WO2000021345A1 - Manufacturing method of wiring circuit board, and wiring circuit board - Google Patents

Manufacturing method of wiring circuit board, and wiring circuit board Download PDF

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Publication number
WO2000021345A1
WO2000021345A1 PCT/JP1999/005531 JP9905531W WO0021345A1 WO 2000021345 A1 WO2000021345 A1 WO 2000021345A1 JP 9905531 W JP9905531 W JP 9905531W WO 0021345 A1 WO0021345 A1 WO 0021345A1
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WO
WIPO (PCT)
Prior art keywords
ceramic substrate
circuit board
photosensitive conductor
wiring circuit
conductor layer
Prior art date
Application number
PCT/JP1999/005531
Other languages
French (fr)
Inventor
Hiroshi Ochi
Shigetoshi Segawa
Original Assignee
Matsushita Electric Industrial Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co., Ltd. filed Critical Matsushita Electric Industrial Co., Ltd.
Priority to KR1020007006016A priority Critical patent/KR20010032727A/en
Priority to EP99970262A priority patent/EP1038418A1/en
Publication of WO2000021345A1 publication Critical patent/WO2000021345A1/en

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Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
    • H01L21/4814—Conductive parts
    • H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation

Definitions

  • the present invention relates to a manufacturing method of wiring circuit board having a ceramic substrate, and a wiring circuit board.
  • a wiring circuit board having a ceramic substrate is manufactured by a method comprising a step of applying a photosensitive conductor paste on the surface of a ceramic substrate made from a ceramic green sheet , and a step of processing the applied photosensitive conductor layer by photolithography and forming a circuit pattern.
  • the processing by photolithography consists of exposure and development by using a photo mask.
  • the invention presents a manufacturing method of a wiring circuit board for achieving a wiring circuit pattern of such fine line, and a wiring circuit board.
  • a manufacturing method of wiring circuit board of the invention comprises: (a) a step of fabricating a ceramic substrate,
  • a circuit board of the invention comprises a ceramic substrate having surface roughness Ra of about 0.5 ⁇ m or less , and a wiring pattern formed on the surface of the ceramic substrate by photolithography.
  • Ra is the value calculated in the formula:
  • FIG. 1 is an explanatory diagram showing the manufacturing process of a manufacturing method of wiring circuit board in an embodiment of the invention.
  • Fig. 2 shows an example of roughness curve on the surface of a ceramic substrate in the manufacturing method of wiring circuit board in the embodiment of the invention.
  • Fig. 3 is a sectional view of a wiring circuit board in an embodiment of the invention. Best Mode for Carrying Out the Invention
  • the ceramic substrate is fabricated by sintering ceramic particles, it is found out that the surface of the ceramic substrate has fine asperities, and that these asperities are disturbing minimization of line width of wiring pattern. Accordingly, in order to form a wiring pattern of a fine line width on the surface of ceramic substrate, it is found important to define the degree of surface roughness of the ceramic substrate, important to polish to have a smaller surface roughness , and important to polish so that Ra as the degree of surface roughness may be 0.5 ⁇ m or less. As a result, the present invention is completed.
  • the manufacturing method of wiring circuit board of the invention comprises:
  • the circuit board of the invention comprises a ceramic substrate having surface roughness Ra of about 0.5 ⁇ m or less , and a wiring pattern formed on the surface of the ceramic substrate by photolithography.
  • the step of forming the photosensitive conductor layer includes a step of applying a photosensitive conductor paste on the surface of the ceramic substrate, and a step of drying the photosensitive conductor paste.
  • the photolithography process includes a step of exposing the photosensitive conductor layer through a photo mask, and a step of developing the exposed photosensitive conductor layer and removing the unexposed region.
  • the surface of the ceramic substrate is polished by using a powder abrasive having a mean particle size in a range of about 0.1 ⁇ m to about
  • the wiring pattern has a fine line with a line width of about 40 ⁇ m or less.
  • the ceramic substrate is manufactured in the process of baking a ceramic green sheet having ceramic powder and binder.
  • the ceramic substrate is a sinter of a ceramic green sheet having ceramic powder and binder.
