanners desc ⁇ bed above, achieving scanning speed of approximately 30 lines/second, but requires a large and expensive objective lens.
  • the galvo scanner uses an angularly oscillating minor (a minor mounted on a galvanometer) to direct the laser beam into an objective lens.
  • the lens focuses the laser beam to a soot that moves back and forth over a distance of 14 mm as the minor oscillates.
  • the objective lens must therefore be conected for abenations up to 7 mm off axis.
  • the same lens is used to collect fluorescence from the sample polymer anay.
  • the sample is mounted on a translation table and the scanner obtams a 2-dimens ⁇ onal image by moving the focused laser spot rapidly back and forth in one dimension and stepping the sample slowly in another.
  • the galvo scanner is potentially very fast because galvanometers can oscillate at tens or hundreds of cycles per second.
  • the objective lens is large and expensive because must be conected for off-axis abenations.
  • the objective lens in the '642 galvo scanner for example, is 4 inches long and 2.5 inches in diameter and contains 6 optical elements. This objective lens has a numerical aperture of only 0.25, which means that it collects only about 1 out of 100 photons emitted by the sample. A higher numerical aperture is desirable.
  • Another galvanometer-scanning confocal microscope is provided by Hewlett-Packard as disclosed in U.S. Patent No. 5,585,639. It is a galvanometer-scanning confocal microscope but contains three multi-element lenses: one lens focuses the laser beam onto the sample, and a pair of lenses collects the fluorescence. Thus, this scanner is also expensive to build.
  • Line scanner Another type of scanner is the "line scanner” which is different from all of the "point scanners” discussed above.
  • Line scanners image an entire scan line at one time.
  • a “line scanner” is disclosed in U.S. Patent Nos. 5,578,832 and 5,834,758, which are hereby incorporated herein by reference for all purposes.
  • This scanner focuses the laser beam not to a point, but to a line a few microns wide and, for example, 14 mm long, so as to image one entire line of the polymer anay sample at a time.
  • An objective lens (or a pair of objectives back to back) collects fluorescence and images the fluorescence onto a linear CCD having 1024 or more pixels.
  • the polymer array sample is mounted on a translation table.
  • the line scanner obtains a 1 -dimensional image with no motion and a 2-d ⁇ mens ⁇ onal image with only one axis of motion. Therefore, the line scanner can potentially be very fast because there is no need for a fast scan axis - scan speed is limited not by mechanical considerations such as the acceleration of a stepping motor connected to a translation table or scan head, but by the speed of the electronics or software.
  • a linear-CCD-based scanner is optically complicated.
  • the present invention provides systems an methods for achieving high speed cost effective scanmng and imaging of a sample containing labeled materials, for example scanmng anays of polymer sequences such as oligonucleotide anays.
  • the invention has a wide range of uses, particularly those requiring quantitative study of a microscopic region from within a larger region. For example, the invention can obtain a fluorescence image of a 14
  • mm x 14 mm area with 1.5 ⁇ m or 3.5 ⁇ m . or smaller pixels.
  • the invention may find application in the field of histology (for studying histochemical stained and immunological fluorescent stained images), or fluorescence in situ hybridization.
  • the invention herein is used to image a packaged polymer anay, for example a GeneChip® probe anay.
  • the invention provides a scanning system capable of
  • Such a system may include, for example, a voice coil that provides increased acceleration and resulting fast scanning speed.
  • a scanner employing a voice coil d ⁇ ven translation stage may combine the speed of a galvo scanner with the optical simplicity of a point-scanning confocal microscope with stationary optics (e.g., the scanner disclosed in USPN 5,631.734 hereby incorporated by reference herein) to obtain accurate
  • Voice coil actuators are direct drive, limited motion devices that utilize a permanent magnet field and a coil winding (conductor) to produce a force proportional to the cunent applied to the coil.
  • an appropriate voice coil is linear actuator voice coil Model No. LA14-24-000 offered by Kimco Magnetics Division of BEI Technologies Inc.
  • Another example of an appropriate voice coil is linear actuator voice coil Model No. LA34-37-000A also offered by Kimco
  • voice coil actuators An applications guide provided by Kimco Magnetics Division, BEI Technologies Inc, San Marcos CA.
