WO1996001373A1 - Pompe moleculaire a canaux d'aspiration multiples - Google Patents

Pompe moleculaire a canaux d'aspiration multiples Download PDF

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Publication number
WO1996001373A1
WO1996001373A1 PCT/CN1995/000056 CN9500056W WO9601373A1 WO 1996001373 A1 WO1996001373 A1 WO 1996001373A1 CN 9500056 W CN9500056 W CN 9500056W WO 9601373 A1 WO9601373 A1 WO 9601373A1
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WO
WIPO (PCT)
Prior art keywords
pump
suction
molecular pump
basic
groove
Prior art date
Application number
PCT/CN1995/000056
Other languages
English (en)
Chinese (zh)
Inventor
Jiguo Chu
Original Assignee
Jiguo Chu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiguo Chu filed Critical Jiguo Chu
Priority to AU28786/95A priority Critical patent/AU2878695A/en
Publication of WO1996001373A1 publication Critical patent/WO1996001373A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a molecular pump theory. Background technique
  • the length of the shaft air groove near the shaft is shorter, and the speed of the dragging of the gas molecules is lower.
  • a small working gap is used between the groove wall and the stationary surface of each parallel suction groove. Therefore, the leakage gas in the working gap between the two outside groove walls is concentrated in the suction groove adjacent to the two outside groove walls. The amplitude reduces the effective compression ratio of the suction tank.
  • the object of the present invention is to provide a novel molecular pump with a higher compression ratio and less leakage, and a composite vacuum pump composed of such a pump, other molecular pumps and a rotary mechanical vacuum pump.
  • the molecular pump (referred to as a multi-pull pump) provided in the present invention has at least one set of basic pumping units composed of a plurality of pumping grooves with multiple pumping surfaces connected in parallel.
  • the basic suction unit has a structure similar to that described in Chinese patent 92 1 G 1 3 G (). Fl, and is composed of a moving wheel, a moving seal block, a rotating shaft, a spacer ring, a static wheel, a pump casing and the like.
  • the moving wheel is composed of several parallel suction grooves along the circumferential direction, and the opening of the suction groove is on the circumferential cylindrical surface, or on the cross section, or on the oblique side.
  • the cross section of the suction tank can be rectangular, curved or other shapes. -Insert a moving seal block into the suction tank.
  • the moving seal block consists of a slightly smaller arc-shaped body with a cross section similar to that of the suction tank.
  • the dynamic sealing block is fixed on the spacer ring, or the pump casing, or a stationary part such as a static wheel. Inlet and exhaust ports are provided on both sides of the dynamic seal block. There is less work between the moving seal block and the suction groove wall
  • the invention is characterized by:
  • the width of the suction groove near the shaft is narrow.
  • the above-mentioned basic structure can constitute a set of practically valuable extraction units with multiple operating surfaces.
  • each side of each movable seal block is provided with an air inlet and an exhaust port respectively.
  • the extraction unit should be regarded as a multi-stage extraction unit.
  • Sealing stages can be added on both sides of the suction unit.
  • the movable seal block in the suction tank should be divided into two parts.
  • the isolation space between the two parts of the dynamic seal block is connected to the air inlets of the seal stages on both sides, and the exhaust port of the seal stage is connected to the suction tank.
  • the exhaust port is connected.
  • the sealing stage can adopt various dynamic sealing structures with a certain suction effect, such as a single-slot multi-pull pump (Chinese patent 921H3G0.I), or the same structure as the basic suction unit described above.
  • the sealing level greatly reduces the leakage effect caused by the working gap between the two outer tank walls and the moving seal block, and significantly improves the effective compression ratio of the suction tank.
