WO2001006826A2

WO2001006826A2 - Treating device and treating method

Info

Publication number: WO2001006826A2
Application number: PCT/JP2000/004669
Authority: WO
Inventors: Yoshiaki Yokoyama
Original assignee: Houei Syoukai Co., Ltd.
Priority date: 1999-07-22
Filing date: 2000-07-12
Publication date: 2001-02-01
Also published as: JP3310245B2; AU6014400A; WO2001006826A3; JP2001087734A

Abstract

A treating device, wherein a first heating chamber (11) having an exhaust system and a second heating chamber (13) are connected in parallel with a first purge chamber (12) capable of gaining access to the outside, whereby the number of air-tight doors and insulated doors can be reduced to below those of a conventional treating device, and the reliability of sealing of the air-tight doors can be increased and, in addition, general-purpose treatings such as a vacuum evaporation collecting and metal heat treatment can be performed simultaneously in parallel with each other.

Description

Detail

Processing device and processing method

Technical field

The present invention relates to a processing device and a processing method. In particular, the present invention relates to a processing apparatus and a processing method for processing objects to be processed such as soil, incinerated ash, and sludge. Further, the present invention relates to a processing apparatus and a processing method for processing a processing target object containing an organic substance and a metal. Further, the present invention relates to a processing apparatus and a processing method for performing a heat treatment on a metal. Background art

In order to achieve both industrial promotion and public welfare, it is necessary to minimize the adverse effects on public social capital caused by industrial activities. One of the most important things of public social capital is the environment. From such a viewpoint, interest in processing technology such as recycling technology has recently been increasing.

One such processing technique is heating under reduced pressure. In this technology, the object to be treated is heated under reduced pressure in a heating furnace equipped with an exhaust system. Thereby, the components of the object to be processed are thermally decomposed, and the components of the object to be processed are evaporated.

For example, when processing an object to be processed containing an organic substance and a metal, the organic substance may first be thermally decomposed and then the metal may be evaporated. At this time, if the hermetic chamber that thermally decomposes organic matter and the hermetic chamber that evaporates metal are directly connected, some inconveniences arise. Such reduced pressure heating technology Then, ensuring airtightness is an important issue. However, for example, the evaporated metal adheres to the hermetic door, and the sealing performance of the hermetic door decreases. When the sealing performance of the hermetic door decreases, the pressure inside the system increases, and the boiling point of the evaporated metal also increases. For this reason, the object to be treated must be heated to a higher temperature, and the productivity of the treatment decreases. In addition, it is necessary to stop the operation of the device to replace the seal part of the airtight door. In order to stop the operation of the equipment once, it is generally necessary to let it cool down, and it takes time to reheat. Also, as the number of bulkheads such as airtight doors and thermal insulation doors increases, maintenance becomes more difficult and the cost of equipment increases.

Productivity is an important issue in technologies related to recycling. Therefore, it is required to establish a processing technology with high productivity.

On the other hand, metal heat treatment includes quenching, tempering, annealing, and normalizing. Conventionally, individual devices such as quenching and annealing have been used as heat treatment devices used for these heat treatments. Disclosure of the invention

The present invention has been made to solve such a problem. That is, an object of the present invention is to provide a processing apparatus having a simple configuration and high productivity. Another object of the present invention is to provide a processing apparatus capable of ensuring a sealing property of an airtight door and performing a long-term continuous operation. The present invention also provides a processing apparatus capable of efficiently processing an object to be processed including organic matter and metal, such as shredder dust, sludge, soil, incinerated ash, incinerated fly ash, and a circuit board. Aim.

Furthermore, the present invention provides a processing apparatus that can perform heat treatment such as quenching, annealing, and normalizing simultaneously or continuously by providing a cooling means capable of freely changing a cooling rate. The purpose is to provide. Ma The present invention efficiently treats objects to be treated, such as shredder dust, sludge, soil, incinerated ash, incinerated fly ash, and circuit boards, which are composed of organic matter and metal, and also includes quenching, annealing, and annealing. It is an object of the present invention to provide a processing apparatus capable of performing a plurality of quasi heat treatments simultaneously or concurrently. In order to solve such a problem, the present invention employs the following configuration.

The processing apparatus of the present invention is a processing apparatus for processing an object to be processed, wherein the first airtight chamber is connected to a first exhaust unit and is accessible from outside, and is connected to the first airtight chamber; A second airtight chamber having a first heating means and a second exhaust means, and a second heating means and a third airtight chamber which are connected to the first airtight chamber in parallel with the second airtight chamber; And a third hermetic chamber having an exhaust means. By employing such a configuration, in the processing apparatus of the present invention, different heating processes such as a normal-pressure heating process, a purge heating process, and a reduced-pressure heating process can be performed concurrently or individually. In addition, by providing a cooling means in the first hermetic chamber (purge chamber), cooling processing in addition to the above-described heating processing can be performed simultaneously in parallel or individually.

