WO2000054874A1 - Micromelangeur actif - Google Patents

Micromelangeur actif Download PDF

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Publication number
WO2000054874A1
WO2000054874A1 PCT/EP1999/001722 EP9901722W WO0054874A1 WO 2000054874 A1 WO2000054874 A1 WO 2000054874A1 EP 9901722 W EP9901722 W EP 9901722W WO 0054874 A1 WO0054874 A1 WO 0054874A1
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WO
WIPO (PCT)
Prior art keywords
membrane
outlet
mixing chamber
active
substrate element
Prior art date
Application number
PCT/EP1999/001722
Other languages
German (de)
English (en)
Inventor
Peter Woias
Original Assignee
Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. filed Critical Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V.
Priority to EP99915626A priority Critical patent/EP1161294B1/fr
Priority to PCT/EP1999/001722 priority patent/WO2000054874A1/fr
Priority to DE59902159T priority patent/DE59902159D1/de
Publication of WO2000054874A1 publication Critical patent/WO2000054874A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F25/00—Flow mixers; Mixers for falling materials, e.g. solid particles
    • B01F25/40—Static mixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
    • B01F31/30—Mixers with shaking, oscillating, or vibrating mechanisms comprising a receptacle to only a part of which the shaking, oscillating, or vibrating movement is imparted
    • B01F31/31—Mixers with shaking, oscillating, or vibrating mechanisms comprising a receptacle to only a part of which the shaking, oscillating, or vibrating movement is imparted using receptacles with deformable parts, e.g. membranes, to which a motion is imparted
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F33/00—Other mixers; Mixing plants; Combinations of mixers
    • B01F33/30—Micromixers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/36—Mixing of ingredients for adhesives or glues; Mixing adhesives and gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00783—Laminate assemblies, i.e. the reactor comprising a stack of plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/00781—Aspects relating to microreactors
    • B01J2219/00889—Mixing