  • voice coil actuators An applications guide provided by Kimco Magnetics Division, BEI Technologies Inc, San Marcos CA.
  • voice coils that are useful in the present invention for driving a translation stage.
  • voice coils readily available that can work in the present invention.
  • voice coils could work as well.
  • a voice coil for driving a translation stage in the present invention could be custom designed (i.e., by BEI Kimco or another company) if necessary
  • a voice-coil-d ⁇ ven stage scans 14 mm at a speed of 560 mm/sec, then the time to scan 14 mm is 25 msec. If we allow 4.166 msec for acceleration and another 4.166 msec for deceleration, then the acceleration or deceleration is 134 4 rrvsec ( 13 7 g, where g is the acceleration due to gravity) and the total time to scan one line is 33.333 msec. If the moving parts weigh 0.5 lb. then the force required for 13.7 g of acceleration is 6.85 lb.
  • the BEI Kimco LA14-24-000 voice coil for example, has a force constant of 1.6 lb/amp.
  • the cunent required for 6.85 lb of force is therefore 4.28 A.
  • the coil has a resistance of 7 ohms when hot.
  • the power dissipated in the coil at 4.28 A is therefore 128 W.
  • the cunent is zero, which means that the average power dissipated in the coil is 32 W.
  • the coil has a thermal resistance of 3.4°C W, which means that the coil temperature is 134°C if the ambient temperature is 25°C.
  • the coil is rated for a maximum temperature of 130°C.
  • the scanning system should be constructed so as to take advantage of the fast acceleration of the voice coil while ensuring that the weight the voice coil must move is less than the weignt w hich will cause the voice coil to overheat and fail due to excessive power dissipation
  • the moving part of, for example, an NB Corporation of Ame ⁇ ca (Wood Dale, IL) model SER9A slide weighs approximately 20 grams (see illustration in Fig 2, item 10 and Fig 4 item 25)
  • a va ⁇ ety of linear slides, using either linear or recirculating ball bea ⁇ ngs, linear or recirculating crossed roller bea ⁇ ngs, or air bea ⁇ ngs, may be suitable
  • a packaged DNA anav weighs, for example, 16 grams
  • the moving part of the LAI 4-24-000 voice coil weighs approximately 22 grams If the bracketry that holds all of these moving parts together is designed to weigh, for example, 55 grams, and the scanner is designed so that these are the pnmary components that the voice coil must move, then the total
  • the LA 14-24-000 can provide improved scanning time over conventional scanners that use stepper motors to d ⁇ ve the fast scan axis, i.e., a decrease in the amount of time it takes to scan each line of the fast scan axis when scanning a polymer anay
  • the steady-state scan speed of a scanner using the LA 14-24-000 in inches/second is about 22 inches/second and the acceleration is very high, about 13 7 G (where G is the acceleration due to gravity), enabling the device to scan 14 mm at 30 lines/second This speed is comparable to the maximum scan speed of the galvo scanner
  • the galvo scanner having a low nume ⁇ cal aperture objective lens, may be operated at considerably less than this maximum speed because of lower signal-to-noise ratio at the higher speeds.
  • the voice coil scanner can be designed so that a voice-coil-d ⁇ ven translation stage operates to move either the polymer anay (i.e., similar to the point-scanning confocal microscope with stationary optics previously discussed) or the objective lens and turning minor (similar to the Molecular Dynamics scanner previously discussed) in the fast axis (X) direction.
  • the slow axis (Y direction) and the focus axis (Z direction) can be driven by stepping motors, although voice coils also can be used for these axes.
  • FIG. 1 a first prefened embodiment of the invention having a voice coil d ⁇ ven translation stage mechanized to move the polymer anay in the fast X axis direction is illustrated.
  • This embodiment uses a slide type voice coil.
  • the voice coil scanner of this embodiment has a voice coil translation stage 15 which includes a voice coil magnet and mounting bracket 1 mounted in a stationary manner to the top surface 13 of a 2-ax ⁇ s (YZ) translation table.