  • the wiring pattern obtained by the photolithography is a pattern of photosensitive conductor layer formed by exposing and developing the photosensitive conductor layer through a photo mask, by placing the photosensitive conductor layer on the surface of the ceramic substrate. That is, in the manufacturing method of the wiring circuit board for obtaining a wiring circuit on a ceramic substrate, by applying a photo-sensitive conductor paste on the surface of a ceramic substrate, printing a wiring circuit pattern on this applied layer, and exposing and developing, it is characterized by polishing the surface of the ceramic substrate so that the roughness Ra may be 0.5 ⁇ m or less before applying the paste.
  • Fig. 1 shows the manufacturing process of a manufacturing method of a wiring circuit board in an embodiment in the invention.
  • a ceramic substrate 2 is manufactured in the same method as in the prior art, and its example is described below.
  • Ceramic powder, binder resin, plasticizer, and solvent are kneaded, and a slurry is prepared.
  • the ceramic powder is a mixture of about 45 to about 60 wt.% of inorganic powder with mean particle size of about 0.5 to about 1.5 ⁇ m, and about 40 to about 55 wt.% of alumina powder with mean particle size of about 1.0 to about 2. O ⁇ m.
  • the inorganic powder is a compound powder containing CaO, A1 2 0 3 , si0 2 , B 2 0 3 , PbO, etc.
  • binder resin include polyvinyl butyral resin, methacrylic acid resin, and other resin materials.
  • the plasticizer any ordinary plasticizer may be used such as dibutyl phthalate.
  • the solvent toluene, methyl ethyl ketone, or the like may be used.
  • a ceramic green sheet 1 of about 0.1 to about 0.3 mm in thickness is fabricated.
  • This ceramic green sheet 1 is cut to a vertical length of 100 to 250 mm and a lateral length of 100 to 250 mm.
  • an internal circuit is placed on the surface of this ceramic green sheet 1.
  • This ceramic green sheet 1 is laminated in multiple layers, pressed, and baked for 5 to 15 minutes at temperature of 880 to 950 °C .
  • a ceramic substrate 2 is fabricated.
  • the surface roughness Ra of thus fabricated ceramic substrate 2 is about 2.5 to about 5.0 ⁇ m.
  • the surface 2b of the obtained ceramic substrate 2 is polished until the surface roughness Ra becomes 0.5 ⁇ m or less.
  • the surface roughness Ra is measured and calculated as follows .
  • the roughness curve of the surface of the ceramic substrate is measured.
  • the polishing method of the surface of ceramic surface is not particularly limited, but the following method is an example.
  • the surface is polished to surface roughness Ra of 0.5 ⁇ m or less.
  • the abrasive fine particles of A1 2 0 3 , SiC or the like may be used.
  • the mean particle size of the abrasive is preferred to be about 0.5 to about 10 ⁇ m.
  • the grinding device lapping device or polishing device may be used.
  • a photosensitive conductor paste 3 is applied on the polished ceramic substrate 2a.
  • an ordinary application method is employed.
  • the spin coat method, roll transfer method, or screen printing method may be employed.
  • the screen printing method is preferred.
  • the photosensitive conductor paste is not particularly limited, but, for example, Ag compound photo- sensitive conductor paste, Au compound photosensitive conductor paste, or Cu compound photosensitive conductor paste may be used.
  • the applied paste is dried at temperature of about 80 to about 100 °C.
  • a photosensitive conductor layer 3a is placed on the surface of the ceramic substrate 2a.
  • the photosensitive conductor layer 3a is processed by photolithography.
  • Ultraviolet rays (UV rays) are passed through a photo mask 4 having a specified wiring circuit pattern to expose the photosensitive conductor layer 3a.
  • the wavelength of ultraviolet rays is preferred to be about 350 to about 450 nm, and the exposure dose is preferred to be about 400 to about 1200 mJ.
  • the exposed photosensitive conductor layer 3a is developed.
  • the developing device for example, an ordinary spray type developing device is used.
  • the developing solution is sprayed over the exposed surface of the photosensitive conductor layer 3a, and by this spray, the unexposed portion of the photosensitive conductor layer is dissolved and removed.
  • the photosensitive conductor layer 3a is developed, and a wiring circuit pattern 3b is formed.
  • the spray pressure is preferred to be about 0.2 to 0.8 kg/cm 2 .
  • As the developing solution for example, an aqueous solution of sodium carbonate of about 0.4 to about 1.0% is used.
  • the ceramic substrate 2 having the developed wiring pattern 3b is baked for about 3 to 7 minutes at temperature of about 750 to 850 °C (preferably 780 to 820°C).
  • a wiring circuit board 5 having the wiring circuit pattern 3b is fabricated.
  • the surface roughness Ra of the ceramic substrate 2a is preferred to be about 0.5 ⁇ m or less . If the surface roughness Ra exceeds about 0.5 ⁇ m, it is not possible to form stably the wiring circuit pattern having a fine line of 40 ⁇ m or less.
  • a ceramic green sheet 1 was fabricated. From this ceramic green sheet 1 , a glass ceramic substrate 2 of Al 2 ⁇ 3 -Si ⁇ 2 -B 2 ⁇ 3 -PbO system was fabricated.
