WO1999030130A2 - Verfahren zur untersuchung oder zum strukturieren einer oberflächenschicht - Google Patents
Verfahren zur untersuchung oder zum strukturieren einer oberflächenschicht Download PDFInfo
- Publication number
- WO1999030130A2 WO1999030130A2 PCT/EP1998/007597 EP9807597W WO9930130A2 WO 1999030130 A2 WO1999030130 A2 WO 1999030130A2 EP 9807597 W EP9807597 W EP 9807597W WO 9930130 A2 WO9930130 A2 WO 9930130A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- biocomponents
- medium
- osmotic protective
- nutrient
- protective medium
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/24—Optical enhancement of defects or not directly visible states, e.g. selective electrolytic deposition, bubbles in liquids, light emission, colour change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Definitions
- the invention relates to a method for examining the surface or the surface layer of an object for at least one topographical and / or chemical property.
- a known method for determining the chemical composition of an object is the Auger method.
- the surface of an object to be examined is bombarded with electron beams or irradiated with short-wave, high-energy radiation, which release secondary electrons on the surface of the object.
- the energy of these secondary electrons is measured using a suitable sensor system.
- the chemical composition of the object can then be deduced from the measured energy.
- a measuring tip is brought up to the object down to a few tenths of a nanometer, to which a voltage is applied against the object surface.
- the probe tip is then moved in a grid pattern along the object surface, the electrical current flowing through the probe tip, which is a measure of the distance of the probe tip from the object surface, being measured.
- a disadvantage of the previously known methods is that they require considerable equipment and are therefore expensive to use. It is also unfavorable that different techniques are required for the investigation of topographic and chemical properties of the object, which additionally increases the effort for the examination of the object. In addition, the sensitivity of the known methods is often not sufficient.
- the object is therefore to create a method with which a surface or a surface layer of an object can be examined in a simple manner with high sensitivity for a topographic and / or chemical property.
- the solution to this problem is that the object surface for the investigation of a topographical property with surface structure selective and / or for the investigation of a chemical property with chemoselective biocomponents as well as with a nutrient medium and / or an osmotic protective medium for the biocomponents is acted on in such a way that in the Nutrient medium and / or the osmotic protective medium arranged in contact with the object surface or are spaced from the object surface by less than the detection range of the biocomponents that the object surface with the arranged in the nutrient medium and / or the osmotic protective medium Biocomponent is then examined by determining at least one examination measurement value, and that the examination measurement value is compared with a reference measurement value and a conclusion is drawn from the result of the comparison on a chemical property of the object.
- the biocomponents can be, for example, membrane-enclosed compartments, such as biological cells, isolated cell components, such as cell membranes, microorganisms (fungi, bacteria), antibodies, antigens, receptors, organelles, viruses, vesicles, micelles or biomolecules. If necessary, the biocomponents can be specially designed to recognize chemical and / or topographical properties. In order to investigate a topographical or chemical property of an object, the ability of biocomponents to react to different topographical or chemical conditions in an evolutionary manner with high specification is therefore advantageously used. For this purpose, biocomponents are first brought into or near the surface of the object in a nutrient medium and / or an osmotic protective medium.
- the biocomponents are slightly spaced from the object surface, so that, for example, substances diffusing from the surface layer through the nutrient medium and / or the osmotic protective medium to the biocomponents and / or potential fields caused by the surface structure the object surface can be detected by the biocomponents.
- the biocomponents for example m, color, shape and / or size, then form differently and / or arrange themselves differently on the surface.
- the nutrient medium allows the biocomponents to be kept vital over a longer period of time, so that they have enough time to adapt to the chemical and / or topographical properties of the object.
- the nutrient medium can be, for example, a nutrient liquid in which the biocomponents float.