  • the voice coil has a moving coil 2 that moves along a slide in the fast axis (X axis) direction in response to cunent provided to wires 3.
  • the voice coil used in this embodiment may be, for example, a BEI Kimco Magnetics Division Voice Coil Linear Actuation Model No.
  • Bracket 4 The moving coil 2 of the voice coil is connected to the movable part 10 of a linear slide by bracket 4.
  • This bracket should be made of a design ana mate ⁇ al so that it is light weight so as to require minimal translation force and strong enough to remain rigid during oscillation of the linear slide.
  • the bracket may be made of steel or aluminum and have a weight of up to 55 grams.
  • bracket 4 is illustrated as one piece it may be made of multiple pieces.
  • Bracket 4 has a surface 5 upon which an encoder scale 8 is mounted. The encoder scale 8 operates with the encoder readhead 11 to monitor the position of a polymer anay sample 9 mounted to the sample mounting surface 6 of bracket 4.
  • the weight of the encoder scale should also be minimized as much as possible since it is connected to the moving parts of the voice coil translation stage.
  • the readhead 1 1 is mounted to the top surface 13 of the 2-ax ⁇ s translation stage by readhead mounting bracket 12.
  • the readhead 11 and the scale 8 may be, for example, a Remshaw Inc. (Schaumburg, IL) RGH22Z readhead and a Renishaw RGS-S scale, respectively.
  • the stationary guide portion 7 of the linear slide is mounted to the top surface 13 of the 2-ax ⁇ s translation table.
  • the linear slide should be selected so that the weight of the moving part 10 and friction coefficient of the linear slide is minimized so that the force require by the voice coil and thereby the power dissipation of the voice coil are within the thermal capability of the voice coil
  • the linear slide may be, for example. NB Corporation of Ame ⁇ ca crosse ⁇ roller bea ⁇ ng linear slide, model SER9A. or any other call bearing, crossed roller bea ⁇ ng, or air beanng linear slide that meets the mechanical and operational qualities for reliable fast axis translation of the polymer array
  • the 2-axis translation table having top surface 13 may be, for example, a JMAR Precision System 2-ax ⁇ s Slimline or Microlme translation table or any other translation table that can provide reliable 2-axis translation. As illustrated in Fig.
  • the translation table will provide movement in the slow axis (Y axis) direction and the focus axis (Z axis) direction. If a 3-ax ⁇ s translation table with sufficiently long travel is used, the present invention has the capability of scanning an entire wafer of polymer anays sequentially, one anay at a time.
  • the voice coil translation stage 15 is provided a d ⁇ ving cunent from an amplifier (e.g., a servoamplifier) through wires 3
  • the moving part 2 of the voice coil moves the bracket 4, encoder scale 8, polymer anay 9, and moving part 10 of the linear slide in the fast axis x direction along the guide part 7 of the linear slide.
  • a control system senses the location of the polymer array 9 using information from the encoder readhead 1 1 and indicates when one complete translation in the x direction is complete. Once one complete x direction fast axis scan is complete the translation table will index approximately the width of one fast scan line in the slow axis Y direction and the controller will trigger another fast scan by the voice coil. This sequence occurs repeatedly until the entire polymer anay, or a predefined portion thereof, has been scanned by a confocal microscope image system.
  • FIG. 3 and 4 illustrates another prefened embodiment of the invention having a voice coil driven translation stage mechanized to move a scanning beam of light across a polymer anay in the fast X axis direction.
  • This embodiment uses a plunger type voice coil, for example, a BEI Kimco model LA34-37-000A or any other voice coil having similar mechanical and elect ⁇ cal characteristics.
  • the voice coil scanner of this embodiment has a voice coil translation stage 30 which includes a voice coil mounting bracket 16, a voice coil magnet and housing 17 (stationary part of the voice coil), an elect ⁇ cal coil winding section 18 (moving part of the voice coil), and wires 19 connecting to the coil 18.
  • the voice coil mounting bracket 16 is not mounted to the top surface 13 of the 2-axis translation stage. Rather, the voice coil mounting bracket 16 can be mounted to another structure which is preferably stationary relative to the confocal microscope image system used in the scanmng system.