  • the surface of the ceramic substrate 2 was polished by a grinding device (lapping device 9B- 5L-IV or polishing device 9B-5P-IV, Speedfam) together with abrasive WA-#2000 or Polypla 700 (Fujimi Abrasive Industries, mean particle size 1.0 to 7.0 ⁇ m) .
  • a grinding device lapping device 9B- 5L-IV or polishing device 9B-5P-IV, Speedfam
  • abrasive WA-#2000 or Polypla 700 Fejimi Abrasive Industries, mean particle size 1.0 to 7.0 ⁇ m
  • a first ceramic substrate 2a was obtained.
  • the surface roughness Ra of this first ceramic substrate 2a was 0.5 ⁇ m.
  • the ceramic substrate 2 fabricated in the same manner was polished, and a second ceramic substrate 2a having surface roughness Ra of 0.38 was obtained. Similar, a third ceramic substrate 2a having surface roughness Ra of 0.25 was obtained.
  • photosensitive conductor paste 3 (Ag/Pt photosensitive conductor paste K3714, Du Pont) was applied by screen printing, and dried at temperature of 80 °C . Thus, a photosensitive conductor layer 3a was obtained.
  • UV rays ultraviolet rays
  • This photo mask 4 is a photo mask for test having a wiring pattern forming various line widths and line intervals and designed for measuring formable line widths and line intervals.
  • a developing machine SL-400 Shinwa Industrial
  • a developing solution (0.4% aqueous solution of sodium carbonate) was sprayed at a spray pressure of about 0.6 kg/cm 2 on the exposed surface of the photosensitive conductor layer 3a. By this spraying, the unexposed portion of the photosensitive conductor layer was dissolved and removed.
  • a wiring pattern 3b having a specified shape was formed on the surface of first ceramic substrate, second ceramic substrate and third ceramic substrate.
  • a wiring pattern of fine line having a line width of about 10 ⁇ m was obtained on the first ceramic substrate. Further, in the pattern of line width of about 10 ⁇ m or more, a fine line width was obtained.
  • a wiring pattern of fine line having a line width of about 7 ⁇ m was obtained, and also in the pattern of line width of about 7 ⁇ m or more, a fine line width was obtained.
  • a wiring pattern of fine line having a line width of about 5 ⁇ m was obtained, and also in the pattern of line width of about 5 ⁇ m or more, a fine line width was obtained.
  • These fine lines are fine lines having a continuous and constant width. In these wiring patterns, there was no defect such as shorting between fine lines or disconnection.
  • wiring patterns were formed by varying the exposure dose, spray pressure, concentration of developing solution, other exposure conditions , developing conditions , and baking conditions.
  • the exposure dose was changed in a range from bout 400 mJ to about 1200 mJ.
  • the spray pressure was changed in a range from about 0.2 kg/cm to about 0.8 kg/cm .
  • the aqueous solution of sodium carbonate as developing solution was changed in the concentration in a range from about 0.4% to about 1.0%.
  • the baking condition of the developed ceramic substrate was changed in temperature in a range from about 780°C to about 820°C, and in the time from bout 3 minutes to about 7 minutes.
  • the photosensitive conductor paste 3 was same as the paste 3 above.
  • the surface of the ceramic substrate 2 was polished to surface roughness Ra of 2.0 ⁇ m.
  • the surface of other ceramic substrate 2 was polished to surface roughness Ra of 1.1 ⁇ m.
  • the surface of a different ceramic substrate 2 was polished to surface roughness of 0.7 ⁇ m.
  • a fourth comparative ceramic substrate 2a having surface roughness Ra of 2.0 ⁇ m, a fifth comparative ceramic substrate 2a having surface roughness Ra of 1.1 ⁇ m, and a sixth comparative ceramic substrate 2a having surface roughness Ra of 0.7 ⁇ m were prepared.
  • wiring patterns 3b were formed in the same process as in the exemplary embodiments.
  • a wiring pattern of fine line having a line width of about 45 ⁇ m were obtained, but in the pattern of line width of about 45 ⁇ m or less, fine line having a constant width was not obtained. In the pattern of line width of about 45 ⁇ m or less, shorting, disconnection or other defect was noted.
  • a wiring pattern of fine line having a line width of about 30 ⁇ m were obtained, but in the pattern of line width of about 30 ⁇ m or less, fine line having a constant width was not obtained. In the pattern of line width of about 30 ⁇ m or less, shorting, disconnection or other defect was noted.
  • wiring patterns were formed by varying the exposure dose. spray pressure, concentration of developing solution, other exposure conditions, developing conditions, and baking conditions.
  • a wiring pattern of fine line having a line width of about 40 ⁇ m or less can be formed on a ceramic substrate, and a wiring pattern of such fine line can be formed stably. As a result, a circuit board of high density and high precision is obtained.