- the object surface with the biocomponents is then examined optically by optically determining one or more test measurement values. These are then compared with reference measurement values, which were measured, for example, on an object with a known surface topography and / or with known chemical properties. From the result of the comparison, a topographical and / or chemical property of the examined object is then concluded, for example, in that, if the measured and reference values largely agree, common features between the properties of the examined object Object and those of the reference object and in the event of a clear deviation of the measured values from the reference measured values, differences in the properties of the examined object from the reference object are determined.
- the method according to the invention makes it possible to examine topographic and / or chemical properties of an object with comparatively little expenditure on equipment.
- the same technique can advantageously be used in the examination of the topographical properties as in the investigation of chemical object properties.
- the method can therefore be carried out particularly cost-effectively.
- the method has a high sensitivity, the slightest changes or differences in the surface topography or in the chemical properties being immediately recognizable in real time and online.
- easy-to-use surface structure-selective cells of the cell type LS 174 T or highly surface-selective tumor cells can be used as biocomponents.
- a preferred embodiment of the invention provides that at least some of the biocomponents are attached to the surface of the object.
- the biocomponents are then in constant contact with the surface layer of the object, so that they can react particularly sensitively to chemical components contained therein and / or to the surface structure of the object.
- At least one test measurement value is expediently determined optically.
- the examination procedure is then particularly easy to carry out.
- a preferred embodiment of the invention provides that an optical image is recorded from the surface with the biocomponents and that the image is compared with a reference image by optical image analysis. This makes it possible, for example, to easily determine the distribution of the biocomponents on or near the surface using image processing methods, in order to draw conclusions about the structural properties or the material properties of the object.
- image processing methods for example, the growth behavior of biological cells on differently processed ISFETs with the same surface is different.
- chemical properties of an object can also be determined. It has been found, for example, that cells of the LS 174 T cell type do not grow on ISFETs which contain copper components.
- an optical interference pattern is generated on the surface and on the biocomponents acting on it during the recording of the optical image, and if the image is analyzed by an optical image analysis with an interference Reference image is compared.
- the dimensions and the arrangement of the individual biocomponents located on or in the vicinity of the object surface can be determined particularly precisely.
- At least one test measurement value is determined by means of an electrical, electronic or electrochemical sensor.
- metabolic products of the biocomponents, gas contents and / or messenger substances can be determined by electrochemical ion concentration measurements.
- the degree of adhesion of biological cells to the object surface can be determined by means of the metabolism.
- information about the biocomponents can be obtained through potential measurements. Since the living conditions of the biocomponents and thus their metabolism are influenced by the chemical and / or topographical properties of the surface layer of the object, the measurement signals obtained by means of the electrical, electronic or electrochemical sensors allow conclusions to be drawn about the properties of the surface layer.
- An advantageous embodiment of the invention provides that at least some of the biocomponents are structurally selective and / or chemoselective biocomponents that respond to at least one growth, structure or function modulating substance contained in the object to be examined.
- the method then has an even greater sensitivity to measurement. For example, paint residues on a semiconductor can be detected by the fact that because of the contained therein, for which the biocomponent contains toxic ingredients, they do not grow there.
- biocomponents and the nutrient and / or osmotic protective medium are applied to the surface of an object consisting of non-biological material and / or a surface layer composed of such a material.
- residues of thin lacquer layers such as residues of masking lacquers for photo structuring, can be localized on the surface of a wafer or the like semiconductor or solid. In this way, knowledge about the manufacturing process of the wafer can be obtained, with which the manufacturing process can be optimized.
- the invention also relates to a method for structuring a surface layer of an object.
- a method for structuring a surface layer of a wafer is already known from semiconductor technology, in which a light-sensitive photoresist emulsion is first applied to the surface of the wafer, which after exposure to ultraviolet light becomes insoluble and thus becomes resistant to a chemical, for example an acid .
- the emulsion applied to the wafer is then exposed through a photographic mask, the mask covering those areas where the wafer material is to be removed in a subsequent etching process in order to structure the surface layer of the wafer.