  • the moving coil 18 of the voice coil is connected to the moveable part 25 of a linear slide by bracket 20.
  • This bracket should be made of a design and material so that it is lightweight so as to require minimal translation force and strong enough to remain ⁇ gid during oscillation of the linear slide.
  • the bracket may be made of steel or aluminum and have a weight in the range of up to 0.5 lb.
  • bracket 20 is illustrated as one piece it may be made of multiple pieces.
  • Bracket 20, like bracket 4 of the previous embodiment, has a surface upon which an encoder scale 21 is mounted. A turning minor, penta-prism, or ⁇ ght-angle p ⁇ sm 22 (reflector) and objective lens 23 are mounted on the bracket 20 opposite the encoder scale 21.
  • the encoder scale 21 operates with the encoder readhead 27 to monitor the position of the scan head. To minimize image distortion due to pitch and yaw of the linear slide, encoder scale 21 should be as close as possible to the focal point of lens 23.
  • the encoder scale 21, turning prism 22, and objective lens 23, should be light weight to ensure the voice coil does not overheat.
  • the readhead 27 and the scale 21 may be, for example, a Renishaw RGH22Z readhead and a Renishaw RGS-S scale. However, another type of position sensing system may be used, for example a Zeiss encoder.
  • the readhead 27 is mounted to the top surface 26 of an optical breadboard, for example a Newport Corp (Irvine, CA) RG se ⁇ es breadboard, by read head mounting bracket 28.
  • the guide portion 24 of the linear slide is mounted to the top surface 26 of the optical breadboard.
  • the linear slide should be selected so that the weight of the moving part 25 is minimized to minimize the force required by the voice coil and thereby the power dissipation of the voice coil are within the thermal capability of the voice coil.
  • the linear slide may be, for example, Parker/Daedel (Harrison City, PA) crossed roller bearing linear slide model CR4501, or any other ball bearing, crossed roller bearing, or air bearing linear slide with sufficient straightness and flatness of travel and sufficiently light weight that it can operate at the desired speed.
  • the moving parts are much heavier (for example, 2 lb) than in the previous embodiment.
  • the voice-coil-driven linear stage is still able to scan 14 mm at 30 lines/second without overheating because of the thermal and electrical characteristics of the LA34-37-000A voice coil (the force constant is 5.4 lb/amp, the resistance is 1.4 ohms, and the thermal resistance is 2.2 degrees C per watt).
  • the guide portion 24 of the linear slide is not directly connected to the top surface 13 of the 2-axis (or 3 axis) translation table. Rather the 2-axis translation table having top surface 13 has the polymer anay sample 9 mounted directly to it and is adjacent to the voice coil d ⁇ ven translation stage. The surface of polymer anay 9 is perpendicular to the optical axis of scan head objective lens 23.
  • the 2-axis translation table having top surface 13. may be for example, JMAR Precision System 2-axis Slimline or Microline translation table or any other translation table that can provide reliable 2-axis translation. As illustrated in Fig 4, the translation table will provide movement of the polymer anay m the slow axis (Y) direction and the focus axis (Z) direction.
  • the voice coil translation stage 30 is provided a driving cunent from an amplifier (e.g., a servoamplifier) through wires 19.
  • the moving part 18 of the voice coil moves the bracket 20, encoder scale 21, turning mirror or prism 22, objective lens 23, and moving part 25 of the linear slide in the fast axis (X) direction along the guide part 24 of the linear slide.
  • the scan head comprised of the turning minor or prism 22 and the objective lens 23 mounted on the bracket 20 will scan a point of light from a laser light beam on to the surface of the polymer anay 9 in a linear manner in the fast axis (X) direction.
  • a control system senses the location of the scan head using information from the encoder readhead 27 and indicates when one complete translation in the X direction has been completed.
  • the translation table will index approximately the width of one fast scan line in the slow axis (Y) direction and the controller will t ⁇ gger another fast scan by the voice coil. This sequence occurs repeatedly until the entire polymer anay. or a predefined po ⁇ ion thereof, has been scanned.
