WO1999050197A1 - Tube a reaction - Google Patents

Tube a reaction Download PDF

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Publication number
WO1999050197A1
WO1999050197A1 PCT/JP1999/001553 JP9901553W WO9950197A1 WO 1999050197 A1 WO1999050197 A1 WO 1999050197A1 JP 9901553 W JP9901553 W JP 9901553W WO 9950197 A1 WO9950197 A1 WO 9950197A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
reaction tube
flange
reaction
gas passage
Prior art date
Application number
PCT/JP1999/001553
Other languages
English (en)
Japanese (ja)
Inventor
Hiroaki Konishi
Masumi Ito
Masahiko Matsui
Nobuya Akaike
Shinjiro Hagihara
Keiichiro Fukuda
Original Assignee
Sumitomo Electric Industries, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries, Ltd. filed Critical Sumitomo Electric Industries, Ltd.
Priority to AU29584/99A priority Critical patent/AU2958499A/en
Publication of WO1999050197A1 publication Critical patent/WO1999050197A1/fr

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
    • C03B37/01—Manufacture of glass fibres or filaments
    • C03B37/012—Manufacture of preforms for drawing fibres or filaments
    • C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
    • C03B37/01446—Thermal after-treatment of preforms, e.g. dehydrating, consolidating, sintering
    • C03B37/0146—Furnaces therefor, e.g. muffle tubes, furnace linings

Definitions

  • the present invention relates to a reaction tube of a reaction furnace used for, for example, dehydrating or sintering an optical fiber preform.
  • the reaction tube When dehydrating or sintering the optical fiber preform, put the glass object to be dehydrated or sintered, such as the optical fiber preform, into the reaction tube of the reaction furnace, and purge the atmosphere gas such as helium, chlorine, etc. Fill and heat to dehydrate or clear.
  • the reaction tube is made of a material that can withstand high heat, such as quartz or carbon, because the glass object to be reacted contained inside is heated by a heating heater arranged outside.
  • the reaction tube is usually divided into a plurality of parts, and can be separated or joined at the divided parts.
  • the central portion of the reaction tube becomes considerably high.
  • the temperature of the split point becomes as high as about 300 ° C due to heat conduction or the like, even if the temperature does not reach such a high temperature. Therefore, a seal member having a problem of heat resistance of 30 Ot: such as rubber cannot be used for sealing the divided portion.
  • flange-like flanges are attached to the ends of the reaction tube division on both sides of the division, and the joint surfaces of the flanges are precisely polished, and the joint surfaces are abutted to form a plurality of flanges.
  • the part is pressed and fixed with a fixing jig.
  • the outer periphery of the flange joint was covered with a fluororesin (tetrafluorochemical titanium) tape to prevent the gas filled inside the reaction tube from leaking through the joint surface of the flange.
  • FIG. 3 (A) is a longitudinal sectional view of the above-described conventional reactor
  • FIG. 3 (B) is a detailed sectional view of a divided portion of the reaction tube.
  • 10 is a reaction tube
  • 10a Is the central part of the reaction tube
  • 10b is the upper part of the reaction tube
  • 10c is the lower part of the reaction tube
  • 10d is the gas inlet
  • 10e is the gas outlet
  • 11 is the division
  • 11a, 11 b is a flange
  • 1 lc is a fixing jig
  • 12 is a fluororesin (tetrafluorotetrafluoroethylene) tape
  • 13 is a heating heater
  • 14 is a glass object to be reacted, such as an optical fiber preform.
  • the reaction tube 10 is divided into three parts: a center portion 10a of the reaction tube, an upper portion 10b of the reaction tube, and a lower portion 10c of the reaction tube.
  • Flange 11 1a, lib is attached so that it can be separated and joined.
  • a glass object is placed inside the reaction tube, and the surrounding area is filled with an atmospheric gas such as helium, chlorine, silicon tetrachloride, or silicon tetrafluoride according to the type of reaction.
  • the atmospheric gas is usually introduced into the reaction tube through the gas inlet 10d, flows through the reaction tube, and is discharged through the gas outlet 10e.
  • the glass object placed inside the reaction tube 10 may be rotated around an axis in the reaction tube, or may be moved in the longitudinal direction in order to cause a reaction in the longitudinal direction sequentially.
  • the glass object may be rotated only around its axis and not move in the longitudinal direction until the reaction is completed in the reaction tube, or the glass object may be fixed without moving the glass object . Disclosure of the invention
  • An object of the present invention is to provide a reaction tube in which the structure of such a divided portion of the reaction tube is improved so that a more favorable sealing can be achieved.
  • a flange is provided at an end of a divided portion of the reaction tube divided into a plurality of tubes.
  • a reaction tube provided with the flange so that the reaction tube can be separated and joined, and a gas passage through which a sealing gas flows is provided around the flange in a state adjacent to the flange.
  • the atmosphere gas inside the reaction tube leaks directly to the outside along the joint surface of the flange, and the outside air directly enters the reaction tube along the joint surface.
  • the gas flowing in the gas passage is the same gas as a part of the atmospheric gas flowing in the reaction tube, part of the sealing gas reacts from the gas passage through the joint surface of the flange.
  • the sealing gas contains some components of the atmospheric gas that fills the reaction tube, and the other components are mixed gas containing inert gas, or by using only inert gas, the sealing gas reacts. The cost of the sealing gas can be reduced while avoiding the effect of the reaction when it enters the inside of the tube.
  • a gas inlet and a gas outlet are provided in the gas passage, and the reaction in the reaction tube is performed while the introduction and the exhaust of the sealing gas are continued from the ports.
  • FIG. 1 is a vertical cross-sectional view of the vicinity of a division according to an embodiment of the reaction tube of the present invention.
  • FIG. 2 is a vertical cross-sectional view of the vicinity of a division according to another embodiment of the reaction tube of the present invention.
  • FIG. 3 ( ⁇ ) is a longitudinal sectional view of a conventional reactor, and ( ⁇ ) is a detailed sectional view of a divided portion of a reaction tube.
  • FIG. 1 and FIG. 2 are longitudinal sectional views showing the vicinity of a divided portion of a reaction tube according to an embodiment of the present invention, where 1 is a reaction tube divided vertically in the middle, la is a divided portion, 2, 3 are flanges, 4 is a flange joint surface, 5 is a gas passage, 5a is a gas inlet, 5b is a gas outlet, 5c is a gas flow opening, 6 is a flange fixing member, and 7 is a gas passage.
  • the forming member, 7a is a gas inlet, and 7b is a gas outlet.
  • the reaction tube 1 is a cylindrical or rectangular cylindrical body made of a heat-resistant material such as quartz or carbon. ing.
  • Flange 2 or 3 is attached to the end of the reaction tube along the division 1a so that it can be joined or separated at the joint surface 4 of the flanges 2 and 3. It is like that.
  • a gas passage 5 is provided along the joint surface 4 of the flange 3 so as to go around the flange, and the gas inlet 5a and the gas inlet 5a are provided at one or more positions in the circumferential direction of the gas passage 5.
  • the gas passage is provided on the flange 3 side in FIG. 1, it can be provided on the flange 2 side, or on both sides of the flanges 2 and 3. If the gas for sealing the gas passage is not actively discharged, the gas outlet 5b is not necessarily required.
  • the flanges 2 and 3 are brought into contact with the precisely polished joint surfaces 4, and the flanges are fastened and fixed at a plurality of positions in the circumferential direction by the flange fixing members 6.
  • the gas passage 5 may be provided at one or more positions in the circumferential direction of the gas passage 5 with a gas circulation port 5c for allowing the gas for sealing of the gas passage 5 to flow inside the reaction tube 1. It is also possible to introduce atmospheric gas into the reaction tube 1 using the gas flow port 5 and the gas flow port 5c. However, this has the advantage that the atmosphere gas in the reaction tube and the gas for sealing the gas passage can be introduced at the same time. Force Once the air has entered the gas passage, it becomes easier to enter the reaction tube. Therefore, when this gas circulation port is provided, it is desirable to discharge the gas for sealing the gas passage from the gas discharge port 5 so that the gas that has entered the gas passage does not go to the reaction tube as it is.
  • the reaction tube shown in Fig. 2 is partially part of the conventional reaction tube shown in Fig. 3 (B).
  • the fixing jigs 1 1c in FIG. 3 (B) are arranged and fixed at a plurality of positions in the circumferential direction of the flange.
  • the reaction tube according to the present invention shown in FIG. It is mounted on the entire circumference of the joints 2 and 3, and the two flanges 2 and 3 are pressed and fixed, and a gas passage 5 is formed around the joint surface of the flanges along the outer periphery of the joint surface 4.
  • a gas inlet 7a and a gas outlet 7b are provided at one or more locations in the circumferential direction of the gas passage forming member 7. If the gas for sealing in the gas passage is not actively discharged, the gas outlet 7b is not necessarily required.
  • a glass object to be reacted is disposed inside the reaction tube of FIG. 1 or FIG. 2, and an atmospheric gas such as helium, chlorine, silicon tetrachloride, silicon tetrafluoride, etc. is used according to the type of reaction.
  • the gas is introduced from the gas inlet of the tube and discharged from the gas outlet, and the inside of the reaction tube is filled with the same atmospheric gas.
  • the pressure inside the reaction tube is usually a positive pressure with respect to the atmospheric pressure, but the atmospheric gas may be consumed by the reaction and become a negative pressure.
  • the gas passage 5 is filled with a gas having the same composition as a part of the atmospheric gas in the reaction tube, a mixed gas of a part of the atmospheric gas and an inert gas, or an inert gas.
  • a gas having the same composition as a part of the atmospheric gas in the reaction tube a mixed gas of a part of the atmospheric gas and an inert gas, or an inert gas.
  • the gas for sealing in this gas passage be introduced and discharged at all times, but should be kept flowing, but it is also possible to keep the pressure at a constant level and to always fill in the gas without discharging. .
  • a gas for sealing is introduced so that the gas can be completely discharged and treated when it leaks to the gas passage. It is desirable to guide the exhaust gas to a treatment facility such as a neutralization facility for treatment while discharging.
  • the pressure of the sealing gas filled in the gas passage is normally set to a positive pressure with respect to the atmospheric pressure, but is lower than the pressure of the atmospheric gas inside the reaction tube.
  • the pressure of the sealing gas is higher than the pressure inside the reaction tube, it is generally preferred that once the air enters the gas passage, it will easily enter the reaction tube from the gas passage. Absent. However, when a gas flow port that connects the ring-shaped gas passage and the reaction tube is provided and the atmospheric gas in the reaction tube is introduced through the gas passage and the gas flow port, the pressure on the gas passage side is the pressure on the reaction tube side. Larger than.
  • Each of these reaction tubes shown in FIGS. 1 and 2 has a gas passage 5 which goes around the flange joint surface along the flange joint surface 4 or along the outer periphery of the flange joint surface 5. Therefore, even if the atmospheric gas filled in the reaction tube 1 leaks out along the joint surface 4, it is less likely to be trapped in the gas passage 5 and go out as it is. Further, the air that has entered from the outside is also trapped in the gas passage 5, so that the entry of the atmosphere into the reaction tube 1 is reduced.
  • the optical fiber manufacturing process there is a process of sintering or making the porous preform dehydrated after dehydration.
  • a reaction furnace equipped with a reaction tube according to the present invention is used, and an atmosphere gas is contained in the reaction tube. While flowing helium, helium was sealed in the gas passage at a positive pressure of 5 to 10 Pa with respect to the atmospheric pressure to perform the transparency operation.
  • Examination of the optical fiber manufactured from the resulting transparent optical fiber preform revealed that the optical fiber had an optical fiber preform manufactured using a reactor equipped with a reaction tube according to the prior art. It has been found that the increase in transmission loss that occurs when the manufactured optical fiber is treated at high temperatures is reduced by about an order of magnitude.
  • the reaction tube of the present invention is employed, even if the atmospheric gas in the reaction tube leaks out along the joint surface of the flange, the gas is trapped in the gas passage, so that the gas is less likely to leak to the outside. In addition, since the air is trapped in the gas passage, the air hardly enters the reaction tube. In addition, if the reaction work is performed while the gas for sealing the gas passage is flowing through the gas inlet and the gas outlet provided in the gas passage, the air that has entered the gas passage can be discharged from the gas outlet. Since the gas is discharged, the effect of preventing air from entering the reaction tube is further enhanced.
  • the sealing gas only inert gas or some component of atmospheric gas in the reaction tube is used as the sealing gas.
  • the sealing gas By using a mixed gas of a gas and an inert gas, the cost of the sealing gas can be reduced as compared with a case where a gas having the same composition as the atmosphere gas is used as the sealing gas.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Manufacturing & Machinery (AREA)
  • General Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Flanged Joints, Insulating Joints, And Other Joints (AREA)
  • Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
  • Manufacture, Treatment Of Glass Fibers (AREA)