The processing apparatus of the present invention is a processing apparatus for processing an object to be processed, wherein a first heating chamber including a first heating unit and a first exhaust unit, a second heating unit, and a second heating unit. A second heating chamber provided with an exhaust means, and a first purge chamber interposed between the first heating chamber and the second heating chamber and provided with a third exhaust means. It is characterized by having. The first purge chamber corresponds to the first hermetic chamber, the first heating chamber corresponds to the second hermetic chamber, and the second heating chamber corresponds to the third hermetic chamber. That is, the first purge chamber is provided so as to be connected to the first heating chamber and the second heating chamber. These rooms do not need to be arranged in a straight line, but may be arranged in an L-shape. The first exhaust means, the second The exhaust means and the third exhaust means may be provided individually, or at least a part thereof may be provided in common.

Between the first heating chamber and the first purge chamber, and between the second heating chamber and the first purge chamber, openable and closable partitions that can keep each chamber airtight are provided. It is arranged. Examples of these partitions include a combination of an airtight door and an insulated door.

The first heating chamber and the second heating chamber are respectively provided with a first heating means and a second heating means for heating the room. Examples of these heating means include various types of moss, induction heating, dielectric heating, microwave heating, indirect heating using gas, oil, and the like. Note that the first heating means and the second heating means need not be the same.

A first exhaust system and a second exhaust system for exhausting the interior of the room are connected to the first heating chamber and the second heating chamber. As these exhaust systems, for example, exhaust blowers and various vacuum pumps can be used. Examples of vacuum pumps include liquid-sealed pumps (water-sealed pumps), such as mouth-to-mouth pumps, oil diffusion pumps, booths, evening pumps (roots pumps), evening-bottle molecular pumps, ion-jet pumps, and water-sealed pumps be able to. These vacuum pumps may be used in combination. In the first heating chamber, the object to be processed may be processed at normal pressure (including negative pressure by an exhaust blower) or may be processed at reduced pressure using a vacuum pump. For example, if an exhaust system having a vacuum pump is connected to the first heating chamber, not only can the object to be treated be heated under reduced pressure, but also vacuum purging can be performed, saving non-oxidizing gas. it can. Also, when heat treatment (normal pressure) of organic substances such as carbonization or thermal decomposition, the object to be treated may ignite. In such a case, the fire can be extinguished by reducing the pressure in the room with a vacuum pump, which is safe. Further, the first heating chamber, the second heating chamber, or the first purge chamber may include means for introducing a non-oxidizing gas. Examples of the non-oxidizing gas include nitrogen and a rare gas. Examples of the non-oxidizing gas introduction system include a configuration in which each chamber and a non-oxidizing gas reserve tank are connected via a valve.

A gaseous state disposed between the first heating chamber and the first exhaust means or between the second heating chamber and the second exhaust system, and discharged from the object to be treated; A means for condensing the effluent and a means for reforming (for example, a gas cracking device) may be further provided. For example, when treating an object to be treated containing organic matter and metal, the organic matter is thermally decomposed in the first heating chamber, and the gas (including mist and fine particles) generated by the thermal decomposition is condensed by an oiling device and collected. You may make it. In the second heating chamber, a predetermined metal may be heated under reduced pressure to be vaporized, and the evaporated metal may be condensed and recovered.

Further, in the processing apparatus of the present invention, the first purge chamber includes an airtight door for accessing the outside without passing through the first heating chamber and the second heating chamber. With this airtight door, the object to be treated can be directly introduced into the first purge chamber from the outside of the apparatus, and can be taken out of the first purge chamber.

Further, the first purge chamber also has a function of separating the first heating chamber and the second heating chamber. For example, an object to be treated is introduced into a purge chamber, and is heated in a first heating chamber. Thereafter, the object to be processed is sent to the second heating chamber via the first purge chamber. At this time, a first partition provided between the first heating chamber and the first purge chamber, and a first partition provided between the second heating chamber and the second purge chamber. The second partition is opened and closed so that at least one of the partitions is always closed. The atmosphere of the heat chamber can be separated. Therefore, for example, a substance evaporated from the object to be treated in the second heating chamber can be prevented from adhering to the hermetic door separating the first heating chamber and the first purge chamber.

Further, according to such a configuration, the number of airtight doors and heat-insulated doors can be reduced as compared with the conventional case. For example, in comparison with a case where each chamber is arranged in the order of a first purge chamber, a first heating chamber, a second heating chamber, and a second purge chamber as in a conventional processing apparatus, Both insulated doors and airtight doors can be reduced by one. Therefore, the configuration of the device becomes simpler, the cost is reduced, and the maintainability is improved. In addition, by adopting a discontinuous configuration in which multiple processing chambers are arranged in parallel with the purge chamber instead of a continuous configuration of multiple heating processing chambers, the use of the processing equipment is expanded, and the processing equipment becomes versatile. You can use it.