- the emulsion masked in this way is then developed.
- the unexposed areas are then removed with a solvent.
- the wafer surface is brought into contact with an acid, the photoresist emulsion protecting those areas where there is a removal of surface material by etching is not desired. Finally, the photoresist material is removed from the surface.
- the object is therefore to create a method for structuring a surface layer of an object which can be carried out simply and inexpensively.
- the solution to this problem is that biocomponents that remove surface material are applied to the surface of the object in a nutrient medium and / or an osmotic protective medium, and that the nutrient medium and / or the osmotic protective medium with the biocomponents contained therein after the removal of surface material from the object - Surface to be removed.
- the surface layer of the object can thereby be roughened in a simple manner or structurally changed in another way.
- biocomponents are adhered to the surface of the object.
- a surface structuring corresponding to the arrangement of the attached biocomponents then results on the surface layer.
- An advantageous embodiment of the method provides that substance-selective biocomponents are used which are based on the Removal of one or more of the substances contained in the object are specialized. This makes it possible, for example, to specifically remove certain impurities on the surface layer of the object and thus to clean the object.
- the chemical composition of the surface layer can also be specifically changed by removing certain substances.
- the above-mentioned object can also be achieved in a method for structuring a surface layer of an object in that a biocomponent which secretes an excretion product is adherently attached to the surface of the object in a nutrient medium and / or an osmotic protective medium, and in that the nutrient medium and / or the osmotic Protective medium with the biocomponents contained therein are removed from the object surface after the excretion product has been secreted.
- the object surface can thus be provided with a structure and / or a coating in a simple manner and thus be changed both materially and structurally.
- the nutrient medium allows the biocomponents to be kept vital over a longer period of time, so that they have enough time to secrete the excretion product.
- the method makes it possible in particular to change the electrical parameters of the object material, which is particularly advantageous in semiconductor technology.
- a cell culture can be attached to the surface of the object, which secretes proteins, analytics and / or pigments that attach to the object surface. After the cell culture has been removed, a structuring formed by the excretion product of the cell culture then remains on the surface layer of the object.
- the above object can be achieved in a method for Structuring a surface layer of an object can also be solved by adhering biocomponents to form a surface structure on the surface of the object in a nutrient medium and / or an osmotic protective medium, and in that the nutrient medium and / or the osmotic protective medium after the biocomponents have been attached by the Object surface is removed.
- biocomponents For example, cells that serve as a dielectric can be attached to a semiconductor.
- the above-mentioned methods for structuring a surface layer of an object it is even possible that surface structure-selective biocomponents are used to attach the biocomponents to a region of a surface layer that has a certain structure.
- the biocomponents then only adhere to certain parts of the surface.