  • a baffle similar to a stationary blade of a radial turbomolecular pump can be added to the air inlet and the air outlet of the above-mentioned suction unit, thereby further increasing the suction effect.
  • the extraction direction of these baffles should be consistent with the flow direction of the pumped gas.
  • the suction slot opening on the circumferential cylinder is abbreviated as a circumferential multi-pull pump
  • the suction slot opening on the cross section is abbreviated as a radial multiple drag pump.
  • single-stage or multi-stage multi-tow pump suction unit can also be used with other molecular pumps, for example, single-slot multi-tow pump (Chinese patent!) 210 ⁇ 3.0), cylindrical double-tow pump (Chinese patent!
  • the molecular pump proposed by the present invention has relatively high compression.
  • the molecular pump provided by the present invention can be coaxially installed in multiple stages, and can be combined in series and parallel to form a multi-stage molecular pump with excellent performance.
  • the molecular pump proposed by the present invention can also be coaxially installed with other molecular pumps, rotary mechanical vacuum pumps, etc., and combined in series and parallel to form a composite vacuum pump with excellent performance.
  • Figure 1 is a schematic diagram of a single-stage circumferential multi-pull pump.
  • Fig. 2 is a sectional view of the single-stage circumferential multi-pull pump in the direction A-A.
  • Figure 3 is a schematic diagram of a single-stage multi-pull pump with a sealed stage.
  • Fig. 4 is a sectional view of the single-stage multi-pull pump with seal stage in the direction A-A.
  • Fig. 5 is a sectional view of a single-stage multi-pull pump with a sealed stage in the direction of B-B.
  • Fig. 6 is a schematic diagram of a multi-circle multi-pull pump (1).
  • Fig. 7 is a schematic diagram of a multi-circle multi-trailer pump (2).
  • Fig. 8 is a schematic diagram of a perimeter multi-drag pump.
  • Fig. 10 is a cross-sectional view of a multi-pull pump driving wheel.
  • Fig. 11 is a front view of the static wheel of the multi-pull pump.
  • Fig. 12 is a cross-sectional view of the stationary pulley of a radial multi-pull pump. Best Mode of the Invention
  • Embodiment 1 Single-stage circumferential multi-pull pump
  • FIG. 1 This embodiment is shown in FIG. 1, and a cross-sectional view in the A-A direction is shown in FIG. 2.
  • This embodiment is composed of a rotating shaft (1), a moving wheel (2), a moving seal block (3), a spacer ring (4), and a pump casing (5).
  • the moving wheel is provided with a plurality of (two shown in Fig. 1) suction ducts (6) connected in parallel, and the dynamic sealing block ( 3 ) is fixed on the spacer ring (4).
  • the spacer ring (0 may not be used.
  • the dynamic seal block (3) is directly fixed on the pump casing (5).
  • the groove wall (-7) between the adjacent suction grooves and the 3 ⁇ 4 ring (4), or the pump There is a large gap between the shells (5). Generally, the gap is one-tenth to one-third of the slot width.
  • the lower groove wall (8) thereby reducing the groove width at that location.
  • the height of the suction groove is about half the groove depth.
  • Baffles similar to the stationary blades of the radial turbomolecular pump can also be added to the air inlet (lfl) and the exhaust (H).
  • the direction of extraction of these baffles is the same as the direction of the gas being pumped.
  • Embodiment 2 Single-stage multi-pull pump with sealed stage
  • FIG. 3 This embodiment is shown in FIG. 3, and the cross-sectional views in the A-A and B-B directions are shown in FIGS. 4 and 5.
  • This embodiment is similar to the first embodiment, except that a two-stage sealing stage (12) consisting of a single-slot multi-pull pump is added to each side of the suction tank, and a dynamic sealing block (3) of the suction tank is divided into two . Two parts movable separation space between the sealing block (13) via a gas passage (14) on both sides of the sealing stages (I 2) of the intake port (is) are connected.
  • the sealed-stage exhaust port (10 is connected to the exhaust port (11) of the suction tank.
  • the dense (12) can also be other dynamic sealing device with a certain suction effect, such as the multiple described in the first embodiment.
