EP1140715A4 - Bruleurs servant a produire des boules de verre de silice fondue - Google Patents

Bruleurs servant a produire des boules de verre de silice fondue

Info

Publication number
EP1140715A4
EP1140715A4 EP99969400A EP99969400A EP1140715A4 EP 1140715 A4 EP1140715 A4 EP 1140715A4 EP 99969400 A EP99969400 A EP 99969400A EP 99969400 A EP99969400 A EP 99969400A EP 1140715 A4 EP1140715 A4 EP 1140715A4
Authority
EP
European Patent Office
Prior art keywords
burners
silica glass
fused silica
boules
producing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99969400A
Other languages
German (de)
English (en)
Other versions
EP1140715A1 (fr
Inventor
Laura J Ball
Raymond E Lindner
Mahendra Kumar Misra
Dale R Powers
Michael H Wasilewski
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of EP1140715A1 publication Critical patent/EP1140715A1/fr
Publication of EP1140715A4 publication Critical patent/EP1140715A4/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B19/00—Other methods of shaping glass
    • C03B19/14—Other methods of shaping glass by gas- or vapour- phase reaction processes
    • C03B19/1415—Reactant delivery systems
    • C03B19/1423—Reactant deposition burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/06—Concentric circular ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/10—Split ports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/12—Nozzle or orifice plates
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/04—Multi-nested ports
    • C03B2207/14—Tapered or flared nozzles or ports angled to central burner axis
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/22—Inert gas details
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/20—Specific substances in specified ports, e.g. all gas flows specified
    • C03B2207/24—Multiple flame type, e.g. double-concentric flame
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/30—For glass precursor of non-standard type, e.g. solid SiH3F
    • C03B2207/32—Non-halide
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/36—Fuel or oxidant details, e.g. flow rate, flow rate ratio, fuel additives
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/42—Assembly details; Material or dimensions of burner; Manifolds or supports
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/46—Comprising performance enhancing means, e.g. electrostatic charge or built-in heater
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/50—Multiple burner arrangements
    • C03B2207/52—Linear array of like burners
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2207/00—Glass deposition burners
    • C03B2207/70—Control measures
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Glass Melting And Manufacturing (AREA)
EP99969400A 1998-09-22 1999-09-17 Bruleurs servant a produire des boules de verre de silice fondue Withdrawn EP1140715A4 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10140398P 1998-09-22 1998-09-22
US101403P 1998-09-22
PCT/US1999/021658 WO2000017115A1 (fr) 1998-09-22 1999-09-17 Bruleurs servant a produire des boules de verre de silice fondue

Publications (2)

Publication Number Publication Date
EP1140715A1 EP1140715A1 (fr) 2001-10-10
EP1140715A4 true EP1140715A4 (fr) 2005-10-05

Family

ID=22284473

Family Applications (1)

Application Number Title Priority Date Filing Date
EP99969400A Withdrawn EP1140715A4 (fr) 1998-09-22 1999-09-17 Bruleurs servant a produire des boules de verre de silice fondue

Country Status (4)

Country Link
EP (1) EP1140715A4 (fr)
JP (1) JP2002526363A (fr)
KR (1) KR20010079889A (fr)
WO (1) WO2000017115A1 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6410192B1 (en) 1999-11-15 2002-06-25 Corning Incorporated Photolithography method, photolithography mask blanks, and method of making
US6403508B1 (en) * 2000-05-31 2002-06-11 Corning Incorporated Fused silica with constant induced absorption
KR100414668B1 (ko) * 2001-07-21 2004-01-07 삼성전자주식회사 화염가수분해증착 공정용 버너의 화염 안정화 장치
US6735981B2 (en) 2001-09-27 2004-05-18 Corning Incorporated High heat capacity burners for producing fused silica boules
US7053017B2 (en) 2002-03-05 2006-05-30 Corning Incorporated Reduced striae extreme ultraviolet elements
US8567218B2 (en) 2002-12-20 2013-10-29 Prysmian Cavi E Sistemi Energia S.R.L. Burner for chemical vapour deposition of glass
WO2020054861A1 (fr) * 2018-09-14 2020-03-19 住友電気工業株式会社 Procédé de production d'un dépôt de microparticules de verre et procédé de production d'un matériau à base de verre
US20220098084A1 (en) * 2020-05-20 2022-03-31 Corning Incorporated Methods for increasing deposition in a flame hydrolysis deposition process

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215515A (ja) * 1984-04-10 1985-10-28 Mitsubishi Metal Corp 合成石英素塊の製造法及びその装置
JPH059035A (ja) * 1991-06-28 1993-01-19 Furukawa Electric Co Ltd:The 光フアイバ用スート母材の製造方法
JPH07133131A (ja) * 1993-11-04 1995-05-23 Fujikura Ltd 光ファイバ母材の製法
JPH07187683A (ja) * 1993-12-27 1995-07-25 Nikon Corp 石英ガラス製バーナー、これを用いて製造される 石英ガラス、石英ガラスバーナーを用いた石英ガラスの製造方法
JPH0989224A (ja) * 1995-09-25 1997-04-04 Shin Etsu Chem Co Ltd 球状シリカ微粒子製造用バーナー
US5696624A (en) * 1993-02-10 1997-12-09 Nikon Corporation Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5043002A (en) * 1990-08-16 1991-08-27 Corning Incorporated Method of making fused silica by decomposing siloxanes
US5152819A (en) * 1990-08-16 1992-10-06 Corning Incorporated Method of making fused silica
US5599371A (en) * 1994-12-30 1997-02-04 Corning Incorporated Method of using precision burners for oxidizing halide-free, silicon-containing compounds

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60215515A (ja) * 1984-04-10 1985-10-28 Mitsubishi Metal Corp 合成石英素塊の製造法及びその装置
JPH059035A (ja) * 1991-06-28 1993-01-19 Furukawa Electric Co Ltd:The 光フアイバ用スート母材の製造方法
US5696624A (en) * 1993-02-10 1997-12-09 Nikon Corporation Silica glass member for UV-lithography, method for silica glass production, and method for silica glass member production
JPH07133131A (ja) * 1993-11-04 1995-05-23 Fujikura Ltd 光ファイバ母材の製法
JPH07187683A (ja) * 1993-12-27 1995-07-25 Nikon Corp 石英ガラス製バーナー、これを用いて製造される 石英ガラス、石英ガラスバーナーを用いた石英ガラスの製造方法
JPH0989224A (ja) * 1995-09-25 1997-04-04 Shin Etsu Chem Co Ltd 球状シリカ微粒子製造用バーナー

Non-Patent Citations (6)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 078 (C - 335) 27 March 1986 (1986-03-27) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 270 (C - 1063) 26 May 1993 (1993-05-26) *
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 08 29 September 1995 (1995-09-29) *
PATENT ABSTRACTS OF JAPAN vol. 1995, no. 10 30 November 1995 (1995-11-30) *
PATENT ABSTRACTS OF JAPAN vol. 1997, no. 08 29 August 1997 (1997-08-29) *
See also references of WO0017115A1 *

Also Published As

Publication number Publication date
KR20010079889A (ko) 2001-08-22
EP1140715A1 (fr) 2001-10-10
JP2002526363A (ja) 2002-08-20
WO2000017115A1 (fr) 2000-03-30

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