- the wafer surface can be designed such that the biocomponents only adhere to certain locations on the wafer in order to form a dielectric there, for example, and / or to structure a surface area of the wafer.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Biochemistry (AREA)
- Computer Hardware Design (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Apparatus Associated With Microorganisms And Enzymes (AREA)
- Measuring Or Testing Involving Enzymes Or Micro-Organisms (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP98962395A EP1252497B1 (de) | 1997-12-04 | 1998-11-25 | Verfahren zur untersuchung oder zum strukturieren einer oberflächenschicht |
JP2000524641A JP2003523069A (ja) | 1997-12-04 | 1998-11-25 | 表面層を検査または構造化する方法 |
DE59814152T DE59814152D1 (de) | 1997-12-04 | 1998-11-25 | Verfahren zur untersuchung oder zum strukturieren einer oberflächenschicht |
US09/585,146 US6656678B1 (en) | 1997-12-04 | 2000-06-01 | Method for examination of a surface layer |
US12/152,315 US20080220541A1 (en) | 1997-12-04 | 2008-05-14 | Process for structuring a surface layer |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1997153790 DE19753790C2 (de) | 1997-12-04 | 1997-12-04 | Verfahren zur Untersuchung einer Oberflächenschicht |
DE19753790.1 | 1997-12-04 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09/585,146 Continuation US6656678B1 (en) | 1997-12-04 | 2000-06-01 | Method for examination of a surface layer |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1999030130A2 true WO1999030130A2 (de) | 1999-06-17 |
WO1999030130A3 WO1999030130A3 (de) | 2002-08-29 |
Family
ID=7850720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1998/007597 WO1999030130A2 (de) | 1997-12-04 | 1998-11-25 | Verfahren zur untersuchung oder zum strukturieren einer oberflächenschicht |
Country Status (5)
Country | Link |
---|---|
US (4) | US6656678B1 (de) |
EP (2) | EP1912054B1 (de) |
JP (1) | JP2003523069A (de) |
DE (3) | DE19758533B4 (de) |
WO (1) | WO1999030130A2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10201640A1 (de) * | 2002-01-17 | 2003-08-07 | Fraunhofer Ges Forschung | Verfahren zur Herstellung einer Folie mit Oberflächenstrukturen im Mikro- und Nanometerbereich sowie eine diesbezügliche Folie |
US8938467B2 (en) | 2009-03-25 | 2015-01-20 | Eloy Technology, Llc | System and method for intelligent storage of time shifted content |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4924091A (en) * | 1989-02-01 | 1990-05-08 | The Regents Of The University Of California | Scanning ion conductance microscope |
DD285534A7 (de) * | 1988-09-27 | 1990-12-19 | Technische Universitaet Karl-Marx-Stadt,Dd | Chemisches messverfahren zur einschaetzung der physikalisch-chemischen oberflaechenbeschaffenheit metallischer werkstoffe |
US5442443A (en) * | 1993-04-08 | 1995-08-15 | Polaroid Corporation | Stereoscopic photon tunneling microscope |
EP0749010A2 (de) * | 1995-06-13 | 1996-12-18 | Takasago Thermal Engineering Co. Ltd. | Vorrichtung und Verfahren zur Bestimmung der Kontaminantion verursacht durch organische Substanzen, abgelagert auf einer Substratoberfläche |
EP0785424A1 (de) * | 1996-01-17 | 1997-07-23 | Deutsche ITT Industries GmbH | Verfahren zum Herstellen einer Messeinrichtung sowie danach hergestellte Messeinrichtung |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE285534C (de) | ||||
US4728591A (en) * | 1986-03-07 | 1988-03-01 | Trustees Of Boston University | Self-assembled nanometer lithographic masks and templates and method for parallel fabrication of nanometer scale multi-device structures |
US5079600A (en) | 1987-03-06 | 1992-01-07 | Schnur Joel M | High resolution patterning on solid substrates |
DE3836716A1 (de) * | 1988-10-28 | 1990-05-03 | Zeiss Carl Fa | Verfahren zur auswertung von zellbildern |
