WO1996001495A1 - Procede, support et pieces moulees servant a encapsuler une puce - Google Patents

Procede, support et pieces moulees servant a encapsuler une puce Download PDF

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Publication number
WO1996001495A1
WO1996001495A1 PCT/NL1995/000232 NL9500232W WO9601495A1 WO 1996001495 A1 WO1996001495 A1 WO 1996001495A1 NL 9500232 W NL9500232 W NL 9500232W WO 9601495 A1 WO9601495 A1 WO 9601495A1
Authority
WO
WIPO (PCT)
Prior art keywords
carrier
encapsulating
chip
mould
channel
Prior art date
Application number
PCT/NL1995/000232
Other languages
English (en)
Inventor
Henricus Bernardus Antonius Giesen
Original Assignee
Fico B.V.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fico B.V. filed Critical Fico B.V.
Publication of WO1996001495A1 publication Critical patent/WO1996001495A1/fr

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings
    • H01L21/565Moulds
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/28Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/31Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
    • H01L23/3107Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
    • H01L23/3121Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/04Tubular or hollow articles
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/0002Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation
    • H01L2924/1815Shape

Definitions

  • the invention relates to a method for encapsulating a chip placed on a flat carrier, on one side of which is arranged the chip for encapsulating and on the other side of which are arranged the connection points distributed in a grid structure over the carrier.
  • the invention also relates to a carrier of the stated type and mould parts for encapsulating a chip according to the said method.
  • the carrier referred to in the preamble (also known as "ball grid array board") is larger than the moulding for producing, it is probable that with application of the conventional technique for encapsulating chips a quantity of encapsulating material from the runner remains adhered to the edge of the carrier. This is undesirable because a local thickening of the edge of the carrier can be disadvantageous for the further use of the carrier with encapsulated chip.
  • a mould consisting of at least three mould parts.
  • Such a mould has the important drawback however that automated operation of such a mould is difficult.
  • Another drawback is a comparatively complex and therefore expensive construction of the mould.
  • the present invention therefore has for its object to provide a relatively simple method for encapsulating a chip on a carrier of the stated type.
  • the invention has the further object to provide mould parts and a carrier suitable for applying this method.
  • the invention provides for this purpose a method for encapsulating a chip as according to the preamble by: placing the carrier between two mould halves movable between an opened and a closed position and bounding a mould cavity in the closed position, and transporting encapsulating material from a supply device to a mould cavity through a channel arranged in the carrier.
  • the invention further provides a carrier characterized by a channel arranged in the carrier, and mould parts for use with this method.
  • a feed runner is arranged in the carrier.
  • This feed runner therefore no longer has to be accommodated in the mould parts, whereby the whole mould can be embodied simply.
  • a mould consisting of two mould halves is now a possibility, whereby automation of the moulding is possible.
  • the mould parts can also be less complex in manufacture and thus less costly. Wear of the mould parts and danger of leakage is also limited herewith.
  • a preferred embodiment of the carrier is characterized in that the channel in the carrier is formed by a groove arranged on one side in the carrier.
  • Another preferred embodiment of the carrier is characterized in that the channel arranged in the carrier is an elongate opening in the carrier.
  • the groove in particular limits wear to the mould and simplifies very considerable the construction of the mould.
  • the elongate opening has the advantage that less fluid encapsulating material can also be carried to the mould cavity without the capacity of the feed runner forming a limitation. Due to the elongate opening it is also possible to supply the encapsulating material from a chosen side.
  • Fig. 1 shows a partly cut away perspective view of a flat carrier on one side of which is arranged the encap ⁇ sulated chip and on the other side of which are arranged the connection points distributed in grid structure over the carrier, wherein a part of the encapsulating material is received in a channel arranged in the carrier
  • Fig. 2 shows a partly cut away perspective view of the carrier of fig. 1 in cut-out situation
  • Fig. 3 shows a cross section through a carrier placed between two mould halves, wherein the channel is in a groove located in the carrier
  • Fig. 4 is a cross section through a carrier wherein the channel is an elongate opening.
  • Fig. 1 shows a carrier 1 on which are arranged on one side a chip (not shown here) and on the other side connection points 2 in grid pattern.
  • An encapsulating material 3 for instance an epoxy resin, is arranged round the chip 1.
  • a material portion 4 formed by a runner in the mould half can also be seen on the edge of the carrier 1.
  • a feed runner 7 for encapsulating material is arranged in the carrier 1.
  • the feed runner 7 is filled to the same height as the encapsulating material 8 filling the upper part of the carrier part 5.
  • Fig. 3 shows two mould parts 9, 10 wherein a plunger 11 arranged in the lower mould part 10 by means of heating and applying pressure to a pallet 12 urges encapsulating material through a runner 13 in the upper mould part 9 and then through the runner 7 arranged in the carrier 1 to a mould cavity 14.
  • Fig. 4 shows a carrier 1 wherein a groove-like opening 15, here filled with encapsulating material, forms the channel arranged in the carrier 1.
  • the groove-like opening 15 can be supplied on a chosen side.