In the case where the processing in the first airtight chamber is performed at normal pressure, a means for adjusting the pressure so that the pressure in the first heating chamber is equal to or higher than the atmospheric pressure may be further provided. Examples of such pressure adjusting means include: means for detecting the pressure in the first heating chamber; means for introducing a non-oxidizing gas into the first heating chamber; and means for responding to the detected pressure. Means for adjusting the introduction amount of the non-oxidizing gas. By employing such a configuration, the pressure in the first hermetic chamber can always be maintained at or above the atmospheric pressure.

For example, when thermal decomposition of organic matter is performed in the first hermetic chamber, it may be dangerous if air or the like enters inside. According to the present invention, the first hermetic chamber can always be maintained at or above the atmospheric pressure, so that the safety of the device can be improved. In addition, by introducing a non-oxidizing gas, not only the pressure but also the oxygen concentration in the system may be adjusted. This makes it possible to stabilize the amount of pyrolysis gas generated and control the average molecular weight. A second purge chamber connected to the second heating chamber may be further provided. The second purge chamber may be provided with an exhaust system and an airtight door for accessing the outside similarly to the first purge chamber described above. Further, the first purge chamber and the second purge chamber may be provided with cooling means for cooling the chamber. Examples of the cooling means include a cooling fan and a water-cooled jacket structure. Alternatively, a non-oxidizing gas may be circulated in the room, and the non-oxidizing gas may be cooled outside by a heat exchanger or the like. It is preferable that the object to be processed subjected to the predetermined processing in the second heating chamber is transported to the second purge chamber, cooled in the second purge chamber, and then taken out. This is because if the object to be treated is heated under reduced pressure in the second heating chamber, the surface free energy of the object to be treated is likely to be excessive, and if it is taken out as it is, it will be dangerous because it will burn violently. . Also, if the object to be treated is oxidized, its value may decrease. Therefore, the object to be treated may be cooled in a non-oxidizing atmosphere in the second purge chamber and then taken out. Further, it is preferable that the cooling is performed in an atmosphere free from organic halides (a lack of organic halides). As a result, it is possible to prevent organic halides such as dioxins and other pollutants from remaining in the residue of the treatment.

The processing apparatus of the present invention can also perform a heat treatment of a metal. For example, the first heating chamber can be used as an annealing heating chamber, and the second heating chamber can be used as a quenching heating chamber. Further, for example, the first heating chamber can be used as a heating chamber for tempering, and the second heating chamber can be used as a heating chamber for vacuum quenching. The first purge chamber and the second purge chamber are used as cooling chambers. With such a configuration, different heat treatments can be performed in parallel or continuously. Between the two heating chambers, a first purge chamber with external access Such an advantage can be obtained by employing an interposed structure.

Further, the processing apparatus of the present invention is provided with cooling means capable of freely changing the cooling rate. By employing such a configuration, heat treatments such as quenching, annealing, and normalizing can be performed simultaneously or continuously.

A processing apparatus according to another aspect of the present invention includes a first chamber capable of forming a first sealed space for holding a processing target object, and a second chamber capable of forming a second sealed space for holding a processing target object. A third chamber capable of delivering the object to be processed between the first chamber and the second chamber and forming a third closed space for holding the object to be processed; and the first chamber And means for heating the object to be treated in the second chamber, and means for reducing the pressure in the first to third enclosed spaces to below normal pressure.

According to such a configuration, means for forming each closed space and transferring the object to be treated between these closed spaces, for example, the number of closed doors, for example, the first heating chamber and the second heating chamber Can be reduced as compared with the case where the and are continuously connected. In the first heating chamber and the second heating chamber, independent processing can be performed simultaneously in parallel or continuously. Of course, individual processing can be performed in the first heating chamber and the second heating chamber.

Further, in the treatment method of the present invention, in the method for treating an object to be treated containing an organic substance and an inorganic substance, a step of thermally decomposing the organic substance, and a step of heating the pyrolysis residue under reduced pressure to evaporate and recover the inorganic substance. And a step of subjecting the thermal decomposition residue of the organic substance to a heating oxidation reaction in an oxidizing atmosphere. As a result, at least a part of the thermal decomposition residue of the object to be treated is oxidized. For example, metal changes its form from a simple substance to a more stable oxide. This process can be performed as needed, and is an indispensable step There is no. BRIEF DESCRIPTION OF THE FIGURES

FIG. 1 is a diagram schematically illustrating an example of a configuration of a processing apparatus of the present invention; FIG. 2 is a diagram schematically illustrating an example of a configuration of a pressure control system provided in the processing apparatus of the present invention;

FIG. 3 is a view showing a modification of the processing apparatus of the present invention for comparison; FIG. 4 is a view schematically showing an example of the configuration of the processing apparatus of the present invention; and FIG. It is a figure which shows the example of a structure of a processing apparatus roughly. BEST MODE FOR CARRYING OUT THE INVENTION

(Embodiment 1)

FIG. 1 is a diagram schematically showing another example of the configuration of the processing apparatus of the present invention. This processing apparatus includes four chambers: a first heating chamber 11, a first purge chamber 12, a second heating chamber 13, and a second purge chamber 14.