DE3924454A1 (de) * | 1989-07-24 | 1991-02-07 | Cornelis P Prof Dr Hollenberg | Die anwendung von dna und dna-technologie fuer die konstruktion von netzwerken zur verwendung in der chip-konstruktion und chip-produktion (dna chips) |
DE4030836A1 (de) * | 1990-09-28 | 1992-04-02 | Kim Yoon Ok | Vorrichtung zur qualitativen und/oder quantitativen bestimmung der zusammensetzung einer zu analysierenden probe |
US6198532B1 (en) * | 1991-02-22 | 2001-03-06 | Applied Spectral Imaging Ltd. | Spectral bio-imaging of the eye |
US5433854A (en) * | 1994-03-16 | 1995-07-18 | Dickerson; J. Rodney | Method for preventing erosion in waste water lift stations and treatment facilities |
US5735276A (en) * | 1995-03-21 | 1998-04-07 | Lemelson; Jerome | Method and apparatus for scanning and evaluating matter |
DE19512117A1 (de) * | 1995-04-04 | 1996-10-10 | Itt Ind Gmbh Deutsche | Meßeinrichtung |
US5545531A (en) | 1995-06-07 | 1996-08-13 | Affymax Technologies N.V. | Methods for making a device for concurrently processing multiple biological chip assays |
US5605836A (en) * | 1995-06-13 | 1997-02-25 | Chen; Chin-Yu | Modular method and device for the evaluation of the ability of biocide to penetrate biofilm |
US6148096A (en) * | 1995-09-15 | 2000-11-14 | Accumed International, Inc. | Specimen preview and inspection system |
US5721435A (en) * | 1996-04-09 | 1998-02-24 | Hewlett Packard Company | Methods and apparatus for measuring optical properties of biological and chemical substances |
TW416987B (en) * | 1996-06-05 | 2001-01-01 | Wako Pure Chem Ind Ltd | A composition for cleaning the semiconductor substrate surface |
-
1997
- 1997-12-04 DE DE19758533A patent/DE19758533B4/de not_active Expired - Fee Related
-
1998
- 1998-11-25 DE DE59814152T patent/DE59814152D1/de not_active Expired - Lifetime
- 1998-11-25 DE DE59814450T patent/DE59814450D1/de not_active Expired - Lifetime
- 1998-11-25 EP EP07017654A patent/EP1912054B1/de not_active Expired - Lifetime
- 1998-11-25 WO PCT/EP1998/007597 patent/WO1999030130A2/de active IP Right Grant
- 1998-11-25 JP JP2000524641A patent/JP2003523069A/ja active Pending
- 1998-11-25 EP EP98962395A patent/EP1252497B1/de not_active Expired - Lifetime
-
2000
- 2000-06-01 US US09/585,146 patent/US6656678B1/en not_active Expired - Fee Related
-
2003
- 2003-10-24 US US10/692,534 patent/US20040091997A1/en not_active Abandoned
-
2006
- 2006-03-09 US US11/371,617 patent/US20060154379A1/en not_active Abandoned
-
2008
- 2008-05-14 US US12/152,315 patent/US20080220541A1/en not_active Abandoned
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DD285534A7 (de) * | 1988-09-27 | 1990-12-19 | Technische Universitaet Karl-Marx-Stadt,Dd | Chemisches messverfahren zur einschaetzung der physikalisch-chemischen oberflaechenbeschaffenheit metallischer werkstoffe |
US4924091A (en) * | 1989-02-01 | 1990-05-08 | The Regents Of The University Of California | Scanning ion conductance microscope |
US5442443A (en) * | 1993-04-08 | 1995-08-15 | Polaroid Corporation | Stereoscopic photon tunneling microscope |
EP0749010A2 (de) * | 1995-06-13 | 1996-12-18 | Takasago Thermal Engineering Co. Ltd. | Vorrichtung und Verfahren zur Bestimmung der Kontaminantion verursacht durch organische Substanzen, abgelagert auf einer Substratoberfläche |
EP0785424A1 (de) * | 1996-01-17 | 1997-07-23 | Deutsche ITT Industries GmbH | Verfahren zum Herstellen einer Messeinrichtung sowie danach hergestellte Messeinrichtung |
Also Published As
Publication number | Publication date |
---|---|
EP1252497B1 (de) | 2008-01-09 |
EP1912054A1 (de) | 2008-04-16 |
DE59814152D1 (de) | 2008-02-21 |
DE19758533A1 (de) | 1999-08-12 |
EP1912054B1 (de) | 2010-04-28 |
DE59814450D1 (de) | 2010-06-10 |
US6656678B1 (en) | 2003-12-02 |
