WO2000029160A1 - Glissiere lineaire et procede de traitement de la surface d'une glissiere lineaire - Google Patents

Glissiere lineaire et procede de traitement de la surface d'une glissiere lineaire Download PDF

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Publication number
WO2000029160A1
WO2000029160A1 PCT/JP1998/005112 JP9805112W WO0029160A1 WO 2000029160 A1 WO2000029160 A1 WO 2000029160A1 JP 9805112 W JP9805112 W JP 9805112W WO 0029160 A1 WO0029160 A1 WO 0029160A1
Authority
WO
WIPO (PCT)
Prior art keywords
linear guide
guide rail
coating
electrode
discharge
Prior art date
Application number
PCT/JP1998/005112
Other languages
English (en)
Japanese (ja)
Inventor
Hiroyuki Ohguro
Akihiro Goto
Toshio Moro
Original Assignee
Mitsubishi Denki Kabushiki Kaisha
Mitsubishi Electric Engineering Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Co., Ltd. filed Critical Mitsubishi Denki Kabushiki Kaisha
Priority to PCT/JP1998/005112 priority Critical patent/WO2000029160A1/fr
Publication of WO2000029160A1 publication Critical patent/WO2000029160A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C26/00—Coating not provided for in groups C23C2/00 - C23C24/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/005—Guide rails or tracks for a linear bearing, i.e. adapted for movement of a carriage or bearing body there along
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/30—Parts of ball or roller bearings
    • F16C33/58—Raceways; Race rings
    • F16C33/64—Special methods of manufacture