Definitions

  • the present invention relates to the mixing of liquids and / or gases and in particular to an active micromixer for mixing small quantities of substances.
  • the mixture of liquids and / or gases, i.e. of fluids, is required in various areas of technology.
  • Typical fields of application are, for example, the mixing of multicomponent adhesives or casting compounds in manufacturing technology, mixing processes in chemical synthesis and reaction technology, the production of homogeneous emulsions or mixing processes in chemical analysis.
  • micromixers In addition to known stacking or batch processes, which are carried out, for example, by means of a stirred tank or a rotating drum mixer, mixing processes are often also carried out in the flow by means of so-called flow mixers.
  • flow mixers Unlike macromixers, micromixers have small geometries and / or small throughputs. Throughputs generated by micromixers are typically below 1 1 / hour for liquids. Typical geometries of a micromixer range from ⁇ m to a few mm.
  • the known mixers can be divided into static mixers on the one hand and active mixers on the other.
  • static mixers are discussed.
  • flow micromixers are often based on the concept of the so-called static mixer, which is also known from macroscopic technology, for example for mixing multicomponent adhesives.
  • This Mixers are passive components, ie they do not use any separately supplied additional energy in order to mix the starting components.
  • diffusion and / or turbulence effects are effective, depending on the fluidic conditions.
  • the mixing ratio of the supplied starting components can be determined externally by appropriate adjustment of the material flows or by the design of the mixing element, for example by cross-sectional dimensioning of the structure through which flow passes.
  • microstructures In contrast to markroscopic systems, microstructures generally have laminar flow conditions. Turbulent flows, which would allow a more effective mixing, cannot be used in static micromixers. As a result, the diffusion time or the corresponding diffusion length becomes the determining variable for the efficiency of the mixing process. In known micromixer concepts, this size is reduced by the measures described below.
  • the thinnest possible parallel streams of the components to be mixed are generated in the outlet of the micromixer.
  • the greatly enlarged interfaces between the partial flows and the small dimensions of the individual partial flows reduce the critical diffusion lengths laterally to the direction of flow and allow a much faster mixing by diffusion compared to a simple two-phase flow.
  • the lamination is carried out in a single stage in multiparallel configurations (see, for example, Kämper et al., Microfluidic Components for Biological and Chemical Microreactors, Proc.
  • a similar arrangement (Voldman et al., Liquid mixing studies with an integrated mixer / valve, Proc. Of the ⁇ TAS '98 Workshop, October 13-16, 1998, Banff, Canada, p. 181-184) uses one instead of the nozzle plate Flap valve which is arranged on the side wall of a microchannel and closes a laterally opening second microchannel. As soon as a fluid is fed into the side channel by means of excess pressure, the flap valve opens and allows the two partial flows to be brought together and mixed in the main channel. Measures to reduce the diffusion lengths are not taken here.
  • the so-called active micromixers use a separately supplied additional energy to support or bring about the mixing process.
  • DE 196 11 270 AI describes a micromixer for handling the smallest amounts of liquid.
  • the same comprises a structured silicon chip which forms a silicon-glass composite with a Pyrex glass plate.
  • the structured silicon chip contains the structures of a micro ejection pump with an inlet channel, a pump chamber and an outlet channel, as well as a further inlet channel which is connected to the outlet channel. nal the micro ejection pump is connected. Alternatively, both inlet channels can lead into the pump chamber. Both the inlet channels and the outlet channel are structured in the same plane as the pump chamber in the silicon chip. In a loading mode, the pump chamber is filled by sucking the liquids to be mixed together from the inlet channels and from the outlet channel into the pump chamber.
  • the contents of the pumping chamber are dispensed in droplet form via the outlet channel from an outlet opening.
  • the outlet channel ends at the side of the chip edge in a free opening.
  • the mixing ratios are set by suitable variation of the cross sections of inlet and outlet channels, by setting a suitable operating frequency of the pump membrane and / or by separating individual inlet channels with the aid of external valves.
  • Static mixers based on the laminar flow concept have typical channel widths in the range of a few 10 ⁇ m down to a few ⁇ m to reduce the diffusion lengths. This means that there is always a risk of clogging with particles. Furthermore, the concept requires a comparatively complex design of the channel system and thus often increases the complexity of the manufacturing process and the size of the mostly planar chip structures, which makes such mixer concepts expensive. Due to the complex folding of the flow, there is also the risk of sedimentation in dead zones. When filling these highly parallel branched channel structures, there is a risk that individual side two do not fill with liquid and therefore do not contribute to the mixture. Series-connected multi-stage micromixers can indeed be implemented with simpler individual stages, which have the disadvantages mentioned to a lesser extent. However, the multi-stage arrangement in turn increases the chip sizes and additionally the total residence time in the mixer. In general, it can be stated that in static mixers, for fluid mechanical reasons, the mixing quality is influenced by the flow rate and decreases as the flow rate decreases.