  • the x direction axis of the 3-axis translation table will then move to the next polymer anay on the wafer and the above desc ⁇ bed polymer anay scanmng sequence will be repeated.
  • the translation table will move in the slow axis (Y) direction to the next row of anays to be scanned. These steps will be repeated until the entire wafer of polymer anays has been scanned.
  • Figures 5 and 6 illustrate two alternative confocal imaging systems that may be used for the present invention in detecting, for example, florescence emitted by targets bound to the polymer anays.
  • Alternative confocal imaging systems that may be modified to use a voice coil fast axis translation stage include those found in USPN 5,631,734 and U.S. Application Ser. No. 08/856,642, which are hereby incorporated herein for all purposes.
  • the system of U.S. Application Ser. No. 08/856,642 would be further modified to eliminate the galvo scanning minor and to have a simple inexpensive objective lens mounted in a stationary position or within a scan head.
  • a brief desc ⁇ ption of the configuration and operation of the confocal imaging systems shown in Figs. 4 and 5 follows. A more detailed understanding of the overall operation of the confocal imaging systems desc ⁇ bed herein can be obtained by reading USPN 5.63 1 ,734 and U.S Application Ser. No 08/856,642, herein incorporated by reference
  • Figure 5 illustrates a confocal imaging system having a stationary (fixed position) objective lens 1 15.
  • the sample 9 is mounted on a 3-axis translation stage 15 having a voice-coil-d ⁇ ven fast (X) axis.
  • the confocal imaging system includes a laser 103 for generating a laser light beam that is transmitted through beamsplitter 104, reflected by dichroic beamsplitter 1 14, and focused by objective lens 1 15 onto the surface of polymer anay sample 9.
  • the laser light that is reflected by the surface of polymer anay sample 9 is collimated by objective lens 115, reflected by dichroic beamsplitter 114 and beamsplitter 104, and focused by lens 102 onto pinhole 101.
  • the portion of the reflected laser light that is transmitted through pinhole 101 is detected by photodiode 100.
  • Photodiode 100 provides a signal to a controller to adjust the position of the sample so that the laser beam is focused on the surface of the polymer anay sample 9.
  • the controller will activate, for example, a stepper motor m the 2-axis (YZ) translation table so as to move the translation table in the focus axis (Z) direction until the laser light beam is properly focused on the surface of the polymer anay sample 9.
  • the sample is mounted on a 2-axis (XY) translation stage having a voice-coil-driven fast (X) axis
  • the objective lens is mounted on a separate single-axis (Z) translation stage.
  • the Z translation stage can be very small and light (for example, the "PIFOC" piezoelectric microscope focusing device available from Polytec PI. Inc., Auburn, MA) because only the objective lens is mounted to it.
  • the confocal imaging system of Fig. 5 also includes two photomultiplier tubes (PMT) 105 and 1 12. each one for detecting fluorescence having a particular range of wavelengths emitted from the surface of the polymer anay sample.
  • PMT 112 may detect fluorescence from fluorescein-labeled target molecules
  • PMT 105 may detect fluorescence from phycoerythrin-labeled target molecules.
  • the PMT may be, for example, a Hamamatsu R4457 or R6357 photomultiplier tube , or any other PMT having sufficiently high quantum efficiency at the wavelengths of interest and sufficiently low dark cunent.
  • Various types of light detectors other than a PMT also may be used, including photodiodes, avalanche photodiodes, phototransistors, vacuum photodiodes, and other light detectors.
  • the confocal imaging system of Fig. 5 further includes optical trains to separate, for example, two unique colors of fluorescent light.
  • a first color fluorescent light is emitted from a particular marked target on the polymer anay sample 9 surface, collimated by objective lens 1 15, transmitted through dichroic beam splitters 113 and 114, lens 110, pinhole 108, and bandpass filter 106, and sensed by PMT 105.
  • a second color fluorescent light different from the first color fluorescent light is emitted from a different particular marked target on the polymer a ⁇ ay sample 9 surface, collimated by objective lens 1 15, transmitted through dichroic beam splitter 1 14, reflected by dichroic beamsplitter 1 13, transmitted through lens 1 1 1 1 , pinhole 109, and bandpass filter 107, and sensed by PMT 1 12.