Abstract

Fine lines of line width of 40 νm or less are obtained stably without defect on a ceramic substrate, and hence a circuit board of high density and high precision is obtained. The method comprises the steps of: (a) fabricating a ceramic substrate (2), (b) polishing the surface (28) of the ceramic substrate (2) to surface roughness Ra of 0.5 νm or less, (c) forming a photosensitive conductor layer (3a) on the surface of the ceramic substrate (2a), and (d) processing the photosensitive conductor layer (3a) by photolithography, and forming a specified wiring pattern (38). Herein, supposing the roughness curve to be Y = f (x), the extracting length of the roughness curve in the center line direction to be L, the central axis of the extracting portion to be X-axis, and the direction vertical to the X-axis to be Y-axis, Ra is the value calculated in the formula (I).

Description

DESCRIPTION
MANUFACTURING METHOD OF WIRING CIRCUIT BOARD, AND WIRING CIRCUIT BOARD
Technical Field
The present invention relates to a manufacturing method of wiring circuit board having a ceramic substrate, and a wiring circuit board.
Background Art
Hitherto, a wiring circuit board having a ceramic substrate is manufactured by a method comprising a step of applying a photosensitive conductor paste on the surface of a ceramic substrate made from a ceramic green sheet , and a step of processing the applied photosensitive conductor layer by photolithography and forming a circuit pattern. The processing by photolithography consists of exposure and development by using a photo mask.
In such wiring circuit board, recently, a wiring circuit pattern having a fine line of 40 μm or less is required in order to realize a high density.
The invention presents a manufacturing method of a wiring circuit board for achieving a wiring circuit pattern of such fine line, and a wiring circuit board.
Summary of the Invention
A manufacturing method of wiring circuit board of the invention comprises: (a) a step of fabricating a ceramic substrate,
(b) a step of polishing the surface of the ceramic substrate to surface roughness Ra of 0.5 μm or less,
(c) a step of forming a photosensitive conductor layer on the surface of the ceramic substrate, and
(d) a step of processing the photosensitive conductor layer by photolithography, and forming a specified wiring pattern. A circuit board of the invention comprises a ceramic substrate having surface roughness Ra of about 0.5 μm or less , and a wiring pattern formed on the surface of the ceramic substrate by photolithography. Herein, supposing the roughness curve to be y = f (x) , the extracting length of the roughness curve in the center line direction to be L, the central axis of the extracting portion to be X- axis, and the direction vertical to the X-axis to be Y-axis, Ra is the value calculated in the formula:
Ra =(l/ ) |f(x)clx (1)
In this constitution, a wiring pattern having a fine line of line width of 40 μm or less is stably obtained on the ceramic substrate, and a circuit board of high density and high precision is obtained.
Brief Description of the Drawings Fig. 1 is an explanatory diagram showing the manufacturing process of a manufacturing method of wiring circuit board in an embodiment of the invention.
Fig. 2 shows an example of roughness curve on the surface of a ceramic substrate in the manufacturing method of wiring circuit board in the embodiment of the invention.
Fig. 3 is a sectional view of a wiring circuit board in an embodiment of the invention. Best Mode for Carrying Out the Invention
As a result of repeated studies and experiments, since the ceramic substrate is fabricated by sintering ceramic particles, it is found out that the surface of the ceramic substrate has fine asperities, and that these asperities are disturbing minimization of line width of wiring pattern. Accordingly, in order to form a wiring pattern of a fine line width on the surface of ceramic substrate, it is found important to define the degree of surface roughness of the ceramic substrate, important to polish to have a smaller surface roughness , and important to polish so that Ra as the degree of surface roughness may be 0.5 μm or less. As a result, the present invention is completed.
The manufacturing method of wiring circuit board of the invention comprises:
(a) a step of fabricating a ceramic substrate, (b) a step of polishing the surface of the ceramic substrate to surface roughness Ra of 0.5 μm or less,
(c) a step of forming a photosensitive conductor layer on the surface of the ceramic substrate, and (d) a step of processing the photosensitive conductor layer by photolithography, and forming a specified wiring pattern.
The circuit board of the invention comprises a ceramic substrate having surface roughness Ra of about 0.5 μm or less , and a wiring pattern formed on the surface of the ceramic substrate by photolithography.
