WO2000032537A3 - Materiaux lies par reaction a base de nitrure de silicium et leur procede de fabrication - Google Patents

Materiaux lies par reaction a base de nitrure de silicium et leur procede de fabrication Download PDF

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Publication number
WO2000032537A3
WO2000032537A3 PCT/EP1999/009341 EP9909341W WO0032537A3 WO 2000032537 A3 WO2000032537 A3 WO 2000032537A3 EP 9909341 W EP9909341 W EP 9909341W WO 0032537 A3 WO0032537 A3 WO 0032537A3
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WO
WIPO (PCT)
Prior art keywords
silicon
silicon nitride
producing
reaction
based materials
Prior art date
Application number
PCT/EP1999/009341
Other languages
German (de)
English (en)
Other versions
WO2000032537A2 (fr
Inventor
Lothar Schoenfelder
Gerhard Woetting
Original Assignee
Cfi Ceramics For Industry Gmbh
Lothar Schoenfelder
Gerhard Woetting
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Cfi Ceramics For Industry Gmbh, Lothar Schoenfelder, Gerhard Woetting filed Critical Cfi Ceramics For Industry Gmbh
Priority to AU31486/00A priority Critical patent/AU3148600A/en
Priority to EP99969908A priority patent/EP1144337A2/fr
Publication of WO2000032537A2 publication Critical patent/WO2000032537A2/fr
Publication of WO2000032537A3 publication Critical patent/WO2000032537A3/fr

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    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/591Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by reaction sintering
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/589Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained from Si-containing polymer precursors or organosilicon monomers
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/584Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
    • C04B35/593Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering
    • C04B35/5935Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride obtained by pressure sintering obtained by gas pressure sintering

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Ceramic Products (AREA)

Abstract

L'invention concerne des matériaux liés par réaction à base de nitrure de silicium, qui contiennent comme phases cristallines du nitrure de silicium (Si3N4), du carbure de silicium (SiC) et de l'oxynitrure de silicium (Si2N2O), possèdent une teneur en phase silicium ≤ 1 % et présentent de très bonnes propriétés mécaniques et un comportement très stable dans des conditions oxydantes à des températures élevées. L'invention concerne également un procédé pour la fabrication de ces matériaux à partir d'un mélange de silicium, de nitrure de silicium et de composés de silicium organiques (de préférence des polysiloxanes et/ou des polycarbosilanes) par traitement thermique de ce mélange en atmosphère azotée, de sorte que les composés de silicium organiques sont pyrolysés et nitrurés en présence du silicium. L'invention concerne d'autre part l'utilisation de ces matériaux pour la fabrication de pièces céramiques.
PCT/EP1999/009341 1998-12-03 1999-12-01 Materiaux lies par reaction a base de nitrure de silicium et leur procede de fabrication WO2000032537A2 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
AU31486/00A AU3148600A (en) 1998-12-03 1999-12-01 Reaction-bonded silicon nitride-based materials and method for producing the same
EP99969908A EP1144337A2 (fr) 1998-12-03 1999-12-01 Materiaux lies par reaction a base de nitrure de silicium et leur procede de fabrication

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE1998155811 DE19855811A1 (de) 1998-12-03 1998-12-03 Reaktionsgebundene Werkstoffe auf Basis von Siliciumnitrid und Verfahren zu deren Herstellung
DE19855811.2 1998-12-03

Publications (2)

Publication Number Publication Date
WO2000032537A2 WO2000032537A2 (fr) 2000-06-08
WO2000032537A3 true WO2000032537A3 (fr) 2000-10-05

Family

ID=7889863

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP1999/009341 WO2000032537A2 (fr) 1998-12-03 1999-12-01 Materiaux lies par reaction a base de nitrure de silicium et leur procede de fabrication

Country Status (4)

Country Link
EP (1) EP1144337A2 (fr)
AU (1) AU3148600A (fr)
DE (1) DE19855811A1 (fr)
WO (1) WO2000032537A2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10060221A1 (de) 2000-12-04 2002-06-13 Cfi Ceramics For Industry Gmbh Substrat auf Basis von Siliciumnitrid für Halbleiter-Bauelemente
DE10203473A1 (de) 2002-01-25 2003-07-31 Skf Ab Verfahren zur Herstellung keramischer Lagerbauteile
CN100453508C (zh) * 2006-06-14 2009-01-21 中国科学院理化技术研究所 化学激励燃烧合成氮化硅/碳化硅复合粉体的方法
EP2310339B1 (fr) * 2008-06-13 2016-04-20 Saint-Gobain Ceramics & Plastics Inc. Produit résistant au changement de volume à base de carbure de silicium lié à d' oxynitrure de silicium
RU2651861C1 (ru) * 2016-11-03 2018-04-24 Федеральное государственное бюджетное образовательное учреждение высшего образования "Московский авиационный институт (национальный исследовательский университет)" Способ получения изделий на основе нитрида кремния

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2650083A1 (de) * 1976-10-30 1978-05-03 Daimler Benz Ag Verfahren zum herstellen von werkstuecken aus siliziumnitrid
GB2066800A (en) * 1979-11-30 1981-07-15 Kurosaki Refractories Co Sic-si3n4 composite system
US5190709A (en) * 1989-06-29 1993-03-02 Hercules Incorporated Reaction injection molding of ceramics using a ceramic precursor as a binder

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2803658A1 (de) * 1977-01-27 1978-08-10 Kyoto Ceramic Verfahren zur herstellung von dichten, gesinterten siliciumcarbidkoerpern aus polycarbosilan
DE4318974C2 (de) * 1993-06-08 1995-04-27 Fraunhofer Ges Forschung Verfahren zur Herstellung von Formkörpern

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2650083A1 (de) * 1976-10-30 1978-05-03 Daimler Benz Ag Verfahren zum herstellen von werkstuecken aus siliziumnitrid
GB2066800A (en) * 1979-11-30 1981-07-15 Kurosaki Refractories Co Sic-si3n4 composite system
US5190709A (en) * 1989-06-29 1993-03-02 Hercules Incorporated Reaction injection molding of ceramics using a ceramic precursor as a binder

Also Published As

Publication number Publication date
WO2000032537A2 (fr) 2000-06-08
AU3148600A (en) 2000-06-19
DE19855811A1 (de) 2000-06-08
EP1144337A2 (fr) 2001-10-17

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