  • the pumping unit is composed of a tow pump.
  • the air inlet (10) and air outlet (11) of the suction tank, and the air inlet (15) and air outlet (16) of the sealed stage can also be added with baffles similar to the stationary blades of the radial turbomolecular pump.
  • the pumping direction of these baffles is consistent with the flow direction of the pumped gas.
  • Embodiment 3 Compound circumferential multi-pull pump (1)
  • stages of multi-pull pumping units with or without a sealing stage are installed coaxially with several stages of single-slot multi-pump pumping units.
  • the port is the suction unit of the circumferential multi-pull pump
  • the exhaust port near the pump is the suction unit of the single-slot multi-pull pump.
  • FIG. 6 is a schematic diagram of a feasible structure.
  • ⁇ In the middle near the pump's air inlet ( ⁇ ) is a set of several sealed stages (1 ⁇ (4 shown in Figure ⁇ )).
  • the exhaust port (27) of the pump is connected in series with several stages ( 2 stages are shown in Fig. 6).
  • the channel between the stages is set on the pump casing, and the interstage channel near the pump exhaust port (27) can also be set on the spacer ring (4).
  • Embodiment 4 Compound peripheral multi-pull pump (2)
  • This embodiment is similar to the third embodiment, except that several stages of coaxial Hoi week molecular pump suction units are added near the exhaust port of the pump. ⁇ '
  • FIG. 7 is a schematic diagram of a feasible structure.
  • ⁇ In the middle near the pump's air inlet ( ⁇ ) is a group of several (with four seals shown in Figure 7) with a sealing stage ().
  • stage 1 is shown in Figure 7 .
  • the channels between the various stages are set on the pump casing, and the inter-stage channels that rely on the pump exhaust port (27) can also be set on the spacer ring ( ⁇ ).
  • Embodiment 5 Multi-pull pump
  • the radial multi-pull pump is composed of a rotating shaft (1), a moving wheel (21), a spacer ( 4 ), a pump casing (5), a static wheel (11), and a dynamic seal block (23).
  • the front view and cross-sectional view of (21) are shown in Figure! And Figure 10 respectively, and the front view and cross-sectional view of static wheel (22) are shown in Figure 11 and Figure 12, respectively.
  • the moving wheel is provided with a plurality of (two shown in Fig. 8) parallel suction grooves with openings in the cross-sectional direction (
  • the groove width of the inner suction groove is narrower than that of the outer suction groove.
  • the clearance between the pulley and the static wheel (22) is large, usually one-tenth to one-third of the groove width.
  • There are several moving seal blocks in each suction tank (two blocks are shown in Fig. 7) (23).
  • the dynamic seal block (2 3 ) is fixed on the static wheel (11), and there is a small working gap between the movable seal block and the wall of the suction groove.
  • the dynamic seal block (23) is provided with air inlets (28) on both sides respectively. And exhaust port (2 ⁇ ). Inside the moving wheel (21), there are several communication air holes (30) near the shaft.
  • Two sets of moving seal blocks (23) divide the suction tank into two sets of suction units.
  • the two gas passages (31) on the static wheel (22) respectively connect the two exhaust ports (29) and the air holes (30), so that the two sets of suction grooves form parallel suction.
  • Baffles similar to the stationary blades of the axial-flow turbomolecular pump can be added to the air inlet () and the exhaust (29), and the direction of extraction of these baffles is the same as the direction of the gas being pumped.
  • the composite vacuum pump is coaxially installed by the above-mentioned various molecular pumps and the rotary mechanical vacuum pump suction unit. It is combined in series and parallel.
  • the intake port near the pump is the suction unit of the molecular pump.
  • the invention is mainly used in the fields of vacuum coating, integrated circuit manufacturing, manufacturing of electric vacuum devices such as electric light sources, kinescopes, accelerators and plasma technology.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