  • the mixer described in DE 196 11 270 AI is based on a drop metering concept and can therefore not be used in real flow-through operation.
  • This concept is sensitive to interferences, such as the result of a meniscus formation at the outlet dependent on media properties or the deposition of particles at the outlet, in that the same micro ejection pump is used for both mixing and fluid delivery.
  • Media properties e.g. The viscosity and thus also the temperature or particle density also influence the flow behavior of the entire structure and therefore limit the area of application.
  • the series connection of a static and an active mixer uses the ultrasound principle by means of SAW at a frequency of 10 MHz for active mixing. It is known that with this principle, due to the low efficiency of the SAW, a very high electrical power is required in order to introduce sufficient mechanical energy into the medium. The overall efficiency of the arrangement is therefore low.
  • the object of the present invention is to provide an active mixer which is less complex to produce and on the other hand provides reliability, a good mixing action and a high degree of flexibility in order to to be able to use different situations.
  • the present invention is based on the finding that the conveying of the mixed fluid on the one hand and the mixing on the other must be separated as far as possible in order to obtain an active micromixer, the mixing quality of which is relatively independent of the quantity conveyed, or which allows it to be used in to ensure good mixing quality in a range of quantities to be conveyed, which is therefore flexible and reliable.
  • a membrane is deflected according to the invention by means of an excitation device attached to it, which can be an actuator or also part of an actuator. Together with a substrate element, the membrane defines a mixing chamber, which, however, does not require complicated shapes, since a mixing effect is achieved by the interaction of the membrane and an outlet which is introduced in the substrate element with respect to the membrane.
  • deflection of the membrane by the excitation device arranged on the membrane creates a pressure surge towards the outlet, which causes a mixing of the fluid in the vicinity of the outlet opening.
  • This pressure surge with each deflection of the membrane towards the outlet greatly disturbs the otherwise laminar flow profile in the outlet, which leads to a very effective reduction in the diffusion lengths due to a three-dimensional swirl caused by the membrane.
  • the outlet is in the area of the membrane which shows the greatest deflection, which may be in the middle of the membrane, for example.
  • the at least two inlets into the mixing chamber are preferably located at the edge of the membrane, such that the fluid has to travel as long as possible through the mixing chamber until it comes close to the outlet, in such a way that the two fluids to be mixed are already in place undergo some "premixing" through the reciprocating membrane before they are whirled by the pressure surge at the outlet.
  • Another advantage of the interaction of the membrane and the outlet opposite the membrane is that when the membrane is deflected away from the outlet, fluid is sucked back into the chamber from the outlet to be mixed with the contents of the mixing chamber. This mixing effect is greatest when the outlet is located where the membrane has the greatest deflection. The same applies to the surge during the downward movement of the membrane. Therefore, it is preferred to arrange the outlet and membrane so that the outlet is in the area of the membrane where the greatest deflection of the membrane can occur. If, for certain reasons, the outlet is arranged in a region of the membrane that has a deflection that is less than the maximum, the effect will decrease, but will still be present. It is therefore only important for the present invention that at the area where the outlet is located with respect to the membrane, the membrane can have a deflection such that a pressure surge can be applied in the direction of the outlet to increase the three-dimensional swirl to reach.
  • FIG. 1 shows a cross section through an active mixer according to a first embodiment of the present invention.
  • Fig. 2 is a bottom view of the membrane element of Fig. 1;
  • FIG. 3 shows a cross section through an active mixer according to a second exemplary embodiment of the present invention
  • Fig. 4 is a bottom view of the membrane element of the active mixer shown in Fig. 3;
  • FIG. 5 shows a cross-sectional view of the active mixer, in which the situation is shown with the membrane deflected away from the substrate element;
  • Fig. 6 is a sectional view of the active mixer to illustrate the situation with the membrane deflected towards the outlet opening.
  • the substrate element 10 and the membrane element 12 are formed from silicon, metal, glass and / or plastic and are preferably planar chip structures.
  • the substrate element and the membrane element are by a connection method suitable for the different materials, e.g. anodic bonding, silicon fusion bonding, or gluing, fluidly mounted close to each other.
  • the membrane element 12 comprises a thin membrane 14 and an edge region 16.
  • the thin membrane or the structure of the membrane element can be realized by known manufacturing methods. Here are some examples:
  • An actuator 18 is located on a main surface of the membrane 14 attached.
  • the actuator 18 is designed as a piezoelectric actuator.
