WO2001006222A2 - Utilisation de films minces multicouches comme detecteurs de contrainte - Google Patents

Utilisation de films minces multicouches comme detecteurs de contrainte Download PDF

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Publication number
WO2001006222A2
WO2001006222A2 PCT/US2000/019709 US0019709W WO0106222A2 WO 2001006222 A2 WO2001006222 A2 WO 2001006222A2 US 0019709 W US0019709 W US 0019709W WO 0106222 A2 WO0106222 A2 WO 0106222A2
Authority
WO
WIPO (PCT)
Prior art keywords
sensor
layer
layers
ferromagnetic
ferromagnetic layers
Prior art date
Application number
PCT/US2000/019709
Other languages
English (en)
Other versions
WO2001006222A3 (fr
WO2001006222A9 (fr
Inventor
Srinivasan Ganapathi
Shiva Prakash
Original Assignee
Fidelica Microsystems, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/500,706 external-priority patent/US6889555B1/en
Priority claimed from US09/502,406 external-priority patent/US6694822B1/en
Application filed by Fidelica Microsystems, Inc. filed Critical Fidelica Microsystems, Inc.
Priority to AU63556/00A priority Critical patent/AU6355600A/en
Publication of WO2001006222A2 publication Critical patent/WO2001006222A2/fr
Publication of WO2001006222A3 publication Critical patent/WO2001006222A3/fr
Publication of WO2001006222A9 publication Critical patent/WO2001006222A9/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance

Abstract

La présente invention concerne un dispositif de détection de pression qui comprend au moins un détecteur géant magnétorésistant (GMR), et de préférence un jeu de détecteurs GMR, chaque détecteur GMR possédant une couche d'espacement conductrice interposée entre deux couches ferromagnétiques. Dans un état non polarisé, le vecteur de magnétisation de chacune des couches ferromagnétiques est, de préférence, parallèle l'un à l'autre. Suite à l'application d'un courant, le vecteur de magnétisation de chaque couche ferromagnétique est changé, de préférence, à une position antiparallèle, dans laquelle le détecteur est utilisé pour capter alors la contrainte appliquée. Suite à l'application de la contrainte, les vecteurs de magnétisation des deux couches magnétiques libres tourneront, ce qui provoquera un changement correspondant proportionnellement lié de la résistance du détecteur. Ce changement de résistance peut être détecté et utilisé pour calculer la contrainte appliquée.
PCT/US2000/019709 1999-07-20 2000-07-19 Utilisation de films minces multicouches comme detecteurs de contrainte WO2001006222A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU63556/00A AU6355600A (en) 1999-07-20 2000-07-19 Use of multi-layer thin films as stress sensors

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
US14484399P 1999-07-20 1999-07-20
US60/144,843 1999-07-20
US09/500,706 2000-02-09
US09/500,706 US6889555B1 (en) 1999-07-20 2000-02-09 Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same
US09/502,406 2000-02-10
US09/502,406 US6694822B1 (en) 1999-07-20 2000-02-10 Use of multi-layer thin films as stress sensor

Publications (3)

Publication Number Publication Date
WO2001006222A2 true WO2001006222A2 (fr) 2001-01-25
WO2001006222A3 WO2001006222A3 (fr) 2001-04-26
WO2001006222A9 WO2001006222A9 (fr) 2002-08-29

Family

ID=27386170

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2000/019709 WO2001006222A2 (fr) 1999-07-20 2000-07-19 Utilisation de films minces multicouches comme detecteurs de contrainte

Country Status (3)

Country Link
AU (1) AU6355600A (fr)
TW (1) TW452646B (fr)
WO (1) WO2001006222A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003047512A2 (fr) * 2001-11-29 2003-06-12 Bristol-Myers Squibb Company Composes derives d'un noyau d'amine nucleus et compositions pharmaceutiques renfermant ceux-ci
DE10250358A1 (de) * 2002-10-29 2004-05-19 Infineon Technologies Ag Sensormodul zur Messung mechanischer Kräfte
DE10319319A1 (de) * 2003-04-29 2005-01-27 Infineon Technologies Ag Sensoreinrichtung mit magnetostriktivem Kraftsensor

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6190227B2 (ja) * 2013-09-20 2017-08-30 株式会社東芝 圧力センサ、マイクロフォン、血圧センサ、携帯情報端末および補聴器
TWI577977B (zh) * 2016-01-11 2017-04-11 Rotatech Int Corp Magnetic torque sensing device for steering system
CN114739544A (zh) * 2022-02-23 2022-07-12 万津实业(赤壁)有限公司 压力监测膜片、组件及压力监测方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0650139A1 (fr) * 1993-10-25 1995-04-26 Enix Corporation Panneau d'entrée à pression de surface magnétique
EP0690296A2 (fr) * 1994-06-27 1996-01-03 Matsushita Electric Industrial Co., Ltd. Capteur à magnétostriction
EP0709829A2 (fr) * 1994-10-28 1996-05-01 Sony Corporation Capteur à effet magnétorésistif
US5648885A (en) * 1995-08-31 1997-07-15 Hitachi, Ltd. Giant magnetoresistive effect sensor, particularly having a multilayered magnetic thin film layer
US5856617A (en) * 1997-09-02 1999-01-05 International Business Machines Corporation Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0650139A1 (fr) * 1993-10-25 1995-04-26 Enix Corporation Panneau d'entrée à pression de surface magnétique
EP0690296A2 (fr) * 1994-06-27 1996-01-03 Matsushita Electric Industrial Co., Ltd. Capteur à magnétostriction
EP0709829A2 (fr) * 1994-10-28 1996-05-01 Sony Corporation Capteur à effet magnétorésistif
US5648885A (en) * 1995-08-31 1997-07-15 Hitachi, Ltd. Giant magnetoresistive effect sensor, particularly having a multilayered magnetic thin film layer
US5856617A (en) * 1997-09-02 1999-01-05 International Business Machines Corporation Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003047512A2 (fr) * 2001-11-29 2003-06-12 Bristol-Myers Squibb Company Composes derives d'un noyau d'amine nucleus et compositions pharmaceutiques renfermant ceux-ci
WO2003047512A3 (fr) * 2001-11-29 2003-10-16 Bristol Myers Squibb Co Composes derives d'un noyau d'amine nucleus et compositions pharmaceutiques renfermant ceux-ci
DE10250358A1 (de) * 2002-10-29 2004-05-19 Infineon Technologies Ag Sensormodul zur Messung mechanischer Kräfte
DE10250358B4 (de) * 2002-10-29 2017-02-09 Infineon Technologies Ag Sensormodul zur Messung mechanischer Kräfte
DE10319319A1 (de) * 2003-04-29 2005-01-27 Infineon Technologies Ag Sensoreinrichtung mit magnetostriktivem Kraftsensor
US6988414B2 (en) 2003-04-29 2006-01-24 Stiftung Caesar Center Of Advanced European Studies And Research Sensor device having a magnetostrictive force sensor

Also Published As

Publication number Publication date
WO2001006222A3 (fr) 2001-04-26
AU6355600A (en) 2001-02-05
WO2001006222A9 (fr) 2002-08-29
TW452646B (en) 2001-09-01

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