WO1996016200A1 - Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication - Google Patents
Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication Download PDFInfo
- Publication number
- WO1996016200A1 WO1996016200A1 PCT/EP1995/004534 EP9504534W WO9616200A1 WO 1996016200 A1 WO1996016200 A1 WO 1996016200A1 EP 9504534 W EP9504534 W EP 9504534W WO 9616200 A1 WO9616200 A1 WO 9616200A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer portion
- adhesive layer
- sliding
- shut
- sliding layer
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 10
- 230000001105 regulatory effect Effects 0.000 title claims abstract 3
- 238000012856 packing Methods 0.000 title abstract 2
- 239000012790 adhesive layer Substances 0.000 claims abstract description 44
- 239000012791 sliding layer Substances 0.000 claims abstract description 38
- 239000010410 layer Substances 0.000 claims abstract description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims abstract description 6
- 229910010293 ceramic material Inorganic materials 0.000 claims abstract description 3
- 239000007769 metal material Substances 0.000 claims abstract description 3
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 claims description 24
- 238000000576 coating method Methods 0.000 claims description 19
- 239000011248 coating agent Substances 0.000 claims description 18
- 238000007789 sealing Methods 0.000 claims description 16
- 239000007789 gas Substances 0.000 claims description 15
- 239000000463 material Substances 0.000 claims description 11
- CZDYPVPMEAXLPK-UHFFFAOYSA-N tetramethylsilane Chemical compound C[Si](C)(C)C CZDYPVPMEAXLPK-UHFFFAOYSA-N 0.000 claims description 11
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 9
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 6
- 229910052786 argon Inorganic materials 0.000 claims description 5
- 230000003068 static effect Effects 0.000 claims description 5
- 239000004215 Carbon black (E152) Substances 0.000 claims description 3
- 229930195733 hydrocarbon Natural products 0.000 claims description 3
- 150000002430 hydrocarbons Chemical class 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 238000006116 polymerization reaction Methods 0.000 claims description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 3
- 229910000077 silane Inorganic materials 0.000 claims 3
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 230000001070 adhesive effect Effects 0.000 description 8
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 8
- 239000000919 ceramic Substances 0.000 description 7
- 230000008021 deposition Effects 0.000 description 5
- 230000007704 transition Effects 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000010849 ion bombardment Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 239000004519 grease Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- VCZQFJFZMMALHB-UHFFFAOYSA-N tetraethylsilane Chemical compound CC[Si](CC)(CC)CC VCZQFJFZMMALHB-UHFFFAOYSA-N 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/009—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/5053—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials non-oxide ceramics
- C04B41/5057—Carbides
- C04B41/5059—Silicon carbide
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/87—Ceramics
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/89—Coating or impregnation for obtaining at least two superposed coatings having different compositions
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
- C23C16/029—Graded interfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K25/00—Details relating to contact between valve members and seats
- F16K25/005—Particular materials for seats or closure elements
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00241—Physical properties of the materials not provided for elsewhere in C04B2111/00
- C04B2111/00344—Materials with friction-reduced moving parts, e.g. ceramics lubricated by impregnation with carbon
- C04B2111/00353—Sliding parts
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/2495—Thickness [relative or absolute]
- Y10T428/24959—Thickness [relative or absolute] of adhesive layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
- Y10T428/24983—Hardness
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2904—Staple length fiber
- Y10T428/2907—Staple length fiber with coating or impregnation
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2918—Rod, strand, filament or fiber including free carbon or carbide or therewith [not as steel]
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2933—Coated or with bond, impregnation or core
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
- Y10T428/2913—Rod, strand, filament or fiber
- Y10T428/2933—Coated or with bond, impregnation or core
- Y10T428/294—Coated or with bond, impregnation or core including metal or compound thereof [excluding glass, ceramic and asbestos]
- Y10T428/2942—Plural coatings
Definitions
- the invention relates to a sealing element, in particular for shut-off and control elements. It consists of a disk-shaped, piston-shaped or spherical shut-off body.
