WO1996021238B1 - Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee - Google Patents

Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee

Info

Publication number
WO1996021238B1
WO1996021238B1 PCT/US1996/000272 US9600272W WO9621238B1 WO 1996021238 B1 WO1996021238 B1 WO 1996021238B1 US 9600272 W US9600272 W US 9600272W WO 9621238 B1 WO9621238 B1 WO 9621238B1
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
single crystal
gas impermeable
electron
electrons
Prior art date
Application number
PCT/US1996/000272
Other languages
English (en)
Other versions
WO1996021238A1 (fr
Filing date
Publication date
Priority claimed from US08/369,127 external-priority patent/US5612588A/en
Application filed filed Critical
Priority to DE69635189T priority Critical patent/DE69635189T2/de
Priority to AU47495/96A priority patent/AU685350B2/en
Priority to EP96903392A priority patent/EP0871972B1/fr
Priority to JP52126596A priority patent/JP3899524B2/ja
Publication of WO1996021238A1 publication Critical patent/WO1996021238A1/fr
Publication of WO1996021238B1 publication Critical patent/WO1996021238B1/fr

Links

Abstract

Un dispositif à faisceau d'électrons (15) doté d'un tube à vide comprend une membrane (20) en monocristal fine, perméable aux électrons, mais imperméable aux gaz pour la transmission des électrons. Etant donné sa solidité mécanique, la membrane en monocristal peut présenter une faible épaisseur en raison de sa grande solidité et est donc extrêmement transparente aux électrons libres. La structure cristalline ordonnée de cette membrane offre une résistance minimale aux faisceaux d'électrons, mais par contre assure une imperméabilité élevée à la pénétration des molécules de gaz et de liquide. Une anode en silicium dopée (19) ayant des caractéristiques de dilatation thermique correspondant à celles de la membrane peut constituer un support pour celle-ci. Une anode cristalline peut être formée d'une pièce avec la membrane. Dans une forme d'exécution à deux membranes, le fluide de refroidissement est confiné de sorte qu'il passe à proximité des deux membranes.
PCT/US1996/000272 1995-01-05 1996-01-03 Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee WO1996021238A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
DE69635189T DE69635189T2 (de) 1995-01-05 1996-01-03 Elektronenstrahlgerät mit einem einkristallfenster und angepasster anode
AU47495/96A AU685350B2 (en) 1995-01-05 1996-01-03 Electron beam device with single crystal window and matching anode
EP96903392A EP0871972B1 (fr) 1995-01-05 1996-01-03 Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee
JP52126596A JP3899524B2 (ja) 1995-01-05 1996-01-03 単結晶の窓および整合アノードを備える電子ビーム装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US08/369,127 US5612588A (en) 1993-05-26 1995-01-05 Electron beam device with single crystal window and expansion-matched anode
US369,127 1995-01-05

Publications (2)

Publication Number Publication Date
WO1996021238A1 WO1996021238A1 (fr) 1996-07-11
WO1996021238B1 true WO1996021238B1 (fr) 1996-08-29

Family

ID=23454190

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1996/000272 WO1996021238A1 (fr) 1995-01-05 1996-01-03 Dispositif a faisceau d'electrons dote d'une fenetre en monocristal et d'une anode adaptee

Country Status (9)

Country Link
US (1) US5612588A (fr)
EP (1) EP0871972B1 (fr)
JP (1) JP3899524B2 (fr)
KR (1) KR100385583B1 (fr)
AU (1) AU685350B2 (fr)
CA (1) CA2209593A1 (fr)
DE (1) DE69635189T2 (fr)
TW (1) TW282551B (fr)
WO (1) WO1996021238A1 (fr)

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