JP2003523069A (ja) | 2003-07-29 |
US20080220541A1 (en) | 2008-09-11 |
US20060154379A1 (en) | 2006-07-13 |
WO1999030130A3 (de) | 2002-08-29 |
EP1252497A2 (de) | 2002-10-30 |
DE19758533B4 (de) | 2005-09-29 |
US20040091997A1 (en) | 2004-05-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP0177718B1 (de) | Verfahren und Vorrichtung zur Sortierung von mikroskopischen Partikeln | |
DE4018993A1 (de) | Verfahren und einrichtung zur untersuchung beschichteter metalloberflaechen | |
DE19757785A1 (de) | Verfahren und Vorrichtung zur Vermessung und Kalibrierung von Laser-Pinzetten | |
DE10049901A1 (de) | Vorrichtung und Verfahren zur elektrisch beschleunigten Immobilisierung und zur Detektion von Molekülen | |
DE19903001A1 (de) | Verfahren und Vorrichtung zur Detektion mikroskopisch kleiner Objekte | |
EP0658760A1 (de) | Vorrichtung und Verfahren zur Erzeugung optisch detektierbarer Signale durch Anlegen elektrischer Potentiale an Probenflüssigkeiten | |
DE102015219023B3 (de) | Vorrichtung zum Analysieren von biologischen Substanzen in einer Testlösung, Herstellungsverfahren und Betriebsverfahren | |
WO1999030130A2 (de) | Verfahren zur untersuchung oder zum strukturieren einer oberflächenschicht | |
DE102005048151A1 (de) | Verfahren zum Nachweis von Rückständen auf einem Bauteil | |
DE102019122079A1 (de) | Verfahren zur bestimmung von nanopolymerpartikeln | |
DE2944019A1 (de) | Einrichtung zur untersuchung von lumineszenzeigenschaften von mikroobjekten | |
DE19753790A1 (de) | Verfahren zur Untersuchung oder zum Strukturieren einer Oberflächenschicht | |
DE4212910C2 (de) | Verfahren zur Beschichtung von Sensoren mit selektiv durchlässigen Polymermembranen | |
DE102009015114B4 (de) | Vorrichtung nach Art einer elektrochemischen Kamera sowie Verfahren zur Herstellung und Verwendung der Vorrichtung | |
DE4003119C2 (de) | ||
EP1717574B1 (de) | Detektion der Abdichtung einer biologischen Substanz auf einem Träger mittels Rauschanalyse | |
DE102021108182B3 (de) | Vorrichtung und Verfahren zur Erfassung und Auswertung von Laufzeitunterschieden von Spannungsverläufen | |
DE19857692C1 (de) | Verfahren und Vorrichtung zur zellspurbasierten Zelluntersuchung | |
DE19935028C2 (de) | Verfahren und Vorrichtungen zur elektrophoretischen Trennung von Partikeln, insbesondere von Makromolekülen | |
DE3413426C2 (de) | Verfahren zur Bestimmung der Oberflächenbeschaffenheit luftgetragener Partikeln | |
DE102017108978A1 (de) | Verfahren und Einrichtung zur extraktiven Bestimmung der Konzentration von ein oder mehreren Stoffen | |
DE69212817T2 (de) | Nachweis von Substanzen | |
DE3824478C1 (en) | Method and device for the determination of the density of micropores in insulator layers on conductive or semiconductive substrates | |
DE102008056277B4 (de) | Sensor für elektrophysiologische Untersuchungen an lebenden Zellen und Verfahren zu seiner Herstellung | |
DD279594A3 (de) | Radondetektor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A2 Designated state(s): JP US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
DFPE | Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101) | ||
WWE | Wipo information: entry into national phase |
Ref document number: 1998962395 Country of ref document: EP |
|
WWE | Wipo information: entry into national phase |
Ref document number: 09585146 Country of ref document: US |
|
AK | Designated states |
Kind code of ref document: A3 Designated state(s): JP US |
|
AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LU MC NL PT SE |
|
WWP | Wipo information: published in national office |
Ref document number: 1998962395 Country of ref document: EP |
|
WWG | Wipo information: grant in national office |
Ref document number: 1998962395 Country of ref document: EP |