- the shut-off body can consist of a metallic or non-metallic material. This material can also be, for example, a ceramic material, which also includes aluminum oxide and the various silicon carbides Sie, Si 2 C and silicon nitride Si 3 N 4 .
- a hard material layer containing carbon and silicon is applied to a working surface (sealing surface) of the shut-off body by means of plasma CVD or plasma polymerization in a coating chamber.
- the hard material layer comprises an adhesive layer portion applied to the working surface of the shut-off body and a subsequent cover layer (sliding layer) portion.
- the adhesive layer component has a first silicon component which favors adhesion to the working surface of the shut-off body, and the subsequent carbon-containing cover layer component has a lower second silicon component than the adhesive layer component in order to achieve lower sliding and static friction coefficients or is silicon-free.
- the plasma is deposited by ion bombardment, for example by means of a glow discharge or by an additional ion gun.
- a wear-resistant carbon-containing layer can be brought out of a hydrocarbon-containing atmosphere, which has sufficiently low sliding and static friction coefficients.
- a sealing element of the above type and the associated plasma CVD coating method is known from DE-OS 38 32 692.
- shut-off bodies for coating their working surfaces are placed in the coating chamber on a sample holder which is negatively polarized relative to the plasma.
- the coating system is first operated as a cathode sputtering system.
- the same system is then operated under certain first process parameters as a high-frequency plasma CVD system, the argon gas in the coating chamber, e.g. is replaced by tetramethylsilane.
- the cover or sliding layer portion is then deposited from a gas mixture of tetramethyl silane and hexane.
- the sealing elements obtained according to this can advantageously be coated ceramic disks for water fittings, e.g. one-hand mixers), even in the presence, thanks to the applied hard material layer sufficiently low sliding and static friction coefficients of water when sliding on top of one another, so that it is no longer necessary to grease the sealing surfaces, as was previously required with uncoated ceramic disks.
- a disadvantage of the known sealing elements is that their resistance to hot water is often unsatisfactory. This applies in particular when hot water resistance of more than 1000 operating hours is to be achieved without the hard material layer being detached from the shut-off body.
- the object of the invention is to provide a sealing element of the type mentioned at the outset which, with sufficiently low static and sliding friction coefficients on the sliding layer surface, has a high resistance to hot water.
- Preferred sealing elements in particular in the form of disks, should have a resistance to hot water at 95 ° C. over an operating period of at least 1000 h without, above all, the adhesion of the hard material layer to the shut-off body being significantly affected.
- Adhesion properties of the adhesive layer portion can be further increased when the sealing member with an optimized adhesive overlay ratio is additionally annealed /, with temperatures at about 500 ⁇ C for 30 to 60 minutes and temperatures at about 900 ° C for 0.5 to 1 min particularly good results.
- the sliding layer portion has proven to be particularly advantageous to choose the sliding layer portion to be largely thin.
- the inherent stresses of the relatively thin portion of the sliding layer can be well absorbed by a sufficiently thick portion of the adhesive layer without the adhesive strength of the shut-off body being significantly stressed even under long-term exposure to hot water.
- good results can be achieved if the thickness ratio in ⁇ m of the adhesive layer portion and the sliding layer portion is 1: 0.9 to 1: 0.4, preferably 1: 0.6.
- the optimal adhesive / sliding layer ratio can also be influenced by the choice of the gases from which the adhesive and sliding layer components are separated.
- a gas mixture of tetramethylsilane and hexane to separate the adhesive layer portion tetramethylsilane and to separate the sliding layer portion, the mixing ratio tetramethylsilane to hexane in the range from 1: 1.5 to 1: 5, preferably 1: 2 is. It is clear that tetramethylsilane and hexane can be replaced by comparable gases.
- the adhesive layer portion is able to absorb the internal stresses of the relatively hard and brittle sliding layer portion, this has increased plastic or ductile properties compared to the sliding layer portion.
- These stretchable, deformable properties are used in the Deposition of the adhesive layer component is achieved in that the ratio of silicon / carbon / hydrogen is selected to be significantly different from the corresponding ratio in the sliding layer component.