  • other drive principles ie actuators, can be used to drive the membrane 14. These could be, for example, electrostatic actuators in the form of a capacitor, magnetic actuators, etc.
  • a piezoelectric actuator 14 is assumed in the following as the preferred actuator.
  • the piezoelectric actuator 14 is of a known type and comprises a thin disk made of piezoelectrically active material, which is metallized on its top and on its bottom. For contacting the lower metal electrode of the piezo actuator, the top, i.e. the first main surface of the membrane element 12 is also metallized, which is represented in FIG. 1 by a membrane electrode 20.
  • An adhesive method or, on the other hand, a soldering method can be used as the connecting means between the piezoelectric actuator 14 and the membrane or the membrane electrode 20, as is symbolically represented by an adhesive or solder layer 22 in FIG. 1. Other suitable connection methods can also be used.
  • the conductive connection between the membrane electrode 20 and the lower actuator electrode is automatically provided by a soldering process.
  • the adhesive process requires a sufficiently thin layer of adhesive so that the usually rough surfaces of both metallizations can come into direct contact at one or more points.
  • a conductive adhesive and the like could also be used.
  • an electrically non-conductive membrane material e.g. Plastic or glass can be used.
  • the mixing chamber 24 is defined by the membrane element 12 on the one hand and the substrate element 10 on the other.
  • a depression can be implemented either in the substrate element 10 or in the membrane element 12 or in both elements.
  • the membrane element 12 comprises a depression, as can be seen on the left edge of FIG. 1.
  • the lateral shape of the mixing chamber 24 can be designed as desired using suitable manufacturing processes. However, it is preferred that the mixing chamber 24 be laid out flat, i.e. that the vertical dimension is less than the lateral dimensions. The vertical dimension should moreover lie in the size of the downward movement achievable with the membrane actuator 14, which can be, for example, 15 ⁇ m.
  • the dimension of the mixing chamber perpendicular to the substrate element surface or perpendicular to the other main surface of the membrane 14 should, in particular, not exceed the possible deflection of the membrane by orders of magnitude.
  • the vertical dimension of the mixing chamber 24 is preferably chosen so large that it is possible to pass the media to be mixed or any particles present in the media to be mixed without greater flow resistance and without blockage of the structure. Typical dimensions for the mixing chamber are in the range of 5 ⁇ m and 100 ⁇ m.
  • 1 shows a case in which an inlet opening 28 opens through the edge region 16 of the membrane element 12 into a feed channel 30.
  • the other Inlet opening 32 runs between membrane element 12 and substrate element 10 such that no breakthrough of membrane element 12 is required and is also in fluid communication with mixing chamber 24 via a corresponding feed channel 34.
  • the outlet opening 36 through the substrate element 10 can take any shape.
  • the arrangement of the outlet opening 36 in the center of the membrane 14, ie where it has the highest deflection, is only a preferred embodiment of the active mixer.
  • the outlet opening is arranged opposite the membrane in a region of the substrate element 10 where the membrane still has a deflection.
  • this area can therefore be offset from the center of the mixing chamber 24 and lie opposite an area of the membrane that has a smaller deflection than the maximum deflection of the membrane in another area of the membrane.
  • the mixing effect will decrease somewhat here, but depending on the application, it may still be sufficient.
  • the dimensions of the feed channels and the outlet channel are preferably selected so that they do not significantly influence or impair the feed and discharge of the respective media, for example via a pressure drop along the channels.
  • the inlet openings, the feed channels and the outlet channel are preferably designed large enough to enable the particles to pass properly in the event of media containing particles.
  • 2 shows a view from below of the membrane element 12 in order to illustrate a possible configuration of the inlet openings 28, 32 and of the feed channels 30, 34 of the active mixer.
  • the outlet opening is indicated in FIG. 2 by the reference symbol 36, but the same is indicated by dashed lines to illustrate that it is of course not provided in the membrane element 12 but in the opposite substrate element 10 (FIG. 1). From Fig. 2 it can be seen that it is preferred to configure the inlet channels 31, 34 so that the media to be mixed are fed to the diagonal ends of a square mixing chamber 24.
  • the mixing chamber 24 has at least two inlets and one outlet.
  • An inlet into the mixing chamber is defined by the point at which a feed channel enters the mixing chamber from an inlet opening. This point is given by a corresponding feed channel which ends on the other side in an opening of the mixer to the outside. The same applies analogously to the outlet.
  • the outlet is defined by the point at which an outlet channel leading to an outlet opening emerges from the mixing chamber.
  • the active mixer the membrane element of which is shown in FIG. 2
  • inlet openings or corresponding inlet channels could also be created at the two still free corners, such that the mixing chamber 24 is fed from all corners becomes.
