WO1996038856A1 - Spectrometre de masse faisant intervenir une source d'ions provenant de plasma - Google Patents

Spectrometre de masse faisant intervenir une source d'ions provenant de plasma Download PDF

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Publication number
WO1996038856A1
WO1996038856A1 PCT/JP1995/001025 JP9501025W WO9638856A1 WO 1996038856 A1 WO1996038856 A1 WO 1996038856A1 JP 9501025 W JP9501025 W JP 9501025W WO 9638856 A1 WO9638856 A1 WO 9638856A1
Authority
WO
WIPO (PCT)
Prior art keywords
mass spectrometer
plasma
nozzle
ion source
blocking member
Prior art date
Application number
PCT/JP1995/001025
Other languages
English (en)
Japanese (ja)
Inventor
Minoru Sakairi
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to PCT/JP1995/001025 priority Critical patent/WO1996038856A1/fr
Publication of WO1996038856A1 publication Critical patent/WO1996038856A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/105—Ion sources; Ion guns using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]

Definitions

  • the present invention relates to a plasma ion source mass spectrometer, and more particularly to a plasma ion source mass spectrometer having an ion optical system for separating ions and light generated from plasma.
  • the ions are further transported to the quadrupole mass spectrometer 11 by the electrostatic lens 9, but due to problems specific to the plasma ion source mass spectrometer, this ion optical system has a very special configuration. ing. That is, the ion detector 12 is quite sensitive to vacuum ultraviolet light generated from the plasma, and causes a background of a signal. Therefore, it is necessary to separate light and ions.
  • ions are moved in the direction of the skimmer 8 from the nozzle 7 by utilizing the collision of ions and molecules inside the differential pumping section 20, so that the light shielding member 10 and the skimmer are moved. It suffices that a large number of collisions between ions and molecules occur during one time.
  • the distance between the light shielding member 10 and the skimmer 8 needs to be sufficiently longer than at least the mean free path of molecules at the pressure (degree of vacuum) inside the differential exhaust part 20.
  • the mean free path is about 0.01 mm for nitrogen molecules.
  • ions can enter from a portion of the light blocking member having a small curvature. It is preferable to arrange.
  • the light blocking member 10 is set inside the differential exhaust section 8 by the nozzle and the scan.
  • the case where the nozzle and the skimmer are arranged on the common central axis of the nozzle or the skimmer has been described as shown in FIG. Even if the light shielding member 10 is arranged in front of the nozzle 7 in the vicinity thereof, the same operation and effect as described above can be obtained. That is, the light blocking member 10 may be disposed under atmospheric pressure.
  • At least the surface of the light shielding member is made of a conductive material.
  • the light blocking member is provided with a cooling mechanism.
  • FIG. 2 As shown in FIG. 2, FIG. 4, FIG. 5, FIG. 6, FIG. 7, FIG. 9, FIG. 10, FIG. 11, FIG.
  • the ions passing through the skimmer 8 are converged by electrostatic lenses 9 i, 9 j, and 9 k inside the high vacuum section 21, and the quadrupole mass analysis section 1 controlled by the mass spectrometer controller 13
  • the light is deflected by the ion deflector and detected by the ion detector 12 (Fig. 1).
  • the part where the electrostatic lenses 9i, 9j and 9k are arranged, and the part where the quadrupole mass spectrometer is arranged are usually one part of a high vacuum pump 15a, 15b such as a turbo molecular pump.
  • 0- 4 T 0 is evacuated to 1 0 "6 to rr stand from rr ( Figure 1).
  • the electrostatic lenses 9 i and 9 k can be made to have the same potential among the electrostatic lenses 9 i, 9 j, and 9 k. Only two sets of potentials are required.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