The first heating chamber 11 and the first purge chamber 12 are separated by a heat insulating door 21 and an airtight door 31. Similarly, the first purge chamber 12 and the second heating chamber are separated by an airtight door 32 and an insulating door 22. Further, between the second heating chamber 13 and the second purge chamber 14, the airtight door and the airtight door which are separated by the heat insulating door 23 and the airtight door 33 may be separated from each other, They may be formed integrally. In any case, it is preferable to provide a heat-insulating door on the heating chamber side of the airtight door to protect the seal of the airtight door from the heat of the heating chamber. The first purge chamber 12 and the second purge chamber 14 are provided with airtight doors 34 and 35, respectively, through which the object to be treated can be taken in and out with the outside. These hermetic doors and heat insulating doors are configured to be openable and closable, for example, with cylinders and wires. Note that these hermetic doors generally have only one side airtightly sealed. Can be Each room is provided with a transport mechanism for transporting the object to be processed. Reference numerals 18 and 19 denote transfer mechanisms for moving an object to be processed into and out of the first purge chamber 12 and the second purge chamber.

The first heating room 11 has a heater for heating the room. The first heating chamber 11 is connected to an exhaust system via a reformer 41 and a condenser 42. Here, the exhaust system is provided with an exhaust pump 43. The reformer 41 reforms a gaseous emission discharged by heating the object to be treated at a high temperature of, for example, about 700 ° C. to 1200 ° C. This breaks down dioxin into chlorine and carbon, for example. In addition, PCBs and the like are similarly decomposed and these pollutants are rendered harmless. The condenser 42 is for condensing the condensable components in the gaseous effluent as a liquid component and a solid component. Thereby, the harmless substance can be recovered in a harmless state.

The first heating chamber 11, the first purge chamber 12, the second heating chamber 13, and the second purge chamber 14 have a gas introduction system 44 for introducing a non-oxidizing gas such as nitrogen into the chamber. It is connected. In this example, the amount of the non-oxidizing gas introduced into the first heating chamber 11 is controlled so that the inside of the chamber is always at or above the atmospheric pressure. FIG. 2 is a diagram illustrating an example of a configuration of a pressure control system. This control can be performed by, for example, a pressure sensor 54 that measures the pressure in the first heating chamber and a controller 55 that controls the open / close state of a valve that introduces a non-oxidizing gas according to the measured pressure. it can. If an oxygen concentration sensor is provided in the first heating chamber 11, not only the pressure but also the oxygen concentration in the room can be controlled.

The first purge chamber 12 is connected to the first heating chamber 11 and the second heating chamber 13 via an airtight door and a heat insulating door. The first purge chamber 12 can be directly accessed from the outside via an airtight door 34. The object to be processed can be introduced into the first purge chamber 12 through the hermetic door 34. Again processing The object can move between the first purge chamber, the first heating chamber 11 and the second heating chamber 13.

The first purge chamber 12 separates the first heating chamber 11 from the second heating chamber 13. This can prevent the atmospheric gas of the second heating chamber 13 from entering the first heating chamber 11. Further, it is possible to prevent the atmospheric gas of the first heating chamber 11 from entering the second heating chamber 13.

The first purge chamber 12 is connected to a common exhaust system with the second purge chamber 14. This exhaust system is provided with a booster pump 51 and a mouth pump 52, and can evacuate the first purge chamber 12 and the second purge chamber. An oil mist trap is provided behind the rotary pump 52 so as to catch oil and the like in exhaust gas.

For example, when the first heating chamber 11 and the second heating chamber 13 are connected, two airtight doors and two heat insulating doors are required between these two chambers. FIG. 3 is a diagram showing, for comparison, a case where the processing apparatus of the present invention illustrated in FIG. 1 is configured by connecting two heat treatment chambers. In this case, the whole equipment requires 6 airtight doors and 4 insulated doors. In a continuous processing apparatus in which a plurality of heat treatment chambers are arranged adjacently as illustrated in FIG. 3, it is necessary to provide heat insulating doors 22a and 22b on both sides of an airtight door separating adjacent heat treatment chambers. In the case where each of the plurality of heat treatment chambers arranged adjacently has a vacuum exhaust system, it is necessary to provide two airtight doors 32a and 32b between adjacent heat treatment chambers. This is because only one side of the two spaces separating the airtight doors can be sealed. In the present invention, by arranging the first purge chamber between the first heating chamber 11 and the second heating chamber 13, the apparatus can be configured with five airtight doors and three heat insulating doors . Therefore, the configuration of the device is simplified, and the price of the device can be reduced. In addition, the sealing performance of the airtight door has been improved, Susceptibility also increases. In particular, the sealing ability of the hermetic door is a major factor in achieving continuous operation of the equipment. According to the present invention, by arranging two heat treatment chambers in parallel with the purge chamber, it is possible to improve both the reliability and the productivity of the apparatus.