  • the distance between the inlets into the mixing chamber 24 and the outlet (36, 38) in the substrate element 10 (FIG. 1) is chosen to be maximum, such that the fluid has to flow through as large an area of the mixing chamber 24 as possible. before it reaches the outlet to be pre-mixed by the reciprocating membrane 14 (Fig. 1) before the fluids then through the interaction of the membrane and the outlet ready to be mixed.
  • Fig. 3 shows an active mixer according to a further embodiment of the present invention, in which all openings are provided in the substrate element 10, i.e. one inlet opening 28 'with an associated inlet duct 30' and a further inlet opening 32 'with an associated further inlet duct 34'.
  • the outlet opening 36 is arranged opposite the membrane 14.
  • the embodiment shown in FIG. 3 has the advantage in production that the inlet openings or inlet channels can be produced in the same manufacturing step as the outlet opening or outlet channel, and that the membrane element 12 does not need to be subjected to such a treatment.
  • the mixing chamber 24 is also realized here by a depression in the membrane element 12.
  • the same, as has already been stated could also be realized by a depression in the substrate element 10 or by a depression in both elements.
  • the actuator is again designed as a piezoelectric actuator 18.
  • FIG. 4 shows a bottom view of the membrane element 12 shown in FIG. 3, the inlets or inlet openings 28 ′, 32 ′ present in the substrate element 10 being shown again with dashed lines, their arrangement with respect to the outlet or the outlet opening 36 in the substrate element 10 has the advantage that the same are arranged as far as possible from the outlet opening 36 in order to achieve the greatest possible “premixing” effect.
  • the inlet openings 28, 32 and 28 ', 32' are connected to feed devices which actively meter the respective starting components, ie the fluids to be mixed.
  • the mixing ratio is thus set explicitly by external adjustment of the metering rates of the feed devices, which makes any mixing ratios controllable from the outside possible, which can also be changed dynamically.
  • the actuator 18 together with the membrane therefore essentially performs the task of mixing, in particular in interaction with the outlet opening 36, while the feeding of the fluid is effected by the externally controllable metering devices.
  • the mixing chamber 24 is of a small height, a flow pattern that is rotationally symmetrical to the outlet 36 and that consists of segments of the partial streams supplied in each case usually arises in the stationary case.
  • the respective boundary layers between these partial flows run towards the common, preferably central, outlet 36, 38.
  • the combination of piezo actuator 18 and membrane is periodically deflected upward (FIG. 5) and downward (FIG. 6) by applying an electrical voltage to the piezo actuator.
  • the volume of the mixing chamber 24 is increased and decreased periodically, as a result of which the flow pattern inside the chamber, which is laminar in the idle state, is periodically severely disturbed and thus results in mixing which is the "premixing" already mentioned several times.
  • the deflection of the actuator 18 should be chosen to be sufficiently large in both directions, for example 10 ⁇ m downwards and 5 ⁇ m upwards at a chamber depth of 15 ⁇ m, in order to periodically move a significant proportion of the mixing chamber volume and thus already achieve the premixing effect in the mixing chamber .
  • a sufficiently large stroke should be set during the downward movement of the actuator 18 in order to generate sufficiently high pressure surges in the outlet for swirling the flow threads 16.
  • the excitation of the membrane 14 by means of a piezoelectric actuator 18 is only a preferred excitation option.
  • other means can be used.
  • An upper limit of frequency is given by the fact that due to the inertia of the fluids there is no longer a clear formation of pressure waves.
  • Typical optimal values of the drive frequency should be in the range from about 50 Hz to a few kHz.
  • the waveform with which the membrane 14 is excited is in principle arbitrary. However, a rectangular signal shape is preferred in order to achieve high pressure transients, in particular when the membrane is moving downward.
  • the present invention thus creates reliable, easy to manufacture and flexibly usable micromixers that do not require complicated channel structures and do not require too much space on a chip, which is why the manufacture is inexpensive. Furthermore, the active micromixers according to the invention are reliable and relatively less susceptible to clogging, since all channel diameters can be chosen to be sufficiently large. In addition, the output rate can be adjusted almost as desired by the input rate of the fluids to be mixed, with only the frequency of the excitation signal for the membrane being adapted to a changed output rate in order to achieve an equally high degree of mixing. In summary, the present invention therefore provides the following advantages:
  • any mixing ratios can be implemented, since the mixing ratio is defined externally by the feed rates and does not depend on the mixer geometry. gig, which, in connection with the low dead volume of the mixing chamber, also allows time-variable mixing profiles to be run very quickly;
  • the flow through the structure of the mixer can easily be designed with a sufficient cross-section in terms of flow technology, so that media containing particles can be used or mixed without risk of sedimentation in dead zones or blockage;
  • the operating frequency of the piezo actuator preferably used is at most in the kHz range and thus significantly below the operating frequency of, for example, a SAW converter, as a result of which the power consumption of the active mixer according to the invention is limited and the efficiency of the active mixer is high.