Definitions

  • the present invention relates to a linear guide rail and a surface treatment method of the linear guide rail, and in particular, to a linear guide rail and a linear guide used as a guide member of a linear motion part such as a movable table and a slider in a machine tool or an industrial machine.
  • the present invention relates to a surface treatment method for rails.
  • Guide mechanisms for linear motion parts in machine tools and industrial machines are linear guide rails that are fixed to the machine frame or bed, and linear guide rails that are provided on the moving side of movable tables and sliders. And a linear guide block which engages as much as possible.
  • FIG. 3 shows a specific example of the guide mechanism of the linear motion unit.
  • the linear guide block 52 which includes the block body 50 and the end plates 51 at the front and rear ends, incorporates a ball motion linear motion ball bearing 53, and the linear guide rail 60 has a linear motion ball bearing 53.
  • the rolling surface 61 of the ball 54 is provided.
  • the linear guide block 52 linearly moves along the linear guide rail 60 while rolling the ball 54 along the rolling surface 61.
  • Linear guide rails are manufactured by drawing a rail material made of steel for machine structural use by drawing and then carburizing the rail material to increase the carbon content of the surface layer of the rail material, followed by induction hardening, etc.
  • the rail surface is hardened by quenching, and finally the rail surface is polished to finish the ball rolling surface to a predetermined shape and dimensions.
  • linear guide rails are used as they are, but especially when strength is required. If the rail is used in a special environment, then the rail surface should be coated with a surface coating of the required material by PVD (physical vapor deposition), CVD (chemical vapor deposition), etc. Is performed.
  • PVD physical vapor deposition
  • CVD chemical vapor deposition
  • the processing temperature is as high as 500 ° C. to 300 ° C., so even if it is hardened by induction hardening, it will be in a tempered state and the hardness of the linear guide rail will be reduced. There is a problem that the polishing finish accuracy of the linear guide rail is reduced by the deformation.
  • the coating film formed by these treatments has poor adhesion to the base material, the coating film is peeled off during the use of the linear guide rail, and dust is generated. This dust shortens the life of the linear guide rail and the ball of the linear motion ball bearing on the linear guide block side due to damage to the ball rolling surface of the linear guide rail and the linear guide ball. There were problems with use in environments that should not be allowed.
  • the present invention has been made to solve the above-described problems, and has a linear guide rail having a required high-quality surface treatment layer (surface coating) without requiring complicated processing steps and special equipment. And to provide a surface treatment method for the linear guide rail. Disclosure of the invention The present invention relates to a method for producing a discharge electrode electrode melted substance or a reactant thereof, which is generated by electric discharge machining due to electric discharge machining on the rail surface, and deposits and deposits on the rail surface. And a linear guide rail having a coating formed of the linear guide rail.
  • the linear guide rail is a required coating that has excellent adhesion with the electrode consumable molten material or its reactant only by discharge surface treatment under atmospheric pressure without exposing the material to high temperature atmosphere.
  • the present invention can provide a linear guide rail in which the coating is a hard coating.
  • the linear guide rail has excellent adhesion due to the electrode condensed molten material and the reactant on the rail surface only by discharge surface treatment under atmospheric pressure without exposing the material to high temperature atmosphere. It is covered with a hard coating to extend the life.
  • the present invention can provide a linear guide rail in which the hard coating is a hard coating made of carbides of Ti, Zr, V, Nb, and Ta.
  • linear guide rails can be made to adhere to the surface of Ti, Zr, V, Nb, and Ta carbides by exposing the material to high-temperature atmosphere and only treating the surface under discharge at atmospheric pressure. It is covered with an excellent hard coating to extend its life.
  • the present invention can provide a linear guide rail in which the coating is a non-lubricated coating.
  • the linear guide rail is covered with a non-lubricated coating with excellent adhesion by the electrode consumable molten material or its reactant only by discharge surface treatment under atmospheric pressure without exposing the material to high temperature atmosphere. Have been.
  • the present invention is the non-lubricating coating M o, M o S 2, BN, WS 2, C.
  • the linear guide rail can be used under atmospheric pressure without exposing the material to a high temperature atmosphere. Only discharge surface treatment with a metal having a rail surface M o, M o S 2, BN, WS 2, C, A u, A g, P b, S n, I n, the lubricity of such N i Or a non-lubricated film containing turquite and having excellent adhesion. Further, the present invention can provide a linear guide rail in which the coating is a corrosion-resistant coating.
  • the linear guide rail is covered with a corrosion-resistant coating with excellent adhesion by the electrode consumable molten material or its reactant only by discharge surface treatment under atmospheric pressure without exposing the material to a high temperature atmosphere. ing.
  • the present invention can provide a linear guide rail in which the corrosion-resistant coating is a corrosion-resistant coating made of a metal having corrosion resistance such as Ti, Ni, Cr, Mo, and Cu. Therefore, the linear guide rail has the corrosion resistance of Ti, Ni, Cr, Mo, Cu, etc., by exposing the material to a high-temperature atmosphere and only treating the surface of the rail under atmospheric pressure. It is covered with a corrosion-resistant coating with excellent adhesion by metal.
  • the corrosion-resistant coating is a corrosion-resistant coating made of a metal having corrosion resistance such as Ti, Ni, Cr, Mo, and Cu. Therefore, the linear guide rail has the corrosion resistance of Ti, Ni, Cr, Mo, Cu, etc., by exposing the material to a high-temperature atmosphere and only treating the surface of the rail under atmospheric pressure. It is covered with a corrosion-resistant coating with excellent adhesion by metal.
  • the present invention provides a method in which a material of a linear guide rail and a discharge electrode are opposed to each other at a predetermined discharge gap in a machining fluid to generate a discharge between the rail material and the discharge electrode, and an electrode generated by discharge energy Consumable molten material provides a surface treatment method for linear guide rails that deposits the reactant on the surface of the rail material and forms a coating on the rail surface with the electrode consumable molten material or its reactant. can do.
  • a linear guide rail is obtained in which the rail surface is covered with the electrode consumable molten material and has a desired coating excellent in adhesion by a reactant thereof.
  • the present invention can provide a surface treatment method for a linear guide rail which forms a hard coating on a rail surface by electric discharge surface treatment.
  • the present invention provides a discharge electrode comprising: a hard metal powder of Ti, Zr, V, Nb, Ta; or a green compact electrode obtained by compression-molding a hydride powder thereof; or a metal electrode made of such a metal.
  • the present invention can provide a surface treatment method for a linear guide rail that forms a hard coating by using an electric discharge machining oil containing HC as a machining fluid.
