WO2000017115A1 - Bruleurs servant a produire des boules de verre de silice fondue - Google Patents

Bruleurs servant a produire des boules de verre de silice fondue Download PDF

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Publication number
WO2000017115A1
WO2000017115A1 PCT/US1999/021658 US9921658W WO0017115A1 WO 2000017115 A1 WO2000017115 A1 WO 2000017115A1 US 9921658 W US9921658 W US 9921658W WO 0017115 A1 WO0017115 A1 WO 0017115A1
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WO
WIPO (PCT)
Prior art keywords
burner
region
oxygen
gas
mixture
Prior art date
Application number
PCT/US1999/021658
Other languages
English (en)
Inventor
Laura J. Ball
Raymond E. Lindner
Mahendra Kumar Misra
Dale R. Powers
Michael H. Wasilewski
Original Assignee
Corning Incorporated
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Incorporated filed Critical Corning Incorporated
Priority to EP99969400A priority Critical patent/EP1140715A4/fr
Priority to JP2000574032A priority patent/JP2002526363A/ja
Priority to KR1020017003641A priority patent/KR20010079889A/ko
Priority to US09/787,399 priority patent/US6751987B1/en
Publication of WO2000017115A1 publication Critical patent/WO2000017115A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/10—Split ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/22—Inert gas details
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/24—Multiple flame type, e.g. double-concentric flame
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/52—Linear array of like burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/70—Control measures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Definitions