  • Figure 6 illustrates a confocal imaging system having an objective lens
  • the sample 9 is mounted on a separate 2-axis (YZ) translation stage.
  • Laser 103 produces a laser light beam that is transmitted through beamsplitter 104, reflected by dichroic beamsplitter 114 and turning minor or p ⁇ sm 22, and focused by objective lens 23 onto the polymer anay sample 9 surface.
  • the scan head moves back and forth in the X direction, the laser beam and the collected fluorescence remain centered on minor or prism 22 and objective lens 23.
  • Lens 102, pinhole 101, and photodiode 100 are used for detection of reflected laser light and provide the sensing capability for adjusting the focus of the laser light beam.
  • Lens 110, pinhole 108, bandpass filter 106 (or longpass filter), and PMT 105 enable sensing of, for example, one color fluorescent light emitted by one type of target on the polymer anay 9 surface.
  • this confocal imaging system can only detect, for example, one color fluorescent light emitted from one type of target on the polymer anay surface because it does not include dichroic beamsplitter 1 13, lens 1 1 1, pinhole 109, and PMT 1 12
  • the voice coil translation stage 30 has a turning p ⁇ sm 2 and objective lens 23 securely mounted on a scan head.
  • the laser light beam from laser 103 is reflected by dichroic beamsplitter 1 14 onto turning p ⁇ sm 22 and through the objective lens coaxial with the objective lens's optical axis.
  • the laser light beam st ⁇ kes the turning p ⁇ sm 22 surface at the same location and remains coaxial with the optical axis of the objective lens 23 throughout the fast axis (X) translation of the scanmng head.
  • the laser light beam scans a line on the surface of the polymer anay in the fast axis (X) direction using the movement of the scan head rather than the movement of the polymer anay sample 9.
  • a system having 2 PMTs as shown in Fig 5 can be used with a moving scan head instead of stationary optics.
  • a system having one PMT as shown in Fig 6 can be used with stationary optics instead of a moving scan head.
  • the confocal imaging system of the present invention could have any number of lasers, PMTs and related optical trains, as many as the number of different types of light to be uniquely detected.
  • a slide-type voice coil can be used to operate a moving scan head and a plunger-type voice coil can be used with stationary optics, or vice versa.
  • the objective lens for a voice coil polymer anay scanner can be a microscope objective (for example Rolyn Optics, Covina CA, model 80.3090, 0 65 nume ⁇ cal aperture) or a single-element asphe ⁇ c lens (for example ThorLabs. Newton NJ, model 350330-A, 0.68 nume ⁇ cal aperture)
  • a single- element asphe ⁇ c lens is significantly smaller and lighter than a microscope objective and thus may be better for the scan head embodiment of the present invention.
  • a single-element asphe ⁇ c objective lens is not conected for chromatic abenations, but if the focal length is small enough, chromatic conection may not be necessary
  • the ThorLabs 350330-A has a focal length of 3.1 mm, and the axial color at 580 run (approximately the phycoeryth ⁇ n emission peak) is only about 0.33 microns per nanometer (i.e. 0.33 micron change in focal length per 1 nm change in wavelength).
  • a custom 2-element cemented doublet (for example, a biconvex BK7 element cemented to a biconcave SF6 element) can be used to conect for the axial color introduced by the single-element asphe ⁇ c lens.
  • the doublet can be placed either between lens 23 and minor or p ⁇ sm 22 or between dichroic beamsplitter 114 and mirror or prism 22.
  • objective lenses can also be used, for example a refractive/diffractive hybrid lens (i.e. a lens having at least one refractive surface and at least one diffractive surface), or a 2-element asphe ⁇ c lens having a nume ⁇ cal aperture of 0.85 (Sony patent 5,880,893).
  • An objective lens with a nume ⁇ cal aperture of 0.68 has about 8 times the collection efficiency of a lens with a nume ⁇ cal aperture of 0.25.
  • the galvo scanner is capable of scanning at 30 lines/sec, it is often operated at 7 5 lines/sec because the collection efficiency of its objective lens and signal-to-noise ratio at 30 lines/sec is insufficient for some assays.