  • the surface of the rail was covered with a hard coating with excellent adhesion with carbides of Ti, Z, V, Nb, and Ta only by discharge surface treatment under atmospheric pressure.
  • a linear guide rail is obtained.
  • the present invention can provide a surface treatment method for a linear guide rail in which a non-lubricating film is formed on a rail surface by discharge surface treatment.
  • the surface of the rail is covered with a non-lubricating coating with excellent adhesion by the electrode consumable molten material or its reactant only by discharge surface treatment under atmospheric pressure.
  • a guide rail is obtained.
  • the present invention provides a method for compressing and molding a metal powder having lubricity such as Mo, oS 2 , BN, WS 2 , C, Au, Ag, Pb, Sn, In, or Ni as a discharge electrode. It is possible to provide a surface treatment method for a linear guide rail in which a non-lubricated coating is formed using a compacted electrode, a metal electrode made of such a metal, or a compacted electrode containing turquite powder.
  • a metal powder having lubricity such as Mo, oS 2 , BN, WS 2 , C, Au, Ag, Pb, Sn, In, or Ni as a discharge electrode.
  • a linear guide rail coated with a lubricating non-lubricating film made of a metal having lubricating properties or a non-lubricating film having an excellent adhesion including an adhesive can be obtained.
  • the present invention can provide a surface treatment method for a linear guide rail in which a corrosion-resistant coating is formed on a rail surface by discharge surface treatment.
  • the present invention provides a discharge electrode comprising: a powder of a corrosion-resistant metal such as Ti, Ni, Cr, Mo, Cu, or the like; a green compact electrode containing a powder of a compound thereof; And a surface treatment method for a linear guide rail in which a corrosion-resistant coating is formed using a metal electrode according to the present invention.
  • a linear guide rail is obtained in which the rail surface is covered with a corrosion-resistant coating having excellent adhesion with a corrosion-resistant metal such as Ti, Ni, Cu, Mo, or Cu.
  • FIGS. 1 (a) to 1 (c) are explanatory views showing a manufacturing process of a linear guide rail including a surface treatment step by a surface treatment method for a linear guide rail according to the present invention
  • FIG. FIG. 3 is an explanatory view showing a surface treatment apparatus for performing a surface treatment method for a linear guide rail
  • FIG. 3 is a perspective view showing a specific example of a guide mechanism of a linear motion section.
  • FIG. 1 shows a linear guide rail manufacturing process including a surface treatment step by a surface treatment method according to the present invention.
  • Manufacturing of linear guide rails consists of a rail material production process (a), in which a simple shape of steel for machine structure is formed into a predetermined rail cross-section by drawing, and a rail material 6 Ow is created. This is performed by a discharge surface treatment step (b) in which a discharge is generated between the electrodes 10 to form a film c on the rail surface, and a finish step (c) in which the rail surface is finish-ground using a grindstone G.
  • the rail material 6 Ow of the linear guide rail is formed by forming a simple shape steel for machine structure into a predetermined rail cross-sectional shape by punching, as in the conventional case, as shown in Fig. 2.
  • Nozzle between the discharge electrode 10 and the rail material 6 Ow A voltage is pulse-applied by a power supply device for electric discharge machining 20 while spraying a machining fluid.
  • the power supply device for electric discharge machining 20 includes a power supply 21, a switching element 22 for switching the voltage and current applied to the discharge electrode 10 and the rail material 6 O w, and an on / off operation of the switching element 22. It comprises a control circuit 23 for controlling and a resistor 24.
  • a voltage is applied between the discharge electrode 10 and the rail material 6 O w by the electric discharge machining power supply device 20, and in the machining fluid from the nozzle 30, the discharge electrode 10 and the rail material 6 O w
  • a pulse-like discharge is generated between the discharge electrode 10 and the rail material 6 O w.
  • the discharge energy generated by this discharge generates a spatter-like electrode consumable molten material, which adheres and accumulates on the surface of the rail material 6 ow, particularly on the ball rolling surface 61 requiring surface treatment, and the ball rolling surface.
  • a film c of the electrode consumable molten material is formed.
  • the discharge surface treatment as described above is performed in the same manner as the surface treatment method described in Japanese Patent Application Laid-Open No. Hei 5-520684, Japanese Patent Laid-Open No. 9-192937. May be done.
  • a coating c is formed on the entire ball rolling surface 61 in a uniform manner.
  • the coating c is formed to be slightly thicker and performing polishing (grinding) after forming the coating, it is possible to finish the shape and dimensions of the ball rolling surface 61 with high precision.
  • the discharge electrode 10 a metal electrode or a green compact electrode obtained by compression molding a metal powder or a metal compound powder can be used. These materials should be selected according to the required characteristics of the linear guide rail. Les ,.
  • the discharge electrode 10 is made of a hard metal powder such as Ti, Zr, V, Nb, or Ta, or a green compact electrode obtained by compression-molding a powder of a hydride thereof, or Metal electrodes made of these metals can be used.
  • the electrode material consumed by the electric discharge reacts with carbon C, which is a component in the machining fluid, to cause T
  • lubricating metal powders such as Mo, MoS 2 , BN, WS 2 , C, Au, Ag, Pb, Sn, In, and Ni, or these metals Use a compacted electrode containing powder, or a metal electrode made of these metals, or a compacted electrode containing a powder of a compound of carbon and fluorine (PFPE), commonly called Yuichi Kite
  • PFPE carbon and fluorine
  • a corrosion-resistant coating is required, powder of a metal having corrosion resistance, such as Ti, Ni, Cr, Mo, Cu, etc., or a green compact electrode containing a powder of such a compound, or a metal such as these
  • a corrosion-resistant coating made of the electrode material consumed by the discharge is formed on the ball rolling surface 61.
  • a linear guide rail in which a corrosion-resistant coating is formed on the rail surface with good adhesion can be obtained simply by discharging the surface under atmospheric pressure without exposure to the atmosphere.
  • the linear guide rail according to the present invention has a ball surface on which the balls of the linear motion ball bearing, particularly the linear guide ball on the linear guide block side, roll.
  • the required rolling force is formed on the rolling surface by electric discharge surface treatment, it can be used as a guide member for linear motion parts in various machine tools and industrial machines.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Selon cette invention, on dépose une substance d'usure fondue d'une électrode de décharge ou un produit de réaction formé au moyen de cette électrode par l'énergie de décharge lors de l'usinage par décharges électriques à la surface d'une glissière linéaire pour former un revêtement dur, un revêtement non lubrifiant ou un revêtement résistant à la corrosion de la substance d'usure de l'électrode de décharge ou du produit de réaction formé au moyen de cette électrode à la surface de la glissière.
PCT/JP1998/005112 1998-11-13 1998-11-13 Glissiere lineaire et procede de traitement de la surface d'une glissiere lineaire WO2000029160A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP1998/005112 WO2000029160A1 (fr) 1998-11-13 1998-11-13 Glissiere lineaire et procede de traitement de la surface d'une glissiere lineaire