  • This invention relates to burners for producing boules of fused silica glass, such as, high purity fused silica glass (HPFS glass) and ultra low expansion glass, from halide-free, silicon-containing (HF-SC) starting materials, such as, octamethyl-cyclotetrasiloxane (OMCTS). BACKGROUND OF THE INVENTION
  • furnaces of this type utilize flame hydrolysis to produce and deposit fine silica particles (silica soot) on a planar surface (e.g., a layer of bait sand) which is then consolidated into a solid glass boule. More particularly, furnaces of this type operate at a sufficiently high temperature so that the consolidation takes place essentially simultaneously with the depositing of the silica soot.
  • furnace 100 includes crown 12 which carries a plurality of burners 14 which produce the silica soot which is collected to form boule 19, which typically has a diameter on the order of five feet (1.5 meters).
  • the present invention is concerned with the structure and operation of burners 14.
  • burners 14 have been unable to deposit soot in a sufficient manner at distances greater than six inches from the burner face, which has meant that the maximum boule thickness has been six inches.
  • HPFS glass it would be desirable to produce boules having a thickness greater than six inches, e.g., boules having a thickness of 8-10 inches.
  • the present invention is directed to providing burners capable of producing such boules.
  • the five concentric gas-emitting regions of the burner of the '371 patent emitted the following gases: 1) the fume tube emitted a mixture of the HF-SC starting material and oxygen plus, optionally, an inert gas, 2) the innershield emitted an inert gas, 3) the third region emitted oxygen, 4) the fourth region emitted oxygen, and 5) the outershield emitted a mixture (premix) of a combustible gas and oxygen.
  • the burner has to have the following concentric regions emitting the following gases: 1) a central region (fume tube) which emits a mixture of an HF-SC starting material and an inert gas, 2) an innershield region which emits oxygen, 3) a third region which emits a mixture (premix) of a combustible gas and oxygen, 4) a fourth region which emits a mixture (premix) of a combustible gas and oxygen, 5) a fifth region which emits a mixture (premix) of a combustible gas and oxygen, and 6) an outershield region which emits oxygen.
  • the foregoing burner history illustrates the difficulties in predicting whether a particular gas arrangement will work with a particular starting material (i.e., a halide -containing starting material versus a halide-free material) to produce a particular product (i.e., an optical waveguide preform versus a thick boule).
  • a particular starting material i.e., a halide -containing starting material versus a halide-free material
  • a particular product i.e., an optical waveguide preform versus a thick boule.
  • an inert gas/oxygen/oxygen/premix arrangement surrounding a fume tube carrying a halide-free raw material worked to produce preforms as disclosed in the '371 patent, but was found in the course of the development of the burner of the present invention to not work in the production of thick boules.
  • an oxygen/premix/premix/premix/oxygen arrangement surrounding a fume tube carrying a halide-free raw material needs to be used.
  • the invention in accordance with certain of its aspects provides a method for forming a silica-containing boule (19) comprising:
  • a furnace which comprises: (i) a cavity (26); (ii) at least one burner (14) which produces a stream of soot particles;
  • step (c) collecting the soot particles to form the boule; wherein the width of the stream of soot particles is controlled to enhance the efficiency of step (c).
  • the width of the stream of soot particles is controlled in accordance with the discovery, illustrated in Figure 6, that a reduction in the width leads to enhanced efficiency of step (c). That a reduction in width has this effect is counterintuitive since a priori one would think that widening the stream, rather than narrowing it, would result in the laydown of more soot particles.
  • the width of the stream at the working distance is preferably less than 25 millimeters, most preferably, less than 12 millimeters, where the working distance (i.e., the distance between the burner face and the surface of the boule) is at least 150 millimeters and preferably at least 200 millimeters or more.
  • the invention provides a method for forming a silica-containing boule (19) comprising the steps of:
  • a soot-producing burner (14) having a burner face (13) that comprises first (1), second (2), third (3), fourth (4), fifth (5), and sixth (6) gas-emitting regions, the second region surrounding the first region, the third region surrounding the second region, the fourth region surrounding the third region, the fifth region surrounding the fourth region, and the sixth region surrounding the fifth region;
  • the invention provides a soot- producing burner comprising a burner face which comprises first (1), second (2), third (3), fourth (4), fifth (5), and sixth (6) gas-emitting regions, the second region surrounding the first region, the third region surrounding the second region, the fourth region surrounding the third region, the fifth region surrounding the fourth region, and the sixth region surrounding the fifth region, wherein: (a) the first region emits a mixture of a halide-free, silicon- containing material and an inert gas;
  • the fifth region emits a mixture of a combustible gas and oxygen; and (f) the sixth region emits oxygen.
  • the radial spacing between the third, fourth, fifth, and sixth regions is substantially the same.
  • the first, second, third, fourth, fifth, and sixth regions have the following forms at the burner's face: the first region is in the form of an open disc or tube, the second region is an annular ring, and the third, fourth, fifth, and sixth regions are each a ring of orifices.
  • Figure 1 is a schematic plan view of the face of a prior art burner illustrating the gas-emitting regions of the burner.
  • Figures 2 and 3 are schematic plan views of the faces of burners used in compiling the experimental data reported herein.
  • Figure 4 is a cross-sectional view of the bottom portion of a burner constructed in accordance with the invention. When oriented as shown in Figure 7, the bottom portion of the burner is the portion nearest the furnace cavity.
  • Figure 5 is a plan view of the cavity-facing surface of the top portion of a burner constructed in accordance with the invention. When oriented as shown in Figure 7, the top portion of the burner is the portion farthest from the furnace cavity.
  • Figure 6 is a plot of efficiency versus particle stream width.
  • Figure 7 is a schematic drawing illustrating the general type of furnace with which the burners of the invention can be used.
  • Figure 8 is a schematic drawing illustrating the use of a baffle in connection with a burner having three premix regions.
  • the present invention is concerned with burners for use in producing boules of fused silica from halide-free, silicon- containing starting materials.
  • Suitable halide-free, silicon-containing starting materials are those disclosed in Dobbins et al., U.S. Patent No. 5,043,002 and Blackwell et al., U.S. Patent No. 5,152,819, the relevant portions of which are incorporated herein by reference.