Herein, supposing the roughness curve to be y = f (x) , the extracting length of the roughness curve in the center line direction to be L, the central axis of the extracting portion to be X- axis, and the direction vertical to the X-axis to be Y-axis, Ra is calculated in the following formula 1.
Ra = (l/L) |f(x)|dx (1)
In this constitution, a wiring pattern having a fine line of line width of 40 μm or less is stably obtained without defect on the ceramic substrate, and a circuit board of high density and high precision is obtained.
More preferably, the following constitution is required.
The step of forming the photosensitive conductor layer includes a step of applying a photosensitive conductor paste on the surface of the ceramic substrate, and a step of drying the photosensitive conductor paste.
The photolithography process includes a step of exposing the photosensitive conductor layer through a photo mask, and a step of developing the exposed photosensitive conductor layer and removing the unexposed region.
The surface of the ceramic substrate is polished by using a powder abrasive having a mean particle size in a range of about 0.1 μm to about
20 μm.
The wiring pattern has a fine line with a line width of about 40 μm or less. The ceramic substrate is manufactured in the process of baking a ceramic green sheet having ceramic powder and binder.
The ceramic substrate is a sinter of a ceramic green sheet having ceramic powder and binder. The wiring pattern obtained by the photolithography is a pattern of photosensitive conductor layer formed by exposing and developing the photosensitive conductor layer through a photo mask, by placing the photosensitive conductor layer on the surface of the ceramic substrate. That is, in the manufacturing method of the wiring circuit board for obtaining a wiring circuit on a ceramic substrate, by applying a photo-sensitive conductor paste on the surface of a ceramic substrate, printing a wiring circuit pattern on this applied layer, and exposing and developing, it is characterized by polishing the surface of the ceramic substrate so that the roughness Ra may be 0.5 μm or less before applying the paste.
An embodiment of the invention is specifically described below.
Fig. 1 shows the manufacturing process of a manufacturing method of a wiring circuit board in an embodiment in the invention.
In Fig. 1, a ceramic substrate 2 is manufactured in the same method as in the prior art, and its example is described below.
Ceramic powder, binder resin, plasticizer, and solvent are kneaded, and a slurry is prepared. Herein, the ceramic powder is a mixture of about 45 to about 60 wt.% of inorganic powder with mean particle size of about 0.5 to about 1.5 μm, and about 40 to about 55 wt.% of alumina powder with mean particle size of about 1.0 to about 2. Oμm. The inorganic powder is a compound powder containing CaO, A1203, si02, B203, PbO, etc. Examples of binder resin include polyvinyl butyral resin, methacrylic acid resin, and other resin materials. As the plasticizer, any ordinary plasticizer may be used such as dibutyl phthalate. As the solvent, toluene, methyl ethyl ketone, or the like may be used.
By the doctor blade method or the like, from this slurry, a ceramic green sheet 1 of about 0.1 to about 0.3 mm in thickness is fabricated. This ceramic green sheet 1 is cut to a vertical length of 100 to 250 mm and a lateral length of 100 to 250 mm. As required, an internal circuit is placed on the surface of this ceramic green sheet 1. This ceramic green sheet 1 is laminated in multiple layers, pressed, and baked for 5 to 15 minutes at temperature of 880 to 950 °C . Thus, a ceramic substrate 2 is fabricated. The surface roughness Ra of thus fabricated ceramic substrate 2 is about 2.5 to about 5.0 μm.
Next, the surface 2b of the obtained ceramic substrate 2 is polished until the surface roughness Ra becomes 0.5 μm or less. Herein, the surface roughness Ra is measured and calculated as follows . First , the roughness curve of the surface of the ceramic substrate is measured. A portion of measuring length L is extracted from the roughness curve in the direction of its center line, and the center line of the extracted portion is supposed to be X-axis, the direction of the vertical multiplication (the direction vertical to the X- axis) to be Y-axis, and the roughness curve to be y = f (x), the surface roughness Ra is calculated in formula 1 above.
The polishing method of the surface of ceramic surface is not particularly limited, but the following method is an example. Using fine particle abrasive and grinding device, the surface is polished to surface roughness Ra of 0.5 μm or less. As the abrasive, fine particles of A1203, SiC or the like may be used. The mean particle size of the abrasive is preferred to be about 0.5 to about 10 μm. As the grinding device, lapping device or polishing device may be used.