Similarly to the first heating chamber 11, the second heating chamber 13 includes a heater for heating the room. The second heating chamber 13 is connected to an exhaust system via a vacuum door 13a, a reformer 41a, and a condenser 45. The exhaust system is equipped with a booth pump 48 and a rotary pump 49, and the object to be treated can be heated under reduced pressure in the second heating chamber. For example, the metal contained in the object to be treated can be evaporated under reduced pressure, condensed in the condenser 45, and recovered. In the condenser 45, not only solid components such as metal but also oil may be condensed. In this device, a dry filter 46 and a wet filter 47 are interposed between the condenser 45 and the press pump 48 and the rotary pump 49. The dry filter 46 is, for example, a filter such as a metal net, and is for trapping evaporating components, fine particles, dust and the like that have passed through the condenser 45. The wet fill filter 47 is a fill filter such as an oil film fill filter, for capturing fine particles and dust that have passed through the condenser 45. By arranging such a filter in front of the vacuum pump, it is possible to prevent solid particles and dust from adversely affecting the vacuum pump.

A second purge chamber 14 is connected to the second heating chamber 13. The second purge chamber 14 can be directly accessed from outside via an airtight door 35. The object to be treated can be taken out of the second purge chamber 12 through the airtight door 35 or introduced into the second purge chamber. The second purge chamber 14 also has a function as a cooling chamber for cooling the object to be treated in a controlled atmosphere. Water-cooled jacket structure is adopted for the second purge chamber Alternatively, a mechanism for adjusting the temperature of the supplied non-oxidizing gas may be employed. In this example, a bypass is provided between each chamber including the first purge chamber 12 and the second purge chamber 14. This bypass is used to balance the pressure in the chambers on both sides of the door when opening and closing the door. It is also used to effectively utilize the non-oxidizing gas introduced into each room and its calorific value. For example, a dry filter 54, a heat exchanger 55, and a blower 56 are interposed in the bypass between the first purge chamber 12 and the second purge chamber. Thus, for example, the non-oxidizing gas used for cooling the object to be treated in the second purge chamber 14 can be used for preheating, slow cooling, etc. of the object to be treated in the first purge chamber 12. Naturally, if the reverse configuration is adopted, the non-oxidizing gas used for cooling the object to be treated in the first purge chamber 12 is preheated and gradually cooled in the second purge chamber 14. It can be used for cooling or the like. Further, both of these configurations may be used so as to be selectively used depending on the situation.

Each exhaust system is provided with an exhaust gas treatment system 60 via a valve 65 at the subsequent stage. In this example, the exhaust gas treatment system 60 includes a gas combustion device 61 for complete combustion of the exhaust gas, a scrubber 62 for gas cleaning, and an activated carbon filter 6 for adsorbing and removing harmful components in the gas. 3. Equipped with exhaust blower 6 4. The valve 65 also has a role as a check valve. The configuration of the exhaust gas treatment system 60 may be determined as necessary, such as the components of the exhaust gas. When the exhaust gas contains, for example, dioxins, N〇x, SOx, etc., a configuration capable of coping with these, such as rapid cooling after gas combustion and a catalyst, may be adopted. Further, in this example, the forces commonly connected to the first purge chamber 12 and the second purge chamber 14 may be independently provided. In the processing apparatus of the present invention, each chamber may be provided with an independent exhaust system, or at least a part may be provided with a common exhaust system. As described above, according to the present invention, the configuration of the device is simplified, and the price of the device is low, so that the device can be used for multiple purposes. In addition, the sealing performance of the airtight door is improved, and maintenance is also enhanced. Further, according to the present invention, both the reliability and the productivity of the processing apparatus can be improved.

(Embodiment 2)

An example of processing that can be performed using the processing apparatus of the present invention will be described. In this example, an example will be described in which a circuit board on which electronic components are mounted by solder or the like is processed as an object to be processed.

The circuit board was housed in a jig such as a car or a holder, and the airtight door 34 was opened and introduced into the first purge chamber. After the first purge chamber 12 was evacuated, it was purged with nitrogen gas. Alternatively, the bypass may be opened, or the first heating chamber 11 may be exhausted. Next, the airtight door 34 and the heat insulating door 21 were opened, and the circuit board was transported to the first heating chamber 11.

The door was closed, the circuit board was heated in the first heating chamber 11, and the constituent resin was thermally decomposed. Organic components constituting the circuit board, such as prepreg, solder resist, and mold resin for electronic components, were thermally decomposed by this heating. Pyrolysis generated gases containing hydrocarbon gases with relatively short molecular chains. This pyrolysis gas (including mist and solid fine particles) is sucked into the exhaust system by the exhaust blower 43, and the high-molecular hydrocarbons reformed in the reformer 41 are converted to oil in the condenser 42. It has become. In this example, the thermal decomposition of the object to be treated is controlled so that the pressure inside the system is higher than the atmospheric pressure (see Fig. 2). For this reason, it is possible to prevent the outside air from flowing back into the first heating chamber 11 and efficiently guide the pyrolysis generated gas to the exhaust system side.