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

L'invention concerne un micromélangeur actif comprenant un élément membranaire (12) comportant une zone marginale (16) et une membrane (14). Un élément d'actionnement (18) servant à provoquer une flexion de la membrane (14) est placé sur une surface principale de cette dernière (14). Ce micromélangeur actif comprend en outre un élément substrat (10) qui est raccordé à la zone marginale (16) de l'élément membranaire (12) pour définir une chambre de mesure (24) entre l'autre surface principale de la membrane (14) et l'élément substrat (10). Au moins deux entrées (28, 30, 32, 34) servent à acheminer au moins deux fluides à mélanger. La chambre de mélange (24) présente une évacuation (36, 38) située dans l'élément substrat (10) de sorte qu'une zone de flexion de la membrane soit opposée à cette évacuation (36, 38) de manière que, lors d'une flexion de la membrane en direction de l'évacuation, il se produise un coup de bélier qui provoque un mélange du fluide à proximité de l'évacuation. Ce micromélangeur actif présente une grande souplesse d'utilisation, est peu sensible aux engorgements et peut être fabriqué de manière économique.
PCT/EP1999/001722 1999-03-16 1999-03-16 Micromelangeur actif WO2000054874A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP99915626A EP1161294B1 (fr) 1999-03-16 1999-03-16 Micromelangeur actif
PCT/EP1999/001722 WO2000054874A1 (fr) 1999-03-16 1999-03-16 Micromelangeur actif
DE59902159T DE59902159D1 (de) 1999-03-16 1999-03-16 Aktiver mikromischer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP1999/001722 WO2000054874A1 (fr) 1999-03-16 1999-03-16 Micromelangeur actif

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WO2000054874A1 true WO2000054874A1 (fr) 2000-09-21

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EP (1) EP1161294B1 (fr)
DE (1) DE59902159D1 (fr)
WO (1) WO2000054874A1 (fr)

Cited By (7)

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EP1260265A1 (fr) * 2001-05-25 2002-11-27 Tecan Trading AG Appareil pour la préparation d'une chambre d'hybridation, set de traitament et système pour l'hybridation d'échantillons d'acide nucléique, protéines et tissus
DE10238585B3 (de) * 2002-08-22 2004-04-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Zweiteiliges Fluidmodul
WO2004045754A1 (fr) * 2002-11-20 2004-06-03 Unilever N.V. Appareil et procede permettant le melange de composants
WO2009122340A1 (fr) * 2008-04-04 2009-10-08 Koninklijke Philips Electronics N.V. Transducteurs à ultrasons permettant d'obtenir un mélange microfluidique
EP1913994A3 (fr) * 2006-10-20 2009-12-02 Hitachi Plant Technologies, Ltd. Appareil d'émulsion et appareil de fabrication de grains fins
WO2012011090A1 (fr) * 2010-07-19 2012-01-26 Analytical Developments Limited Dispositif analyseur de liquide et procédé afférent
WO2017220674A1 (fr) * 2016-06-21 2017-12-28 Carbus - Veículos E Equipamentos Lda Mélangeur microfluidique et procédé de mélange de liquides

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CN101203296A (zh) * 2005-06-23 2008-06-18 皇家飞利浦电子股份有限公司 用于混合液体介质的装置
DE102005043034A1 (de) * 2005-09-09 2007-03-15 Siemens Ag Vorrichtung und Verfahren zur Bewegung einer Flüssigkeit