  • a voice coil scanner running at 30 lines/sec provides a better signal-to-noise ratio than a galvo scanner that is running at 7.5 lines/sec because the voice coil scanner's objective lens can have a much higher collection efficiency.
  • the control system includes a computer 200, for example, a 400 MHz Pentium II PC, with a (servo) motion controller 201.
  • the motion controller 201 installed in (or connected to) the computer 200 accepts digital commands from the computer and produces an analog output in the range of -10 V to +10 V.
  • the motion controller may be, for example, the Galil Motion Control (Mountain View, CA) model DMC-1710, the Delta Tau Systems (North ⁇ dge, CA) model PMAC-Lite, or various other controllers from other companies such as Motion Engineering Inc., etc.
  • An amplifier 206 (e.g., a linear or pulse-width-modulated servoamplifier), for example a Galil MSA- 12-80, accepts the analog signal from the motion controller 201 via an interconnection module 204, for example Galil ICM-1900, and outputs the approp ⁇ ate cunent to the voice coil 201.
  • the amplifier 202 is provided with power by power supply 205, for example Galil CPS- 15-40.
  • An encoder system with a readhead 208 provides position feedback to the controller
  • Suitable encoder systems ith readhead 208 are quadrature-output encoders with resolutions of 1 micron to 0 1 micron
  • the encoder system may be, tor example, Renishaw RGH22Z readhead and RGS-S scale Other suitable encoders are manufactured by Zeiss and other companies
  • Some motion controllers can be programmed to pro ⁇ uce TTL outputinstalles when certain positions are reacne ⁇
  • the controller can produce a "line clock" pulse, which instructs the data acquisition board to begin acqui ⁇ ng a block of data, and a se ⁇ es of "pixel clock” pulses (for example, one pulse for every 1.5 micron change in position), each of which triggers one A/D conversion
  • pixel clock for example, one pulse for every 1.5 micron change in position
  • the 7 includes a translation table controller (mdexer) 202, for example a JMAR mdexer, connected to the computer 200 via an RS-232 cable
  • the translation table controller 202 is connected to the translation table 203, for example a JMAR Precision Systems 2-axis Slimline translation table
  • the same computer may be used to control the movement of the voice coil 207 linear slide and the translation table 203 for quick and coordinated scanning of the polymer anay 9
  • Data acquisition with the voice coil scanner is similar to data acquisition with the galvo scanner desc ⁇ bed in U.S. patent application No. 08/856,642.
  • Photomultiplier output cunent is converted to voltage by an op- amp circuit, low-pass filtered by, for example, a 4-pole Bessel filter, and digitized by a 12-bit or 16-bit data acquisition board, for example a Computer Boards Inc. (Middleboro, MA) model CIO-DAS 16/M1.
  • a Computer Boards Inc. (Middleboro, MA) model CIO-DAS 16/M1.
  • odd- numbered scan lines are taken while the voice-coil-driven axis is moving in the +X direction and even-numbered scan lines are taken while the voice-coil- driven axis is moving in the -X direction.
  • two or more data points are summed if coarser resolution is desired. Data are displayed on a computer screen as gray-scale images and are written to disk as 16-bit binary files.
  • the voice coil can be applied to move the polymer anay in a fixed objective lens system or to move a scan head having the objective lens.
