AU6355600A - Use of multi-layer thin films as stress sensors - Google Patents

Use of multi-layer thin films as stress sensors

Info

Publication number
AU6355600A
AU6355600A AU63556/00A AU6355600A AU6355600A AU 6355600 A AU6355600 A AU 6355600A AU 63556/00 A AU63556/00 A AU 63556/00A AU 6355600 A AU6355600 A AU 6355600A AU 6355600 A AU6355600 A AU 6355600A
Authority
AU
Australia
Prior art keywords
thin films
layer thin
stress sensors
stress
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU63556/00A
Inventor
Srinivasan Ganapathi
Shiva Prakash
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fidelica Microsystems Inc
Original Assignee
Fidelica Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/500,706 external-priority patent/US6889555B1/en
Priority claimed from US09/502,406 external-priority patent/US6694822B1/en
Application filed by Fidelica Microsystems Inc filed Critical Fidelica Microsystems Inc
Publication of AU6355600A publication Critical patent/AU6355600A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/12—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress
    • G01L1/125—Measuring force or stress, in general by measuring variations in the magnetic properties of materials resulting from the application of stress by using magnetostrictive means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Hall/Mr Elements (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Magnetic Variables (AREA)
AU63556/00A 1999-07-20 2000-07-19 Use of multi-layer thin films as stress sensors Abandoned AU6355600A (en)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US14484399P 1999-07-20 1999-07-20
US60144843 1999-07-20
US09500706 2000-02-09
US09/500,706 US6889555B1 (en) 1999-07-20 2000-02-09 Magnetoresistive semiconductor pressure sensors and fingerprint identification/verification sensors using same
US09/502,406 US6694822B1 (en) 1999-07-20 2000-02-10 Use of multi-layer thin films as stress sensor
US09502406 2000-02-10
PCT/US2000/019709 WO2001006222A2 (en) 1999-07-20 2000-07-19 Use of multi-layer thin films as stress sensors

Publications (1)

Publication Number Publication Date
AU6355600A true AU6355600A (en) 2001-02-05

Family

ID=27386170

Family Applications (1)

Application Number Title Priority Date Filing Date
AU63556/00A Abandoned AU6355600A (en) 1999-07-20 2000-07-19 Use of multi-layer thin films as stress sensors

Country Status (3)

Country Link
AU (1) AU6355600A (en)
TW (1) TW452646B (en)
WO (1) WO2001006222A2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6596747B2 (en) * 1998-10-29 2003-07-22 Bristol-Myers Squibb Company Compounds derived from an amine nucleus and pharmaceutical compositions comprising same
DE10250358B4 (en) * 2002-10-29 2017-02-09 Infineon Technologies Ag Sensor module for measuring mechanical forces
DE10319319A1 (en) 2003-04-29 2005-01-27 Infineon Technologies Ag Sensor device with magnetostrictive force sensor
JP6190227B2 (en) * 2013-09-20 2017-08-30 株式会社東芝 Pressure sensor, microphone, blood pressure sensor, portable information terminal and hearing aid
TWI577977B (en) * 2016-01-11 2017-04-11 Rotatech Int Corp Magnetic torque sensing device for steering system
CN114739544B (en) * 2022-02-23 2024-06-14 万津实业(赤壁)有限公司 Pressure monitoring diaphragm, assembly and pressure monitoring method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2520848B2 (en) * 1993-10-25 1996-07-31 株式会社エニックス Magnetic surface pressure input panel
US5589770A (en) * 1994-06-27 1996-12-31 Matsushita Electric Industrial Co., Ltd. Mechanical sensor for detecting stress or distortion with high sensitivity
JPH08129718A (en) * 1994-10-28 1996-05-21 Sony Corp Magneto-resistance effect type magnetic sensor
US5648885A (en) * 1995-08-31 1997-07-15 Hitachi, Ltd. Giant magnetoresistive effect sensor, particularly having a multilayered magnetic thin film layer
US5856617A (en) * 1997-09-02 1999-01-05 International Business Machines Corporation Atomic force microscope system with cantilever having unbiased spin valve magnetoresistive strain gauge

Also Published As

Publication number Publication date
WO2001006222A2 (en) 2001-01-25
TW452646B (en) 2001-09-01
WO2001006222A9 (en) 2002-08-29
WO2001006222A3 (en) 2001-04-26

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase