WO1999032792A2 - Pompe a vide moleculaire - Google Patents

Pompe a vide moleculaire Download PDF

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Publication number
WO1999032792A2
WO1999032792A2 PCT/RU1998/000418 RU9800418W WO9932792A2 WO 1999032792 A2 WO1999032792 A2 WO 1999032792A2 RU 9800418 W RU9800418 W RU 9800418W WO 9932792 A2 WO9932792 A2 WO 9932792A2
Authority
WO
WIPO (PCT)
Prior art keywords
rotor
openings
housing
grooves
vacuum
Prior art date
Application number
PCT/RU1998/000418
Other languages
English (en)
Russian (ru)
Other versions
WO1999032792A3 (fr
Inventor
Vladimir Iliich Vikhrev
Valery Ivanovich Uvin
Vladimir Ivanovich Nikolaichev
Alexandr Ivanovich Ukhvatov
Igor Vladimirovich Yakovlev
Oleg Alexandrovich Chirkov
Original Assignee
Nt Promy Proizv
Vikhrev Vladimir I
Valery Ivanovich Uvin
Vladimir Ivanovich Nikolaichev
Alexandr Ivanovich Ukhvatov
Igor Vladimirovich Yakovlev
Oleg Alexandrovich Chirkov
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nt Promy Proizv, Vikhrev Vladimir I, Valery Ivanovich Uvin, Vladimir Ivanovich Nikolaichev, Alexandr Ivanovich Ukhvatov, Igor Vladimirovich Yakovlev, Oleg Alexandrovich Chirkov filed Critical Nt Promy Proizv
Publication of WO1999032792A2 publication Critical patent/WO1999032792A2/fr
Publication of WO1999032792A3 publication Critical patent/WO1999032792A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Rotary Pumps (AREA)

Abstract

Cette invention concerne une pompe à vide moléculaire dont le carter (1) comporte des ouvertures (5, 6) assurant la communication avec l'air libre et avec une chambre où l'on doit créer le vide. Le carter renferme un rotor (7) qui est monté de manière à laisser des jours radiaux et axiaux. A la surface externe du rotor (7), et pratiquement sur toute la longueur de celui-ci, se trouvent des rainures hélicoïdales (8) définissant une partie d'écoulement qui comprend au moins deux étages de pompage et qui se situe entre les ouvertures (5, 6). Ces rainures (8) se présentent sous forme d'un filetage multiple. Le diamètre interne de ce filetage va en augmentant en partant du côté aspiration depuis les ouvertures (5) communiquant avec la chambre où l'on doit créer le vide, et en allant vers le côté refoulement en direction des ouvertures (6) communiquant avec l'air libre. Dans l'ouverture axiale (9) du rotor (7) se trouve un arbre (10) dont les extrémités sont fixées de manière rigide au carter (1). L'espace radial séparant l'arbre (10) de l'ouverture (9) du rotor (7) joue le rôle de palier à dynamique des gaz dudit rotor (7).
PCT/RU1998/000418 1997-12-19 1998-12-17 Pompe a vide moleculaire WO1999032792A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE19756837.8 1997-12-19
DE1997156837 DE19756837C2 (de) 1997-12-19 1997-12-19 Molekular- und Viskositätspumpe

Publications (2)

Publication Number Publication Date
WO1999032792A2 true WO1999032792A2 (fr) 1999-07-01
WO1999032792A3 WO1999032792A3 (fr) 1999-09-10

Family

ID=7852719

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/RU1998/000418 WO1999032792A2 (fr) 1997-12-19 1998-12-17 Pompe a vide moleculaire

Country Status (2)

Country Link
DE (1) DE19756837C2 (fr)
WO (1) WO1999032792A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006037730A1 (fr) * 2004-10-01 2006-04-13 Oerlikon Leybold Vacuum Gmbh Pompe a vide a friction

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008034948A1 (de) * 2008-07-26 2010-01-28 Pfeiffer Vacuum Gmbh Vakuumpumpe
CN115875280A (zh) * 2021-09-29 2023-03-31 株式会社岛津制作所 真空泵

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
GB1473374A (en) * 1973-11-29 1977-05-11 Leybold Heraeus Verwaltung Turbomolecular vacuum pump
SU1550222A1 (ru) * 1988-06-23 1990-03-15 МВТУ им.Н.Э.Баумана Турбомолекул рный вакуумный насос
SU1657757A1 (ru) * 1987-05-27 1991-06-23 Предприятие П/Я А-3474 Ротор турбомолекул рного вакуумного насоса

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL8602052A (nl) * 1986-08-12 1988-03-01 Ultra Centrifuge Nederland Nv Hoogvacuumpomp.
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1473374A (en) * 1973-11-29 1977-05-11 Leybold Heraeus Verwaltung Turbomolecular vacuum pump
DE2409857B2 (de) * 1974-03-01 1977-03-24 Leybold-Heraeus GmbH & Co KG, 5000Köln Turbomolekularvakuumpumpe mit zumindest teilweise glockenfoermig ausgebildetem rotor
SU1657757A1 (ru) * 1987-05-27 1991-06-23 Предприятие П/Я А-3474 Ротор турбомолекул рного вакуумного насоса
SU1550222A1 (ru) * 1988-06-23 1990-03-15 МВТУ им.Н.Э.Баумана Турбомолекул рный вакуумный насос

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006037730A1 (fr) * 2004-10-01 2006-04-13 Oerlikon Leybold Vacuum Gmbh Pompe a vide a friction
CN100458171C (zh) * 2004-10-01 2009-02-04 厄利孔莱博尔德真空技术有限责任公司 摩擦真空泵

Also Published As

Publication number Publication date
DE19756837C2 (de) 1999-09-30
DE19756837A1 (de) 1999-07-01
WO1999032792A3 (fr) 1999-09-10

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