  • the scan speed including acceleration is improved and the confocal microscope lens system is simple, efficient, and inexpensive. Therefore, a high performance, high throughput scanner is provided by the voice coil scanner of the present invention. All other things (e g , pixel size, scan speed, laser power, etc ) being equal, a voice coil scanner of the present invention will provide about 8 times as many detected photons per feature as a galvo scanner Therefore, the oice coil scanner of the present invention will prove very useful as feature sizes of polymer anays are reduced
  • the present invention provides improved systems and methods for detection of fluorescence images on a substrate It is to be understood that the above description is intended to be illustrative and not rest ⁇ ctive Many embodiments will be apparent to those skilled in the art upon reviewing the above desc ⁇ ption. Although the above desc ⁇ bed systems and methods has been described p ⁇ ma ⁇ ly herein with regard to the detection of fluorescent marked targets, it will readily find application to other areas. For example, the detection apparatus disclosed herein could be used in the fields of catalysis, DNA or protein gel scanmng, and the like. The scope of the invention should therefore be determined not only with reference to the above desc ⁇ ption but should also be determined with reference to the appended claims along with a full scope of equivalents to which the claims are entitled

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Abstract

La présente invention concerne un système de détection d'images à microscope confocal à balayage, comprenant une optique d'objectif simple et peu coûteuse (115) et un système de translation (15) mû par bobine mobile à accélération élevée/haute vitesse. L'optique d'objectif fournit une efficacité élevée de captage de la lumière à faible coût. La bobine mobile assure une accélération accrue pour le balayage rapide d'au moins un axe (direction de balayage, axe de balayage rapide) d'une matrice polymère (9), qui peut être utilisé efficacement avec l'optique d'objectif peu coûteuse ayant une efficacité élevée de captage de la lumière. Dans un mode de réalisation, la phase de translation (15) comprend une bobine mobile (2), un coulisseau linéaire (10) et un étrier léger (4) reliant la bobine mobile au coulisseau linéaire. Cet étrier est rigide et conçu pour soutenir une matrice polymère (9) devant être balayée ou un prisme de rotation (22) et l'optique d'objectif (23). Ainsi, cette invention fournit des systèmes et des procédés pour le balayage rapide et peu coûteux notamment de matrices polymères, à savoir un balayage haute performance et rentable de matrices polymères à l'aide d'une phase de translation mue par bobine mobile.
PCT/US1999/029351 1998-10-30 1999-12-10 Systemes et procede de balayage haute performance WO2001015193A1 (fr)

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AU20501/00A AU773664B2 (en) 1998-10-30 1999-12-10 Systems and methods for high performance scanning
EP99964213A EP1218915A4 (fr) 1999-08-26 1999-12-10 Systemes et procede de balayage haute performance
JP2001519460A JP2003507777A (ja) 1999-08-26 1999-12-10 高性能走査を行う装置及び方法

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EP1298479A2 (fr) * 2001-09-28 2003-04-02 Leica Microsystems Wetzlar GmbH Microscope à dispositif de prise de vue à renforcement du contraste
WO2003054610A1 (fr) * 2001-10-25 2003-07-03 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Microscope optique a objectif reglable
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WO2011098303A1 (fr) * 2010-02-12 2011-08-18 Leica Microsystems Cms Gmbh Dispositif de balayage d'un objet, procédé d'utilisation du dispositif et microscope à balayage
CN113074917A (zh) * 2021-04-01 2021-07-06 南京信息工程大学 一种基于Bessel光束离焦扫描的微纳结构特征参数测量方法及装置

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Cited By (9)

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Publication number Priority date Publication date Assignee Title
WO2002059677A1 (fr) * 2001-01-26 2002-08-01 Tecan Trading Ag Systeme optique et procede d'activation et de mesure de la fluorescence sur ou dans des echantillons traites avec des colorants fluorescents
CH697814B1 (de) * 2001-01-26 2009-02-27 Tecan Trading Ag Optisches System und Verfahren zum Anregen und Messen von Fluoreszenz an oder in mit Fluoreszenzfarbstoffen behandelten Proben.
EP1298479A2 (fr) * 2001-09-28 2003-04-02 Leica Microsystems Wetzlar GmbH Microscope à dispositif de prise de vue à renforcement du contraste
EP1298479A3 (fr) * 2001-09-28 2003-05-07 Leica Microsystems Wetzlar GmbH Microscope à dispositif de prise de vue à renforcement du contraste
WO2003054610A1 (fr) * 2001-10-25 2003-07-03 MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. Microscope optique a objectif reglable
US7863831B2 (en) 2008-06-12 2011-01-04 3M Innovative Properties Company AC illumination apparatus with amplitude partitioning
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CN113074917A (zh) * 2021-04-01 2021-07-06 南京信息工程大学 一种基于Bessel光束离焦扫描的微纳结构特征参数测量方法及装置

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