  • a particularly preferred starting material is octamethyl-cyclotetrasiloxane (OMCTS).
  • FIGs 4 and 5 illustrate a suitable construction for the burner of the invention.
  • the burner includes a bottom portion 15 (see Figure 4) and a top portion 16 (see Figure 5).
  • the "bottom” and “top” nomenclature refers to the orientation of the burner during use in a furnace of the type shown in Figure 7.
  • the top portion of the burner includes fume tube channel 31, inner shield channel 32, premix channel 33, and outershield channel 34 which, during use of the burner, carry a halide-free, silicon-containing starting material, oxygen, a mixture of a combustible gas and oxygen, and oxygen, respectively.
  • Premix channel 33 preferably includes baffle 17 which, as explained below, helps ensure uniform gas emission from region 3 of burner face 13.
  • Top portion 16 also includes O-rings 27, 28, 29, and 30 which serve to seal the top and bottom portions together in the assembled burner.
  • channels 31, 32, 33, and 34 are provided with the gases used by the burner (e.g., OMCTS mixed with N 2 , O2, CH mixed with O 2 , and O2, respectively) using a suitable gas delivery system, e.g., regulated gas sources, feed lines, gas mixers, metering pumps, flowmeters, heaters and vaporizers for OMCTS, etc.
  • suitable gas delivery system e.g., regulated gas sources, feed lines, gas mixers, metering pumps, flowmeters, heaters and vaporizers for OMCTS, etc.
  • Suitable flow rates for these materials are as follows: OMCTS - 6.0-6.5 grams/minute; N2 - 4.6-6.4 slpm; innershield O2 - 7-8 slpm; premix (1:1 O2:CH ) - 22 slpm; and outershield oxygen - 15.0-17.5 slpm.
  • bottom portion 15 includes channels 41, 20, 21, and 22 which are aligned with channels 31, 32, 33, and 34, respectively, in the assembled burner.
  • Channel 41 passes through the body of bottom portion 15 and creates the burner's first gas-emitting region 1 at burner face 13.
  • Channel 20 communicates with annulus 42 which creates the burner's second gas-emitting region 2 at burner face 13.
  • Channel 21 communicates with drilled holes 43, 44, and 45, which create the burner's third, fourth, and fifth gas-emitting regions 3, 4, and 5, respectively, at burner face 13.
  • Channel 22 communicates with drilled holes 46 which create the burner's sixth gas-emitting region 6 at burner face 13.
  • Drilled holes 43 through 46 are the preferred means for creating gas-emitting regions 3 through 6, although other means, e.g., a continuous annulus, can be used if desired. Conversely, annulus 42 can be in the form of drilled holes, if desired.
  • FIG. 1 is a schematic drawing of a prior art burner in which OMCTS flows out of fume tube 101 with nitrogen as a carrier gas, innershield 102 and outershield 105 have oxygen flowing out of them, and a mixture of oxygen and methane exits premix holes 103 and 104.
  • fume tube 101 is flush with or slightly recessed from burner face 13 and innershield 102 is in the form of an annulus.
  • An annulus rather than a ring of holes, is used for the innershield since burner build up due to polymerization of OMCTS occurred when a ring of holes was used.
  • SiCl instead of OMCTS, was the starting material, a protruding fume tube was used and burner buildup was not observed when the innershield was a ring of holes.
  • the burner of Figure 1 works successfully in producing boules having a thickness of about 6 inches, it is unable to make glass at long burner to laydown distances.
  • a burner In order to make a thick boule, a burner needs to produce a flame able to make glass at long burner to laydown distances (e.g., greater than 12 inches).
  • the design modifications studied to achieve longer burner to laydown distances were: focus, decreased velocity of innershield oxygen, decreased velocity of premix, and fume tube size. Focus, i.e., the bringing of the various gas-emitting regions of the burner closer together, was achieved by holding the locations of channels 21 and 22 constant and changing the starting locations and angles of drilled holes 43 through 46. This allowed the same top portion 16 to be used with each burner design. In practice, the change in gas vectors resulting from changes in the angles of holes 43 and 46 has only a secondary effect on the performance of the burner.
  • Table I gives the design modification and the intent of each burner design.
  • the key process variables evaluated were particle size, number of particles, mass of particles, and width of the particle stream. The relationship between these key process variables and lay down efficiency and rate were quantified.
  • the flame produced by the burners was evaluated utilizing light scattering measurements, mathematical modeling, single burner development furnace trials, and full scale production furnaces. Light scattering measurements, i.e., measurements of the amount of laser light scattered in various directions by the soot particles in the flame, were used to determine the width of the stream of soot particles produced by the burner. Alternatively, the width can be determined photographically or by visual observation.
  • Figures 2 and 3 are schematic drawings of the burners which were tested and Table 2 gives their dimensions in inches.
  • the abbreviation "Dia BC” used in Table 2 stands for the diameter of the "bolt circle” defined by the holes making up the various gas-emitting regions.
  • Figure 2 shows the overall design of burners A, B, E, and F, which only include two premix regions
  • Figure 3 shows the overall design of burners C and D, which include three premix regions.
  • the overall design of the prior art burner is shown in Figure 1.
  • Burners A and B represent an initial design modification in which a focused burner was created by bringing the burner holes closer together, similar to burners used to produce optical waveguide preforms. Burners A and B are identical except that burner B has a larger innershield.
  • Burners C and D have an additional ring of premix holes which decrease the velocity of premix.
  • the difference between burners C and D is that burner C is more focused than burner D.
  • burners E and F were the diameter of the fume tube.
  • the fume tube size was increased from 0.085 inches to 0.106 inches.
  • Burner E has the same configuration as the prior art burner with the exception of a larger fume tube.
  • Burner F has the same design as burner B except for the larger fume tube.
  • burner A produced a flame that was longer and more laminar like than the prior art burner.
  • this alone did not result in a consistently significant increase in yield.
  • the width of the particle stream was inversely proportional to the lay down rate and efficiency; and (2) the burner design that gave the highest deposition rate was a more focused burner with a decrease in velocity of premix.
  • the burner that had these characteristics was burner D.
  • the advantage of this burner is that it decreases the width and the unsteadiness of the soot stream allowing for a higher deposition rate by increased efficiency. In a production furnace, this burner produced a more laminar like flame and the deposition rate increased by 60%.