On the polished ceramic substrate 2a, a photosensitive conductor paste 3 is applied. As the method of this application, an ordinary application method is employed. For example, the spin coat method, roll transfer method, or screen printing method may be employed. In particular, the screen printing method is preferred. The photosensitive conductor paste is not particularly limited, but, for example, Ag compound photo- sensitive conductor paste, Au compound photosensitive conductor paste, or Cu compound photosensitive conductor paste may be used. The applied paste is dried at temperature of about 80 to about 100 °C. Thus, a photosensitive conductor layer 3a is placed on the surface of the ceramic substrate 2a.
In succession, the photosensitive conductor layer 3a is processed by photolithography. Ultraviolet rays (UV rays) are passed through a photo mask 4 having a specified wiring circuit pattern to expose the photosensitive conductor layer 3a. At this time, the wavelength of ultraviolet rays is preferred to be about 350 to about 450 nm, and the exposure dose is preferred to be about 400 to about 1200 mJ.
The exposed photosensitive conductor layer 3a is developed. As the developing device, for example, an ordinary spray type developing device is used. The developing solution is sprayed over the exposed surface of the photosensitive conductor layer 3a, and by this spray, the unexposed portion of the photosensitive conductor layer is dissolved and removed. Thus, the photosensitive conductor layer 3a is developed, and a wiring circuit pattern 3b is formed. At this time, the spray pressure is preferred to be about 0.2 to 0.8 kg/cm2. As the developing solution, for example, an aqueous solution of sodium carbonate of about 0.4 to about 1.0% is used. The ceramic substrate 2 having the developed wiring pattern 3b is baked for about 3 to 7 minutes at temperature of about 750 to 850 °C (preferably 780 to 820°C). Thus, a wiring circuit board 5 having the wiring circuit pattern 3b is fabricated.
Concerning the surface roughness of the ceramic substrate before application of the photosensitive conductor paste 3, the surface roughness Ra of the ceramic substrate 2a is preferred to be about 0.5 μm or less . If the surface roughness Ra exceeds about 0.5 μm, it is not possible to form stably the wiring circuit pattern having a fine line of 40 μm or less.
Exemplary Embodiments By presenting exemplary embodiments and comparative examples, the invention is further described below. It must be noted, however, that the invention is not limited to the illustrated embodiments alone.
According to the aforesaid manufacturing method of ceramic green sheet , a ceramic green sheet 1 was fabricated. From this ceramic green sheet 1 , a glass ceramic substrate 2 of Al2θ3-Siθ2-B2θ3-PbO system was fabricated.
The surface of the ceramic substrate 2 was polished by a grinding device (lapping device 9B- 5L-IV or polishing device 9B-5P-IV, Speedfam) together with abrasive WA-#2000 or Polypla 700 (Fujimi Abrasive Industries, mean particle size 1.0 to 7.0 μm) .
By this polishing, a first ceramic substrate 2a was obtained. The surface roughness Ra of this first ceramic substrate 2a was 0.5 μm. On the other hand, using various different abrasives, the ceramic substrate 2 fabricated in the same manner was polished, and a second ceramic substrate 2a having surface roughness Ra of 0.38 was obtained. Similar, a third ceramic substrate 2a having surface roughness Ra of 0.25 was obtained.
On the surface of these polished ceramic substrates 2a, photosensitive conductor paste 3 (Ag/Pt photosensitive conductor paste K3714, Du Pont) was applied by screen printing, and dried at temperature of 80 °C . Thus, a photosensitive conductor layer 3a was obtained.
In succession, ultraviolet rays (UV rays) of wavelength of 365 nm and exposure dose of 720 mJ were passed through a photo mask 4 having a wiring circuit pattern of specified shape to expose the photosensitive conductor layer. This photo mask 4 is a photo mask for test having a wiring pattern forming various line widths and line intervals and designed for measuring formable line widths and line intervals. Next, using a developing machine SL-400 (Shinwa Industrial), a developing solution (0.4% aqueous solution of sodium carbonate) was sprayed at a spray pressure of about 0.6 kg/cm2 on the exposed surface of the photosensitive conductor layer 3a. By this spraying, the unexposed portion of the photosensitive conductor layer was dissolved and removed.
Thus developed wiring pattern was baked for 5 minutes at temperature of 855°C . In this process. a wiring pattern 3b having a specified shape was formed on the surface of first ceramic substrate, second ceramic substrate and third ceramic substrate. As a result, a wiring pattern of fine line having a line width of about 10 μm was obtained on the first ceramic substrate. Further, in the pattern of line width of about 10 μm or more, a fine line width was obtained. On the second ceramic substrate, a wiring pattern of fine line having a line width of about 7 μm was obtained, and also in the pattern of line width of about 7 μm or more, a fine line width was obtained. On the third ceramic substrate, a wiring pattern of fine line having a line width of about 5 μm was obtained, and also in the pattern of line width of about 5 μm or more, a fine line width was obtained. These fine lines are fine lines having a continuous and constant width. In these wiring patterns, there was no defect such as shorting between fine lines or disconnection.