Abstract

Procédé d'encapsulation d'une puce placée sur un support plat (1), dont un des côtés porte la puce à encapsuler et dont l'autre côté comporte les points de raccordement répartis selon une configuration de grille au-dessus dudit support (1). Ce procédé consiste à placer le support (1) entre deux moitiés de moule (9, 10) mobiles entre une position ouverte et une position fermée et à fermer la cavité du moule, puis à transporter le matériau d'encapsulation (3) depuis un dispositif d'alimentation vers une cavité de moule à travers un canal (7, 15) situé dans ledit support (1).
PCT/NL1995/000232 1994-07-01 1995-07-03 Procede, support et pieces moulees servant a encapsuler une puce WO1996001495A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NL9401104A NL9401104A (nl) 1994-07-01 1994-07-01 Werkwijze, drager en matrijsdelen voor het omhullen van een chip.
NL9401104 1994-07-01

Publications (1)

Publication Number Publication Date
WO1996001495A1 true WO1996001495A1 (fr) 1996-01-18

Family

ID=19864397

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/NL1995/000232 WO1996001495A1 (fr) 1994-07-01 1995-07-03 Procede, support et pieces moulees servant a encapsuler une puce

Country Status (2)

Country Link
NL (1) NL9401104A (fr)
WO (1) WO1996001495A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1271640A3 (fr) * 1996-07-12 2003-07-16 Fujitsu Limited Moule pour l'encapsulation d'un dispositif semiconducteur
WO2004091267A1 (fr) * 2003-04-11 2004-10-21 Flex-P Industries Sdn. Bhd Procede pour emballer des cartes memoire de petite taille
NL1025300C2 (nl) * 2004-01-22 2005-07-25 Fico Bv Drager voor elektronische componenten en werkwijzen voor het omhullen en separeren van een elektronische component.

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611067A (ja) * 1984-06-13 1986-01-07 Stanley Electric Co Ltd プリント基板に装着されたledチツプのモ−ルド方法
JPS6441254A (en) * 1987-08-07 1989-02-13 Nec Corp Resin-sealed type semiconductor device
GB2218570A (en) * 1988-05-09 1989-11-15 Nat Semiconductor Corp Plastics moulded pin-grid-array power package
JPH04306865A (ja) * 1991-04-03 1992-10-29 Seiko Epson Corp 半導体装置及びその製造方法
JPH04373138A (ja) * 1991-06-21 1992-12-25 Citizen Watch Co Ltd 樹脂封止半導体装置の製造方法

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS611067A (ja) * 1984-06-13 1986-01-07 Stanley Electric Co Ltd プリント基板に装着されたledチツプのモ−ルド方法
JPS6441254A (en) * 1987-08-07 1989-02-13 Nec Corp Resin-sealed type semiconductor device
GB2218570A (en) * 1988-05-09 1989-11-15 Nat Semiconductor Corp Plastics moulded pin-grid-array power package
JPH04306865A (ja) * 1991-04-03 1992-10-29 Seiko Epson Corp 半導体装置及びその製造方法
JPH04373138A (ja) * 1991-06-21 1992-12-25 Citizen Watch Co Ltd 樹脂封止半導体装置の製造方法

Non-Patent Citations (4)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 010, no. 137 (E - 405) 21 May 1986 (1986-05-21) *
PATENT ABSTRACTS OF JAPAN vol. 013, no. 235 (E - 766) 30 May 1989 (1989-05-30) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 137 (E - 1335) 22 March 1993 (1993-03-22) *
PATENT ABSTRACTS OF JAPAN vol. 017, no. 253 (E - 1367) 19 May 1993 (1993-05-19) *

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1271640A3 (fr) * 1996-07-12 2003-07-16 Fujitsu Limited Moule pour l'encapsulation d'un dispositif semiconducteur
WO2004091267A1 (fr) * 2003-04-11 2004-10-21 Flex-P Industries Sdn. Bhd Procede pour emballer des cartes memoire de petite taille
NL1025300C2 (nl) * 2004-01-22 2005-07-25 Fico Bv Drager voor elektronische componenten en werkwijzen voor het omhullen en separeren van een elektronische component.
WO2005071732A1 (fr) * 2004-01-22 2005-08-04 Fico B.V. Support pour composants electroniques, et procedes d'encapsulation et de retrait d'un composant electronique

Also Published As

Publication number Publication date
NL9401104A (nl) 1996-02-01

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