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1998/005112 WO2000029160A1 (fr) 1998-11-13 1998-11-13 Glissiere lineaire et procede de traitement de la surface d'une glissiere lineaire

Publications (1)

Publication Number Publication Date
WO2000029160A1 true WO2000029160A1 (fr) 2000-05-25

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PCT/JP1998/005112 WO2000029160A1 (fr) 1998-11-13 1998-11-13 Glissiere lineaire et procede de traitement de la surface d'une glissiere lineaire

Country Status (1)

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WO (1) WO2000029160A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5092742B2 (ja) * 2005-09-30 2012-12-05 三菱電機株式会社 放電表面処理方法及び被膜

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991014799A1 (fr) * 1990-03-19 1991-10-03 Duroc Ab Procede de traitement de surfaces metalliques
JPH08300227A (ja) * 1995-04-14 1996-11-19 Res Dev Corp Of Japan 放電加工用電極および放電による金属表面処理方法
JPH0919829A (ja) * 1995-07-04 1997-01-21 Mitsubishi Electric Corp 放電加工による表面処理方法および装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991014799A1 (fr) * 1990-03-19 1991-10-03 Duroc Ab Procede de traitement de surfaces metalliques
JPH08300227A (ja) * 1995-04-14 1996-11-19 Res Dev Corp Of Japan 放電加工用電極および放電による金属表面処理方法
JPH0919829A (ja) * 1995-07-04 1997-01-21 Mitsubishi Electric Corp 放電加工による表面処理方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5092742B2 (ja) * 2005-09-30 2012-12-05 三菱電機株式会社 放電表面処理方法及び被膜

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