L'invention décrit un élément (10) servant à intercepter la lumière qui devient la principale cause de bruit d'un détecteur (12) dans la partie d'évacuation différentielle (20) d'un spectromètre de masse faisant intervenir une source d'ions provenant de plasma. Un système produisant du plasma, ionisant un échantillon liquide, comporte une torche à plasma (1), une partie (2) d'introduction des échantillons, une partie (3) de régulation du débit gazeux, une source d'énergie haute fréquence (4) et un mécanisme (5) d'adaptation d'impédance ainsi que, dans la partie (2), une solution à analyser transformée en gouttelettes à l'aide d'une technique de pulvérisation destinée à pulvériser l'échantillon liquide. Les gouttelettes sont envoyées à la torche (1) sur un gaz porteur régulé par la partie de régulation (3). Du fait que les ions produits sont acheminés vers une partie à vide poussé (21) en même temps qu'un flux de molécules de gaz à l'état d'écoulement visqueux ou intermédiaire, la lumière et les ions produits par le plasma peuvent être séparés l'un de l'autre. Par conséquent, il est possible de réaliser un petit spectromètre de masse faisant intervenir une source d'ions provenant de plasma et d'en régler facilement le dispositif d'optique.
PCT/JP1995/001025 1995-05-29 1995-05-29 Spectrometre de masse faisant intervenir une source d'ions provenant de plasma WO1996038856A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP1995/001025 WO1996038856A1 (fr) 1995-05-29 1995-05-29 Spectrometre de masse faisant intervenir une source d'ions provenant de plasma

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP1995/001025 WO1996038856A1 (fr) 1995-05-29 1995-05-29 Spectrometre de masse faisant intervenir une source d'ions provenant de plasma

Publications (1)

Publication Number Publication Date
WO1996038856A1 true WO1996038856A1 (fr) 1996-12-05

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Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP1995/001025 WO1996038856A1 (fr) 1995-05-29 1995-05-29 Spectrometre de masse faisant intervenir une source d'ions provenant de plasma

Country Status (1)

Country Link
WO (1) WO1996038856A1 (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1733415A1 (fr) * 2004-03-25 2006-12-20 MDS Inc. doing business through its MDS Sciex Division Procede et appareil de cytometrie d'ecoulement en relation avec une analyse elementaire
US8622735B2 (en) * 2005-06-17 2014-01-07 Perkinelmer Health Sciences, Inc. Boost devices and methods of using them
US9259798B2 (en) 2012-07-13 2016-02-16 Perkinelmer Health Sciences, Inc. Torches and methods of using them
US9360430B2 (en) 2002-12-12 2016-06-07 Perkinelmer Health Services, Inc. Induction device
US9847217B2 (en) 2005-06-17 2017-12-19 Perkinelmer Health Sciences, Inc. Devices and systems including a boost device

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107650A (ja) * 1984-10-29 1986-05-26 Shimadzu Corp 四重極型質量分析装置
JPS61133547A (ja) * 1984-11-30 1986-06-20 Shimadzu Corp 誘導結合プラズマ質量分析計のインタ−フエ−ス
JPS6443962A (en) * 1987-08-11 1989-02-16 Hitachi Ltd Mass spectrometer
JPH0215554A (ja) * 1988-07-01 1990-01-19 Jeol Ltd 高周波誘導結合プラズマ質量分析装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61107650A (ja) * 1984-10-29 1986-05-26 Shimadzu Corp 四重極型質量分析装置
JPS61133547A (ja) * 1984-11-30 1986-06-20 Shimadzu Corp 誘導結合プラズマ質量分析計のインタ−フエ−ス
JPS6443962A (en) * 1987-08-11 1989-02-16 Hitachi Ltd Mass spectrometer
JPH0215554A (ja) * 1988-07-01 1990-01-19 Jeol Ltd 高周波誘導結合プラズマ質量分析装置

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9360430B2 (en) 2002-12-12 2016-06-07 Perkinelmer Health Services, Inc. Induction device
EP1733415A1 (fr) * 2004-03-25 2006-12-20 MDS Inc. doing business through its MDS Sciex Division Procede et appareil de cytometrie d'ecoulement en relation avec une analyse elementaire
JP2007530924A (ja) * 2004-03-25 2007-11-01 エムディーエス インコーポレイテッド ドゥーイング ビジネス スルー イッツ エムディーエス サイエックス ディヴィジョン 元素分析とリンクしたフローサイトメトリーの方法および装置
EP1733415A4 (fr) * 2004-03-25 2009-07-29 Mds Inc Dbt Mds Sciex Division Procede et appareil de cytometrie d'ecoulement en relation avec une analyse elementaire
US8622735B2 (en) * 2005-06-17 2014-01-07 Perkinelmer Health Sciences, Inc. Boost devices and methods of using them
US9847217B2 (en) 2005-06-17 2017-12-19 Perkinelmer Health Sciences, Inc. Devices and systems including a boost device
US9259798B2 (en) 2012-07-13 2016-02-16 Perkinelmer Health Sciences, Inc. Torches and methods of using them
US9686849B2 (en) 2012-07-13 2017-06-20 Perkinelmer Health Sciences, Inc. Torches and methods of using them

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