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US4467964A (en) * 1980-11-19 1984-08-28 Charles Kaeser Automatic mixing device for use in a shower head
EP0190019A2 (fr) * 1985-01-25 1986-08-06 Syntex (U.S.A.) Inc. Procédé et dispositif de manipulation de fluides
JPS62132530A (ja) * 1985-12-06 1987-06-15 Hitachi Ltd 液体混合装置
DE19611270A1 (de) * 1996-03-22 1997-09-25 Gesim Ges Fuer Silizium Mikros Mikromischer zur Handhabung kleinster Flüssigkeitsmengen

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Publication number Priority date Publication date Assignee Title
US4467964A (en) * 1980-11-19 1984-08-28 Charles Kaeser Automatic mixing device for use in a shower head
EP0190019A2 (fr) * 1985-01-25 1986-08-06 Syntex (U.S.A.) Inc. Procédé et dispositif de manipulation de fluides
JPS62132530A (ja) * 1985-12-06 1987-06-15 Hitachi Ltd 液体混合装置
DE19611270A1 (de) * 1996-03-22 1997-09-25 Gesim Ges Fuer Silizium Mikros Mikromischer zur Handhabung kleinster Flüssigkeitsmengen

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Cited By (17)

* Cited by examiner, † Cited by third party
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EP1260265A1 (fr) * 2001-05-25 2002-11-27 Tecan Trading AG Appareil pour la préparation d'une chambre d'hybridation, set de traitament et système pour l'hybridation d'échantillons d'acide nucléique, protéines et tissus
US7618812B2 (en) 2001-05-25 2009-11-17 Tecan Trading Ag Device and process unit for providing a hybridization chamber
EP1524028A2 (fr) * 2001-05-25 2005-04-20 Tecan Trading AG Appareil et procédé pour la préparation d'une chambre d'hybridation
US6946287B2 (en) 2001-05-25 2005-09-20 Tecan Trading Ag Device for providing a hybridization chamber, and process unit and system for hybridizing nucleic acid samples, proteins, and tissue sections
EP1524028A3 (fr) * 2001-05-25 2005-11-30 Tecan Trading AG Appareil et procédé pour la préparation d'une chambre d'hybridation
DE10238585B3 (de) * 2002-08-22 2004-04-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Zweiteiliges Fluidmodul
US7614781B2 (en) 2002-11-20 2009-11-10 Conopco, Inc. Apparatus and method for mixing components
CN1331583C (zh) * 2002-11-20 2007-08-15 荷兰联合利华有限公司 用于混合组分的装置和方法
WO2004045754A1 (fr) * 2002-11-20 2004-06-03 Unilever N.V. Appareil et procede permettant le melange de composants
EP1913994A3 (fr) * 2006-10-20 2009-12-02 Hitachi Plant Technologies, Ltd. Appareil d'émulsion et appareil de fabrication de grains fins
WO2009122340A1 (fr) * 2008-04-04 2009-10-08 Koninklijke Philips Electronics N.V. Transducteurs à ultrasons permettant d'obtenir un mélange microfluidique
WO2012011090A1 (fr) * 2010-07-19 2012-01-26 Analytical Developments Limited Dispositif analyseur de liquide et procédé afférent
CN103002976A (zh) * 2010-07-19 2013-03-27 分析发展有限公司 液体分析装置和相关方法
US8911692B2 (en) 2010-07-19 2014-12-16 Analytical Developments Limited Liquid analyzer device and related method
US9289737B2 (en) 2010-07-19 2016-03-22 Analytical Developments Limited Liquid analyzer device and related method
CN103002976B (zh) * 2010-07-19 2016-03-23 分析发展有限公司 液体分析装置和相关方法
WO2017220674A1 (fr) * 2016-06-21 2017-12-28 Carbus - Veículos E Equipamentos Lda Mélangeur microfluidique et procédé de mélange de liquides

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EP1161294B1 (fr) 2002-07-24
EP1161294A1 (fr) 2001-12-12

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