After the heat treatment in the first heating chamber 11, the object to be processed was returned to the first purge chamber 12. At this time, since the airtight door 3 2 that separates the first purge chamber 12 and the second heating chamber 13 is closed, the atmosphere gas in the first heating chamber 11 Never go to 3.

When the object to be treated returns to the first purge chamber, the airtight door 31 and the heat insulating door 21 are closed, and the chamber is evacuated. At this time, even if gas is still discharged from the object to be treated, it is condensed and recovered by the condenser 44. Then, with the pressures of the first purge chamber 12 and the second heating chamber 13 balanced, the airtight door 3 2 and the heat insulating door 22 were opened, and the object to be processed was transported to the second heating chamber 13. . At this time, a bypass valve between the first purge chamber 12 and the second heating chamber 13 may be opened as necessary to balance the pressures in both chambers. After transportation, the airtight door and the heat-insulated door were closed. After the first heating chamber 11 and the first purge chamber 12 are evacuated, the object to be processed may be transferred to the first purge chamber 12.

In the second heating chamber 13, the object to be treated was heated under reduced pressure to selectively evaporate some oxides and other substances of the constituent metal (s). Here, the solder joint could be released by evaporating the lead. The temperature and pressure in the second heating chamber may be adjusted to be higher than the boiling point of the metal to be evaporated. Here the heating temperature is 1 0 0 0 ° C~ 1 2 0 0 ° C, pressure was controlled at about 1 0 one ¹ to about 1 0- ⁴ T 0 rr range of about. The evaporated metal was condensed in a condenser 45. In the present invention, the evaporated metal does not enter the first heating 11 chamber and does not adhere to the airtight door 31.

After evaporating the desired metal, the airtight door 33 and the heat insulating door 23 were opened, and the object to be processed was transported to the second purge chamber 14. At this time, the pressure on both sides of the hermetic door was balanced so as to be almost equal as described above. For this purpose, the second purge chamber 14 is evacuated by an exhaust system. After the object to be treated was introduced into the second purge chamber 14, the object to be treated was cooled by a non-oxidizing gas such as nitrogen. Due to the heat treatment under reduced pressure in the second heating chamber, the object to be treated is in an unstable state with excessive surface free energy, so it is exposed to outside air as it is. It ’s not good to eat.

Further, the heating residue of the object to be treated such as the treated soil may be heated and oxidized in an oxidizing atmosphere. As a result, metals and the like in the residue of the object to be processed change to a stable form as an oxide. This oxidation treatment may be performed as needed, and is not an essential treatment item.

The object to be treated is cooled with an inert gas such as nitrogen gas in the second purge chamber 14 and then taken out. Through the above processing, the constituent resin of the circuit board was substantially thermally decomposed, and lead contained in the solder alloy and the like was also removed. The carbon in the residue may be gasified as carbon monoxide and hydrogen by an aqueous reaction. This gas can be used as a heating means of the processing apparatus of the present invention. In this example, an example of processing using a circuit board as an object to be processed has been described.However, the present invention is not limited to this. it can. In addition, at high temperatures for vacuum processing, the reducing action is strong at high temperatures, and it is also suitable for removal of objects to be treated containing organic halides such as dioxins. In the present invention, after the object to be treated is heated under reduced pressure, it is purged and cooled in a dioxin-free atmosphere. Residual concentrations of harmful organic halides such as coplanar PCBs can be suppressed to extremely low levels. The concentration of dioxins in the residue after this treatment was below the detection limit. In addition, since the oxygen gas concentration was extremely low (or negligible), the analysis results showed that the amount of pollutants such as NO x and SO x was very small.

(Embodiment 3)

FIG. 4 is a diagram schematically showing another example of the configuration of the processing apparatus of the present invention. Here, the illustration of the exhaust system and the like is omitted, but the configuration of the exhaust system and the non-oxidizing gas supply system is the same as in FIG. This processing device is in addition to the configuration shown in Fig. 1. In addition, a third heating chamber 15 is provided. The third heating chamber 15 is connected to the second purge chamber 14 via an airtight door 36 and a heat insulating door 24. That is, the third heating chamber 15 is also connected to the second purge chamber 14 in parallel with the second heating chamber 13.

Further, in this example, a steam introduction system 71 is connected to the third heating chamber, so that an aqueous reaction (a reaction of producing carbon monoxide and hydrogen by carbon and water) occurs in the third heating chamber. The aqueous reaction is an endothermic reaction. Therefore, a heating means is provided in the room to supply the reaction energy and maintain the reaction temperature (about 500 ° C). The generated hydrogen and carbon monoxide are used as fuel gas for heating and fuel gas for gas generators. In this example, an example in which the third heating chamber 15 is an aqueous reaction chamber will be described. However, other heating processing such as reduced pressure heating processing or changing the temperature to oxidize and remove fine heavy metals and the like by introducing an oxidizing agent is performed. You can also.