  • the flame produced by burner D was 15 inches long so that the burner was able to produce a 2072 pound boule. For comparison, the average boule weight for the prior art burner was 1200 pounds.
  • the elements that are required and which burner D has are: (1) the burner holes are brought closer together, i.e., the burner is focused; and (2) an extra ring of premix is provided.
  • the closer holes decrease the recirculation zone that causes eddies and a more turbulent flame.
  • the extra ring of premix decreases the velocity of the premix and increases the surface area resulting in a more stable and longer flame.
  • decreasing the velocity of the premix can be thought of as producing a container for the silica particles so that they will stay in the burner flame longer and thus allow one to make boules at a greater distance from the face of the burner, i.e., thicker boules.
  • burner D In addition to its enhanced efficiency, burner D also has the following desirable performance characteristics:
  • burner D Since burner D has a more laminar flame, there is less oxygen (from outside air) entrained in the flame by mixing and therefore the flame is more reducing as is generally desirable.
  • soot builds up on a burner's face: (a) thermopheresis, and (b) the velocity of the soot particles.
  • the third ring of premix which decreases the velocity and the smaller surface area results in a flame profile that prevents the burner soot from depositing on the burner face.
  • the lack of soot build up on the burner face also improves the safety of the soot laydown process by decreasing the potential for "snapback.” If soot covers the premix holes or plugs the fume tube, a small explosion, known as a "snapback," can occur. Burner D with its reduced soot build up minimizes these possibilities.
  • burner A which is similar to burner D in that it has burner holes that have been brought in closer together to produce a more laminar flame, failed to improve yield in a production furnace. Unlike burner D, burner A does not have an extra ring of premix. This result shows that the extra ring of premix is essential in increasing the yield of high purity fused silica glass. Burners E and F also did not increase yield. These burners have a larger fume tube which produced a turbulent flame.
  • Burner D shares the following common traits with the prior art burner: they both utilize the same top portion of the burner, all connections to the furnace, all gases, and all flow rates are the same, and the burners are made of the same material (aluminum) and are the same size. In addition, the soot particle size and range of particle sizes are the same for the two burners.
  • burner D The differences between burner D and the prior art burner are: (1) the burner holes of burner D are brought in closer together so that the radial distances between all gas-emitting regions of the burner are substantially the same; and (2) there is an extra ring of premix gases. These differences result in a longer, more laminar like flame, which reduces the width of the particle stream. In addition, burner D produces less soot particles than the prior art burner per unit time.
  • Figure 6 is a plot of deposition efficiency vs. width of the particle stream at a distance of 12 inches from the burner face. As can be seen in this figure, the smaller the width of the particle stream, the higher the OMCTS efficiency and thus the deposition rate.
  • burner C's deposition efficiency is even greater than burner D's efficiency.
  • burner D is preferred.
  • Figure 6 shows an improved efficiency for burners A and B, this improvement declines for some OMCTS flow rates used in practice.
  • Burners C and D exhibit enhanced efficiency over the entire range of OMCTS flow rates typically used in practice.
  • channel 33 of the burner's top portion 16 includes baffle 17 (see Figure 5), which serves to generate uniform premix flames.
  • the baffle is preferably placed in the top portion of the burner to spread the gas/oxygen flow in channel 33 before that flow enters the bottom portion.
  • the baffle can be placed in the bottom portion of the burner.
  • the non-uniform flame is believed to be the result of the addition of the third ring of holes for gas/oxygen flow, which increases the total hole area over 60%. This results in a change in the flow characteristics between channel 33 of top portion 16 and the gas outlet at the burner face resulting in a non-uniform gas flow through the outlet holes. Neither the second nor the third ring of holes used for gas/oxygen flow, located towards the outershield, exhibited the flame variability.
  • a baffle is used to reduce this variability in the burner flame.
  • the overall arrangement of the baffle in the furnace system is shown in Figure 8.
  • a CH supply 50 and an O2 supply 51 are connected to a mixer 52 by conduits 53 and 54, respectively.
  • Conduit 55 connects mixer 52 to the burner.
  • the CH /O2 mixture produced by mixer 52 is provided to baffle 17, which in the preferred embodiments of the invention is located in channel 33 of the top portion 16 of the burner (see Figure 5).
  • conduits 56, 57, and 58 From baffle 17 the CH /O 2 mixture is carried to regions 3, 4, and 5 of burner face 13 by conduits 56, 57, and 58, respectively.
  • conduits 56, 57, and 58 comprise channel 21 and drilled holes 42, 43, and 44, respectively.
  • Various types of baffles can be used in the practice of the invention.
  • aluminum rings containing 36 holes with equal spacing and having a diameter of either 0.040" or 0.060" diameter can be used.
  • An insert cut from a SCOTCH BRIGHT pad can also be used. Tests with both the aluminum rings and the SCOTCH BRIGHT pad showed that these baffles eliminated the flame non-uniformity.
  • the aluminum rings however, had severe gas/oxygen ratio limitations that resulted in a loud, high pitched sound and prevented use of the burners at the desired premix flow rates.
  • the SCOTCH BRIGHT pad design did not have this limitation, but was made from a material different from that of the burners, i.e., it was not made of aluminum.
  • a preferred baffle construction comprises a corrugated aluminum baffle of the type shown in Figure 5.
  • This baffle can be prepared by cutting narrow strips (e.g., 3/16" wide) from a rolled aluminum sheet (e.g., 0.012" thick), crimping the strips, curling them into rings, and then slip fitting them into channel 33.
  • the ends of the strips are crimped, leaving the middle section uncrimped.
  • the strips can be installed by hand or using a tool.
  • the tool can, for example, comprise a center tip for alignment with channel 31, an inner moveable ring around which the strips are wrapped, and an outer fixed ring which holds the strips in place prior to insertion. By moving the inner ring, the baffle is moved into top portion 16, while the outer ring holds the baffle in alignment with channel 33.
  • the crimped strips When properly installed, the crimped strips form a baffle with numerous openings -0.100" across and 3/16" long.
  • the baffle produces a uniform laminar flow with little, if any, back pressure, and corrects the flame non-uniformity problem.
  • it is inexpensive and easy to install.
  • the use of a baffle minimizes the chances for a snapback as a result of non-uniformity in the premix cones (flames).