On the other hand, using the first ceramic substrate 2a, second ceramic substrate 2a, and third ceramic substrate 2a, wiring patterns were formed by varying the exposure dose, spray pressure, concentration of developing solution, other exposure conditions , developing conditions , and baking conditions. The exposure dose was changed in a range from bout 400 mJ to about 1200 mJ. The spray pressure was changed in a range from about 0.2 kg/cm to about 0.8 kg/cm . The aqueous solution of sodium carbonate as developing solution was changed in the concentration in a range from about 0.4% to about 1.0%. The baking condition of the developed ceramic substrate was changed in temperature in a range from about 780°C to about 820°C, and in the time from bout 3 minutes to about 7 minutes. The photosensitive conductor paste 3 was same as the paste 3 above.
In all of thus obtained ceramic substrates forming wiring patterns, excellent effects having the same wiring pattern as above were obtained. That is, a stable and fine line width was obtained regardless of exposure dose, spray pressure, concentration of developing solution, other exposure conditions , developing conditions , and baking conditions. Moreover, the wiring patterns obtained by such method were free from o
any defect in the fine line width.
(Comparative Example)
Comparative examples are described below. Using the same ceramic substrate 2 as the ceramic substrate used in the exemplary embodiments, the surface of the ceramic substrate 2 was polished to surface roughness Ra of 2.0 μm. The surface of other ceramic substrate 2 was polished to surface roughness Ra of 1.1 μm. The surface of a different ceramic substrate 2 was polished to surface roughness of 0.7 μm.
Thus, a fourth comparative ceramic substrate 2a having surface roughness Ra of 2.0 μm, a fifth comparative ceramic substrate 2a having surface roughness Ra of 1.1 μm, and a sixth comparative ceramic substrate 2a having surface roughness Ra of 0.7 μm were prepared.
Using the fourth comparative ceramic substrate 2a, fifth comparative ceramic substrate 2a and sixth comparative ceramic substrate 2a, wiring patterns 3b were formed in the same process as in the exemplary embodiments.
As a result, on the fourth comparative ceramic substrate 2a, a wiring pattern of fine line having a line width of about 50 μm were obtained, but in the pattern of line width of about 50 μm or less, fine line having a constant width was not obtained. In the pattern of line width of about 50 μm or less, shorting, disconnection or other defect was noted.
On the fifth comparative ceramic substrate 2a, a wiring pattern of fine line having a line width of about 45 μm were obtained, but in the pattern of line width of about 45 μm or less, fine line having a constant width was not obtained. In the pattern of line width of about 45 μm or less, shorting, disconnection or other defect was noted.
On the sixth comparative ceramic substrate 2a, a wiring pattern of fine line having a line width of about 30 μm were obtained, but in the pattern of line width of about 30 μm or less, fine line having a constant width was not obtained. In the pattern of line width of about 30 μm or less, shorting, disconnection or other defect was noted.
Next, using the fourth comparative ceramic substrate 2a, fifth comparative ceramic substrate
2a and sixth comparative ceramic substrate 2a, same as in the exemplary embodiments, wiring patterns were formed by varying the exposure dose. spray pressure, concentration of developing solution, other exposure conditions, developing conditions, and baking conditions.
As a result, by using the fourth comparative ceramic substrate 2a and fifth comparative ceramic substrate 2a, fine line having a constant line width of 40 μm or less was not obtained. In the case of the sixth comparative ceramic substrate 2a, in about 30% of substrates, fine line having a constant line width of 40 μm or less was not obtained depending on the developing conditions, exposure conditions and baking conditions.
As a result of these exemplary embodiments and comparative examples, by polishing the surface of ceramic substrate to surface roughness Ra of about 0.5 μm or less , it was found that a wiring pattern of fine line having a line width of about 40 μm or less is obtained, and moreover that a wiring pattern of such fine line is obtained stably.
Industrial Applicability
According to the manufacturing method of wiring circuit board of the invention, a wiring pattern of fine line having a line width of about 40 μm or less can be formed on a ceramic substrate, and a wiring pattern of such fine line can be formed stably. As a result, a circuit board of high density and high precision is obtained.