L'invention porte sur une pompe moléculaire munie de canaux d'aspiration d'air parallèles dont la section se rétrécit à proximité de l'arbre du rotor tandis que les canaux voisins sont reliés par des passages larges. Plusieurs unités d'aspiration disposées concentriquement sur une base commune constituent une pompe à plusieurs étages raccordables en série ou en parallèle. En montant les unités d'aspiration à base commune concentriquement avec une autre pompe moléculaire ou une pompe à vide rotative mécanique on obtient un groupe de pompage présentant de bonnes performances. Ladite pompe moléculaire qui, de par sa simplicité de conception, est facile à fabriquer, se caractérise par son taux de compression élevé.
PCT/CN1995/000056 1994-07-06 1995-07-05 Pompe moleculaire a canaux d'aspiration multiples WO1996001373A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU28786/95A AU2878695A (en) 1994-07-06 1995-07-05 Molecular pump with multiple air suction grooves

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN 94108351 CN1115362A (zh) 1994-07-06 1994-07-06 多拖动面分子泵
CN94108351.9 1994-07-06

Publications (1)

Publication Number Publication Date
WO1996001373A1 true WO1996001373A1 (fr) 1996-01-18

Family

ID=5033429

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/CN1995/000056 WO1996001373A1 (fr) 1994-07-06 1995-07-05 Pompe moleculaire a canaux d'aspiration multiples

Country Status (3)

Country Link
CN (1) CN1115362A (fr)
AU (1) AU2878695A (fr)
WO (1) WO1996001373A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032973A1 (fr) * 1997-01-28 1998-07-30 Magnetal Ab Pompe a vide a grande vitesse et a suspension magnetique
EP1081387A2 (fr) * 1999-09-06 2001-03-07 Pfeiffer Vacuum GmbH Pompe à vide
KR100928534B1 (ko) * 2002-12-23 2009-11-24 재단법인 포항산업과학연구원 광섬유 센서를 이용한 변압기 열화진단 장치 및 방법

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB0322889D0 (en) * 2003-09-30 2003-10-29 Boc Group Plc Vacuum pump
CN102889219B (zh) * 2011-07-18 2016-05-11 李晨 盘式分子泵
CN103644118B (zh) * 2013-12-17 2016-02-03 储继国 并联环流泵、组合环流泵、复合环流泵及其抽气机组

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU164912A1 (ru) * А. И. Ващенко , Д. И. Чижов Газовая горелка
SU1265400A1 (ru) * 1985-04-16 1986-10-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Молекул рный вакуумный насос
CN87103982A (zh) * 1987-06-03 1988-12-21 中国科学院北京真空物理实验室 盘形涡轮分子泵
CN2036591U (zh) * 1988-07-26 1989-04-26 中国科学院北京真空物理实验室 一种叶轮结构

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU164912A1 (ru) * А. И. Ващенко , Д. И. Чижов Газовая горелка
SU1265400A1 (ru) * 1985-04-16 1986-10-23 Научно-исследовательский институт прикладной математики и кибернетики при Горьковском государственном университете им.Н.И.Лобачевского Молекул рный вакуумный насос
CN87103982A (zh) * 1987-06-03 1988-12-21 中国科学院北京真空物理实验室 盘形涡轮分子泵
CN2036591U (zh) * 1988-07-26 1989-04-26 中国科学院北京真空物理实验室 一种叶轮结构

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1998032973A1 (fr) * 1997-01-28 1998-07-30 Magnetal Ab Pompe a vide a grande vitesse et a suspension magnetique
EP1081387A2 (fr) * 1999-09-06 2001-03-07 Pfeiffer Vacuum GmbH Pompe à vide
EP1081387A3 (fr) * 1999-09-06 2002-04-17 Pfeiffer Vacuum GmbH Pompe à vide
KR100928534B1 (ko) * 2002-12-23 2009-11-24 재단법인 포항산업과학연구원 광섬유 센서를 이용한 변압기 열화진단 장치 및 방법

Also Published As

Publication number Publication date
CN1115362A (zh) 1996-01-24
AU2878695A (en) 1996-01-25

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