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)

Abstract

On utilise des brûleurs (14) pour confectionner des corps de verre (19) à partir de l'octaméthyl-cyclotétrasiloxane (OMCTS). Ces brûleurs comportent six régions concentriques. L'introduction de certains gaz à travers ces régions permet de produire des corps plus épais et d'efficacité améliorée par rapport à des corps réalisés au moyen de techniques classiques.
PCT/US1999/021658 1998-09-22 1999-09-17 Bruleurs servant a produire des boules de verre de silice fondue WO2000017115A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP99969400A EP1140715A4 (fr) 1998-09-22 1999-09-17 Bruleurs servant a produire des boules de verre de silice fondue
JP2000574032A JP2002526363A (ja) 1998-09-22 1999-09-17 溶融シリカガラスのブールを製造するためのバーナ
KR1020017003641A KR20010079889A (ko) 1998-09-22 1999-09-17 용융 실리카 유리의 보울을 생성하는 버너
US09/787,399 US6751987B1 (en) 1998-09-22 1999-09-17 Burners for producing boules of fused silica glass

Applications Claiming Priority (2)

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US10140398P 1998-09-22 1998-09-22
US60/101,403 1998-09-22

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WO2000017115A1 true WO2000017115A1 (fr) 2000-03-30

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PCT/US1999/021658 WO2000017115A1 (fr) 1998-09-22 1999-09-17 Bruleurs servant a produire des boules de verre de silice fondue