- the silicon portion in the adhesive layer portion is selected to be significantly higher than in the sliding layer portion, and accordingly the carbon portion in the adhesive layer portion is selected to be significantly lower than in the sliding layer portion, in order to be able to ensure sufficient ductility with a certain layer thickness of the adhesive layer portion.
- the process control during the deposition of the adhesive layer portion and the subsequent sliding layer portion advantageously results in a smooth transition from the adhesive layer portion to the sliding layer portion, the different
- Silicon / carbon / hydrogen portions in the adhesive and sliding layer portions are gradually or continuously adapted to one another.
- a coating chamber is used which essentially corresponds to the coating chamber as already shown in DE-OS 38 32 692.
- the known coating chamber consists of an electrically conductive chamber floor, to which a likewise electrically conductive, all-round sealed chamber housing is connected.
- the chamber bottom has an insulated connection for a feedthrough that provides a connection between the cathode serving as the cathode support and an electrical supply in the form a high-frequency device.
- the shut-off bodies are placed on the cathode support with the surface to be coated facing upwards.
- the chamber floor also has a second connection for a suction pipe, which is connected to a vacuum pump station.
- the chamber bottom has connections for the supply of process gases into the coating chamber.
- the coating chamber first works as a cathode sputtering system in which the cathode support and the ceramic disks lying on it are physically etched by ion bombardment for about 15 to 25 minutes, preferably 20 minutes.
- TMS tetramethylsilane
- the adhesive layer portion With a reduced cathode voltage of approximately 500 V. the adhesive layer portion is applied for about 25 to 30 minutes to a thickness of about 1 ⁇ m. The sliding layer portion is then deposited on the adhesive layer portion, using a gas mixture of tetraethylsilane to hexane in a ratio of 1: 1.5 to 1: 5, preferably 1: 2.
- the TMS supply is gradually reduced during a transition period and the supply of hexane is increased in stages until the selected TMS / hexane mixture is reached.
- the coating time for the sliding layer portion is approximately 10 to 15 minutes in order to obtain a layer thickness of approximately 0.4 to 0.9 ⁇ m, preferably 0.6 ⁇ m.
- the increased internal stresses of the sliding layer portion are already well absorbed by the adhesive layer portion without the adhesion of the adhesive layer portion to the working surface of the ceramic body suffering.
- the good adhesive conditions of the adhesive layer portion can be further improved by subjecting the coated ceramic bodies to post-heat treatment. Particularly good results are er ⁇ aims, if the coated ceramic body are 30 to 60 minutes, annealed at about 500 C C or 0.5 to 1 minute at about 900 ° C.
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Structural Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Metallurgy (AREA)
- General Engineering & Computer Science (AREA)
- Chemical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Sealing Devices (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU39832/95A AU3983295A (en) | 1994-11-21 | 1995-11-17 | Packing element, in particular for shutting-off and regulating means, and process for producing the same |
JP51655696A JP3820508B2 (ja) | 1994-11-21 | 1995-11-17 | 閉鎖器具と調節器具用のパッキングエレメントとその製造の為の方法 |
US08/836,824 US5888638A (en) | 1994-11-21 | 1995-11-17 | Sealing element, particularly for shut-off and regulating valves, and process for its production |
EP95938447A EP0787220B1 (fr) | 1994-11-21 | 1995-11-17 | Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication |
DE59507797T DE59507797D1 (de) | 1994-11-21 | 1995-11-17 | Dichtungselement, insbesondere für absperr- und regelorgane und verfahren zu seiner herstellung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE4441134A DE4441134A1 (de) | 1994-11-21 | 1994-11-21 | Dichtungselement, insbesondere für Absperr- und Regelorgane und Verfahren zu seiner Herstellung |
DEP4441134.0 | 1994-11-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO1996016200A1 true WO1996016200A1 (fr) | 1996-05-30 |
Family
ID=6533600
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP1995/004534 WO1996016200A1 (fr) | 1994-11-21 | 1995-11-17 | Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication |
Country Status (7)
Country | Link |
---|---|
US (1) | US5888638A (fr) |
EP (1) | EP0787220B1 (fr) |
JP (1) | JP3820508B2 (fr) |
AU (1) | AU3983295A (fr) |
DE (2) | DE4441134A1 (fr) |
ES (1) | ES2145307T3 (fr) |
WO (1) | WO1996016200A1 (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0793735B1 (fr) * | 1994-11-21 | 1999-06-30 | Friedrich Grohe Ag | Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10019715B4 (de) * | 2000-04-20 | 2006-01-05 | Elringklinger Ag | Verfahren zum Aufbringen einer Überhöhung auf eine Metallage einer Zylinderkopfdichtung und Zylinderkopfdichtung |
GB0201764D0 (en) * | 2002-01-25 | 2002-03-13 | Dupont Teijin Films Us Ltd | Multi-layer polymeric film III |
US8555921B2 (en) | 2002-12-18 | 2013-10-15 | Vapor Technologies Inc. | Faucet component with coating |
US7866342B2 (en) | 2002-12-18 | 2011-01-11 | Vapor Technologies, Inc. | Valve component for faucet |
US6904935B2 (en) * | 2002-12-18 | 2005-06-14 | Masco Corporation Of Indiana | Valve component with multiple surface layers |
US8220489B2 (en) | 2002-12-18 | 2012-07-17 | Vapor Technologies Inc. | Faucet with wear-resistant valve component |
US7866343B2 (en) * | 2002-12-18 | 2011-01-11 | Masco Corporation Of Indiana | Faucet |
WO2006026564A2 (fr) * | 2004-08-27 | 2006-03-09 | Vetco Gray Inc. | Revetement a frottement reduit pour surfaces porteuses a contact dynamique |
US8146889B2 (en) | 2004-08-27 | 2012-04-03 | Vetco Gray Inc. | Low friction coatings for dynamically engaging load bearing surfaces |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3832692A1 (de) * | 1988-09-27 | 1990-03-29 | Leybold Ag | Dichtungselement mit einem absperrkoerper aus einem metallischen oder nichtmetallischen werkstoff und verfahren zum auftragen von hartstoffschichten auf den absperrkoerper |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4856785A (en) * | 1983-03-01 | 1989-08-15 | Williams Electronics, Inc. | Optical dual function joystick |
-
1994
- 1994-11-21 DE DE4441134A patent/DE4441134A1/de not_active Withdrawn
-
1995
- 1995-11-17 ES ES95938447T patent/ES2145307T3/es not_active Expired - Lifetime
- 1995-11-17 JP JP51655696A patent/JP3820508B2/ja not_active Expired - Fee Related
- 1995-11-17 EP EP95938447A patent/EP0787220B1/fr not_active Expired - Lifetime
- 1995-11-17 AU AU39832/95A patent/AU3983295A/en not_active Abandoned
- 1995-11-17 DE DE59507797T patent/DE59507797D1/de not_active Expired - Lifetime
- 1995-11-17 WO PCT/EP1995/004534 patent/WO1996016200A1/fr active IP Right Grant
- 1995-11-17 US US08/836,824 patent/US5888638A/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3832692A1 (de) * | 1988-09-27 | 1990-03-29 | Leybold Ag | Dichtungselement mit einem absperrkoerper aus einem metallischen oder nichtmetallischen werkstoff und verfahren zum auftragen von hartstoffschichten auf den absperrkoerper |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0793735B1 (fr) * | 1994-11-21 | 1999-06-30 | Friedrich Grohe Ag | Element d'etancheite, notamment pour organes d'obturation et de regulation, et son procede de fabrication |
Also Published As
Publication number | Publication date |
---|---|
ES2145307T3 (es) | 2000-07-01 |
JP3820508B2 (ja) | 2006-09-13 |
DE59507797D1 (de) | 2000-03-16 |
DE4441134A1 (de) | 1996-05-23 |
EP0787220B1 (fr) | 2000-02-09 |
US5888638A (en) | 1999-03-30 |
EP0787220A1 (fr) | 1997-08-06 |
JPH10509233A (ja) | 1998-09-08 |
AU3983295A (en) | 1996-06-17 |
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