WO1996021238B1 - Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee - Google Patents
Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adapteeInfo
- Publication number
- WO1996021238B1 WO1996021238B1 PCT/US1996/000272 US9600272W WO9621238B1 WO 1996021238 B1 WO1996021238 B1 WO 1996021238B1 US 9600272 W US9600272 W US 9600272W WO 9621238 B1 WO9621238 B1 WO 9621238B1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- single crystal
- gas impermeable
- electron
- electrons
- Prior art date
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract 6
- 239000012528 membrane Substances 0.000 claims abstract 25
- 239000012530 fluid Substances 0.000 claims abstract 6
- 239000000463 material Substances 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- 230000037361 pathway Effects 0.000 claims 2
- 239000007787 solid Substances 0.000 claims 2
- 210000004940 Nucleus Anatomy 0.000 claims 1
- 125000004429 atoms Chemical group 0.000 claims 1
- 238000005516 engineering process Methods 0.000 claims 1
- 230000000737 periodic Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 230000000414 obstructive Effects 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
Abstract
Un dispositif à faisceau d'électrons (15) doté d'un tube à vide comprend une membrane (20) en monocristal fine, perméable aux électrons, mais imperméable aux gaz pour la transmission des électrons. Etant donné sa solidité mécanique, la membrane en monocristal peut présenter une faible épaisseur en raison de sa grande solidité et est donc extrêmement transparente aux électrons libres. La structure cristalline ordonnée de cette membrane offre une résistance minimale aux faisceaux d'électrons, mais par contre assure une imperméabilité élevée à la pénétration des molécules de gaz et de liquide. Une anode en silicium dopée (19) ayant des caractéristiques de dilatation thermique correspondant à celles de la membrane peut constituer un support pour celle-ci. Une anode cristalline peut être formée d'une pièce avec la membrane. Dans une forme d'exécution à deux membranes, le fluide de refroidissement est confiné de sorte qu'il passe à proximité des deux membranes.
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE69635189T DE69635189T2 (de) | 1995-01-05 | 1996-01-03 | Elektronenstrahlgerät mit einem einkristallfenster und angepasster anode |
AU47495/96A AU685350B2 (en) | 1995-01-05 | 1996-01-03 | Electron beam device with single crystal window and matching anode |
EP96903392A EP0871972B1 (fr) | 1995-01-05 | 1996-01-03 | Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee |
JP52126596A JP3899524B2 (ja) | 1995-01-05 | 1996-01-03 | 単結晶の窓および整合アノードを備える電子ビーム装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US08/369,127 US5612588A (en) | 1993-05-26 | 1995-01-05 | Electron beam device with single crystal window and expansion-matched anode |
US369,127 | 1995-01-05 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO1996021238A1 WO1996021238A1 (fr) | 1996-07-11 |
WO1996021238B1 true WO1996021238B1 (fr) | 1996-08-29 |
Family
ID=23454190
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US1996/000272 WO1996021238A1 (fr) | 1995-01-05 | 1996-01-03 | Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee |
Country Status (9)
Country | Link |
---|---|
US (1) | US5612588A (fr) |
EP (1) | EP0871972B1 (fr) |
JP (1) | JP3899524B2 (fr) |
KR (1) | KR100385583B1 (fr) |
AU (1) | AU685350B2 (fr) |
CA (1) | CA2209593A1 (fr) |
DE (1) | DE69635189T2 (fr) |
TW (1) | TW282551B (fr) |
WO (1) | WO1996021238A1 (fr) |
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1995
- 1995-01-05 US US08/369,127 patent/US5612588A/en not_active Expired - Lifetime
-
1996
- 1996-01-03 AU AU47495/96A patent/AU685350B2/en not_active Ceased
- 1996-01-03 KR KR1019970704608A patent/KR100385583B1/ko not_active IP Right Cessation
- 1996-01-03 JP JP52126596A patent/JP3899524B2/ja not_active Expired - Lifetime
- 1996-01-03 WO PCT/US1996/000272 patent/WO1996021238A1/fr active IP Right Grant
- 1996-01-03 EP EP96903392A patent/EP0871972B1/fr not_active Expired - Lifetime
- 1996-01-03 DE DE69635189T patent/DE69635189T2/de not_active Expired - Lifetime
- 1996-01-03 CA CA002209593A patent/CA2209593A1/fr not_active Abandoned
- 1996-01-04 TW TW085100033A patent/TW282551B/zh active
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