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JP (1) JP2002526363A (fr)
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WO (1) WO2000017115A1 (fr)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6410192B1 (en) 1999-11-15 2002-06-25 Corning Incorporated Photolithography method, photolithography mask blanks, and method of making
EP1296899A1 (fr) * 2000-05-31 2003-04-02 Corning Incorporated Silice fondue a absorption induite constante
EP1278009A3 (fr) * 2001-07-21 2003-04-02 Samsung Electronics Co., Ltd. Dispositif de stabilisation de la flamme d'un brûleur pour déposition par hydrolyse à la flamme
US6735981B2 (en) 2001-09-27 2004-05-18 Corning Incorporated High heat capacity burners for producing fused silica boules
WO2004056714A1 (fr) * 2002-12-20 2004-07-08 Pirelli & C. S.P.A. Bruleur conçu pour depot chimique en phase vapeur de verre
US7053017B2 (en) 2002-03-05 2006-05-30 Corning Incorporated Reduced striae extreme ultraviolet elements
US20220098084A1 (en) * 2020-05-20 2022-03-31 Corning Incorporated Methods for increasing deposition in a flame hydrolysis deposition process

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2020054861A1 (ja) * 2018-09-14 2021-08-30 住友電気工業株式会社 ガラス微粒子堆積体の製造方法及びガラス母材の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215515A (ja) * 1984-04-10 1985-10-28 Mitsubishi Metal Corp 合成石英素塊の製造法及びその装置
JP3133392B2 (ja) * 1991-06-28 2001-02-05 古河電気工業株式会社 光ファイバ用スート母材の製造方法
US5702495A (en) * 1993-02-10 1997-12-30 Nikon Corporation Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
JPH07133131A (ja) * 1993-11-04 1995-05-23 Fujikura Ltd 光ファイバ母材の製法
JP3520541B2 (ja) * 1993-12-27 2004-04-19 株式会社ニコン 石英ガラス製バーナー、これを用いて製造される石英ガラス、石英ガラスバーナーを用いた石英ガラスの製造方法
JP3322538B2 (ja) * 1995-09-25 2002-09-09 信越化学工業株式会社 球状シリカ微粒子製造用バーナー

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds
US5922100A (en) * 1994-12-30 1999-07-13 Corning Incorporated Precision burners for oxidizing halide-free silicon-containing compounds

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1140715A4 *

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6475682B2 (en) 1999-11-15 2002-11-05 Corning Incorporated Photolithography method, photolithography mask blanks, and method of making
US6410192B1 (en) 1999-11-15 2002-06-25 Corning Incorporated Photolithography method, photolithography mask blanks, and method of making
EP1296899A4 (fr) * 2000-05-31 2004-11-17 Corning Inc Silice fondue a absorption induite constante
EP1296899A1 (fr) * 2000-05-31 2003-04-02 Corning Incorporated Silice fondue a absorption induite constante
EP1278009A3 (fr) * 2001-07-21 2003-04-02 Samsung Electronics Co., Ltd. Dispositif de stabilisation de la flamme d'un brûleur pour déposition par hydrolyse à la flamme
US6682339B2 (en) 2001-07-21 2004-01-27 Samsung Electronic Co., Ltd. Flame stabilizer for flame hydrolysis deposition
US6735981B2 (en) 2001-09-27 2004-05-18 Corning Incorporated High heat capacity burners for producing fused silica boules
JP2008182220A (ja) * 2002-03-05 2008-08-07 Corning Inc 低ストリエーション極紫外光光学素子
US7053017B2 (en) 2002-03-05 2006-05-30 Corning Incorporated Reduced striae extreme ultraviolet elements
USRE40586E1 (en) 2002-03-05 2008-11-25 Corning Incorporated Reduced striae extreme ultra violet elements
WO2004056714A1 (fr) * 2002-12-20 2004-07-08 Pirelli & C. S.P.A. Bruleur conçu pour depot chimique en phase vapeur de verre
US8567218B2 (en) 2002-12-20 2013-10-29 Prysmian Cavi E Sistemi Energia S.R.L. Burner for chemical vapour deposition of glass
US20220098084A1 (en) * 2020-05-20 2022-03-31 Corning Incorporated Methods for increasing deposition in a flame hydrolysis deposition process

Also Published As

Publication number Publication date
EP1140715A4 (fr) 2005-10-05
EP1140715A1 (fr) 2001-10-10
JP2002526363A (ja) 2002-08-20
KR20010079889A (ko) 2001-08-22

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