Claims

1. A manufacturing method of wiring circuit board comprising the steps of :
(a) fabricating a ceramic substrate, (b) polishing a surface of said ceramic substrate to surface roughness Ra of 0.5 μm or less, wherein supposing a roughness curve to be y = f (x), an extracting length of the roughness curve in a center line direction to be L, a central axis of an extracting portion to be X-axis, and a direction vertical to a X-axis to be Y-axis, Ra is a value calculated in a formula: (1/L)£|f(x)|dx (c) forming a photosensitive conductor layer on the surface of said ceramic substrate, and
(d) processing said photosensitive conductor layer by photolithography, and forming a specified wiring pattern.
2. The manufacturing method of wiring circuit board of claim 1, wherein at said step (c) , the step of forming said photosensitive conductor layer includes a step of applying a photosensitive conductor paste on the surface of said ceramic substrate, and a step of drying said photosensitive conductor paste.
3. The manufacturing method of wiring circuit board of claim 1, wherein at said step (d) , the photolithography process includes a step of exposing said photosensitive conductor layer through a photo mask, and a step of developing said exposed photosensitive conductor layer and removing the unexposed region.
4. The manufacturing method of wiring circuit board of claim 1, wherein at said step (c) , the step of forming said photosensitive conductor layer includes a step of applying a photosensitive conductor paste on the surface of said ceramic substrate, and a step of drying said photosensitive conductor paste, and at said step (d) , the photolithography process includes a step of exposing said photosensitive conductor layer through a photo mask, and a step of developing said exposed photosensitive conductor layer and removing the unexposed region.
5. The manufacturing method of wiring circuit board of claim 1 , wherein at said step (b) , the surface of said ceramic substrate is polished by using a powder abrasive having a mean particle size in a range of about 0.1 μm to about 20 μm.
6. The manufacturing method of wiring circuit board of claim 1 , wherein at said step (d) the wiring pattern has a fine line with a line width of about 40 μm or less.
7. The manufacturing method of wiring circuit board of claim 1, wherein at said step (a) , the ceramic substrate is manufactured in the process of baking a ceramic green sheet having ceramic powder and binder.
8. The manufacturing method of wiring circuit board of claim 1, wherein said step (a) includes a step of fabricating said ceramic substrate, a step of fabricating a plurality of green sheets, a step of placing internal circuits on the surface of each green sheet of said plurality of green sheets , and a step of laminating, pressing and baking each green sheet having the individual internal circuit .
9. A wiring circuit board comprising: a ceramic substrate having surface roughness Ra of about 0.5 μm or less , in which supposing the roughness curve to be y = f (x) , the extracting length of the roughness curve in the center line direction to be L, the central axis of the extracting portion to be X-axis, and the direction vertical to the X-axis to be Y-axis, Ra is the value calculated in the formula: ( 1/L) |f (x)|dx, and a wiring pattern formed on the surface of said ceramic substrate by photolithography.
10. The wiring circuit board of claim 9 , wherein said wiring pattern has a fine line of line width of 40 μm or less.
11. The wiring circuit board of claim 9, wherein said ceramic substrate is a sinter of a ceramic green sheet having ceramic powder and binder.
12. The wiring circuit board of claim 9, wherein said wiring pattern obtained by photolithography is a pattern of a photosensitive conductor layer formed by exposing and developing said photosensitive conductor layer through a photo mask, using said photosensitive conductor layer placed on the surface of said ceramic substrate.
13. The wiring circuit board of claim 9, wherein said ceramic substrate is a sinter of a laminated body of a plurality of green sheets, and each green sheet of said plurality of green sheets has an individual internal circuit on the surface .
PCT/JP1999/005531 1998-10-07 1999-10-07 Manufacturing method of wiring circuit board, and wiring circuit board WO2000021345A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020007006016A KR20010032727A (en) 1998-10-07 1999-10-07 Manufacturing method of wiring circuit board, and wiring circuit board
EP99970262A EP1038418A1 (en) 1998-10-07 1999-10-07 Manufacturing method of wiring circuit board, and wiring circuit board

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP10/285246 1998-10-07
JP10285246A JP2000114691A (en) 1998-10-07 1998-10-07 Manufacture of wiring circuit board

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KR100593946B1 (en) * 2004-12-22 2006-06-30 전자부품연구원 Method for fabricating stacked ceramic device
CN102271456B (en) * 2011-07-13 2013-05-01 东北大学 Heat-conduction ceramic-based printed circuit board (PCB) and manufacture method thereof
WO2014157581A1 (en) 2013-03-29 2014-10-02 トッパン・フォームズ株式会社 Laminate and circuit board
CN103325675A (en) * 2013-05-30 2013-09-25 深圳顺络电子股份有限公司 Method for manufacturing electronic element of narrow-line-width electrode
CN110896590A (en) * 2018-09-13 2020-03-20 欣兴电子股份有限公司 Circuit substrate and manufacturing method thereof

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EP1038418A1 (en) 2000-09-27
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KR20010032727A (en) 2001-04-25
ID24661A (en) 2000-07-27
TW443082B (en) 2001-06-23

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