An example of processing a car shredder dust using the processing apparatus of the present invention illustrated in FIG. 4 will be described. The challenge is to deal with car shredder dust. Car recycling is generally performed as follows.

1) Remove main parts such as engine, mission, fuel tank, etc. from the car

(2) Press

(3) Apply to Shretzda

(4) Sort materials by magnetic force, wind force, specific gravity, etc.

The rest of this Shretzda after the separation is the Shrezdaust. Shredder dust includes various resins, metals such as iron, copper, aluminum and lead, glass, earth and sand.

The processing of this shredder dust also takes place until the vacuum heating in the second heating chamber 13 Was performed in the same manner as the processing of the circuit board described in the second embodiment. That is, the organic matter contained in the shredder dust was thermally decomposed in the first heating chamber 11, and the heavy metals such as zinc and lead contained in the heating residue were evaporated in the second heating chamber 13. Note that the thermal decomposition of the organic substance in the first heating chamber may be performed under reduced pressure as necessary. In this case, the pressure in the first heating chamber 11 is not controlled to be higher than the atmospheric pressure. In addition, a vacuum pump will be provided in the exhaust system in place of the exhaust blower 43.

After heating under reduced pressure in the second heating chamber 13, the object to be treated was transferred to the third heating chamber 15 via the second purge chamber 14 evacuated or purged to a non-oxidizing atmosphere. In the second purge chamber 14, the object to be treated was not actively cooled. In the third heating chamber 15, the object to be treated was reacted with water vapor while maintaining the heating residue at about 500 ° C. The carbon contained in the heated residue of the shredder dust reacted with water to produce carbon monoxide and hydrogen. This generated gas was taken out of the third heating chamber 15 through a pipe 72 and used as a fuel gas. After the treatment in the third heating chamber 15, it was returned to the second purge chamber 14, cooled in a non-oxidizing atmosphere, and taken out of the apparatus by the transfer mechanism 19.

As described above, according to the processing apparatus of the present invention, oxidation and reduction can be freely performed, and safe and efficient processing can be performed on an object to be processed including organic matter and metal. It is possible to recycle shredder dust that had previously been landfilled at a managed landfill.

(Embodiment 4)

FIG. 5 is a diagram schematically showing another example of the configuration of the processing apparatus of the present invention. In this example, a configuration in which the present invention can perform heat treatment of various metals will be described. In the processing apparatus of the present invention, a plurality of heat treatments such as quenching, tempering, annealing, and normalizing a metal can be performed simultaneously. Further, in the processing apparatus of the present invention, these different processings are performed in parallel or continuously. Can be.

A case where quenching processing and tempering processing using SKD as a processing target object will be described as an example. First, an object to be treated is introduced into the second heating chamber 13 via the first purge chamber 11, and the inside of the chamber is evacuated to perform vacuum heating at about 150 ° C. Next, the object to be treated is transferred to the second purge chamber 14 and quenched by rapid cooling with an inert gas. An oil tank for cooling may be provided in the second purge chamber 14 for cooling the object to be treated. During cooling in the second purge chamber 14, the quenched material is introduced into the second heating chamber 13 through the first purge chamber 11. After cooling, remove the object to be treated.

After the quenching process, the object to be processed is once again transported to the first heating chamber 11 via the first purge chamber 11. In the first heating chamber, the object to be treated is tempered at about 180 ° C. to about 550 ° C. Next, the object to be processed is transported to the first purge chamber 11 again, where the slow cooling process is performed. Note that it is preferable that the temperature is lowered stepwise, such as returning twice or returning three times, such as three times.

As described above, the processing apparatus of the present invention can perform not only thermal decomposition of the object to be processed and evaporation processing by heating under reduced pressure but also various heat treatments. In this example, quenching can be performed in the second heating chamber during tempering in the first heating chamber, and the first purge chamber and the second purge chamber are tempered and used for cooling the quenching. Therefore, as compared with the case where the quenching device and the tempering device are separately provided, there is an advantage that both the manufacturing cost and the installation space can be reduced. When the treatment apparatus of the present invention is used exclusively as a heat treatment furnace, the reformer, condenser, various filters, and exhaust gas treatment system are not essential elements, and may be provided as necessary.