Abstract

L'invention concerne un tube à réaction (1) amélioré dans un procédé d'étanchéité au niveau de positions divisées situées sur le tube à réaction d'un réacteur dans lequel une substance en verre est stockée pour procéder à une réaction, lequel peut être séparé ou relié par des brides (2, 3) par division du tube à réaction (1) en parties multiples et par disposition des brides (2, 3) aux parties terminales divisées du tube à réaction le long de la périphérie des positions divisées, dans lequel un passage (5) de gaz rempli d'un gaz d'étanchéité est disposé le long des surfaces d'appariment (4) des brides (2, 3) ou le long de la périphérie extérieure des surfaces d'appariment (4) des brides (2, 3) afin d'empêcher que le gaz atmosphérique intérieur du tube à réaction (1) ne fuit directement à l'extérieur le long des surfaces d'appariment (4) ou que l'air extérieur ne pénètre dans le tube à réaction directement le long des surfaces d'appariment (4).
PCT/JP1999/001553 1998-03-31 1999-03-25 Tube a reaction WO1999050197A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU29584/99A AU2958499A (en) 1998-03-31 1999-03-25 Reaction pipe

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP08515698A JP2002211943A (ja) 1998-03-31 1998-03-31 反応管
JP10/85156 1998-03-31

Publications (1)

Publication Number Publication Date
WO1999050197A1 true WO1999050197A1 (fr) 1999-10-07

Family

ID=13850816

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1999/001553 WO1999050197A1 (fr) 1998-03-31 1999-03-25 Tube a reaction

Country Status (3)

Country Link
JP (1) JP2002211943A (fr)
AU (1) AU2958499A (fr)
WO (1) WO1999050197A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1717212A1 (fr) * 2005-04-29 2006-11-02 The Boc Group, Inc. Procédé de consolidation d'une préforme de verre pour des fibres optiques

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006151715A (ja) * 2004-11-26 2006-06-15 Sumitomo Electric Ind Ltd ガラス母材の製造方法及び製造装置
JP6383579B2 (ja) * 2014-06-16 2018-08-29 信越化学工業株式会社 フランジ固定構造
CN107218455A (zh) * 2017-06-30 2017-09-29 河南地之绿环保科技有限公司 一种裂解炉炉管的连接结构
KR102580831B1 (ko) * 2022-08-12 2023-09-19 이현수 세라믹 배관 연결부의 기밀유지구조

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215537U (fr) * 1985-07-09 1987-01-30
JPH02153834A (ja) * 1988-12-07 1990-06-13 Sumitomo Electric Ind Ltd 脱水焼結炉

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6215537U (fr) * 1985-07-09 1987-01-30
JPH02153834A (ja) * 1988-12-07 1990-06-13 Sumitomo Electric Ind Ltd 脱水焼結炉

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1717212A1 (fr) * 2005-04-29 2006-11-02 The Boc Group, Inc. Procédé de consolidation d'une préforme de verre pour des fibres optiques

Also Published As

Publication number Publication date
AU2958499A (en) 1999-10-18
JP2002211943A (ja) 2002-07-31

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