Note that such a heat treatment can also be performed by the processing apparatus illustrated in FIG. The resin is thermally decomposed in the first heating chamber 11 and the second heating chamber 13 Individual or multiple treatments, such as vacuum quenching of metals in the first heating chamber, non-metal annealing and cleaning of the workpiece in the first heating chamber 11, and vacuum evaporation of the metals in the second heating chamber 12. Can also be performed. According to the processing apparatus of the present invention, such a multipurpose and highly productive processing apparatus is realized by adopting a configuration in which a plurality of heating chambers are connected in parallel to a purge chamber capable of accessing the outside. can do. Industrial applicability

As described above, according to the present invention, by connecting a plurality of heating chambers in parallel to a purge chamber capable of accessing the outside, a processing apparatus with a simple configuration and high productivity is provided. be able to. According to the present invention, the reliability of the seal of the hermetic door can be improved, and long-term continuous operation can be performed. Further, according to the present invention, it is possible to efficiently treat an object to be treated composed of organic matter and metal, such as shredder dust, soil, incinerated ash, incinerated fly ash, and a circuit board. Further, according to the present invention, a plurality of heat treatments can be performed in parallel or continuously. Furthermore, by subjecting the residue to vacuum treatment or nitrogen purge cooling, the residue can be subjected to decomposition and detoxification of organic halides such as dioxins, coplanar PCB, and PCB, and other pollutant gases. Also, various elements including heavy metals can be separated by evaporation.

Claims

The scope of the claims

1. In a processing apparatus for processing an object to be processed,

A first heating chamber including a first heating unit and a first exhaust unit, a second heating room including a second heating unit and a second exhaust unit, and the first heating chamber. A first purge chamber interposed between the second heating chamber and the second heating chamber, the first purge chamber including third exhaust means;

A processing device comprising:

2. The method according to claim 1, wherein the first purge chamber is provided with an airtight door for accessing the outside without passing through the first heating chamber and the second heating chamber. The processing device according to the above.

3. A first partition provided between the first heating chamber and the first purge chamber, and a first partition provided between the second heating chamber and the second purge chamber. The method according to claim 1, further comprising a second partition, and means for opening and closing the first partition and the second partition so that at least one of them is always closed. The processing device according to the above.

4. The apparatus according to claim 1, further comprising pressure adjusting means for adjusting the pressure so that the pressure in the first heating chamber, the second heating chamber, or the first purge chamber is equal to or higher than the atmospheric pressure. A processing device according to claim 1.

5. The pressure adjusting means of the first heating chamber, the second heating chamber, or the first purge chamber includes: means for detecting a pressure in the chamber; and means for introducing a non-oxidizing gas into the chamber. 5. The processing apparatus according to claim 4, further comprising: means for adjusting an introduction amount of the non-oxidizing gas according to the detected pressure.

6. The apparatus further comprising means for introducing a non-oxidizing gas into the first heating chamber, the second heating chamber, or the first purge chamber. 2. The processing device according to item 1, wherein

7. The processing apparatus according to claim 1, wherein the first exhaust unit or the second exhaust unit includes a vacuum pump.

8. The processing apparatus according to claim 1, further comprising a second purge chamber connected to the second heating chamber.

9. The processing apparatus according to claim 8, wherein the first purge chamber or the second purge chamber includes means for cooling an object to be processed.

10. Disposed between the first heating chamber and the first exhaust means or between the second heating chamber and the second exhaust means and discharged from the object to be treated. 2. The processing apparatus according to claim 1, further comprising means for condensing the discharged gaseous emission.

11. The gaseous effluent that is disposed between the first heating chamber and the condensing means or between the second heating chamber and the condensing means and is discharged from the object to be treated is improved. The processing apparatus according to claim 10, further comprising a quality control unit.

12. The reforming means, wherein the gaseous effluent discharged from the object to be treated is reformed at a high temperature of about 700 ° C. to about 1200 ° C. 11. The processing device according to item 1.

1 3. In the processing device that processes the object to be processed,

A first hermetic chamber connected to the first exhaust means and accessible from outside;

A second hermetic chamber connected to the first hermetic chamber and having first heating means and second exhaust means;

A third hermetic chamber connected to the first hermetic chamber in parallel with the second hermetic chamber, and having a second heating means and a third exhaust means; A processing device comprising:

14. The processing apparatus according to claim 13, further comprising means for cooling an object to be processed in the first hermetic chamber.

1 5. A first chamber capable of forming a first sealed space holding the object to be processed, a second chamber capable of forming a second sealed space holding the object to be processed, the first chamber and the second A third chamber capable of transferring the object to be processed to and from the chamber and forming a third enclosed space holding the object to be processed;

Means for heating the object to be treated in the first chamber and the second chamber; and means for reducing the pressure of the first to third enclosed spaces below normal pressure.

A processing device comprising:

1 6. In a method for treating an object to be treated containing an organic matter and a metal,

Thermally decomposing the organic matter;

Heating the pyrolysis residue under reduced pressure to evaporate and recover the metal; and adding water to the organic pyrolysis residue and gasifying it by an aqueous reaction.

A processing method comprising:

1 7. In a method for treating an object to be treated containing an organic substance and an inorganic substance,

Thermally decomposing the organic matter;

A processing method comprising: heating the pyrolysis residue under reduced pressure to evaporate and recover the inorganic substance; and heating and oxidizing the pyrolysis residue of the organic substance in an oxidizing atmosphere.